JP2003121635A - Color filter substrate, method of manufacturing the same, liquid crystal device and electronic equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To manufacture a semitransmission reflection type color filter substrate in a short time and at low costs by reducing stages in which complicated operation and a large scale device are needed, in a method for manufacturing a color filter substrate provided with a semitransmission reflection layer having an aperture part for transmitting light and a colored layer on a substrate. SOLUTION: Banks 13 for partitioning pixels are formed on a substrate 11, the part where the aperture part 21a is to be formed is subjected to liquid repellent treatment and then a liquid material for forming the semitransmission reflection layer 21 is ejected into the pixel by an ink jet method to form the semitransmission reflection later 21. A colored layer forming material in liquid form is introduced into the pixel to form the colored layer 15.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a color filter substrate and a method for manufacturing the same, and a liquid crystal device and an electronic device, and more particularly to a method for manufacturing a color filter substrate having a semi-transmissive reflective layer.

[0002]

2. Description of the Related Art Conventionally, a reflection type liquid crystal device has been widely used for a portable device or a display portion of the device because of its low power consumption. However, the display is visible by utilizing external light. Therefore, there was a problem that the display could not be read in a dark place. For this reason, there has been proposed a liquid crystal device of a type in which a display can be visually recognized by using external light in a bright place as in a normal reflective liquid crystal device, and a display can be visually recognized by an internal light source in a dark place.

For example, as described in Japanese Patent Application Laid-Open No. 57-049271, a polarizing plate, a semi-transmissive reflector, and a backlight are sequentially arranged on the outer surface of the liquid crystal cell opposite to the viewer side. A transflective liquid crystal device having such a configuration is known. The liquid crystal device having such a configuration takes in external light when the surroundings are bright and uses the reflected light reflected by the semi-transmissive reflection plate to perform a reflective display, and when the surroundings are dark, the backlight is used. Is turned on to perform a transmissive display in which the display can be visually recognized by the light transmitted through the semi-transmissive reflection plate. Further, in recent years, there is a high demand for liquid crystal devices capable of color display, and a transflective color liquid crystal device including a color filter substrate having a semi-transmissive reflective film and a color filter made of a colored layer on the substrate is also known. There is. As the semi-transmissive reflective layer, one having a configuration in which an opening for light transmission is provided in a reflective layer made of a metal material such as Al, Cr and Ag is preferably used.

[0004]

However, in the conventional transflective color filter substrate, the frost for forming fine irregularities on the substrate surface in advance is required to form the transflective layer. After processing, after forming a reflective film made of a metal material by a sputtering method or a vacuum deposition method,
Since a method of removing a part of the reflection film by etching to form the opening is adopted, there are problems that the number of steps is large, a large-scale device is required, and the manufacturing cost is high.

The present invention has been made in view of the above circumstances, and eliminates steps such as a frosting step of a substrate, a film forming step by a sputtering method or a vacuum evaporation method, an etching step, and the like, which require a complicated and large-scale apparatus. Thus, it is possible to manufacture a semi-transmissive reflection type color filter substrate in a short time and at low cost.

[0006]

In order to solve the above-mentioned problems, a method of manufacturing a color filter substrate of the present invention comprises a semi-transmissive reflective layer having an opening for transmitting light and a plurality of color elements on the substrate. A method of manufacturing a color filter substrate having a color layer comprising a colored layer comprising: a step of forming a bank for partitioning each colored layer on the substrate; A liquid-repellent treatment step of performing a liquid-repellent treatment on a region where the opening is formed, and after the liquid-repellent treatment step, a liquid material is ejected by an inkjet method into a region partitioned by the bank. A semi-transmissive reflective layer forming step of forming the semi-transmissive reflective layer, and a colored layer forming step of forming a colored layer in the region partitioned by the bank after the semi-transmissive reflective layer forming step. Features and That.

According to this method, after the bank is formed on the substrate, the liquid material for forming the semi-transmissive reflective layer is ejected by the ink jet method into the region partitioned by the bank, so that the bank is placed on the substrate. It plays the role of a bank that controls the spread of the discharged liquid material, and the semi-transmissive reflective layer can be formed only in the region surrounded by the bank, and the shape accuracy is also good. Further, conventionally, a semi-transmissive reflective layer, which requires a complicated work and a large-scale apparatus such as a film forming step by a sputtering method or a vacuum vapor deposition method, an etching step, etc., is formed by an ink jet method, which improves productivity and Cost reduction can be achieved. Further, prior to the step of ejecting the liquid material for forming the semi-transmissive reflective layer in the area surrounded by the banks, a part of the substrate in the area surrounded by the banks is subjected to the liquid repellent treatment, so that it is ejected. The liquid material forms a coating film in a region other than the liquid-repellent treated portion. Therefore, since the coating film is not formed on the liquid-repellent treated area, the opening of the semi-transmissive reflective layer can be easily formed in this portion. Further, since the colored layer is formed in the bank after the semi-transmissive reflective layer is formed in the bank, the bank plays a role of a bank which prevents adjacent colored layers from being mixed with each other. As a result, a color filter substrate is obtained in which the colored layer is laminated on the semi-transmissive reflective layer in the region surrounded by the bank, and the colored layer is laminated on the substrate at the opening of the semi-transmissive reflective layer.

In the method of the present invention, there may be a lyophilic treatment step of subjecting the lyophobic treated portion to a lyophilic treatment after the semi-transmissive reflective layer forming step and before the colored layer forming step. preferable. According to such a method, when the colored layer is formed in the region surrounded by the banks, the affinity between the substrate surface and the colored layer forming material in the region that becomes the opening is improved, and thus the adhesion to the substrate is improved. A good colored layer can be obtained.

In the present invention, the colored layer forming step comprises
Introducing a colored layer forming material composed of an ultraviolet curable resin composition into the region partitioned by the bank, and irradiating the region with ultraviolet rays to cure the colored layer forming material and the region at the same time. It may be configured to include a step of performing a lyophilic treatment on the portion of the liquid-repellent treated inside. With such a configuration, the lyophilic treatment can be performed in the step of curing the colored layer, so that the lyophilic treatment can be performed without increasing the number of steps.

