JP2003322969A - Solvent-free one-liquid active energy beam-curable resin composition - Google Patents
Solvent-free one-liquid active energy beam-curable resin compositionInfo
- Publication number
- JP2003322969A JP2003322969A JP2002127518A JP2002127518A JP2003322969A JP 2003322969 A JP2003322969 A JP 2003322969A JP 2002127518 A JP2002127518 A JP 2002127518A JP 2002127518 A JP2002127518 A JP 2002127518A JP 2003322969 A JP2003322969 A JP 2003322969A
- Authority
- JP
- Japan
- Prior art keywords
- water
- active energy
- resin composition
- weight
- curable resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011342 resin composition Substances 0.000 title claims abstract description 17
- 239000007788 liquid Substances 0.000 title abstract description 7
- 229920005989 resin Polymers 0.000 claims abstract description 18
- 239000011347 resin Substances 0.000 claims abstract description 18
- 125000000466 oxiranyl group Chemical group 0.000 claims abstract description 11
- 239000003795 chemical substances by application Substances 0.000 claims description 5
- 239000003086 colorant Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 17
- -1 polyglycerin Chemical compound 0.000 description 55
- 238000005530 etching Methods 0.000 description 16
- 239000010408 film Substances 0.000 description 14
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- 239000000203 mixture Substances 0.000 description 11
- LWNGJAHMBMVCJR-UHFFFAOYSA-N (2,3,4,5,6-pentafluorophenoxy)boronic acid Chemical compound OB(O)OC1=C(F)C(F)=C(F)C(F)=C1F LWNGJAHMBMVCJR-UHFFFAOYSA-N 0.000 description 10
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- 238000003860 storage Methods 0.000 description 6
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- 238000000034 method Methods 0.000 description 5
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- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 5
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- FBPFZTCFMRRESA-FSIIMWSLSA-N D-Glucitol Natural products OC[C@H](O)[C@H](O)[C@@H](O)[C@H](O)CO FBPFZTCFMRRESA-FSIIMWSLSA-N 0.000 description 2
- FBPFZTCFMRRESA-JGWLITMVSA-N D-glucitol Chemical compound OC[C@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-JGWLITMVSA-N 0.000 description 2
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- 125000004429 atom Chemical group 0.000 description 2
- AENNXXRRACDJAY-UHFFFAOYSA-N bis(2-dodecylphenyl)iodanium Chemical compound CCCCCCCCCCCCC1=CC=CC=C1[I+]C1=CC=CC=C1CCCCCCCCCCCC AENNXXRRACDJAY-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
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- 229940105990 diglycerin Drugs 0.000 description 2
- GPLRAVKSCUXZTP-UHFFFAOYSA-N diglycerol Chemical compound OCC(O)COCC(O)CO GPLRAVKSCUXZTP-UHFFFAOYSA-N 0.000 description 2
- FJKIXWOMBXYWOQ-UHFFFAOYSA-N ethenoxyethane Chemical compound CCOC=C FJKIXWOMBXYWOQ-UHFFFAOYSA-N 0.000 description 2
- 150000002170 ethers Chemical class 0.000 description 2
- 229940052303 ethers for general anesthesia Drugs 0.000 description 2
- 235000011187 glycerol Nutrition 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
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- 239000000463 material Substances 0.000 description 2
- 239000010445 mica Substances 0.000 description 2
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- 239000000178 monomer Substances 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
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- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 description 2
- 230000002087 whitening effect Effects 0.000 description 2
- 239000001052 yellow pigment Substances 0.000 description 2
- QKAIFCSOWIMRJG-UHFFFAOYSA-N (4-methylphenyl)-(4-propan-2-ylphenyl)iodanium Chemical compound C1=CC(C(C)C)=CC=C1[I+]C1=CC=C(C)C=C1 QKAIFCSOWIMRJG-UHFFFAOYSA-N 0.000 description 1
- GJZFGDYLJLCGHT-UHFFFAOYSA-N 1,2-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=C(CC)C(CC)=CC=C3SC2=C1 GJZFGDYLJLCGHT-UHFFFAOYSA-N 0.000 description 1
- VSHKLLPSERFSRJ-UHFFFAOYSA-N 1-(naphthalen-1-ylmethyl)pyridin-1-ium-2-carbonitrile Chemical compound N#CC1=CC=CC=[N+]1CC1=CC=CC2=CC=CC=C12 VSHKLLPSERFSRJ-UHFFFAOYSA-N 0.000 description 1
- QIUCYKBVFAPWRR-UHFFFAOYSA-N 1-ethenoxy-3-methylbutane Chemical compound CC(C)CCOC=C QIUCYKBVFAPWRR-UHFFFAOYSA-N 0.000 description 1
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- AOBIOSPNXBMOAT-UHFFFAOYSA-N 2-[2-(oxiran-2-ylmethoxy)ethoxymethyl]oxirane Chemical compound C1OC1COCCOCC1CO1 AOBIOSPNXBMOAT-UHFFFAOYSA-N 0.000 description 1
- SHKUUQIDMUMQQK-UHFFFAOYSA-N 2-[4-(oxiran-2-ylmethoxy)butoxymethyl]oxirane Chemical compound C1OC1COCCCCOCC1CO1 SHKUUQIDMUMQQK-UHFFFAOYSA-N 0.000 description 1
- WTYYGFLRBWMFRY-UHFFFAOYSA-N 2-[6-(oxiran-2-ylmethoxy)hexoxymethyl]oxirane Chemical compound C1OC1COCCCCCCOCC1CO1 WTYYGFLRBWMFRY-UHFFFAOYSA-N 0.000 description 1
- KUAUJXBLDYVELT-UHFFFAOYSA-N 2-[[2,2-dimethyl-3-(oxiran-2-ylmethoxy)propoxy]methyl]oxirane Chemical compound C1OC1COCC(C)(C)COCC1CO1 KUAUJXBLDYVELT-UHFFFAOYSA-N 0.000 description 1
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- LMIOYAVXLAOXJI-UHFFFAOYSA-N 3-ethyl-3-[[4-[(3-ethyloxetan-3-yl)methoxymethyl]phenyl]methoxymethyl]oxetane Chemical group C=1C=C(COCC2(CC)COC2)C=CC=1COCC1(CC)COC1 LMIOYAVXLAOXJI-UHFFFAOYSA-N 0.000 description 1
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 1
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- 238000007639 printing Methods 0.000 description 1
- 230000002062 proliferating effect Effects 0.000 description 1
- IZMJMCDDWKSTTK-UHFFFAOYSA-N quinoline yellow Chemical compound C1=CC=CC2=NC(C3C(C4=CC=CC=C4C3=O)=O)=CC=C21 IZMJMCDDWKSTTK-UHFFFAOYSA-N 0.000 description 1
- 239000007870 radical polymerization initiator Substances 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
- 239000011833 salt mixture Substances 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-O sulfonium Chemical compound [SH3+] RWSOTUBLDIXVET-UHFFFAOYSA-O 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 235000010215 titanium dioxide Nutrition 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- WLOQLWBIJZDHET-UHFFFAOYSA-N triphenylsulfonium Chemical compound C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 WLOQLWBIJZDHET-UHFFFAOYSA-N 0.000 description 1
- 239000012953 triphenylsulfonium Substances 0.000 description 1
- ANEFWEBMQHRDLH-UHFFFAOYSA-N tris(2,3,4,5,6-pentafluorophenyl) borate Chemical compound FC1=C(F)C(F)=C(F)C(F)=C1OB(OC=1C(=C(F)C(F)=C(F)C=1F)F)OC1=C(F)C(F)=C(F)C(F)=C1F ANEFWEBMQHRDLH-UHFFFAOYSA-N 0.000 description 1
- 229920006305 unsaturated polyester Polymers 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 235000014692 zinc oxide Nutrition 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Landscapes
- Materials For Photolithography (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、プリント配線基
板、リードフレーム、およびシャドウマスクでの金属基
板にリソグラフィー法によるケミカルエッチング加工を
施すに際し、非エッチング部分を保護する防食剤として
酸エッチング処理に対する耐性を有し、エッチング後、
水にて容易に剥離可能となる画像形成可能な感光性樹脂
組成物に関する。更に詳しくは活性エネルギー線による
硬化後、水現像および水による硬化物剥離を行えること
を特長とする無溶剤一液型活性エネルギー線硬化性樹脂
組成物を提供するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to acid etching treatment as an anticorrosive agent for protecting non-etched portions when chemical etching processing is performed on a printed wiring board, a lead frame, and a metal substrate with a shadow mask by a lithographic method. After etching,
The present invention relates to an imageable photosensitive resin composition that can be easily peeled off with water. More specifically, the present invention provides a solvent-free one-pack type active energy ray-curable resin composition, which is characterized by being capable of developing with water and peeling a cured product with water after curing with active energy rays.
