JP2003257652A - Method of manufacturing electro-luminescence element - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an electro-luminescence element for prematurely evaluating the acceptability of the formed state of a light emitting layer without energization in the production process for an organic EL display device and increasing a production efficiency by omitting wasteful steps after the evaluation when a defect is found. <P>SOLUTION: A substrate having a first electrode formed thereon is inputted into manufacturing equipment (S1), a light emitting layer is formed on the first electrode (S2), exciting light is radiated to a light emitting layer, and fluorescent light from the light emitting layer is measured (S3). Based on the measured results, the acceptability of the formed state of the light emitting layer is evaluated (S4). When the formed state of the light emitting layer is acceptable, a second electrode is formed on the light emitting layers by using a vacuum evaporation method (S5), and sealed by a transparent insulation layer (S6). When the formed state of the light emitting layer is not acceptable, the step is not moved to a second electrode forming step (S5) and the cause of occurrence of a defect in the light emitting layer formation step (S2) is inspected. When the light emitting layers with three colors R, G, B are formed, each time a step for forming each of the light emitting layers with the colors is completed, the fluorescent light measurement (S3) is performed and the acceptability of the formed state for each of the light emitting layers with the colors is evaluated (S4). Then the step is moved to a next one only when the formed state is acceptable. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an electroluminescence (hereinafter referred to as EL) device, and more particularly to an organic EL having a light emitting layer containing an organic light emitting material.
The present invention relates to a method for evaluating the quality of the formation state of a light emitting layer in the manufacturing process of an element.

[0002]

2. Description of the Related Art In recent years, with the diversification of information equipment, there is an increasing demand for a flat display element that consumes less power than a CRT (cathode ray tube) which is generally used. As one of the flat display elements, an electroluminescence (EL) element having characteristics such as high efficiency, thinness, light weight, and low viewing angle dependency has attracted attention, and a display using this EL element has been actively developed. There is. An EL element is a self-luminous element that emits light by applying an electric field to a fluorescent compound, and uses an inorganic EL element using an inorganic compound such as zinc sulfide as a light emitting layer and an organic compound such as a diamine as a light emitting layer. It is roughly divided into the organic EL element that was used. In particular, organic EL elements are expected to be applied to display devices of mobile terminals in particular in recent years because of advantages such as easy colorization and operation at a much lower voltage DC current than inorganic EL elements.

EL display devices include an inorganic EL display device having a light emitting layer containing an inorganic light emitting material and an organic EL display device having a light emitting layer containing an organic light emitting material. In the inorganic EL display device, a strong electric field is generated between the electrodes, and the electric field accelerates the electrons in the light emitting layer to collide with the light emission center to excite the light emission center to emit light.

On the other hand, the organic EL display device injects electrons and holes into the light emitting layer from the electron injecting electrode (negative electrode) and the hole injecting electrode (positive electrode), respectively, and injects the injected electrons and holes into the emission center. Re-combines with each other to generate fluorescence when the emission center returns from the excited state to the ground state. Therefore, since the organic EL element can change the emission color by selecting the fluorescent substance forming the light emitting layer, there are increasing expectations for application to display devices such as multicolor and full color.

As an organic EL display device capable of full color display, as shown in FIG. 6, R (red), G (green), B
Three types of (blue) organic EL elements 61R, 61G, 61B
Are arranged in a stripe shape or a dot matrix shape on the glass substrate 62, and each of the organic EL elements 61R, 61R
Development of an EL display device capable of displaying an arbitrary color for each pixel by selectively driving G and 61B to emit light is in progress.

This type of organic EL display device has organic EL elements 61R, 61G, as shown in the sectional structure of FIG.
61B is a thin film transistor (T
FT) 63R, 63G, 63B, first electrodes (driving electrodes) 64R, 64G, 64B, light emitting layers 65R, 65G,
65B and second electrodes 66R, 66G, 66B are sequentially formed, and the first electrodes (driving electrodes) 64 by selectively turning on / off the TFTs 63R, 63G, 63B.
R, 64G, 64B and second electrodes 66R, 66G, 66
The light emitting layers 65R, 65G located in the region sandwiched between B and
65B selectively emits light. Second electrode 6
6R, 66G, and 66B are made of a transparent material and have a light emitting layer 65.
Light from R, 65G, and 65B is emitted from the second electrodes 66R and 6R.
It is released through 6G and 66B. TFT 63R, 63
G and 63B are drains D formed of a polysilicon layer,
The first electrode 64R, 64G, 64B of the organic EL element is formed of the source S and the gate electrode G.
Is connected to the drain D through a through hole formed in the interlayer insulating film. In addition, each color region is separated by a bank 67 made of an insulating material such as polyimide for preventing adjacent organic light emitting materials from mixing with each other.