In the present invention, the colored layer forming step is
It is preferable to carry out a method of ejecting a liquid colored layer forming material into an area partitioned by the bank by an inkjet method. If such a method is used, not only the semi-transmissive reflective layer forming step but also the subsequent coloring layer forming step is performed by an inkjet method, so that a large-scale device and complicated work are not required, and further improvement in productivity and low Cost can be reduced.

In the present invention, the liquid material forming the semi-transmissive reflective layer may contain a light scattering material. According to such a configuration, the semi-transmissive reflective layer containing the light scattering material can be formed, and the effect of scattering the reflected light on the semi-transmissive reflective layer without frosting the substrate is obtained. Therefore, a color filter substrate having good reflection type display characteristics can be obtained by a simple manufacturing process.

The color filter substrate of the present invention is a color filter substrate in which color filters each having a colored layer formed of a plurality of color elements formed in a matrix are formed on the substrate, and the color filter substrate is provided on the substrate. Further, a bank for partitioning each colored layer, a semi-transmissive reflective layer having an opening formed in a region surrounded by the bank, and a colored layer formed so as to cover the semi-transmissive reflective layer. It is characterized by having. In the color filter substrate having such a configuration, since the semi-transmissive reflective layer is provided only in the area surrounded by the bank for partitioning each colored layer, light in the area where the colored layer is not formed is provided. There is no reflection, and the contrast of the reflected light is good.

Alternatively, the color filter substrate of the present invention is a color filter substrate in which a color filter formed by forming colored layers composed of a plurality of color elements in a matrix is formed on the substrate. Provided,
A bank for partitioning each colored layer, a semi-transmissive reflective layer having an opening formed in a region surrounded by the bank, and a colored layer formed so as to cover the semi-transmissive reflective layer. A light scattering material is contained in the semi-transmissive reflective layer. In the color filter substrate having such a configuration, since the semi-transmissive reflective layer is provided only in the area surrounded by the bank for partitioning each colored layer, light in the area where the colored layer is not formed is provided. Since there is no reflection and the contrast of the reflected light is good and the scattering property of the semi-transmissive reflection layer is excellent, reflection on the reflection surface is prevented, and good display can be obtained.

In the liquid crystal device of the present invention, the liquid crystal is sandwiched between the counter substrate and the color filter substrate in which the color filter formed by forming colored layers consisting of a plurality of color elements in a matrix is formed on the substrate. A liquid crystal device comprising: a bank for partitioning each colored layer provided on the substrate; a semi-transmissive reflective layer having an opening formed in a region surrounded by the bank; It is characterized in that the colored layer is formed so as to cover the semi-transmissive reflective layer. According to the liquid crystal device having such a configuration, in the color filter substrate, since the semi-transmissive reflective layer is provided only in the region surrounded by the bank for partitioning each colored layer, the region where the colored layer is not formed There is no reflection of the light in and the contrast of the reflected light becomes good. Therefore, a liquid crystal device having excellent display characteristics can be obtained.

Alternatively, in the liquid crystal device of the present invention, a liquid crystal is provided between a counter substrate and a color filter substrate in which a color filter formed by forming colored layers composed of a plurality of color elements in a matrix is formed on the substrate. A liquid crystal device in which a semi-transmissive reflective layer provided on the substrate for partitioning each colored layer and an opening formed in a region surrounded by the bank. And the colored layer formed so as to cover the semi-transmissive reflective layer, and the light-scattering material is contained in the semi-transmissive reflective layer. According to the liquid crystal device having such a configuration, in the color filter substrate, since the semi-transmissive reflective layer is provided only in the region surrounded by the bank for partitioning each colored layer, the region where the colored layer is not formed Since there is no reflection of light at, the contrast of the reflected light is good, and the scattering properties of the semi-transmissive reflective layer are excellent,
The reflection on the reflective surface is prevented. Therefore, a liquid crystal device having excellent display characteristics can be obtained.

The liquid crystal device of the present invention may be configured such that the counter substrate is provided with pixel electrodes corresponding to the colored layers and active elements connected to the pixel electrodes. Further, in the liquid crystal device of the present invention, a transparent electrode may be formed on the colored layer.
An electronic device of the present invention is characterized by including the liquid crystal display device of the present invention.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION (First Embodiment) A first embodiment according to the present invention will be described below with reference to FIGS. 1 to 5. 1A and 1B show a color filter substrate of the present embodiment. FIG. 1A is a plan view and FIG. 1B is a schematic cross-sectional view of one pixel. This color filter substrate 10 is a substrate 1
1, a color filter including colored layers 15 arranged in a matrix and partitions 14 formed at boundaries between the colored layers is provided. Colored layer 15 is R (red), G
It consists of either the color element of (green) or B (blue),
The partition 14 is a black matrix 12 composed of a light shielding layer.
And a bank 13 formed thereon.
The region surrounded by the partition 14 constitutes an individual pixel, and the semi-transmissive reflective layer 21 is formed on the substrate 11 in each pixel. Also, although not shown,
If necessary, a protective film or the like is provided on the upper surfaces of the partition 14 and the colored layer 15 to collectively cover them. In the example of FIG. 1, the R, G, and B arrays in the color filter are stripe arrays, but other arrays may be used. For example, the mosaic arrangement shown in FIG. 2A may be used, or the delta arrangement shown in FIG. 2B may be used.

The semi-transmissive reflective layer 21 is provided with an opening 21a for transmitting light. The planar shape of the opening 21a is not particularly limited. For example, as shown in FIG. 3A, a long strip-shaped opening 21a may be provided at the center of one pixel.
As shown in FIG. 3B, two short strip-shaped openings 21 are formed.
a may be provided in a diagonal part of one pixel, and FIG.
, A circular opening 21a is formed in the center of one pixel.
May be provided. The size of the opening 21a changes the reflectance and the transmittance of the semi-transmissive reflective layer 21 depending on the size of the opening 21a. The area of the opening 21a is preferably about 10 to 25%.

