JP2003069115A - Ld excitation slab type solid-state laser generation device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an adhesion structure to a laser medium of a side rail which restrains thermal lens effect in an LD excitation slab type solid-state laser generation device. SOLUTION: The laser generation device has a slab type solid-state laser oscillation medium 1, a side rail 2 disposed in contact with both edge faces thereof in a widthwise direction, an optical resonator and an excitation LD. Adhesion by means of adhesive is performed only for a partial region 3 near both ends of a contact surface or for partial regions S1, S2 in addition to it for maintaining the contact between the side rail 2 and the medium 1. The thickness of the adhesive layer 5 is absorbed by a step provided to the side rail 2. A pressing means using an elastic member can be further provided as an auxiliary means. Mullite ceramics or zirconia ceramics or the like is used for the material of a side rail. A silicon-base material which presents flexibility in temperature rise can be used for adhesive.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an LD pumped slab type solid state laser generator used by being mounted on a laser processing apparatus or the like.

[0002]

2. Description of the Related Art In recent years, a solid-state laser generator such as a YAG laser has been used in a laser processing apparatus for cutting or welding a metal or non-metal material. As an excitation light source for the laser oscillation medium, a semiconductor laser (also referred to as a laser diode) is used in addition to a lamp that has been conventionally used.
In the following, abbreviated as LD) will be used.

Solid-state laser generators are roughly classified into a slab type, a rod type, and a disc type depending on the shape of a laser oscillation medium used. The slab type is composed of a single laser crystal as compared with the rod type and the disc type. The output obtained is high. Therefore, it is widely used especially in the application fields where high-power laser light is required.

Further, as is well known, the slab type laser crystal has an advantage that the beam quality can be improved by forming a zigzag optical path inside the slab type laser crystal. FIG. 8 is a diagram showing the basic arrangement of a slab type solid-state laser generator for the sake of simple explanation. FIG. 8A shows a cross section along the thickness direction, and FIG. 8B shows a cross section along the width direction. ing. The laser light 17 is output from the output mirror 9
The slab-type solid-state laser oscillation medium 1 placed in the optical resonance space between the output mirror 9 and the rear mirror 8 is laser-excited by the excitation light (arrow group) 16 and is generated between the output mirror 9 and the rear mirror 8. It also makes a round trip. In this process, a part is extracted as output laser light from the output mirror 9.

As shown in FIG. 8A, the zigzag optical path is formed in the thickness direction (± x) of the laser oscillation medium 1.
This is within the cross-section in the axial direction, so that the refractive index distribution (gradient of refractive index) generated in the same direction (± x axis direction) is canceled out, and the beam quality is kept high in the same direction (± x axis direction). Can be done.

On the other hand, in the width direction (± y axis direction),
By arranging the square rod-shaped side rails having a heat insulating effect in contact with both ends of the solid-state laser oscillation medium 1 in the width direction, the temperature gradient in the width direction is suppressed to reduce the refractive index gradient. Beam quality is being improved.
In principle, this method should eliminate the temperature gradient in the width direction, but in reality, there are unsolved problems as described below.

First, in LD excitation, an important problem when a slab type solid laser oscillation medium is used is
The uniformity of the excitation distribution. As a method for increasing the uniformity of excitation distribution, for example, Japanese Patent Application No. 2000-326
No. 755 (Title of the invention: LD pumped slab type solid-state laser generator) is proposed. This technique
It has been proved by experiments that the excitation light is injected from the side through a window using a condenser lens, and a highly uniform excitation distribution can be obtained.

Here, the excitation distribution means the absorption distribution of the excitation light along the width direction and the thickness direction of the slab type laser medium. Particularly, homogenization in the former (width direction) improves the quality of the laser light. is important. To measure this, the following method can be used, for example, with the arrangement shown in FIG.

That is, a minute diameter Nd: YAG laser beam 18 is sent along the length direction of the slab type laser medium 1 sandwiched by the side rails 2 which are in contact with both end faces in the width direction. Since this light is amplified during transmission through the slab type laser medium 1, the degree of this amplification is observed by the output measuring device 15. It is possible to measure the spatial distribution of the amplification amount by moving the incident position of the 18 Nd: YAG laser light.

