JP2003001145A - Slit nozzle - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a slit nozzle capable of spraying fluids uniformly in an obliquely inclined state to the axial direction of the nozzle. SOLUTION: This slit nozzle comprises two sheets of plates 1 and 1 laminated together, and a slit section longitudinally formed in this laminated part constitutes a spray nozzle 2 for fluids. On either one of the plates, an extension 1a extending forward from the fluid spray nozzle 2 is formed, and an inclined plane 5 is formed in the extension 1a which tilts gradually outward thereof from the fluid spray nozzle 2 toward front side.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a slit nozzle capable of uniformly ejecting a fluid in a state of being inclined with respect to the axial direction of the nozzle.

[0002]

2. Description of the Related Art For example, in a manufacturing process of a liquid crystal substrate or a printed circuit board, a cleaning process of a work, a chemical coating process,
Drying processing and the like are performed, and cleaning processing with ultrapure water is performed after these processing steps. Then, after the cleaning process, a slit nozzle is used to dry the ultrapure water, and a method of drying the work with a jetting fluid is used. Here, the slit nozzle refers to a nozzle in which two plate-like bodies are adhered to each other and a slit portion in the longitudinal direction formed in the adhered portion serves as a fluid ejection port.

In this case, as shown in FIG. 7, gas is injected at a constant angle of attack with respect to the traveling direction of the work 10 in order to improve the drying efficiency, but recently, the size of the work 10 is increased. In order to prevent the work 10 from rising and being deformed, the work 1
It has become necessary to reduce the arrangement interval of the pressing rollers 11 for pressing 0. However, since the slit nozzles are obliquely arranged, there is a limit to narrowing the arrangement interval of the pressing rollers 11 and 11, and there is a problem that it is difficult to press the work 10 reliably.

Therefore, the development of a nozzle capable of jetting the jetted fluid obliquely even if the slit nozzle is arranged straight without slanting is carried out. For example, as shown in FIG. A tilted one, a tilted plate portion provided at the tip of a fluid ejection port as shown in FIG. 9, and the like have been proposed. However, the work, such as a liquid crystal substrate and a printed circuit board, has a maximum width of about 2000 mm, and it is necessary to ensure uniform ejection of the fluid over the entire width. In the structures shown in FIGS. There is a problem in that it is difficult to guarantee accuracy in machining a machine tool because machining of a complicated shape is required and mass production at low cost is not possible.

[0005]

SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems of the prior art, and allows a fluid to be uniformly ejected in a state of being inclined with respect to the axial direction of the nozzle, and is simple. The present invention has been completed for the purpose of providing a slit nozzle that can be manufactured with high accuracy and at a low cost.

[0006]

The slit nozzle of the present invention, which has been made to solve the above-mentioned problems, bonds two plate-like bodies, and a slit portion in the longitudinal direction formed in this bonded portion is made into a fluid. In the slit nozzle serving as the jet port, an extension portion extending forward of the fluid jet port is formed in any one of the plate-like bodies, and the extension portion is gradually outwardly outward from the fluid jet port. It is characterized in that an inclined surface which is inclined toward the side is formed.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of the present invention will be described below with reference to the drawings. The drawings show a case where the present invention is applied to a nozzle for a drying process for ejecting gas as a fluid, which is used in a manufacturing process of a liquid crystal substrate, a printed circuit board or the like. 1 is bonded, and a slit nozzle having a longitudinal slit formed in this bonded portion as a fluid ejection port 2 is basically the same as the conventional one. In the figure, 3 is a gas reservoir, and 4 is a gas supply pipe. In addition, the plate-shaped body 1
The material of the above can be arbitrarily selected from metals such as stainless steel, titanium and aluminum, and ceramics and hard resins depending on the use environment and use conditions.

In the present invention, an extension portion 1a extending forward of the fluid ejection port 2 is formed in any one of the plate-like bodies 1 and the extension portion 1a is extended forward from the fluid ejection port 2. The inclined surface 5 is formed so as to gradually incline toward the outside. In the nozzle having such a structure, the gas ejected from the fluid ejection port 2 is guided to the inclined surface 5 by the viscosity of the gas and is naturally bent leftward and ejected (FIG. 2). In the illustrated case, the gas is uniformly ejected in a state of being inclined leftward with respect to the axial direction of the vertical nozzle.

The inclined surface 5 may be formed only on at least one plate 1 on the side where the gas ejection direction is to be inclined, and the shape of the other plate 1 is not limited. Therefore, as shown in FIG. 2, the other plate-shaped body 1 is an inclined surface which is substantially straight and continuous with the inclined surface 5, and FIG.
As shown in, any shape such as a rectangular shape can be selected. As the shape of the inclined surface 5, a flat shape is illustrated in FIG. 2, but in addition, a stepped shape having a stepped portion 1b bulging toward the gas ejection port side as shown in FIG. Alternatively, the same effect can be obtained with a curved surface as shown in FIG.

As described above, according to the present invention, the two plate-like bodies 1 and 1 are
In a slit nozzle using the slit portion in the longitudinal direction formed in the bonded portion as the fluid ejection port 2, and an extending portion extending forward of the fluid ejection port 2 in one of the plate-shaped bodies 1 5 and the extended portion 1
Since the inclined surface 5 is formed in the a from the fluid ejection port 2 so as to gradually incline toward the front, the gas discharged from the fluid ejection port 2 guided by the inclined surface 5 is Due to the viscosity, it naturally bends to the left and ejects. As a result, the gas can be uniformly jetted in a state of being inclined with respect to the axial direction of the vertical nozzle. Therefore, as shown in FIG. The space can be narrowed to the minimum, and furthermore, the work 10 can be reliably prevented from being lifted or deformed.

In the above description, the case where gas is used as the fluid has been described, but it is needless to say that liquid can be used as the fluid. In this case, the liquid is jetted obliquely on the work. It is effective because it can prevent the bounce of the water and that the device can be designed simply because the drainage can be done on only one side.

[0012]

As is clear from the above description, according to the present invention, a fluid can be uniformly ejected in a state of being obliquely inclined with respect to the axial direction of the nozzle, and moreover, with a simple structure, it can be produced accurately and inexpensively. Is what you can do. Therefore, the present invention is extremely effective as a slit nozzle that eliminates the conventional problems and contributes to industrial development.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of the present invention.

FIG. 2 is a cross-sectional view of a main part showing an embodiment of the present invention.

FIG. 3 is a cross-sectional view of a main part showing another embodiment.

FIG. 4 is a cross-sectional view of a main part showing another embodiment.

FIG. 5 is a cross-sectional view of a main part showing another embodiment.

FIG. 6 is a front view showing a process of drying a printed circuit board.

FIG. 7 is a front view showing a conventional process of drying a printed circuit board.

FIG. 8 is a sectional view of a main part showing a conventional example.

FIG. 9 is a cross-sectional view of a main part showing a conventional example.

[Explanation of symbols]

1 plate 1a extension part 2 Fluid outlet 5 inclined surface

Claims (3)

[Claims] 1. A slit nozzle in which two plate-like bodies are adhered to each other, and a slit portion in the longitudinal direction formed in the adhered portion is used as a fluid ejection port, and one of the plate-shaped bodies is formed from the fluid ejection port. Also, the slit nozzle is characterized in that an extended portion extending forward is formed and an inclined surface that is gradually inclined outward from the fluid ejection port toward the front is formed in the extended portion. 2. The slit nozzle according to claim 1, wherein the inclined surface has a flat shape. 3. The slit nozzle according to claim 1, wherein the inclined surface has a stepped shape or a curved surface shape which bulges toward the fluid ejection port side.