JP2003217777A - Electric connection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To minimize the electric contact resistance of a device with a contactor having a simple structure. <P>SOLUTION: This electric connection device comprises a deformation part having a curved outer surface, a plurality of contacts having a needle tip part continued to one end of the deformed part and a needle rear part continued to the other end of the deformation part, a plurality of bar-like members having an end part brought into contact with the tip of the needle tip part, and an assembling means for assembling the contacts and the bar-like members to a board. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for electrically connecting a conductive portion of a substrate such as a wiring substrate and an electrode portion of a device under test such as an integrated circuit.

[0002]

2. Description of the Related Art Generally, an electric current test of an integrated circuit is performed by electrically conducting a conductive part such as a wiring pattern of a wiring board and an electrode part such as a lead electrode, a pad electrode, a bump electrode, a protruding electrode of the integrated circuit. This is done using the connecting device.

As one of the electrical connection devices of this type, there is one using a plurality of arc-shaped, J-shaped, S or Z-shaped, and I-shaped contacts (for example, Japanese Patent Laid-Open No. 10-17788).
6, JP-A-11-31566, JP-A-11-31566
-162605).

In all of these electrical connection devices, a plurality of slots penetrating in the thickness direction of a plate-shaped housing made of synthetic resin are formed in at least one row,
This housing is assembled on one surface side of the wiring board, and a plurality of contacts for electrically connecting the conductive portion of the wiring board and the electrode portion of the integrated circuit are arranged in the slots of the housing, and the elastic body is placed inside the housing. It is arranged.

In the above electrical connection device, when the electrode portion of the integrated circuit is pressed against the contact, the contact elastically deforms the elastic body and also presses against the conductive portion of the wiring board. As a result, the conductive portion of the wiring board and the electrode portion of the integrated circuit are electrically connected, so that the energization test of the integrated circuit is performed in this state.

When the contact piece is pressed against the electrode part, the contact piece rotates slightly with respect to the electrode part, thereby making a good electrical connection with the conductive part and the electrode part.
Further, since the structure of the contactor itself is simple, the cost is lower than that of an apparatus using another type of contactor.

However, the electrical connecting device as described above is
Although it is suitable for contacting a flat electrode portion, it is not often used for contacting a hemispherical bump electrode or for a handler.

For this reason, in many electrical connection devices used in integrated circuits, handlers, etc., where the electrode portion is provided with bump electrodes, a contact that is movable in the direction perpendicular to the substrate, such as a pogo pin, is often used. It's being used.

[0009]

[Problems to be Solved] However, in a pogo pin type contactor, two pins are combined with a coil spring in between, one of the pins is brought into contact with the conductive portion, and the other pin is brought into contact with the electrode portion. Since the conductive portion and the electrode portion are electrically connected, there are two electrical contact portions in the contactor.

In the electrical connection device using such a contact, the electrical contact resistance of the device, especially the contact, is large,
Therefore, it is not suitable for a high frequency test and a good test result cannot be obtained. Further, since the structure of the contactor itself is complicated, a large number of expensive contacts are required, and the cost becomes higher accordingly.

An object of the present invention is a contactor having a simple structure,
The purpose is to reduce the electrical contact resistance of the device.

[0012]

An electrical connection device according to the present invention comprises a deformed portion having a curved outer surface, a needle tip portion connected to one end of the deformed portion, and a needle rear portion connected to the other end of the deformed portion. It includes a plurality of contacts, a plurality of rod-shaped members having an end portion in contact with the tip of the needle tip portion, and an assembly means for assembling the contacts and the rod-shaped member to a substrate.

The electrical connecting device is assembled to the substrate by the assembling means so that the contact faces the conductive portion of the substrate. In this state, the device under test such as an integrated circuit is arranged in the electrical connection device, and in this state, the electrode part of the device under test and the other end of the rod-shaped member on the side opposite to the needle tip side are relatively positioned. Pressed.

