JP2003048249A - Sealing structure for vacuum evacuation continuous laminating apparatus for film, sheet or the like and continuously laminating apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To propose a continuously laminating apparatus which has a simple structure of a sealing part of partition chambers and an absolutely sealing effect so as to form a vacuum partition chamber to completely deaerate between a plurality of sheets (films) having a rugged surface on at least one sheet when the sheets are laminated, an economic sealing structure and which utilizes the sealing structure and to also provide an efficient apparatus for continuously impressing and laminating the two or more sheets by a vacuum evacuation simultaneously by upper and lower stages by utilizing the sealing structure. SOLUTION: The continuously laminating apparatus comprises a pressure contact member 17 made of a superelastic material such as a silicon rubber or the like having a length longer than a width of each of the sheets mounted at front and rear distal end faces of a bearer 9 of the sheets to be laminated of a cylindrical slide frame 12 for forming the vacuum partition chamber, and a ring-like packing 23 such as an O-ring or the like circulating a lower surface of the frame by passing through a groove 19 formed in a length direction of the contact member mounted in the frame.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to at least one sheet (film) having concavities and convexities such as a laminated printed circuit board sheet having a concavo-convex surface formed by etching and its cover sheet. The present invention relates to a seal structure in a device for continuously pressure-bonding sheets (films) under high vacuum and a continuous bonding device using this seal structure.

[0002]

2. Description of the Related Art For example, when two or more flat sheets are stuck together, it is possible to sandwich them between two heater rollers and remove the air remaining between the sheets by the rotational pressing pressure to perform thermocompression bonding. However, when another sheet is pasted on a circuit board sheet having a circuit board surface with a predetermined interval and a circuit configuration, it is impossible to adhere the sheet by a heater roller, and even a small amount of air bubbles may be generated between the sheets. If it remains, an unbonded portion is generated, which causes problems such as oxidative corrosion due to residual air and circuit disconnection.

Therefore, in such a case, in order to perform complete deaeration between the sheets, shutters that move up and down by cylinders are attached to the left and right side walls of a fixedly installed compartment, and the shutters come into contact with each other when the shutters descend. An O-ring, lip packing or elastic rubber is attached to the lower end surface of the shutter and its receiving surface to form a vacuum compartment, and when the shutter rises, the sheets to be bonded are intermittently fed into the room, and left and right when bonding. The shutter is closed and the sheet is sandwiched at the lower end, the interior of the chamber is evacuated by a vacuum pump, and the piston rod of an air cylinder etc. that fits tightly to the ceiling plate of the compartment slides down to heat and press the sheet. There is also a way to do it.

However, according to this method, it is difficult to seal the vacuum around the shutter, the sheet is deformed when the sheet is strongly sandwiched by the shutter, the vacuum is difficult when the sheet is weakly sandwiched, and the sheet surface is soiled when grease is used together. It will also happen. Furthermore, since the shutter constantly slides up and down, the seal packing around the shutter is damaged or worn, so a high vacuum cannot be easily obtained in the compartment, and since the volume of the vacuum compartment is large, a high vacuum is achieved. However, there is a problem in that it takes a long time to reach the above condition, a large vacuum pump is inevitably required, and the equipment becomes expensive.

Therefore, the present applicant previously filed Japanese Patent Application No. 2000-3.
With No. 52250, formation of compartments and high vacuum in compartments can be realized in a short time, and sheets such as printed circuit board sheets which are wound around a drum and intermittently delivered and other sheets are completely deaerated. On the other hand, a vacuum drawing and continuous bonding method and device have been proposed which are capable of forming a vacuum compartment without sticking the sheets continuously without deforming the holding surface of the sheets or contaminating them with grease or the like.

This device uses a super-elastic material such as silicon rubber which is close to a gel to secure a high airtightness and realizes a high vacuum in the compartment. As the method of using the super elastic body, the super elastic body is attached to the lower part of the sliding frame for forming the compartment, or the super elastic body is sandwiched between the seats, and the other parts are formed by the normal elastic body. Since it is used separately from the rubber packing, in the former case, an expensive superelastic body is used more than necessary, and in the latter case, the airtightness of the boundary between the superelastic body and the rubber packing is ensured. Remained the problem.

