JP2004108947A5 - - Google Patents

Claims (9)

The light from the light source enters the sample through the objective lens,
Discretely changing the relative position between the focusing position of the objective lens and the sample in the direction of the optical axis,
Obtain light intensity information from the sample at each relative position,
Extracting a plurality of light intensity information from the obtained light intensity information at each relative position,
Estimating a maximum light intensity value on a change curve based on the extracted light intensity information and the relative position giving the maximum light intensity value;
Obtaining the estimated maximum light intensity value and the relative position giving the maximum light intensity value as luminance information and height information, respectively;
Adding supplemental information generated based on the plurality of extracted light intensity information to the acquired luminance information and height information;
A height measuring method characterized by the above. In the plurality of extracted light intensity information, if at least one of the light intensity values indicated by each light intensity information is a predetermined light intensity value or belongs to a predetermined light intensity range, the estimation is performed. Without obtaining an arbitrary light intensity value and an arbitrary relative position as the luminance information and height information,
The height measuring method according to claim 1. The predetermined light intensity range is a specific light intensity range from a maximum light intensity value or a minimum light intensity value to a predetermined light intensity value that can be taken by the light intensity value,
The arbitrary light intensity value is a minimum light intensity value in the possible range,
The arbitrary relative position is the minimum value of the height measurement range.
The height measuring method according to claim 2. An objective lens that focuses light from the light source onto the sample;
A moving mechanism for relatively moving the focusing position of the objective lens and the position of the sample along the optical axis direction of the focused light;
A confocal stop disposed at a position conjugate with the focusing position of the objective lens;
A confocal optical measurement device comprising a photodetector for detecting the intensity of light passing through the confocal stop,
A light intensity information from the sample is obtained at each relative position when the relative position between the focusing position of the objective lens and the sample is discretely changed in the optical axis direction of the focused light. Acquisition means;
Extraction means for extracting a plurality of light intensity information from the light intensity information at each relative position acquired by the first acquisition means;
Estimating means for estimating a maximum light intensity value on a change curve based on a plurality of light intensity information extracted by the extracting means and the relative position that gives the maximum light intensity value;
Second acquisition means for acquiring the maximum light intensity value estimated by the estimation means and the relative position giving the maximum light intensity value as luminance information and height information, respectively;
Generating means for generating supplementary information based on a plurality of light intensity information extracted by the extracting means;
Adding means for adding the supplementary information generated by the generating means to the luminance information and height information acquired by the second acquiring means;
A confocal optical measuring device comprising: In the plurality of light intensity information extracted by the extraction means, when at least one of the light intensity values indicated by each light intensity information is a predetermined light intensity value or belongs to a predetermined light intensity range. The estimation unit does not perform the estimation, and the second acquisition unit acquires an arbitrary light intensity value and an arbitrary relative position as the luminance information and height information.
The confocal optical measurement apparatus according to claim 4 . The predetermined light intensity range is a specific light intensity range from a maximum light intensity value or a minimum light intensity value to a predetermined light intensity value that can be taken by the light intensity value,
The arbitrary light intensity value is a minimum light intensity value in the possible range,
The arbitrary relative position is the minimum value of the height measurement range.
The confocal optical measurement device according to claim 5 . Displaying the supplemental information together with the maximum light intensity value estimated by the estimation means acquired as the luminance information and height information by the second acquisition means and a relative position for giving the maximum light intensity value;
The confocal optical measurement apparatus according to claim 4. The arbitrary light intensity value and arbitrary relative position acquired as the luminance information and height information by the second acquisition unit under conditions not estimated by the estimation unit, the luminance information and the arbitrary relative position acquired by the second acquisition unit, and Displaying the maximum light intensity value estimated by the estimating means acquired as height information and a relative position for giving the maximum light intensity value;
The confocal optical measurement apparatus according to claim 5 or 6, The supplementary information is information indicating a reason why an inappropriate value is obtained when any of a plurality of pieces of light intensity information extracted by the extraction unit is determined to be an inappropriate value.
The confocal optical measurement apparatus according to claim 4.