【0002】[0002]
【従来の技術】近年、省エネルギー・環境にやさしい・
生産性の向上をキーワードに液状物を紫外線や電子線に
よって速やかに固体化するUV/EB硬化技術は様々な
分野に応用されている。プリント配線基板加工分野にお
いても同様の理由によりソルダーレジストインキ、エッ
チングレジストインキ等種々のインキが従来の熱硬化系
組成物から光硬化系組成物に移行している。2. Description of the Related Art In recent years, energy saving and environmental friendly
With the keyword of improving productivity, the UV / EB curing technology for rapidly solidifying a liquid material by ultraviolet rays or electron beams has been applied to various fields. In the field of printed wiring board processing, various inks such as solder resist inks and etching resist inks are shifting from conventional thermosetting compositions to photocuring compositions for the same reason.
【0003】プリント配線板の導体回路を形成する代表
的方法は次のような工程よりなる。すなわち、銅張り積
層板に導体回路形成位置に貫通孔を形成する工程、貫通
孔内壁に無電解メッキを施しさらに電解メッキで厚着け
し導通孔とする工程、このように作成した導通孔を有す
る銅張り積層板上にエッチングレジスト被膜の画像回路
を形成する工程、エッチングにより非回路部分の銅箔を
除去する工程、銅箔回路上の残存エッチングレジスト被
膜を除去する工程である。A typical method for forming a conductor circuit of a printed wiring board comprises the following steps. That is, a step of forming a through hole in a conductor circuit forming position in a copper clad laminate, a step of electroless plating the inner wall of the through hole and further thickening by electrolytic plating to make a through hole, a copper having a through hole thus created These are a step of forming an image circuit of an etching resist coating on the laminated laminate, a step of removing the copper foil in the non-circuit portion by etching, and a step of removing the remaining etching resist coating on the copper foil circuit.
【0004】微細な回路パターンが要求される場合に
は、写真法を用いてエッチングレジスト画像が形成され
る。この方法は以下に概略説明する工程を経る。すなわ
ち、銅張り積層板上の銅箔上に感光性樹脂組成物の薄膜
層を形成し、この薄膜層に画像を描画したマスターフィ
ルムを置き、活性エネルギー線を露光する。マスターフ
ィルムから活性エネルギー線が透過した露光部分は硬化
し、遮蔽された未露光部分は未硬化で、マスターフィル
ムと画像が反転した潜在画像が形成される。未露光部
は、有機溶剤や希アルカリ水溶液で溶解除去する現像工
程を経て、エッチングレジストの画像パターンが形成さ
れる。When a fine circuit pattern is required, an etching resist image is formed by using a photographic method. This method goes through the steps outlined below. That is, a thin film layer of a photosensitive resin composition is formed on a copper foil on a copper-clad laminate, a master film on which an image is drawn is placed on this thin film layer, and an active energy ray is exposed. The exposed portion where the active energy rays have transmitted from the master film is cured, and the unexposed portion that is blocked is uncured to form a latent image in which the image is reversed from that of the master film. An image pattern of the etching resist is formed on the unexposed portion through a developing step of dissolving and removing it with an organic solvent or a dilute alkaline aqueous solution.
【0005】また、液状エッチングレジストを塗布する
方法は、ロールコーターやデップコーター或いはスプレ
ーコーターを用いて塗布し熱風や遠赤外線を用いて乾燥
する方法であり、装置としては比較的簡単な方法でなさ
れている場合が多い。The liquid etching resist is applied by a roll coater, a dip coater or a spray coater and dried by hot air or far infrared rays, which is a relatively simple apparatus. There are many cases.
【0006】[0006]
【発明が解決しようとする課題】上記レジストインキは
主剤となる樹脂と光重合開始剤を含有するが、用いられ
る主剤樹脂はアクリレートや不飽和ポリエステルなど重
合形態が光ラジカル重合のものが多く、その現像工程、
残存エッチングレジスト被膜除去工程では有機溶剤、ま
たはアルカリ水溶液を用いることが一般的である。The above-mentioned resist ink contains a resin as a main component and a photopolymerization initiator, but the main component resin used is often a radical polymerization type such as acrylate or unsaturated polyester. Development process,
In the residual etching resist film removing step, it is common to use an organic solvent or an alkaline aqueous solution.