[0007]

According to the present invention, a super elastic body such as silicon rubber is used for a sheet holding portion in forming a vacuum compartment, but a normal rubber including this super elastic body portion is used. By attaching a ring-shaped packing such as an O-ring made around the lower surface of the sliding frame, the structure of the sealing portion is simple and the sealing effect is more perfect than the above, and the sealing structure is economical. It proposes a continuous laminating apparatus utilizing the structure.

The present invention also proposes an apparatus for simultaneously and continuously press-bonding two or more sheets at the same time in two upper and lower stages by vacuuming, utilizing the above-mentioned sealing structure.

[0009]

That is, the first aspect of the present invention is to:
A cylinder-shaped sliding frame is tightly fitted vertically slidably on the outer peripheral side of a pressing block that moves up and down toward the pedestal by a cylinder, and at least one of which has an uneven surface to be bonded When a continuous sheet of the above is intermittently fed to the pedestal, the sliding frame body first presses against the pedestal surface to fix the front and rear in the moving direction of the sheet, and the pedestal surface and the inner peripheral surface of the sliding frame are pushed. A chamber surrounded by the tip surface of the contact block is formed, and then the pressing block is moved and pressure-contacted while the chamber is evacuated or bonded to a predetermined portion of the sheet under high vacuum. In the vacuum suction continuous laminating apparatus described above, in the cylindrical sliding frame for forming the vacuum compartment, the front and rear end surfaces in the moving direction of the pedestal surface of the sheets to be laminated are longer than the width of the sheets. Ultra such as silicone rubber Pressing member is attached made of sexual body, and the sliding frame one round the frame body lower surface to pass through the groove formed in the longitudinal direction of the pressure contact member around the O
The present invention relates to a seal structure in a vacuum drawing continuous laminating apparatus, which is characterized in that a ring-shaped packing such as a ring is attached.

According to a second aspect of the present invention, a mounting plate horizontally fixed to a lower end of a rod of a pressing cylinder arranged above is a support plate to which a pressing block is mounted on a lower side, and the supporting plate is horizontally arranged via a hanging rod. On the lower surface of the mounting plate, a push-down cylinder having a push-down plate horizontally fixed to the lower end of the rod is fixed downward, and the push-down plate is slid up and down tightly on the outer peripheral side surface of the pressing block. A tubular thick sliding frame body that can be freely fitted is connected by a connecting rod, and below the pressing block, a cradle for intermittently feeding the continuous sheet to be bonded to the upper surface is installed. Upper and lower pressure contact members made of a super elastic material such as silicon rubber longer than the width of the sheet are attached to the front and rear lower surfaces of the slide frame in the sheet moving direction, and the length of the pressure contact member is set on each slide frame. Passing through the groove formed in the direction A ring-shaped packing such as a peripheral O-ring is attached, and the slide frame is lowered onto the top surface of the cradle in any of the cradle, the sliding frame body or the pressing block, and the sliding frame is placed on the cradle. A film, a sheet, etc., characterized in that a conduit for vacuuming is formed such that an end opening faces the compartment when the compartment surrounded by the inner peripheral surface and the lower surface of the pressing block is formed. The present invention relates to a vacuum drawing continuous bonding device.

According to a third aspect of the present invention, a pedestal having pressure contact surfaces on both upper and lower sides is arranged and fixed at an intermediate portion of an upper cylinder fixed downward and an upper cylinder fixed downward. Pushing blocks are attached to the tips of the rods of the cylinders, and sliding frames are tightly fitted vertically slidably on the outer peripheral surfaces of both blocks and formed on the driving cylinder side of each pushing block. A plurality of sliding pins, the tips of which are fixed to the base end of the sliding frame, are inserted through the outward flange, and compression coil springs are respectively provided between the flange of the pins and the base of the frame. Is wound around or is attached with an elastic material such as cushion rubber and is urged so that the tip end surface of each sliding frame body is pushed toward the above-mentioned cradle side from the tip end surface of the pressing block. On the front and rear tip surfaces in the moving direction of the sheets to be attached on the table A pressure contact member made of a super elastic material such as silicon rubber longer than the width of the sheet is attached, and each slide frame passes through a groove formed in the length direction of the pressure contact member and the front end face of the frame body is passed. A ring-shaped packing such as an O-ring that makes one round around is attached to at least one of the cradle, the pressing block, and the sliding frame body, and the sliding frame body is pressed against the upper and lower surfaces of the cradle. The present invention relates to an upper and lower two-stage continuous laminating apparatus for vacuuming films, sheets, etc., characterized in that a conduit for vacuuming is formed with an end opening facing the inside of the compartment.

