JP2002368074A - Cover of housing container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cover of a housing container which can be fitted again to a container main part with high precision after it is removed from the container main part and can maintain the compatibility even if clearances between keys and key holes are set small. SOLUTION: There are provided a cover 10 which is detachably attached to a container main part to close an open front of the container main part and a latch mechanism 30 which locks and unlocks the cover 10. The cover 10 comprises a fitting case 12 fitted to the open front of the container main part, a cover plate covering the open front of the fitting case 12, and an alignment mechanism 20 for positioning the cover 10. The latch mechanism 30 comprises a pair of rotary plates which are turned to make a plurality of engagement clamps 41 protrude from/retreat into the circumferential wall of the cover 10, key holes 32 which are formed in the respective rotary plates 31 to face key insertion holes approximately, and absorbing mechanisms 50 which absorb dimensional errors between the key holes 32 and keys 65 of a cover opening/closing mechanism.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a storage container used for storing, transporting, and storing precision substrates made of semiconductor wafers, mask glass, and the like, and used in a substrate processing apparatus having a standardized mechanical interface. It relates to the lid.

[0002]

2. Description of the Related Art Various methods are conceivable for the production of precision substrates composed of semiconductor wafers. As shown in FIG.
A method called a mini-environment method is proposed in which only a local region surrounding the processing device 60 for use is made a highly clean environment, and the precision substrate W is transported and produced in a closed storage container between such environments. .

As shown in FIGS. 9 and 10, a processing apparatus 60 under the mini-environment system has a super clean (clean class 1 or less) internal environment 62 separated from an ordinary external environment 61 of a clean room. Installed in
The processing apparatus 60 includes a positioning stage 63 for a storage container installed in an external environment 61, an external environment 61 and an internal environment 62.
Opening / closing device that can open and close at least the boundary wall
OHT (not shown)
(Overhead Hoist Transfer),
It is connected to a resin container that is held and transported by an automatic transporter such as an AGV (Auto Guided Vehicle) or an RGV (Rail Guided Vehicle).

[0004] The lid opening / closing device 64 includes a rotatable T-shaped key 65, and its dimensions are standardized as SEMI standard E62 (FIMS). Then, the cover 10 of the storage container functions to engage and hold and remove the storage container from the storage container, and to fit and close the lid 10 to the opening front surface 4 of the storage container.

As shown in FIG. 1, the storage container includes a container main body 1 for aligning and storing a plurality of precision substrates W, a lid 10 for closing an opening front face 4 of the container main body 1, and a lid 10. It consists of a built-in latch mechanism that locks and unlocks,
The lid 10 is automatically opened and closed by the lid opening and closing machine 64 of the processing device 60. The lid 10 includes a fitting case that fits into the opening front face 4 of the container body 1, a covering plate that covers the opening front face 4 of the fitting case, and a pair of key insertion holes that are drilled in the covering plate. Have been. This pair of key insertion openings is a standard (SEMI
Each of the holes is pierced at a position corresponding to STANDARD E62), and is inserted into the key 65 of the lid switch 64 when the lid 10 is removed. When the key 65 is rotated by 90 °, a latch mechanism (not shown) is operated to lock and unlock the lid 10.

The latch mechanism is disclosed in Japanese Patent Laid-Open Publication No. 4-505234, Japanese Patent Laid-Open Publication No. 8-340043, and the like.
A plurality of latch plates that linearly move with the rotation of the rotating plate, and a plurality of latch plates that protrude from the peripheral wall of the lid 10 by the linear motion of each latch plate and are fitted and locked in the locking holes in the front opening 4 of the container body 1. And locking pawls. Further, the latch mechanism disclosed in Japanese Patent Application Laid-Open No. 2000-58633
A rotating plate operable externally from each of a pair of holes in the outer surface of the lid 10, a plurality of power transmitting plates interlocked with the rotation of the rotating plate, and a plurality of locking clamps interlocked with the linear motion of each power transmitting plate It is composed of

Although the dimensions of the lid switch 64 are standardized, this standard is limited to the dimensions only on the lid switch 64 side. The detailed dimensions of the container and the dimensions of the latch mechanism are uniquely designed by the container manufacturer to comply with such standards.