When the electrode portion and the rod-shaped member are pressed relative to each other, the contactor is pressed against the conductive portion of the substrate by the rod-shaped member and is slightly rotated with respect to the electrode portion. As a result, the electrode portion and the rod-shaped member, the rod-shaped member and the contactor, and the contactor and the conductive portion are strongly pressed, and they are brought into a good electrical connection state.

According to the present invention, since the structure of the contact itself is simple, as compared with an apparatus using another type of contact,
It will be cheaper. Further, since the electrical contact portion in the device is only one place between the contact and the rod-shaped member, the electrical contact resistance of the contact is small, which is suitable for use in high frequency tests,
Good test results can be obtained.

The assembling means includes a housing having a plate-like portion and assembled to the substrate, and one or more elastically deformable needle retainers arranged in the housing, and the contactor is the needle. The rod-shaped member may be arranged in the housing by a retainer, and the rod-shaped member may be mounted in the housing so as to be movable in the axial direction thereof. By doing so, the contactor can be stably assembled to the housing by the needle presser.

In one embodiment, the needle retainer has an elastic plate disposed in the housing at a distance from the plate-shaped portion, and an electrically insulating plate disposed on the opposite side of the elastic plate from the plate-shaped portion. The needle tip portion of each contact element penetrates the elastic plate and projects toward the plate-like portion side, and the needle rear portion of each contact element is located in the electrically insulating plate and has the rod shape. The members may penetrate the plate-shaped portions in the thickness direction so as to be movable in the longitudinal direction thereof. By doing so, the position and orientation of the contact with respect to the elastic plate and the electrically insulating plate are stabilized by the elastic plate and the electrically insulating plate.

The elastic plate has a first hole through which the needle tip portion of the contactor passes, and the electrically insulating plate has a second hole in which the needle rear portion of the contactor is accommodated. You may have. By doing so, the position and orientation of the contact with respect to the elastic plate and the electrically insulating plate are more stabilized.

The housing may include a first member on which the contact, the elastic plate and the electrical insulating plate are arranged, and a second member on which the rod-shaped member is arranged. By doing so, even if the dimension from the conductive portion of the substrate to the tip of the contact is the same, by using rod-shaped members with different length dimensions, the conductive portion of the substrate to the electrode portion of the device under test can be used. Can be different electrical connection devices. Therefore, the contacts, the elastic plate, the electrically insulating plate, and the first member are standardized so that they are common to the electrical connection devices having different sizes from the conductive portion of the substrate to the electrode portion of the device under test. You can

In another embodiment, the needle retainer includes an elastically deformable rod-shaped portion extending in the arrangement direction of the contacts.
The housing has a plurality of slots in which the needle tips of the contacts are received, one or more recesses communicating with the slots and in which the needle retainers are arranged, and a through hole through which the rod-shaped member penetrates. Have As a result, the position and posture of the contact with respect to the housing are stabilized by the slot and the needle presser.

In another embodiment, the contacts are spaced apart from each other in the housing in one direction, the recess extends in the one direction, and the needle retainer extends in the longitudinal direction of the recess. An elastically deformable rod-shaped portion that extends to is included.

In another embodiment, the housing includes a first member having the slot and the recess,
It may include a second member that is superposed on the first member and that has the through hole. By doing so, even if the dimension from the conductive portion of the substrate to the tip of the contact is the same, by using rod-shaped members having different length dimensions, the electrode from the conductive portion of the substrate to the electrode of the device under test is used. The electrical connection device may have different dimensions up to the part.
Therefore, the contactor, the needle retainer, and the first member can be standardized so as to be common to electrical connection devices having different sizes from the conductive portion of the substrate to the electrode portion of the device under test.

The first and second members are provided with a plurality of positioning pins so that the first and second members are in a plane parallel to the substrate.
The relative movement of the members may be prevented. By doing so, the relative positional relationship between the contactor and the rod-shaped member is stably maintained.

[0024]

1 to 3, an electrical connection device 10 is used together with a board 14 as a socket used for an electric current inspection, that is, an electric current test of a flat plate-shaped object to be inspected 12.