Embodiments of a seal structure of the present invention and a continuous laminating apparatus using this seal structure will be described below with reference to the drawings.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 FIG. 1 is an overall front explanatory view showing an example of a continuous laminating apparatus for laminating two sheets under vacuum by utilizing the seal structure of the present invention. The drive mechanism itself is exactly the same as that described in the second embodiment of the above-mentioned Japanese Patent Application No. 2000-352250 by the present applicant.

That is, reference numeral 1 is a pressing cylinder installed downwardly above the frame 2, a mounting plate 4 is horizontally fixed to the lower end of the rod 3, and hanging rods 5 are suspended at four corners of the mounting plate 4. The four corners of the support plate 8 to which the upper heater plate 6 and the pressing block 7 are fixed are hung below, and the pressing block 7 is vertically movable together with the upper heater plate 6 by the cylinder 1.

Reference numeral 9 is a pedestal which is a lower jig, and a lower heater plate 10 is provided on the lower surface of the pedestal, and is installed on a base 11 so as to face the pressing block 7 which is an upper jig immediately above. The upper surface of the pedestal 9 is wider than the lower surface of the pressing block 7 in the front, rear, left and right directions.

Reference numeral 12 denotes a thick-walled rectangular frame-shaped sliding frame body having the shape of the pressing block 7. The frame body 12 is vertically slidably fitted on the outer peripheral side surface of the block 7, and Frame 12
When slides down on the outer peripheral surface of the block 7 and comes into contact with the upper surface of the pedestal 9, it forms the side wall of the vacuum compartment 33 described later.

Reference numeral 13 denotes a push-down cylinder for driving the sliding frame 12 which is attached and fixed downward to the center of the lower surface of the mounting plate 4. The cylinder 13 has the same axial center as the upper press cylinder 1. A push-down plate 15 is attached to the lower end of the rod 14.
Is installed and fixed horizontally. 16 is the sliding frame 12
A plurality of (two or four) connecting rods for moving up and down, the upper end of which is fixed to the push-down plate 15, and the intermediate portion is provided with a support plate 8 (in the drawing, the upper heater plate 6 and the pressing block). 7 also the outer flange of the upper end portion is inserted, and the lower end is fixed to the upper surface of the sliding frame body 12, whereby the sliding frame body 12 is pushed by the drive of the push-down cylinder 13 via the connecting rod 16. The outer peripheral surface of the contact block 7 is slid up and down.

Reference numeral 17 is a sheet 29, 3 of the sliding frame body 12.
From a super elastic body such as a gel-like silicon rubber fitted and fixed to the lower surface of the frame body 12 so as to project slightly downward from the lower surfaces of the two sides (left and right sides in FIG. 1) to which 0 is clamped and fixed. Is a rod-shaped upper pressing member, and the member 17 is slightly longer than the width of the two sheets 29 and 30 to be bonded together, and has the same width at the position facing the upper pressing member 17 on the upper surface of the pedestal 9. The lower pressure contact member 18 made of a super elastic body is fitted and fixed.

The upper and lower press-contact members 17, 18 are, for example, substantially trapezoidal in cross section, and are fitted in the fitting grooves 19, 20, respectively, and, for example, when the members 17, 18 are molded, a predetermined interval is provided at the bottom. A plurality of metal screw-attached metal bushes 21 are inserted, and the members 17, 18 are fitted into the fitting grooves 19, 20.
Bolt to the inner bottom (see Figure 3).

The sliding frame 12 of the upper pressure contact member 17
One concave groove 22 is formed in the lengthwise direction on the end face (lower end face) protruding from the lower surface, and the lower surface of the sliding frame 12 is fitted into the concave groove 22 so as to make one round. A part of a ring-shaped packing 23 such as an O-ring made of an elastic material such as rubber as a seal packing is fitted and inserted. The groove 2
The depth of 2 has such a depth that the inserted O-ring 23 does not dive and is not exposed to the outside of the groove 22. As the ring-shaped packing, in addition to an O-ring having a round cross section, the cross section has a substantially V shape.
It is also possible to use different shapes such as a die, a substantially X-shape, a substantially Y-shape, and a substantially L-shape.

