JP2003345504A - Touch panel device - Google Patents
Touch panel deviceInfo
- Publication number
- JP2003345504A JP2003345504A JP2002156038A JP2002156038A JP2003345504A JP 2003345504 A JP2003345504 A JP 2003345504A JP 2002156038 A JP2002156038 A JP 2002156038A JP 2002156038 A JP2002156038 A JP 2002156038A JP 2003345504 A JP2003345504 A JP 2003345504A
- Authority
- JP
- Japan
- Prior art keywords
- touch panel
- panel device
- surface acoustic
- electrode
- acoustic wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010897 surface acoustic wave method Methods 0.000 claims abstract description 80
- 239000000758 substrate Substances 0.000 claims abstract description 42
- 230000005284 excitation Effects 0.000 claims description 66
- 238000000034 method Methods 0.000 claims description 11
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 6
- 230000000644 propagated effect Effects 0.000 abstract description 16
- 239000007787 solid Substances 0.000 abstract description 5
- 238000001514 detection method Methods 0.000 description 23
- 238000010586 diagram Methods 0.000 description 13
- 230000002829 reductive effect Effects 0.000 description 7
- 230000036961 partial effect Effects 0.000 description 6
- 239000010409 thin film Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 230000002238 attenuated effect Effects 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000012447 hatching Effects 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 230000003313 weakening effect Effects 0.000 description 2
- 101000777301 Homo sapiens Uteroglobin Proteins 0.000 description 1
- 102100031083 Uteroglobin Human genes 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/043—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using propagating acoustic waves
- G06F3/0436—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using propagating acoustic waves in which generating transducers and detecting transducers are attached to a single acoustic waves transmission substrate
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Acoustics & Sound (AREA)
- Human Computer Interaction (AREA)
- General Physics & Mathematics (AREA)
- Position Input By Displaying (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、指，ペンなどの物
体が接触したことを検出するタッチパネル装置に関し、
特に、圧電体に電極を形成して構成される励振素子及び
受信素子を用いて弾性表面波（ＳＡＷ：Surface Acoust
ic Wave)の減衰，遮断を検知して物体の接触位置を検出
するタッチパネル装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a touch panel device for detecting the contact of an object such as a finger, a pen, etc.
In particular, a surface acoustic wave (SAW: Surface Acoust) is formed by using an excitation element and a reception element formed by forming electrodes on a piezoelectric body.
The present invention relates to a touch panel device that detects a contact position of an object by detecting attenuation or interruption of an ic wave).
【０００２】[0002]
【従来の技術】主としてパーソナルコンピュータ等のコ
ンピュータシステムの普及に伴って、コンピュータシス
テムにより情報が表示される表示装置の表示画面上を指
またはペンなどの物体で指示することにより、新たな情
報を入力したり、コンピュータシステムに対して種々の
指示を与えたりする装置が利用されている。パーソナル
コンピュータ等の表示装置の表示画面に表示された情報
に対してタッチ方式にて入力操作を行う場合には、その
表示画面上での接触位置（指示位置）を高精度に検出す
る必要がある。2. Description of the Related Art With the spread of computer systems such as personal computers, new information is input by pointing an object such as a finger or a pen on a display screen of a display device on which information is displayed by the computer system. Devices that provide various instructions to a computer system are used. When an input operation is performed on information displayed on a display screen of a display device such as a personal computer by a touch method, it is necessary to detect a contact position (designated position) on the display screen with high accuracy. .
【０００３】指，ペンなどの物体の接触位置を検出する
タッチパネル装置としては、抵抗膜を用いた装置と超音
波を用いた装置とが良く知られている。前者の抵抗膜を
用いた装置では、抵抗膜に物体が接触することによって
生じるその抵抗膜の抵抗値の変化を検知する。これは、
消費電力が少なくて良いが、応答時間，検出性能，耐久
性の点で問題がある。As a touch panel device for detecting a contact position of an object such as a finger or a pen, a device using a resistive film and a device using ultrasonic waves are well known. In the former device using a resistive film, a change in the resistance value of the resistive film caused by contact of an object with the resistive film is detected. this is,
Although low power consumption is sufficient, there are problems in response time, detection performance, and durability.
【０００４】これに対して、超音波を用いた装置では、
例えば非圧電基板に弾性表面波を伝播させて、その非圧
電基板に指，ペンなどの物体が接触することによって生
じる弾性表面波の減衰を検知して、物体による接触位置
を検出する。弾性表面波を励振，受信するトランスデュ
ーサとして、フォトリソグラフィ技術を用いて一括形成
が可能な櫛形電極（ＩＤＴ：Inter Digital Transduce
r）を用いるタッチパネル装置が開発されている。この
タッチパネル装置では、弾性表面波を励振する励振素子
及び伝播された弾性表面波を受信する受信素子として、
薄膜状の圧電体に櫛形電極を形成して構成される素子を
使用している。On the other hand, in an apparatus using ultrasonic waves,
For example, a surface acoustic wave is propagated through a non-piezoelectric substrate, and the attenuation of the surface acoustic wave generated when an object such as a finger or a pen comes into contact with the non-piezoelectric substrate is detected to detect a contact position of the object. As a transducer for exciting and receiving surface acoustic waves, a comb-shaped electrode (IDT: Inter Digital Transduce) that can be formed at once using photolithography technology
Touch panel devices using r) have been developed. In this touch panel device, as an excitation element for exciting a surface acoustic wave and a receiving element for receiving a propagated surface acoustic wave,
An element formed by forming a comb-shaped electrode on a thin-film piezoelectric body is used.
【０００５】図８は、櫛形電極を用いるこのような従来
のタッチパネル装置の構成を示す図である。図８におい
て、６１は矩形状の非圧電基板であり、非圧電基板６１
のＸ方向，Ｙ方向夫々の一端部には、圧電体に櫛形電極
を形成して構成されており、弾性表面波を励振する複数
の励振素子６２が一列状に配置されている。また、非圧
電基板６１のＸ方向，Ｙ方向夫々の他端部には、圧電薄
膜に櫛形電極を形成して構成されており、弾性表面波を
受信する複数の受信素子６３が一列状に配置されてい
る。FIG. 8 is a diagram showing the configuration of such a conventional touch panel device using comb electrodes. In FIG. 8, reference numeral 61 denotes a rectangular non-piezoelectric substrate.
At one end in each of the X and Y directions, a comb-shaped electrode is formed on a piezoelectric body, and a plurality of excitation elements 62 for exciting surface acoustic waves are arranged in a line. Further, at the other end of the non-piezoelectric substrate 61 in each of the X and Y directions, a comb-shaped electrode is formed on the piezoelectric thin film, and a plurality of receiving elements 63 for receiving surface acoustic waves are arranged in a line. Have been.
【０００６】このタッチパネル装置では、各励振素子６
２に周期信号を入力して弾性表面波を励振させて、非圧
電基板６１を伝播させ、伝播した弾性表面波を各受信素
子６３で受信させる。そして、非圧電基板６１上の弾性
表面波の伝播路に指，ペンなどの物体が接触した場合に
は、弾性表面波が減衰する。従って、受信素子６３での
受信信号のレベル減衰の有無を検知することにより、物
体の接触の有無及びその接触位置を検出することが可能
である。In this touch panel device, each excitation element 6
2, a surface acoustic wave is excited by exciting the surface acoustic wave, propagated through the non-piezoelectric substrate 61, and each of the receiving elements 63 receives the propagated surface acoustic wave. When an object such as a finger or a pen comes into contact with a surface acoustic wave propagation path on the non-piezoelectric substrate 61, the surface acoustic wave is attenuated. Therefore, by detecting the presence or absence of the level attenuation of the received signal at the receiving element 63, it is possible to detect the presence or absence of the contact of the object and the contact position.