This amplification amount can be converted into a small signal gain value inside the crystal by calculation, which means that the distribution of the absorption amount of the pumping light is indirectly measured. An example of the obtained results (widthwise distribution) is shown in a graph in FIG. In the graph, the horizontal axis represents the position in the width direction (relative value: AU represents an arbitrary unit), the vertical axis represents excitation intensity (relative value: AU represents an arbitrary unit), and plots at both ends of the graph A point (diamond) represents the excitation intensity at a position very close to both end faces of the laser oscillation medium 2 in the width direction, and a plot point (diamond) at approximately the center of the graph represents an excitation intensity at approximately the center position of the laser oscillation medium 2 in the width direction. Is represented.

In the LD excitation method (for example, 807 ± 3 nm) in which the excitation light has a high monochromaticity, if the absorption amount of the excitation light inside the medium is uniform, it can be considered that the heat generation distribution inside the crystal is also uniform. . Also, the cooling method is important,
A water cooling system is generally used for a slab type laser medium used for a high power YAG laser. In the case of the water cooling method, the flowing direction of the cooling water is classified into either the width direction or the length direction of the slab type laser medium, but in the former case, since a temperature gradient is created in the width direction, It will affect the optical distortion.

To solve this, a method of increasing the flow velocity of the cooling water and reducing the temperature difference in the width direction can be considered. However, when this method is adopted, the flow rate of the cooling water becomes enormous, and the size of the device is increased. On the other hand, in the method of flowing the cooling water in the longitudinal direction of the medium, the temperature gradient is formed in the longitudinal direction of the slab type crystal, but the temperature gradient generated in the width direction is small.

Therefore, this method is considered to be superior from the viewpoint of the optical distortion generated in the slab type laser medium. In this way, by obtaining a uniform excitation distribution, the distribution of heat generation becomes uniform, and by making the direction of the cooling water the length direction of the slab type laser medium, non-uniformity in the width direction will not occur. It is possible to create a simple state. However, even if such a situation is realized,
There have been unsolved problems associated with side rails that contact slab-type laser media.

That is, theoretically, assuming that the side rail does not generate heat even when receiving the excitation light, the side rail has a characteristic of "low thermal conductivity and high heat insulating effect". That is enough. However, in reality, the side rails generate a considerable amount of heat in response to the excitation light, and accordingly the temperature rises around the widthwise end faces of the laser oscillation medium, the heat is transmitted to the laser oscillation medium, and the thermal lens effect is induced. The beam quality may be deteriorated.

What is particularly problematic here is that how heat is transferred from the side rail to the laser oscillation medium is greatly affected by the condition between the side rail and the laser oscillation medium, and this condition is This means that it is not possible to realize a stable laser oscillation medium over the entire length by simple means.

The method of fixing the side rails to the laser oscillation medium by using an adhesive is simple, but conventionally, the adhesive layer is formed over the entire length of the side rails, the laser oscillation medium, and the laser oscillation medium. As a result, the adhesive layer has a non-uniform thickness at an unspecified location, which causes a heat flow different from other locations, making it difficult to suppress the thermal lens effect.

A method of mounting means for forcibly controlling the temperature of the side rail from the outside has also been proposed (see Japanese Patent Laid-Open No. 2-159779).
Such a method not only complicates the structure of the apparatus, but also causes a problem that control is required to change the temperature of the side rail according to the operating conditions. Also,
There is also a method of maintaining the close contact between the two by relying on a mechanical pressing means instead of an adhesive, but there is a gap between the two and the condition between the side rail and the laser oscillation medium (good or bad contact). In order to keep constant, a very large mechanism is required, and when the pressing force is increased, the problem of stress applied to the laser oscillation medium also arises.

[0018]

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems of the conventional LD pumped slab type solid state laser generator. That is, the present invention solves, with a simple configuration, a problem that occurs in the LD-pumped slab-type solid-state laser generator in relation to the side rails that are arranged in contact with both end surfaces in the width direction of the slab-type solid-state laser oscillation medium. Intended to do.