【0007】しかし、有機溶媒を用いることは、作業環
境やひいては地球環境の悪化及び経済的問題により徐々
に使用されなくなる傾向にある。また、アルカリ水溶液
を用いると、pHの経時変化が起こり易く、従って現像
時間等の条件を一定にすることが困難となり、また作業
安全上も決して良いものとは言えない。水現像可能な感
光性材料として特開2001−206922が公知であ
るが、組成物に有機溶剤を含むため、これを蒸発させる
工程が必要であり作業環境やひいては地球環境上好まし
くない。また、エッチングレジストとしての硬化塗膜の
耐エッチング溶液性および残存エッチングレジスト被膜
の水剥離性について何も言及していない。However, the use of the organic solvent tends to gradually become unusable due to the deterioration of the work environment and eventually the global environment and economic problems. Further, when an alkaline aqueous solution is used, the pH tends to change with time, so that it becomes difficult to keep the conditions such as the developing time constant, and it cannot be said that work safety is good at all. Japanese Patent Laid-Open No. 2001-206922 is known as a water-developable photosensitive material, but since the composition contains an organic solvent, a step of evaporating the organic solvent is required, which is not preferable in the working environment and eventually the global environment. Further, nothing is mentioned about the etching solution resistance of the cured coating film as the etching resist and the water peeling property of the residual etching resist film.
【0008】さらに、光ラジカル重合で硬化する場合、
酸素による硬化阻害が起こるため真空下または不活性ガ
スの存在下で硬化させなければならず活性エネルギー線
照射装置に相応の設備が必要となる。また、ラジカル重
合開始剤を含む配合樹脂はその樹脂の粘度上昇が起こり
易く保存安定性が悪いなどの欠点が見られる。Further, in the case of curing by radical photopolymerization,
Since oxygen inhibits curing, it must be cured in a vacuum or in the presence of an inert gas, and the active energy ray irradiation apparatus requires a corresponding facility. In addition, a compounded resin containing a radical polymerization initiator has drawbacks such that the viscosity of the resin is likely to increase and storage stability is poor.
【0009】[0009]
【問題を解決するための手段】本発明者らは上記課題を
解決するために、空気下でも硬化阻害されない保存安定
性に優れた無溶剤一液型の活性エネルギー線硬化性樹脂
及びその水溶性硬化物を開発するに至った。すなわち本
発明は(A)オキシラン環を有する水溶性の光カチオン
重合性樹脂、(B)オキシラン環を有する非水溶性の光
カチオン重合性樹脂および(C)光酸発生剤を必須成分
として含有してなり、かつ組成物およびその硬化物が共
に水溶性であることを特長とする無溶剤一液型活性エネ
ルギー線硬化性樹脂組成物を提供するものである。In order to solve the above-mentioned problems, the present inventors have found that the solvent-free one-pack type active energy ray-curable resin excellent in storage stability, which does not inhibit curing even in air, and its water solubility. We have developed a cured product. That is, the present invention contains (A) a water-soluble photocationic polymerizable resin having an oxirane ring, (B) an insoluble photocationic polymerizable resin having an oxirane ring, and (C) a photoacid generator as essential components. And a solvent-free one-component active energy ray curable resin composition characterized in that both the composition and its cured product are water-soluble.
【0010】[0010]
【発明の実施の形態】本発明オキシラン環を有する水溶
性の光カチオン重合性樹脂<(A)成分>とは、光酸発
生剤の存在下で光照射することにより重合反応や架橋反
応を起こすオキシラン環を有する水溶性有機化合物であ
る。BEST MODE FOR CARRYING OUT THE INVENTION The water-soluble photocationic polymerizable resin having an oxirane ring <component (A)> of the present invention causes a polymerization reaction or a crosslinking reaction by being irradiated with light in the presence of a photoacid generator. It is a water-soluble organic compound having an oxirane ring.
【0011】(A)成分として使用することのできる樹
脂としては、例えばグリセリン、ジグリセリン、ポリグ
リセリン、ジエチレングリコール、ポリエチレングリコ
ール、ソルビトールなどのポリグリシジルエーテル、お
よびグリセリン、ジグリセリン、ポリグリセリン、ジエ
チレングリコール、ポリエチレングリコール、ソルビト
ールなどのアルキレンオキサイド付加体のポリグリシジ
ルエーテルなどが挙げられ、好ましくはポリグリセリン
ポリグリシジルエーテルが用いられる。また、オキセタ
ニル基を有する3−エチル−3−ヒドロキシメチルエオ
キセタンを用いても差し支えない。Examples of the resin that can be used as the component (A) include polyglycidyl ethers such as glycerin, diglycerin, polyglycerin, diethylene glycol, polyethylene glycol and sorbitol, and glycerin, diglycerin, polyglycerin, diethylene glycol and polyethylene. Examples thereof include polyglycidyl ethers of alkylene oxide adducts such as glycol and sorbitol, and polyglycerin polyglycidyl ether is preferably used. Also, 3-ethyl-3-hydroxymethyleoxetane having an oxetanyl group may be used.
【0012】上記の化合物は、モノマーに限らずオリゴ
マー化物でも良く、1種単独でまたは2種以上のものを
組み合わせて(A)成分を構成することができる。本発
明の活性エネルギー線硬化性樹脂組成物のうち(A)お
よび(B)を併せたカチオン重合性樹脂(以下、主成分
と略す)中に含まれる(A)成分の割合は、通常は50
〜95重量%とされ、好ましくは60〜90重量%とさ
れる。(A)成分が50重量%より少ない場合には、得
られる硬化被膜が水により剥離できなくなる。また、
(A)成分が95重量%より多い場合には、硬化速度が
遅いため現像性、解像性が悪くなる。The above compound is not limited to a monomer, and may be an oligomerized product, and the component (A) can be composed of one type alone or a combination of two or more types. In the active energy ray-curable resin composition of the present invention, the ratio of the component (A) contained in the cationically polymerizable resin (hereinafter abbreviated as the main component) which is a combination of (A) and (B) is usually 50.
To 95% by weight, preferably 60 to 90% by weight. When the amount of the component (A) is less than 50% by weight, the cured film obtained cannot be peeled off with water. Also,
When the amount of the component (A) is more than 95% by weight, the curing rate is slow and the developability and resolution are poor.
【0013】本発明のオキシラン環を有する非水溶性の
光カチオン重合性樹脂<(B)成分>とは、光酸発生剤
の存在下で光照射することにより重合反応や架橋反応を
起こすオキシラン環を有する非水溶性有機化合物であ
る。The water-insoluble photocationic polymerizable resin having an oxirane ring <component (B)> of the present invention means an oxirane ring which causes a polymerization reaction or a crosslinking reaction by being irradiated with light in the presence of a photoacid generator. Is a water-insoluble organic compound having
【0014】(B)成分として使用することのできる樹
脂としては、少なくとも1つ、好ましくは2つ以上のオ
キシラン環を有するグリシジルエーテル型のエポキシ樹
脂および脂環式エポキシ樹脂である。また、オキセタン
化合物またはビニルエーテル化合物を用いても差し支え
ない。The resin which can be used as the component (B) is a glycidyl ether type epoxy resin having at least one, preferably two or more oxirane rings, and an alicyclic epoxy resin. Further, an oxetane compound or a vinyl ether compound may be used.