【０００７】このような構成のタッチパネル装置にあっ
ては、櫛形電極の開口長によって、その分解能が決定す
るので、その開口長は小さくする方が好ましい。しかし
ながら、開口長と弾性表面波の波長とには相関があり、
開口を狭くした場合には回折効果が急激に高まって、弾
性表面波が伝播した経路の判別が困難となる。そこで、
本発明者等は、検出位置の分解能の向上を図るために、
非圧電基板の斜め方向（対角方向）に弾性表面波を伝播
させるように励振素子，受信素子を配置するようにした
タッチパネル装置を提案している。In the touch panel device having such a configuration, the resolution is determined by the opening length of the comb-shaped electrode. Therefore, it is preferable to make the opening length small. However, there is a correlation between the aperture length and the wavelength of the surface acoustic wave,
When the aperture is narrowed, the diffraction effect sharply increases, and it becomes difficult to determine the path on which the surface acoustic wave has propagated. Therefore,
The present inventors, in order to improve the resolution of the detection position,
There has been proposed a touch panel device in which an excitation element and a reception element are arranged so as to propagate a surface acoustic wave in an oblique direction (diagonal direction) of a non-piezoelectric substrate.
【０００８】図９は、このようなタッチパネル装置の一
例（以下、従来例という）の構成を示す図である。図９
において、７１は矩形状の非圧電基板であり、中央の一
点鎖線で囲まれた部分が、接触位置を検出できる検出領
域７１ａである。FIG. 9 is a diagram showing a configuration of an example of such a touch panel device (hereinafter, referred to as a conventional example). FIG.
In the figure, reference numeral 71 denotes a rectangular non-piezoelectric substrate, and a portion surrounded by a dashed line at the center is a detection region 71a in which a contact position can be detected.
【０００９】非圧電基板７１の周縁部である検出領域７
１ａ外側の額縁領域７１ｂには、その上辺及び下辺側に
励振素子７２、その左辺及び右辺側に受信素子７３が設
けられている。図１０は、励振素子７２または受信素子
７３の部分断面図であり、励振素子７２または受信素子
７３は、薄膜状の圧電体７４に櫛形電極７５を形成して
構成されている。この櫛形電極７５は、対向するバス電
極７７，７７と、各バス電極７７，７７から中途で屈曲
させて交互に連なる複数の電極指７８とを有している。
この構成によって、バス電極７７，７７の対向方向から
２方向に傾けた複数の電極指７８の配列を形成し、２方
向への弾性表面波の同時励振及び２方向からの弾性表面
波の同時受信を実現している。また、額縁領域７１ｂに
は，各バス電極７７を外部の回路（発振回路、受信レベ
ル検出回路など）に接続するための引き回し配線７９が
設けられている。The detection area 7 which is the periphery of the non-piezoelectric substrate 71
Excitation element 72 is provided on the upper side and lower side of frame area 71b outside 1a, and receiving element 73 is provided on the left side and right side thereof. FIG. 10 is a partial cross-sectional view of the excitation element 72 or the reception element 73. The excitation element 72 or the reception element 73 is configured by forming a comb-shaped electrode 75 on a thin-film piezoelectric body 74. The comb-shaped electrode 75 has opposed bus electrodes 77, 77 and a plurality of electrode fingers 78 bent from the bus electrodes 77, 77 and continuing alternately.
With this configuration, an array of a plurality of electrode fingers 78 inclined in two directions from the facing direction of the bus electrodes 77, 77 is formed, and simultaneous excitation of surface acoustic waves in two directions and simultaneous reception of surface acoustic waves in two directions are performed. Has been realized. In the frame region 71b, a routing line 79 for connecting each bus electrode 77 to an external circuit (such as an oscillation circuit and a reception level detection circuit) is provided.
【００１０】このような構成にあっては、励振素子７２
にて弾性表面波が２方向に励振され、励振された弾性表
面波が非圧電基板７１の対角２方向に伝播されて受信素
子７３で受信され、その受信結果に基づいて、図９での
例と同様に、物体の接触の有無及びその接触位置が検出
される。In such a configuration, the excitation element 72
The surface acoustic wave is excited in two directions, and the excited surface acoustic wave is propagated in two diagonal directions of the non-piezoelectric substrate 71 and received by the receiving element 73. Based on the reception result, the surface acoustic wave shown in FIG. As in the example, the presence / absence of contact with the object and the contact position are detected.
【００１１】[0011]
【発明が解決しようとする課題】タッチパネル装置にお
いて、検出領域の外側にあって、励振素子，受信素子，
引き回し配線などが設けられる額縁領域は、物体の接触
位置を検出できない領域であるので、その額縁領域の面
積を狭くすることが要求される。上述した従来例にあっ
ては、極性が異なる電極指が交互に存在しているパター
ン（図１０参照）であるため、夫々の極性毎にバス電極
を設けなくてはならない。従って、各辺において、励振
／受信領域（電極指を形成するための領域）の幅に加え
て、２本分のバス電極のための幅が必要となり、額縁領
域の面積が広くなってしまうという問題がある。SUMMARY OF THE INVENTION In a touch panel device, an excitation element, a reception element,
Since the frame area in which the routing wiring and the like are provided cannot detect the contact position of the object, it is necessary to reduce the area of the frame area. In the above-described conventional example, since the pattern is such that electrode fingers having different polarities are alternately present (see FIG. 10), a bus electrode must be provided for each of the polarities. Therefore, in each side, in addition to the width of the excitation / reception area (area for forming the electrode finger), a width for two bus electrodes is required, and the area of the frame area is increased. There's a problem.
【００１２】また、励振素子側の辺と受信素子側の辺と
の境界部分（四隅部）においてもバス電極のための幅が
必要となるので、対角方向に伝播される弾性表面波が弱
くなる領域（図９のハッチングを付した対角線近傍部
分）が広くなって、検出精度が低下する虞れがあるとい
う問題がある。Further, since a width for the bus electrode is required also at a boundary portion (four corners) between the side on the excitation element side and the side on the reception element side, the surface acoustic wave propagated in the diagonal direction is weak. There is a problem that the area (the area near the diagonal line with hatching in FIG. 9) becomes wide, and the detection accuracy may be reduced.
【００１３】本発明は斯かる事情に鑑みてなされたもの
であり、額縁領域の狭小化を図れると共に、電極，引き
回し配線などの設計の自由度の向上を図れるタッチパネ
ル装置を提供することを目的とする。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a touch panel device capable of reducing the frame area and improving the degree of freedom in designing electrodes, lead wirings, and the like. I do.
【００１４】本発明の他の目的は、接触位置検出の分解
能の向上を図れるタッチパネル装置を提供することにあ
る。Another object of the present invention is to provide a touch panel device capable of improving the resolution of contact position detection.
【００１５】本発明の更に他の目的は、引き回し配線の
抵抗の低減化を図れるタッチパネル装置を提供すること
にある。Still another object of the present invention is to provide a touch panel device capable of reducing the resistance of the routing wiring.
【００１６】[0016]
【課題を解決するための手段】請求項１に係るタッチパ
ネル装置は、矩形状の基板の周縁部に、弾性表面波を励
振する励振素子と弾性表面波を受信する受信素子とを備
え、前記基板上の前記励振素子と前記受信素子との間で
弾性表面波を伝播させ、前記受信素子での受信結果に基
づいて、前記基板に接触された物体の位置を検出するタ
ッチパネル装置において、前記励振素子及び前記受信素
子は、膜状の圧電体と、該圧電体の一面に形成されてい
る櫛形電極と、前記圧電体の他面に形成されている平板
電極とを有することを特徴とする。According to a first aspect of the present invention, there is provided a touch panel device, comprising: an excitation element for exciting a surface acoustic wave; and a receiving element for receiving a surface acoustic wave, on a peripheral portion of a rectangular substrate. A touch panel device for propagating a surface acoustic wave between the excitation element and the reception element on the upper side and detecting a position of an object in contact with the substrate based on a reception result at the reception element; Further, the receiving element has a film-shaped piezoelectric body, a comb-shaped electrode formed on one surface of the piezoelectric body, and a flat plate electrode formed on the other surface of the piezoelectric body.