FIG. 4 is a schematic perspective view showing an example of an ink jet device suitably used for manufacturing the color filter substrate 10 of this embodiment. Device 100 of this example
Includes an inkjet head group 1, an X-direction drive shaft 4, a Y-direction guide shaft 5, a control device 6, a mounting table 7, a cleaning mechanism section 8, and a base 9. The mounting table 7 is configured to be movable on the Y-direction guide shaft 5, and has a mechanism for fixing the substrate 11 to which the liquid material is applied at a reference position. The inkjet head group 1 is provided with a plurality of inkjet heads each having a nozzle (ejection port) for ejecting a liquid material toward the substrate 11 on the mounting table 7.

The X-direction drive motor 2 is attached to the X-direction drive shaft 4.
Are connected. The X-direction drive motor 2 is a stepping motor or the like, and rotates the X-direction drive shaft 4 when a drive signal in the X-axis direction is supplied from the control device 6. When the X-direction drive shaft 4 rotates, the inkjet head group 1 moves in the X-axis direction. The Y-direction guide shaft 5 is fixed so as not to move with respect to the base 9, and the mounting table 7 on the Y-direction guide shaft 5 is connected to the Y-direction drive motor 3. The Y-direction drive motor 3 is a stepping motor or the like, and when a drive signal in the Y-axis direction is supplied from the control device 6, the mounting table 7 is provided.
Is moved in the Y-axis direction. The control circuit 6 supplies a voltage for controlling ejection of ink droplets to each inkjet head provided in the inkjet head group 1. Further, a drive pulse signal (drive signal in the X-axis direction) for controlling the movement of the inkjet head group 1 in the X-axis direction is supplied to the X-direction drive motor 2, and also to the Y-direction drive motor 3. A drive pulse signal (a drive signal in the Y-axis direction) for controlling the movement of the mounting table 7 in the Y-axis direction is supplied.

The cleaning mechanism section 8 has a mechanism for cleaning the ink jet head group 1. The cleaning mechanism portion 8 is connected to a drive motor (not shown), and is configured to be movable along the Y-direction guide shaft 5 by driving the drive motor. The movement of the cleaning mechanism unit 8 is also controlled by the control device 6.

FIGS. 5A to 5F are schematic sectional views showing a method of manufacturing the color filter substrate 10 of this embodiment in the order of steps. In these figures, one pixel is shown. First, as shown in FIG. 5A, the black matrix 12 is formed on the substrate 11. As the substrate 11, a glass substrate is generally used, but a material other than glass can be used as long as it has characteristics such as transparency and mechanical strength required for use as a color filter substrate.

The black matrix 12 is made of metallic chrome,
It is formed of a laminate of metallic chromium and chromium oxide, or resin black or the like. To form the black matrix 12 made of a metal thin film, a sputtering method or a vapor deposition method can be used. Also, a black matrix 1 made of a resin thin film
For forming 2, the gravure printing method, the photoresist method, the thermal transfer method and the like can be used. The thickness of the black matrix 12 made of a metal thin film is 0.1 to 0.2 μm.
It is a degree.

Subsequently, the bank 13 is formed on the black matrix 12. That is, as shown in FIG. 5B, a resist layer 17 made of a negative type transparent photosensitive resin composition is formed so as to cover the substrate base material 11 and the black matrix 12, and a matrix pattern is formed on the upper surface thereof. The exposure process is performed in a state where the mask film 18 formed in a shape is in close contact with the mask film 18. Then, as shown in FIG.
The resist layer 17 is patterned by etching the unexposed portion of the resist layer 17, and the bank 13
To form. The height of the bank 13 is about 2.5 to 2.8 μm. The bank 13 and the black matrix 12 below the bank 13 spread the liquid material when the liquid material is introduced into the pixel in the subsequent process. It becomes the partition 14 which plays the role of a bank to regulate.

If a resin material having a liquid-repellent coating film surface is used as a material for forming the bank 13, the liquid material is ejected into pixels surrounded by the bank 13 by an ink jet method in a subsequent step. This is preferable because the accuracy of the landing position of the liquid droplet is improved. When the bank 13 is made of a liquid repellent material, the bank 1 is formed after the colored layer 15 is formed.
3 It is preferable to make the surface of the bank 13 lyophilic before forming a protective film or the like on the upper surface. For example, the surface of the bank 13 is formed by forming the liquid-repellent bank 13 using a fluorine-based resin material, introducing a liquid material that forms the colored layer 15 into the pixel, and then irradiating the bank 13 with ultraviolet rays. Can be made lyophilic.

Next, as shown in FIG. 5D, the partition 1
A liquid-repellent portion 19 is formed by performing a liquid-repellent treatment on a region surrounded by 4, that is, within a pixel, where the opening 21 is formed. The liquid repellent treatment can be performed by using the following method by plasma polymerization, for example. In the liquid repellent treatment by the plasma polymerization, first, a raw material liquid for the liquid repellent treatment is prepared. As the raw material liquid for liquid repellent treatment, C ₄ F ₁₀ or C ₈
A liquid organic substance composed of linear PFC such as F ₁₆ is preferably used. Then, the vapor of the raw material liquid for liquid repellent treatment is turned into plasma in the plasma processing apparatus. When the vapor of the linear PFC is plasmatized in this way, the bond of the linear PFC is partially broken and activated. Activated PFC
When reaches the surface of the substrate 11, PFCs are polymerized with each other on the substrate 11 to form a fluororesin polymer film having liquid repellency. Here, since it is difficult to maintain discharge with a PFC having a large molecular weight, it is possible to easily maintain discharge by adding a rare gas such as Ar. When the raw material liquid for the liquid repellent treatment is fluorocarbon, it is also possible to add PFC having a smaller molecular weight than the raw material liquid, such as CF ₄ . When activated CF ₄ is added, active fluorine is incorporated into the polymer film even if part of the fluorine of the fluorocarbon, which is the raw material liquid, is released when the raw material is converted into plasma, so that the liquid repellency of the polymer film is improved. Can be improved. Suitably, a fluoropolymer film is formed by combining a plurality of these. For example, the flow rate of the discharge gas is 20 ccm for C ₈ F _{18 and} 120 to 130 c for CF ₄ .
It is preferable that cm and Ar be 150 ccm.