【0015】非水溶性のグリシジルエーテル型のエポキ
シ樹脂としては、特に限定されるものではないが、ブチ
ルグリシジルエーテル、ポリプロピレングリコールジグ
リシジルエーテル、ネオペンチルグリコールジグリシジ
ルエーテル、1,4−ブタンジオールジグリシジルエー
テル、1,6−ヘキサンジオールジグリシジルエーテ
ル、トリメチロールプロパンポリグリシジルエーテル、
水素化ビスフェノールAジグリシジルエーテル、フェニ
ルグリシジルエーテル、ビスフェノールAジグリシジル
エーテル、ビスフェノールFジグリシジルエーテル、ビ
スフェノールSジグリシジルエーテル、ハロゲン化ビス
フェノール型エポキシ樹脂、クレゾールノボラック型エ
ポキシ樹脂、ハロゲン化クレゾールノボラック型エポキ
シ樹脂、フェノールノボラック型エポキシ樹脂などが挙
げられ、好ましくは水素化ビスフェノールAジグリシジ
ルエーテルが用いられる。The water-insoluble glycidyl ether type epoxy resin is not particularly limited, but butyl glycidyl ether, polypropylene glycol diglycidyl ether, neopentyl glycol diglycidyl ether, 1,4-butanediol diglycidyl ether. Ether, 1,6-hexanediol diglycidyl ether, trimethylolpropane polyglycidyl ether,
Hydrogenated bisphenol A diglycidyl ether, phenyl glycidyl ether, bisphenol A diglycidyl ether, bisphenol F diglycidyl ether, bisphenol S diglycidyl ether, halogenated bisphenol type epoxy resin, cresol novolac type epoxy resin, halogenated cresol novolac type epoxy resin , Phenol novolac type epoxy resin and the like, and hydrogenated bisphenol A diglycidyl ether is preferably used.
【0016】脂環式エポキシ樹脂は、特に限定されるも
のではないが、3,4−エポキシシクロヘキシルメチル
−3’,4’−エポキシシクロヘキサンカルボキシレー
ト、ビス(3,4−エポキシシクロヘキシルメチル)ア
ジペート、エポキシ化ポリブタジエンなどが挙げられ
る。The alicyclic epoxy resin is not particularly limited, but 3,4-epoxycyclohexylmethyl-3 ', 4'-epoxycyclohexanecarboxylate, bis (3,4-epoxycyclohexylmethyl) adipate, Examples thereof include epoxidized polybutadiene.
【0017】オキセタン化合物は、特に限定されるもの
ではないが、1,4−ビス{〔(3−エチル−3−オキ
セタニル)メトキシ〕メチル}ベンゼン、3−エチル−
3−(フェノキシメチル)オキセタン、ジ〔1−エチル
(3−オキセタニル)〕メチルエーテル、3−エチル−
3−(2−エチルヘキシロキシメチル)オキセタンなど
が挙げられる。The oxetane compound is not particularly limited, but is 1,4-bis {[(3-ethyl-3-oxetanyl) methoxy] methyl} benzene, 3-ethyl-
3- (phenoxymethyl) oxetane, di [1-ethyl (3-oxetanyl)] methyl ether, 3-ethyl-
3- (2-ethylhexyloxymethyl) oxetane and the like can be mentioned.
【0018】ビニルエーテル化合物は、特に限定される
ものではないが、ビニルメチルエーテル、ジビニルエー
テル、ビニルエチルエーテル、ビニルイソプロピルエー
テル、ビニルイソアミルエーテルなどが挙げられる。The vinyl ether compound is not particularly limited, and examples thereof include vinyl methyl ether, divinyl ether, vinyl ethyl ether, vinyl isopropyl ether and vinyl isoamyl ether.
【0019】上記の化合物は、モノマーに限らずオリゴ
マー化物でも良く、1種単独でまたは2種以上のものを
組み合わせて(B)成分を構成することができる。本発
明の主成分中における(B)成分の割合は、通常は5〜
50重量%とされ、好ましくは10〜40重量%とされ
る。(B)成分が5重量%より少ない場合には、硬化速
度が遅いため現像性、解像性が悪くなる。また、(B)
成分が50重量%より多い場合には、得られる硬化被膜
が水により剥離できなくなる。The above compound is not limited to a monomer, and may be an oligomer compound, and the component (B) can be composed of one type alone or a combination of two or more types. The proportion of the component (B) in the main component of the present invention is usually 5 to
It is 50% by weight, preferably 10-40% by weight. When the amount of the component (B) is less than 5% by weight, the curing rate is slow and the developability and resolution are poor. Also, (B)
When the content of the component is more than 50% by weight, the resulting cured film cannot be peeled off by water.
【0020】本発明で用いる光酸発生剤<(C)成分>
とは、活性エネルギー線を照射することにより活性さ
れ、カチオン種を発生し前記(A)成分および(B)成
分をカチオン重合させる化合物であり、特に限定される
ものではないが、芳香族ヨードニウム塩、芳香族スルホ
ニウム塩、ジアゾニウム塩等のオニウム塩や、鉄−アレ
ン錯体等の有機金属錯体類等が挙げられる。光酸発生剤
は一般的に(R1 aR2 bR3 cR4 dZ)+m(MX
n−m)−m[式中、カチオンはオニウム塩であり、Z
はS,Se,Te,P,As,Sb,Bi,O,I,B
r,ClまたはN≡Nであり、R1、R2、R3および
R4は同一または異なる有機基である。a,b,c,d
は、それぞれ0〜3の整数であって、(a+b+c+d)
はZの価数に等しい。Mはハロゲン化物錯体の中心原子
を構成する金属またはメタロイドであり、例えばB,
P,As,Sb,Fe,Sn,Bi,Al,Ca,I
n,Ti,Zn,Sc,V,Cr,Mn,Coなどであ
る。Xはハロゲン原子である。mはハロゲン化物錯体イ
オンの正味の電荷であり、nはハロゲン化物錯体イオン
中の原子の数である。]で表される。Photoacid generator used in the present invention <(C) component>
Is activated by irradiating with active energy rays.
To generate cation species and generate the components (A) and (B).
It is a compound that cationically polymerizes the component, and is not particularly limited.
Aromatic iodonium salts, aromatic sulfo
Onium salts, such as aluminum salts and diazonium salts, and iron
Examples thereof include organic metal complexes such as benzene complex. Photo acid generator
Is generally (R1 aRTwo bRThree cRFour dZ)+ M(MX
nm)-M[Wherein the cation is an onium salt, and Z
Is S, Se, Te, P, As, Sb, Bi, O, I, B
r, Cl or N≡N, and R1, RTwo, RThreeand
RFourAre the same or different organic groups. a, b, c, d
Are integers of 0 to 3 respectively, (a + b + c + d)
Is equal to the valence of Z. M is the central atom of the halide complex
Is a metal or metalloid that constitutes, for example, B,
P, As, Sb, Fe, Sn, Bi, Al, Ca, I
n, Ti, Zn, Sc, V, Cr, Mn, Co, etc.