[0008]

The lid of the conventional storage container has a large dimensional variation because the components of the storage container are manufactured by resin molding and assembling the molded components as described above. In order to absorb such dimensional variations, the clearance on the side of the lid opening / closing device 64 must be increased, but the large clearance adversely affects the engagement between the lid opening / closing device 64 and the lid 10. Become.

For example, if the clearance on the side of the lid switch 64 is increased, even if the key 65 of the lid switch 64 is rotated by 90 °, the key hole of the rotating plate does not completely follow due to the clearance. In some cases, the rotation may be less than °. In this case, the next time the key 65
Even if an attempt is made to insert a part, it cannot be inserted because it interferes with a part that is not rotated by 90 °, or rubbing occurs at the time of contact, and contaminants are generated, thus contaminating a clean environment. For this reason, in order to smoothly open and close the latch mechanism in accordance with the lid opening / closing device 64 having the specified dimensions, the shape and dimensions between the lid opening / closing device 64 and the lid 10 are repeatedly tested. I have to adjust it.

In order to solve such a problem, the size of the storage container may be adjusted to correspond to the specific lid opening / closing device 64 to reduce the clearance. There is not a small possibility that a trouble occurs between the P.64 and the P.64. That is, as the processing apparatus 60 used in one semiconductor production process, a processing apparatus 60 of a multi-armed maker is used, and a lid opening / closing machine 64 installed in the processing apparatus 60 is also used by each processing apparatus maker. Are used. Therefore, the storage container needs to be compatible not only with a specific lid opening / closing device 64 but also with various lid opening / closing devices 64. Further, when the lid opening / closing device 64 removes and holds the lid from the container main body 1, the size of the lid 10 is equal to the size of the key 65 of the lid opening / closing device 64 and the key hole of the rotating plate.
Tend to drop slightly, so that the lid 1
There is a possibility that the dimensional error may increase due to the lowering of the lid 10 when the 0 is fitted again.

The present invention has been made in view of the above, and even when the lid removed from the container body is re-fitted, the lid can be fitted with high accuracy, and even if the clearance between the key and the key hole is set small. Another object of the present invention is to provide a lid of a storage container that can maintain compatibility.

[0012]

According to the present invention, in order to achieve the above object, a lid for closing an opening surface of a container body and a latch mechanism for locking or unlocking the lid are provided. Rotating the key inserted into the lid to operate the latch mechanism, wherein the lid is formed by fitting a fitting case fitted into an opening surface of the container body, and an opening surface of the fitting case. A cover plate for covering, and a centering mechanism for positioning the lid, a rotary plate for rotating the latch mechanism to protrude and retract a locking clamp from a peripheral wall of the lid, and a rotary plate provided on the rotary plate. It is characterized by comprising a key hole substantially facing a key insertion opening of the cover plate, and an absorbing mechanism for dimensional error between the key hole and the key.

[0013] The centering mechanism includes a plurality of window holes provided in a plurality of partition peripheral walls for partitioning the corners of the fitting case, a positioning member provided in the fitting case, and an extension extending from the positioning body. And a plurality of positioning arms exposed from the window hole. In addition, the absorption mechanism is provided between the cover plate of the lid and the rotating plate, and a cap body that guides the key to the key hole by a guide hole, and one of the rotating plate and the cap body. It is preferable to include a concave portion for absorbing a dimensional error provided, and a convex portion provided on one of the rotating plate and the cap body and fitted into the concave portion through a gap.