There are two types of organic EL display devices, one using a high molecular weight organic material as an organic light emitting material and the other using a low molecular weight organic material. One using a high molecular weight organic material and the other using a low molecular weight organic material. The method of forming the light emitting layer is different from that using an organic material.

FIG. 8 exemplifies a process of forming a light emitting layer when a high molecular organic material is used as the light emitting material.
Polymer organic materials use R, G, B with organic solvent.
Create different kinds of light emitting material solutions, and use TFT 63R, 63G,
63B, the first electrodes 64R, 64G, 64B and the first electrode 64 on the glass substrate 62 on which the bank 67 is formed.
By spraying the light emitting material solution 68 from the nozzle 99 on the surfaces of R, 64G, and 64B, the R, G, and B light emitting layers 70R, 70G, and 70B are formed.

When a low molecular weight organic material is used as the light emitting layer, a vapor deposition method is used. 9 (a)-
(C) illustrates the step of forming a light emitting layer when a low molecular weight organic material is used as the light emitting material. On the glass substrate 62, the TFT, the first electrode, and the bank 67 are previously formed as in FIG. In this case, three kinds of organic light emitting materials 72R, 72G, 7 of R, G, B are used by sequentially moving the shadow mask 71 and using a desired vapor deposition source.
By sequentially vacuum-depositing 2B on the glass substrate 62, each of the R, G, B light emitting layers 73R, 73G, 73B.
Is formed.

FIG. 10 shows an example of a conventional manufacturing process for mass-producing a display device using this type of organic EL element.
Shown in.

In this step, first, the substrate on which the first electrode (driving electrode) is formed is put into a manufacturing apparatus (S11),
Using the method shown in FIG. 8 or 9, three types of light emitting layers of R, G and B are formed on the substrate (S12). After that, a second electrode made of a transparent material is formed on each light emitting layer by using a vacuum deposition method or the like (S13), and is sealed with a transparent insulating layer or the like (S14). Then, the energization test is performed in the final step (S15). In the energization test (S15), the TFTs of each EL element formed on the substrate are selectively turned on / off to generate an electric field between the first electrode and the second electrode, and The device is made to emit light and the amount of light is measured to test whether light is emitted normally. Then, based on the result, the yield of the pixels of the EL display device is determined (S16). If the pixel yield is equal to or higher than a predetermined value, it is determined as a non-defective product, and if it is less than the predetermined value, it is determined as a defective product.
If a defective product occurs, the production line is stopped, the process is traced back to investigate the cause, and the problem is dealt with, and then the production line is operated again.

[0012]

However, in the above-described conventional manufacturing method, whether or not each EL element of the organic EL display device normally emits light is tested by energizing each EL element. Only after forming the second electrode, the quality of the product (yield of pixels) could not be evaluated. Therefore, even if a defect factor such as deterioration of the light emitting material or color mixture has already occurred at any stage of forming the R, G, and B light emitting layers, the subsequent steps are performed. become. As a result, materials and time are wasted, resulting in poor production efficiency.

The present invention has been made in view of the above circumstances, and in the manufacturing process of an organic EL display device, the quality of the state of formation of the light emitting layer can be evaluated early without energization, and a defect is found. In that case, it is an object of the present invention to provide an EL element manufacturing method capable of improving the production efficiency without performing the subsequent unnecessary steps.

[0014]

In order to achieve the above object, a method for manufacturing an organic EL element of the present invention is a method of forming a first surface on a substrate.
In the method for producing an organic electroluminescent device, the method further comprises the steps of: forming an electrode of 1 .; forming a light emitting layer on the first electrode; and forming a second electrode on the light emitting layer. Irradiating the light emitting layer with excitation light,
It is characterized by including a fluorescence measurement step of measuring fluorescence from the light emitting layer.

According to this structure, the state of the light emitting layer can be detected by irradiating the light emitting layer with excitation light after forming the light emitting layer and measuring the fluorescence from the light emitting layer. It is possible to measure even before the electrode is formed, and it is possible to detect without applying an electric field, and it is possible to prevent deterioration of the light emitting layer. Further, since the quality of the formation state of the light emitting layer can be evaluated based on the measurement result, the quality of the formation state of the light emitting layer can be evaluated early without energization. Therefore, when a defect is found, it is possible to improve the production efficiency by not performing the unnecessary process thereafter.

