JP2002204825A - Dlc membrane, medical appliance, artificial organs and deposition method of dlc membrane - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a DLC membrane having excellent biocompatibility, medical appliances and artificial organs and a deposition method for the DLC membrane. SOLUTION: This DLC membrane has the excellent biocompatibility and has the nature of not impairing the intrinsic functions possessed by organisms or organism constitution elements when the membrane is introduced into the organisms or brought into contact with the organisms. The deposition method for the DLC membrane having the excellent biocompatibility comprises depositing the membrane by a plasma enhanced DVD process in a deposition time of >=3 seconds by using a gaseous hydrocarbon containing at least carbon and hydrogen under pressure of 0.5 to 500 mTorr and using RF output of 30 to 3,000 W.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a DLC coating material having excellent biocompatibility, a DLC film, and a method for forming the same.

[0002]

2. Description of the Related Art A DLC (Diamond Like Carbon) film is an amorphous carbon mainly composed of SP ³ bonds between carbons.
It is a hard carbon film that is very hard, has excellent insulating properties, and has a high refractive index and a very smooth morphology. Conventional DLC
The film is often used as a protective film that requires rigidity and high slidability due to properties such as high hardness and high slidability.

[0003]

SUMMARY OF THE INVENTION However, DLC
Since the film was found to have a high oxygen barrier property as another property, the D film was also used for applications other than the above-mentioned protective film.
It is expected that LC films can be used. For example, by coating the inner surface of a plastic container such as a PET bottle with a DLC film, the property of transmitting oxygen gas of the plastic is improved, and the container can beer for containing beer that reacts sensitively to oxygen and deteriorates in taste. PET bottles can now be used.

Therefore, the present inventor has focused on the possibility that the DLC film can be applied to a field different from the conventional fields, and has focused on the medical field as a new application and conducted intensive research.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a DLC film, a medical device, an artificial organ, and a method of forming a DLC film having excellent biocompatibility. It is in.

[0006]

Means for Solving the Problems In order to solve the above problems, a DLC film according to the present invention is a DLC film having excellent biocompatibility, and is introduced into a living body or brought into contact with the living body. In this case, it has a characteristic that does not impair the original function of a living body or a biological component.

Further, in a Raman spectrum curve obtained by performing a Raman spectrum analysis on the DLC film according to the present invention, when the G peak baseline intensity is B and the G peak corrected intensity is A, the value of B / A is obtained. Is preferably less than 1.9.

The DLC film according to the present invention has a thickness of 0.28.
The film is preferably formed using a power density of W / cm ² or more.

[0009] The medical device according to the present invention is a medical device provided with a DLC film having excellent biocompatibility, and when introduced into a living body or brought into contact with a living body, the living body or a biological component A DLC film having a property which does not impair the original function of the DLC.

Further, in the medical device according to the present invention,
When the G peak baseline intensity is B and the G peak corrected intensity is A in the Raman spectrum curve obtained by performing Raman spectrum analysis on the DLC film, the value of B / A is less than 1.9. Is preferred.

In the medical device according to the present invention, the DLC film is preferably a film formed using a power density of 0.28 W / cm ² or more.

The artificial organ according to the present invention is an artificial organ provided with a DLC film having excellent biocompatibility, and when introduced into a living body or brought into contact with the living body, A DLC film having a property which does not impair the original function of the DLC.

[0013] In the artificial organ according to the present invention,
When the G peak baseline intensity is B and the G peak corrected intensity is A in the Raman spectrum curve obtained by performing Raman spectrum analysis on the DLC film, the value of B / A is less than 1.9. Is preferred.

In the artificial organ according to the present invention, the DLC film is preferably a film formed using a power density of 0.28 W / cm ² or more.

The method for forming a DLC film according to the present invention is a method for forming a DLC film having excellent biocompatibility, wherein a hydrocarbon-based gas containing at least carbon and hydrogen is reduced to 0.5 mT.
Introduced under a pressure of or more to 500 mTorr or less, an object to be film-formed was placed on an electrode connected to a high-frequency power supply, and a high-frequency power of 30 to 3000 W was applied to this electrode, and a film formation time of 3 seconds or more was applied. It is characterized by being formed by a plasma CVD method.