The object 12 to be inspected is a semiconductor device such as an integrated circuit chip in the illustrated example, and one surface of the main body 16 having the shape of a rectangular plate (the lower surface in the illustrated example).
Has a plurality of electrode portions 18. Although each electrode 18 is a hemispherical bump electrode in the illustrated example, it may be a protruding electrode having another shape, or may be a flat electrode.

In the illustrated example, the electrode portion 18 is divided into a plurality of rows of electrode groups aligned at intervals in one direction. The electrodes 18 of each electrode group correspond to the electrode portions 18 of the adjacent electrode group.
On the other hand, they are shifted by a half pitch in the arrangement direction. However, the electrodes 18 may be arranged in other states.

The board 14 is a wiring board in which a wiring pattern is formed on a plate member 20 formed of an electrically insulating material by an appropriate method such as a printed wiring technique, and at least a part of the wiring pattern is formed on one side. The surface (the upper surface in the illustrated example) is exposed to form a conductive portion 22 that individually corresponds to the electrode portion 18 of the device under test 12.

The electrical connecting apparatus 10 includes a first assembly 24 that acts as a contact unit, a second assembly 26 that acts as a connecting unit, and a frame-shaped guide 28.
The housing 30 is superposed so that the second assembly 26 is located between the first assembly 24 and the guide 28.

The first assembly 24 includes a plate-shaped frame member 32 made of an electrically insulating material such as synthetic resin, an elastic plate 34 such as silicone rubber disposed on the frame member 32, and an elastic plate 3.
4 and the electrical insulating plate 36 arranged below
A plurality of contacts 38 individually associated with the set of two electrode portions 18 and the conductive portions 22 of the substrate 14.

The frame member 32 has a recess 40 that is open to the substrate 14 side, and also has a plurality of through holes 42 that correspond individually to the contacts 38. The recess 40 forms a downward step so that the elastic plate 34 and the insulating plate 36 can be stacked and arranged in parallel with the substrate 14. The through hole 42 communicates with the recess 40.

Instead of associating the through hole 42 with each contact 38, it may be a through hole corresponding to a plurality of contacts 38 or may be a through hole corresponding to all the contacts 38.

The elastic plate 34 is made of a three-dimensionally elastically deformable rubber material such as silicone rubber, and has a plurality of holes 44 through which the contacts 38 individually pass. Each hole 44 corresponds to the electrode portion 18 of the device under test 12. The lower portion of each hole 44 is larger than the upper portion in the spot facing portion 4.
It is supposed to be 6.

The insulating plate 36 is made of a synthetic resin material such as polyimide and has a plurality of elongated holes 48. Each elongated hole 48 penetrates the insulating plate 36 in the thickness direction to communicate with the hole 44 of the elastic plate 34, and also extends in the same direction. The insulating plate 36 preferably has a certain thickness, rigidity, spring property, etc., such as a sheet shape, a film shape, and a plate shape.

Each contact 38 has a deformable portion 50 having a curved outer surface, a needle tip portion 52 following one end (upper end in the illustrated example) of the deformable portion 50, and the other end (illustrated in the drawing). In the example, it has a needle rear part 54 following the lower end) and has a rectangular cross-sectional shape. Each contact 38 is formed of a conductive material in a rectangular, square, or circular cross-sectional shape. The outer surface of the deformable portion 50 is an arcuate curved surface that follows the outer surface of the needle back portion 54.

The needle tip (tip) of each contact 38 has a needle rear portion 5.
4 is an arc surface curved in the extending direction. The cross section of each hole 44 of the elastic plate 34 is smaller than the cross section of the needle tip portion 52 of the contact 38, so that each contact 38 is made elastic.
Has been maintained. The contact 38 includes a first contact group in which the needle rear portion 54 extends from the deformable portion 50 to one side, and the needle rear portion 54.
Is divided into a second contact group extending from the deformable portion 50 to the other side.