Here, the container body in the claims may have an opening on the front or top surface. This container body may or may not be transparent.
The number of rotating plates of the latch mechanism may be one or more. Also, haunting refers to appearing and hiding, going out and hiding. The term substantially opposed includes both strictly opposed and roughly opposed meanings. Furthermore, the storage container mainly stores one or more (for example, 13, 25, or 26) semiconductor wafers or precision substrates made of glass substrates or the like, but is not limited thereto. For example, it may store articles in the fields of machinery, electricity, electronics, and chemistry, or houseware, miscellaneous goods, and the like.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the present invention will be described below with reference to the drawings. As shown in FIGS. A front open box type container body 1 for vertically aligning and storing a plurality of precision substrates W composed of a 300 mm silicon wafer) at a predetermined pitch;
A detachable lid 10 that fits and closes the open front of the container body 1 through an endless seal gasket 11.
And a latch mechanism 30 for locking and unlocking the lid 10.

As shown in FIG. 1, the container body 1 is formed transparently using a thermoplastic resin having sufficient strength and rigidity, such as polycarbonate or polybutylene terephthalate. The robotic handle 2 gripped by a transfer robot (not shown) is selectively mounted at the center of the ceiling. The opening front face 4 of the container body 1 is formed so as to be inclined so as to gradually widen as it goes forward, and a pair of locking holes 5 are respectively formed in the upper, lower, left and right sides of the inner peripheral surface.

A plurality of support members 6 for supporting and mounting the peripheral edges of both sides of the plurality of precision substrates W are arranged side by side at a predetermined pitch on both opposing inner side walls of the container body 1. Further, both outer walls of the container body 1 are provided with a bottom rail 7 for conveyance at a lower portion thereof.
Are selectively mounted, and a manual handle 8 for manual operation is selectively mounted substantially at the center.

As shown in FIGS. 1 to 3, the lid 10 has a fitting case 12 tightly fitted to the opening front face 4 of the container body 1 via a seal gasket 11, and the fitting case 12
The cover plate 13 covers the opening front surface 4 of the container and a centering mechanism 20 for positioning the lid. The rotating plate 31 has a hollow structure. Then, the locking clamps 41 of the latch mechanism 30 are retracted, and the locking clamps 41 protruding from the projecting holes 14 are fitted and locked in the locking holes 5 of the container body 1 when the respective rotating plates 31 are rotated in the reverse direction. The dimensions of the lid 10 are, for example, 300 m
In the case of a storage container in which m wafers are aligned and stored, the lid opening / closing device 64 is set to correspond to E62 which is the SEMI standard.

The fitting case 12 of the cover 10 has four rounded corners, and a front retainer 3 for resiliently holding front edges of a plurality of precision substrates W is mounted on the back surface. Protruding and retracting holes 14 for the latch mechanism 30 are formed in the upper, lower, left, and right sides of the peripheral wall of the fitting case 12 so as to substantially face the locking holes 5. In addition, a rear retainer (not shown) may be disposed so as to face the front retainer 3.

A pair of left and right key insertion openings 15 are formed in the cover plate 13 in a rectangular shape so as to correspond to the standard of the lid opening / closing device 64. This cover plate 13
As shown in FIG. 5, fixing holes 1
6 are respectively pierced, and fasteners 17 such as screws are detachably screwed into the fixing holes 16. Each key slot 1
The dimension 5 is set so that the tolerance width with respect to the standard setting dimension of the key 65 is within ± 0.05 mm.

