JP2003151125A - Cleaning holder for glass substrate for information recording medium - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cleaning holder for a glass substrate for an information recording medium in which deposition of fine particles from a support member and generation of defects during housing can be suppressed and the yield can be improved. SOLUTION: The cleaning holder 10 is composed of a metal case 11 in a square frame form and a plurality of support members 21 installed in the inside of the case 11. A glass substrate 51 as supported between the support members 21 is housed in the case 11. The support member 21 is composed of an outer shell 23 in the surface part and a core material housed in the shell. The outer shell 23 to be in contact with the glass substrate 51 is made of a synthetic resin.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass substrate for an information recording medium for use in an information recording medium such as a magnetic disc, a magneto-optical disc, an optical disc which is a magnetic recording medium of an information recording device such as a hard disk. The present invention relates to a cleaning holder.

[0002]

2. Description of the Related Art Conventionally, a glass substrate for an information recording medium as described above is cut by cutting a sheet-shaped glass base plate into a disk shape and subjected to a polishing treatment to make its surface smooth and then subjected to a chemical strengthening treatment. It is manufactured by In the production of this glass substrate for an information recording medium, adhered substances such as abrasives, polishing powder, iron powder, dust and molten salt adhere to the surface of the glass base plate after the polishing treatment and the chemical strengthening treatment. In order to remove this adhered substance, the glass substrate is subjected to a cleaning process in a plurality of cleaning steps.

In these cleaning steps, a plurality of glass base plates are subjected to a cleaning process while being housed in a cleaning holder. The cleaning holder is composed of a rectangular box-shaped metal case having openings on both upper and lower sides, and a plurality of support members arranged in the case. The support member is formed of a metal round bar, and a plurality of annular support grooves are formed in the peripheral surface at predetermined intervals. The glass base plate is vertically supported on the support member in the case by engaging the peripheral portions of the glass base plates with these support grooves. Then, the glass base plate is immersed in the cleaning liquid together with the cleaning holder, and a plurality of glass plates are collectively subjected to the cleaning treatment at one time.

[0004]

However, in the above-mentioned conventional holder for cleaning, since an acidic solution, an alkaline solution or the like is used as the cleaning liquid, there is a possibility that the supporting member may be corroded by the immersion in the cleaning liquid. is there. Further, since potassium nitrate or the like is used as the chemical strengthening treatment liquid, there is a possibility that the supporting member may be corroded by the chemical strengthening treatment liquid attached via the glass substrate. When the support member is thus corroded, rust is generated on the surface thereof, and fine particles of the rust adhere to the surface of the glass substrate supported by the support member. Then, there is a problem that the adhered fine particles form minute projections on the surface of the glass substrate, which causes the smoothness to be lost and the yield of the glass substrate cannot be improved.

Further, since the metal support member is harder than the glass substrate, when the glass substrate is accommodated in the cleaning holder, the glass substrate is chipped due to the impact when the glass substrate hits the support member, Defects such as cracks may occur. Further, the conventional cleaning holder has a problem that it is not possible to suppress the occurrence of such defects and it is not possible to improve the yield of the glass substrate.

The present invention has been made by paying attention to the problems existing in the prior art. An object of the invention is to provide a holder for cleaning a glass substrate for an information recording medium, which can suppress adhesion of fine particles from a supporting member and generation of defects at the time of accommodation, and can improve yield. It is in.

[0007]

In order to achieve the above object, an invention of a holder for cleaning a glass substrate for an information recording medium according to claim 1 is a cleaning step in manufacturing a glass substrate for an information recording medium. A holder for cleaning a glass substrate for an information recording medium, which is used by immersing a plurality of glass substrates in a cleaning solution together with the glass substrates, and has a box shape or a frame shape, and a glass inside the holder. A metal case for accommodating the substrate and a plurality of supporting members that are installed inside the case and that support the glass substrates accommodated in the case are provided, and a supporting recess is provided on the surface of the supporting member. A glass substrate is provided between the supporting members by engaging the peripheral edge portion of the glass substrate with the supporting recess, and at least the glass substrate of the supporting members is provided. There is characterized in that to form an inner surface of the support recess is a portion in contact with the synthetic resin.

According to a second aspect of the present invention, there is provided a holder for cleaning a glass substrate for an information recording medium, wherein in the first aspect of the invention, the supporting member is coated with a synthetic resin on a peripheral surface of a rod-shaped core material. It is characterized in that it is formed by providing layers.