The second assembly 26 has a plate-like member 56 having a plurality of through holes individually corresponding to the set of the electrode portion 18 and the contactor 38 of the device under test 12, and is vertically movable in each through hole. And a rod-shaped member 58 disposed in the. The plate member 56 is manufactured from an electrically insulating material such as synthetic resin. Each rod-shaped member 58 is formed in a rod-like shape from a conductive material such as phosphor bronze, and protrudes above and below the plate-shaped member 56.

In the second assembly 26, the plate-shaped member 56 is a frame member so that the lower end surface of the truncated cone of each rod-shaped member 58 contacts the tip end surface of the needle tip portion 52 of the corresponding contact 38. Overlaid on 32.

The guide 28 is formed of a suitable material such as synthetic resin in the shape of a rectangular short tube. Guide 2
The opening 60 of 8 has an inclined portion that guides the inspection object 12 to the rod-shaped member 58, and a restriction portion that is below the inclination portion and that restricts the position of the inspection object 12 with respect to the connection device 10.

The electrical connecting device 10 can be assembled, for example, as follows.

First, the elastic plate 34 and the insulating plate 36 are superposed and bonded. However, the elastic plate 34 and the insulating plate 3
6 and 6 may not be adhered.

Next, the needle tip 52 is attached to the hole 44 of the elastic plate 34.
Each contact 38 passes through the elastic plate 34 and the insulating plate 3 in a state where the needle rear portion 54 is located in the elongated hole 48 of the insulating plate 36.
Assembled to 6. Therefore, the elastic plate 34 and the insulating plate 36 act as a needle retainer for mounting the contact 38 on the housing 30.

Next, the elastic plate 34 and the insulating plate 36 are arranged in the recess 40 of the frame member 32 with the elastic plate 34 on the insulating plate 36, and the rod-shaped member 58 is attached to the plate member 5.
The second assembly 26 passed through the through hole 6 is the first assembly 2
4 and further includes a guide 28 for the second assembly 2
Stacked on top of 6.

In the above state, the first and second assemblies 22 and 26 and the guide 28 are assembled to the substrate 14 by the plurality of screw members 62 penetrating them. The relative positions of the substrate 14 and the first and second assemblies 24 and 26 penetrate the substrate 14, the frame member 32, the elastic plate 34, and the insulating plate 36, and the plate member 56 of the second assembly 26. Maintained by a plurality of locating pins 64 inserted in the. The relative position between the guide 28 and the second assembly 26 is maintained by a plurality of positioning pins 66 inserted in the plate member 56 and the guide 28.

During the energization test, the device under test 12 has its electrode portion 1
It is arranged in the opening 60 of the guide 28 from above with 8 facing downward. As a result, the electrode portion 18 of the device under test 12
Is in contact with the upper end surface of the rod member 58, and the lower surface of the rod member 58 is in contact with the needle tip of the contact 38. At this time, the inspection object 12 is guided by the inclined portion of the guide 28 and reaches the regulation portion. Therefore, the electrode portion 18 and the rod-shaped member 5 of the inspection object 12 are guided.
It is possible to easily and surely make contact with the tip end surface of No. 8.

In the above state, the electrical connection device 10 and the device under test 12 are brought relatively close to each other, and the upper end surface of the rod member 58 and the electrode portion 18 of the device under test 12 are relatively pressed.
As a result, the lower surface of the rod-shaped member 58 is pressed against the needle tip of the contact 38, and the contact 38 is pressed against the conductive portion 22 of the substrate 14.

As a result of the above, the electrode portion 18 and the rod-shaped member 58,
The rod-shaped member 58 and the contact 38, and the contact 38 and the conductive portion 22 are strongly pressed to bring them into a good electrical connection state. The electrode 18 of the device under test 12 and the conductive portion 22 of the substrate 14 are electrically connected by the contact 38 and the rod-shaped member 58.

In the above-mentioned state, the current-carrying test of the device under test 12 is performed. The effective range of the contact 38 through which the current flows during the energization test is the region from the tip of the needle to the contact point with the conductive portion 22 of the substrate 14.