In the present embodiment, the liquid repellent portion 19 is formed only in the portion of the pixel where the opening 21 is formed. For that purpose, it is preferable to perform the above-mentioned liquid repellent treatment using a mask having a transmissive portion corresponding to a portion where the opening 21 is formed. Alternatively, since the fluororesin polymer film obtained by the liquid repellent treatment becomes lyophilic by being decomposed and removed by irradiation with ultraviolet rays, the liquid repellent treatment is applied to the entire surface of the substrate 11 in the pixel. After that, the liquid repellent portion 19 can be formed only in the portion in which the opening 21 is formed by performing ultraviolet irradiation through a mask having a shielding portion corresponding to the portion in which the opening 21 is formed.

Next, as shown in FIG. 5 (e), the partition 1
The semi-transmissive reflective layer 21 is formed in the area surrounded by 4, that is, in the pixel by using the inkjet method. The transflective layer 21 is made of silver, aluminum, an aluminum alloy, a silver alloy, APC (silver-palladium-copper alloy), or the like. Specifically, as the liquid material for forming the semi-transmissive reflective layer 21, a dispersion liquid in which ultrafine particles of metal forming the semi-transmissive reflective layer 21 are dispersed in a solvent is used.
The ink is ejected into the pixels by using the inkjet device having the configuration shown in FIG. As the inkjet head, it is preferable to use a precision head to which the piezoelectric effect is applied. The liquid material ejected into the pixel spreads in the area other than the liquid repellent portion 19, and a coating film having an opening is formed on the liquid repellent portion 19. The coating film is dried and then fired to form the opening 2
A transflective layer 21 having 1a is formed.

Next, as shown in FIG. 5F, the colored layer 15 is formed in the region surrounded by the partition 14, that is, in the pixel in which the semi-transmissive reflective layer 21 is formed. In particular,
A colored layer forming material (ink) that is a liquid is ejected into the pixels by using the inkjet device having the configuration shown in FIG. 4, and this is dried and / or cured to form the colored layer 15. R,
The colored layers 15 of three colors G and B may be sequentially formed for each color element, and the inks of three colors may be simultaneously ejected so as to form a predetermined color arrangement pattern according to a preset program. The thickness of the colored layer 15 on the semi-transmissive reflective layer 21 is about 0.8 to 1.2 μm.

The coloring layer forming material (ink) has a viscosity of 2 to
At 20 mPa · s, the contact angle to the nozzle plate surrounding the nozzle hole is greater than 50 ° and the surface tension is 20.
It is preferably about 40 mN / m. If the viscosity of the ink is too high, the next ink may not be supplied in time after the ink is ejected, which may cause ejection failure.If the viscosity is too low, the fluidity may be too good and the ink may be over-supplied. is there. If the contact angle of the ink to the nozzle plate is too low, the nozzle plate will get wet with the ink,
When the ink droplet is ejected, the ink droplet may be attracted to the ink adhering to the nozzle plate, and may not be ejected to an accurate position. Further, if the surface tension of the ink is too large or too small, stable meniscus control due to vibration of the piezoelectric element cannot be performed. As the colored layer forming material (ink), for example, an acrylic resin color paste, an aqueous melamine color paste, an acrylate composition, etc. can be used.

According to this embodiment, since the semi-transmissive reflective layer is formed in the pixel partitioned by the bank 13, a color filter substrate having no reflective film between the pixels can be obtained. Also,
Since the liquid repellent treatment is performed on the portion where the opening 21a is formed, the coating film having the opening is formed only by discharging the liquid material that forms the semi-transmissive reflective layer in the pixel. Therefore, by curing this coating film, the semi-transmissive reflective layer 21 having the opening 21a can be easily formed. Further, since the colored layer is formed in the pixel partitioned by the bank 13, it is possible to easily form the colored layer in which the adjacent colored layers are not mixed with each other. In addition, the semi-transmissive reflective layer 21
Since the formation of the colored layer and the formation of the colored layer 15 are both performed by the inkjet method, a large-scale apparatus and complicated work are not required, and the cost can be reduced. Since the liquid material for forming the colored layer 15 is ejected in a relatively large amount so that the upper surface of the semi-transmissive reflective layer 21 in the pixel is completely filled, a coating film is also formed on the liquid repellent portion 19. It is formed.

(Second Embodiment) FIG. 6 shows a second embodiment of the color filter substrate of the present invention and is a schematic sectional view of one pixel. The color filter substrate 20 of the present embodiment is different from that of the first embodiment in that the semi-transmissive reflective layer 21 contains a light scattering material 22. 6, the same components as those in FIG. 1 are designated by the same reference numerals to simplify the description.

The color filter substrate 20 of this embodiment is
Pixels arranged in a matrix are provided on the substrate 11, and a boundary between the pixels is divided by a partition 14 including a black matrix 12 formed of a light shielding layer and a bank 13 formed on the black matrix 12. There is. A semi-transmissive reflective layer 21 having an opening 21a is formed in each pixel, and a colored layer 15 made of any one of R (red), G (green), and B (blue) ink is formed thereon. Are formed.
The arrangement of R, G, B may be a so-called mosaic arrangement,
Other arrangements such as stripe arrangement and delta arrangement may be used. Although not shown, a protective film or the like that collectively covers the partition 14 and the colored layer 15 is provided on the upper surfaces of the partition 14 and the colored layer 15 if necessary.

The light-scattering material 22 contained in the semi-transmissive reflective layer 21 imparts irregularities to the surface shape of the semi-transmissive reflective layer 21 to improve the light-scattering characteristics. In particular,
The beads 22 made of spherical alumina, silica, titania or the like are preferably used.

