JP2003302088A - Precision temperature/humidity control method and its device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a precision temperature/humidity control method and its device which reduced power consumption. <P>SOLUTION: In air-conditioned air SA whose temperature and humidity is controlled by installing a reheater 20 on the blowing side of an evaporator 19 for cooling an outside air OA, by introducing a part of hot gas coming from a compressor 14 into the reheater 20, by reheating air cooled by the evaporator 19 with that hot gas and by humidifying the reheated air with a humidifier 21, this method and its device is provided with: a blowing-out temperature control part 40 for controlling diversion ratio of a three-way proportional control valve 16 based on a set temperature and the temperature of the air-conditioned air SA; a blowing-out humidity control part 41 for controlling humidification quantity at the humidifier 21 with a set humidity and the humidity of the air-conditioned air; and a humidification output control part 45 for generating control output to the humidifier 21 and a control output for controlling an operation frequency of an inverter device 27, an opening degree of an electronic expansion valve 17, and a cooling water amount to a condenser 15 based on input in advance of a humidification output set value SP6 to be the minimum humidification amount. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a precision temperature / humidity control method and device for supplying precision temperature / humidity-controlled conditioned air to a space to be precisely temperature controlled.

[0002]

2. Description of the Related Art In a process for performing precision processing such as a semiconductor process, a process device is maintained in a stable operating condition throughout the year, and is maintained in a stable environment in order to maintain the accuracy of the device itself even when stopped. Need to be placed. For this reason, when handling semiconductor process equipment, the process equipment is installed in a clean room where temperature and humidity are controlled, and particularly high-precision processing equipment is housed in a chamber called a chamber partitioned by partition walls to operate. There is.

In order to maintain the environment of the process equipment, the inside of this chamber is a space which is precisely temperature-controlled to a stability of ± 0.1 ° C. or higher, and the process equipment ensures the processing accuracy in this environment. is doing.

The temperature and humidity of the chamber are controlled by using a refrigeration cycle. After the outside air or the air in the chamber is introduced into the evaporator and cooled, it is reheated by an electric heater, and an ultrasonic humidifier or A pan-type humidifier is used to achieve the set temperature and humidity.

The semiconductor manufacturing process apparatus has become large in size as the semiconductor generation advances, and at the same time, the amount of power consumed becomes large, and a huge amount of power is required in a semiconductor factory. In particular, the electric heater for reheating for the above-mentioned process equipment that requires a high degree of temperature control accounts for a considerable proportion of power consumption.

Therefore, the inventor of the present invention has filed Japanese Patent Application No. 11-201.
No. 992 (Title of the invention: Precision temperature control device), a reheater connected to the refrigeration cycle is installed on the blowing side of the evaporator, and hot gas from the compressor is flowed to the reheater. Therefore, it was proposed to control the temperature by utilizing the waste heat of the refrigeration cycle. In this precision temperature control device, in order to split the hot gas from the compressor and supply it to the condenser and the reheater, the normal three-way valve has poor response, so the electro-pneumatic proportional control valve By converting the electric signal into air pressure by using, and adjusting the shunt ratio of the proportional control valve by the air pressure, the responsiveness is good and the precise temperature control of ± 0.1 ° C. or higher is possible.

[0007]

By the way, in the above proposal, the refrigeration cycle is operated at a cooling capacity of approximately the maximum in order to control the temperature and humidity, and the cooled and dehumidified air becomes the set temperature and humidity. As it is heated and humidified,
The power consumption for operating the refrigeration cycle and the humidifier still remains a problem.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a precision temperature / humidity control method and apparatus for solving the above-mentioned problems and capable of further reducing power consumption in performing precision temperature / humidity control.

[0009]

In order to achieve the above object, the invention of claim 1 heats and cools the air cooled by the evaporator of the refrigerating cycle to a set temperature and humidity to obtain conditioned air. In a precision temperature and humidity control method for supplying to a space where precision temperature control is to be performed, the compressor of the refrigeration cycle is operated with variable capacity by an inverter device, and the heating amount is controlled and set based on the set temperature and the temperature of the conditioned air. A precise temperature and humidity control method that controls the humidification amount in the humidifier from the humidity and the humidity of the conditioned air, and controls the compressor capacity by the inverter device so that the control output of the humidifier becomes the minimum humidification amount. Is.