The centering mechanism 20 is formed of a thermoplastic resin such as polyether ether ketone, polybutylene terephthalate, and carbon fiber reinforced resin which are excellent in high rigidity and heat resistance. As shown in FIGS. 2 and 4 to 6, the centering mechanism 20 is formed in a substantially rectangular shape on a plurality of partition peripheral walls (upper wall or lower wall and side wall) that partition the four corners of the fitting case 12. Window holes 21, and holding ribs 2 formed to protrude in the opening direction from the vicinity of four corners in fitting case 12.
2, a cylindrical positioning body 23 detachably fitted to each holding rib 22, and a pair of projections extending from the outer peripheral wall of each positioning body 23, penetrating through the window hole 21, and exposed to the outside of the lid 10. Positioning body arm (in this embodiment, a total of eight) 24
It is composed of

The holding rib 22 is formed in a bottomed cylindrical shape.
A fastener 17 that has passed through the fixing hole 16 of the cover plate 13 is screwed. Further, a pair of positioning body arms 24 extending from each positioning body 23 are arranged substantially in an L-shape in a plane, and a tip end face 25 of each positioning body arm 24 located near a corner of the lid 10 is positioned in front of the opening front of the container body 1. Similarly to FIG. 4, the distal end face 25 of the positioning body arm 24 that projects through the window hole 21 and projects through the window hole 21 makes positioning contact along the inner periphery of the opening front 4 of the container body 1 when the lid 10 is closed.

As shown in FIGS. 2, 3, 7, and 8, the latch mechanism 30 is rotated so that a plurality of locking clamps 41 are inserted and retracted from the insertion and extraction holes 14 of the lid 10 via the power transmission plate 34. A pair of rotating plates 31, a key hole 32 formed in each rotating plate 31 and facing the key insertion opening 15 of the covering plate 13, and the key hole 32 and the lid opening / closing device 6.
4 and a pair of keys 65 and a dimensional error absorbing mechanism 50. The pair of rotating plates 31 are
It is pivotally supported on the left and right inside the zero fitting case 12 at intervals. Each of the rotating plates 31 is basically formed in a solid disk shape with a substantially convex cross section, and a key hole 32 for inserting a key 65 is formed in the surface of a protruding central portion in a substantially rectangular shape. And a pair of fitting grooves 33 on the outer peripheral portion thereof are approximately 180 °.
Are cut out in a semicircular shape at intervals of.

As shown in FIGS. 2 and 3, the plurality of power transmission plates 34 are basically formed in a slender, vertically long and substantially rectangular shape, and the extension of the central axis in the longitudinal direction is the rotation plate 31.
Are slidably disposed on the right, left, up and down inside the fitting case 12 via guide support pieces 35 so as to pass through the center of the fitting case 12.
In the longitudinal direction of each power transmission plate 34, a plurality of oval-shaped guide holes 36 are drilled at predetermined intervals, and in each guide hole 36, a cylindrical guide pin 37 protruding from the fitting case 12 is provided. The guide pin 37 is selectively fitted with a cylindrical rotating roller 38 which is interposed between the guide pin 36 and the resin pin to prevent the generation of resin powder due to friction.

At the center in the width direction at one end of the power transmission plate 34, a cylindrical fitting pin 39 which is loosely fitted in a fitting groove 33 provided in the rotary plate 31 is formed so as to protrude. A cylindrical rotary roller 40 that is interposed between the fitting pin 39 and the fitting groove 33 and that suppresses generation of resin powder due to friction is selectively fitted.

As shown in FIGS. 2 and 3, the plurality of locking clamps 41 are formed in a substantially T-shaped cross section having a pair of arms, and are rotatable and swingable in the vicinity of the protruding and retracting holes 14 in the peripheral wall of the lid 10. It is supported as much as possible. Each of the locking clamps 41 has one arm rotatably supported by the other end of the power transmission plate 34, and the other arm has a cylindrical rotation that prevents the generation of resin powder due to friction. A roller 42 is rotatably fitted, and the rotating roller 42 is fitted into the locking hole 5 of the container body 1 via the hole 14 when the lid 10 is closed.

The latch mechanism 30 having such a structure is provided with the key 6 of the lid opening / closing device 64 in each key insertion opening 15 on the surface of the lid 10.
5 is inserted and rotated by 90 °, each rotating plate 31 is rotated.
Rotates to slide the power transmission plate 34 in the up and down direction, in other words, in the direction of the protrusion hole 14 of the lid 10. Then, each locking clamp 41 swings while drawing an arc and protrudes from the projection hole 14 of the lid 10, and each protruding locking clamp 41 fits into the locking hole 5 of the container body 1 and
Is tightly locked.