When the front end surface of the rod-shaped member 58 and the electrode portion 18 of the device under test 12 are pressed relative to each other, the contactor 38 has its rear end on the wall surface of the insulating plate 36 forming the elongated hole 48. In the state in which the contact is made and the retreat is blocked, the state shown in FIG.
Therefore, the contact 38 surely contacts the conductive portion 22 of the substrate 14 and the electrode portion 18 of the device under test 12.

Further, the tip surface of the rod-shaped member 58 and the object to be inspected 1
When the second electrode portion 18 is pressed relatively, the contact 38
Since the elastic plate 34 is displaced while elastically deforming, the contact pressure between the electrode portion 18 and the rod-shaped member 58, the rod-shaped member 58 and the contactor 38, and the contactor 38 and the conductive portion 22 increases, and they are more Make sure contact.

The needle tip, which is an arc surface curved in the extending direction of the needle rear portion 54, is pressed when the tip end surface of the rod-shaped member 58 and the electrode portion 18 of the device under test 12 are pressed relative to each other. The lower surface of the rod-shaped member 58 is slid and the oxide film on the lower surface is scraped off.

When the tip end surface of the rod-shaped member 58 and the electrode portion 18 of the device under test 12 are pressed relative to each other, the force acting on the contact 38 is the first force at which the needle rear portions 54 extend in opposite directions.
And the second contactor group are in opposite directions, which cancel each other out.

The elastic plate 34 and the insulating plate 36 are preferably laminated as described above. That way,
Compared with the case where the elastic plate 34 and the insulating plate 36 are separated,
The thickness dimension of the electrical connection device 10, in particular the first assembly 24, can be made smaller. However, the elastic plate 34 and the insulating plate 36 do not necessarily have to be overlapped.

According to the electrical connection device 10, the contact 38
Because of its simple structure, it is less expensive than a device using other types of contacts.

According to the electrical connection device 10, since the electrical contact portion in the device 10 is only one place between the contact 38 and the rod member 58, the electrical contact resistance in the device 10 is increased. Is small and suitable for high frequency tests, and good test results can be obtained.

According to the electrical connection device 10, the housing 30 is further divided into the first and second assemblies 24 and 26, so that from the conductive portion 22 of the substrate 14 to the tip of the contact 38. Even if the dimensions are the same, by using the rod-shaped members 58 having different lengths, an electrical connection device having different dimensions from the conductive portion 22 of the substrate 14 to the electrode portion 18 of the device under test 12 can be obtained. it can. Therefore,
Frame member 32, elastic plate 34, insulating plate 36, and contact 38
Can be standardized so as to be common to electrical connection devices having different dimensions from the conductive portion 22 of the substrate 14 to the electrode portion 18 of the device under test 12.

In the electrical connection device 10, the contact 3
Since the needle tip portion 52 of No. 8 penetrates the hole 44 of the elastic plate 34 and the needle rear portion 54 is located in the elongated hole 48 of the insulating plate 36, the position and posture of the contact 38 with respect to the elastic plate 34 and the insulating plate 36 are Stabilize. Further, since the elastic plate 34 and the insulating plate 36 perform the function of the conventional housing, the thickness dimension of the electrical connecting device 10 becomes smaller than that of the conventional device, and the contact 38 is formed.
Since the effective length dimension of is smaller, it is more suitable for high frequency testing.

The present invention is applicable not only to a device having a plurality of electrode portions 18 on one surface of the main body portion 16 but also to lead electrodes protruding in parallel from the main body portion such as a packaged or molded integrated circuit. It can also be applied to an electrical connection device used for an electric current test of a device under test having a plurality of electrode portions.

Referring to FIGS. 4 and 5, the electrical connecting device 70 includes a packaged or molded DUT 72.
It is used for the current test. The device under test 72 has a main body 74.
Has a plurality of electrode portions 76 protruding from both sides in the width direction.
The electrode part 76 is divided into a plurality of electrode part groups corresponding to each side in the width direction, and is also arranged in parallel for each electrode part group.