According to the invention of a holder for cleaning a glass substrate for an information recording medium described in claim 3, in the invention described in claim 1 or 2, the supporting member is a hollow outer shell made of synthetic resin. And a core member made of a metal rod housed inside the outer shell, and the inside of the outer shell is hermetically sealed with the core member housed.

According to the invention of a holder for cleaning a glass substrate for an information recording medium described in claim 4, in the invention described in any one of claims 1 to 3, the metal used for the case is a nickel alloy or titanium. The synthetic resin used for the supporting member is a fluororesin.

[0011]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described in detail below with reference to the drawings. As shown in FIG. 1, a metal case 11 that constitutes the cleaning holder 10 includes a pair of support plates 12 that are arranged to face each other, and a pair of connection plates 13 that connect both side portions of each support plate 12, respectively. Is formed in a square frame shape with both upper and lower sides opened. Three U-shaped engagement holes 14 are formed in the upper portion of the support plate 12 so as to extend in the vertical direction and to be opened at the upper end of the support plate 12. These engaging holes 14 are the support plates 12
The engaging holes 1 are arranged on both sides and the center of the
Openings 15 are formed between the spaces 4 so as to form an inverted triangular shape that opens at the upper end of the support plate 12. Further, two U-shaped engagement holes 14 are formed in the lower portion of the support plate 12 so as to extend in the vertical direction and to be opened at the lower end of the opening portion 15. Then, the end portions of the round bar-shaped support member 21 are engaged with these engagement holes 14, respectively.

Now, the support member 21 will be described. As shown in FIGS. 2 (a) and 2 (b), the outer shell 23 forming the support member 21 is formed of a synthetic resin in a cylindrical shape, and a core material 24 made of a metal rod is provided therein. Has been inserted. The diameter of the core member 24 is substantially the same as the inner diameter of the outer shell member 23, and no gap is formed between the inner surface of the outer shell member 23 and the peripheral surface of the core member 24. . Further, the core material 24 is formed such that its length is slightly shorter than the length of the outer shell body 23.

The outer shell 23 has the openings at both ends closed by the lids 25 with the core 24 inserted therein. The lid 25 is formed of a disc-shaped locking plate 26 and a cylindrical fitting portion 27 protruding from the center of the locking plate 26. The lid 25 is attached to the outer shell body 23 by fitting the fitting portion 27 into the opening of the outer shell body 23. This fitting portion 27
Has a diameter substantially equal to the inner diameter of the outer shell 23, and is configured such that the inside of the outer shell 23 is sealed with the lid 25 attached and the core 24 is not exposed to the outside. There is.

The outer shell 23 whose both ends are closed by the pair of lids 25 functions as a coating layer for covering the peripheral surface and the end surface of the core material 24 without any gap. Further, when the lid 25 is attached, the tip end of the fitting portion 27 is the core member 2
An annular engagement groove 22 is formed between the end portion of the outer shell body 23 and the locking plate 26 by being brought into contact with the end portion of No. 4 and restricting further fitting.

As shown in FIG. 1, the support member 21 is
By aligning the engaging groove 22 with the opening of the engaging hole 14 and pushing it downward, the peripheral surface of the fitting portion 27 is engaged with the inner peripheral surface of the engaging hole 14 and is attached to the support plate 12. It is like this. Then, by engaging both ends of the support member 21 with the respective engagement holes 14 of the support plates 12, a total of five support members 21 extend in parallel between the support plates 12, and It is installed so as to form a W shape when viewed from the support plate 12 side. In this state, the engagement of the inner surface of the locking plate 26 with the outer surface of the support plate 12 prevents the displacement of the support member 21 in the longitudinal direction. Also, the support member 2
1 pushes up the end portion of the engaging portion 27 and pushes the fitting portion 27 into the engaging hole 1.
The support plate 12 can be attached to and detached from the support plate 12 by being pulled out from the opening of No. 4.

As shown in FIG. 3, the glass substrate 51 is formed into a disc shape having a circular hole in the center by cutting a sheet-shaped glass base plate. Examples of the material of the glass base plate include soda lime glass, aluminosilicate glass, borosilicate glass, and crystallized glass produced by the float method, downdraw method, redraw method or press method. The glass substrate 51 formed in a disk shape has its end faces ground so that the outer dimensions and the inner diameter have predetermined lengths, and after grinding, the outer and inner edge corners are ground and chamfered. There is.

