JP2004194424A - Cable supporting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a cable supporting device which connects a cable between a moving unit and a fixed unit in a shortest length while the cable supporting device is used. <P>SOLUTION: The cable supporting device holds a flexible cable connected at its one end to the moving unit which moves in a two-dimensional direction on a plane and connected at the other end to the fixed unit. In the cable supporting device, the one end of the cable is connected to the moving unit via a first rotary hinge, and the other end of the cable is connected to the fixed unit via a second rotary hinge. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a platen fixed horizontally and a surface motor or the like having a slider whose position is controlled by moving a work area on an upper surface thereof in a two-dimensional direction in X and Y directions. The present invention relates to an improvement of a cable support device for bundling and holding various cables connecting a slider and a slider forming a moving portion.
[0002]
[Prior art]
A surface motor to which the present invention is applied is used in a semiconductor manufacturing apparatus such as a prober, and its position control technology is disclosed in detail in a patent document which is a prior application of the applicant.
[0003]
The outline of the surface motor and the configuration of the conventional cable support device will be described with reference to the plan view of FIG. Reference numeral 1 denotes a surface motor, and 2 denotes a platen fixed horizontally. Grid-shaped teeth are formed at a constant pitch along the X-axis direction and the Y-axis direction of this work area.
[0004]
Reference numeral 3 denotes a slider that forms a moving unit, on which an object (for example, an LSI to be inspected) whose position is controlled by sliding two-dimensionally in the X direction and the Y direction on the work area of the platen 2 is mounted. Although not shown, an air injection means for floating the moving unit 3 on the upper surface of the platen 2 by a small distance is provided.
[0005]
An X-axis motor that has teeth formed at a constant pitch along the X-axis direction in the moving unit 3 and generates magnetic attraction between the teeth and the teeth on the upper surface of the work area to move the moving unit in the X-axis direction. An X-axis sensor mounted on the X-axis motor for detecting the position of the moving section in the X-axis direction; and an X-axis control for feedback-controlling the position of the moving section in the X-axis direction based on the detection position of the X-axis sensor. The unit is built-in. The Y-axis also includes a Y-axis motor, a Y-axis sensor, and a Y-axis control unit.
[0006]
Reference numeral 4 denotes a fixed portion provided outside the work area of the platen 1. The fixed portion is used as an anchor to connect an electric system cable for supplying an electric signal, electric power to the moving portion 3, and a tube for supplying compressed air for floating. Connected from device. These cables are not shown in the figure.
[0007]
Reference numeral 5 denotes a cable support device, which bundles and holds various cables connecting the fixed part 4 and the slider forming the moving part 3 in its own hollow interior. The role of the cable support device is to guide the connected cables, tubes, and the like so that they do not become entangled, caught, or come into contact with the upper surface of the work area of the platen 2 with movement.
[0008]
The cable support device 5 is formed of a flexible member having a U-shaped curved hollow portion as shown in the figure, one end 5a of which is fixed to a slider forming the moving portion 3, and the other end 5b is a fixed portion. 4 is fixed.
[0009]
FIG. 3 is a side view showing the configuration of a conventional cable support device. This cable support device is basically used to form a U-shape in the vertical direction and to move two-dimensionally in the vertical direction on the paper.
[0010]
The cable support device 5 includes a plurality of bear members 51, 52,... 5n each having a hollow portion connected and connected in a chain shape. The bear member 51 at one end is fixed to the moving unit 3, and the bear member at the other end. The member 5n is fixed to the fixing part 4. The end fixing of the cable support device is fixed so that the cable is parallel to the fixing surface. The connecting portion between the bear members can rotate to the U-shaped curved side, but has a stopper function of preventing rotation to the opposite side.
[0011]
When such a cable supporting device is used in a direction in which a U-shape is formed in a horizontal direction, a cable connecting to a slider that freely moves two-dimensionally on a horizontal plane like a surface motor illustrated in FIG. 2 can be used. Can be used effectively.