According to a second aspect of the present invention, a compressor driven by an inverter device, a three-way proportional control valve, a condenser for condensing a refrigerant with cooling water, an expansion valve, and an evaporator are sequentially connected, and the three-way proportional control valve is connected. , Connecting a reheater for introducing hot gas shunted from the compressor via a three-way proportional control valve, and connecting the outlet side of the reheater to the inlet side of the condenser to form a refrigeration cycle, The above reheater is installed on the outlet side of the evaporator that cools the outside air, and a portion of the hot gas from the compressor is introduced into the reheater, and the hot gas reheats the air cooled by the evaporator. When heating and reheating the reheated air with a humidifier to make it temperature- and humidity-controlled air-conditioned air, blow-out temperature control that controls the diversion ratio of the three-way proportional control valve based on the set temperature and the temperature of the air-conditioned air Part, the set humidity and the humidity of the conditioned air Blow-out humidity control unit for controlling the amount of humidification in the humidifier, the humidification output set value is input so that the control output to the humidifier and the minimum amount of humidification in advance, the operating frequency of the inverter device based on this, Opening of electronic expansion valve,
It is a precise temperature / humidity control device having a humidification output control unit for producing a control output for controlling the amount of cooling water to a condenser.

According to a third aspect of the present invention, the refrigerant evaporation pressure of the evaporator and the control output from the humidification output control section are input to the refrigerant evaporation pressure control section, and the refrigerant evaporation pressure control section operates the inverter device accordingly. The precise temperature / humidity control device according to claim 2, wherein the frequency is controlled.

According to a fourth aspect of the present invention, the refrigerant suction temperature of the compressor and the control output from the humidification output control section are input to the suction refrigerant temperature control section, and the suction refrigerant temperature control section operates in response to the electronic expansion valve. The precision temperature / humidity control device according to claim 2, wherein the valve opening degree is controlled.

According to a fifth aspect of the present invention, the condensing pressure of the condenser and the control output from the humidification output control section are input to the condensing pressure control section, and the condensing pressure control section accordingly responds to the amount of cooling water to the condenser. The precise temperature / humidity control device according to claim 2, wherein a cooling water control valve for adjusting the temperature is controlled.

A sixth aspect of the present invention is the precision temperature and humidity control apparatus according to the second aspect, wherein the control output of the blowout humidity control section is input to the humidification output control section through a low-pass filter or the like.

According to a seventh aspect of the present invention, the humidification output set value input to the humidification output control unit is set in advance so as to be a minimum humidification amount in accordance with the blown air volume of the conditioned air.
It is the described precise temperature and humidity control device.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

First, the precision temperature and humidity device will be described with reference to FIG.

In FIG. 2, reference numeral 10 denotes a casing, and a machine room 11 is formed in the lower portion of the casing 10, and L extends from the center of the side surface of the casing 10 to the top of the casing 10.
An air-conditioning chamber 12 is formed in a letter shape, and a control chamber 13 is formed in an upper portion inside the casing 10. As will be described in detail with reference to FIG. 3, the machine chamber 11 accommodates a compressor 14, a condenser 15, an electro-pneumatic proportional control valve 16, an electronic expansion valve 17, and the like. Air-conditioned room 1
2, the evaporator 19 located at the suction port 18 for the outside air OA,
A reheater 20 is disposed, a pan-type or ultrasonic-type humidifier 21 is disposed in the air conditioning chamber 12 on the downstream side of the reheater 20, and a fan 23 is disposed on the air outlet 22 side of the air conditioning chamber 12. Are placed. A duct 24 for sending the temperature- and humidity-controlled air-conditioned air SA to an air-conditioned space (not shown) is connected to the air outlet 22.

FIG. 3 shows a refrigeration cycle of a precision temperature and humidity device, in which an electro-pneumatic proportional control valve 16 is connected to the discharge side of the compressor 14, and a condenser 15 is connected to one port 16a thereof. The electronic expansion valve 17 is provided on the outlet side of the condenser 15.
Is connected, the evaporator 19 is connected to the electronic expansion valve 17, and the outlet side of the evaporator 19 is connected to the suction side of the compressor 14.

The other port 16 of the electro-pneumatic proportional control valve 16
The reheater 20 is connected to b, and the outlet side of the reheater 20 is connected to the inlet side of the condenser 15 via the return line 25. A check valve 26 is connected to the return line 25.