As shown in FIG. 1, the glass substrate 51 described above is used.
Is the support member 21 at its lower end and both side ends in a vertical state.
And is accommodated in the case 11. A plurality of annular support recesses 28 are provided at equal intervals on the peripheral surface of the outer shell 23 of each support member 21. And
The movement of the glass substrate 51 in the extending direction of the support member 21 is regulated by engaging the peripheral edge portion of the glass substrate 51 with the support concave portion 28 of each support member 21. Further, pillars 16 each having an elongated rectangular plate shape extend upward from both sides of the upper end of the support plate 12. At the upper end of the pillar 16, a long rectangular plate-shaped grip portion 17 is provided between a pair of pillars 16 facing each other in the extending direction of the connecting plate 13. Then, by gripping the grip portion 17 by hand, the case 11 can be transferred without touching the glass substrate 51.

As shown in FIG. 3, the three supporting members 21 for supporting the glass substrate 51 are provided with respective axis centers 21a.
Are arranged on a locus 52 extending along the outer peripheral edge of the glass substrate 51 indicated by a chain double-dashed line in the figure. A center of an arc portion formed by a curve drawn by connecting the three axis centers 21a along the locus 52 and a pair of straight lines drawn by connecting both ends of the curve and the center 51a of the glass substrate 51, respectively. The angle θ is 16
The angle is preferably 0 to 180 °. The central angle θ is 160
When the angle is less than 0 °, the glass substrate 51 cannot be sufficiently supported by each supporting member 21, and the glass substrate 51 is largely shaken during transportation or the like, resulting in defects such as chipping (crapping) and cracks (cracks). Is likely to occur. If the central angle θ exceeds 180 °, it becomes difficult to insert the glass substrate 51 between the support members 21. In this embodiment, the central angle θ is 180 °. This is each support member 21
This is because the glass substrate 51 can be easily inserted between the two and the swinging of the glass substrate 51 can be effectively suppressed.

As shown in FIGS. 2 (a) and 2 (b), the support concave portion 28 is formed so that a pair of inner side surfaces facing each other are tapered so as to be spaced apart from each other from the inner bottom toward the outer side. There is. For this reason, the glass substrate 51 supported by the support member 21 is mainly in contact with only the end surface of the glass substrate 51 with the outer peripheral surface of the outer shell 23. Further, the outer shell 23 is made of synthetic resin and is soft, so that the occurrence of defects such as chipping and cracks due to the contact of the glass substrate 51 with the support member 21 is suppressed.

In order to make the surface of the glass substrate 51 smooth, the glass substrate 51 is polished using an abrasive. Further, the glass substrate 51 improves impact resistance, vibration resistance, heat resistance and the like required as an information recording medium,
Chemical strengthening treatment is applied. The chemical strengthening treatment is, for example, a monovalent metal ion such as lithium or sodium contained in the composition of the glass substrate 51 and having a larger ionic radius than that of a monovalent metal ion such as potassium. In this method, compressive stress is applied to the surface of the glass substrate 51 to strengthen it. This chemical strengthening treatment is performed by immersing the glass substrate 51 in the heated chemical strengthening treatment liquid for a predetermined time. Examples of the chemical strengthening treatment liquid include a potassium nitrate solution, a sodium nitrate solution, and silver nitrate, which may be used alone or as a mixture of at least one of them. The temperature of the chemical strengthening treatment liquid at this time is preferably about 50 to 150 ° C. lower than the strain point of the glass forming the glass substrate 51, and more preferably about 350 to 400 ° C.

On the surface of the glass substrate 51 which has been subjected to the polishing treatment, the chemical strengthening treatment, etc., there are adhered substances such as polishing powder, an abrasive, and a molten salt deposited from the chemical strengthening treatment liquid. In order to remove such adhered substances, the glass substrate 51 is washed. As shown in FIG. 4, in the cleaning process, the glass substrate 51 is placed in the cleaning tank 50 in which the cleaning liquid is stored.
Is held in the cleaning holder 10 and is immersed in the cleaning liquid together with the cleaning holder 10. Examples of the cleaning liquid include organic solvents such as isopropyl alcohol (IPA), methanol, ethanol, butanol, cationic, anionic or nonionic surfactants, hydrofluoric acid, sulfuric acid, sulfamic acid, hydrochloric acid, nitric acid, phosphoric acid, etc. An acidic solution, an alkaline solution such as potassium hydroxide, sodium hydroxide, ammonia, tetramethyl hydroxide, water, or hot water is used.