The method for forming a DLC film according to the present invention is a method for forming a DLC film having excellent biocompatibility, wherein a hydrocarbon-based gas containing at least carbon and hydrogen is 0.1 mT
Introduced under a pressure of or more than 100 mTorr, a hot filament energized by a power supply and maintained at a high temperature is used as a cathode, and an electrode arranged in the vicinity is used as an anode, and a voltage of 10 V to 200 V is applied between both electrodes. Is applied to apply a current of 10 mA or more and 2000 mA or less to ionize the gas, and place a film-forming target on a substrate electrode placed at a certain distance from the cathode / anode.
A bias voltage of 20 V or more and 3000 V or less is applied to the substrate electrode, and a film is formed for a film formation time of 3 seconds or more.

[0017]

Embodiments of the present invention will be described below. A DLC coating material according to an embodiment of the present invention includes a base material, and a DLC film coated on the base material and having excellent biocompatibility. This D
The LC coating material is used for a member or device for introducing it into a living body, a member or device for bringing it into contact with a living body, a member or device for applying various functions to a living body, and specifically, a medical instrument, an artificial organ, or the like. It is applied to such as.

The DLC film here is an amorphous carbon-based thin film containing carbon as a main component and having a Raman spectrum curve obtained by synthesizing two or more peak-shaped curves.
Includes from relatively soft to very hard.
This Raman spectrum is as shown in FIG.
However, the Raman spectrum shown in FIG. 1 is merely an example.

As shown in FIG. 1, a Raman spectrum curve 10 has two peaks called a G band and a D band, and has a peak (wave number) having a peak near 1500 at a wave number. 1) and a mountain-shaped curve (D band) 12 having a peak near 1300 in the wave number.

The above-mentioned DLC film having excellent biocompatibility has the property of not impairing the original function of a living body or a biological component when the DLC film is introduced into a living body or brought into contact with the living body. It has the property of having almost no cytotoxicity.

Here, the excellent biocompatibility is as follows.
It is excellent in histocompatibility, excellent in non-immunity, and also excellent in blood compatibility.

[0022] Histocompatibility means that when a DLC film is introduced into a living body or brought into contact with a living body, no damage is caused to cells constituting the tissue of the living body. In other words, it does not exhibit cytotoxicity. Cytotoxicity means that cells that proliferate and differentiate come into direct or indirect contact with a substance and are destroyed.

The term "non-immune" means that when a DLC membrane is introduced into a living body or comes into contact with the living body, it does not induce an immune response that protects the living body from external stimuli (harmful foreign substances). . Hemocompatibility means that when the DLC membrane is used at a site in contact with blood, unnecessary coagulation (thrombus formation) or destruction (hemolysis) of blood does not occur. There are several factors in blood coagulation, one of which is the adsorption of platelets. Platelets are less likely to be adsorbed on the surface of the material to which albumin in the blood is adsorbed, and therefore, thrombus formation is suppressed.

When manufacturing the DLC coating material, first,
A base material is prepared, the base material is fixed on an electrode connected to a high-frequency power source, high-frequency power is applied to this electrode, and a plasma CV is applied.
A DLC film is formed on a substrate surface by a D (Chemical Vapor Deposition) method. The film forming conditions at this time are as follows: a gas used is a hydrocarbon-based gas containing at least carbon and hydrogen; a gas pressure is 0.5 mTorr to 500 mTorr; an RF output is 30 W to 3000 W; and a film forming time is 3 seconds or more.

According to the above-described embodiment, the above-mentioned DLC film can be formed by forming a film under the above-described film forming conditions. Such a DLC film has been confirmed to have biocompatibility from experimental results described later.

DL having excellent biocompatibility
By forming a C film on a substrate, even when a substrate such as a plastic that releases cytotoxin is used, the
Since the C membrane is a dense membrane, this cytotoxin can be blocked, and as a result, harmlessness to cells can be realized. At the same time, since the DLC film has excellent biocompatibility, it is used for a member or device for introducing the DLC coating material into a living body, a member or device for contacting a living body, a member or device for performing various actions on a living body, or the like. be able to. Therefore, it is preferably applied to medical instruments, artificial organs and the like.