The compressor 14 is driven by an inverter device 27 whose operating frequency is variable. The inverter device 27 is
The commercial power source is converted to direct current, and the transistor is used to drive the compressor 14 by converting it into a three-phase or single-phase alternating current with a variable output frequency. The transistor is operated in accordance with an operation command frequency from a control device 30 described later. Is driven by pulse width modulation to drive the motor of the compressor 14.

The electro-pneumatic proportional control valve 16 generates throttle valves 31a and 31b which are opened / closed by pneumatic pressure and pneumatic pressure in accordance with an inputted electric signal, and the throttle valve 31a, 31b is generated by the pneumatic pressure.
The electro-pneumatic converter 32 operates 31b, and the compression source 33 which supplies compressed air to the electro-pneumatic converter 32. The throttle valves 31a and 31b are designed so that their valve opening degrees are interlocked with each other, and when one valve opening degree is 100%, the other is 0% so that the total opening degree thereof is always 100% according to the air pressure. Both valve opening degrees are set.

To the condenser 15, a cooling water supply line 34 for cooling the hot gas from the compressor 14 and a drain line 35 for draining the cooled cooling water are connected, and the amount of cooling water in the drain line 35. Is connected to the cooling water control valve 36.

Next, the operation of the refrigeration cycle by the precision temperature and humidity device connected to the reheater 20 will be described.

The refrigerant in the refrigeration cycle shown in FIG. 3 is made into high-temperature high-pressure refrigerant gas (hot gas) in the compressor 14 and flows into the condenser 15, where it is heat-exchanged with cooling water and condensed.
It is decompressed by the electronic expansion valve 17, becomes a gas-liquid mixed refrigerant, and flows into the evaporator 19, where it exchanges heat with the outside air OA sucked by the fan 23 to evaporate and return to the compressor 14 to be compressed again and circulated. .

During the operation of this refrigeration cycle, the diversion ratio of the electro-pneumatic control valve 16 is adjusted so that a part of the hot gas from the compressor 14 is made to flow to the reheater 20 and cooled by the evaporator 19. Is reheated to the set temperature with hot gas and duct 2
The temperature of the conditioned air blown from No. 4 is controlled and the humidifier 21 controls the humidification to the set humidity.

As shown in FIGS. 2 and 3, on the outlet side of the fan 23, there are provided an outlet temperature sensor S1 for detecting the outlet temperature, a humidity sensor S2 for detecting the humidity, and an air volume sensor S6 for detecting the air volume of the conditioned air. It is provided. Further, in the pipe on the outlet side of the evaporator 19, an evaporation pressure sensor S3 that detects the evaporation pressure of the refrigerant and a suction temperature sensor S4 that detects the temperature of the refrigerant.
Is provided on the outlet side of the compressor 14, and a condensation pressure sensor S5 for detecting the condensation pressure of the refrigerant is provided.

The detection values of these sensors S1 to S6 are input to the control device 30, and based on the detection values, the control device 30 determines the operating frequency of the inverter device 27, the valve opening degree of the electronic expansion valve 17 (the degree of pressure reduction). ), Humidification amount in the humidifier 21, electric
The split flow ratio (reheat amount) of the air proportional control valve 16 is controlled. At this time, the control device 30 controls the capacity of the compressor 14 by the inverter device 27 so that the control output of the humidifier 21 becomes the minimum humidification amount, and at the same time, the electronic expansion valve so that the refrigeration cycle is stabilized by the capacity. 17, the amount of cooling water to the condenser 15 is controlled.

The control device 30 has a blow-out temperature sensor S1.
Based on the detected value of the
An electric signal is output to the electro-pneumatic converter 32 of the air proportional control valve 16, the amount of hot gas flowing to the reheater 20 is controlled to perform reheat control, and based on the detection value of the humidity sensor S2. The humidification amount in the humidifier 20 is controlled so that the humidity is set.

Further, the control device 30 has the evaporation pressure sensor S.
3, the operating frequency of the inverter device 27 is controlled, the decompression degree of the electronic expansion valve 17 is controlled based on the detection value of the refrigerant suction temperature sensor S4, and the condensing pressure sensor S5 is detected. Based on this, the cooling water control valve 36 is controlled.