Numeral 24 is an O-ring mounted near the inner peripheral surface of the sliding frame 12 so as to make one round to secure the airtightness of the sliding surface with the pressing block 7, It is of the same quality as the O-ring 23 on the lower surface of the sliding frame 12 described above.

As a method of fixing the upper and lower pressure contact members 17 and 18 to the fitting grooves 19 and 20 by the above-mentioned super elastic body, the metal bush 2 is attached to the pressure contact members 17 and 18 themselves.
In addition to the method of casting 1 (FIG. 3), the members 17, 1
A stepped hole (a stepped hole having a concave groove 22 in the upper member 17) penetrating vertically from the upper surface of 8 may be opened, and a bolt 25 may be inserted and fixed from the upper surface (FIG. 4). See FIG. 4, which shows the fixation of the upper member 17.).

Further, as other fixing means, a holding piece 26 whose tip is inversely inclined like an eaves as shown in FIG. 5 is used without opening the above-mentioned hole (stepped hole).
The left and right upper edge portions forming the concave groove 22 of the upper press-contact member 17 fitted in the fitting groove 20 on the front end surface of the sliding frame 12 are notched, and the above is formed in the concave portion provided on the front end surface of the frame body 12. Foot piece 2
The base portion of 6 is fixed with a screw, and the tip end portion thereof is projected upward from the notch into the concave groove 22 of the pressure contact member 17, whereby the pressure contact member 17 is pressed by the lower surface of the holding piece 26, and at the same time,
By pressing the O-ring 23 which is inserted through the groove 22 with the eaves-shaped tip of the pressing piece 26, it is possible to prevent the upper pressing member 17 from falling off without directly fixing the bolt.

Next, a case will be described in which two sheets are evacuated and continuously bonded by the apparatus shown in FIG. A pair of upper and lower take-up drums 27 and 28 are arranged on the side of the pedestal 9. For example, a printed circuit board having a circuit structure in which irregularities are formed at predetermined intervals by etching or the like on one of the drums 27 is provided. A continuously formed printed circuit board sheet 29 is wound, and the other drum 28 is wound with a cover sheet 30 that covers the printed circuit board sheet 29 and has a bonding surface with a thermoplastic adhesive applied. Has been done.

The two sheets 29 and 30 are sandwiched by a pair of upper and lower pitch feed rollers 31 and 31 which are intermittently rotated and are arranged on the opposite sides of the pedestal 9. Is being sent out.

Reference numeral 32 denotes one or a plurality of conduits each having one end port opened on the upper surface of the pedestal 9. The conduit 32 passes through the thickness of the pedestal 9 to reach the other end port of the side surface, and the other end port is oil. It is connected to a vacuum pump (not shown) such as a pump. The end opening on the upper surface of the receiving base 9 of the conduit 32 is inside the rectangular frame of the upper pressing contact member 17 when the upper pressing contact member 17 is pressed against the upper surface of the receiving base 9, and the sheets 29, 30 are It must be opened outside the width (that is, outside the sheet movement locus). Further, the place where the conduit 32 is formed is not limited to the pedestal 9 and can be provided on the pressing block 7 and / or the sliding frame 12 above if it is exposed to the vacuum chamber 33 described later. However, the end opening is at the inner position of the frame body 12 and the sheets 29, 30 as in the above.
It is necessary to open it outside the passage position of.

However, when the upper and lower sheets 29, 30 are intermittently fed to the upper surface of the pedestal 9 at the same speed by the apparatus shown in FIG. 1, first, the push-down cylinder 13 is actuated and the sliding frame 12 is moved. The inner pressing block 7 descends while sliding on the outer peripheral surface thereof, and its lower end is pressed against a portion near the upper edge of the pedestal 9 through the upper and lower sheets 29 and 30 (see FIG. 6).

As a result, the two sheets 29 and 30 are attached to the lower surface of the sliding frame 12 and the upper press-contact member 17 of the super elastic body, which is mounted on the pedestal 9 so as to be orthogonal to the traveling direction before and after the traveling direction. It is strongly sandwiched and closely adhered to the lower pressure contact member 18 on the upper surface of the pedestal 9, and at the same time, the upper and lower pressure contact members 17, 1
The parts other than 8 are in direct contact with the surface of the pedestal 9 facing the rubber O-ring 23 attached so as to go around the lower surface of the sliding frame 12.

