JP2004077469A - Degradation level measurement system and measurement device for material - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a degradation level measurement system that can nondestructively measure a degradation level of an insulating material or structural material of equipment without stopping operation of the equipment. <P>SOLUTION: An optical fiber irradiates an object surface to be measured with at least two types of monochromatic light, and an optical fiber guides reflected light to a light quantity measurement part. A degradation level computation part computes a reflection absorbance A<SB>λ</SB>of each wavelength, then computes a reflection absorbance difference ΔA<SB>λ</SB>or a reflection absorbance ratio A<SB>λ</SB>' between the wavelengths, and next compares it with an output from a function generation part prestoring a relation between a degradation level of the object to be measured and a reflection absorbance difference or reflection absorbance ratio between wavelengths, to determine a degradation level. <P>COPYRIGHT: (C)2004,JPO

Description

【００２３】
ここで、ΔＥは熱劣化のみかけの活性化エネルギー（Ｊ／ｍｏｌ）、Ｒは気体定数（Ｊ／Ｋ／ｍｏｌ）、Ｔは熱劣化の絶対温度（Ｋ）、ｔは劣化時間（ｈ）である。樹脂やオイル等のΔＥは、数種の劣化温度に対する反射吸光度差ΔＡ_{λ １ λ ２}の変化をアレニウスプロットすることによって容易に算出できる。
【００２４】
さらに、予め求めておいた該樹脂や該オイル等を用いた機器の寿命点における換算時間をθ_０　とすれば、実測から求めた換算時間θとの差Δθ（＝θ_０−θ）が余寿命に相当する換算時間となり、劣化度判定の尺度となる。即ち、余寿命Δθ（ｈ）は（７）式で表される。
【００２５】
【数１４】