【００１７】請求項１のタッチパネル装置にあっては、
圧電体の一方の面に、極性が異なる電極指が交互に配置
された櫛形電極ではなくて、極性が同じである複数の電
極指を連ねた櫛形電極を形成し、圧電体の他方の面に櫛
形電極とは極性が異なる平板電極を形成して、励振素子
及び受信素子を構成している。よって、極性が異なる電
極が同一平面上に存在するために各辺で２本分のバス電
極の幅を必要とした従来例に比べて、本発明では１本分
のバス電極の幅が必要となるだけであり、額縁領域を狭
くできる。また、極性が異なる電極を同一平面上に設け
る必要がないため、設計の自由度も向上する。In the touch panel device according to the first aspect,
On one surface of the piezoelectric body, instead of a comb-shaped electrode in which electrode fingers having different polarities are alternately arranged, a comb-shaped electrode formed by connecting a plurality of electrode fingers having the same polarity is formed, and on the other surface of the piezoelectric body, A plate electrode having a polarity different from that of the comb-shaped electrode is formed to constitute an excitation element and a reception element. Therefore, in the present invention, the width of one bus electrode is required in comparison with the conventional example in which the electrodes having different polarities are present on the same plane and the width of two bus electrodes is required on each side. Only the frame area can be narrowed. In addition, since it is not necessary to provide electrodes having different polarities on the same plane, the degree of freedom in design is improved.
【００１８】請求項２に係るタッチパネル装置は、請求
項１において、対をなす前記励振素子と前記受信素子と
を前記基板の対角方向の周縁部に設けてあり、前記基板
上の対角方向に弾性表面波が伝播すべくなしてあること
を特徴とする。According to a second aspect of the present invention, in the touch panel device according to the first aspect, the pair of the excitation element and the reception element are provided on a diagonal peripheral portion of the substrate, and are arranged in a diagonal direction on the substrate. Characterized in that a surface acoustic wave propagates through the surface.
【００１９】請求項２のタッチパネル装置にあっては、
対をなす励振素子と受信素子とを基板の隣合う辺に設け
てあり、基板の対角方向に弾性表面波を伝播させる。よ
って、辺方向に弾性表面波を伝播させる場合と比べて、
接触位置検出の分解能は高くなる。According to the touch panel device of the second aspect,
A pair of exciting element and receiving element are provided on adjacent sides of the substrate, and propagate a surface acoustic wave in a diagonal direction of the substrate. Therefore, compared to the case where the surface acoustic wave is propagated in the side direction,
The resolution of the contact position detection increases.
【００２０】請求項３に係るタッチパネル装置は、請求
項２において、前記櫛形電極は中途で屈曲している電極
指を有しており、前記励振素子は同時に２方向へ弾性表
面波を励振し、前記受信素子は同時に２方向からの弾性
表面波を受信すべくなしてあることを特徴とする。According to a third aspect of the present invention, in the touch panel device according to the second aspect, the comb-shaped electrode has an electrode finger that is bent halfway, and the excitation element simultaneously excites a surface acoustic wave in two directions. The receiving element is adapted to simultaneously receive surface acoustic waves from two directions.
【００２１】請求項３のタッチパネル装置にあっては、
１つの励振素子にて２方向の弾性表面波を励振し、１つ
の受信素子にて２方向の弾性表面波を受信する。よっ
て、弾性表面波の励振及び弾性表面波の受信を効率良く
行える。[0021] In the touch panel device according to claim 3,
One excitation element excites a surface acoustic wave in two directions, and one reception element receives a surface acoustic wave in two directions. Therefore, it is possible to efficiently excite the surface acoustic wave and receive the surface acoustic wave.
【００２２】請求項４に係るタッチパネル装置は、請求
項１〜３の何れかにおいて、前記櫛形電極または前記平
板電極に接続される配線を備えており、前記配線に導電
性物質が重畳されていることを特徴とする。According to a fourth aspect of the present invention, there is provided a touch panel device according to any one of the first to third aspects, further comprising a wiring connected to the comb-shaped electrode or the flat electrode, wherein a conductive material is superimposed on the wiring. It is characterized by the following.
【００２３】請求項４のタッチパネル装置にあっては、
引き回し配線に例えば銀ペーストなどの導電性物質を重
畳させている。よって、引き回し配線が厚くなってその
抵抗は低下する。In the touch panel device according to a fourth aspect,
A conductive substance such as a silver paste is superimposed on the lead wiring. Therefore, the wiring becomes thicker and its resistance decreases.
【００２４】請求項５に係るタッチパネル装置は、請求
項１〜３の何れかにおいて、前記櫛形電極に接続される
第１配線と、前記平板電極に接続される第２配線とを有
しており、前記第１配線は前記圧電体の前記一面に設け
られ、前記第２配線は前記圧電体の他面に設けられてい
ることを特徴とする。According to a fifth aspect of the present invention, in the touch panel device according to any one of the first to third aspects, the touch panel device has a first wiring connected to the comb-shaped electrode and a second wiring connected to the plate electrode. The first wiring is provided on the one surface of the piezoelectric body, and the second wiring is provided on the other surface of the piezoelectric body.
【００２５】請求項５のタッチパネル装置にあっては、
櫛形電極からの第１引き回し配線を圧電体の一方の面に
設け、平板電極からの第２引き回し配線を圧電体の他方
の面に設けている。よって、全ての引き回し配線を圧電
体の１つの面に設ける場合に比べて、額縁領域を狭くで
きる。また、これらの引き回し配線の設計の自由度も向
上する。In the touch panel device according to claim 5,
The first wiring from the comb-shaped electrode is provided on one surface of the piezoelectric body, and the second wiring from the plate electrode is provided on the other surface of the piezoelectric body. Therefore, the frame region can be narrowed as compared with the case where all the lead wires are provided on one surface of the piezoelectric body. In addition, the degree of freedom in designing these routing wirings is improved.
【００２６】請求項６に係るタッチパネル装置は、請求
項１〜５の何れかにおいて、前記励振素子における前記
平板電極と前記受信素子における前記平板電極とは一体
化されていることを特徴とする。According to a sixth aspect of the present invention, in the touch panel device according to any one of the first to fifth aspects, the plate electrode of the excitation element and the plate electrode of the reception element are integrated.
【００２７】請求項６のタッチパネル装置にあっては、
全ての励振素子及び受信素子における平板電極を共通化
している。よって、額縁領域を更に狭くできる。In the touch panel device according to claim 6,
The plate electrode is common to all the excitation elements and the reception elements. Therefore, the frame area can be further reduced.
【００２８】請求項７に係るタッチパネル装置は、請求
項２〜５の何れかにおいて、前記基板の隅部を越えて、
前記励振素子及び／または前記受信素子が隣の辺縁部へ
延設されていることを特徴とする。A touch panel device according to a seventh aspect of the present invention is the touch panel device according to any one of the second to fifth aspects, wherein
The excitation element and / or the reception element may be extended to an adjacent edge.
【００２９】請求項７のタッチパネル装置にあっては、
基板の隅部（対角領域）を越えて隣の辺縁部まで弾性表
面波の励振領域及び／または受信領域を設けている。よ
って、対角線近傍において弾性表面波が弱くなることを
防止する。In the touch panel device according to claim 7,
An excitation area and / or a reception area of a surface acoustic wave is provided to an adjacent edge beyond a corner (diagonal area) of the substrate. Therefore, the surface acoustic wave is prevented from weakening in the vicinity of the diagonal line.
【００３０】請求項８に係るタッチパネル装置は、矩形
状の基板の周縁部に、弾性表面波を励振する励振素子と
弾性表面波を受信する受信素子とを備え、前記基板上の
前記励振素子と前記受信素子との間で弾性表面波を伝播
させ、前記受信素子での受信結果に基づいて、前記基板
に接触された物体の位置を検出するタッチパネル装置に
おいて、前記励振素子及び前記受信素子は、膜状の圧電
体と、該圧電体の一面に形成されている格子状電極と、
前記圧電体の他面に形成されている平板電極とを有する
ことを特徴とする。The touch panel device according to claim 8 is provided with an excitation element for exciting a surface acoustic wave and a receiving element for receiving a surface acoustic wave on a peripheral portion of a rectangular substrate, wherein the excitation element on the substrate is In the touch panel device that propagates a surface acoustic wave between the receiving element and a position of an object that is in contact with the substrate based on a result of reception by the receiving element, the excitation element and the receiving element are A film-shaped piezoelectric body, and a grid-like electrode formed on one surface of the piezoelectric body,
A flat plate electrode formed on the other surface of the piezoelectric body.