When the two sheets 29, 30 are clamped by the upper and lower pressure contact members 17, 18, the O-ring 23 passing through the groove 22 in the lower end surface of the upper pressure contact member 17 has a lower pressure contact member 18 of the lower pressure contact member 18. The degree of protrusion from the surface of the cradle 9 and the sheet 29
Depending on the thickness of 30, it bends somewhat (Fig. 7 (a),
(B)) Since the O-ring 23 in the concave groove 22 is wrapped by the vertical pressing members 17, 18 made of silicon rubber or the like and absorbed without a gap, the vertical pressing members 17,
The pinching point by 18 is completely sealed (Fig. 8 (a)).
~ (C)).

In this way, the sheets 29 and 30 are clamped and fixed by the upper and lower pressure contact members 17 and 18, and
When the lower surface of the sliding frame 12 is brought into close contact with the upper surface of the pedestal 9 with high airtightness over the entire surface, an airtight compartment 33 surrounded by the inner peripheral surface of the frame 12 and the lower surface of the pressing block 7 is formed on the pedestal 9. (Fig. 6).

Therefore, the inside of the chamber 33 is evacuated through the conduit 32 from the end opening facing the chamber 33 on the upper surface of the pedestal 9 to obtain a high degree of vacuum (for example, 1.33 × 10 ⁻³ MPa or more, that is, 1). Upper and lower sheets 29, 30
Air bubbles existing between them are removed, or while the air bubbles existing between them are removed, the upper pressing cylinder 1 is operated to press the pressing block 7
By sliding down in the high vacuum compartment 33, the sheets 29 and 30 are sandwiched between the pedestal 9 and the pressing block 7 to be heated and pressed, thereby thermocompression bonding under high vacuum.

When the bonding of the two sheets 29, 30 is completed in this way, the compartment 33 is returned to atmospheric pressure, and then the press cylinder 1 is reversely operated to raise the pressing block 7 and move downward. The cylinder 13 is also reversely operated and the sliding frame 12 is also lifted to return to the original position (FIG. 1). On the other hand, the portions of the upper and lower sheets 29 and 30 that have been bonded together are sent to the side (to the right in FIGS. 1 and 6) by a predetermined distance, and are separated from the cradle 9. It is sent to the table 9 and stopped, and the bonding is performed in the same manner as above.

In the apparatus shown in FIG. 1, the super-elastic pressure contact member is also attached to the lower surface of the sliding frame 12 and the upper surface of the pedestal 9, but the pressure contact member 18 on the upper surface of the pedestal 9 may be omitted. Is.

Embodiment 2 FIGS. 9 to 13 are a perspective view, a front view and an operation explanatory view showing another apparatus of the present invention, showing an apparatus for simultaneously performing continuous laminating of sheets by evacuation in two upper and lower stages. ing. In this figure, the feeding directions of the upper and lower sheets to be laminated are perpendicular to each other.
Of course, the upper and lower stages may be configured so that the sheets move in the same direction.

The pedestal 9 is fixed so as to be positioned substantially in the center of the frame 2 and has a heater inside, and the upper and lower surfaces of the pedestal 9 become the receiving surfaces when the sheets are laminated. Frame 2
Lower cylinders 34 are fixed upwards on the lower surface of the base 11 of the frame 2 so as to face the upper cylinders 1 fixed downwards above the heater plate 6.
The upper pressing block 7 and the lower pressing block 35 provided with are directly fixed. Further, sliding frame bodies 12a and 12b are attached to the outer peripheral surfaces of the upper and lower blocks 7 and 35, respectively, and a vertically symmetrical press contact mechanism is arranged with the pedestal 9 at the center interposed therebetween.

Reference numeral 36 denotes an outward flange 7a, 35a formed on the base of each of the upper and lower pressing blocks 7, 35 and the heater plate 6, and the tip is fixed to the base of the sliding frame 12a, 12b. A plurality of (for example, four) slide frames are attached to each frame body, and the outward flange 7 of the pin 36 is attached.
A compression coil spring 37 is wound around a portion between a and 35a and the base ends of the sliding frame bodies 12a and 12b, and the tips of the upper and lower sliding frame bodies 12a and 12b are extruded into blocks 7 and 3.
It is urged so as to project to the front side (that is, the pedestal 9 side) from the 5th surface. An elastic material such as cushion rubber may be attached instead of the compression coil spring 37.