The color filter substrate 20 of this embodiment is
In the method of manufacturing the color filter substrate 10 of the first embodiment, the light dispersion material 22 is previously dispersed in the liquid material forming the semi-transmissive reflective layer 21, and the dispersion liquid is discharged from the inkjet head. Can be manufactured in a similar manner. The particle size of the beads 22 is too large for the nozzle diameter of the inkjet head, or the beads 22
If the content of the beads is too large, abnormal ejection may occur. Therefore, the beads 22 having a particle diameter of about 0.1 to 1.0 μm should be used, and the inner diameter of the nozzle hole should be about 25 to 100 μm as an inkjet head. It is preferable to use the above-mentioned one. Further, if the content of the beads 22 in the liquid material forming the semi-transmissive reflective layer 21 is too small, a sufficient scattering effect cannot be obtained, so the content is preferably about 5 to 20% by volume.

According to this embodiment, in addition to the same effects as the first embodiment, the light-scattering material 22 is contained in the semi-transmissive reflective layer 21, so that the light in the semi-transmissive reflective layer 21 is lighted. The scattering characteristics are improved. Therefore, it is possible to prevent the specular reflection image from being reflected on the semi-transmissive reflective layer without performing the conventional frosting process on the substrate, and the reflective display characteristics are improved when used in a liquid crystal device. A color filter substrate is obtained.

(Third Embodiment) This embodiment is based on the first embodiment.
The difference from the second embodiment is that the semi-transmissive reflective layer 21
Between the step of forming and the step of forming the colored layer 15,
This is the point of performing lyophilic treatment. That is, in the present embodiment, as in the first embodiment or the second embodiment,
After forming the black matrix 12, the bank 13 and the liquid repellent portion 19 on the substrate 11 and forming the semi-transmissive reflective layer 21, the liquid repellent portion 19 is rendered lyophilic by performing a lyophilic treatment. This lyophilic treatment is at least the part that has been subjected to the liquid repellent treatment in the previous step
That is, it is performed on the liquid repellent portion 19, but the upper surface of the semi-transmissive reflective layer 21 may be rendered lyophilic by this treatment. However, it is not preferable to make the upper surface of the bank 13 lyophilic before forming the colored layer 15.

For example, when the liquid-repellent portion 19 is made of a fluororesin polymer film, the polymer film is decomposed by irradiating it with ultraviolet rays, so that it can be made lyophilic. Further, the ultraviolet rays not only decompose the fluororesin polymer film, but also decompose organic compounds adhering to the irradiation surface, so that the cleaning action also improves the lyophilicity. Therefore, at the same time as the liquid repellent portion 19, the semi-transmissive reflective layer 21 is formed.
It is preferable to irradiate the upper surface of the substrate with ultraviolet rays. When the bank 13 is made of a fluorine compound, it is preferable to prevent the bank 13 from being irradiated with ultraviolet rays by using a mask or the like.

The lyophilic treatment can be carried out not only by ultraviolet irradiation, but also by activated oxygen gas or ozone gas. Alternatively, a method of treating with an alkaline solvent is also possible. In either method, at least the lyophobic portion 19 is made lyophilic, preferably the upper surfaces of the lyophobic portion 19 and the semi-transmissive reflective layer 21 are made lyophobic, and the upper surface of the bank 13 is not made lyophilic. To
It is preferable to perform the treatment using a mask or the like as appropriate. Then, after performing the lyophilic treatment, in the region surrounded by the partition 14, that is, in the pixel, the first embodiment or the second embodiment is performed.
The color filter substrate 10 (20) is obtained by forming the colored layer 15 in the same manner as in the above embodiment.

According to the present embodiment, particularly when the liquid colored layer forming material is ejected into the pixel, the liquid repellent portion 1 in the pixel is
Since 9 is lyophilic, a coating film is rapidly formed on the semi-transmissive reflective layer 21 and in the opening 21a, and the colored layer 15 having good adhesion to the lower layer is obtained.

(Fourth Embodiment) In the manufacturing methods of the first and second embodiments, a colored layer is formed without newly providing a lyophilic treatment step as in the third embodiment. When an ink made of an ultraviolet curable resin composition is used as the material (ink), it is possible to irradiate ultraviolet rays to cure the colored layer and at the same time make the liquid repellent portion 19 lyophilic. That is, in the present embodiment, similarly to the first or second embodiment, the black matrix 12 and the bank 13 are formed on the substrate 11, the liquid repellent portion 19 is formed, and then the semi-transmissive reflective layer is formed. 21 is formed. Next, a coloring layer forming material made of an ultraviolet curable resin composition is ejected into the pixel in which the semi-transmissive reflective layer 21 is formed by an inkjet method, and then ultraviolet rays are irradiated. By this ultraviolet irradiation, the liquid repellent portion 19 becomes lyophilic, and at the same time, the colored layer forming material discharged into the pixels is cured to form the colored layer 15. It is more effective to irradiate the ultraviolet rays from both sides of the substrate 11.

In this embodiment, an acrylate composition or the like can be used as the ultraviolet curable resin composition for forming the colored layer 15. In addition, in the present embodiment, since the ultraviolet ray irradiation is performed after the material for forming the colored layer 15 is discharged, the bank 1 is cured at the same time when the colored layer 15 is cured.
It is preferable that the upper surface of 3 is also irradiated with ultraviolet rays to be made lyophilic. By doing so, when forming a protective film or the like for covering the colored layer 15 and the bank 13, the protective film and the bank 15 are formed.
Good affinity with the top surface.

According to this embodiment, in particular, the liquid repellent portion 19 is in progress while the curing of the colored layer forming material discharged onto the liquid repellent portion 19 is in progress.
Is made lyophilic, whereby the colored layer 15 having good adhesion to the lower layer is obtained.

FIG. 7 shows a first example in which a liquid crystal device is constructed using the color filter substrate 10 of the first embodiment, and shows a schematic structure of a passive matrix type liquid crystal device (liquid crystal device). FIG. A semi-transmissive reflection type liquid crystal device as a final product can be obtained by mounting auxiliary elements such as a liquid crystal driving IC and a support on the liquid crystal device 200 of this example.