【００３１】請求項８のタッチパネル装置にあっては、
圧電体の一方の面に１つの極性の格子状電極を形成し、
圧電体の他方の面に他の極性の平板電極を形成して、励
振素子及び受信素子を構成している。よって、請求項１
と同様に、１本分のバス電極の幅が必要となるだけであ
り、従来例に比べて額縁領域を狭くできる。また、極性
が異なる電極を同一平面上に設ける必要がないため、設
計の自由度も向上する。更に、格子状電極を用いている
ため、櫛形電極を用いる場合に比べて、開口幅を広くで
きて検出精度は向上する。In the touch panel device according to claim 8,
One polarity grid electrode is formed on one surface of the piezoelectric body,
A plate electrode of another polarity is formed on the other surface of the piezoelectric body to constitute an excitation element and a reception element. Therefore, claim 1
Similarly to the above, only the width of one bus electrode is required, and the frame area can be narrowed as compared with the conventional example. In addition, since it is not necessary to provide electrodes having different polarities on the same plane, the degree of freedom in design is improved. Further, since the grid electrode is used, the opening width can be widened and the detection accuracy is improved as compared with the case where the comb electrode is used.
【００３２】[0032]
【発明の実施の形態】以下、本発明をその実施の形態を
示す図面を参照して具体的に説明する。
（第１実施の形態）図１は、本発明の第１実施の形態に
係るタッチパネル装置の構成を示す図である。図１にお
いて、１は例えばガラス材からなり、弾性表面波の伝播
が可能な矩形状の非圧電基板であり、中央の一点鎖線で
囲まれた部分が、接触位置を検出できる検出領域１ａで
ある。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be specifically described below with reference to the drawings showing the embodiments. (First Embodiment) FIG. 1 is a diagram showing a configuration of a touch panel device according to a first embodiment of the present invention. In FIG. 1, reference numeral 1 denotes a rectangular non-piezoelectric substrate made of, for example, a glass material and capable of transmitting a surface acoustic wave, and a portion surrounded by an alternate long and short dash line is a detection region 1a in which a contact position can be detected. .
【００３３】非圧電基板１の周縁部である、検出領域１
ａの外側の額縁領域１ｂには、同時に２方向へ弾性表面
波を励振する励振素子２がその上辺側及び下辺側に設け
られ、同時に２方向からの弾性表面波を受信する受信素
子３がその左辺側及び右辺側に設けられている。The detection region 1 which is the peripheral portion of the non-piezoelectric substrate 1
Excitation elements 2 for simultaneously exciting surface acoustic waves in two directions are provided in the frame area 1b outside the area a. On the upper side and lower side thereof, a receiving element 3 for simultaneously receiving surface acoustic waves from two directions is provided. It is provided on the left side and the right side.
【００３４】これらの励振素子２及び受信素子３は同様
の構成を有している。図２は、励振素子２または受信素
子３の部分断面図であり、励振素子２または受信素子３
は、例えばＡｌＮ，ＺｎＯなどからなる薄膜状の圧電体
４の一方の面（表面）に櫛形電極５を形成し、その他方
の面（裏面）に平板電極（ベタ電極）６を形成して構成
されている。表面側の櫛形電極５は、図１に示すよう
に、１本のバス電極７と、バス電極７に連なり、中途で
屈曲させてＶ字状をなす複数の電極指８とを有する。な
お、図１では、この平板電極６を破線で示し、圧電体４
の設置範囲を一点鎖線で示している。The excitation element 2 and the reception element 3 have the same configuration. FIG. 2 is a partial cross-sectional view of the excitation element 2 or the reception element 3.
Is formed by forming a comb electrode 5 on one surface (front surface) of a thin-film piezoelectric body 4 made of, for example, AlN, ZnO, etc., and forming a flat plate electrode (solid electrode) 6 on the other surface (back surface). Have been. As shown in FIG. 1, the comb-shaped electrode 5 on the front surface has one bus electrode 7 and a plurality of V-shaped electrode fingers 8 connected to the bus electrode 7 and bent in the middle. In FIG. 1, the plate electrode 6 is indicated by a broken line, and the piezoelectric body 4
Is indicated by a dashed line.
【００３５】このような櫛形電極５及び平板電極６は外
部の回路（発振回路、受信レベル検出回路など）に接続
されるが、その接続に可撓性ケーブル（フレキシブルケ
ーブル）が良く利用される。よって、図１に示すよう
に、タッチパネル装置の１箇所で可撓性ケーブルに接続
できるように、各櫛形電極５（バス電極７），各平板電
極６からの引き回し配線９が額縁領域１ｂに設けられて
いる。The comb electrode 5 and the plate electrode 6 are connected to an external circuit (such as an oscillation circuit and a reception level detection circuit), and a flexible cable (flexible cable) is often used for the connection. Therefore, as shown in FIG. 1, the wiring 9 from each comb-shaped electrode 5 (bus electrode 7) and each plate electrode 6 is provided in the frame region 1b so that the flexible cable can be connected at one place of the touch panel device. Have been.
【００３６】このような構成にあって、櫛形電極５と平
板電極６との間に周期信号を印加することにより、励振
素子２にて弾性表面波が同時に２つの方向に励振され、
励振された弾性表面波が非圧電基板１の２つの対角方向
に伝播されて受信素子３で受信される。具体的には、上
辺側の励振素子２からの弾性表面波は左下斜め方向及び
右下斜め方向に伝播されて左辺側及び右辺側の受信素子
３で受信され、下辺側の励振素子２からの弾性表面波は
左上斜め方向及び右上斜め方向に伝播されて左辺側及び
右辺側の受信素子３で受信される。In such a configuration, by applying a periodic signal between the comb-shaped electrode 5 and the plate electrode 6, the surface acoustic waves are simultaneously excited in two directions by the excitation element 2,
The excited surface acoustic waves propagate in two diagonal directions of the non-piezoelectric substrate 1 and are received by the receiving element 3. Specifically, the surface acoustic wave from the upper side excitation element 2 is propagated in the lower left diagonal direction and the lower right diagonal direction, received by the left side and right side reception elements 3, and is transmitted from the lower side excitation element 2. The surface acoustic wave propagates in the upper left diagonal direction and the upper right diagonal direction, and is received by the receiving elements 3 on the left and right sides.
【００３７】ここで、非圧電基板１の弾性表面波の伝播
路に指，ペンなどの物体が接触した場合には、弾性表面
波が減衰する。従って、両受信素子３での受信信号のレ
ベル減衰の有無を検知することにより、物体の接触の有
無及びその接触位置を検出することが可能である。Here, when an object such as a finger or a pen contacts the propagation path of the surface acoustic wave of the non-piezoelectric substrate 1, the surface acoustic wave is attenuated. Therefore, by detecting whether or not the level of the received signal is attenuated by both receiving elements 3, it is possible to detect the presence or absence of the contact of the object and the contact position.
【００３８】本発明では、同じ極性の複数の電極指８を
連ねた櫛形電極５を圧電体４の表面に形成し、圧電体４
の裏面に電極指８と極性が異なる平板電極６を形成し
て、励振素子２及び受信素子３を構成しているので（図
２参照）、極性が異なる電極が同一平面上に存在するた
めに各辺で２本分のバス電極７７の幅を必要とした従来
例に比べて、１本分のバス電極７の幅が必要となるだけ
であり、額縁領域１ｂを狭くできる。また、極性が異な
る電極を同一平面上に設ける必要がないため、自由な設
計が可能となる。According to the present invention, a comb-shaped electrode 5 formed by connecting a plurality of electrode fingers 8 having the same polarity is formed on the surface of the piezoelectric body 4.