Reference numeral 38 designates a base portion of the pressing blocks 7 and 35 having the heater plate 6, and the driving cylinders 1 and 34 thereof.
Is a guide rod that slidably penetrates the upper frame 2 and the base 11 for fixing.

In the figure, the upper and lower two sheets 29 and 30 above the pedestal 9 move in the left-right direction, and the two lower sheets move in the front-back direction. The upper and lower press contact members 17 and 18 of silicon rubber or the like, which press and fix the front and rear in the moving direction on the upper and lower sides of the base 9, are arranged on the upper side of the pedestal 9 on the left and right sides, and on the lower side in the front and rear sides. O-ring 2 that goes through 17b and goes around once
3 is provided on the upper end surface of the lower sliding frame 12b.

However, when the two sheets 29 and 30 to be bonded are intermittently supplied to the upper surface and the lower side of the receiving table 9, respectively, the upper and lower cylinders 1 and 34 are driven first to move the upper and lower slides. With the moving frame bodies 12a and 12b protruding toward the pedestal 9, the pressing blocks 7 and 35 are brought closer to the pedestal 9 respectively (FIG. 11).

Although the two sheets 29 and 30 on the lower side of the pedestal 9 are supplied so as to contact the upper surface of the lower sliding frame 12b in the figure, they are supplied so as to be close to the lower surface of the pedestal 9. May be.

Therefore, first, the upper and lower sliding frame bodies 12a and 12b.
The pressure contact members 17a and 17b on the tip end face are in pressure contact with the pressure contact members 18a and 18b on the upper and lower faces of the pedestal 9 facing each other.
The front and rear of the moving direction of the sheets 29 and 30 are fixed in the same manner as described in the first embodiment, and the other portions are fixed to the frame body 12 respectively.
a, 12b O-rings 23a, 23b on the tip surface
By press-contacting the upper and lower surfaces, chambers 33a and 33b are formed on the upper and lower surfaces of the pedestal 9, respectively (FIG. 12).

Next, both compartments 33a, 33 are connected via conduits 32a, 32b formed in each pressing block 7, 35.
The inside of b is evacuated. The conduits for evacuating the upper and lower compartments may of course be formed on the pedestal 9 as in the first embodiment, or may be formed on the sliding frame bodies 12a and 12b.

By vacuuming the upper and lower compartments 33a and 33b, air bubbles between the two sheets on the receiving table 9 and between the two sheets below the receiving table 9 are removed or removed, and the upper and lower cylinders are further removed. While continuing to drive 1, 34, the upper and lower pressing blocks 7, 35 are moved against the compression spring 37 in the vacuum chambers 33a, 33b toward the upper and lower surfaces of the pedestal 9, and finally the upper and Lower two sheets 29, 30
By sandwiching between the pedestal 9 and the upper and lower pressing blocks 7 and 35 and applying heat and pressure, thermocompression bonding is performed under high vacuum (FIG. 13).

As described above, according to the apparatus of the second embodiment, the sliding frame bodies 12a and 12b and the pressing blocks 7 and 35 are pressed against the upper and lower surfaces of the receiving table 9 with a time difference between the upper and lower sides with the receiving table 9 sandwiched therebetween. Come in, so that the upper and lower air-tight compartments 33a, 3
When 3b is surely formed and the two sheets to be bonded are supplied to the upper and lower sides of the pedestal 9, the bubbles remaining between the two sheets can be completely removed and then pressure-bonded. It will be possible.

[0045]

EFFECTS OF THE INVENTION The present invention is as described above, and when a conventional sheet having irregularities and another sheet are bonded together,
Although it was extremely difficult to completely bond the sheets without degassing and leaving bubbles, in the present invention, among the cylindrical sliding frame bodies for forming the vacuum chamber, the sheet to be bonded is received. Pressure contact members made of a super elastic material such as silicon rubber longer than the width of the sheet are attached to the front and rear lower surfaces in the moving direction on the table upper surface (and the lower surface), and the length of the sliding frame member is increased by the length of the front and rear pressure contact members. A ring-shaped packing such as an O-ring that passes through the groove formed in the vertical direction and goes around the lower surface of the frame once is attached, and should be bonded to the pedestal by intermittently sending it at a predetermined pitch. After the sliding frame is lowered to the sheet, the above-mentioned pressure contact member is pressure-fixed to the front and back of the upper surface of the sheet in advance to form a compartment surrounding a portion to be bonded, and then completely degassed by vacuuming (or Pressing down the pushing block while degassing) Since not perform bonding by a fully sealed high vacuum compartments were can be easily formed, the sheet also becomes possible to continuously perform the bonding completely remove air bubbles having irregularities.