The liquid crystal device 200 includes the color filter substrate 10 described in the first embodiment, and the color filter substrate 10 is arranged below the liquid crystal composition layer 203 (on the side of the backlight 212). . In the present embodiment, the color filter substrate 10 will be briefly described. The liquid crystal device 200 of this example is roughly configured by sandwiching a liquid crystal composition layer 203 made of STN (Super Twisted Nematic) liquid crystal composition or the like between a color filter substrate 10 and a counter substrate 201 made of a glass substrate or the like. There is. The color filter substrate 10 includes a substrate 11, a partition 14 including a black matrix 12 and a bank 13,
The semi-transmissive reflective layer 21 having the opening 21a and the colored layers 15r, 15g, and 15b are provided, and the protective film 16 is formed so as to cover the upper surfaces of these.

On the protective film 16 of the color filter substrate 10 (on the liquid crystal composition layer 203 side), a plurality of first electrodes 20 are provided.
6 are formed in stripes at predetermined intervals, and the alignment film 20 covers the upper surface (on the side of the liquid crystal composition layer 203).
9 is formed. On the other hand, on the surface of the counter substrate 201 facing the color filter substrate 10, a plurality of second electrodes 205 extending in a direction orthogonal to the first electrodes 206 on the color filter substrate 10 side are formed in a predetermined stripe shape. An alignment film 207 is formed so as to be spaced apart and cover the upper surface (on the side of the liquid crystal composition layer 203). A portion where the first electrode 206 and the second electrode 205 intersect is a pixel, and the colored layers 15r, 15g, and 15b of the color filter substrate 10 are located at the portion that becomes the pixel. A polarizing plate 211a is provided on the outer surface side (viewing side) of the counter substrate 201. A polarizing plate 211b is also provided on the outer surface side of the color filter substrate 10, and a backlight 212 is provided outside the polarizing plate 211b. Further, reference numeral 204 is a space between the substrates (called a cell gap).
Is a spacer for holding the liquid crystal in a constant manner on the substrate surface, and reference numeral 210 is a seal material for holding the liquid crystal composition between the substrates. The first electrode 206 and the second electrode 20
A transparent conductive material 5 such as ITO (Indium Tin Oxide) is formed in a stripe shape in a plan view.

In the liquid crystal device 200 having such a structure,
In a bright place, reflected light from the semi-transmissive reflective layer 21 of the color filter substrate 10 is used to perform a reflective liquid crystal display, and in a dark place, a backlight 212 is turned on to use the transmitted light of the semi-transmissive reflective layer 21. Thus, a transmissive liquid crystal display can be performed. The liquid crystal device 200 of the present embodiment includes a step of forming a semi-transmissive reflective layer of the color filter substrate 10,
Since the step of forming the colored layer can be performed by the inkjet method, a large-scale device and complicated work for manufacturing the color filter substrate are not required, and the cost can be reduced. In addition, according to the liquid crystal device 200 of the present embodiment, the semi-transmissive reflective layer 2 is provided in the color filter substrate 10.
Since 1 is provided only in the pixel and a bank is formed between adjacent pixels, there is no reflection of light in the area other than the pixel, and the contrast when performing reflective liquid crystal display is improved. It is good.

FIG. 8 shows a second example in which a liquid crystal device is constructed by using the color filter substrate 10 of the first embodiment. A schematic structure of a TFT type (Thin Film Transistor type) liquid crystal device is shown. It is an exploded perspective view shown. The liquid crystal device 300 of this example includes a liquid crystal driving IC, a support, a backlight. A semi-transmissive reflection type liquid crystal device as a final product can be obtained by mounting an accessory element such as. The liquid crystal device 300 includes the color filter substrate 10 described in the first embodiment, and the color filter substrate 10 is arranged below the liquid crystal composition layer (backlight side).
In the present embodiment, the description of the color filter substrate 10 will be simplified.

The liquid crystal device 300 of this embodiment is mainly composed of a color filter substrate 10, a counter substrate 314 arranged so as to face the color filter substrate 10, and a liquid crystal composition layer (not shown) sandwiched therebetween. Has been done. Although not shown, a polarizing plate 316 is laid on the lower surface side (opposite side of the liquid crystal layer composition side) of the color filter substrate 10, and a backlight is provided below the polarizing plate 316. Also,
A polarizing plate (not shown) is provided on the upper surface side (observer side) of the counter substrate 314.

The color filter substrate 10 is a partition 1 including a substrate 11, a black matrix 12 and a bank 13.
4 and colored layers 15r, 15g, and 15b, and a protective film 16 is formed so as to cover the upper surfaces thereof. An electrode 318 for driving liquid crystal is formed on the protective film 16 of the color filter substrate 10 (on the liquid crystal composition layer side). This electrode 318 is made of ITO (Indium Tin Oxide)
It is made of a transparent conductive material such as and is a full-face electrode that covers the entire region where a pixel electrode 332 to be described later is formed. An alignment film 319 is provided on the liquid crystal composition layer side so as to cover the electrode 318.

On the other hand, the insulating layer 325 is formed on the counter substrate 314.
And a TFT type switching element and a pixel electrode 332 are formed on the insulating film 325.
Although an alignment film is provided on the pixel electrode 332 in the actual liquid crystal device, it is omitted in this figure. In a thin film transistor T (TFT) as a switching element, scanning lines 351 ... And signal lines 352 ... Are formed in a matrix on an insulating layer 325 formed on a counter substrate 314,
A pixel electrode 332 is provided in each region surrounded by the scanning lines 351 ... And the signal lines 352. The source electrode is provided at a corner portion of each pixel electrode 332 and a portion between the scanning line 351 and the signal line 352. A thin film transistor T including a drain electrode, a semiconductor, and a gate electrode is incorporated and configured. Then, the thin film transistor T is turned on by applying a signal to the scanning line 351 and the signal line 352.
It is configured so that it can be turned off to control the energization of the pixel electrode 332.