Is formed on the back surface of the electrode finger 8 to form the excitation element 2 and the receiving element 3 (see FIG. 2). The electrodes having different polarities exist on the same plane. Compared to the conventional example in which the width of two bus electrodes 77 is required on each side, only the width of one bus electrode 7 is required, and the frame region 1b can be narrowed. Further, since it is not necessary to provide electrodes having different polarities on the same plane, a free design is possible.
【００３９】また、励振周波数を同じとした場合、従来
例では電極指７８の幅が弾性表面波の波長の１／４であ
るのに対して、本発明では電極指８の幅が弾性表面波の
波長の１／２で良い。従って、電極作製時に要求される
パターニングの微細さを緩和することができ、従来例に
比べて容易に電極指を作製できる。この結果、リフトオ
フ法，導電材料のスクリーン印刷法などの方法を用い
て、電極を安価に作製することも可能となる。When the excitation frequency is the same, the width of the electrode finger 78 is 1/4 of the wavelength of the surface acoustic wave in the conventional example, whereas the width of the electrode finger 8 is波長 of the wavelength may be sufficient. Therefore, the fineness of the patterning required at the time of manufacturing the electrode can be reduced, and the electrode finger can be manufactured more easily than the conventional example. As a result, the electrode can be manufactured at low cost by using a method such as a lift-off method or a screen printing method of a conductive material.
【００４０】更に、本発明では、励振素子２側の辺と受
信素子３側の辺との境界部分（四隅部）においてもバス
電極のための幅が不要となるので、対角方向に伝播され
る弾性表面波が弱くなる領域（図１のハッチングを付し
た対角線近傍部分）が、従来例（図９参照）と比較して
狭くなり、検出精度の向上を図ることができる。Further, in the present invention, the width for the bus electrode is not required at the boundary (four corners) between the side on the excitation element 2 side and the side on the reception element 3 side. The area where the surface acoustic wave is weakened (the area near the diagonal line with hatching in FIG. 1) is narrower than in the conventional example (see FIG. 9), and the detection accuracy can be improved.
【００４１】（第２実施の形態）図３は、本発明の第２
実施の形態に係るタッチパネル装置の構成を示す図であ
る。図３において、図１と同一番号を付した部分は同一
または同様な部分を表している。(Second Embodiment) FIG. 3 shows a second embodiment of the present invention.
It is a figure showing composition of a touch panel device concerning an embodiment. In FIG. 3, portions denoted by the same reference numerals as those in FIG. 1 represent the same or similar portions.
【００４２】第２実施の形態では、配線部での抵抗を下
げるために、引き回し配線９の上に導電性物質１０（図
３でハッチングを付した部分）を重畳させている。具体
的には、予め作製した引き回し配線９の上に銀ペースト
が塗布されている。また、引き回し配線９自体を直接に
導電性物質１０のスクリーン印刷によって作製しても良
い。なお、他の構成及び動作は、上述した第１実施の形
態の場合と同様であるので、それらの説明は省略する。In the second embodiment, a conductive material 10 (the hatched portion in FIG. 3) is superimposed on the lead wiring 9 in order to reduce the resistance in the wiring portion. Specifically, a silver paste is applied on the routing wiring 9 that has been manufactured in advance. Further, the routing wiring 9 itself may be directly produced by screen printing of the conductive substance 10. Note that other configurations and operations are the same as those in the above-described first embodiment, and a description thereof will be omitted.
【００４３】タッチパネル装置にあっては、励振素子２
及び受信素子３の各電極を外部の回路に接続させるため
に、櫛形電極５及び平板電極６から引き回し配線９を引
き回す必要がある。この際、パネルのサイズによって
は、その引き回し配線９の抵抗が検出特性に影響を及ぼ
す場合もある。よって、引き回し配線９の抵抗は低くす
ることが好ましい。低抵抗とする手法として、引き回し
配線９を広くする手法と、引き回し配線９を厚くする手
法とが考えられる。前者の方法では、引き回し配線９を
広くした場合に額縁領域１ｂも広くなってしまって、こ
れは額縁領域１ｂの狭小化には相反する。そこで、第２
実施の形態では、導電性物質１０を引き回し配線９に重
畳させて、その厚さを厚くして低抵抗化を実現してお
り、引き回し配線９の抵抗に伴う検出特性の悪影響を防
止している。In the touch panel device, the excitation element 2
In addition, in order to connect each electrode of the receiving element 3 to an external circuit, it is necessary to route the wiring 9 from the comb-shaped electrode 5 and the plate electrode 6. At this time, depending on the size of the panel, the resistance of the routing wiring 9 may affect the detection characteristics. Therefore, it is preferable to reduce the resistance of the routing wiring 9. As a method of reducing the resistance, a method of widening the wiring 9 and a method of increasing the thickness of the wiring 9 are considered. In the former method, when the lead wiring 9 is widened, the frame region 1b is also widened, which is contrary to the narrowing of the frame region 1b. Therefore, the second
In the embodiment, the conductive material 10 is superimposed on the lead-out wiring 9 to increase the thickness of the lead-out wiring 9 to reduce the resistance, thereby preventing the adverse effect of the detection characteristic due to the resistance of the lead-out wiring 9. .
【００４４】（第３実施の形態）図４は、本発明の第３
実施の形態に係るタッチパネル装置の一部の構成を示す
図である。図４において、図１と同一番号を付した部分
は同一または同様な部分を表している。(Third Embodiment) FIG. 4 shows a third embodiment of the present invention.
FIG. 2 is a diagram showing a configuration of a part of the touch panel device according to the embodiment. In FIG. 4, the portions denoted by the same reference numerals as those in FIG. 1 represent the same or similar portions.
【００４５】第３実施の形態では、電極構成だけでな
く、引き回し配線９にあっても圧電体４の両面に分離し
て設けられている。即ち、櫛形電極５からの引き回し配
線９と平板電極６からの引き回し配線９とが、圧電体４
の表裏面に分離して設けられている。図４に示す例で
は、上辺側の励振素子２の櫛形電極５（バス電極７）か
らの引き回し配線９（９ａ）が圧電体４の一方の面（表
面）に設けられ、同じく上辺側の励振素子２の平板電極
６からの引き回し配線９（９ｂ）が圧電体４の他方の面
（裏面）に設けられている。なお、他の構成及び動作
は、上述した第１実施の形態の場合と同様であるので、
それらの説明は省略する。In the third embodiment, not only the electrode structure but also the wirings 9 are separately provided on both surfaces of the piezoelectric body 4. That is, the wiring 9 from the comb-shaped electrode 5 and the wiring 9 from the plate electrode 6 are
Are provided separately on the front and back surfaces. In the example shown in FIG. 4, the lead-out wiring 9 (9a) from the comb-shaped electrode 5 (bus electrode 7) of the excitation element 2 on the upper side is provided on one surface (front surface) of the piezoelectric body 4, and the excitation on the upper side is also performed. A lead wire 9 (9 b) from the plate electrode 6 of the element 2 is provided on the other surface (back surface) of the piezoelectric body 4. Note that other configurations and operations are the same as those in the above-described first embodiment.
The description thereof is omitted.
【００４６】このように圧電体４を挟んでその上下に引
き回し配線９を分離して設けているので、圧電体４の一
方側の面に全ての引き回し配線９を設ける場合に比べ
て、引き回し配線９の見かけ上の本数を減らすことがで
き、額縁領域１ｂの更なる狭小化を実現できる。また、
引き回し配線９の設計の自由度も向上できる。As described above, since the lead-out wirings 9 are separately provided above and below the piezoelectric body 4, the lead-out wirings 9 are provided as compared with the case where all the lead-out wirings 9 are provided on one surface of the piezoelectric body 4. 9 can be reduced, and the frame area 1b can be further narrowed. Also,
The degree of freedom in designing the routing wiring 9 can also be improved.
【００４７】（第４実施の形態）図５は、本発明の第４
実施の形態に係るタッチパネル装置の構成を示す図であ
る。図５において、図１と同一番号を付した部分は同一
または同様な部分を表している。(Fourth Embodiment) FIG. 5 shows a fourth embodiment of the present invention.