It X is a halogen atom. m is a halide complex a
Is the net charge on and n is a halide complex ion
The number of atoms inside. ]] Is represented.
【0021】上記一般式における陽イオン(R1 aR2
bR3 cR4 dZ)の具体例としては芳香族スルホニウ
ム、芳香族ジアゾニウム、芳香族ヨードニウム、芳香族
アンモニウム、[(1-メチルエチル)ベンゼン]−鉄
カチオンなどが挙げられる。陰イオン(MXn−m)の
具体例としてはテトラフルオロボレート(BF4)、ヘ
キサフルオロアンチモネート(SbF6)、ヘキサフル
オロホスフェート(PF6)、ヘキサフルオロアーセネ
ート(AsF6)、ヘキサクロロアンチモネート(Sb
Cl6)などが挙げられる。The cation (R 1 a R 2 in the above general formula
Specific examples of b R 3 c R 4 d Z) include aromatic sulfonium, aromatic diazonium, aromatic iodonium, aromatic ammonium, and [(1-methylethyl) benzene] -iron cation. Specific examples of the anion (MX n-m ) include tetrafluoroborate (BF 4 ), hexafluoroantimonate (SbF 6 ), hexafluorophosphate (PF 6 ), hexafluoroarsenate (AsF 6 ), hexachloroantimonate. (Sb
Cl 6 ) and the like.
【0022】また、一般式[MXn(OH)−]で表さ
れる陰イオンを有するオニウム塩を使用することもでき
る。さらに、テトラキスペンタフルオロフェニルボレー
ト[B(C6F5)4 −]、過塩素酸イオン(ClO4
−)、トリフルオロメタンスルホン酸イオン(CF3S
O3 −)、フルオロスルホン酸イオン(FSO3 −)、
トルエンスルホン酸イオンなどの他の陰イオンを有する
オニウム塩を使用することもできる。It is also possible to use an onium salt having an anion represented by the general formula [MX n (OH) − ]. Further, tetrakis pentafluorophenyl borate [B (C 6 F 5) 4 -], perchlorate ion (ClO 4
-), trifluoromethanesulfonate ion (CF 3 S
O 3 − ), fluorosulfonate ion (FSO 3 − ),
It is also possible to use onium salts with other anions such as toluene sulphonate.
【0023】このようなオニウム塩のうち、(C)成分
として有用なオニウム塩は以下のものである。すなわ
ち、芳香族スルホニウム塩には、ビス[4−(ジフェニ
ルスルホニオ)フェニル]スルフィドビスへキサフルオ
ロホスフェート、ビス[4−(ジフェニルスルホニオ)
フェニル]スルフィドビスへキサフルオロアンチモネー
ト、ビス[4−(ジフェニルスルホニオ)フェニル]ス
ルフィドビステトラフルオロボレート、ビス[4−(ジ
フェニルスルホニオ)フェニル]スルフィドテトラキス
(ペンタフルオロフェニル)ボレート、ジフェニル−4
−(フェニルチオ)フェニルスルホニウムへキサフルオ
ロホスフェート、ジフェニル−4−(フェニルチオ)フ
ェニルスルホニウムヘキサフルオロアンチモネート、ジ
フェニル−4−(フェニルチオ)フェニルスルホニウム
テトラフルオロボレート、ジフェニル−4−(フェニル
チオ)フェニルスルホニウムテトラキス(ペンタフルオ
ロフェニル)ボレート、トリフェニルスルホニウムヘキ
サフルオロホスフェート、トリフェニルスルホニウムへ
キサフルオロアンチモネート、トリフェニルスルホニウ
ムテトラフルオロボレート、トリフェニルスルホニウム
テトラキス(ペンタフルオロフェニル)ボレート、ビス
[4−〈ジ(4−(2−ヒドロキシエトキシ))フェニ
ルスルホニオ〉フェニル]スルフィドビスへキサフルオ
ロホスフェート、ビス[4−(ジ(4−(2−ヒドロキ
シエトキシ))フェニルスルホニオ)フェニル]スルフ
ィドビスヘキサフルオロアンチモネート、ビス[4−
(ジ(4−(2−ヒドロキシエトキシ))フェニルスル
ホニオ)フェニル]スルフィドビステトラフルオロボレ
ート、ビス[4−(ジ(4−(2−ヒドロキシエトキ
シ))フェニルスルホニオ)フェニル]スルフィドテト
ラキス(ペンタフルオロフェニル)ボレート等;芳香族
ヨードニウム塩には、ジフェニルヨードニウムヘキサフ
ルオロホスフェート、ジフェニルヨードニウムへキサフ
ルオロアンチモネート、ジフェニルヨードニウムテトラ
フルオロボレート、ジフェニルヨードニウムテトラキス
(ペンタフルオロフェニル)ボレート、ビス(ドデシル
フェニル)ヨードニウムへキサフルオロホスフェート、
ビス(ドデシルフェニル)ヨードニウムへキサフルオロ
アンチモネート、ビス(ドデシルフェニル)ヨードニウ
ムテトラフルオロボレート、ビス(ドデシルフェニル)
ヨードニウムテトラキス(ペンタフルオロフェニル)ボ
レート、4−メチルフェニル−4−(1−メチルエチ
ル)フェニルヨードニウムへキサフルオロホスフェー
ト、4−メチルフェニル−4−(1−メチルエチル)フ
ェニルヨードニウムへキサフルオロアンチモネート、4
−メチルフェニル−4−(1−メチルエチル)フェニル
ヨードニウムテトラフルオロボレート、4−メチルフェ
ニル−4−(1−メチルエチル)フェニルヨードニウム
テトラキス(ペンタフルオロフェニル)ボレート等;芳
香族ジアゾニウム塩には、フェニルジアゾニウムへキサ
フルオロホスフェート、フェニルジアゾニウムヘキサフ
ルオロアンチモネート、フェニルジアゾニウム テトラ
フルオロボレート、フェニルジアゾニウムテトラキス
(ペンタフルオロフェニル)ボレート等;芳香族アンモ
ニウム塩には、1−べンジル−2−シアノピリジニウム
へキサフルオロホスフェート、1−ベンジル−2−シア
ノピリジニウムへキサフルオロアンチモネート、1−ベ
ンジル−2−シアノピリジニウムテトラフルオロボレー
ト、1−べンジル−2−シアノピリジニウムテトラキス
(ペンタフルオロフェニル)ボレート、1−(ナフチル
メチル)−2−シアノピリジニウムヘキサフルオロホス
フェート、1−(ナフチルメチル)−2−シアノピリジ
ニウムへキサフルオロアンチモネート、1−(ナフチル
メチル)−2−シアノピリジニウムテトラフルオロボレ
ート、1−(ナフチルメチル)−2−シアノピリジニウ
ムテトラキス(ペンタフルオロフェニル)ボレート等;
(2,4−シクロペンタジエン−1−イル)[(1−メ
チルエチル)べンゼン]−Fe塩には、(2,4−シク
ロペンタジエン−1−イル)[(1−メチルエチル)ベ
ンゼン]−Fe(II)ヘキサフルオロホスフェート、
(2,4−シクロペンタジエン−1−イル)[(1−メ
チルエチル)ベンゼン]−Fe(II)へキサフルオロア
ンチモネート、(2,4−シクロペンタジエン−1−イ
ル)[(1−メチルエチル)ベンゼン]−Fe(II)テ
トラフルオロボレート、(2,4−シクロペンタジエン
−1−イル)[(1−メチルエチル)ベンゼン]−Fe
(II)テトラキス(ペンタフルオロフェニル)ボレート
等、が挙げられる。Of these onium salts, the onium salts useful as the component (C) are as follows. That is, the aromatic sulfonium salt includes bis [4- (diphenylsulfonio) phenyl] sulfide bishexafluorophosphate and bis [4- (diphenylsulfonio).