[0019]

DISCLOSURE OF THE INVENTION The present invention provides a slab-type solid-state laser oscillating medium and two slab-type solid-state laser oscillating medium, which are arranged in contact with each other at both end portions in the width direction and have a heat insulating effect. An LD including a rod-shaped side rail, an optical resonator arranged in a length direction of the slab-type solid-state laser oscillation medium, and a semiconductor laser arranged as a pumping light source in a lateral direction of the slab-type solid-state laser oscillation medium. It is applied to a pumped slab type solid-state laser generator.

In one basic configuration of the invention,
As a means for maintaining the contact between each side rail and the slab type solid-state laser oscillation medium, only partial regions near both ends of the contact surface are bonded with an adhesive. In another basic configuration of the present invention, as means for maintaining contact between each of the side rails and the slab-type solid-state laser oscillation medium, partial regions near both ends of the contact surface, and
One or more partial regions separated from the partial region are bonded with an adhesive.

In any of the basic configurations, the contact is maintained by the adhesive only in the partial areas including the vicinity of both ends of the contact surface. Therefore, it is sufficient to control the thickness of the adhesive layer only in the narrow adhesive region, and the conditions between the side rails and the slab-type solid-state laser oscillation medium are more stable than the conventional adhesive bonding over the entire length. Much easier.

Here, it is preferable that a step for forming an adhesive layer on the side rail side is provided in a bonding region between each side rail and the slab type solid-state laser oscillation medium. As a result, it is possible to enhance the adhesive force and improve the adhesiveness between the medium and the side rail in the non-adhesive portion.

As a material for forming the side rail, it is preferable to use, for example, mullite ceramics, zirconia ceramics, or a material having a thermal conductivity similar to these. This material selection is very advantageous in reducing the temperature gradient in the widthwise end face portion of the slab type laser medium and reducing the resulting thermal lens effect.

As the adhesive, it is preferable to use, for example, a material containing silicon as a main component. Since the adhesive composed mainly of silicon has the property of becoming flexible after curing, even if the side rail or slab type laser medium expands due to the temperature rise during excitation, the adhesive part or slab type laser The mechanical strain applied to the medium can be reduced as much as possible.

In the process of attaching the side rail to the slab-type solid-state laser oscillation medium as an auxiliary means for enhancing the adhesion in the non-adhesion region in the contact surface between the slab-type solid-state laser oscillation medium and the side rail. A pressing unit using an elastic member may be further provided. Also in this case, since the basic fixing relationship between the two is secured by the adhesive, the mechanism is simple and the pressing force may be relatively small.

As described above, according to the present invention, while maintaining the advantage of the simplicity of fixing with the adhesive, the bonding area is limited to both end portions of the side rail, or in addition to the other partial area. The limitation relieves the difficult requirement of keeping the adhesive layer constant over a wide area.

[0027]

BEST MODE FOR CARRYING OUT THE INVENTION Three embodiments of the present invention (first to third embodiments) will be described below with reference to FIGS. In addition, in each of the embodiments, the basic configuration as a premise is the same as that shown in FIG.
The basic operation is as described above.

That is, the laser light 17 is generated when the slab-type solid-state laser oscillation medium 1 placed in the optical resonance space between the output mirror 9 and the rear mirror 8 is laser-excited by the excitation light (group of arrows) 16. Then, the output mirror 9 and the rear mirror 8 are reciprocated many times. In this process, a part is extracted as output laser light from the output mirror 9.

As shown in FIG. 8A, the zigzag optical path is formed in the thickness direction (± x) of the laser oscillation medium 1.
This is within the cross-section in the axial direction, so that the refractive index distribution (gradient of refractive index) generated in the same direction (± x axis direction) is canceled out, and the beam quality is kept high in the same direction (± x axis direction). Can be done.