【００２６】
（７）式より、時間ｔ以降の機器の使用温度条件が定まれば、余寿命の時間　Δｔ（＝ｔ_０−ｔ）を求めることができる。
【００２７】
【発明の実施の形態】
以下、実施例を用いて本発明を詳細に説明する。
【００２８】
（実施例１）
図１は劣化度測定システムの構成を示すブロック図である。図１において、劣化度演算部１は測定の手順に沿って自動的に切替制御部２に切替部３，４，５の切替命令信号を送信している。まず、各波長に対するレファレンス光量を測定する。レファレンス光ファイバ７は測定用の光ファイバ（照射用光ファイバ９＋受光用光ファイバ１３）と同一長さを有する。光源６から発生したピーク波長λ１の単色光は、切替部３から切替部４を通り、さらにレファレンス光ファイバ７から切替部５を通り光量測定部８に伝送される。光量測定部８では光源６からのピーク波長λ１の単色光のレファレンス光量Ｉ_１　を計測し、劣化度演算部１に測定値を出力する。劣化度演算部１では光源６のレファレンス光量Ｉ_１　を記憶する。同様にして、光源１４から発生したλ１とは相異なるピーク波長λ２の単色光を用いて同じ操作が行われ、劣化度演算部１において光源１４のレファレンス光量Ｉ_２　が記憶される。次に、絶縁材料表面の反射光量を測定する。光源６からのピーク波長λ１の単色光は、切替部３から切替部４を通り、さらに照射用光ファイバ９を伝送して反射光測定部１０内で絶縁材料１１の表面に照射される。反射光測定部１０は、図２に示したように外部の迷光を遮断する構造を有している。絶縁材料１１の表面からの反射光１２を受光用光ファイバ１３が受け、その伝送光は切替部５を通り光量測定部８に送られ、反射光量Ｉ_１′　が測定され劣化度演算部１に結果Ｉ_１′　が出力される。劣化度演算部１では、λ１における反射率　　Ｒ_{λ １}（＝１００×Ｉ_１′／Ｉ_１）が算出，記憶される。同様にして、光源１４から発生したλ１とは相異なるピーク波長λ２の単色光を用いて同じ操作が行われ、劣化度演算部１においてλ２における反射率Ｒ_{λ ２}（＝１００×Ｉ_２′／Ｉ_２）が算出，記憶される。このようにして、波長λ１と波長λ２における反射率が得られるので、劣化度演算部１において２波長間の反射吸光度差ΔＡ_λ（＝Ａ_{λ １}−Ａ_{λ ２}）が求められる。関数発生部１５には、図４に示したような絶縁材料の劣化度に対応した反射吸光度差がマスターカーブとして予め記憶されており、劣化度演算部１に出力する。この記憶された関数値と実測の反射吸光度差ΔＡ_λから劣化度演算部１で比較演算して劣化度を判定し、外部（図示省略）のプリンタ等に測定結果として出力する。なお、劣化度判定のための演算のフローチャートを図１０に示した。
【００２９】
（実施例２）
図６には３波長（λ１〜λ３）を同時に用いた劣化度測定システムの構成図を示す。３波長を１本の光ファイバ中で伝送しても、光には干渉性がないのでシステムは良好に動作する。光量測定部８にはそれぞれの波長に対応したフィルタが組み込まれており、フィルタを時分割で動作させることにより各波長での光量を瞬時に測定できる。それぞれの波長の光は光結合器１６を介して照射用光ファイバ９中に同時に送られる。実施例１と同様に各波長に対するレファレンス光量及び反射光量を測定する。絶縁材料１１の表面からの反射光１２を受光用光ファイバ１３が受け、その伝送光は光量測定部８に送られ、反射光量が測定され劣化度演算部１に結果が出力される。劣化度演算部１では、波長λ１〜波長λ３における反射率Ｒ_{λ １}〜Ｒ_{λ ３}が算出，記憶される。このようにして、波長λ１〜波長λ３における反射率が得られるので、劣化度演算部１において３波長間のデータのうち任意の２波長間の反射吸光度差ΔＡ_λ（＝Ａ_λ−Ａ_λ′）が求められる。関数発生部１５には、図４に示したような絶縁材料の劣化度に対応した反射吸光度差がマスターカーブとして予め記憶されており、劣化度演算部１に出力する。この記憶された関数値と実測の反射吸光度差ΔＡ_λから劣化度演算部１で劣化度を比較演算して判定し、外部に測定結果として出力する。
【００３０】
（実施例３）
図７には白色光源（ハロゲンランプ）を光源に用いた劣化度測定システムの構成図を示す。白色光源（ハロゲンランプ）を光源に用いても、システムは良好に動作する。光量測定部８には干渉フィルタからなる分光器が組み込まれており、各波長（５００〜９００ｎｍ）での光量を瞬時に測定できる。実施例１と同様に各波長（５００〜９００ｎｍ）に対するレファレンス光量及び反射光量を測定する。絶縁材料１１の表面からの反射光１２を受光用光ファイバ１３が受け、その伝送光は光量測定部８に送られ、反射光量が測定され劣化度演算部１に結果が出力される。劣化度演算部１では、波長５００〜９００ｎｍにおける反射率Ｒ_５００〜Ｒ_９００　が連続的に算出，記憶される。このようにして、波長５００〜９００　ｎｍにおける反射率が得られるので、劣化度演算部１において任意の２波長間の反射吸光度差ΔＡ_λ（＝Ａ_λ−Ａ_λ′）が求められる。関数発生部１５には、図４に示したような絶縁材料の劣化度に対応した反射吸光度差がマスターカーブとして予め記憶されており、劣化度演算部１に出力する。この記憶された関数値と実測の反射吸光度差ΔＡ_λから劣化度演算部１で比較演算して劣化度を判定し、外部に測定結果として出力する。
【００３１】
なお、前記各実施例においては、固体の絶縁材料の場合について説明したが、オイル等の液体の材料についても同様にして劣化度を測定することができる。
【００３２】
（実施例４）
図８は劣化度測定装置の機能構成を示すブロック図である。図８において、劣化度演算部１はハードディスクユニット１５が内蔵されたノートブック型パーソナルコンピュータを用いている。まず、各波長に対するレファレンス光量を測定する。レファレンス光量は絶縁材料１１の位置に酸化アルミナ板を設置して測定した。酸化アルミナ板を用いないで白色普通紙やクロームメッキされた金属板等を用いても一向に差し支えない。光源６から発生したピーク波長６６０ｎｍの単色光は、２ヶのプラスチック光結合器１６を通り、照射用光ファイバ９に導かれ、酸化アルミナ板上で反射される。この反射光は受光用光ファイバ１３を通り光量測定部８に伝送される。光量測定部８はフォトダイオードを内蔵した光パワーメータを用いている。光量測定部８では光源６からのピーク波長６６０ｎｍの単色光のレファレンス光量Ｉ_１　を計測し、劣化度演算部１に測定値をピンジャックから電圧値としてアナログ出力する。劣化度演算部１のパーソナルコンピュータはアナログ出力データを直接入力することはできないので、１２ビットＡ／Ｄ　（アナログ／デジタル）変換器１９を拡張コネクタに接続してある。１２ビットＡ／Ｄ変換器１９は５ボルトの電圧値を４０９６（＝２^１２）分割して取り込む能力を有する。劣化度演算部１では、光源６のレファレンス光量Ｉ_１　をメモリ上に記憶する。同様にして、光源１４から発生したピーク波長７８０ｎｍの単色光を用いて同じ操作が行われ、劣化度演算部１において光源１４のレファレンス光量Ｉ_２　が記憶される。同様にして、光源１８から発生したピーク波長８５０ｎｍの単色光を用いて同じ操作が行われ、劣化度演算部１において光源１８のレファレンス光量Ｉ_３　が記憶される。次に、絶縁材料表面の反射光量を測定する。光源６からのピーク波長６６０ｎｍの単色光は、２ヶのプラスチック光結合器１６を通り、照射用光ファイバ９に導かれ、反射光測定部１０内で絶縁材料１１の表面に照射される。反射光測定部１０は、図２に示したように外部の迷光を遮断する構造を有している。絶縁材料１１の表面からの反射光を受光用光ファイバ１３が受け、その伝送光は光量測定部８に送られ、反射光量Ｉ_１′　が測定され劣化度演算部１に結果Ｉ_１′　が出力される。劣化度演算部１では、６６０ｎｍにおける反射率Ｒ_６６０（＝１００×Ｉ_１′／Ｉ_１）が算出、メモリ上に記憶される。同様にして、光源１４から発生したピーク波長７８０ｎｍの単色光を用いて同じ操作が行われ、劣化度演算部１において７８０ｎｍにおける反射率Ｒ_７８０（＝１００×Ｉ_２′／Ｉ_２　）が算出、メモリ上に記憶される。同様にして、光源１８から発生したピーク波長８５０ｎｍの単色光を用いて同じ操作が行われ、劣化度演算部１において８５０ｎｍにおける反射率Ｒ_８５０（＝１００×Ｉ_３′／Ｉ_３）が算出、メモリ上に記憶される。このようにして、６６０，７８０，８５０ｎｍにおける反射率が得られるので、劣化度演算部１において任意の２波長間の反射吸光度差ΔＡ_λ
（＝Ａ_{λ １}−Ａ_{λ ２}）が求められる。ハードディスクユニットからなる関数発生部１５には、図４に示したような絶縁材料の劣化度に対応した反射吸光度差がマスターカーブとして予め記憶されており、劣化度演算部１に出力する。この記憶された関数値と実測の反射吸光度差ΔＡ_λの値から劣化度演算部１で比較演算して劣化度を判定し、外部（図示省略）のプリンタ等に測定結果として出力する。
【００３３】
なお、本実施例では３波長を用いた材料の劣化度測定装置を説明したが、２波長のみでも測定装置は良好に動作する。
【００３４】
（実施例５）
実施例１と同様の劣化度測定システムを用いて、絶縁材料１１の波長λ１と波長λ２における反射率を得た後、劣化度演算部１において２波長間の反射吸光度比Ａ_λ′（＝Ａ_{λ １}／Ａ_{λ ２}）を求める。関数発生部１５には、図９に示したような絶縁材料の劣化度に対応した反射吸光度比がマスターカーブとして予め記憶されており、劣化度演算部１に出力する。この記憶された関数値と実測の反射吸光度比Ａ_λ′から劣化度演算部１で比較演算して劣化度を判定し、外部（図示省略）のプリンタ等に測定結果として出力する。
【００３５】
（実施例６）
実施例２と同様の劣化度測定システムを用いて、絶縁材料１１の波長λ１〜波長λ３における反射率を得た後、劣化度演算部１において３波長間のデータのうち任意の２波長間の反射吸光度比Ａ_λ′（＝Ａ_{λ １}／Ａ_{λ ２}）を求める。関数発生部１５には、図９に示したような絶縁材料の劣化度に対応した反射吸光度比がマスターカーブとして予め記憶されており、劣化度演算部１に出力する。この記憶された関数値と実測の反射吸光度比Ａ_λ′から劣化度演算部１で劣化度を比較演算して判定し、外部に測定結果として出力する。
【００３６】
（実施例７）
実施例３と同様の劣化度測定システムを用いて、絶縁材料１１の波長５００〜９００ｎｍにおける反射率を得た後、劣化度演算部１において任意の２波長間の反射吸光度比Ａ_λ′（＝Ａ_{λ １}／Ａ_{λ ２}）を求める。関数発生部１５には、図９に示したような絶縁材料の劣化度に対応した反射吸光度比がマスターカーブとして予め記憶されており、劣化度演算部１に出力する。この記憶された関数値と実測の反射吸光度比Ａ_λ′から劣化度演算部１で比較演算して劣化度を判定し、外部に測定結果として出力する。
【００３７】
なお、前記各実施例においては、固体の絶縁材料の場合について説明したが、オイル等の液体の材料についても同様にして劣化度を測定することができる。
【００３８】
（実施例８）
実施例４と同様の劣化度測定装置を用いて、絶縁材料１１の６６０，７８０，８５０ｎｍにおける反射率を得た後、劣化度演算部１において任意の２波長間の反射吸光度比Ａ_λ′（＝Ａ_{λ １}／Ａ_{λ ２}）を求める。ハードディスクユニットからなる関数発生部１５には、図９に示したような絶縁材料の劣化度に対応した反射吸光度比がマスターカーブとして予め記憶されており、劣化度演算部１に出力する。この記憶された関数値と実測の反射吸光度比Ａ_λ′の値から劣化度演算部１で比較演算して劣化度を判定し、外部（図示省略）のプリンタ等に測定結果として出力する。
【００３９】
なお、本実施例では３波長を用いた材料の劣化度測定装置を説明したが、２波長のみでも測定装置は良好に動作する。
【００４０】
（実施例９）
図１１は厚さの入力手段２０を有する劣化度測定システムの構成を示すブロック図である。図１１において、劣化度演算部１は測定の手順に沿って自動的に切替制御部２に切替部３，４，５の切替命令信号を送信している。まず、各波長に対するレファレンス光量を測定する。レファレンス光ファイバ７は測定用の光ファイバ（照射用光ファイバ９＋受光用光ファイバ１３）と同一長さを有する。光源６から発生したピーク波長λ１の単色光は、切替部３から切替部４を通り、さらにレファレンス光ファイバ７から切替部５を通り光量測定部８に伝送される。光量測定部８では光源６からのピーク波長λ１の単色光のレファレンス光量Ｉ_１　を計測し、劣化度演算部１に測定値を出力する。劣化度演算部１では光源６のレファレンス光量Ｉ_１　を記憶する。同様にして、光源１４から発生したλ１とは相異なるピーク波長λ２の単色光を用いて同じ操作が行われ、劣化度演算部１において光源１４のレファレンス光量Ｉ_２　が記憶される。次に、絶縁材料表面の反射光量を測定する。光源６からのピーク波長λ１の単色光は、切替部３から切替部４を通り、さらに照射用光ファイバ９を伝送して反射光測定部１０内で絶縁材料１１の表面に照射される。反射光測定部１０は、図２に示したように外部の迷光を遮断する構造を有している。絶縁材料１１の表面からの反射光１２を受光用光ファイバ１３が受け、その伝送光は切替部５を通り光量測定部８に送られ、反射光量Ｉ_１′が測定され劣化度演算部１に結果Ｉ_１′が出力される。劣化度演算部１では、λ１における反射率Ｒ_{λ １}（＝１００×Ｉ_１′／Ｉ_１）が算出，記憶される。同様にして、光源１４から発生したλ１とは相異なるピーク波長λ２の単色光を用いて同じ操作が行われ、劣化度演算部１においてλ２における反射率Ｒ_{λ ２}（＝１００×Ｉ_２′／Ｉ_２）が算出，記憶される。このようにして、波長λ１と波長　λ２における反射率が得られるので、劣化度演算部１において２波長間の反射損失差ΔＬ_λ（＝Ｌ_{λ １}−Ｌ_{λ ２}）が求められる。関数発生部１５には、図１２に示したような絶縁材料の劣化度に対応した反射損失差がマスターカーブとして予め記憶されており、劣化度演算部１に出力する。この記憶された関数値と実測の反射損失差ΔＬ_λから劣化度演算部１で比較演算して劣化度を判定し、外部（図示省略）のプリンタ等に測定結果として出力する。図１３には透過率５０％の絶縁皮膜について、厚さ補正の有無によるデータのバラツキの様子を示すグラフを示した。図１３において、ａは厚さ補正なしのプロット、ｂは厚さ補正ありのプロットを示す。厚さ補正によってデータのバラツキが大幅に低減されたことがわかる。
【００４１】
【発明の効果】
本発明によれば、実働中の機器の運転を停止することなく、機器に使用されている絶縁材料や構造材料の劣化度を非破壊で測定できる。さらに、表面が塵芥等で汚損した被測定物、あるいは凹凸を有する被測定物の場合にも適用できる劣化度測定システムを得ることが可能となる。
【図面の簡単な説明】
【図１】実施例１の劣化度測定システムの構成を示すブロック図。
【図２】実施例１の光ファイバ測定端部を示す模式斜視図。
【図３】絶縁材料の反射吸光度スペクトルの例。
【図４】劣化度判定の基準となる反射吸光度差マスターカーブの一例。
【図５】表面汚損の有無と反射吸光度スペクトルの関係を示すグラフ。
【図６】実施例２の劣化度測定システムの構成を示すブロック図。
【図７】実施例３の劣化度測定システムの構成を示すブロック図。
【図８】実施例４の劣化度測定装置の構成を示すブロック図。
【図９】劣化度判定の基準となる反射吸光度比マスターカーブの一例。
【図１０】劣化度判定のための演算のフローチャート図。
【図１１】実施例９の劣化度測定システムの構成を示すブロック図。
【図１２】劣化度判定の基準となる反射損失差マスターカーブの一例。
【図１３】透過率５０％の絶縁皮膜についての厚さ補正の有無を示すグラフ。
【符号の説明】
１…劣化度演算部、２…切替制御部、３，４，５…切替部、６…光源（波長　λ１）、７…レファレンス光ファイバ、８…光量測定部、９…照射用光ファイバ、１０…反射光測定部、１１…絶縁材料、１２…反射光、１３…受光用光ファイバ、１４…光源（波長λ２）、１５…関数発生部、１６…光結合器、１７…光源（ハロゲンランプ）、１８…光源（８５０ｎｍ）、１９…１２ビットＡ／Ｄ変換器、２０…厚さの入力手段。[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a material deterioration degree measuring system and a measuring device capable of non-destructively measuring the deterioration degree of an insulating material or a structural material used in an apparatus without stopping the operation of the operating apparatus.
[0002]
[Prior art]