According to the liquid crystal device 300 having such a configuration, in a bright place, the reflection type liquid crystal display is performed by utilizing the reflected light from the semi-transmissive reflective layer 21 of the color filter substrate 10,
The backlight is turned on in a dark place, and the semi-transmissive reflective layer 2
A transmission type liquid crystal display can be performed using the transmitted light of No. 1. In the liquid crystal device 300 of the present embodiment, the step of forming the semi-transmissive reflective layer of the color filter substrate 10 and the step of forming the colored layer can be performed by an inkjet method, and thus is a large-scale device for manufacturing the color filter substrate. The cost can be reduced without requiring complicated work. Further, according to the liquid crystal device 300 of the present embodiment, since the semi-transmissive reflective layer 21 is provided only in the pixel in the color filter substrate 10 and the bank is formed between the adjacent pixels, There is no light reflection in regions other than the above, and the contrast is good when a reflective liquid crystal display is performed.

FIG. 9 shows a third example in which a liquid crystal device is constructed by using the color filter substrate 10 of the first embodiment. A schematic structure of a TFD type (Thin Film Diode type) liquid crystal device is shown. It is an exploded perspective view shown. A semi-transmissive reflection type liquid crystal device as a final product is obtained by mounting auxiliary elements such as a liquid crystal driving IC, a support and a backlight on the liquid crystal device 400 of this example. This liquid crystal device 400
Is the color filter substrate 10 described in the first embodiment.
The color filter substrate 10 is disposed below the liquid crystal composition layer (backlight side). In the present embodiment, the description of the color filter substrate 10 will be simplified.

The liquid crystal device 400 of this embodiment is mainly composed of a color filter substrate 10, a counter substrate 430 arranged so as to face the color filter substrate 10, and a liquid crystal composition layer (not shown) sandwiched therebetween. Has been done. A polarizing plate 416 is laid on the lower surface side (opposite side of the liquid crystal layer composition side) of the color filter substrate 10, and a backlight (not shown) is provided below the polarizing plate 416. In addition, the counter substrate 43
On the upper surface side (viewer side) of 0, a polarizing plate (not shown) is provided. The color filter substrate 10 has the configuration shown in FIG. 1B, and includes a substrate 11, a partition (not shown) composed of a black matrix and a bank, a semi-transmissive reflective layer (not shown) having openings 21a, and Colored layers 15r, 15g,
15b, and the protective film 16 is formed so as to cover these upper surfaces. Striped electrodes 418 are formed on the protective film 16 (on the liquid crystal composition layer side) of the color filter substrate 10. This electrode 418 is made of ITO
It is made of transparent conductive material such as (Indium Tin Oxide). Further, an alignment film 419 is provided on the liquid crystal composition layer side so as to cover the electrode 418.

On the other hand, an insulating layer (not shown) is formed on the liquid crystal composition layer side of the counter substrate 430, and a TFD type switching element and a pixel electrode described below are formed on this insulating film. Has been done. That is, on the insulating film, the data lines 434 ... Are aligned and formed in the direction orthogonal to the stripe-shaped electrodes 418 on the color filter substrate 10 with a predetermined gap therebetween. A plurality of pixel electrodes 432 made of a transparent conductive material such as ITO are formed via the two-terminal type non-linear element 436 so as to be aligned with the striped electrodes 418. Then, the colored layers 15r, 15g, 1 of the color filter substrate 10
5b is arranged at a position corresponding to each pixel electrode 432.

According to the liquid crystal device 400 having such a structure, reflective type liquid crystal display is performed by utilizing reflected light from the semi-transmissive reflective layer of the color filter substrate 10 in a bright place, and the backlight is turned on in a dark place. A transmissive liquid crystal display can be performed by utilizing the transmitted light transmitted through the opening 21a of the semi-transmissive reflective layer. The liquid crystal device 400 of this embodiment is
Since the step of forming the semi-transmissive reflective layer of the color filter substrate 10 and the step of forming the colored layer can be performed by an inkjet method, a large-scale device or complicated work is not required for manufacturing the color filter substrate, Cost reduction can be achieved. In addition, the liquid crystal device 400 of the present embodiment
According to this, since the semi-transmissive reflective layer is provided only in the pixel in the color filter substrate 10 and the bank is formed between the adjacent pixels, there is no reflection of light in the region other than the pixel. Good contrast when performing reflective liquid crystal display.

The liquid crystal devices 200 and 30 of the above respective examples
0,400, the liquid crystal device is similarly configured by using the color filter substrate 20 of the second embodiment or the color filter substrate of the third or fourth embodiment instead of the color filter substrate 10. can do. In particular, when the color filter substrate 20 of the second embodiment is used, the light-scattering material 22 is dispersed in the semi-transmissive reflective layer 21, which is excellent in light-scattering characteristics.
Specular reflection at the semi-transmissive reflective layer 21 is prevented, and good display without glare can be obtained.

Next, embodiments of the electronic equipment of the present invention will be described. FIG. 10A is a perspective view showing an example of a mobile phone. Reference numeral 600 indicates a mobile phone main body, and reference numeral 601 indicates a liquid crystal display unit. FIG. 10B is a perspective view showing an example of a portable information processing device such as a word processor and a personal computer. Reference numeral 700 is an information processing device, reference numeral 7
Reference numeral 01 denotes an input unit such as a keyboard, reference numeral 703 denotes an information processing apparatus main body, and reference numeral 702 denotes a liquid crystal display unit. FIG. 10C is a perspective view showing an example of a wrist watch type electronic device. Reference numeral 800 indicates a watch body, and reference numeral 80
1 has shown the liquid crystal display part. In these electronic devices, the liquid crystal display units 601, 702, and 801 are configured by using a liquid crystal device including any of the color filter substrates of the first to fourth embodiments.

[0059]

As described above, according to the present invention,
Conventionally, a semi-transmissive reflective layer was formed through a process that requires complicated work and a large-scale device such as a film forming process and an etching process by a sputtering method or a vacuum evaporation method, and a simple process using an inkjet method. Can be formed with. Therefore, the transflective color filter substrate can be manufactured in a short time at low cost. Also,
It is preferable that not only the semi-transmissive reflective layer of the color filter substrate but also the colored layer be formed by using the inkjet method, thereby further improving the productivity of the semi-transmissive reflective type color filter substrate and further reducing the manufacturing cost. You can

[Brief description of drawings]

1A and 1B show a first embodiment of a color filter substrate according to the present invention, FIG. 1A is a plan view, and FIG. 1B is a sectional view taken along line bb in FIG. 1A.