It is a figure showing composition of a touch panel device concerning an embodiment. In FIG. 5, portions denoted by the same reference numerals as those in FIG. 1 represent the same or similar portions.
【００４８】第４実施の形態では、全ての励振素子２及
び受信素子３における平板電極６を共通化している。つ
まり、圧電体４の裏面に形成した１枚のベタ電極にて各
励振素子２，受信素子３の平板電極６を構成している。
なお、他の構成及び動作は、上述した第１実施の形態の
場合と同様であるので、それらの説明は省略する。In the fourth embodiment, the plate electrode 6 in all the excitation elements 2 and the reception elements 3 is shared. That is, a single solid electrode formed on the back surface of the piezoelectric body 4 constitutes the plate electrode 6 of each of the excitation element 2 and the reception element 3.
Note that other configurations and operations are the same as those in the above-described first embodiment, and a description thereof will be omitted.
【００４９】Ｓ／Ｎ比を十分に大きく取れるタッチパネ
ル装置では、このような平板電極６の構成にすることに
より、平板電極（ベタ電極）６からの引き回し配線９が
１本で済むので、引き回し配線９の総数を減らすことが
できて、額縁領域１ｂの更なる狭小化を図れる。また、
櫛形電極５からの引き回し配線９の設計の自由度も向上
する。In a touch panel device capable of obtaining a sufficiently large S / N ratio, by adopting such a configuration of the plate electrode 6, only one lead wire 9 from the plate electrode (solid electrode) 6 is required, so that the lead wire is provided. 9, the frame area 1b can be further narrowed. Also,
The degree of freedom in designing the lead-out wiring 9 from the comb-shaped electrode 5 is also improved.
【００５０】（第５実施の形態）図６は、本発明の第５
実施の形態に係るタッチパネル装置の一部の構成を示す
図である。図６において、図１と同一番号を付した部分
は同一または同様な部分を表している。(Fifth Embodiment) FIG. 6 shows a fifth embodiment of the present invention.
FIG. 2 is a diagram showing a configuration of a part of the touch panel device according to the embodiment. In FIG. 6, portions denoted by the same reference numerals as those in FIG. 1 represent the same or similar portions.
【００５１】第５実施の形態では、励振素子２の櫛形電
極５の電極指８を、隣り合う辺同士の境界部分を越えて
形成して、隣の辺にはみ出して弾性表面波の励振領域を
設けている。具体的に図６に示す例では、上辺側の励振
素子２において、対角線近傍を右下斜め方向に伝播する
弾性表面波を励振するための電極指８（８ａ）を、左辺
との境界部分を越えて、バス電極７に連ねて形成してい
る。なお、他の構成及び動作は、上述した第１実施の形
態の場合と同様であるので、それらの説明は省略する。In the fifth embodiment, the electrode fingers 8 of the comb-shaped electrode 5 of the excitation element 2 are formed so as to extend beyond the boundary between the adjacent sides, and protrude into the adjacent side to form the excitation area of the surface acoustic wave. Provided. Specifically, in the example shown in FIG. 6, in the excitation element 2 on the upper side, the electrode finger 8 (8 a) for exciting the surface acoustic wave propagating obliquely in the lower right direction in the vicinity of the diagonal line is connected to the boundary with the left side. Beyond, it is formed continuously with the bus electrode 7. Note that other configurations and operations are the same as those in the above-described first embodiment, and a description thereof will be omitted.
【００５２】対角方向に弾性表面波を伝播させるタッチ
パネル装置にあっては、その対角線近傍（対角領域）に
おいて弾性表面波が弱くなる傾向がある。そこで、第５
実施の形態では、非圧電基板１の隅部において、隣の受
信素子３の領域まで少し割り込ませて、励振素子２の励
振用の電極指８（８ａ）を余分に形成している。従っ
て、従来例，第１実施の形態に比べて、対角線近傍での
弾性表面波のレベルを高くすることができる。In a touch panel device that propagates a surface acoustic wave in a diagonal direction, the surface acoustic wave tends to be weak in the vicinity of the diagonal line (diagonal region). Therefore, the fifth
In the embodiment, at the corner of the non-piezoelectric substrate 1, the electrode finger 8 (8 a) for the excitation of the excitation element 2 is formed by being slightly cut into the area of the adjacent reception element 3. Therefore, the level of the surface acoustic wave near the diagonal can be increased as compared with the conventional example and the first embodiment.
【００５３】なお、上述した例では、励振素子２の電極
指８を境界部分から越えて形成する場合について説明し
たが、受信素子３の受信用の電極指８を境界部分から越
えて形成して、受信領域を広げるようにしても良い。In the above-described example, the case where the electrode finger 8 of the excitation element 2 is formed beyond the boundary portion has been described, but the electrode finger 8 for reception of the receiving element 3 is formed beyond the boundary portion. Alternatively, the reception area may be expanded.
【００５４】（第６実施の形態）図７は、本発明の第６
実施の形態に係るタッチパネル装置の構成を示す図であ
る。他の実施の形態と同様の非圧電基板１は、中央の検
出領域１ａと周縁の額縁領域１ｂとを有している。上辺
側及び下辺側の額縁領域１ｂには、同時に２方向へ弾性
表面波を励振する励振素子２が設けられ、左辺側及び右
辺側の額縁領域１ｂには、同時に２方向からの弾性表面
波を受信する受信素子３が設けられている。(Sixth Embodiment) FIG. 7 shows a sixth embodiment of the present invention.
It is a figure showing composition of a touch panel device concerning an embodiment. The non-piezoelectric substrate 1 similar to the other embodiments has a central detection region 1a and a peripheral frame region 1b. Exciting elements 2 that simultaneously excite surface acoustic waves in two directions are provided in the upper and lower frame areas 1b, and the left and right frame areas 1b simultaneously receive surface acoustic waves from two directions. A receiving element 3 for receiving is provided.
【００５５】これらの励振素子２及び受信素子３は同様
の構成を有しており、励振素子２及び受信素子３は、例
えばＡｌＮ，ＺｎＯなどからなる薄膜状の圧電体１４の
一方の面（表面）に格子状電極１５を形成し、その他方
の面（裏面）に平板電極（ベタ電極）１６を形成して構
成されている。表面側の格子状電極１５は、図７に示す
ように、１本のバス電極１７の複数の部位から２方向へ
電極指を延在させて構成されている。格子状電極１５ま
たは平板電極１６を外部の回路（発振回路、受信レベル
検出回路など）に接続するための引き回し配線９が額縁
領域１ｂに設けられている。The excitation element 2 and the reception element 3 have the same configuration. The excitation element 2 and the reception element 3 are formed on one surface (surface) of a thin-film piezoelectric body 14 made of, for example, AlN, ZnO, or the like. ), A grid electrode 15 is formed, and a flat electrode (solid electrode) 16 is formed on the other surface (back surface). As shown in FIG. 7, the grid electrodes 15 on the front surface are configured by extending electrode fingers in two directions from a plurality of portions of one bus electrode 17. A wiring line 9 for connecting the grid electrode 15 or the plate electrode 16 to an external circuit (such as an oscillation circuit or a reception level detection circuit) is provided in the frame region 1b.
【００５６】このような構成にあっては、格子状電極１
５と平板電極１６との間に周期信号を印加することによ
り、上述した第１実施の形態と同様に、上辺側の励振素
子２からの弾性表面波は左下斜め方向及び右下斜め方向
に伝播されて左辺側及び右辺側の受信素子３で受信さ
れ、下辺側の励振素子２からの弾性表面波は左上斜め方
向及び右上斜め方向に伝播されて左辺側及び右辺側の受
信素子３で受信される。従って、両受信素子３での受信
結果に基づいて、物体の接触の有無及びその接触位置を
検出できる。In such a configuration, the grid electrode 1
As in the first embodiment, the surface acoustic wave from the upper-side excitation element 2 propagates in the lower left diagonal direction and the lower right diagonal direction by applying a periodic signal between the fifth electrode 5 and the plate electrode 16. Then, the surface acoustic waves from the lower-side excitation element 2 are propagated in the upper-left diagonal direction and the upper-right diagonal direction, and are received by the left-side and right-side reception elements 3. You. Therefore, the presence or absence of the contact of the object and the contact position can be detected based on the reception results of the two receiving elements 3.