The control device 30 controls the state (temperature and humidity) of the outside air OA sucked into the evaporator 19 and the conditioned air SA blown out.
According to the set temperature and humidity, first, the temperature and humidity of the conditioned air SA are controlled to reach a set value, the humidification output during the control is detected, and the humidification amount in the humidifier 21 is minimized. The output control is performed, and the inverter device 27, the electronic expansion valve 17, and the cooling water control valve 36 are controlled so that the refrigeration cycle operates stably.

Details of the control device 30 will be described with reference to FIG.

The controller 30 comprises a blow-out temperature control section 40, a blow-out humidity control section 41, a refrigerant evaporation pressure control section 42, a suction refrigerant temperature control section 43, a condensing pressure control section 44, and a humidification output control section 45. It

The blow-out temperature control section 40 compares the detected temperature PV1 input from the temperature sensor S1 with the set temperature SP1 and outputs a control signal MV1 to the electro-pneumatic proportional control valve 16 based on the result. , Reheat control.

The blowout humidity control section 41 compares the detected humidity PV2 input from the humidity sensor S2 with the set humidity SP2, and based on the result, outputs a control signal MV to the humidifier 21.
2 is output to perform humidification control.

The refrigerant evaporation pressure control unit 42 detects the detected pressure PV3 input from the evaporation pressure sensor S3 and the set evaporation pressure R.
Evaporative pressure control is performed by comparing and calculating SP3, outputting a control signal MV3 to the inverter device 27 based on the result, and varying the operating frequency of the compressor 14. In this case, the refrigerant evaporation pressure control unit 42 is controlled so that the suction pressure of the compressor 14 falls within the variable range of 0.4 to 0.54 MPa.

The suction refrigerant temperature control section 43 compares the detected suction temperature PV4 input from the refrigerant suction temperature sensor S4 with the set suction temperature RSP4, and outputs a control signal MV4 to the electronic expansion valve 17 based on the result. Then, the suction refrigerant temperature is controlled by changing the opening degree. in this case,
The suction refrigerant temperature control unit 43 determines that the suction refrigerant temperature is 14 to 1
The control is performed so as to fall within the variable range of 8 ° C.

The condensation pressure control unit 44 includes a condensation pressure sensor S
By comparing and calculating the detected pressure input from 5 and the set condensing pressure RSP5, and based on the result, by outputting the control signal MV5 to the cooling water control valve 36 and varying the cooling water amount,
Condensation pressure control is performed. In this case, the condensation pressure control unit 44
Is controlled so that the condensing pressure falls within a variable range of 1.4 to 1.6 MPa.

The humidification output control unit 45 is the blowing humidity control unit 4
The humidification control signal MV2 of 1 is compared with the humidification output set value SP6 and the control signal PV6 input through the low-pass filter 46 that cuts high-order components by the first-order lag four-stage coupling process, and based on the result. , And outputs the control output MV6 to the refrigerant evaporation pressure control unit 42.
The set evaporation pressure RSP3 converted based on the above is input to the suction refrigerant temperature control unit 43, and the set condensation pressure RSP5 is input to the condensation pressure control unit 44.

The humidification output set value SP6 input to the humidification output control unit 45 is determined based on the air volume value detected by the air volume sensor S6. That is, the air volume value detected by the air volume sensor S6 is input to the scaling 48, and based on the air volume value, the scaling 48 outputs 25% at the maximum air volume and 10% at the minimum air volume in the air volume range.
In the air flow range, a value of 25 to 10% is selected, and this is input to the humidification output setting device 49, and the humidification output setting device 49 receives this and sets the humidification output control unit 45 to the humidification output setting device. The value SP6 is output.

The humidification output set value SP6 is relative to the maximum humidification amount (the difference between the absolute humidity of the cooling air and the absolute humidity of the conditioned air SA when cooling is performed with the dehumidification amount of zero or minimum) in the blowout humidity control section 41. This is the ratio of the maximum humidification capacity of the humidifier 21 (maximum humidification amount / maximum humidification capacity), which changes depending on the air volume, so the air volume sensor S6 and the scaling 48
Then, a set value of 10 to 25% is selected according to the air volume.