On the other hand, in the width direction (± y axis direction),
By arranging square rod-shaped side rails (not shown in FIG. 8) having a heat insulating effect in contact with both ends of the solid-state laser oscillation medium 1 in the width direction, the temperature gradient in the width direction is suppressed and the refractive index is increased. The gradient is reduced to improve the beam quality in the width direction.

FIG. 1 shows a mode of adhesion between the side rails 2 and the slab type solid-state laser oscillation medium 1 in the first embodiment. As shown in the figure, adhesive regions 3 are set near both ends in the length direction of the slab type solid-state laser oscillation medium 1, and non-adhesive regions 4 are provided between them. However, as shown by the broken line, in order to stabilize the bonded state, it is possible to provide the parts (1 or 2 or more) S1 and S2 other than the bonding regions 3 at both ends.

The length of the bonding area 3 or S1 and S2 is determined by design in consideration of the adhesive force and the like, but generally, the total bonding area 3, S1 and S2 are considerably shorter than the non-bonding area 4 ( For example, it is preferably 1/3 or less). As the adhesive, one that is transparent to excitation light (about 800 to 820 nm) is suitable, and, for example, a photocurable resin or one containing silicon as a main component can be used.

When the photo-curing resin is selected, there is an advantage that a strong adhesive force is exhibited even in a thin adhesive layer and the length of the non-adhesive region 4 can be reduced. However, it takes time and effort to remove the side rail 2. In the excited state of the slab type laser medium 1, the adhesive layer and the slab type laser medium 1 are different due to the difference in the thermal expansion coefficient between the medium 1 and the side rails 2.
May cause distortion.

On the other hand, when an adhesive having flexibility when the temperature rises after curing, such as an adhesive containing silicon as a main component, is used, the adhesive layer and the slab type laser medium 1 are The likelihood of distortion is reduced. However, since the adhesive strength is slightly inferior, a design in which the thickness of the adhesive layer and the length of the adhesive region 3 are secured to some extent is preferable. Further, the thicker adhesive layer also means that a gap or a portion having poor adhesion is likely to be formed between the slab-type solid-state laser oscillation medium 1 and the side rail 2 in the non-adhesive region 4.

If there is such a gap or a portion having poor adhesion, cooling water will flow into the portion and disturb the peripheral temperature distribution. If it is assumed that there is this gap, it is necessary to make the size constant during the assembly process. Therefore, the gap between the slab type laser medium 1 and the side rails 2 is made as narrow as possible or eliminated so that the temperature distribution near the end face portion of the slab type laser medium 1 depends only on the material of the side rails 2. That is, a stable temperature distribution is realized, and the side rails 2 are connected to the slab type laser medium 1.
It is preferable for facilitating the step of attaching to the.

This request can be met by making a simple device. An example thereof is shown in FIG. 2 as the second embodiment. In the present embodiment, the side rail 3 is provided with a step corresponding to the adhesive portion, and the thickness of the adhesive layer 5 is absorbed by the step. With this configuration, the slab type laser medium 1 in the non-bonded portion is secured with a sufficient adhesive force.
The side rail 2 and the side rail 2 can be in close contact with each other or can be extremely narrow even if there is a gap.

This embodiment is suitable for the case where the above-mentioned adhesive containing silicon as a main component is used because the adhesive layer 5 can be taken sufficiently easily. As described above, the adhesive containing silicon as a main component exhibits flexibility at the time of temperature rise after curing, and reduces mechanical strain applied to the bonded portion and the slab type laser medium generated in an excited state.

Further, by providing the step for securing the adhesive layer 5 as in the present embodiment, in the step of adhering the side rail 2 to the slab type laser medium 1, the elastic force of a spring or the like is used to bring them into close contact with each other. In addition to improving the property, the gap (degree of close contact) generated between the side rail 2 and the slab type laser medium 1 can be always kept constant. This facilitates the assembling process, and keeps the gap (the degree of close contact) constant after the completion of the assembling and fixing with adhesion, so that the amount of the thermal lens effect generated inside the slab type laser medium 1 is generated. Can be reduced.