As shown in FIGS. 7 and 8, the absorbing mechanism 50 is interposed between the cover plate 13 of the cover 10 and the rotating plate 31, and guides the key 65 to the key hole 32 through the guide hole 52 in the circumferential direction. A movable cap body 51 with backlash, a pair of clearance recesses 53 drilled at 180 ° intervals near the center of the rotating plate 31, and projecting from the outer peripheral portion of the cap body 51 at 180 ° intervals. And a convex portion 54 that fits loosely into the clearance concave portion 53. The cap body 51 is basically formed in a substantially U-shaped or substantially Ω-shaped cross section overlapping the central portion of the rotating plate 31, and a guiding hole 52 communicating with the key hole 32 of the rotating plate 31 is formed in the central portion. , Are pressed and held by opposed fixing portions of the cover plate 13.

The guide hole 52 has a substantially funnel-shaped cross section.
The circumferential surface 55 is 30 ° to 75 °, preferably 5 ° from the horizontal direction.
The key 6 is formed to be inclined at an angle of 0 ° to 73 °.
The key 6 is set within the tolerance width of 0.05 mm of the standard setting dimension of 5, and the key hole 32 is shifted within the range of 3 mm within the key hole 32.
It functions to induce 5. In addition, the key insertion port 15
The guide hole 52 is formed in a rectangular through-hole slightly wider than the maximum width of the inclined peripheral surface 55.

The clearance recess 53 is formed in an oval shape, an elliptical shape, or a long hole so that the cylindrical projection 54 can move up, down, left and right, and absorbs a dimensional error between the projection 54 and the projection. The small gap, in other words, the dimensional error is absorbed through the play 56. This play 56 is 0.
It is formed in a range of 3 to 1.5 mm, preferably 0.5 to 1.0 mm. The key hole 32 is automatically centered in accordance with the position of the key 65. The other parts are the same as in the conventional example, and the description is omitted.

According to the above configuration, the absorbing mechanism 50 for absorbing the dimensional variation is installed on the rotating plate 31, so that even if there is a slight deviation or error between the key hole 32 and the key 65 of the rotating plate 31, The key 65 can be reliably inserted into the key hole 32 so that the generation of particles due to rubbing or the like can be significantly suppressed and reduced. Further, there is no need to adjust the shape and dimensions between the lid opening / closing device 64 and the lid 10 by repeated trial and error, and even if the clearance between the keyhole 32 and the key 65 is set small, various Compatible with the lid opening / closing device 64 can be maintained.

The centering mechanisms 20 are provided at the four corners of the lid 10.
Since the inclined tip surface 25 of the positioning arm 24 performs the positioning guide function even after the key 65 is inserted, the key hole 32 of the rotating plate 31 is accurately positioned at a predetermined position. It becomes possible. Therefore, even when the cover 10 is removed from the container main body 1 and the operation of fitting the cover 10 again is repeated, the fitting can be closed by centering with high precision. Furthermore, since each positioning body 23 is detachable, when the positioning body 23 is worn, it can be replaced very easily.

The latch mechanism 30 of the above embodiment is
The lid 10 that closes the container body 1 may be unlocked and removed by rotating the respective rotation plates 31 in reverse, and the lid 10 closing the container body 1 may be locked by rotating the rotation plates 31 forward. good. Further, a pair of fitting pins 39 are projected from the outer periphery of the surface of the rotating plate 31 at intervals of 180 °, and fitting grooves 33 are formed at the lower end or upper end of the power transmission plate 34. And mating pin 39
May be loosely fitted to each other. Power transmission plate 3
It is also possible to provide cam floors on both sides of 4. Further, a pair of convex portions 54 may be provided on the rotating plate 31, and a pair of clearance concave portions 53 may be provided on the cap body 51. Furthermore, if the dimensional error can be absorbed, the number and shape of the clearance concave portions 53 and the convex portions 54 can be appropriately increased or decreased.