[0012]
[Patent Document 1]
JP 2000-065970 "XY stage"
[0013]
[Problems to be solved by the invention]
[0014]
Generally, when it is necessary to supply an electric signal, an electric power, compressed air, or the like to a moving unit that moves on a plane, there is a problem in processing the cable. The simplest countermeasure is to lift the cable near the center of the cable from above. However, it is often impossible to achieve this with applications such as devices because the upper part of the working area of the moving unit must be free.
[0015]
There is also a processing method like a bellows or a magic hand. However, it is a fact that the radius of curvature of the cable is small, so that it cannot be applied to a thick cable that requires a large current, an air tube that cannot be bent, and the like.
[0016]
Therefore, use of the cable support device shown in FIG. 3 is effective. However, when a product originally intended for two-dimensional movement in the vertical direction is used for two-dimensional movement in the horizontal direction, the end portions are fixed parallel to the fixing surface, so that the straight portions La and Lb that are not curved are placed at both ends. It is necessary to increase the cable length (cable support device) required to move the XY plane.
[0017]
For this reason, when the slider forming the moving part 3 moves to the end of the working area, the cable supporting device has a drawback that it protrudes largely outside the working area, and this is realized in a case where there is not enough space in the apparatus. Impossible.
[0018]
Increasing the length of the cable support device also increases the length of the cable to be held, so that the weight of the cable support device causes a problem that the tip of the U-shape is lowered and comes into contact with the upper surface of the platen 2.
[0019]
When the cable and the cable support device are long, the inertial mass of the portion other than the moving portion becomes large, which causes disturbance to the positioning accuracy of the moving portion.
[0020]
SUMMARY OF THE INVENTION It is an object of the present invention to provide a cable support device that can connect a cable length between a moving unit and a fixed unit with a minimum length while using the cable support device.
[0021]
[Means for Solving the Problems]
The configuration of the present invention for achieving such an object is as follows.
(1) In a cable support device that has one end connected to a moving unit that moves in a two-dimensional direction on a plane and the other end holding a flexible cable connected to a fixed unit,
A cable support, wherein one end of the cable and the moving part are connected via a first rotating hinge part, and the other end of the cable and the fixed part are connected via a second rotating hinge part. apparatus.
(2) The cable support device according to (1), wherein the first and second rotating hinge portions are formed of hinge members.
(3) The cable support device according to (1), wherein the first and second rotating hinge portions are formed of a leaf spring member.
(4) The cable according to any one of (1) to (3), wherein the first and second rotating hinge portions include a stopper member that prevents the cable supporting device from rotating in a direction opposite to a bending direction. Support device.
(5) The cable support device according to any one of (1) to (4), wherein the cable support device is formed of a connected body of a plurality of bear members.
(6) The cable support device according to any one of (1) to (4), wherein the cable support device is formed of a hollow flexible tube.
(7) The cable support according to any one of (1) to (6), wherein the plane is a platen surface of a surface motor, and the moving unit is a slider whose position is controlled on the platen. apparatus.
[0022]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a plan view of a surface motor to which the cable support device of the present invention is applied. The same elements as those described in the conventional example of FIG.
[0023]
The configuration of the present invention is characterized in that one end 5a of the cable support device 5 and the moving portion 3 are connected via the first rotating hinge portion 6, and the other end 5b of the cable support device and the fixing portion 4 are connected to the second portion. The point is that the connection is made via the rotating hinge 7.
[0024]
By the action of the rotating hinges provided at both ends of the cable support device, it is not necessary to provide a straight portion for making the fixed end of the cable support device parallel as in the conventional structure, and both ends of the cable support device are inside the fixed end. , And the length of the cable support device can be made shorter than in the conventional structure.
[0025]
As a result, the minimum connection cable length required when the moving unit 3 moves within the work area of the platen 1 can be reduced. According to the verification, the cable length could be shortened by about 30% as compared with the standard installation using the conventional structure.