In the present invention, in addition to the use of the adhesive as described above, a mechanical pressing means can be provided as an auxiliary means for maintaining the contact relationship between the side rail and the slab type laser medium. An example thereof is shown in FIG. 3 as a third embodiment.
It was shown to. As shown in the figure, in the present embodiment, the holding plate 6 is arranged on the outside of the side rail 2, and the holding plate 6 is provided.
Is pressed by using a spring 7. As a result, the side rail 2 is pressed against the slab type laser medium 1 and the contact relationship between the two is strengthened.

It should be noted here that the side rail 2
Is bonded to the slab type laser medium 1 with an adhesive as in the first or second embodiment, and the holding mechanism using the spring 7 is merely an auxiliary means. . Since the basic fixing relationship between the auxiliary means and the both means is secured by the adhesive, the mechanism is simple and the pressing force may be relatively small. In addition, this structure is
It is preferable to prepare at least before curing the adhesive and wait for the curing of the adhesive to realize the contact relationship between the two.

Here, the material of the side rail 2 will be briefly described. It is assumed that the side rail 2 enhances the adhesiveness with the slab type laser medium 1 and is always in a stable state by the method described above. Under this condition, when the slab type laser medium 1 is in a uniform excitation state, the material of the side rail 2, particularly the thermal conductivity and the absorption characteristic of the excitation light, are dominant in the process of producing the thermal lens effect. It is thought to be a factor.

As the material of the side rails 2, generally, glass material such as quartz, ceramics, metal or the like can be considered, but naturally, it is preferable to select a material that absorbs less excitation light. When the absorption amount of the excitation light is large, the heat generated in the side rails 2 flows into the slab type laser medium 1 and causes a temperature gradient in the widthwise end face portion of the slab type laser medium 1. This gradient has a direction in which the temperature decreases toward the center of the medium 1. In this case, a kind of concave lens effect occurs in the slab type laser medium 1.

By the way, the light absorption amount of the side rail 2 is one factor that determines the magnitude of the lens effect, but the high and low thermal conductivity cannot be ignored. That is, it is considered possible in principle to suppress the amount of heat flowing into the medium 1 from the side rail 2 as long as the heat conductivity is sufficiently high even if the amount of light absorption is somewhat large.

On the other hand, however, the side rail 2
If a material whose thermal conductivity is significantly different from the thermal conductivity of the slab type laser medium 1 is adopted, the thermal lens effect becomes constant in the state where the thermal stable state is reached, but when the beam is turned on (laser In the process of transitioning from the non-excited state to the excited state (e.g., at the start of oscillation), the thermal lens effect is greatly disturbed. That is,
Due to the difference in how the side rails 2 and the slab type laser medium 1 warm up, a complicated thermal lens effect is produced in a few seconds to reach a stable state.

Therefore, after all, it is desirable that the material of the side rail 2 has a thermal conductivity as close as possible to the slab type laser medium 1. From this viewpoint (similarity of thermal conductivity), the characteristics of four materials, that is, quartz, mullite ceramics, undoped YAG, and alumina ceramics were examined in consideration of the above-mentioned small amount of heat generation. .

First, the thermal conductivity of each material is as shown in the graph of FIG. As you can see from the graph, quartz,
The thermal conductivity increases in the order of mullite ceramics, undoped YAG, and alumina ceramics. Among these materials, quartz and undoped YAG are transparent bodies, and mullite ceramics and alumina ceramics are white reflectors, but both have extremely low absorptance with respect to excitation light. Therefore, it is considered that the amount of heat generated during excitation is small.

Then, these four kinds of materials were actually adhered to a slab type Nd: YAG crystal, and the amount of generated thermal lens was measured. The measuring method will be briefly described below with reference to FIG. According to the first embodiment described above, the side rail 2 is adhered to the slab type laser medium (doped YAG laser crystal) 1 and arranged in the optical resonator constituted by the rear mirror 8 and the output mirror 9. Furthermore, the rear mirror 8
A plate 10 having a row of small holes is arranged on the outer side of, while a dichroic mirror 14 and a camera 19 are arranged on the outer side of the output mirror 9.