As a non-destructive measurement system for evaluating the degree of deterioration of an insulating material or a structural material of a rotating electric machine or the like, as disclosed in Patent Document 1 below, irradiation light guided by an optical fiber from a white standard light source is used as an insulating material. A diagnostic that reflects light from a sensor unit made of the same material, detects the reflected light through a light-receiving optical fiber, and performs colorimetric calculation based on chromaticity or chromaticity difference based on the L * a * b * color system. A device has been proposed. Here, L * represents brightness by a lightness index, a * and b * are called chromatic indices, and represent chromaticity (hue and saturation).
[0003]
Further, as described in Patent Document 2 below, irradiation light guided by an optical fiber from a white standard light source is transmitted through a sensor portion made of the same material as an insulating material, and the transmitted light is received by a light receiving light. A colorimetric operation diagnostic device based on chromaticity or a chromaticity difference based on an L * a * b * color system based on a transmitted light system that detects light through a fiber has also been proposed.
[0004]
[Patent Document 1]
JP-A-64-84162
[Patent Document 2]
JP-A-3-226651
[0005]
[Problems to be solved by the invention]
In the above-described conventional technology, it is necessary to embed an irradiation optical fiber, a light receiving optical fiber, and a sensor unit in advance in an insulating layer of the device at the time of manufacturing the device such as a rotating electric machine. There was an essential problem that it could not be applied to equipment.
[0006]
Furthermore, in the colorimetric calculation method based on the chromaticity based on the L * a * b * color system or the reflected light based on the chromaticity difference, the measured object whose surface is contaminated by dust or the like, or the measured object having irregularities. Has a problem that an accurate value cannot be obtained because the influence of the fluctuation of the absolute reflected light amount is large.
[0007]
An object of the present invention is to solve the above-described problems and to measure non-destructively the degree of deterioration of insulating materials and structural materials used in equipment without particularly stopping the operation of the equipment during operation. A measurement system and a measurement device are provided.
[0008]
[Means for Solving the Problems]
The present inventors have studied the relationship between the degree of degradation of resin and oil and the optical properties, and as a result, can determine the degree of degradation from the change in surface reflected light intensity of resin and oil due to thermal degradation, and the surface is The present inventors have found a deterioration degree measurement system that can be applied to a measurement object contaminated with dust or the like, a measurement object having irregularities, or a measurement object having translucency, and have reached the present invention. That is, the gist of the present invention is as follows.
[0009]
(1) Irradiation light from at least two types of monochromatic light sources having different wavelengths is guided by an irradiation optical fiber and irradiates the surface of an object to be measured, and reflected light from the surface of the object is reflected by an optical fiber for light reception. It is led to a light quantity measuring section, and a reflection degree (A) at each wavelength is obtained from an output from the light quantity measuring section in a deterioration degree calculating section._λ) Is calculated by the equation (1), and the reflection absorbance difference (ΔA) between the wavelengths is calculated._λ) Or reflection absorbance ratio (A_λ′) Is calculated by the equation (2) or (3), and the output from the function generating unit in which the relationship between the degree of deterioration of the object to be measured and the reflection absorbance difference between each wavelength or the reflection absorbance ratio is stored in advance. Are compared to determine the degree of deterioration.
[0010]
(Equation 10)
A_λ= -Log (R_λ/ 100) ... (1)
ΔA_λ= A_{λ 1}-A_{λ 2}(However, λ1 <λ2) ... (2)
A_λ'= A_{λ 1}/ A_{λ 2}(However, λ1 <λ2) ... (3)
(The reflectance of the DUT at wavelength λ (nm) is R_λ(%)
(2) At least two types of monochromatic light sources having different wavelengths, an optical coupler for guiding the light source light to an irradiation optical fiber, an irradiation optical fiber for irradiating the light source light to the surface of the object to be measured, and A light receiving optical fiber that receives reflected light from the surface of the object and guides the reflected light to the light amount measuring unit; a light amount measuring unit that detects reflected light intensity at each of the wavelengths and externally outputs a measured value as an electric signal; Absorbance at each wavelength from the output value from the section
(A_λ) Is calculated by the above equation (1), and the reflection absorbance difference (ΔA) between the wavelengths is calculated._λ) Or reflection absorbance ratio (A_λ′) Is calculated by the above equation (2) or (3), and further output from a function generator storing the relationship between the degree of deterioration of the object to be measured and the difference in reflection absorbance between each wavelength or the ratio of reflection absorbance. And a deterioration degree calculating unit for judging the degree of deterioration by comparing and calculating the degree of deterioration.
[0011]
As the monochromatic light used as the light source, an LED having a peak wavelength at a wavelength of 660 to 850 nm is easily available, and has a long life and stable performance. In particular, LED light sources of 660, 780, 800, 820, 830, and 850 nm are suitable. In the case of a light source having a wavelength outside the above range, the detector (light amount measuring unit) may be in an overrange while the degree of deterioration of the object to be measured is relatively small, and photometry may not be possible. When the object to be measured is originally a highly transparent acrylic resin, polycarbonate resin, or the like, it is more preferable to use light having a wavelength of 800 nm or less, such as 660, 780, or 800 nm. On the other hand, 780, 800, 820, 830, 780, 800, 820, 830, etc. are used for alkyd resins, unsaturated polyester resins, epoxy resins that quickly turn black, or opaque resins containing pigments, etc. It is more preferable to use a wavelength in the near infrared region such as 850 nm.
[0012]
In the present invention, the irradiation optical fiber and the light receiving optical fiber do not need to be embedded in the device in advance, so that these optical fibers are not particularly required to have their own heat resistance. A plastic optical fiber can be used, which is advantageous in improving the light receiving ability.
[0013]
(3) Irradiation light from a halogen lamp for irradiating continuous white light is guided through an irradiation optical fiber to irradiate the surface of an object to be measured, and reflected light from the surface of the object is reflected by a spectroscope using an optical fiber for light reception. To the light quantity measuring unit having the light, and the reflection absorbance (A) at each wavelength from the output from the light quantity measuring unit in the deterioration degree calculating unit._λ) Is calculated by equation (1), and then the reflection absorbance difference (ΔA) between any two wavelengths is calculated._λ) Or reflection absorbance ratio (A_λ′) Is calculated by the equation (2) or (3), and the output from the function generating unit in which the relationship between the degree of deterioration of the object to be measured and the reflection absorbance difference between each wavelength or the reflection absorbance ratio is stored in advance. Are compared to determine the degree of deterioration.