In the above embodiment, a hydrocarbon-based gas is used as the gas to be used, but various hydrocarbon-based gases can be used as long as they contain at least carbon and hydrogen. Compound gas containing only carbon and hydrogen, gas containing carbon, hydrogen and oxygen, carbon, hydrogen, oxygen,
A gas containing silicon, nitrogen, copper, silver, or the like, benzene, toluene, acetylene, or the like can also be used.

In the above-described embodiment, the hydrocarbon-based gas pressure of 0.5 mTorr or more and 500 mTorr or less is used under the film forming conditions, but a more preferable gas pressure is 10 mTorr or more and 100 mTorr or less.

Further, in the above-described embodiment, the RF output of 30 W or more and 3000 W or less is used under the film forming conditions.
W and the following.

In the above embodiment, the film formation time is set to 3
Seconds or more, but a more preferable film formation time is 3 seconds.
0 seconds or more.

As the flow rate of the hydrocarbon gas, various gas flow rates can be used as long as the above pressure can be realized. Further, as for the thickness of the DLC film, various thicknesses can be applied. For example, a very thin film thickness can be used.
If the hardness of the DLC film is kept low by using an appropriate intermediate layer or the like, a film thickness of 10 μm or more can be used.

The method of forming a DLC film is not limited to the method of forming a DLC film according to the above-described embodiment, and other film forming methods can be used.
It is also possible to use a film formation method called an ionization vapor deposition method or an ion plating method. For example, a hydrocarbon-based gas containing at least carbon and hydrogen is set to 0.1 mTorr.
Introduced under a pressure of 100 mTorr or less, a hot filament energized by a power supply and maintained at a high temperature is used as a cathode, and an electrode arranged in the vicinity is used as an anode, and a voltage of 10 V or more and 200 V or less is applied between both electrodes. A current of 10 mA or more and 2000 mA or less is applied to ionize the gas, and a film formation target is placed on a substrate electrode placed at a certain distance from the cathode / anode, and a bias voltage of 20 V or more and 3000 V or less is applied to the substrate electrode. It is desirable to apply the voltage and form a film with a film formation time of 3 seconds or more.

Next, a cell experiment was performed to confirm that the DLC membrane had biocompatibility, which will be described.

The experimental method will be described. First, a polystyrene dish for culturing cells is prepared. This dish has a square planar shape and is provided with a total of 96 holes (dents) of 8 rows and 12 rows, and a culture solution and cells are put into these holes to culture the cells. Things.
The bottom (bottom) of these holes is subjected to the following processing. That is, a DLC film is coated on the bottom of a hole with a use gas of C ₇ H ₈ , a gas flow rate of 20 sccm, a gas pressure of 5 mmTorr, an RF output of the following A to I, and a film formation time, and a polystyrene (PS) as it is , TCD (tissue culture polystyrene dish) treatment is provided for each of the eight pieces. TCD is a tissue culture dish.

Film forming condition A: RF output of 300 W, film forming time of 30 seconds Film forming condition B: RF output of 300 W, film forming time of 60 seconds Film forming condition C: RF output of 300 W, film forming of 90 seconds Time Film forming condition D: RF output of 500 W, film forming time of 30 seconds Film forming condition E: RF output of 500 W, film forming time of 60 seconds Film forming condition F: RF output of 500 W, film forming time of 90 seconds Film condition G: RF output of 900 W, film forming time of 30 seconds Film forming condition H: RF output of 900 W, film forming time of 60 seconds Film forming condition I: RF output of 900 W, film forming time of 90 seconds

Next, the cells were prepared in a medium, and the cell suspension was placed in each well of the dish, incubated for 24 hours, and evaluated for cell adhesion at the bottom of the well.
Cytotoxicity evaluation was performed. As the cells, rat calvarial osteoblasts (mouse parietal bone cells) were used.
As the medium, a medium containing DMEM medium, 10% FBS (serum), and nutrients necessary for the medium such as antibiotics and non-essential amino acids is used.