Further, the sealing groove of the ring packing such as the O-ring other than the super-elastic pressure contact member may be filled with vacuum sealing grease, so that there is no possibility of contaminating the sheets to be bonded together. .

Furthermore, according to the apparatus of the second embodiment in which the upper and lower layers are bonded together, the sliding frame and the pressing block are pressed against the upper and lower surfaces of the pedestal with a time lag between the upper and lower sides of the pedestal. Since airtight compartments are surely formed on the upper and lower surfaces of the pedestal, and two sheets to be bonded are supplied to the upper and lower sides of the pedestal, respectively.
Since the air bubbles remaining between the two sheets can be completely removed and then pressure-bonded, continuous degassing and pasting work can be performed more efficiently.

[Brief description of drawings]

FIG. 1 is an overall front view showing an example of a vacuum drawing continuous laminating apparatus according to the present invention.

FIG. 2 is an explanatory diagram showing an upper surface (left side) of a pedestal and a lower surface (right side) of a sliding frame.

FIG. 3 is a partially enlarged explanatory view showing a positional relationship between a sliding frame and a cradle.

FIG. 4 is an explanatory view showing a mounting relationship between a pressure contact member of a superelastic body and an O-ring on a leading end (lower surface) of a sliding frame.

FIG. 5 is an explanatory diagram showing another example of a mounting relationship between a pressure contact member of a superelastic body and an O-ring on the leading end (lower surface) of the sliding frame.

FIG. 6 is an explanatory view of the operation of the apparatus of FIG.

7 is an explanatory view of the operation of the apparatus of FIG. 1, showing a cross section of the superelastic pressure contact member in the longitudinal direction thereof, (a) before the formation of the compartment, and (b) during the formation of the compartment. Indicates.

8 is an explanatory view of the operation of the apparatus of FIG. 1, in which the superelastic pressure contact member is cross-sectioned at right angles to its length direction,
Shows the state before the formation of the compartment, (b) shows the state during the formation of the compartment, and (c) shows the state when the compartment is completed.

FIG. 9 is an overall perspective view showing another embodiment of the vacuum evacuation continuous bonding apparatus according to the present invention.

10 is an overall front view of the device shown in FIG.

11 is an explanatory view of the operation of the apparatus of FIG. 9, showing a state before operation.

FIG. 12 is an explanatory view of the operation of the apparatus of FIG. 9, showing a state in which vacuum chambers are being formed on both upper and lower sides of the pedestal.

FIG. 13 is an explanatory view of the operation of the apparatus of FIG. 9, showing a state in which the upper and lower sides of the pedestal are bonded together.

[Explanation of symbols]

1-press cylinder 2-frame 3-rod 4-Mounting plate 5-hanging rod 6-heater plate 7-Pressing block 8-Support plate 9-Cradle 10-heater plate 11-base 12-sliding frame 13-Pressing cylinder 14-rod 15-Pressing plate 16-connecting rod 17-Super elastic pressure welding member 18-Pressing member of super elastic body 19-Mating groove 20-Mating groove 21-Metal bush 22-concave groove Ring packing such as 23-O ring 24-O ring 25-volt 26-Presser piece 27-winding drum 28-Winding drum 29-Printed circuit board sheet 30-Cover Sheet 31-pitch feed roller 32-conduit 33-compartment (vacuum compartment) 34-lower cylinder 35-Lower pushing block 36-sliding pin 37-Compression Coil Spring 37-Guide rod

Claims (6)