[0014]
[Equation 11]
A_λ= -Log (R_λ/ 100) ... (1)
ΔA_λ= A_{λ 1}-A_{λ 2}(However, λ1 <λ2) ... (2)
A_λ'= A_{λ 1}/ A_{λ 2}(However, λ1 <λ2) ... (3)
(The reflectance of the DUT at wavelength λ (nm) is R_λ(%)
(4) A light source of a halogen lamp for irradiating continuous white light, an irradiating optical fiber for irradiating the light of the light source to the surface of the object to be measured, and a light amount measuring unit having a spectroscope for receiving light reflected from the surface of the object to be measured A light receiving optical fiber for guiding the light, a reflected light intensity at each wavelength separated by the spectroscope, a light quantity measuring unit capable of externally outputting a measured value as an electric signal, and each wavelength based on an output value from the light quantity measuring unit. Absorbance at (A_λ) Is calculated by the above equation (1), and the reflection absorbance difference (ΔA) between any two wavelengths is calculated._λ) Or reflection absorbance ratio
(A_λ′) Is calculated by the above equation (2) or (3), and further output from a function generator storing the relationship between the degree of deterioration of the object to be measured and the difference in reflection absorbance between each wavelength or the ratio of reflection absorbance. And a deterioration degree calculating unit for judging the degree of deterioration by comparing and calculating the degree of deterioration.
[0015]
(5) Input means for receiving an input of the thickness (t, mm) of the object to be measured is provided, and irradiation light from at least two types of monochromatic light sources having different wavelengths is guided by an irradiation optical fiber to the surface of the object to be measured. And the reflected light from the surface of the object to be measured is guided to a light quantity measuring section using a light receiving optical fiber, and a reflection loss (L) at each wavelength is obtained from an output from the light quantity measuring section in a deterioration degree calculating section._λ, DB / mm) according to equation (4), and then the return loss difference between the wavelengths.
(ΔL_λ, DB / mm) by the formula (5), and further, by comparing the output from the function generating unit in which the relationship between the degree of deterioration of the object to be measured and the reflection loss difference between the wavelengths is stored in advance. A system for measuring a degree of deterioration of a material, wherein the degree of deterioration is determined.
[0016]
(Equation 12)
L_λ=-(10 / t) log (R_λ/ 100) ... (4)
ΔL_λ= L_{λ 1}-L_{λ 2}(However, λ1 <λ2) ... (5)
(The reflectance of the DUT at wavelength λ (nm) is R_λ(%)
The input means for receiving the input of the thickness further receives an input of the light transmittance of the object to be measured or the presence or absence of the thickness correction.
When the light transmittance received by the input means is 50% or more, or when an instruction to correct the thickness is received, the thickness t received by the input means is used as the thickness t in equation (4). The value of
When the light transmittance received by the input means is less than 50%, or when an instruction for thickness correction “absent” is received, 10 is adopted as the thickness t in the equation (4). That is, it is substantially equivalent to the equation (1).
[0017]
[Action]
In general, a change in the reflection absorbance spectrum due to thermal deterioration of an organic material composed of a single material is represented by a change as shown in FIG. As shown in the figure, the reflection absorbance shows a remarkable increase on the short wavelength side of the visible region due to deterioration. Therefore, due to the restriction on the measurement range of the detector (light amount measurement unit), the wavelength range of less than 660 nm extends to the lifetime of the device. This makes it substantially difficult to continue measuring the reflection absorbance of the material used. This increase in the reflection absorbance on the short wavelength side is mainly due to an increase in the electron transition absorption loss due to the thermal oxidation degradation reaction of the material.
[0018]
In addition, the reflection absorbance A_λIncreases on the shorter wavelength side, so that the reflection absorbance difference ΔA between any two wavelengths_λ(= A_{λ 1}-A_{λ 2}) Or reflection absorbance ratio A_λ'(= A_{λ 1}/ A_{λ 2}) Increases as well. Here, λ1 <λ2. For example, in FIG. 3, the reflection absorbance difference ΔA between the wavelength λ1 (nm) and the wavelength λ2 (nm)_λAre set to α1, α2, and α3 in order from the material having the greatest degree of deterioration, the relationship α1> α2> α3 is established. Reflection absorbance ratio A_λThe same can be said for '.
[0019]
FIG. 5 shows a reflection absorbance spectrum measured on the surface of the insulating material without surface contamination and a reflection absorbance spectrum measured on the surface of the insulating material with the same degree of deterioration and surface contamination. Reflection absorbance difference ΔA between wavelength λ1 and wavelength λ2_λIs Δα when there is no surface contamination and Δα ′ when there is surface contamination, and Δα で あ れ ば Δα ′ regardless of the presence or absence of contamination if the insulating material has the same degree of deterioration. Surface contamination changes (in some cases increases or decreases) the absolute intensity of the reflected light, but generally has small wavelength dependence, and is considered to be constant irrespective of wavelength in the measurement wavelength region of the present invention. Good. The same is true for measurements on surfaces having irregularities. Thus, the reflection absorbance difference ΔA between the two wavelengths as defined in the present invention_λBy using the method, it is possible to measure the degree of deterioration without being substantially affected by contamination and shape of the surface of the object to be measured. The above effect is obtained by the reflection absorbance ratio A_λThe same can be said for '.
[0020]
In the case of a resin or the like having a light transmittance of 50% or more, not only the surface reflected light but also the light reflected on the back surface after passing through the resin is affected. Therefore, it is necessary to correct the thickness by the thickness of the resin or the like (optical path length). When the light transmittance is less than 50%, the proportion of light reflected on the back surface decreases, and the effect of light reflected from the back surface becomes almost negligible. Therefore, when the light transmittance is less than 50%, it is not necessary to correct the thickness. In this case, it is sufficient to apply t = 10 in the equation (4). As described above, by correcting the reflected light intensity of a resin or the like having a light transmittance of 50% or more by the thickness (optical path length), it is possible to perform more accurate deterioration diagnosis by reflected light.
[0021]
Further, as described in Japanese Patent Application Laid-Open No. Hei 3-226651, the degree of deterioration is generally represented by a conversion time θ. By expressing by the conversion time θ, even if the materials have various thermal histories, if the θ is equal, it means that the deterioration degree is the same. The conversion time θ (h) is defined by equation (6).
[0022]
(Equation 13)