A cell adhesion test for evaluating cell adhesion will be described. First, osteoblasts derived from rat calvaria are adjusted to 8 × 10 ⁴ cells / ml in DMEM medium, and 100 μl of this cell suspension is placed in each well of the dish. After incubation for 24 hours, the number of cells adhering to the bottom of the hole was calculated by MTT assay.

MTT is fo by the enzyme in mitochondria.
Change to rmazan. By dissolving Formazan and performing colorimetric determination, mitochondrial activity can be evaluated. Since the amount of formazan generated is proportional to the number of viable cells, MTT as
The value of the absorbance (OD 595 nm) of the say is defined as the number of adherent cells. That is, since there is one mitochondria per cell, the number of adherent cells can be measured by the number of mitochondria measured from the value of the absorbance of MTT assay. This result is shown in FIG.

FIG. 2 shows the results of cell adhesion evaluation, in which PS (polystyrene), DL
9 is a bar graph showing the relationship between each of A to I and TCD coated with C and absorbance (OD 595 nm). FIG. 2 shows that the higher the value on the vertical axis, the larger the number of adhered cells. However, A to I show clearly better cell adhesion compared to PS not coated with DLC. there were. In addition, the cell adhesion was slightly better than the TCD used for comparison.

A cytotoxicity test for evaluating cytotoxicity will be described. First, osteoblasts derived from rat calvaria were
Adjust to 8 × 10 ⁴ cells / ml with MEM medium, and put 100 μl of this cell suspension into each well of the dish. After incubation for 24 hours, cytotoxicity was quantitatively measured by an LDH leakage measurement method, which is a test for cytotoxicity.

LDH, a lysosomal enzyme, is
Is released from the cells into the medium when damaged.
The released LDH is referred to as Iatrozyme LDH.
-L _Q Absorbance (OD 595 nm) using Kit
Colorimetric determination was performed. The higher the LDH elution rate, the greater the effect on cell membranes.
It can be said that the cytotoxicity is strong because of the large damage it can cause.
The test results are shown in FIG.

FIG. 3 shows the results of the cytotoxicity evaluation, in which PS (polystyrene), DL
LD coated with each of A to I and TCD coated with C
It is a bar graph which shows the relationship with the elution rate of H.

FIG. 3 shows that the higher the LDH elution rate on the vertical axis, the higher the damage to the cell membrane (that is, the greater the damage to the cell membrane). DL
For untreated PS without C coating, LDH
Shows a high value of 20%, which indicates that the cell membrane has high damage. However, since A to I coated with DLC show low values of the elution rate of LDH, it can be said that the disorder of the cell membrane is low. Therefore, by coating with DLC, the damage of the cell membrane can be suppressed. AI were clearly less toxic compared to PS without DLC coating. In addition, cytotoxicity was almost equivalent to TCD used as a control for comparison.

As a result of the cell adhesion evaluation and the cytotoxicity evaluation, those coated with DLC in the dish have the same or higher cell adhesion as TCD, regardless of the thickness of the DLC film, and have low cell density. Turned out to be toxic. Therefore, it can be said that the DLC film has extremely excellent biocompatibility. Further, since there is no dependency on the film thickness, PS
If the surface is coated with any DLC film, it can be a good growth site for osteoblasts.

Next, an experiment was conducted to confirm that the DLC film had blood compatibility, and the experiment will be described.

An experimental method will be described. First, a polystyrene dish is prepared. This dish is the same as that used in the cell experiment described above. Next, the protein solution is put into each hole of the dish, and the protein adsorbed on the bottom of the hole is detected by enzyme-linked immunosorbent assay (ELISA). In addition, ELISA method, enzyme-l
iked immunosorbent assay is a method of tracking enzyme-antibody responses by labeling enzyme activity and quantifying the amount of antigen or antibody.It has a very high detection sensitivity and can detect proteins on the order of nanograms. It is.

A specific experimental method will be described. A human serum albumin solution adjusted to 500 ng / ml is placed in various dishes, incubated at 37 ° C. for 1 hour, and albumin is adsorbed to the dishes. One hour later,
The supernatant is removed, the primary antibody solution is added, and the mixture is incubated at 37 ° C. for 2 hours to bind the primary antibody to the adsorbed protein. After that, wash the dish and remove excess 1
Remove the secondary antibody.