【００５７】第６実施の形態では、圧電体１４の表面に
格子状電極１５を形成し、その裏面に平板電極１６を形
成しているので、上述した他の実施の形態と同様の効果
（額縁領域の狭小化、自由な設計など）を奏する。ま
た、格子状電極１５を用いているため、櫛形電極を用い
る場合に比べて、開口幅を広くできて検出精度を向上さ
せることができる。このような格子状電極を用いる構成
は、圧電体の一方の面にのみ電極を形成する従来例では
全く実現できず、圧電体の両方の面に電極を形成する本
発明独自のものである。In the sixth embodiment, the grid electrode 15 is formed on the front surface of the piezoelectric body 14 and the flat plate electrode 16 is formed on the back surface. Therefore, the same effects (frames) as those of the other embodiments described above can be obtained. (Restricted area, free design, etc.). Further, since the grid electrode 15 is used, the opening width can be widened and the detection accuracy can be improved as compared with the case where the comb electrode is used. Such a configuration using a grid-like electrode cannot be realized at all in a conventional example in which an electrode is formed only on one surface of a piezoelectric body, and is unique to the present invention in which electrodes are formed on both surfaces of a piezoelectric body.
【００５８】なお、格子状電極を用いる第６実施の形態
においても、上述した第２〜第５実施の形態で説明した
夫々の技術を同様に適用できることは勿論である。It is needless to say that the techniques described in the above-described second to fifth embodiments can be similarly applied to the sixth embodiment using the grid-like electrodes.
【００５９】上述した実施の形態では、櫛形電極または
格子状電極を圧電体の表面に形成し、平板電極を圧電体
の裏面に形成するようにしたが、これとは逆に、圧電体
の表面に平板電極を形成して、その裏面に櫛形電極また
は格子状電極を形成するようにしても良いことは言うま
でもない。In the above-described embodiment, the comb-shaped electrode or the grid-shaped electrode is formed on the surface of the piezoelectric body, and the flat plate electrode is formed on the back surface of the piezoelectric body. It is needless to say that a flat electrode may be formed and a comb electrode or a grid electrode may be formed on the back surface.
【００６０】また、上述した実施の形態では、非圧電基
板の対角方向に弾性表面波を伝播させる例について説明
したが、図８に示したような非圧電基板の辺方向に弾性
表面波を伝播させるタッチパネル装置についても、本発
明を同様に適用できる。Further, in the above-described embodiment, an example in which the surface acoustic wave is propagated in the diagonal direction of the non-piezoelectric substrate has been described, but the surface acoustic wave is propagated in the side direction of the non-piezoelectric substrate as shown in FIG. The present invention can be similarly applied to a touch panel device to be propagated.
【００６１】[0061]
【発明の効果】以上詳述した如く、本発明のタッチパネ
ル装置では、圧電体の一方の面に櫛形電極または格子状
電極を形成し、圧電体の他方の面に平板電極を形成し
て、励振素子及び受信素子を構成するようにしたので、
バス電極の本数を少なくできて、額縁領域の狭小化を図
れると共に、設計の自由度の向上を図ることができる。As described above in detail, in the touch panel device of the present invention, a comb-shaped electrode or a grid-shaped electrode is formed on one surface of the piezoelectric body, and a flat plate electrode is formed on the other surface of the piezoelectric body, and the excitation is performed. Since the element and the receiving element are configured,
The number of bus electrodes can be reduced, the frame area can be narrowed, and the degree of freedom in design can be improved.
【００６２】また、本発明のタッチパネル装置では、対
をなす励振素子と受信素子とを基板の隣合う辺に設け
て、基板の対角方向に弾性表面波を伝播させるようにし
たので、接触位置検出の分解能を高めることができる。Further, in the touch panel device of the present invention, a pair of excitation elements and reception elements are provided on adjacent sides of the substrate so that surface acoustic waves are propagated in a diagonal direction of the substrate. The resolution of detection can be increased.
【００６３】また、本発明のタッチパネル装置では、１
つの励振素子にて２方向へ弾性表面波を同時に励振さ
せ、１つの受信素子にて２方向からの弾性表面波を同時
に受信させるようにしたので、弾性表面波の励振及び弾
性表面波の受信を効率良く行うことができる。In the touch panel device of the present invention, 1
Since two surface acoustic waves are simultaneously excited in two directions by one excitation element and surface acoustic waves from two directions are simultaneously received by one receiving element, the excitation of the surface acoustic wave and the reception of the surface acoustic wave are performed. It can be performed efficiently.
【００６４】また、本発明のタッチパネル装置では、引
き回し配線に導電性物質を重畳するようにしたので、引
き回し配線の抵抗を低下させ、その抵抗の検出処理への
悪影響を防止して、高い検出精度を実現することができ
る。Further, in the touch panel device of the present invention, since the conductive material is superimposed on the routing wiring, the resistance of the routing wiring is reduced, the adverse effect on the detection process of the resistance is prevented, and the detection accuracy is improved. Can be realized.
【００６５】また、本発明のタッチパネル装置では、櫛
形電極または格子状電極からの引き回し配線を圧電体の
一方の面に設け、平板電極からの引き回し配線を圧電体
の他方の面に設けるようにしたので、額縁領域をより狭
くできると共に、引き回し配線の設計の自由度を向上さ
せることができる。Further, in the touch panel device of the present invention, the wiring from the comb-shaped electrode or the grid electrode is provided on one surface of the piezoelectric body, and the wiring from the plate electrode is provided on the other surface of the piezoelectric body. Therefore, the frame area can be made narrower, and the degree of freedom in designing the routing wiring can be improved.
【００６６】また、本発明のタッチパネル装置では、励
振素子及び受信素子における平板電極を共通化するよう
にしたので、引き回し配線の本数を削減できて額縁領域
を更に狭くできる。Further, in the touch panel device of the present invention, since the plate electrode is commonly used in the excitation element and the reception element, the number of leading wirings can be reduced, and the frame area can be further narrowed.
【００６７】また、本発明のタッチパネル装置では、基
板の隅部（対角領域）を越えて隣の辺縁部まで弾性表面
波の励振領域及び／または受信領域を設けるようにした
ので、対角線近傍において弾性表面波が弱くなることを
防止できる。Further, in the touch panel device of the present invention, since the excitation area and / or the reception area of the surface acoustic wave are provided to the adjacent edge beyond the corner (diagonal area) of the substrate, the area near the diagonal line is provided. In this case, the surface acoustic wave can be prevented from weakening.
【００６８】更に、本発明のタッチパネル装置では、格
子状電極を用いるようにしたので、櫛形電極を用いる場
合に比べて、開口幅を広くできて検出精度を向上するこ
とが可能となる。Further, in the touch panel device of the present invention, since the grid electrodes are used, the opening width can be made wider and the detection accuracy can be improved as compared with the case where the comb electrodes are used.
【図１】第１実施の形態に係るタッチパネル装置の構成
を示す図である。FIG. 1 is a diagram illustrating a configuration of a touch panel device according to a first embodiment.
【図２】本発明の励振素子または受信素子の部分断面図
である。FIG. 2 is a partial sectional view of an excitation element or a reception element according to the present invention.
【図３】第２実施の形態に係るタッチパネル装置の構成
を示す図である。FIG. 3 is a diagram illustrating a configuration of a touch panel device according to a second embodiment.
【図４】第３実施の形態に係るタッチパネル装置の一部
の構成を示す図である。FIG. 4 is a diagram illustrating a partial configuration of a touch panel device according to a third embodiment.
【図５】第４実施の形態に係るタッチパネル装置の構成
を示す図である。FIG. 5 is a diagram illustrating a configuration of a touch panel device according to a fourth embodiment.