[0023]
Here, ΔE is the apparent activation energy (J / mol) of thermal degradation, R is the gas constant (J / K / mol), T is the absolute temperature of thermal degradation (K), and t is the degradation time (h). is there. ΔE of resin, oil, etc. is the reflection absorbance difference ΔA for several kinds of deterioration temperature._{λ 1 λ 2}Can be easily calculated by Arrhenius plotting.
[0024]
Further, the conversion time at the life point of the device using the resin or the oil or the like obtained in advance is θ₀, The difference Δθ from the conversion time θ obtained from the actual measurement (= θ₀−θ) is the conversion time corresponding to the remaining life, and is a measure for determining the degree of deterioration. That is, the remaining life Δθ (h) is expressed by equation (7).
[0025]
[Equation 14]

[0026]
From the equation (7), if the operating temperature condition of the device after the time t is determined, the remaining life time Δt (= t₀−t) can be obtained.
[0027]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be described in detail with reference to examples.
[0028]
(Example 1)
FIG. 1 is a block diagram showing a configuration of the deterioration degree measuring system. In FIG. 1, the deterioration degree calculation unit 1 automatically transmits a switching command signal for the switching units 3, 4, and 5 to the switching control unit 2 in accordance with the measurement procedure. First, the reference light quantity for each wavelength is measured. The reference optical fiber 7 has the same length as the measuring optical fiber (irradiating optical fiber 9 + receiving optical fiber 13). The monochromatic light having the peak wavelength λ1 generated from the light source 6 is transmitted from the switching unit 3 to the switching unit 4 and further transmitted from the reference optical fiber 7 to the light quantity measuring unit 8 via the switching unit 5. In the light amount measuring unit 8, the reference light amount I of the monochromatic light having the peak wavelength λ1 from the light source 6.₁Is measured, and the measured value is output to the deterioration degree calculation unit 1. In the deterioration degree calculation unit 1, the reference light amount I of the light source 6 is calculated.₁Remember. Similarly, the same operation is performed using monochromatic light having a peak wavelength λ2 different from λ1 generated from the light source 14, and the reference light amount I₂Is stored. Next, the amount of reflected light on the surface of the insulating material is measured. The monochromatic light of the peak wavelength λ1 from the light source 6 passes through the switching unit 4 from the switching unit 3, further transmits through the irradiation optical fiber 9, and is irradiated on the surface of the insulating material 11 in the reflected light measuring unit 10. The reflected light measuring section 10 has a structure for blocking external stray light as shown in FIG. The reflected light 12 from the surface of the insulating material 11 is received by the light receiving optical fiber 13, and the transmitted light is sent to the light amount measuring unit 8 through the switching unit 5, and the reflected light amount I₁'Is measured and the result I₁'Is output. In the deterioration degree calculation unit 1, the reflectance R at λ1_{λ 1}(= 100 × I₁'/ I₁) Is calculated and stored. Similarly, the same operation is performed using monochromatic light having a peak wavelength λ2 different from λ1 generated from the light source 14, and the deterioration degree calculation unit 1 sets the reflectance R at λ2._{λ 2}(= 100 × I₂'/ I₂) Is calculated and stored. In this manner, the reflectance at the wavelength λ1 and the wavelength λ2 can be obtained._λ(= A_{λ 1}-A_{λ 2}) Is required. The function generator 15 previously stores a reflection absorbance difference corresponding to the degree of deterioration of the insulating material as shown in FIG. 4 as a master curve, and outputs the difference to the deterioration degree calculator 1. The stored function value and the measured reflection absorbance difference ΔA_λThen, the deterioration degree calculation unit 1 performs a comparison calculation to determine the degree of deterioration, and outputs the result to an external (not shown) printer or the like as a measurement result. FIG. 10 shows a flowchart of the calculation for determining the degree of deterioration.
[0029]
(Example 2)
FIG. 6 shows a configuration diagram of a deterioration degree measurement system using three wavelengths (λ1 to λ3) simultaneously. Even if three wavelengths are transmitted in one optical fiber, the system works well because the light has no coherence. Filters corresponding to the respective wavelengths are incorporated in the light amount measuring unit 8, and the light amounts at the respective wavelengths can be instantaneously measured by operating the filters in a time-division manner. The light of each wavelength is sent simultaneously into the irradiation optical fiber 9 via the optical coupler 16. As in the first embodiment, the reference light amount and the reflected light amount for each wavelength are measured. The reflected light 12 from the surface of the insulating material 11 is received by the light receiving optical fiber 13, the transmitted light is sent to the light quantity measuring section 8, the reflected light quantity is measured, and the result is outputted to the deterioration degree calculating section 1. In the deterioration degree calculating section 1, the reflectance R at the wavelengths λ1 to λ3 is calculated._{λ 1}~ R_{λ 3}Is calculated and stored. In this manner, the reflectance at the wavelengths λ1 to λ3 is obtained, so that the deterioration degree calculation unit 1 calculates the reflection absorbance difference ΔA between any two wavelengths among the data between the three wavelengths._λ(= A_λ-A_λ') Is required. The function generator 15 previously stores a reflection absorbance difference corresponding to the degree of deterioration of the insulating material as shown in FIG. 4 as a master curve, and outputs the difference to the deterioration degree calculator 1. The stored function value and the measured reflection absorbance difference ΔA_λThe deterioration degree calculator 1 compares and determines the degree of deterioration by the deterioration degree calculator 1 and outputs the result to the outside as a measurement result.
[0030]
(Example 3)
FIG. 7 shows a configuration diagram of a deterioration degree measuring system using a white light source (halogen lamp) as a light source. The system works well even when a white light source (halogen lamp) is used as the light source. The light quantity measuring unit 8 incorporates a spectroscope including an interference filter, and can instantaneously measure the light quantity at each wavelength (500 to 900 nm). A reference light amount and a reflected light amount for each wavelength (500 to 900 nm) are measured as in the first embodiment. The reflected light 12 from the surface of the insulating material 11 is received by the light receiving optical fiber 13, the transmitted light is sent to the light quantity measuring section 8, the reflected light quantity is measured, and the result is outputted to the deterioration degree calculating section 1. In the deterioration degree calculating unit 1, the reflectance R at a wavelength of 500 to 900 nm is obtained.₅₀₀~ R₉₀₀Is continuously calculated and stored. In this manner, the reflectance at a wavelength of 500 to 900 nm is obtained._λ(= A_λ-A_λ') Is required. The function generator 15 previously stores a reflection absorbance difference corresponding to the degree of deterioration of the insulating material as shown in FIG. 4 as a master curve, and outputs the difference to the deterioration degree calculator 1. The stored function value and the measured reflection absorbance difference ΔA_λ, The deterioration degree is calculated by the deterioration degree calculation unit 1 to determine the degree of deterioration, and is output to the outside as a measurement result.
[0031]
In each of the above embodiments, the case of a solid insulating material has been described. However, the degree of deterioration can be measured in the same manner for a liquid material such as oil.
[0032]
(Example 4)
FIG. 8 is a block diagram showing a functional configuration of the deterioration degree measuring device. In FIG. 8, the deterioration degree calculating section 1 uses a notebook personal computer in which a hard disk unit 15 is built. First, the reference light quantity for each wavelength is measured. The reference light amount was measured by installing an alumina oxide plate at the position of the insulating material 11. Even if a white plain paper, a chrome-plated metal plate, or the like is used without using the alumina oxide plate, there is no problem. Monochromatic light having a peak wavelength of 660 nm generated from the light source 6 passes through the two plastic optical couplers 16, is guided to the irradiation optical fiber 9, and is reflected on the alumina oxide plate. This reflected light is transmitted to the light quantity measuring unit 8 through the light receiving optical fiber 13. The light amount measuring unit 8 uses an optical power meter having a built-in photodiode. In the light amount measuring unit 8, the reference light amount I of the monochromatic light having a peak wavelength of 660 nm from the light source 6.₁Is measured, and the measured value is analog-output from the pin jack to the deterioration degree calculating unit 1 as a voltage value. Since the personal computer of the deterioration degree calculating section 1 cannot directly input analog output data, a 12-bit A / D (analog / digital) converter 19 is connected to an extension connector. The 12-bit A / D converter 19 converts the voltage value of 5 volts to 4096 (= 2¹²) Capable of dividing and capturing. In the deterioration degree calculating section 1, the reference light amount I of the light source 6 is calculated.₁Is stored in the memory. Similarly, the same operation is performed using the monochromatic light having a peak wavelength of 780 nm generated from the light source 14, and the reference light amount I₂Is stored. Similarly, the same operation is performed using monochromatic light having a peak wavelength of 850 nm generated from the light source 18, and the reference light amount I₃Is stored. Next, the amount of reflected light on the surface of the insulating material is measured. Monochromatic light having a peak wavelength of 660 nm from the light source 6 passes through the two plastic optical couplers 16, is guided to the irradiation optical fiber 9, and is irradiated on the surface of the insulating material 11 in the reflected light measurement unit 10. The reflected light measuring section 10 has a structure for blocking external stray light as shown in FIG. The reflected light from the surface of the insulating material 11 is received by the light receiving optical fiber 13, and the transmitted light is sent to the light quantity measuring unit 8, and the reflected light quantity I₁'Is measured and the result I₁'Is output. In the deterioration degree calculating unit 1, the reflectance R at 660 nm is calculated.₆₆₀(= 100 × I₁'/ I₁) Is calculated and stored in the memory. Similarly, the same operation is performed using monochromatic light having a peak wavelength of 780 nm generated from the light source 14, and the reflectance R at 780 nm is obtained in the deterioration degree calculation unit 1.₇₈₀(= 100 × I₂'/ I₂) Is calculated and stored in the memory. Similarly, the same operation is performed using the monochromatic light having a peak wavelength of 850 nm generated from the light source 18, and the reflectance R at 850 nm is calculated in the deterioration degree calculation unit 1.₈₅₀(= 100 × I₃'/ I₃) Is calculated and stored in the memory. In this manner, the reflectance at 660, 780, and 850 nm is obtained._λ