Desirably, the method includes a step of evaluating the light emitting characteristics of the light emitting layer based on the measurement result in the fluorescence measuring step, and proceeds to the next step only when it is judged to be good in the evaluation step. Characterize.

According to this structure, the quality of the formation state of the light emitting layer can be evaluated based on the measurement result, and therefore the quality of the formation state of the light emitting layer can be evaluated early without energization. . Therefore, when a defect is found, it is possible to improve the production efficiency by not performing the unnecessary process thereafter.

In this fluorescence measurement step, after forming the light emitting layer,
It is preferably performed prior to forming the second electrode. Therefore, it is possible to evaluate the quality of the formation state of the light emitting layer based on the measurement result, and when a defect is found, it is possible to improve the production efficiency by not performing the unnecessary process thereafter.

Preferably, the substrate is a transparent substrate,
The fluorescence measurement step is a step of detecting fluorescence on the substrate side.

According to this structure, by detecting the fluorescence through the substrate, it is possible to detect the decrease in the light amount due to the contamination of the interface between the substrate and the electrode or the interface between the electrode and the light emitting layer. Further, since the measurement is performed through the substrate, it is possible to form a highly reliable EL element without contamination of the element.

Preferably, the substrate is a non-transparent substrate, and the fluorescence measuring step is a step of detecting fluorescence on the surface side facing the substrate.

According to this structure, it is possible to detect light without passing through the substrate side, and it is possible to perform highly accurate detection.

Further preferably, the fluorescence measuring step is a step of irradiating the light emitting layer with excitation light while forming the light emitting layer, and measuring fluorescence from the light emitting layer.

According to this structure, when a defect occurs, the work can be temporarily stopped, the maintenance can be reviewed, the mask can be cleaned, and the nozzle can be immediately cleaned. .

Further preferably, the step of forming the light emitting layer includes a step of sequentially forming a plurality of types of light emitting areas emitting light of different wavelengths, and the fluorescence measuring step is used when forming the light emitting area. The method further includes the step of measuring the fluorescence from the light emitting region layer for each color with the mask provided.

When the light emitting layer is composed of a plurality of color light emitting layers formed in different steps, the quality of the formed state is evaluated for each color light emitting layer by measuring the fluorescence for each color light emitting layer. It is desirable to do. According to this configuration,
Since the color separation is performed using the mask used for film formation as it is, it is possible to easily measure the light amount of each color of the light emitting layer without adding any special process.

Further, when the step of forming the organic material layer by the vapor deposition method is used in forming the light emitting layer, it is possible to detect defects during vapor deposition. Therefore, at that time, it is possible to take measures such as additional vapor deposition.

Further, when forming a light emitting layer, if a step of forming an organic material layer by a coating method is used, or if coating unevenness occurs, it is possible to take measures such as recoating in that area. Is.

[0029]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.

In the method of the present embodiment, as shown in the flow chart of FIG. 1, after the light emitting layer is formed (S2), the light emitting layer is irradiated with excitation light and fluorescence from the light emitting layer is measured (S2).
3), the quality of the light emitting layer is determined (S4).

That is, in this method, the substrate on which the first electrode is formed is put into the manufacturing apparatus (S1), and after the light emitting layer is formed on the substrate by the ink jet method or the vacuum deposition method, the light emitting layer is formed on the substrate. (S2), the light emitting layer is irradiated with excitation light, and the fluorescence from the light emitting layer is measured (S3).

Then, the quality of the formation state of the light emitting layer is evaluated based on the measurement result (S4).

As a result, if the state of formation of the light emitting layer is good, a second electrode is formed on each light emitting layer by using a vacuum vapor deposition method or the like (S5) and sealed with a transparent insulating layer as a protective film. Yes (S6).

If the state of formation of the light emitting layer is not good, the process of forming the second electrode (S5) is not proceeded to, and the cause of the occurrence of defects in the step of forming the light emitting layer (S2) is investigated.

In the light emitting layer forming step (S2), R,
When the light emitting layers of three colors G and B are formed, the fluorescence measurement (S3) is performed every time the formation process of the light emitting layers of each color is completed, and the quality of the formed state is evaluated for each light emitting layer of each color (S4). ). Then, only when the formation state is good, the process proceeds to the next step.