The dichroic mirror 14 is a He--Ne
It transmits the laser beam 11 and reflects the YAG laser beam, and is arranged at an angle of 45 degrees as shown. Then, the power meter 12 for monitoring the oscillation state of the laser oscillation medium 1 is arranged at a position where the light reflected by the dichroic mirror 14 is received. Although illustration is omitted, cooling water was circulated as usual.

With this arrangement, He from the back of the plate 10
-Emit the Ne laser beam 11. The He-Ne laser light 11 that has been turned into a plurality of laser beams by the plate 10 is optically deflected according to the magnitude of the thermal lens effect when passing through the inside of the laser medium 1. This deflection amount is measured by the camera 19
By observing with, the magnitude of the thermal lens effect can be indirectly known.

FIG. 6 shows the results of measuring the amount of thermal lens generated in the arrangement of FIG. 5 at the time of non-oscillation and at the time of oscillation. At the time of oscillation, the material of the side rail 2 is changed to measure the thermal lens generation amount (the material of the side rail 2 is substantially irrelevant at the time of non-oscillation).

In FIG. 6, the closer the dot sequence pattern is to the non-oscillation pattern, the smaller the thermal lens generation amount. According to this result, the higher the thermal conductivity, the more the point cloud pattern moves to the center of the medium.
This is understood to be due to the factor of the thermal conductivity of the side rail 2 described above.

This phenomenon will be supplementarily described with reference to FIG. The graph of FIG. 7 shows the slab type laser oscillation medium 1
3 shows the temperature distribution in the width direction of. First, the curve (a) represents a state in which the material of the side rail 2 has a high thermal conductivity, and in this case, cooling is performed with a strength exceeding the amount of heat generated in the side rail 2. That is, from the slab type laser medium 1 to the side rail 2
The state is shown in which heat is transferred to the side.

In this state, as a result, a gradient in which the temperature rises from the end face in the width direction of the slab type laser medium 1 toward the medium center occurs. This results in a convex lens effect. This is because the refractive index of the Nd: YAG crystal mainly depends on the temperature. The lower the temperature, the lower the refractive index, and the higher the temperature, the higher the refractive index. To be precise, stress also affects the refractive index, but the factor is small.

On the other hand, when the side rail 2 has a low thermal conductivity, the calorific value of the side rail 2 exceeds the cooling effect, and the temperature distribution shown in the curve (c) is generated. It will be. In this state, a heat flow from the side rail 2 to the slab type laser medium 1 is generated, and as a result, the concave thermal lens effect is generated.

Further, when the balance between the calorific value of the side rail 2 and the cooling effect is in agreement, the heat transfer between them does not occur, and the temperature distribution shown by the straight line in (c) is generated. . In this case, in principle, an ideal state in which the thermal lens effect does not occur is realized.

Comparing the above four types of materials,
It was found that the thermal lens effect that occurs when mullite ceramics is used is extremely small. When these experimental results are comprehensively considered, not only when mullite ceraminex is used as the material of the side rails 2 but also when materials other than mullite ceraminex are used, materials having equivalent thermal conductivity are used. It is obvious that the thermal lens effect can be expected to be reduced in a manner similar to that.

Further, in the case of using mullite ceramics, even if the input condition (oscillation output of the laser oscillating medium 1) changes, the thermal lens generation amount does not change significantly. This is considered to mean that the use of mullite ceramics as the material of the side rails 2 realizes an optimum state for reducing the thermal lens effect with respect to a wide range of changes in excitation conditions.

[0058]

According to the present invention, in the LD-excited slough-type solid-state laser generator, the side rails provided to suppress the thermal lens effect in the width direction of the laser oscillation medium are arranged in contact with the sluff-type solid-state laser medium. about,
While maintaining the advantage of simplicity of fixing with an adhesive,
Freed from the difficulty of keeping the adhesive layer constant over a wide area.

[Brief description of drawings]

FIG. 1 is a diagram for explaining a first embodiment of the present invention.

FIG. 2 is a diagram for explaining a second embodiment of the present invention.

FIG. 3 is a diagram for explaining a third embodiment of the present invention.