Phenyl] sulfide bishexafluoroantimonate, bis [4- (diphenylsulfonio) phenyl] sulfide bistetrafluoroborate, bis [4- (diphenylsulfonio) phenyl] sulfide tetrakis (pentafluorophenyl) borate, diphenyl-4
-(Phenylthio) phenylsulfonium hexafluorophosphate, diphenyl-4- (phenylthio) phenylsulfonium hexafluoroantimonate, diphenyl-4- (phenylthio) phenylsulfonium tetrafluoroborate, diphenyl-4- (phenylthio) phenylsulfonium tetrakis (penta Fluorophenyl) borate, triphenylsulfonium hexafluorophosphate, triphenylsulfonium hexafluoroantimonate, triphenylsulfonium tetrafluoroborate, triphenylsulfonium tetrakis (pentafluorophenyl) borate, bis [4- <di (4- (2 -Hydroxyethoxy)) phenylsulfonio> phenyl] sulfide bishexafluorophosphate, The [4- (di (4- (2-hydroxyethoxy)) phenylsulfonio) phenyl] sulfide bis hexafluoroantimonate, bis [4-
(Di (4- (2-hydroxyethoxy)) phenylsulfonio) phenyl] sulfide bistetrafluoroborate, bis [4- (di (4- (2-hydroxyethoxy)) phenylsulfonio) phenyl] sulfide tetrakis (penta Aromatic iodonium salts include diphenyliodonium hexafluorophosphate, diphenyliodonium hexafluoroantimonate, diphenyliodonium tetrafluoroborate, diphenyliodonium tetrakis (pentafluorophenyl) borate and bis (dodecylphenyl) iodonium. Oxafluorophosphate,
Bis (dodecylphenyl) iodonium hexafluoroantimonate, bis (dodecylphenyl) iodonium tetrafluoroborate, bis (dodecylphenyl)
Iodonium tetrakis (pentafluorophenyl) borate, 4-methylphenyl-4- (1-methylethyl) phenyliodonium hexafluorophosphate, 4-methylphenyl-4- (1-methylethyl) phenyliodonium hexafluoroantimonate, Four
-Methylphenyl-4- (1-methylethyl) phenyliodonium tetrafluoroborate, 4-methylphenyl-4- (1-methylethyl) phenyliodonium tetrakis (pentafluorophenyl) borate, etc .; aromatic diazonium salts include phenyl Diazonium hexafluorophosphate, phenyldiazonium hexafluoroantimonate, phenyldiazonium tetrafluoroborate, phenyldiazonium tetrakis (pentafluorophenyl) borate, etc .; aromatic ammonium salts include 1-benzyl-2-cyanopyridinium hexafluorophosphate , 1-benzyl-2-cyanopyridinium hexafluoroantimonate, 1-benzyl-2-cyanopyridinium tetrafluoroborate, 1-benzil-2 -Cyanopyridinium tetrakis (pentafluorophenyl) borate, 1- (naphthylmethyl) -2-cyanopyridinium hexafluorophosphate, 1- (naphthylmethyl) -2-cyanopyridinium hexafluoroantimonate, 1- (naphthylmethyl)- 2-cyanopyridinium tetrafluoroborate, 1- (naphthylmethyl) -2-cyanopyridinium tetrakis (pentafluorophenyl) borate and the like;
(2,4-Cyclopentadiene-1-yl) [(1-methylethyl) benzene] -Fe salt includes (2,4-cyclopentadiene-1-yl) [(1-methylethyl) benzene]- Fe (II) hexafluorophosphate,
(2,4-Cyclopentadiene-1-yl) [(1-methylethyl) benzene] -Fe (II) hexafluoroantimonate, (2,4-cyclopentadiene-1-yl) [(1-methylethyl ) Benzene] -Fe (II) tetrafluoroborate, (2,4-cyclopentadiene-1-yl) [(1-methylethyl) benzene] -Fe
(II) tetrakis (pentafluorophenyl) borate and the like.
【0024】上記の化合物は、1種単独でまたは2種以
上のものを組み合わせて(C)成分を構成することがで
きる。本発明の主成分100重量部に対する(C)成分
の割合は、通常は0.1〜10重量部とされ、好ましく
は0.2〜5重量部とされる。The above compounds may be used either individually or in combination of two or more as the component (C). The ratio of the component (C) to 100 parts by weight of the main component of the present invention is usually 0.1 to 10 parts by weight, preferably 0.2 to 5 parts by weight.
【0025】上記成分(A)、(B)および(C)を必
須成分とする組成物には必要に応じて着色剤として
(D)成分を使用することができる。この着色剤は通常
塗料や印刷分野で使用されるものであり、樹脂組成物を
着色させるために使用し、それを任意の色に着色させる
ことができる。If necessary, the component (D) may be used as a colorant in the composition containing the above components (A), (B) and (C) as essential components. This colorant is usually used in the paint and printing fields, and is used for coloring the resin composition, and it can be colored in any color.