(= A_{λ 1}-A_{λ 2}) Is required. In the function generator 15 composed of a hard disk unit, a reflection absorbance difference corresponding to the degree of deterioration of the insulating material as shown in FIG. 4 is stored in advance as a master curve, and is output to the degree of deterioration calculator 1. The stored function value and the measured reflection absorbance difference ΔA_λAre compared by the deterioration degree calculation unit 1 to determine the degree of deterioration, and output as a measurement result to an external (not shown) printer or the like.
[0033]
In this embodiment, the apparatus for measuring the degree of deterioration of a material using three wavelengths has been described, but the measuring apparatus operates well even with only two wavelengths.
[0034]
(Example 5)
After obtaining the reflectance at the wavelength λ1 and the wavelength λ2 of the insulating material 11 using the same deterioration degree measuring system as in the first embodiment, the deterioration degree calculating unit 1 calculates the reflection absorbance ratio A between the two wavelengths._λ'(= A_{λ 1}/ A_{λ 2}). In the function generator 15, a reflection absorbance ratio corresponding to the degree of deterioration of the insulating material as shown in FIG. 9 is stored in advance as a master curve, and is output to the deterioration degree calculator 1. The stored function value and the measured reflection absorbance ratio A_λAnd the deterioration degree is calculated by the deterioration degree calculation unit 1 to determine the degree of deterioration, and is output as a measurement result to an external (not shown) printer or the like.
[0035]
(Example 6)
After obtaining the reflectivity of the insulating material 11 at the wavelengths λ1 to λ3 using the same deterioration degree measurement system as in the second embodiment, the deterioration degree calculation unit 1 calculates the reflectance between any two wavelengths among the data of the three wavelengths. Reflection absorbance ratio A_λ'(= A_{λ 1}/ A_{λ 2}). In the function generator 15, a reflection absorbance ratio corresponding to the degree of deterioration of the insulating material as shown in FIG. 9 is stored in advance as a master curve, and is output to the deterioration degree calculator 1. The stored function value and the measured reflection absorbance ratio A_λ′, The degree of deterioration is compared and determined by the degree of deterioration calculating unit 1 and output as a measurement result to the outside.
[0036]
(Example 7)
After obtaining the reflectance of the insulating material 11 at a wavelength of 500 to 900 nm using the same deterioration degree measuring system as in the third embodiment, the deterioration degree calculator 1 calculates the reflection absorbance ratio A between any two wavelengths._λ'(= A_{λ 1}/ A_{λ 2}). In the function generator 15, a reflection absorbance ratio corresponding to the degree of deterioration of the insulating material as shown in FIG. 9 is stored in advance as a master curve, and is output to the deterioration degree calculator 1. The stored function value and the measured reflection absorbance ratio A_λ′, The deterioration degree is calculated by the deterioration degree calculation unit 1 to determine the deterioration degree, and is output to the outside as a measurement result.
[0037]
In each of the above embodiments, the case of a solid insulating material has been described. However, the degree of deterioration can be measured in the same manner for a liquid material such as oil.
[0038]
(Example 8)
After obtaining the reflectance of the insulating material 11 at 660, 780, and 850 nm using the same deterioration degree measuring apparatus as in the fourth embodiment, the deterioration degree calculation unit 1 calculates the reflection absorbance ratio A between any two wavelengths._λ'(= A_{λ 1}/ A_{λ 2}). The function generation unit 15 composed of a hard disk unit previously stores a reflection absorbance ratio corresponding to the degree of deterioration of the insulating material as a master curve as shown in FIG. The stored function value and the measured reflection absorbance ratio A_λThe deterioration degree is calculated by the deterioration degree calculation unit 1 from the value of 'and the degree of deterioration is determined, and is output as a measurement result to an external (not shown) printer or the like.
[0039]
In this embodiment, the apparatus for measuring the degree of deterioration of a material using three wavelengths has been described, but the measuring apparatus operates well even with only two wavelengths.
[0040]
(Example 9)
FIG. 11 is a block diagram showing a configuration of a deterioration degree measuring system having a thickness input means 20. In FIG. 11, the deterioration degree calculation unit 1 automatically transmits a switching command signal for the switching units 3, 4, and 5 to the switching control unit 2 in accordance with the measurement procedure. First, the reference light quantity for each wavelength is measured. The reference optical fiber 7 has the same length as the measuring optical fiber (irradiating optical fiber 9 + receiving optical fiber 13). The monochromatic light having the peak wavelength λ1 generated from the light source 6 is transmitted from the switching unit 3 to the switching unit 4 and further transmitted from the reference optical fiber 7 to the light quantity measuring unit 8 via the switching unit 5. In the light amount measuring unit 8, the reference light amount I of the monochromatic light having the peak wavelength λ1 from the light source 6.₁Is measured, and the measured value is output to the deterioration degree calculation unit 1. In the deterioration degree calculation unit 1, the reference light amount I of the light source 6 is calculated.₁Remember. Similarly, the same operation is performed using monochromatic light having a peak wavelength λ2 different from λ1 generated from the light source 14, and the reference light amount I₂Is stored. Next, the amount of reflected light on the surface of the insulating material is measured. The monochromatic light of the peak wavelength λ1 from the light source 6 passes through the switching unit 4 from the switching unit 3, further transmits through the irradiation optical fiber 9, and is irradiated on the surface of the insulating material 11 in the reflected light measuring unit 10. The reflected light measuring section 10 has a structure for blocking external stray light as shown in FIG. The reflected light 12 from the surface of the insulating material 11 is received by the light receiving optical fiber 13, and the transmitted light is sent to the light amount measuring unit 8 through the switching unit 5, and the reflected light amount I₁'Is measured and the result I₁'Is output. In the deterioration degree calculation unit 1, the reflectance R at λ1_{λ 1}(= 100 × I₁'/ I₁) Is calculated and stored. Similarly, the same operation is performed using monochromatic light having a peak wavelength λ2 different from λ1 generated from the light source 14, and the deterioration degree calculation unit 1 sets the reflectance R at λ2._{λ 2}(= 100 × I₂'/ I₂) Is calculated and stored. In this manner, the reflectance at the wavelength λ1 and the wavelength λ2 can be obtained._λ(= L_{λ 1}-L_{λ 2}) Is required. The function generator 15 previously stores a reflection loss difference corresponding to the degree of deterioration of the insulating material as shown in FIG. 12 as a master curve, and outputs the master curve to the deterioration degree calculator 1. This stored function value and the measured return loss difference ΔL_λThen, the deterioration degree calculation unit 1 performs a comparison calculation to determine the degree of deterioration, and outputs the result to an external (not shown) printer or the like as a measurement result. FIG. 13 is a graph showing the state of data variation depending on the presence or absence of thickness correction for an insulating film having a transmittance of 50%. In FIG. 13, a shows a plot without thickness correction, and b shows a plot with thickness correction. It can be seen that the variation in data has been significantly reduced by the thickness correction.
[0041]
【The invention's effect】
According to the present invention, it is possible to non-destructively measure the degree of deterioration of an insulating material or a structural material used in a device without stopping operation of the device in operation. Further, it is possible to obtain a deterioration degree measurement system that can be applied to a measured object whose surface is contaminated with dust or the like or a measured object having irregularities.
[Brief description of the drawings]
FIG. 1 is a block diagram illustrating a configuration of a deterioration degree measurement system according to a first embodiment.
FIG. 2 is a schematic perspective view showing an optical fiber measuring end according to the first embodiment.
FIG. 3 is an example of a reflection absorbance spectrum of an insulating material.
FIG. 4 is an example of a reflection absorbance difference master curve serving as a reference for determining the degree of deterioration.
FIG. 5 is a graph showing the relationship between the presence or absence of surface contamination and the reflectance absorbance spectrum.
FIG. 6 is a block diagram illustrating a configuration of a deterioration degree measurement system according to a second embodiment.
FIG. 7 is a block diagram illustrating a configuration of a deterioration degree measurement system according to a third embodiment.
FIG. 8 is a block diagram illustrating a configuration of a deterioration degree measuring apparatus according to a fourth embodiment.
FIG. 9 is an example of a reflection absorbance ratio master curve serving as a reference for determining the degree of deterioration.
FIG. 10 is a flowchart of a calculation for determining the degree of deterioration.
FIG. 11 is a block diagram illustrating a configuration of a deterioration degree measurement system according to a ninth embodiment.
FIG. 12 is an example of a reflection loss difference master curve serving as a reference for determining the degree of deterioration.
FIG. 13 is a graph showing the presence or absence of thickness correction for an insulating film having a transmittance of 50%.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Deterioration degree calculation part, 2 ... Switching control part, 3, 4, 5 ... Switching part, 6 ... Light source (wavelength (lambda) (lambda) 1), 7 ... Reference optical fiber, 8 ... Light quantity measuring part, 9 ... Irradiation optical fiber, 10 … Reflected light measuring unit, 11… insulating material, 12… reflected light, 13… receiving optical fiber, 14… light source (wavelength λ2), 15… function generating unit, 16… optical coupler, 17… light source (halogen lamp) , 18: light source (850 nm), 19: 12-bit A / D converter, 20: thickness input means.