The electrical connection device 70 is arranged between the substrate 14 and the plate-shaped device carrier 78. The device carrier 78 connects the device under test 72 to the electrical connection device 70.
In addition to having an opening 80 similar to the opening 80 of the guide 28 in the electrical connection device 10, a receiving portion 82 for receiving the main body portion 74 of the device under test 72 is provided in the opening 80. ing.

The electrical connecting device 70 includes a first assembly 84 which acts as a contact unit, a second assembly 86 which acts as a connecting unit, and a second assembly 86 which is the first assembly. The housing 88 is superposed so as to be located above 86.

The first assembly 84 is attached to the frame member 90 by a plate-shaped frame member 90 made of an electrically insulating material such as synthetic resin, a pair of rod-shaped elastic members 92, and elastic members 92. And a plurality of contacts 94.

The frame member 90 has an opening that is open to the substrate 14 side, that is, a first recess 96, a second recess 98 in which the elastic member 92 is arranged, and first and second recesses 96 and 98. And a plurality of slots 100 that communicate with each other for each electrode group of the device under test 72.

The first and second recesses 96 and 98 extend in the arrangement direction of the corresponding electrode group of the device under test 72. The slot 100 penetrates the frame member 90 in the thickness direction, and extends in the width direction of the device under test 72 at intervals in the longitudinal direction of the first and second recesses 96 and 98.

The elastic member 92 is formed of an electrically insulating material such as silicone rubber into a cylindrical shape, and has a second shape.
Of the recess 98.

Like each of the contacts 38, each of the contacts 94 has a deformed portion 102 having a curved outer surface, a needle tip portion 104 connected to one end of the deformed portion 102, and a needle rear portion connected to the other end of the deformed portion 102. 106, and is formed of a conductive material in a rectangular cross-sectional shape. The outer surface of the deformable portion 102 is an arcuate curved surface that follows the outer surface of the needle back portion 106.

In each contactor 94, the needle tip portion 104 penetrates through the slot 100 and the tip thereof is projected above the frame member 90.
A part of the deformed portion 102 has first and second recesses 96 and 98.
The needle rear portion 106 is received in the second recess 98, and the rear end surface of the needle rear portion 106 is in contact with the inner surface of the second recess 98, the elastic member 92 causes the frame member 90 to contact.
It is located in.

Each of the contacts 94 has a frame member 90 through an elastic member 92 so that the deformable portion 102 can come into contact with the conductive portion 22 when assembled in the connection device 70.
And is prevented from retreating by the inner surface of the second recess 98.

The second assembly 86 has a plate-like member 108 having a plurality of through holes individually corresponding to the set of the electrode portion 76 and the contactor 94 of the object 72 to be inspected, and is vertically movable in each through hole. And a rod-shaped rod-shaped member 110 disposed in The plate member 108 is manufactured from an electrically insulating material such as synthetic resin. Each rod-shaped member 110 is formed in a rod-like shape from a conductive material such as phosphor bronze, and protrudes above and below the plate-shaped member 108.

In the second assembly 86, the plate member 108 is superposed on the frame member 90 so that the lower end surface of each rod member 110 contacts the tip end surface of the needle tip portion 104 of the corresponding contact 94. Has been.

The electrical connecting device 70 can be assembled, for example, as follows.

When assembling the electrical connecting device 70, the elastic member 92 is first placed in the first recess 98 with the frame member 90 of the first assembly 84 being turned upside down from the state shown in FIG. To be done.

Next, in the above state, each contactor 94
The needle tip portion 104 of the elastic member 9 is passed through the slot 100.
The contactor 94 is arranged on the frame member 90 so that the contact point 2 is between the contactor 94 and the frame member 90.
And are combined. The relative positions of the board 14 and the frame member 90 are maintained by a plurality of positioning pins 112 that penetrate the board 14 and are inserted into the frame member 90.