FIG. 2 is a plan view showing an example of an arrangement of colored layers in a color filter substrate according to the present invention.

FIG. 3 is a plan view showing an example of a semi-transmissive reflective layer in a color filter substrate according to the present invention.

FIG. 4 is a perspective view showing a schematic configuration of an example of an inkjet device that is preferably used in the method for manufacturing a color filter substrate according to the present invention.

5A to 5F are schematic cross-sectional views showing a method of manufacturing the color filter substrate of the first embodiment in the order of steps.

FIG. 6 is a cross-sectional view of essential parts showing a second embodiment of a color filter substrate according to the present invention.

FIG. 7 is a cross-sectional view of essential parts showing an example of a liquid crystal device according to the present invention.

FIG. 8 is an exploded perspective view showing another example of the liquid crystal device according to the present invention.

FIG. 9 is an exploded perspective view showing another example of the liquid crystal device according to the present invention.

FIG. 10 shows an example of an electronic device according to the present invention, where (a) is a perspective view of a mobile phone, (b) is a perspective view of a portable information processing device, and (c) is a wristwatch type. It is a perspective view of an electronic device.

[Explanation of symbols]

10, 20 ... Color filter substrate 11 ... Substrate 13 ... Bank 15, 15r, 15g, 15b ... Colored layer 19 ... Liquid repellent part 21 ... Semi-transmissive reflective layer 21a ... opening 22 ... Light scattering material 200, 300, 400 ... Liquid crystal device 201, 314, 430 ... Counter substrate 203 ... Liquid crystal composition layer

Continued front page    F-term (reference) 2C056 EA24 FB01                 2H048 BA02 BA11 BA55 BA60 BA64                       BB02 BB07 BB10 BB42                 2H091 FA02Y FA14Y FA14Z FA35Y                       FB02 FB08 FC01 GA13 LA12                       LA15

Claims (14)

[Claims] 1. A method of manufacturing a color filter substrate, comprising: a color filter substrate having a semi-transmissive reflective layer having an opening for transmitting light and a colored layer composed of a plurality of color elements on the substrate. A step of forming a bank for partitioning each colored layer on the substrate, and a liquid-repellent treatment for applying a liquid-repellent treatment to a region where the opening is formed in a region partitioned by the bank A step of forming a semi-transmissive reflective layer by ejecting a liquid material by an inkjet method into a region partitioned by the bank after the liquid-repellent treatment step, and the semi-transmissive reflective layer. After the forming step, a colored layer forming step of forming a colored layer in a region partitioned by the bank is provided. 2. After the step of forming the semi-transmissive reflective layer,
2. The method of manufacturing a color filter substrate according to claim 1, further comprising a lyophilic treatment step of performing a lyophilic treatment on the lyophobic treated portion before the colored layer forming step. 3. The step of forming a colored layer, the step of introducing a colored layer forming material composed of an ultraviolet curable resin composition into an area partitioned by the bank, and irradiating the area with ultraviolet rays, 3. The method for manufacturing a color filter substrate according to claim 1, further comprising the step of curing the colored layer forming material and, at the same time, subjecting the liquid-repellent treated portion in the region to a lyophilic treatment. . 4. The coloring layer forming step comprises the step of discharging a liquid coloring layer forming material into an area partitioned by the bank by an ink jet method. A method for manufacturing the color filter substrate described. 5. The method of manufacturing a color filter substrate according to claim 1, wherein the liquid material forming the semi-transmissive reflective layer contains a light scattering material. 6. A color filter substrate comprising a substrate and a color filter comprising a plurality of colored layers each composed of a plurality of color elements formed in a matrix, wherein each colored layer is provided on the substrate. A bank for partitioning into, a semi-transmissive reflective layer having an opening formed in a region surrounded by the bank, and a colored layer formed so as to cover the semi-transmissive reflective layer. Color filter substrate. 7. A color filter substrate comprising a substrate and a color filter comprising a plurality of colored layers comprising a plurality of color elements formed in a matrix, wherein each colored layer is provided on the substrate. A bank for partitioning, a semi-transmissive reflective layer having an opening formed in a region surrounded by the bank, and a colored layer formed so as to cover the semi-transmissive reflective layer, A color filter substrate, characterized in that a light scattering material is contained in the reflective layer. 8. A liquid crystal device in which a liquid crystal is sandwiched between a counter filter substrate and a color filter substrate in which a color filter is formed on a substrate, in which a color layer formed of a plurality of color elements is formed in a matrix. A bank provided on the substrate for partitioning each colored layer, a semi-transmissive reflective layer having an opening formed in a region surrounded by the bank, and the semi-transmissive reflective layer A liquid crystal device comprising the colored layer formed so as to cover the liquid crystal device. 9. The liquid crystal device according to claim 8, wherein a pixel electrode corresponding to each of the colored layers and an active element connected to the pixel electrode are formed on the counter substrate. 10. The liquid crystal device according to claim 8, wherein a transparent electrode is formed on the colored layer. 11. A liquid crystal device in which a liquid crystal is sandwiched between a counter substrate and a color filter substrate in which a color filter is formed on a substrate, in which a color layer including a plurality of color elements is formed in a matrix. A bank provided on the substrate for partitioning each colored layer, a semi-transmissive reflective layer having an opening formed in a region surrounded by the bank, and the semi-transmissive reflective layer And a light scattering material contained in the semi-transmissive reflective layer. 12. The counter substrate is formed with a pixel electrode corresponding to each of the colored layers and an active element connected to the pixel electrode.
1. The liquid crystal device according to 1. 13. The liquid crystal device according to claim 11, wherein a transparent electrode is formed on the colored layer. 14. An electronic device comprising the liquid crystal display device according to claim 8.