Claims (15)

Irradiation light from at least two types of monochromatic light sources having different wavelengths is guided by an irradiating optical fiber to irradiate the surface of an object to be measured, and light reflected from the surface of the object to be measured is reflected by an optical fiber for receiving light. After calculating the reflection absorbance (A _λ ) at each wavelength from the output from the light quantity measurement unit in the deterioration degree calculation unit by the equation (1), the reflection absorbance difference (ΔA _λ ) between the wavelengths is calculated by the equation (2). In addition, the degree of deterioration is determined by comparing and calculating the output from the function generator that stores the relationship between the degree of deterioration of the DUT and the reflection absorbance difference between each wavelength in advance. Material degradation level measurement system.

The material degradation degree measuring system according to claim 1, wherein a light source having a peak wavelength of 660 nm to 850 nm is used as the monochromatic light source. Light emitted from a halogen lamp that emits white continuous light is guided by an irradiation optical fiber to irradiate the surface of an object to be measured, and light reflected from the surface of the object to be measured is measured using a light receiving optical fiber having a spectroscope. After calculating the reflection absorbance (A _λ ) at each wavelength from the output from the light amount measurement unit in the deterioration degree calculation unit by equation (1), the reflection absorbance difference (ΔA _λ ) between any two wavelengths is calculated as ( Calculating by the equation 2) and comparing the output from the function generating unit in which the relationship between the deterioration degree of the DUT and the reflection absorbance difference between each wavelength is stored in advance, to determine the deterioration degree. Characteristic material deterioration degree measurement system.