【0026】(D)成分として使用することのできる着
色剤は、チタン白、亜鉛華などの白色顔料;シアニンブ
ルー、インダスレンブルーなどの青色顔料;シアニング
リーン、緑青などの緑色顔料;アゾ系やキナクリドン系
などの有機赤色顔料;ベンガラなどの無機赤色顔料;ベ
ンツイミダゾリン系、イソインドリノン系およびキノフ
タロン系などの有機黄色顔料;チタンイエロー、黄鉛な
どの無機黄色顔料;カーボンブラック、黒鉛、松煙など
の黒色顔料;アルミニウム粉、銅粉、ニッケル粉、酸化
チタン皮膜マイカ粉、酸化鉄皮膜マイカ粉および光輝性
グラファイトなどの光輝性顔料が挙げられる。また、着
色剤には顔料のみならず染料も用いることができる。The colorant which can be used as the component (D) includes white pigments such as titanium white and zinc white; blue pigments such as cyanine blue and indanthrene blue; green pigments such as cyanine green and patina; Organic red pigments such as quinacridone type; Inorganic red pigments such as red iron oxide; Organic yellow pigments such as benzimidazoline type, isoindolinone type and quinophthalone type; Inorganic yellow pigments such as titanium yellow and yellow lead; Carbon black, graphite, pine smoke Black pigments such as; aluminum powder, copper powder, nickel powder, titanium oxide-coated mica powder, iron oxide-coated mica powder, and bright pigments such as bright graphite. Further, not only a pigment but also a dye can be used as the colorant.
【0027】上記の化合物の1種単独でまたは2種以上
のものを組み合わせて(D)成分を構成することができ
る。The component (D) can be composed of one type of the above compounds or a combination of two or more types.
【0028】<任意成分>本発明の活性エネルギー線硬
化性樹脂組成物には、光硬化性を損なわない範囲におい
て、上記の(A)〜(C)の必須成分および(D)成分
以外の成分を含有させることができる。かかる任意成分
としては、アミン類、チオキサントン類、アントラセン
類、フェノチアジン類からなる光増感剤、分解してp-ト
ルエンスルホン酸などの酸を発生する酸増殖剤、水酸化
アルカリ金属・炭酸アルカリ土類金属・リン酸アルカリ
土類金属などの酸補足剤、老化防止剤、レベリング剤、
界面活性剤、紫外線吸収剤、シランカップリング剤、無
機充填剤、樹脂粒子、濡れ性改良剤などを挙げることが
できる。<Optional Components> The active energy ray-curable resin composition of the present invention contains components other than the essential components (A) to (C) and the component (D) as long as the photocurability is not impaired. Can be included. Such optional components include photosensitizers composed of amines, thioxanthones, anthracenes, and phenothiazines, acid proliferating agents that decompose to generate acids such as p-toluenesulfonic acid, alkali metal hydroxides and alkaline earth carbonates. Acid scavengers for metals and alkaline earth metal phosphates, anti-aging agents, leveling agents,
Examples thereof include surfactants, ultraviolet absorbers, silane coupling agents, inorganic fillers, resin particles, and wettability improvers.
【0029】本発明における活性エネルギー線とは特に
限定されるものではないが、例えばマイクロ波、赤外
線、可視光、紫外線、X線、γ線、電子線等が挙げら
れ、好ましくはその中でも簡便に使用でき、比較的エネ
ルギーの大きい紫外線が使用される。The active energy ray in the present invention is not particularly limited, but examples thereof include microwaves, infrared rays, visible light, ultraviolet rays, X-rays, γ-rays, electron rays, etc., and among them, simple and easy are preferable. Ultraviolet rays that can be used and have relatively large energy are used.
【0030】上記の紫外線は、光源として水銀灯、キセ
ノンランプ、メタルハライドランプ、固体レーザーなど
が上げられ特に限定されるものではないが、好ましくは
水銀灯が使用される。The above-mentioned ultraviolet rays are not particularly limited, and a mercury lamp, a xenon lamp, a metal halide lamp, a solid laser, etc. can be used as a light source, but a mercury lamp is preferably used.
【0031】以下、本発明の詳細を合成例及び実施例に
より具体的に説明する。ただし、本発明はその要旨を越
えない限りにおいて、以下の実施例に制約されるもので
はない。The details of the present invention will be specifically described below with reference to synthesis examples and examples. However, the present invention is not limited to the following examples as long as the gist thereof is not exceeded.
【0032】[0032]
【実施例】<実施例1>表1に示す処方配合に従って、
ポリグリセリンポリグリシジルエーテル「SR−4G
L」(阪本薬品工業(株)製)85重量部、水素化ビスフ
ェノールAジグリシジルエーテル「SR−HBA」(阪
本薬品工業(株)製)15重量部、トリアリールスルホニ
ウムヘキサフルオロホスフェート塩混合物「UVI−6
990」(ユニオン・カーバイド日本(株)製)2.0重
量部、ジエチルチオキサントン「DETX−S」(日本
化薬(株)製)0.5重量部を攪拌容器内に仕込み、50
℃で1時間攪拌することにより、無色透明な液状組成物
(本発明の樹脂組成物)を得た。得られた樹脂組成物を
ガラスエポキシ銅張り積層板上にバーコーターで約20
μmの膜厚になるように塗布した。必要に応じて部分的
に遮光するためにネガマスクを用い、高圧水銀灯にて3
00mJ/cm2照射し、その後150℃に設定した熱
風乾燥機で30分間静置した。得られた硬化皮膜の物性
評価を、下記の評価方法で行った。その結果を表1に示
した。EXAMPLE <Example 1> According to the formulation shown in Table 1,
Polyglycerin Polyglycidyl ether "SR-4G
L "(manufactured by Sakamoto Yakuhin Kogyo Co., Ltd.) 85 parts by weight, hydrogenated bisphenol A diglycidyl ether" SR-HBA "(manufactured by Sakamoto Yakuhin Kogyo Co., Ltd.) 15 parts by weight, triarylsulfonium hexafluorophosphate salt mixture" UVI " -6
990 "(manufactured by Union Carbide Japan Co., Ltd.) 2.0 parts by weight and diethylthioxanthone" DETX-S "(manufactured by Nippon Kayaku Co., Ltd.) 0.5 parts by weight were charged in a stirring container, and 50
A colorless transparent liquid composition (resin composition of the present invention) was obtained by stirring at 0 ° C. for 1 hour. The obtained resin composition was applied on a glass epoxy copper-clad laminate with a bar coater for about 20 minutes.
It was applied so as to have a film thickness of μm. Use a negative mask to partially shield the light if necessary, and use a high pressure mercury lamp to
It was irradiated with 00 mJ / cm 2 and then left to stand for 30 minutes in a hot air dryer set at 150 ° C. The physical properties of the obtained cured film were evaluated by the following evaluation methods. The results are shown in Table 1.
【0033】<実施例2〜4>表1に示す処方配合に従
って、(A)〜(D)成分および任意成分を攪拌混合し
たこと以外は実施例1と同様にして、液状組成物(本発
明の樹脂組成物)を得た後、硬化皮膜を作成し、物性評
価を行った。その結果を表1に示した。<Examples 2 to 4> Liquid compositions (the present invention) were prepared in the same manner as in Example 1 except that the components (A) to (D) and optional components were stirred and mixed according to the formulation shown in Table 1. After obtaining (resin composition), a cured film was prepared and the physical properties were evaluated. The results are shown in Table 1.