Next, the secondary antibody solution is put in the dish,
Incubate at 37 ° C. for 2 hours to bind the secondary antibody to the primary antibody bound to the protein. Then, as in the case of the primary antibody, the excess secondary antibody is removed by washing,
After an enzymatic reaction with alkaline phosphatase bound to the secondary antibody with p-nitrophenyl phosphate disodium hexahydrate, the reaction is stopped with an aqueous sodium hydroxide solution and the absorbance is measured. From the measurement results, the protein adsorption rates on various dishes were calculated, and the results are shown in FIG.

FIG. 4 shows the bottom of the hole in the dish (PS (polystyrene), A coated with DLC).
3 is a bar graph showing the protein adsorption rates of ＩI and TCD). Here, the protein adsorption rate is a ratio (%) of the protein contained in the protein solution put in the hole adsorbed on the bottom surface of the hole.

According to FIG. 4, A to I have a very good protein adsorption rate of 90 to 100%, which is very high as compared with TCD. From these results, it was confirmed that the DLC film had very excellent blood compatibility.

Next, application examples of the DLC coating material and the DLC film according to the above embodiment will be described. Note that DL
Since the C coating material and the DLC film can be used for various uses, the uses described below are merely examples.

The DLC film can be used for a surgical thread. By coating the surgical thread with the DLC film, the slip of the thread in the body can be improved. Also, DLC
The membrane can be used for a cell culture dish.
In addition, the DLC film can be used for a protein-collecting plastic container for collecting a protein by attaching the protein to a DLC-coated portion when collecting the protein.

The DLC film can be used for an implant material. The implant material is a general term for things that can be put into the body. For example, artificial joints with DLC coating on sliding parts, artificial bones with DLC coating, artificial roots with DLC coating on the outermost surface, artificial blood vessels, barriers by coating with DLC Examples include a cable, a battery, a pacemaker composed of a main body and the like, and a silicone pad coated with DLC.

Further, the DLC film can be used for controlling metal allergy by coating it. For example, a metal part is coated with DLC to prevent the elution of the metal from dentures, and a part in contact with the arm has a DL.
Watches coated with C, jewelry such as earrings, rings, necklaces and the like, which are coated with DLC on the part that comes into contact with the human body, can be mentioned.

Next, the result of the Raman spectrum analysis of the DLC film will be described. A sample was manufactured by fixing a substrate on an electrode connected to a high-frequency power supply, applying high-frequency power to this electrode, and forming a DLC film on the substrate surface by a plasma CVD method. As the film forming conditions at this time, C ₇ H ₈ was used as the gas to be used, and the gas flow rate was set to 15
sccm, the gas pressure was 5 mTorr, and the RF output was varied from 100 W to 900 W. Raman spectrum analysis was performed on each of the samples thus prepared.
The G peak baseline intensity B and the G peak corrected intensity A were measured in the Raman spectrum curve of each sample obtained as a result, and the value of B / A was calculated for each sample. The result is shown in FIG.

Here, the B / A value is a value of B / A where G is the G peak baseline intensity and A is the G peak corrected intensity as shown in FIG. FIG.
Is a Raman spectrum curve for explaining the definition of the B / A value.

FIG. 5 is a graph showing the relationship between R and R when each sample was prepared.
It is a graph which shows the relationship between F output and B / A value. FIG.
5 is a graph showing the relationship between the RF output and the density of a DLC film when each sample was manufactured. The flow rate of the C ₇ H ₈ gas at the time of producing each sample was 15 sccm and the gas pressure was 5 sccm.
mTorr. As shown in FIG. 5, the B / A value of the sample formed with the RF output of 100 W or more is about 1.9, but the B / A value sharply decreases from the RF output of 200 W, and the B / A value of 300 W or more is obtained. The B / A value at the RF output is approximately 1.6 or less. Also, as shown in FIG.
The higher the F output, the higher the film density of the DLC film.
5 and 7, the lower the B / A value is, the higher the density of the DLC film is, and the denser the film is formed.
The lower the A value, the better the biocompatibility of the DLC film. Therefore, in order for the DLC film to be excellent in biocompatibility, the B / A value is preferably less than 1.9.