[0026]
A configuration in which a hinge member is used as the first rotating hinge 6 and the second rotating hinge 7 will be described with reference to the embodiment of FIG.
In the first rotary hinge portion 6, reference numeral 6a denotes a rotary shaft, 6b and 6c are hinges supported by the rotary shaft and rotatable freely with each other, one 6b is fixed to the moving portion 3, and the other 6c is a cable support device 5 Is fixed to one end 5a.
[0027]
Reference numeral 6d denotes a stopper member fixed to the side wall of the moving portion 3, which restricts the rotation range of the hinge 6c so that the cable support device 5 cannot bend in the opposite direction to the U-shaped side.
[0028]
In the second rotating hinge 7, 7a is a rotating shaft, 7b and 7c are hinges supported by the rotating shaft and freely rotatable with each other, one 7b is fixed to the fixed portion 4, and the other 7c is a cable supporting device 5 Is fixed to the other end 5b.
[0029]
Reference numeral 7d denotes a stopper member fixed to the side wall of the fixing portion 3, which restricts the rotation range of the hinge 7c so that the cable support device 5 cannot be bent to the side opposite to the U-shaped side.
[0030]
In the embodiment, the example in which the hinge members are used as the first rotating hinge portion 6 and the second rotating hinge portion 7 has been described. However, a member having a similar rotation supporting action, for example, a leaf spring member or the like can be applied. is there.
[0031]
In the embodiment, the configuration in which a plurality of bare members are connected as shown in FIG. 3 as the cable support device 5 has been described, but it is also possible to realize the cable support device 5 with a hollow flexible tube.
[0032]
In the embodiment, the application target of the present invention is described with a surface motor. However, the present invention is not limited to this, and the position of the moving unit is two-dimensionally controlled on a planar work area. Can be applied.
[0033]
【The invention's effect】
As is clear from the above description, according to the present invention, the following effects can be expected.
(1) Even when the moving part comes to the end of the working area, the amount of the cable supporting device protruding outside the slider working area can be reduced.
(2) Since the cable and the cable support device are shortened, inertial mass other than the moving part can be reduced, and disturbance to the positioning accuracy of the moving part can be reduced.
[0034]
(3) An inexpensive component such as a commercially available cable support device can be advantageously used.
(4) With the conventional standard fixing method, if the length exceeds 1 m, drooping will be large and wear will increase. However, since the cable length can be shortened by about 30%, it can be used in a larger working area. It can be used for cable processing.
[Brief description of the drawings]
FIG. 1 is a plan view showing a configuration of a surface motor to which a cable supporting device according to the present invention is applied.
FIG. 2 is a plan view showing a configuration of a surface motor to which a conventional cable supporting device is applied.
FIG. 3 is a side view showing the configuration of a commercially available cable support device.
[Explanation of symbols]
1-side motor 2 Platen 3 Moving unit 4 Fixed unit 5 Cable support device 6 First rotating hinge unit 7 Second rotating hinge unit

Claims (7)

One end is connected to a moving unit that moves in a two-dimensional direction on a plane, and the other end is a cable supporting device that holds a flexible cable connected to a fixed unit.
A cable support, wherein one end of the cable and the moving part are connected via a first rotating hinge part, and the other end of the cable and the fixed part are connected via a second rotating hinge part. apparatus. The cable support device according to claim 1, wherein the first and second hinges are formed of hinge members. The cable support device according to claim 1, wherein the first and second rotating hinge portions are formed of a leaf spring member. 4. The cable support device according to claim 1, wherein the first and second rotation hinge portions include a stopper member that prevents the cable support device from rotating in a direction opposite to a bending direction. 5. The cable support device according to any one of claims 1 to 4, wherein the cable support device is formed of a connected body of a plurality of bear members. The cable support device according to any one of claims 1 to 4, wherein the cable support device is formed of a hollow flexible tube. 7. The cable support device according to claim 1, wherein the plane is a platen surface of a surface motor, and the moving unit is a slider whose position is controlled on the platen.

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