FIGS. 2A and 2B show an application example in which a low molecular weight organic material is used as an organic light emitting material and the light emitting layer forming step (S2) is performed by vacuum deposition. In this case, the film formation is performed in the vacuum vapor deposition device 10, and the fluorescence measurement step (S3) is performed at the same time as the film formation.

As shown in FIG. 2A, the vacuum vapor deposition apparatus 1
In the chamber 11 of 0, the glass substrate 20 and the vapor deposition source 30
And are set. In advance on the surface of the glass substrate 20,
A large number of first electrodes 21 made of a transparent conductive material and a shadow mask 22 covering the other regions are formed. The glass substrate 20 is arranged in the upper part of the chamber 11 with the surface on the side where the first electrode 21 and the shadow mask 22 are formed facing downward. The vapor deposition source 30 is arranged at the bottom of the chamber 11. The vapor deposition source 30 has a bottomed cylindrical heating vessel 31 having a built-in heater.
1 contains an organic luminescent material 32 of a specific luminescent color used in the vapor deposition process.

Further, in the chamber 11, the glass substrate 2
An ultraviolet lamp 41 for irradiating ultraviolet rays (excitation light) having a wavelength of about 350 nm and a fiber head 42 containing a microlens for condensing fluorescence from the upper surface of the glass substrate 20 are arranged on the lower surface of 0. The light collected by the fiber head 42 is sent through the optical fiber 43 to the spectroscopic device 44 installed outside the chamber 11. The ultraviolet lamp 41 and the fiber head 42 are arranged so as to face each other, and can be moved along the glass substrate 20 by a moving mechanism (not shown) while maintaining their mutual positional relationship. Further, during the vapor deposition process, it is possible to move to a position where it is not contaminated by the vapor deposition material and stand by.

The steps of forming the light emitting layer according to this embodiment are as follows.

When the glass substrate 20 and the heating tank 31 are set in the chamber 11 and the heating tank 31 of the vapor deposition source 30 is heated to a predetermined temperature while the inside of the chamber 11 is maintained at a predetermined vacuum degree, the inside of the heating tank 31 is changed. Of the organic light emitting material 32 is sublimated, and the sublimated organic light emitting material 32 adheres to the surface of the transparent electrode 21 through the opening of the shadow mask 22 of the glass substrate 20. Then, as shown in FIG. 2B, the light emitting layer 23 is formed by the organic light emitting material 32 deposited on the surface of the transparent electrode 21.

After that, with the glass substrate 20 set in the chamber 11, the ultraviolet lamp 41 and the fiber head 42 are moved from the standby position to the measurement start position, and the ultraviolet lamp 41 is caused to emit light so that the lower surface of the glass substrate 20 is exposed. Irradiate with ultraviolet rays. Then, the light emitting layer 23 is irradiated with ultraviolet rays.
Fluorescence emitted from the light is condensed by the fiber head 42 through the transparent electrode 21 and the glass substrate 20, and measured by the spectroscopic device 44 through the optical fiber 43. UV lamp 4
By moving 1 and the fiber head 42 along the glass substrate 20, the fluorescence from all the light emitting layers 23 formed in the above vapor deposition process is measured.

Then, based on the measurement results, each light emitting layer 23
The quality of the formation state is evaluated. This evaluation is performed by comparing the normal fluorescence characteristic measured in advance and the fluorescence characteristic measured by the spectroscopic device 44. As a result, it was determined that the light emitting layer 23 was successfully formed if the number or the ratio of all the light emitting layers 23 formed in the above vapor deposition process that exhibited abnormal fluorescent characteristics was equal to or less than a predetermined value. Judge and proceed to the next step.

When the next step is a step of forming the second electrode on the light emitting layer 23, the vapor deposition source 30 is replaced with a material containing an electrode material and a vacuum vapor deposition process is performed to form the second electrode. .

If the next step is a step of forming another light emitting layer, the shadow mask is moved by a predetermined number of pixels and the vapor deposition source 30 is changed to a material containing the organic light emitting material for the other light emitting layer. It replaces and a vacuum evaporation process is performed. Then, in the same manner as in the above case, the fluorescence measurement of all newly formed light emitting layers is performed. The quality of the formed state is evaluated based on the measurement result, and only when the formed state is good, the process further proceeds.

For example, when the R, G, and B light emitting layers are sequentially formed, the fluorescence of the R light emitting layer is measured immediately after the vacuum deposition process of the R light emitting layer, and the formation state is good or bad based on the measurement result. Only when the formation state is good, the process proceeds to the vacuum deposition process of the G light emitting layer. Immediately after the vacuum deposition process of the G light emitting layer, the fluorescence of the G light emitting layer is measured, and the quality of the formed state is evaluated based on the measurement result. Proceed to vacuum deposition process.