Since the cleaning holder 10 is also immersed in the cleaning liquid as described above when the cleaning treatment is performed, it is preferable to use a metal having heat resistance and corrosion resistance as the metal forming the case 11. . Examples of such a metal include SUS300 series stainless steel, nickel alloys such as Inconel, and titanium. Above all,
Nickel alloys such as stainless steel and Inconel are easily available, and are easier to process than welding, such as welding, pressing, and cutting, as compared with titanium, and thus are preferable as a material for the case 11.

The synthetic resin forming the outer shell 23 of the supporting member 21 is preferably one having heat resistance, acid resistance and alkali resistance. Examples of such synthetic resin include polyetheretherketone (PEEK) and fluororesin. Among them, the fluororesin has water repellency, and it is difficult for the adhered matter to adhere to the surface of the fluororesin.
3 is more preferable. Examples of such fluororesin include polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), ethylene-tetrafluoroethylene copolymer (ETFE), polyvinylidene fluoride (PVDF), and the like. Used.

The washing process may be performed at a temperature higher than room temperature, such as by using hot water. in this case,
If the support member 21 is formed of only synthetic resin, the support member 2
1 may be thermally deformed. In addition, the support member 21 is installed inside the metal case 11, and since the synthetic resin and the metal have large thermal expansion coefficients, the support member 21 is distorted or bent. There is a risk. In order to prevent such a problem, it is preferable that the core material 24 of the support member 21 is formed of a metal, and a metal or an alloy of the same type as that of the metal or alloy used in the case 11 is used. It is more preferable to use the same metal or alloy as the metal or alloy used in the case 11.

The operation of the cleaning holder 10 will be described below. Now, when the glass substrate 51 that has been subjected to the polishing treatment, the chemical strengthening treatment, and the like is housed in the cleaning holder 10, the glass substrate 51 is first supported by the supporting members 21 disposed above the case 11 and above the case 11. Inserted between. At this time, the glass substrate 51 is inserted while the peripheral edge of the glass substrate 51 is aligned with the supporting recess 28 of any one of the supporting members 21.

Then, the glass substrate 51 has the support recess 28.
Is guided in the insertion direction by the lower end, and the lower end of the supporting recess 28 of each supporting member 21 disposed in the lower portion of the case 11 is eventually formed.
Inserted inside. When the lower end of the glass substrate 51 is brought into contact with the inner bottom surface of the supporting recess 28 as it is, both side ends and the lower end of the glass substrate 51 are respectively supported by the three supporting members 21 as shown by the chain double-dashed line in FIG. . And, the glass substrate 51 is a holder 1 for cleaning with a plurality of glass substrates standing upright.
It is accommodated and held in 0.

Subsequently, the glass substrate 51 is carried to the cleaning step together with the cleaning holder 10 by gripping the grip portion 17 of the cleaning holder 10, and the cleaning tank 50 in which the cleaning liquid as shown in FIG. 4 is stored. Holder 1 for cleaning inside
It is thrown in every 0. Then, the cleaning process is performed in the cleaning tank 50 until the adhered matter on the surface is removed while being irradiated with ultrasonic waves.

In housing the glass substrate 51 in the cleaning holder 10 described above, for example, when the lower end of the glass substrate 51 abuts the inner bottom surface of the supporting recess 28 of the supporting member 21, the lower end of the glass substrate 51 is An impact is applied by the contact with the support member 21. This impact is mitigated because the outer shell body 23 of the support member 21 that is to be brought into contact with the glass substrate 51 is made of fluororesin, and defects such as chipping and cracks are prevented from occurring.

Further, during the cleaning process, the case 11 is formed of a metal having heat resistance and corrosion resistance. However, fine particles such as rust are generated due to scratches formed on the surface thereof and long-term use. I will end up. However, the glass substrate 51
Since the outer shell body 23 of the supporting member 21 which is to be contacted with is formed of fluororesin, it does not generate fine particles and prevents the fine particles generated from the supporting member 21 from adhering to the glass substrate 51. To be done.

The effects exerted by the above embodiment will be described below. According to the cleaning holder 10 of the embodiment, the support member 21 has the outer shell 23 forming the surface portion thereof made of a fluororesin which is a synthetic resin. When the glass substrate 51 is accommodated in the cleaning holder 10, the glass substrate 5
Since the impact caused by the contact between 1 and the supporting member 21 is mitigated by the fluororesin outer shell 23, it is possible to prevent the occurrence of defects such as chipping and cracks. Further, even when immersed in a cleaning liquid composed of an acidic solvent and an alkaline solvent, the outer shell 23 made of fluororesin does not rust, and the adhesion of fine particles from the support member 21 can be prevented. Therefore, it is possible to prevent generation of defects and adhesion of fine particles from the supporting member 21, and it is possible to improve the yield of the glass substrate 51.