【0034】<比較例1〜3>表1に示す処方配合に従
って、各構成成分を攪拌混合したこと以外は実施例1と
同様にして液状組成物を得た後、硬化皮膜を作成し、物
性評価を行った。その結果を表1に示した。<Comparative Examples 1 to 3> According to the formulation shown in Table 1, a liquid composition was obtained in the same manner as in Example 1 except that the respective constituents were stirred and mixed, and then a cured film was prepared to have physical properties. An evaluation was made. The results are shown in Table 1.
【0035】以下に、上述の実施例等における評価方法
を説明する。
(水現像性)硬化後の基板を25℃の純水中に静置さ
せ、塗膜を水で現像し、次の基準で評価した。
○:現像が2分未満で完了する。
△:現像が2分以上10分未満で完了する。
×:現像を10分以上行っても樹脂が残存しているため
現像できない。
(解像性)KODAK Contact Control Guide,C-3(Kodak社
製)を用いて、水現像実施後の解像性を観察し、次の基
準で評価した。
○:ライン/スペース=250μm/250μm以下の
パターンで像を描けている。
△:ライン/スペース=250μm/250μmより大
きいパターンで像を描けている。
×:全く像を描けない。
(耐エッチング性)現像後基板を40℃の塩化第二鉄水
溶液にて60秒間エッチングを実施し、終了後のレジス
トを観察し、次の基準で評価した。
○:レジストに白化、剥がれ、ふくれが全くない。
△:レジストに白化、剥がれ、ふくれのいずれかがあ
る。
×:レジストが完全に剥離した。
(水剥離性)硬化皮膜を25℃の純水を脱脂綿に含ま
せ、ラビングにより水剥離性を観察し、次の基準で評価
した。
○:20回未満のラビングにより硬化物を除去すること
ができた。
△:20回以上100回未満のラビングにより硬化物を
除去することができた。
×:100回以上のラビングを行っても全く除去できな
かった。
(保存安定性)配合後の粘度と50℃下20日間保存し
た後の粘度をそれぞれ測定し、粘度の上昇を元に保存安
定性として次の基準で評価した。
○:粘度の上昇が5%未満
△:粘度の上昇が5%以上20%未満
×:粘度の上昇が20%以上The evaluation method in the above-mentioned examples and the like will be described below. (Water developability) The cured substrate was allowed to stand in pure water at 25 ° C., the coating film was developed with water, and evaluated according to the following criteria. ◯: Development is completed in less than 2 minutes. Δ: Development is completed in 2 minutes or more and less than 10 minutes. X: Development is not possible because the resin remains even after development for 10 minutes or more. (Resolution) Using KODAK Contact Control Guide, C-3 (manufactured by Kodak), the resolution after water development was observed and evaluated according to the following criteria. Good: An image can be drawn with a pattern of line / space = 250 μm / 250 μm or less. Δ: An image can be drawn with a pattern larger than line / space = 250 μm / 250 μm. X: No image can be drawn. (Etching resistance) After development, the substrate was etched with a ferric chloride aqueous solution at 40 ° C. for 60 seconds, and the resist after completion was observed and evaluated according to the following criteria. ◯: The resist has no whitening, peeling, or blistering. Δ: The resist has any of whitening, peeling and swelling. X: The resist was completely peeled off. (Water-Removability) Pure water at 25 ° C. was added to absorbent cotton and the water-removability was observed by rubbing, and evaluated according to the following criteria. ◯: The cured product could be removed by rubbing less than 20 times. B: The cured product could be removed by rubbing 20 times or more and less than 100 times. X: No removal was possible even after rubbing 100 times or more. (Storage Stability) The viscosity after blending and the viscosity after storage at 50 ° C. for 20 days were measured, and the storage stability was evaluated based on the increase in viscosity according to the following criteria. ◯: Viscosity increase is less than 5% Δ: Viscosity increase is 5% or more and less than 20% X: Viscosity increase is 20% or more
【0036】[0036]
【表1】 [Table 1]
【0037】上記表1に示したように、実施例で示した
樹脂組成物は水現像でき、耐エッチング性に優れ、かつ
水剥離可能であることが判った。As shown in Table 1 above, it was found that the resin compositions shown in the examples can be developed with water, have excellent etching resistance, and can be peeled off with water.
【0038】[0038]
【発明の効果】本発明の活性エネルギー線硬化性樹脂組
成物は、空気中でも硬化でき、保存安定性も良く、無溶
剤でかつ一液型であるため、作業環境上取り扱いやす
く、現像・硬化皮膜剥離を水のみで行うことができる等
の特長を持つ為、フォトリソグラフィー用レジスト材料
として特にエッチングレジストとして使用できる。EFFECT OF THE INVENTION The active energy ray-curable resin composition of the present invention can be cured in air, has good storage stability, is solvent-free and is a one-part type, and therefore is easy to handle in a work environment and has a developed / cured film. Since it can be stripped only with water, it can be used as a resist material for photolithography, particularly as an etching resist.
フロントページの続き Fターム(参考) 2H025 AA04 AA16 AB15 AB17 AC01 AD01 BD03 BD23 BE07 CA32 CA48 CC11 FA17 Continued front page F-term (reference) 2H025 AA04 AA16 AB15 AB17 AC01 AD01 BD03 BD23 BE07 CA32 CA48 CC11 FA17
Claims (2)
チオン重合性樹脂を50〜95重量%、(B)オキシラ
ン環を有する非水溶性の光カチオン重合性樹脂を5〜5
0重量%(但し、(A)成分および(B)成分を併せて
100重量%とする)を含有する主剤成分100重量部
に対して、(C)光酸発生剤を0.1〜10重量部含有
する無溶剤一液型活性エネルギー線硬化性樹脂組成物。1. A water-soluble photocationic polymerizable resin having (A) an oxirane ring in an amount of 50 to 95% by weight, and a non-water-soluble photocationic polymerizable resin having an (O) oxirane ring in an amount of 5 to 5% by weight.
0.1 to 10 parts by weight of the photoacid generator (C) based on 100 parts by weight of the main agent component containing 0% by weight (however, the components (A) and (B) are combined to make up 100% by weight). Part-containing solvent-free one-component active energy ray curable resin composition.
性エネルギー線硬化性樹脂組成物。2. The active energy ray-curable resin composition according to claim 1, which contains (D) a colorant.
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JP2002127518A JP2003322969A (en) | 2002-04-26 | 2002-04-26 | Solvent-free one-liquid active energy beam-curable resin composition |
Publications (1)
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006259266A (en) * | 2005-03-17 | 2006-09-28 | Tokyo Ohka Kogyo Co Ltd | Photosensitive resin composition and color filter |
-
2002
- 2002-04-26 JP JP2002127518A patent/JP2003322969A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006259266A (en) * | 2005-03-17 | 2006-09-28 | Tokyo Ohka Kogyo Co Ltd | Photosensitive resin composition and color filter |
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