FIG. 3 shows the measurement result of the fluorescence of the G light emitting layer (pixel). If it is as designed, the fluorescence characteristic as shown by the curve a is observed, but if the thickness of the light emitting layer becomes thinner than the design value due to a decrease in the vapor deposition rate due to a decrease in the remaining amount of the vapor deposition material, A fluorescent characteristic with a low peak height as shown by the curve b is observed.

FIG. 4 shows the measurement results of the fluorescence of the R light emitting layer (pixel). If it is as designed, a fluorescence characteristic like a curve a is observed, but if the thickness of the light emitting layer becomes thinner than the design value, a weak fluorescence characteristic like b is observed. B
The same applies to the light emitting layer.

FIG. 5 shows the fluorescent characteristics when the R material is mixed in the G light emitting layer (pixel). From the comparison with the characteristic curve in FIG. 3A, it can be seen that the influence of the mixture of the R material appears in the long wavelength region (around 600 nm). Such mixing of different materials is often caused by the displacement of the shadow mask during vacuum deposition. When the shift of the shadow mask occurs in this way, the shift may be corrected.

As described above, by performing the fluorescence measurement immediately after the vacuum deposition process of the light emitting layers of the respective colors, it is possible to evaluate the quality of the formation state of the light emitting layers of the respective colors based on the measurement results, so that there is a defect. When it is discovered, the production efficiency of the organic EL display device can be improved by avoiding the useless subsequent vacuum deposition processing step and electrode forming step.

Further, it is also possible to detect moisture and oxygen adhering to the surface of the light emitting layer by utilizing the ultraviolet irradiation during the fluorescence measurement. Furthermore, depending on the intensity of the ultraviolet rays applied, it is possible to remove water and oxygen attached to the surface of the light emitting layer.

Although the vapor deposition source 30 is fixed at a fixed position in the above embodiment, it may be configured to move.

In the above embodiment, the ultraviolet lamp 41 moves together with the fiber head 42, but the ultraviolet lamp 41 may be fixed at a fixed position.

Further, in the above embodiment, the fluorescence measurement of all the light emitting layers is performed, but only one or a plurality of light emitting layers formed in a specific region on the glass substrate 20 is measured. Good.

In the above embodiment, the light emitting layer is irradiated with ultraviolet rays from the ultraviolet lamp 41, and the fluorescence emitted from the light emitting layer is collected by the fiber head 42 through the first electrode 21 and the glass substrate 20 made of a transparent material. Although it is configured to emit light, the fiber head 42 may be disposed on the same side as the ultraviolet lamp 41 to collect the fluorescence from the light emitting layer. In the case of the organic EL display device having the structure shown in FIG. 7, since the fluorescence is blocked by the TFTs 63R, 63G, 63B, etc., it is necessary to observe the fluorescence from the light emitting layer from the same side as the ultraviolet lamp 41.

In the above embodiment, the case where the low molecular weight organic material is used as the organic light emitting material has been described.
The present invention can be effectively applied when a polymer organic material is used as an organic light emitting material. In this case, as described in FIG. 8, the light emitting material solution is sprayed on the surface of the first electrode by the inkjet method to form the light emitting layer, and immediately after that, the fluorescence measurement is performed, and the quality of the formed state is determined based on the measurement result. Is evaluated, and only when the formation state is good, the process proceeds to the next step.

Further, in the above embodiment, the fluorescence measurement of the light emitting layer is performed before the second electrode is formed.
Fluorescence measurement of the light emitting layer may be performed after forming the electrodes.

Furthermore, in the above-described embodiment, the fluorescence measurement is performed from the surface side facing the substrate. However, the TFT is formed in the region excluding the pixel region on the substrate, or the driving circuit is externally attached. In the case of the step of forming the structure shown in FIGS. 9A to 9C, the substrate 62
The fluorescence may be measured from the side. According to such a configuration, by detecting the fluorescence through the substrate, it is possible to detect the decrease in the light amount due to the contamination of the interface between the substrate and the electrode or between the electrode and the light emitting layer. In addition, since the measurement is performed through the substrate, there is no contamination of the element and highly reliable EL.
It becomes possible to form an element.

Furthermore, by measuring the emission spectrum, it is possible to detect the deviation of the material composition or the deviation of the dopant molecule, which causes the decrease in brightness.