[0034]

As described above, according to the present invention, there is an effect that the lid can be fitted with high accuracy even when the lid removed from the container body is closed again. In addition, when the storage container stores the precision substrate, even if the clearance between the key and the key hole is set to be small, it is possible to maintain compatibility between various lid opening and closing machines.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing an embodiment of a lid of a storage container according to the present invention.

FIG. 2 is an explanatory view showing a lid in the embodiment of the lid of the storage container according to the present invention.

FIG. 3 is a sectional view taken along line III-III of FIG. 2;

FIG. 4 is an explanatory view of a main part showing an IV part of FIG. 2;

FIG. 5 is an exploded cross-sectional view corresponding to line VV in FIG. 4;

FIG. 6 is an explanatory diagram showing a centering mechanism in the embodiment of the lid of the storage container according to the present invention.

FIG. 7 is an explanatory view showing a rotary plate and an absorbing mechanism of a latch mechanism in the embodiment of the lid of the storage container according to the present invention.

FIG. 8 is an explanatory view showing a rotating plate and an absorbing mechanism of a latch mechanism in the embodiment of the lid of the storage container according to the present invention.

FIG. 9 is a perspective view showing a state in which a precision substrate is taken out of the container body of the storage container under the mini-environment method.

FIG. 10 is a side view showing a lid opening / closing device and the like under a mini environment system.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Container main body 4 Opening front 5 Locking hole 10 Lid 12 Fitting case 13 Covering plate 14 Indentation hole 15 Key insertion hole 20 Centering mechanism 21 Window hole 23 Positioning body 24 Positioning arm 25 Tip surface 30 Latch mechanism 31 Rotating plate 32 Key hole 34 Power transmission plate 41 Locking clamp 50 Absorption mechanism 51 Cap body 52 Guide hole 53 Clearance recess (recess) 54 Projection 56 Play (gap) 60 Processing device 64 Lid opening / closing device 65 Key

 ──────────────────────────────────────────────────続 き Continued on front page F term (reference) 3E084 AA05 AA14 AB10 BA02 CA03 CB03 FD02 GA01 GB01 HB04 JA20 3E096 AA06 BA15 BB03 CA01 CA08 CB03 DA17 DC02 FA16 GA07 5F031 CA02 CA05 DA01 DA08 EA02 EA12 EA14 EA18 PA30

Claims (3)

[Claims] 1. A storage container including a lid for closing an opening surface of a container body, and a latch mechanism for locking or unlocking the lid, wherein a key inserted into the lid is rotated to operate the latch mechanism. Wherein the lid comprises a fitting case fitted into the opening surface of the container body, a cover plate covering the opening surface of the fitting case, and a centering mechanism for positioning the lid. A rotating plate for rotating the latch mechanism so that the locking clamp projects from the peripheral wall of the lid, a key hole provided on the rotating plate, and substantially facing a key insertion opening of the covering plate; A lid for a storage container, comprising a hole and an absorption mechanism for dimensional error between the key and the key. 2. A centering mechanism comprising: a plurality of window holes provided in a plurality of partition peripheral walls for partitioning a corner of the fitting case; a positioning member provided in the fitting case; 2. The lid of the storage container according to claim 1, wherein said lid comprises a plurality of positioning arms exposed from said window hole. 3. A cap body interposed between the cover plate of the lid and the rotating plate for guiding the key to the key hole by a guide hole, and a cap body provided between the rotating plate and the cap body. 3. The storage device according to claim 1, further comprising: a concave portion provided on one of the rotary plate and the cap body for absorbing a dimensional error, and a convex portion provided on one of the rotating plate and the cap body and fitted into the concave portion through a gap. Container lid.