Input range of this set value (10 to 25%)
Then, the control output MV6 takes a value of 0 to 100%. With respect to the control output MV6 of 0 to 100%, the set evaporation pressure RSP3 is 0 in the variable range of 0.4 to 0.54 MPa.
It takes a value of ~ 100%, and the set suction temperature RSP4 is 14
It takes a value of 0 to 100% in a variable range of -18 ° C, and the set condensing pressure RSP5 takes a value of 0 to 100% in a variable range of 1.4 to 1.6 MPa.

In the above, the control signal M to the humidifier 21
The control output PV6 of the humidification is detected from V2 through the low-pass filter 46, and the control output PV6 and the humidification output set value SP are compared and calculated to generate a control signal MV6 that minimizes the humidification output. On the basis of,
Refrigerant evaporation pressure control unit 42 for controlling the capacity of the refrigeration cycle
By making the set values of the suction refrigerant temperature control unit 43 and the condensation pressure control unit 44 variable, the cooling capacity (the purpose here is the dehumidification amount) can be minimized.

Further, the value of the control signal MV2 for the humidity control is set as the humidification control output PV6 through the low-pass filter 46 which performs the filter processing such as the first-order lag four-stage coupling.
Oscillation of the refrigerant evaporating pressure control unit 42, the suction refrigerant temperature control unit 43, and the condensing pressure control unit 44 is prevented, and operation is performed with minimum energy without disturbing the temperature control and humidity control, which are the original purpose of the precision temperature and humidity device. It will be possible.

The humidification output set value SP6 is equal to the humidifier 2
It is set in the range of 10 to 25% of the maximum humidification capacity of 1 and the minimum value (10
%), The followability to disturbance is good and the energy saving can be improved. In this case, if it is 10% or less, the cooling capacity (dehumidifying capacity) is small, and the followability of temperature and humidity due to disturbance is deteriorated.

Next, the precise temperature and humidity control by the control device 30 of the present invention and the control of the above-mentioned prior application will be described with reference to the psychrometric charts of FIGS.

FIGS. 6 and 7 show the control of the prior application.

FIG. 6 shows the change on the air diagram when the outside air OA (temperature 27 ° C., relative humidity 50% RH) is changed to conditioned air SA (set temperature 21 ° C., set relative humidity 50% RH). As shown, the outside air OA is cooled by an evaporator to a point CA ′ (temperature 10 ° C., relative humidity 90% RH), and this is reheated with absolute humidity as it is and at a point HA ′ (temperature 21 ℃,
Relative humidity 45% RH) and reheat this to a relative humidity of 50
An example is shown in which the conditioned air SA is humidified to% RH and the outside air OA is cooled to the point CA ′ with the maximum cooling capacity.

FIG. 7 shows changes when the outside air OA (temperature 21 ° C., relative humidity 50% RH) is changed to conditioned air SA (set temperature 27 ° C., set relative humidity 50% RH).
The outside air OA is cooled to the point CA ′ (temperature 3 ° C., relative humidity 90% RH) with the maximum cooling capacity, and this is cooled to the point HA ′ (temperature 2
Reheat up to 7 ℃, relative humidity 20% RH (maximum heating)
Furthermore, an example is shown in which the conditioned air SA is further humidified to a relative humidity of 50% RH.

Now, FIG. 4 shows the precise temperature and humidity control of the present invention corresponding to the control of the prior application of FIG.

That is, FIG. 4 shows that the outside air OA (temperature 21
When the air conditioning air SA (set temperature 27 ° C., set relative humidity 50% RH) is set to ℃, relative humidity 50% RH), the dehumidification amount by cooling is set to zero and the air is cooled to the point CA, and the cooling air is reheated. At 20, the point HA is heated up to the set temperature of 27 ° C., which is set to the set humidity of the conditioned air SA (relative humidity 50%).
RH) shows the state of maximum humidification.

As is clear from a comparison between FIG. 4 and FIG. 7, in the prior application, the outside air OA is cooled with substantially the maximum cooling capacity, so that the dehumidifying amount increases and the cooling air is cooled to the set temperature (2).
(7 ° C.) is heated up to the point HA ′ and the humidification is performed from the point HA ′ to obtain the conditioned air SA. However, in the present invention, when performing the maximum heating and the maximum humidification, first, the outside air OA is dehumidified. Dehumidification by excessive cooling by cooling to point CA in the state of zero, heating it to point HA of the set temperature (27 ° C) to the maximum, and performing maximum humidification from that point HA to make conditioned air SA It is possible to eliminate the amount and to reduce the humidification amount accordingly.