In addition, although the organic EL element has been described in the above embodiment, the present invention is also applicable to an inorganic EL element using ZnS or the like.

Further, the ultraviolet ray irradiating section for excitation and the measuring section may be arranged on the opposite side of the substrate or on the opposite surface side.

[0061]

As described above, according to the manufacturing method of the present invention, the light emitting layer is irradiated with excitation light and the fluorescence from the light emitting layer is measured. Therefore, the light emitting layer is formed without energization. The quality of the state can be evaluated. Since it is possible to evaluate the quality of the formation state of the light emitting layer before the formation of the second electrode, when a defect is discovered, it is not necessary to carry out the subsequent unnecessary steps including the step of forming the second electrode. And then
The production efficiency of the organic EL display device can be improved.

[Brief description of drawings]

FIG. 1 is a diagram showing a flow of manufacturing steps of an organic EL display device according to the present invention.

2A and 2B are conceptual diagrams showing an example of an embodiment of a light emitting layer forming step and a fluorescence measuring step when a low molecular weight organic material is used as an organic light emitting material.

FIG. 3 is a diagram showing a fluorescence measurement result of a G (green) light emitting layer.

FIG. 4 is a diagram showing a fluorescence measurement result of an R (red) light emitting layer.

FIG. 5 is a diagram showing fluorescence characteristics when an R (red) material is mixed in a G (green) light emitting layer.

FIG. 6 is a plan view of an organic EL display device capable of full-color display.

FIG. 7 is a cross-sectional view of an organic EL display device capable of full-color display.

FIG. 8 is a cross-sectional view illustrating a step of forming a light emitting layer when a polymer organic material is used as a light emitting material.

FIG. 9 is a process diagram illustrating a process of forming a light emitting layer when a low molecular weight organic material is used as a light emitting material.

FIG. 10 is a diagram showing a flow of manufacturing steps of a conventional organic EL display device.

[Explanation of symbols]

10: Vacuum deposition apparatus (manufacturing apparatus) 11: Chamber 20: Glass substrate 21: First electrode 22: Shadow mask 23: Light emitting layer 30: evaporation source 32: Organic light emitting material 41: UV lamp (light source of excitation light) 42: Fiber head 44: Spectroscopic device (fluorescence measuring device)

Claims (10)

[Claims] 1. A step of forming a first electrode on a surface of a substrate, a step of forming a light emitting layer as an upper layer of the first electrode, and a step of forming a second electrode on the light emitting layer. In the method for producing an organic electroluminescence element, the method for producing an electroluminescence element is characterized by including a fluorescence measurement step of irradiating the light emitting layer with excitation light and measuring fluorescence from the light emitting layer. 2. The method includes the step of evaluating the light emission characteristics of the light emitting layer based on the measurement result in the fluorescence measurement step, and the step is advanced to the next step only when the evaluation step determines that the light emission property is good. 3. The method for manufacturing an electroluminescent element according to claim 1. 3. The electroluminescence according to claim 1, wherein the step of measuring fluorescence is performed after forming the light emitting layer and before forming the second electrode. Device manufacturing method. 4. The manufacturing of the electroluminescent device according to claim 1, wherein the substrate is a transparent substrate, and the fluorescence measuring step is a step of detecting fluorescence on the substrate side. Method. 5. The substrate according to claim 1, wherein the substrate is a non-transparent substrate, and the fluorescence measuring step is a step of detecting fluorescence on a surface side opposite to the substrate. Manufacturing method of electroluminescent element. 6. The fluorescence measuring step is a step of irradiating the light emitting layer with excitation light while forming the light emitting layer and measuring fluorescence from the light emitting layer.
6. The method for manufacturing an electroluminescent element according to any one of 5 to 5. 7. The step of forming the light emitting layer includes a step of sequentially forming a plurality of types of light emitting regions that emit light of different wavelengths, and the fluorescence measuring step includes a mask used when forming the light emitting region. 2. A step of measuring fluorescence from the light-emitting region layer for each color while arranging the
7. A method for manufacturing an electroluminescent element according to any one of 6 to 6. 8. The method for manufacturing an electroluminescent element according to claim 1, wherein the method is based on the measurement result of the fluorescence. 9. The method of manufacturing an electroluminescent element according to claim 1, wherein the step of forming the light emitting layer is a step of forming an organic material layer by a vapor deposition method. 10. The method of manufacturing an electroluminescent element according to claim 1, wherein the step of forming the light emitting layer is a step of forming an organic material layer by a coating method.