FIG. 4 is a graph showing the thermal conductivity of an example of the material of the side rail.

5A and 5B are views showing a method of measuring a thermal lens effect of a slab type laser medium, where FIG. 5A is a state observed when no oscillation is performed, and FIG. 5B is a state observed when oscillation is performed using a quartz side rail. State, (c) is a state observed during oscillation using a mullite ceramic side rail, (d)
Shows a state observed during oscillation using a side rail made of undoped YAG, and (e) shows a state observed during oscillation using a side rail made of alumina ceramics.

FIG. 6 is a diagram showing a measurement result of a thermal lens effect.

FIG. 7 is a diagram showing a state of temperature distribution in an end face portion in the width direction of a slab type laser medium.

8A and 8B are diagrams showing a basic arrangement of a slab type solid-state laser generator, wherein FIG. 8A shows a cross section along a thickness direction and FIG. 8B shows a cross section along a width direction.

FIG. 9 is a diagram illustrating a method of measuring an excitation distribution in a width direction of a slab type laser medium.

FIG. 10 is a graph for explaining a result of measuring an excitation distribution in a width direction of a slab type laser medium in an LD pumped slab type solid state laser oscillator.

[Explanation of symbols]

1 Slab-type solid-state laser oscillation medium 2 Side rail 3 Adhesive part 4 Non-adhesive part (contact part) 5 Adhesive layer 6 Holding plate 7 Spring 8 Rear mirror (planar mirror) 9 Output mirror (concave mirror) 10 Small aperture row plate 11 He- Ne laser light 12 Power meter 13 Semi-transparent screen 14 Dichroic mirror (only He-Ne laser light is transmitted) 15 Output measuring device 16 LD excitation light (arrow group) 17 Laser light 18 Minute Nd: YAG laser light 19 Camera

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Claims (6)

[Claims] 1. A slab-type solid-state laser oscillation medium, two bar-shaped side rails having a heat insulating effect, which are arranged in contact with both end portions in the width direction of the slab-type solid-state laser oscillation medium, respectively, and the slab. Type optical resonator arranged in the longitudinal direction of the solid-state laser oscillation medium, and a semiconductor laser arranged as a pumping light source in the lateral direction of the slab-type solid-state laser oscillation medium,
In the LD-pumped slab-type solid-state laser generator equipped with, as means for maintaining contact between each of the side rails and the slab-type solid-state laser oscillation medium, only partial regions near both ends of the contact surface are bonded with an adhesive. Characterized by that
LD pumped slab type solid state laser generator. 2. A slab-type solid-state laser oscillation medium, two bar-shaped side rails having a heat insulating effect, which are arranged in contact with both end surfaces in the width direction of the slab-type solid-state laser oscillation medium, respectively, and the slab. Type optical resonator arranged in the longitudinal direction of the solid-state laser oscillation medium, and a semiconductor laser arranged as a pumping light source in the lateral direction of the slab-type solid-state laser oscillation medium,
In the LD-pumped slab type solid-state laser generator provided with, as means for maintaining contact between each of the side rails and the slab type solid-state laser oscillation medium, partial regions near both ends of the contact surface, and the partial regions Characterized in that the separated one or more partial regions are adhered by an adhesive,
LD pumped slab type solid state laser generator. 3. A step for forming an adhesive layer on the side rail side is provided in a bonding area between each side rail and the slab type solid-state laser oscillation medium. The LD pumped slab type solid-state laser generator according to claim 1 or 2. 4. The LD-excited slab type according to claim 1, wherein mullite ceramics or zirconia ceramics is used as a material forming the side rails. Solid-state laser generator. 5. The LD-excited slab type adhesive according to claim 1, wherein the adhesive is a material containing silicon as a main component. Solid-state laser oscillator. 6. A step of attaching the side rail to the slab-type solid-state laser oscillation medium in order to enhance adhesion in a non-bonding region in a contact surface between the slab-type solid-state laser oscillation medium and the side rail, A pressing means using an elastic member is further provided,
L described in any one of claims 1 to 5
D-pumped slab type solid-state laser oscillator.