FIG. 5 shows a comparison between the control of the present invention and the control of the prior application, and shows the outside air OA (temperature 23 ° C., relative humidity 45%).
RH, conditioned air SA (set temperature 23 ℃, set humidity 4
5% RH).

In the prior application, the outside air OA is cooled to a point CA '(temperature 3 ° C., relative humidity 90%), and this is cooled to a point HA'.
Although the temperature was set to 23 ° C. and the humidity of the conditioned air SA (45% relative humidity) was maximally humidified for precise temperature / humidity control, the dehumidification amount is set to zero in the present invention. Close point CA (temperature 10 ° C, relative humidity 90% R
H), heat it to point HA (set temperature 23 ° C), and further adjust the humidity of conditioned air SA (relative humidity 45% R
By performing humidification up to H) (humidification output set value SP), it is possible to perform precise temperature / humidity control while setting the load of the refrigeration cycle to a minimum.

As described above, the humidifier 21 with respect to the maximum humidification amount (difference between the absolute humidity of SA and the absolute humidity of point HA in FIG. 4).
The humidification output is defined as the ratio of the control output capacity values viewed from the maximum humidification capacity, and the humidification output set value SP is set to 25 to 10% according to the detection value of the air volume sensor S6. Humidification output set value SP for minimum air volume) is set to 10%, and humidification output set value S for maximum humidification volume (maximum air volume)
P is set to 25%, a humidification output set value SP of 10 to 25% is selected based on the absolute humidity difference between the outside air OA and the conditioned air SA, and the humidification output set value SP and the blowing humidity control unit 41 are selected.
From the low-pass filter 46 to the control output PV6 so that the humidification output set value SP is calculated by the humidification output control unit 46 to generate the control output MV6, and the inverter device MV6 is used based on the control output MV6. 27, electronic expansion valve 17, each set value RSP3 of the cooling water control valve 36,
By setting the RSP4 and RSP5 and operating the refrigeration cycle, the amount of humidification can be minimized, the precision temperature / humidity control can follow well, and energy-saving operation can be performed.

This energy saving effect is obtained by using the precision temperature / humidity control device of the prior application and the precision temperature / humidity control device of the present invention having the same capacity, treating air volume of 22.5 m ³ / min, outside air O
A23 ℃, relative humidity 40% RH, conditioned air SA,
When the measured power consumption value (active power) at a set temperature of 23 ° C. and 45% RH was verified, in the previous application, the fan power was 1.26 kW, the refrigerator power was 1.88 kW, and the humidifier power was 1. Although it is 6 kW and 4.74 kW, in the present invention, the fan power is 1.26 kW and the refrigerator power is 0.89.
kW, humidifier power 1.0 kW, 3.15 kW, 1.6 kW energy saving effect was obtained.

Although the outside air OA has been described in the above embodiment, the outside air OA may be air in the clean room or air circulated and sucked from the air-conditioned space.

Further, the humidification output set value SP is set to 10 to 25%.
However, it goes without saying that this set value is variable depending on the capacity of the humidifier 21, and is not necessarily limited to the above range.

Further, in the above-described embodiment, the example in which the air cooled by the evaporator is heated to the set temperature by the reheater connected to the refrigeration cycle has been described. It is needless to say that the present invention can be applied to precise temperature / humidity control in which the electric heater reheats the electric heater.

[0060]

In summary, according to the present invention, the compressor of the refrigeration cycle is variably operated by the inverter device, the humidification output set value that minimizes the humidification amount is set, and this is used as the actual humidification control. By performing a comparison calculation with the output and setting the set value for operating the refrigeration cycle, it is possible to suppress wasteful dehumidification, reduce the humidification amount, and achieve energy saving while operating the refrigeration cycle stably.

[Brief description of drawings]

FIG. 1 is a control block diagram showing an embodiment of a precise temperature / humidity control method and an apparatus thereof according to the present invention.

FIG. 2 is an apparatus diagram showing an embodiment of a precise temperature and humidity control method and an apparatus thereof according to the present invention.

FIG. 3 is a refrigeration cycle diagram showing an embodiment of a precise temperature and humidity control method and an apparatus thereof according to the present invention.