Then, after returning the hierarchical relationship to the original state,
The plate member 108 on which the rod member 110 is arranged is the frame member 90.
On which the substrate 14, the frame member 90 and the plate-shaped member 1 are stacked.
08 penetrates the plate-shaped member 108 and the frame member 90, and the substrate 1
4 is assembled by a plurality of screw members 114 screwed together. The relative positions of the frame member 90 and the plate member 108 are
It is maintained by a plurality of positioning pins 116 that penetrate the plate member 108 and are inserted into the frame member 90.

The contactor 94 is held by the frame member 90 by the elastic member 92 in the state where it is assembled to the electrical connecting device 70 as described above. Therefore, the elastic member 92
Acts as a needle retainer for disposing the contactor 94 on the frame member 90.

During the energization test, the object 72 to be inspected has its electrode portion 7
With the device 6 facing downward, the device carrier 78
It is conveyed above the electrical connection device 70 and placed on the electrical connection device 70. The electrode portion 76 of the device under test 72 contacts the upper end surface of the rod-shaped member 110, and the lower surface of the rod-shaped member 110 contacts the needle tip of the contactor 94.

In the above state, the electrical connection device 70 and the device under test 72 are brought relatively close to each other, and the upper end surface of the rod member 110 and the electrode portion 76 of the device under test 72 are relatively pressed. As a result, the lower surface of the rod-shaped member 110 and the needle tip of the contactor 94 are pressed, and the contactor 94 is attached to the conductive portion 22 of the substrate 14.
Is pressed by.

As a result of the above, the electrode portion 76 and the rod-shaped member 11
0, the rod-shaped member 110 and the contactor 94, and the contactor 94 and the conductive portion 22 are strongly pressed, and they are brought into a good electrical connection state. The electrode part 76 of the device under test 72 and the substrate 1
4 and the conductive portion 22 are electrically connected by the contactor 94 and the rod-shaped member 110.

In the above-mentioned state, the electricity test of the object 72 to be inspected is performed. The effective range of the contact 94 through which the current flows during the energization test is the region from the needle tip to the contact point with the conductive portion 22 of the substrate 14.

When the tip end surface of the rod-shaped member 110 and the electrode portion 76 of the device under test 72 are pressed relative to each other, the contactor 94 is
With the rear end abutted against the inner wall surface forming the second recess 98 of the frame member 90 to prevent retreat, the frame member 90 rotationally moves slightly. Therefore, the contactor 94 surely contacts the conductive portion 22 of the substrate 14 and the electrode portion 76 of the device under test 72.

When the tip surface of the rod-shaped member 110 and the electrode portion 76 of the device under test 72 are pressed relative to each other, the contact 9
Since 4 is displaced while elastically deforming the elastic member 92, the electrode portion 76 and the rod member 110, and the rod member 110 and the contact 9
4, and the contact pressure between the contactor 94 and the conductive portion 22 increases, and they contact each other more reliably.

The needle tip, which is an arc surface curved in the extending direction of the needle rear portion 106, has a tip end surface of the rod-shaped member 110 and the object 72 to be inspected.
When the electrode portion 76 of the
The oxide film on the lower surface of the rod-shaped member 110 is scraped off by sliding on the lower surface of 10.

The electrical connecting device 70 can also obtain the same effects as those of the electrical connecting device 10.

Inspected bodies 12, 7 of the rod-shaped members 58, 110
The end surface on the second side may be a flat surface, or as shown in FIG. 6, a truncated conical concave surface (A), a cylindrical concave surface (B),
The shape may be an appropriate shape such as a truncated cone-shaped convex surface (C) or an inclined surface (D).

In each of the above embodiments, the housing is
Although divided into one member, the housing need not be so divided.

The present invention can be applied to an electrical connecting device using a contactor having a shape other than the above-mentioned embodiments, and for conducting a current test of another flat plate-like inspected object such as a liquid crystal display panel. The present invention can also be applied to the electrical connection device described above, and can also be applied to the electrical connection device used in a state in which the upper and lower sides are reversed from the above-described embodiment.