A metallic core material 24 is housed inside the outer shell 23. The core 24 is the case 1
It is formed of the same metal as the metal forming 1. Therefore, the support member 21 is thermally deformed due to the temperature change during cleaning,
It is possible to mitigate the problem that the support member 21 is distorted or bent due to a large difference between the thermal expansion coefficient of the support member 21 and the thermal expansion coefficient of the case 11. Furthermore, since the inside of the outer shell 23 is sealed, even if a metal is used for the core 24, it can be prevented from rusting. Therefore, it is possible to prevent the fine particles from adhering to the support member 21 and mitigate the problems caused by the temperature change during cleaning.

In addition, fluorocarbon resin is used for the material of the outer shell 23, and stainless steel is used for the material of the case 11.
A nickel alloy such as Inconel is used. Therefore, it is possible to prevent adhesion of fine particles such as rust to the surface of the outer shell 23 while suppressing adhesion of fine particles generated by the case 11 rusting to the glass substrate 51.

The support member 21 is configured to be attachable to and detachable from the case 11. Therefore, when a part is replaced due to long-term use, breakage, or the like, it is possible to replace only any part that has become unusable, and it is possible to reduce the manufacturing cost.

The present embodiment can be modified and embodied as follows. -In a state where the glass substrate 51 and the cleaning holder 10 are immersed in the cleaning liquid in the cleaning tank 50, the glass substrate 51 may be irradiated with ultrasonic waves or brought into contact with bubbles to perform the cleaning process. Good. When configured in this way, for example, in the case of the conventional cleaning holder, the rust is peeled off from the surface of the metal supporting member due to the irradiation of ultrasonic waves and the contact of bubbles to generate dust, which is attached to the surface of the glass substrate. There was a risk that However, according to the cleaning holder 10 of the embodiment, the outer shell body 23 forming the surface portion of the support member 21 is made of synthetic resin and does not rust. Therefore, it is possible to prevent dust generation from the surface of the support member 21 when ultrasonic waves are applied or bubbles are brought into contact with the surface of the glass substrate 51, and the cleanliness of the surface of the glass substrate 51 can be improved. Further, when dust is generated from the case 11 due to scratches or the like, fine particles such as rust are fixed to the surface of the supporting member 21, and the fixed particles are released from the surface of the supporting member 21 by ultrasonic irradiation or contact with bubbles. However, there is a possibility that dust will be generated. Even in such a case, since the outer shell body 23 is formed of the fluororesin, the support member 21
Since it is difficult for fine particles to adhere to the surface of the support member 21
It is possible to prevent dust generation from the surface of the.

The support member 21 does not necessarily need to be formed on the entire surface of the synthetic resin, and may be formed of a synthetic resin at least at a portion where the glass substrate 51 contacts. As a specific example, the support recess 28 is provided on the core material 24, and the inner side surface, the inner bottom surface, etc. of the support recess 28 are coated with a synthetic resin, or the length of the support member 21 provided with the support recess 28 is long. Only the intermediate portion in the direction may be covered with a cylindrical body made of synthetic resin. Further, the cylindrical outer shell 23 is omitted, and the surface of the core material 24 is coated with heat-melted synthetic resin, or a synthetic resin film is attached, and the like.
4 may be coated with a synthetic resin and a coating layer may be provided on the surface thereof. With such a configuration, it is possible to reduce the amount of synthetic resin used, especially the amount of fluororesin used, and to reduce the manufacturing cost.

Each support member 21 has its axis center 21
a is located on the locus 52 shown in FIG. 3 and is formed by a curved line connecting the three axis centers 21a and a pair of straight lines connecting both ends of the same curve and the center 51a of the glass substrate 51. If the central angle θ is 160 to 180 °,
It may be configured to support the glass substrate 51 at a position deviated from both ends or the lower end of the glass substrate 51. The glass substrate 51 may be supported by four or more supporting members 21. Furthermore, if the central angle θ of the arc is 160 ° or more,
If it is less than 0 °, the two support members 21 are used for the glass substrate 51.
May be configured to support.