FIG. 4 is a diagram showing a temperature / humidity operation on a psychrometric diagram when precise temperature / humidity control is performed in the present invention.

FIG. 5 is a diagram showing a temperature / humidity operation on a psychrometric diagram when precise temperature / humidity control is performed in the present invention and the invention of the prior application.

FIG. 6 is a diagram showing a temperature / humidity operation on a psychrometric diagram when precise temperature / humidity control is performed in the invention of the prior application.

FIG. 7 is a diagram showing a temperature / humidity operation on a psychrometric diagram when precision temperature / humidity control is performed in the invention of the prior application.

[Explanation of symbols]

14 compressor 15 condenser 16 Three-way proportional control valve 17 Electronic expansion valve 19 evaporator 20 Reheater 21 humidifier 27 Inverter device 40 Blowout temperature controller 41 Blowout humidity controller 45 Humidification output control unit SP6 humidification output set value OA outside air SA air-conditioned air

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Yoshiyuki Noda             4-9-3 Narashino, Funabashi-shi, Chiba Stocks             Company Asahi Industry Co., Ltd. F-term (reference) 3L055 AA00                 3L060 AA03 CC01 CC02 CC04 CC06                       CC07 CC09 CC16 DD02 EE04                       EE09

Claims (7)

[Claims] 1. A precision temperature and humidity control method for heating air cooled by an evaporator of a refrigeration cycle to a set temperature and humidity and humidifying the air to supply the conditioned air to a space to be precisely temperature controlled, wherein the refrigeration is performed. The compressor of the cycle is operated by the inverter device with variable capacity, the heating amount is controlled based on the set temperature and the temperature of the conditioned air, and the humidification amount in the humidifier is controlled based on the set humidity and the humidity of the conditioned air. A precision temperature and humidity control method characterized in that the capacity of the compressor is controlled by an inverter device so that the control output of the device becomes a minimum amount of humidification. 2. A compressor driven by an inverter device, a three-way proportional control valve, a condenser for condensing a refrigerant with cooling water, an electronic expansion valve, and an evaporator are sequentially connected, and the three-way proportional control valve is connected to the three-way proportional control valve.
Connect a reheater that introduces hot gas shunted from the compressor through a three-way proportional control valve, and configure the refrigeration cycle by connecting the outlet side of the reheater to the inlet side of the condenser, The reheater is installed on the outlet side of the evaporator to cool the air, and part of the hot gas from the compressor is introduced into the reheater, and the hot gas reheats the air cooled in the evaporator. In addition, when the reheated air is humidified by a humidifier to be temperature-humidity-controlled air-conditioned air, a blow-out temperature controller that controls the diversion ratio of the three-way proportional control valve based on the set temperature and the temperature of the air-conditioned air. , A blowout humidity control unit that controls the humidification amount in the humidifier from the set humidity and the humidity of the conditioned air, the control output to the humidifier, and the humidification output set value so that the minimum humidification amount is input in advance. , The operating frequency of the inverter device based on this Opening of the electronic expansion valve, precise temperature and humidity control apparatus characterized by comprising a humidifying output controller to produce a control output for controlling the amount of cooling water to the condenser. 3. The refrigerant evaporation pressure of the evaporator and the control output from the humidification output control section are input to the refrigerant evaporation pressure control section, and the refrigerant evaporation pressure control section controls the operating frequency of the inverter device accordingly. Item 2. A precise temperature and humidity controller according to item 2. 4. The refrigerant suction temperature of the compressor and the control output from the humidification output control section are input to the suction refrigerant temperature control section, and the suction refrigerant temperature control section controls the valve opening degree of the electronic expansion valve accordingly. The precise temperature and humidity control device according to claim 2. 5. Condensing pressure of the condenser and control output from the humidification output control section are input to the condensing pressure control section, and the condensing pressure control section adjusts the amount of cooling water to the condenser accordingly. The precise temperature and humidity control device according to claim 2, which controls a control valve. 6. The precision temperature and humidity control device according to claim 2, wherein the control output of the blowout humidity control unit is input to the humidification output control unit via a low-pass filter or the like. 7. The precise temperature / humidity control device according to claim 2, wherein the humidification output set value input to the humidification output control unit is set in advance so as to have a minimum humidification amount in accordance with the amount of blown air of the conditioned air.