At least two types of monochromatic light sources having different wavelengths, an optical coupler for guiding the light source light to an irradiation optical fiber, an irradiation optical fiber for irradiating the light source light to the surface of the object to be measured, and a surface of the object to be measured A light receiving optical fiber for receiving the reflected light from the light source and guiding the reflected light to the light quantity measuring section, a light quantity measuring section capable of detecting the reflected light intensity at each of the wavelengths and outputting the measured value as an electric signal to the outside, After calculating the reflection absorbance (A _λ ) at each wavelength from the output value by the formula (1), the reflection absorbance difference (ΔA _λ ) between the wavelengths is calculated by the formula (2). A deterioration degree measuring device for a material, comprising: a deterioration degree calculating section for judging a deterioration degree by comparing and calculating an output from a function generating section in which a relationship with a reflection absorbance difference between respective wavelengths is stored. .

5. The apparatus according to claim 4, wherein an LED light source having a peak wavelength of 660 nm or more and 850 nm or less is used as the monochromatic light source. A light source of a halogen lamp for irradiating continuous white light, an irradiating optical fiber for irradiating the light of the light source to the surface of the object to be measured, and a light receiving device for receiving the light reflected from the surface of the object to be measured and guiding the light to a light amount measuring unit having a spectroscope Optical fiber, a light quantity measuring unit capable of detecting reflected light intensity at each wavelength separated by the spectrometer and outputting the measured value as an electric signal to the outside, and a reflection absorbance at each wavelength based on an output value from the light quantity measuring unit. After calculating (A _λ ) by equation (1), the reflection absorbance difference (ΔA _λ ) between any two wavelengths is calculated by equation (2), and the degree of deterioration of the object to be measured and the reflection absorbance between each wavelength are calculated in advance. An apparatus for measuring a degree of deterioration of a material, comprising: a degree-of-deterioration calculating unit that determines a degree of deterioration by comparing and calculating an output from a function generator that stores a relationship with a difference.

Irradiation light from at least two types of monochromatic light sources having different wavelengths is guided by an irradiating optical fiber to irradiate the surface of an object to be measured, and light reflected from the surface of the object to be measured is reflected by an optical fiber for receiving light. After calculating the reflection absorbance (A _λ ) at each wavelength from the output from the light quantity measurement unit in the deterioration degree calculation unit by the equation (1), the reflection absorption ratio (A _λ ′) between the wavelengths is calculated by (3). It is characterized in that the degree of deterioration is determined by comparing the output from a function generator that stores the relationship between the degree of deterioration of the DUT and the reflection absorbance ratio between the wavelengths in advance. Material degradation measurement system.

The system for measuring the degree of deterioration of a material according to claim 7, wherein a light source having a peak wavelength of 660 nm or more and 850 nm or less is used as the monochromatic light source. Light emitted from a halogen lamp that emits white continuous light is guided by an irradiation optical fiber to irradiate the surface of an object to be measured, and light reflected from the surface of the object to be measured is measured using a light receiving optical fiber having a spectroscope. After calculating the reflection absorbance (A _λ ) at each wavelength from the output from the light quantity measurement unit in the deterioration degree calculation unit by the equation (1), the reflection absorbance ratio (A _λ ') between any two wavelengths is calculated. Determining the degree of deterioration by calculating using equation (3) and comparing the output of the function generator storing the relationship between the degree of deterioration of the DUT and the reflection absorbance ratio between the wavelengths in advance. Material degradation degree measurement system characterized by the above-mentioned.

At least two types of monochromatic light sources having different wavelengths, an optical coupler for guiding the light source light to an irradiation optical fiber, an irradiation optical fiber for irradiating the light source light to the surface of the object to be measured, and a surface of the object to be measured A light receiving optical fiber for receiving the reflected light from the light source and guiding the reflected light to the light quantity measuring section, a light quantity measuring section capable of detecting the reflected light intensity at each of the wavelengths and outputting the measured value as an electric signal to the outside, After calculating the reflection absorbance (A _λ ) at each wavelength from the output value by the formula (1), the reflection absorbance ratio (A _λ ') between the wavelengths is calculated by the formula (3), and the deterioration degree of the object to be measured is determined in advance. Deterioration degree measurement of a material characterized by comprising a deterioration degree calculator for judging a degree of deterioration by comparing and calculating an output from a function generator in which a relationship between the function and a reflection absorbance ratio between wavelengths is stored. apparatus.

11. The apparatus according to claim 10, wherein an LED light source having a peak wavelength of 660 nm or more and 850 nm or less is used as the monochromatic light source. A light source of a halogen lamp for irradiating continuous white light, an irradiating optical fiber for irradiating the light of the light source to the surface of the object to be measured, and a light receiving device for receiving the light reflected from the surface of the object to be measured and guiding the light to a light amount measuring unit having a spectroscope Optical fiber, a light quantity measuring unit capable of detecting reflected light intensity at each wavelength separated by the spectrometer and outputting the measured value as an electric signal to the outside, and a reflection absorbance at each wavelength based on an output value from the light quantity measuring unit. After calculating ( _Aλ ) by equation (1), the reflection absorbance ratio ( _Aλ ′) between any two wavelengths is calculated by equation (3), and the degree of deterioration of the object to be measured and the reflection between each wavelength are calculated in advance. A deterioration degree measuring device for a material, comprising: a deterioration degree calculating unit that determines a deterioration degree by comparing and calculating an output from a function generating unit that stores a relationship with an absorbance ratio.

An input means for receiving an input of the thickness (t, mm) of the object to be measured is provided, and irradiation light from at least two types of monochromatic light sources having different wavelengths is guided by an irradiation optical fiber and irradiated to the surface of the object to be measured. The reflected light from the surface of the object to be measured is guided to a light quantity measuring unit using a light receiving optical fiber, and a reflection loss (L _λ , dB / mm) at each wavelength from an output from the light quantity measuring unit in a deterioration degree calculating unit. Is calculated by equation (4), the reflection loss difference (ΔL _λ , dB / mm) between the wavelengths is calculated by equation (5), and the degree of deterioration of the object to be measured and the reflection loss difference between the wavelengths are calculated in advance. A deterioration degree is determined by comparing and calculating an output from a function generating unit in which the relation of the material is stored.

The input means for receiving the input of the thickness further receives the input of the light transmittance of the measured object, or the presence or absence of the thickness correction,
When the light transmittance received by the input means is 50% or more, or when an instruction to correct the thickness is received, the thickness t received by the input means is used as the thickness t in equation (4). The value of
When the light transmittance received by the input means is less than 50%, or when an instruction of thickness correction “absent” is received, 10 is adopted as the thickness t in the equation (4). The material deterioration degree measuring system according to claim 13. 14. The system according to claim 13, wherein a light source having a peak wavelength of 660 nm or more and 850 nm or less is used as the monochromatic light source.

Images