The present invention is not limited to the above-mentioned embodiments, and various modifications can be made without departing from the spirit of the invention.

[Brief description of drawings]

FIG. 1 is a plan view showing an embodiment of an electrical connection device according to the present invention.

FIG. 2 is a sectional view taken along line 2-2 in FIG.

FIG. 3 is a partial enlarged cross-sectional view for explaining the operation of the electrical connection device shown in FIG. 1, in which (A) shows a state before the electrode portion and the rod-shaped member are relatively pressed. , (B) show the pressed state.

FIG. 4 is a plan view showing a first assembly of another embodiment of the electrical connecting device according to the present invention.

5 is a sectional view taken along line 5-5 in FIG.

FIG. 6 is a diagram showing an example of the shape of the upper end portion of a rod-shaped member.

[Explanation of symbols]

10,70 Electrical connection device 12,72 Inspection object 14 board 18,76 Electrode part of DUT 22 Conductive part of substrate 24,84 1st assembly (1st member) 26,86 2nd assembly (2nd member) 28 Guide 30,88 housing 32,90 Frame member 34 Elastic plate (needle retainer) 36 Electrically insulating board (needle retainer) 38,94 Contact 40,96,98 recess 42 through hole 44 holes 48 slot 50,102 Deformation part of contactor 52,104 Needle part of contact 54,106 Needle rear part of contactor 56,108 plate-shaped member 58,110 Rod-shaped member 62,114 screw members 64, 66 Positioning pin 78 Device carrier 92 Elastic member (needle retainer) 96, 98 First and second recesses 100 slots 112,116 Positioning pin

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Claims (9)

[Claims] 1. A device for electrically connecting a conductive part formed on one surface of a substrate and an electrode part of a device under test, the deforming part having a curved outer surface, and one end of the deforming part. A plurality of contact elements having a needle tip portion continuing to the other end of the deformable portion and a plurality of rod-shaped members having an end portion in contact with the tip of the needle tip portion; And an assembling means for assembling a member to the substrate. 2. The assembly means includes a housing having a plate-shaped portion and assembled to the substrate, and one or more elastically deformable needle retainers arranged in the housing. Mounted on the housing by the needle retainer, and the rod-shaped member is arranged on the housing so as to be movable in the axial direction thereof.
The electrical connection device according to claim 1. 3. The needle retainer includes an elastic plate arranged in the housing at a distance from the plate-like portion, and an electrical insulating plate arranged on the opposite side of the elastic plate from the plate-like portion,
The needle tip portion of each contact penetrates the elastic plate and projects toward the plate-shaped portion, the needle rear portion of each contact is located in the electrical insulating plate, and the rod-shaped member Movably in the longitudinal direction of the plate-shaped portion through the thickness direction,
The electrical connection device according to claim 2. 4. The elastic plate has a first hole through which a needle tip portion of the contactor penetrates, and the electrically insulating plate has a second hole in which a needle rear portion of the contactor is accommodated. The electrical connection device according to claim 3, comprising: 5. The housing includes a first member on which the contactor, the elastic plate, and the electrical insulating plate are arranged,
The electrical connection device according to claim 2, further comprising a second member on which the rod-shaped member is arranged. 6. The needle retainer includes an elastically deformable rod-shaped portion extending in the arrangement direction of the contacts, and the housing is
It has a plurality of slots in which the needle tips of the contacts are received, one or more recesses communicating with the slots and in which the needle retainers are arranged, and a through hole through which the rod-shaped member penetrates. The electrical connection device according to claim 2. 7. The contacts are arranged in the housing at intervals in one direction, the recess extends in the one direction, and the needle retainer extends elastically in the longitudinal direction of the recess. 7. Electrical connection device according to claim 6, comprising a possible rod. 8. The housing includes a first member having the slot and the recess, and a second member stacked on the first member and having the through hole. An auxiliary device according to claim 6 or 7, comprising. 9. The first and second members are prevented from relative movement of the first and second members in a plane parallel to the substrate by a plurality of positioning pins. The electrical connection device according to.