At least the inner surface, preferably the entire surface of the case 11 may be electropolished. This electrolytic polishing is a solution containing only a small amount of water such as concentrated phosphoric acid, concentrated sulfuric acid, etc., and in a state in which it is difficult to dissolve metals, the target is used as an anode and a direct current is applied to it. This is a method of melting the surface of the object on the order of micrometers. The surface of the metal subjected to electrolytic polishing becomes smooth, and at the same time, the deteriorated portion existing on the surface due to heat, polishing, etc. is removed. Therefore, it is possible to prevent the corrosion resistance from being deteriorated due to processing and the like and the corrosion due to the adhesion of impurities to the surface.

At least the inner surface, preferably the entire surface of the case 11 may be covered with a synthetic resin. Alternatively, the case 11 may be formed of only synthetic resin. Fluororesin is preferred as the synthetic resin. When configured in this way, dust generation from the case 11 can be prevented.

The case 11 may be formed in a box shape such as a square box shape with a bottom. Further, the technical idea that can be understood from the above-described embodiment will be described below. -The case is made of metal, and the core material is made of a metal of the same type as that of the metal forming the case or a metal having a thermal expansion coefficient of the same degree. A holder for cleaning the glass substrate for the information recording medium described. With this configuration, it is possible to more effectively mitigate the problem caused by the temperature change during cleaning.

The support recess is formed so that a pair of inner side surfaces facing each other are tapered so as to be spaced apart from each other from the inner bottom toward the outer side. A holder for cleaning a glass substrate for an information recording medium according to. With such a configuration, the contact area between the glass substrate and the supporting member can be reduced, and the adhesion of deposits from the supporting member can be suppressed more effectively.

[0041]

As described in detail above, the present invention has the following effects. According to the glass substrate cleaning holder for an information recording medium of the invention of claim 1,
Adhesion of fine particles from the support member and generation of defects during storage can be suppressed, and yield can be improved.

According to the cleaning holder for a glass substrate for an information recording medium of the invention described in claim 2, in addition to the effect of the invention described in claim 1, adhesion of fine particles from the supporting member is effectively suppressed. can do.

According to the cleaning holder for a glass substrate for an information recording medium of the third aspect of the invention, in addition to the effect of the invention of the first aspect or the second aspect, adhesion of fine particles from the supporting member is prevented. While preventing, it is possible to mitigate the problems caused by the temperature change during cleaning.

According to the holder for cleaning a glass substrate for an information recording medium of the invention described in claim 4, in addition to the effect of the invention described in any one of claims 1 to 3, fine particles generated from the case Can be suppressed from adhering to the glass substrate, and the fine particles can be prevented from being fixed to the surface of the supporting member.

[Brief description of drawings]

FIG. 1 is an exploded perspective view showing a cleaning holder according to an embodiment.

FIG. 2A is a partially cutaway side view showing a support member, and FIG. 2B is a front sectional view showing the support member.

FIG. 3 is a front view showing a state where a glass substrate is supported by a supporting member.

FIG. 4 is a conceptual diagram showing a state in which a cleaning holder is used.

[Explanation of symbols]

10 ... Cleaning holder, 11 ... Case, 21 ... Support member, 23 ... Outer shell, 24 ... Core material, 28 ... Support recess, 51
… Glass substrate.

Claims (4)

[Claims] 1. A cleaning method for a glass substrate for an information recording medium, which is used in a cleaning process in manufacturing a glass substrate for an information recording medium, and is used by being immersed in a cleaning liquid together with a plurality of glass substrates in a holding state. A holder, which is in the shape of a box or a frame, has a case for accommodating a glass substrate therein, and a plurality of supports that are installed inside the case and that support the glass substrate accommodated in the case. A supporting recess is provided on the surface of the supporting member, and the glass substrate is held between the supporting members by engaging the peripheral edge of the glass substrate with the supporting recess. A holder for cleaning a glass substrate for an information recording medium, characterized in that at least a part of the member, which is in contact with the glass substrate, is formed with a synthetic resin on the inner surface of the supporting recess. 2. The holder for cleaning a glass substrate for an information recording medium according to claim 1, wherein the supporting member is formed by providing a synthetic resin coating layer on a peripheral surface of a rod-shaped core material. . 3. The support member is formed of a hollow outer shell made of synthetic resin and a core member made of a metal rod housed inside the outer shell, and the support member is externally housed in a state of containing the core member. The cleaning holder for a glass substrate for an information recording medium according to claim 1 or 2, wherein the inside of the shell is sealed. 4. The holder for cleaning a glass substrate for an information recording medium according to claim 1, wherein the synthetic resin used for the supporting member is a fluororesin.