Next, the results of anodic polarization measurement of the DLC film will be described. A Si substrate is fixed on an electrode connected to a high-frequency power source, high-frequency power is applied to this electrode, and DLC is applied to the surface of the Si substrate by a plasma CVD method.
A sample was prepared by forming a film. As the film forming conditions at this time, C ₇ H ₈ was used as the gas to be used, and the RF output was changed at 100 W to 500 W. Each of the samples thus prepared was immersed in a 10% KOH solution, and anodic polarization was measured. The results are shown in FIGS.

FIG. 8 is a graph showing the results of anodic polarization measurement of a sample on which a DLC film was formed at an RF output of 100 W, and is a graph showing the relationship between potential and current density. FIG. 9 is a graph showing the result of anodic polarization measurement of a sample on which a DLC film was formed at an RF output of 200 W, and is a graph showing the relationship between potential and current density. FIG.
6 is a graph showing the results of anodic polarization measurement of a Si substrate on which no film is formed, and showing the relationship between potential and current density.

As a result of the anodic polarization measurement, as shown in FIG. 8, the DLC film of the sample formed with the RF output of 100 W showed a small active state regardless of the gas flow rate and the gas pressure.
Some dissolution of the Si substrate was observed. On the other hand, as shown in FIG. 9, in the DLC film of the sample formed with the RF output of 200 W or more, the natural electrode potential was shifted to the noble side, and no active state was generated. The critical passivation current density Icrit of the film formed at an RF output of 200 W or more was 3 to 5 orders of magnitude smaller than that of the Si substrate shown in FIG. 10, and the defect area of the DLC film was calculated to be 10 ⁻² to 10 ⁻² . It was confirmed that the film quality was low defect on the order of 10 ^-5 . Therefore, 2
Since the DLC film formed with an RF output of 00 W or more has a very low defect, even if such a DLC film coated with a base metal is embedded in a living body, the base metal can be protected from corrosion. Become. Therefore, such 200W
The DLC film formed with the above RF output, in other words, the power density of 0.28 W / cm ² or more is preferably used for medical instruments, artificial organs and the like. The power density of 200W since the electrode area of the RF output is 708cm ² (Φ300mm) becomes 0.28 W / cm ^2.

The present invention is not limited to the above embodiment, but can be implemented with various modifications.

[0062]

As described above, according to the present invention, a hydrocarbon gas containing at least carbon and hydrogen is reduced to 0.5 mT
30 W or more 3 at a pressure of or more to 500 mTorr or less
A film is formed by a plasma CVD method using an RF output of 000 W or less and a film formation time of 3 seconds or more. Further, according to the present invention, the hydrocarbon-based gas containing at least carbon and hydrogen is contained in 0.1 g.
20 V to 3000 V using a DC discharge by a filament at a pressure of 1 mTorr or more and 100 mTorr or less.
The following bias voltage is applied, and a voltage of 10 V or more and 200 V or less is applied between the filament and the anode to 10 m
A current of A to 2,000 mA is passed, and a film is formed by a plasma CVD method for a film formation time of 3 seconds or more. Therefore,
A DLC film, a medical device, an artificial organ, and a method for forming a DLC film having excellent biocompatibility can be provided.

[Brief description of the drawings]

FIG. 1 is a diagram showing an example of a Raman spectrum of a DLC film.

FIG. 2 shows the results of cell adhesion evaluation, in which PS and DLC coated AIs in a dish.
9 is a bar graph showing the relationship between the absorbance (OD 595 nm) and TCD.

FIG. 3 is a bar graph showing the results of cytotoxicity evaluation, showing the relationship between the PS, DLC-coated AI and TCD in a dish and the LDH elution rate.

FIG. 4 shows the bottom of the hole in the dish (PS, DLC
4 is a bar graph showing the adsorption rates of proteins coated with A to I and TCD).

FIG. 5 is a graph showing a relationship between an RF output and a B / A value when a sample for performing Raman spectrum analysis is manufactured.

FIG. 6 is a Raman spectrum curve for explaining the definition of the B / A value.