【図６】第５実施の形態に係るタッチパネル装置の一部
の構成を示す図である。FIG. 6 is a diagram illustrating a partial configuration of a touch panel device according to a fifth embodiment.
【図７】第６実施の形態に係るタッチパネル装置の構成
を示す図である。FIG. 7 is a diagram illustrating a configuration of a touch panel device according to a sixth embodiment.
【図８】従来のタッチパネル装置の構成を示す図であ
る。FIG. 8 is a diagram illustrating a configuration of a conventional touch panel device.
【図９】従来のタッチパネル装置（従来例）の構成を示
す図である。FIG. 9 is a diagram showing a configuration of a conventional touch panel device (conventional example).
【図１０】従来の励振素子または受信素子の部分断面図
である。FIG. 10 is a partial cross-sectional view of a conventional excitation element or reception element.
１ 非圧電基板 １ａ 検出領域 １ｂ 額縁領域 ２ 励振素子 ３ 受信素子 ４，１４ 圧電体 ５ 櫛形電極 ６，１６ 平板電極 ７，１７ バス電極 ８，８ａ 電極指 ９，９ａ，９ｂ 引き回し配線 １０ 導電性物質 １５ 格子状電極 1 Non-piezoelectric substrate 1a Detection area 1b Picture frame area 2 Exciting element 3 receiving element 4,14 Piezoelectric body 5 Comb electrodes 6,16 plate electrode 7, 17 bus electrode 8,8a electrode finger 9, 9a, 9b Routing wiring 10 Conductive substances 15 Grid electrode
フロントページの続き (72)発明者 佐野 聡 神奈川県川崎市中原区上小田中４丁目１番 １号 富士通株式会社内 (72)発明者 高橋 勇治 神奈川県川崎市中原区上小田中４丁目１番 １号 富士通株式会社内 Ｆターム(参考） 5B068 AA21 AA32 BB22 BC13 BC16 5B087 AA02 AA06 CC16 CC47 Continuation of front page (72) Inventor Satoshi Sano 4-1-1 Kamiodanaka, Nakahara-ku, Kawasaki City, Kanagawa Prefecture No. 1 Inside Fujitsu Limited (72) Inventor Yuji Takahashi 4-1-1 Kamiodanaka, Nakahara-ku, Kawasaki City, Kanagawa Prefecture No. 1 Inside Fujitsu Limited F term (reference) 5B068 AA21 AA32 BB22 BC13 BC16 5B087 AA02 AA06 CC16 CC47
Claims (8)
励振する励振素子と弾性表面波を受信する受信素子とを
備え、前記基板上の前記励振素子と前記受信素子との間
で弾性表面波を伝播させ、前記受信素子での受信結果に
基づいて、前記基板に接触された物体の位置を検出する
タッチパネル装置において、前記励振素子及び前記受信
素子は、膜状の圧電体と、該圧電体の一面に形成されて
いる櫛形電極と、前記圧電体の他面に形成されている平
板電極とを有することを特徴とするタッチパネル装置。An exciter element for exciting a surface acoustic wave and a receiving element for receiving a surface acoustic wave at a peripheral portion of a rectangular substrate, wherein a receiving element for receiving the surface acoustic wave is provided between the excitation element and the receiving element on the substrate; In a touch panel device that propagates a surface acoustic wave and detects a position of an object that is in contact with the substrate based on a reception result at the receiving element, the excitation element and the receiving element are a film-shaped piezoelectric body, A touch panel device comprising: a comb-shaped electrode formed on one surface of the piezoelectric body; and a plate electrode formed on the other surface of the piezoelectric body.
を前記基板の対角方向の周縁部に設けてあり、前記基板
上の対角方向に弾性表面波が伝播すべくなしてある請求
項１記載のタッチパネル装置。2. A method according to claim 1, wherein said exciting element and said receiving element are provided on a diagonal peripheral portion of said substrate, and a surface acoustic wave propagates diagonally on said substrate. Item 3. The touch panel device according to Item 1.
指を有しており、前記励振素子は同時に２方向へ弾性表
面波を励振し、前記受信素子は同時に２方向からの弾性
表面波を受信すべくなしてある請求項２記載のタッチパ
ネル装置。3. The comb-shaped electrode has electrode fingers bent in the middle, the excitation element simultaneously excites surface acoustic waves in two directions, and the receiving element simultaneously excites surface acoustic waves in two directions. The touch panel device according to claim 2, wherein the touch panel device is configured to receive the touch panel.
される配線を備えており、前記配線に導電性物質が重畳
されている請求項１〜３の何れかに記載のタッチパネル
装置。4. The touch panel device according to claim 1, further comprising a wiring connected to the comb-shaped electrode or the flat electrode, wherein a conductive material is superimposed on the wiring.
前記平板電極に接続される第２配線とを有しており、前
記第１配線は前記圧電体の前記一面に設けられ、前記第
２配線は前記圧電体の他面に設けられている請求項１〜
３の何れかに記載のタッチパネル装置。5. A first wiring connected to the comb-shaped electrode,
And a second wiring connected to the plate electrode, wherein the first wiring is provided on the one surface of the piezoelectric body, and the second wiring is provided on another surface of the piezoelectric body. 1 to
3. The touch panel device according to any one of 3.
記受信素子における前記平板電極とは一体化されている
請求項１〜５の何れかに記載のタッチパネル装置。6. The touch panel device according to claim 1, wherein the plate electrode in the excitation element and the plate electrode in the reception element are integrated.
及び／または前記受信素子が隣の辺縁部へ延設されてい
る請求項２〜５の何れかに記載のタッチパネル装置。7. The touch panel device according to claim 2, wherein the excitation element and / or the reception element extend to an adjacent edge beyond a corner of the substrate.
励振する励振素子と弾性表面波を受信する受信素子とを
備え、前記基板上の前記励振素子と前記受信素子との間
で弾性表面波を伝播させ、前記受信素子での受信結果に
基づいて、前記基板に接触された物体の位置を検出する
タッチパネル装置において、前記励振素子及び前記受信
素子は、膜状の圧電体と、該圧電体の一面に形成されて
いる格子状電極と、前記圧電体の他面に形成されている
平板電極とを有することを特徴とするタッチパネル装
置。8. An exciter for exciting a surface acoustic wave and a receiver for receiving a surface acoustic wave are provided on a peripheral portion of a rectangular substrate, and between the excitation element and the receiver on the substrate. In a touch panel device that propagates a surface acoustic wave and detects a position of an object that is in contact with the substrate based on a reception result at the receiving element, the excitation element and the receiving element are a film-shaped piezoelectric body, A touch panel device comprising: a grid electrode formed on one surface of the piezoelectric body; and a flat plate electrode formed on the other surface of the piezoelectric body.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002156038A JP4052880B2 (en) | 2002-05-29 | 2002-05-29 | Touch panel device |
| CNA031366562A CN1490713A (en) | 2002-05-29 | 2003-05-22 | Touching screen device |
| CNA2007101270968A CN101078962A (en) | 2002-05-29 | 2003-05-22 | Touch panel device |
| US10/446,153 US7079120B2 (en) | 2002-05-29 | 2003-05-28 | Touch panel device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002156038A JP4052880B2 (en) | 2002-05-29 | 2002-05-29 | Touch panel device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003345504A true JP2003345504A (en) | 2003-12-05 |
| JP4052880B2 JP4052880B2 (en) | 2008-02-27 |
Family
ID=29772409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002156038A Expired - Fee Related JP4052880B2 (en) | 2002-05-29 | 2002-05-29 | Touch panel device |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US7079120B2 (en) |
| JP (1) | JP4052880B2 (en) |
| CN (2) | CN1490713A (en) |
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- 2003-05-28 US US10/446,153 patent/US7079120B2/en not_active Expired - Lifetime
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Also Published As
| Publication number | Publication date |
|---|---|
| US20040027342A1 (en) | 2004-02-12 |
| US7079120B2 (en) | 2006-07-18 |
| CN101078962A (en) | 2007-11-28 |
| JP4052880B2 (en) | 2008-02-27 |
| CN1490713A (en) | 2004-04-21 |
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