[Claims] 1. A sticking body in which a cylindrical sliding frame is closely and slidably fitted on an outer peripheral side surface of a pressing block which vertically moves toward a cradle by a cylinder, and at least one of which has an uneven surface. When a plurality of continuous sheets to be aligned are intermittently sent to the pedestal, the sliding frame body first presses against the pedestal surface to fix the front and rear in the moving direction of the sheet and the pedestal surface and the sliding frame. A compartment surrounded by the inner peripheral surface of the body and the tip surface of the pressing block is formed, and then the pressing block is moved under pressure by moving the pressing block while performing vacuuming of the inside of the chamber under high vacuum. In a vacuum-pulling continuous laminating apparatus for laminating in a vacuum sliding continuous laminating apparatus, the front and rear end surfaces in the moving direction of the pedestal surface of the sheet to be laminated are Silicone longer than the width of the sheet A pressure contact member made of a super elastic material such as rubber is attached, and the sliding frame body passes through a groove formed in the longitudinal direction of the front and rear pressure contact members to make one round of the lower surface of the frame body. A seal structure in a vacuum drawing continuous laminating apparatus, which is characterized in that ring-shaped packings such as rings are attached. 2. The seal structure according to claim 1, wherein a pressure contact member made of the same material as the pressure contact member and having the same length is attached to a pedestal surface of the sliding frame body facing the pressure contact member. 3. The sliding frame body is configured to be vertically movable by a separately driven cylinder so that it can be pressed against the pedestal surface, or the tip of the frame body projects from the inner surface of the inner pressing block by spring pressure. 3. The seal structure according to claim 1, wherein the seal structure is configured to be moved so as to move together with the pressing block by a cylinder that drives the pressing block so that the front end of the frame body first comes into pressure contact with the pedestal surface. . 4. A mounting plate horizontally fixed to a lower end of a rod of a press cylinder arranged above, a supporting plate having a pressing block mounted on a lower side thereof is suspended horizontally through a suspending rod, and the mounting plate is mounted on the supporting plate. A push-down cylinder having a push-down plate horizontally fixed to the lower end of the rod is fixed downward on the lower face of the rod, and the push-down plate is tightly fitted on the outer peripheral side surface of the pressing block in a vertically slidable manner. It is connected to the thick sliding frame of
Below the pressing block, a pedestal for intermittently feeding a continuous sheet to be bonded to the upper surface is installed, and silicon rubber longer than the width of the sheet is provided on the front and rear lower surfaces in the sheet moving direction of the sliding frame. Etc., an upper pressure contact member made of a super elastic body is attached, and each sliding frame body passes through a groove formed in the length direction of the pressure contact member and makes an O-ring or the like around the frame front end surface. The ring-shaped packing is attached, and the slide frame is lowered to the top surface of the cradle and pushed onto the cradle, the inner surface of the slide frame and the inner surface of the cradle, the slide frame or the pressing block. A film, characterized in that it forms a conduit for evacuation such that an end opening faces the compartment when the compartment surrounded by the lower surface of the contact block is formed.
A vacuum drawing continuous laminating device. 5. A pedestal having upper and lower surfaces pressed against each other is arranged and fixed at an intermediate portion of an upper cylinder fixed downward downward and an upper cylinder fixed downward downward. Pressing blocks are attached, sliding frames are tightly fitted on the outer peripheral surfaces of both blocks so as to be vertically slidable, and the outward facing flange portion formed on the drive cylinder side of each pressing block is A plurality of sliding pins whose front ends are fixed to the base end of the sliding frame are inserted, and compression coil springs are respectively wound between the flange portion of the pins and the base end of the frame or cushion rubber. A sheet to which the sliding frame body tip end surface is pressed so as to project from the tip end surface of the sliding frame body toward the above-mentioned cradle side, and which is to be bonded on the cradle of each sliding frame body Is longer than the width of the sheet on the front and rear end faces in the moving direction of A pressure contact member made of a super elastic material such as silicon rubber is attached, and each sliding frame passes through a groove formed in the length direction of the pressure contact member and makes an O-ring around the frame front end surface once. Ring-shaped packing such as
At least one of the cradle, the pressing block, and the sliding frame body is formed by pressing the sliding frame body on both upper and lower surfaces of the cradle, and the end opening is faced in the compartment. A film characterized by being formed,
An upper and lower two-stage continuous laminating device by vacuuming sheets. 6. The press contact member of the same length made of the same material as the press contact member is attached to both upper and lower surfaces of the pedestal facing the press contact member at the front end surface of the vertical slide frame. An upper and lower two-stage continuous laminating device for vacuuming films and sheets.