FIG. 7 shows RF output and DL when each sample was prepared.
It is a graph which shows the relationship of the density of C film.

FIG. 8 is a graph showing the results of anodic polarization measurement of a sample on which a DLC film was formed at an RF output of 100 W, and showing the relationship between potential and current density.

FIG. 9 is a graph showing a result of anodic polarization measurement of a sample on which a DLC film was formed at an RF output of 200 W, and showing a relationship between a potential and a current density.

FIG. 10 is a graph showing the results of anodic polarization measurement of a Si substrate on which a DLC film is not formed, and is a graph showing the relationship between potential and current density.

[Explanation of symbols]

 10: Raman spectrum curve 11: Mountain-shaped curve (G band) 12: Mountain-shaped curve (D band)

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) C23C 14/06 C23C 16/26 16/26 A61B 17/04 // A61B 17/04 A61J 1/00 311F Term (reference) 4C059 AA01 DD01 4C060 BB30 4C081 AB03 AB05 AB13 AC02 BA01 BA02 BA05 CF162 DA02 DC03 EA06 EA14 4K029 BA34 CA13 DD04 EA03 EA09 4K030 AA09 BA28 FA03 JA09 JA11 JA16 LA01 LA11

Claims (11)

[Claims] 1. A DLC film having excellent biocompatibility, which does not impair the original function of a living body or a biological component when introduced into a living body or brought into contact with the living body. A DLC film, characterized in that: 2. A Raman spectrum curve obtained by performing a Raman spectrum analysis on the DLC film has a G
The DLC film according to claim 1, wherein the value of B / A is less than 1.9, where B is the peak baseline intensity and A is the intensity after G peak correction. 3. The DLC film according to claim 1, wherein the DLC film is a film formed using a power density of 0.28 W / cm ² or more. 4. A medical device provided with a DLC film having excellent biocompatibility, wherein when introduced into a living body or brought into contact with a living body, the medical device has an original function of the living body or a biological component. A medical device comprising a DLC film having an intact property. 5. A Raman spectrum curve obtained by performing a Raman spectrum analysis on the DLC film, wherein G
The medical device according to claim 4, wherein the value of B / A is less than 1.9, where B is the peak baseline intensity and A is the intensity after G peak correction. 6. The medical device according to claim 4, wherein the DLC film is a film formed using a power density of 0.28 W / cm ² or more. 7. An artificial organ provided with a DLC film having excellent biocompatibility, which has an original function of a living body or a biological component when introduced into the living body or brought into contact with the living body. An artificial organ comprising a DLC film having a property that does not impair. 8. A Raman spectrum curve obtained by performing a Raman spectrum analysis on the DLC film, wherein G
The artificial organ according to claim 1, wherein the value of B / A is less than 1.9, where B is the peak baseline intensity and A is the intensity after G peak correction. 9. The artificial organ according to claim 1, wherein the DLC film is a film formed using a power density of 0.28 W / cm ² or more. 10. A method for forming a DLC film having excellent biocompatibility, wherein a hydrocarbon gas containing at least carbon and hydrogen is 0.5 m
Introduced under a pressure of not less than Torr and not more than 500 mTorr,
Place the object to be deposited on the electrode connected to the high frequency power supply,
A method for forming a DLC film, characterized in that a high frequency power of 30 W or more and 3000 W or less is applied to the electrode and the film is formed by a plasma CVD method for a film formation time of 3 seconds or more. 11. A method for forming a DLC film having excellent biocompatibility, wherein a hydrocarbon gas containing at least carbon and hydrogen is 0.1 m
Introduced under a pressure of not less than Torr and not more than 100 mTorr,
Using a hot filament, which is energized by a power supply and held at a high temperature, as a cathode and using an electrode disposed in the vicinity thereof as an anode, a voltage of 10 V to 200 V is applied between the two electrodes to generate a current of 10 mA to 2000 mA. The flowing gas is ionized, the object to be film-formed is set on the substrate electrode placed at a fixed distance from the cathode / anode, and a bias voltage of 20 V or more and 3000 V or less is applied to the substrate electrode, and a film formation time of 3 seconds or more is applied. A method for forming a DLC film, characterized in that the film is formed by: