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JP2002131762A - Lamination device and method for laminating substrate for liquid crystal panel - Google Patents

Lamination device and method for laminating substrate for liquid crystal panel

Info

Publication number
JP2002131762A
JP2002131762A JP2000331179A JP2000331179A JP2002131762A JP 2002131762 A JP2002131762 A JP 2002131762A JP 2000331179 A JP2000331179 A JP 2000331179A JP 2000331179 A JP2000331179 A JP 2000331179A JP 2002131762 A JP2002131762 A JP 2002131762A
Authority
JP
Japan
Prior art keywords
substrates
substrate
closed space
pressure
plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000331179A
Other languages
Japanese (ja)
Other versions
JP3542956B2 (en
Inventor
Ichiro Ishizaka
一朗 石坂
Kunihiro Miyashita
国弘 宮下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Engineering Co Ltd
Original Assignee
Shin Etsu Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Engineering Co Ltd filed Critical Shin Etsu Engineering Co Ltd
Priority to JP2000331179A priority Critical patent/JP3542956B2/en
Priority to TW090126007A priority patent/TWI250338B/en
Priority to KR1020010066606A priority patent/KR100653339B1/en
Publication of JP2002131762A publication Critical patent/JP2002131762A/en
Application granted granted Critical
Publication of JP3542956B2 publication Critical patent/JP3542956B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/10Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1341Filling or closing of cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Liquid Crystal (AREA)
  • Mathematical Physics (AREA)
  • Fluid Mechanics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

PROBLEM TO BE SOLVED: To align substrates by externally moving substrates in XYθ directions outside of pressurizing plates while keeping only the space between the pressurizing plates in a sealed state. SOLUTION: The pressurizing plates 1, 2 holding two substrates A, B are moved nearer to each other so as to seal the space between the peripheral edges 1a, 2a of the plates by a movable sealing means 4 to form a section of a closed space S while the substrates A, B are moved nearer to each other to form a specified gap. Then while the air in the closed space S is evacuated, the pressurizing plates 1, 2 are relatively moved and adjusted in along XYθ directions to roughly align the substrates A, B. After a specified vacuum degree is obtained, the movable sealing means 4 is deformed to move the substrates A, B further nearer to each other the position where the gap between the substrates A, B is sealed with an annular adhesive C. In this state, the pressurizing plates 1, 2 are relatively moved and adjusted in the XYθ directions to finely align the substrates. Then the substrates are released from only one of the plates 1, 2 to return the closed space S to the atmospheric pressure so that the gap is uniformly pressed by the pressure difference between the inside and outside of the substrates A, B to form a specified gap.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、液晶ディスプレイ
(LCD)に使用する液晶パネルの製造過程において、
二枚の液晶パネル用基板を真空中でアライメント(粗合
わせ及び微合わせ)するための液晶パネル用基板の貼り
合わせ装置及び貼り合わせ方法に関する。詳しくは、上
下一対の加圧板に対して夫々着脱自在に保持された二枚
の基板を真空中で重ね合わせ、位置決め手段により相対
的にXYθ方向へ調整移動して両基板の粗合わせ及び微
合わせを行い、更に両基板を加圧して所定のギャップま
で潰す液晶パネル用基板の貼り合わせ装置及び貼り合わ
せ方法に関する。
The present invention relates to a process for manufacturing a liquid crystal panel used for a liquid crystal display (LCD).
The present invention relates to a bonding apparatus and a bonding method for a liquid crystal panel substrate for aligning (roughly and finely) two liquid crystal panel substrates in a vacuum. Specifically, two substrates, each detachably held on a pair of upper and lower pressing plates, are superimposed in a vacuum, and are relatively adjusted and moved in the X, Y, and θ directions by positioning means to roughly and finely adjust the two substrates. The present invention also relates to a bonding apparatus and a bonding method for a liquid crystal panel substrate, in which both substrates are pressed and crushed to a predetermined gap.

【0002】[0002]

【従来の技術】従来、この種の液晶パネル用基板の貼り
合わせ装置及び貼り合わせ方法は、例えば図5に示すよ
うに、上下一対の加圧板1′,2′と例えばXYテーブ
ルなどの位置決め手段8′の全体を囲むように真空チャ
ンバー11が上下方向へ開閉自在に形成され、この位置
決め手段8′とその駆動源8b′とを連絡する駆動軸8
c′が、例えばベローズなどの真空貫通部品12により
真空チャンバー11を貫通して設けられている。そし
て、上記真空チャンバー11が閉じられてその内部を真
空にした後、その外部から駆動軸8c′で位置決め手段
8′を作動して両加圧板1′,2′が相対的にXYθ方
向へ調整移動されることにより、両基板A,Bの粗合わ
せ及び微合わせを行っていた。
2. Description of the Related Art Conventionally, as shown in FIG. 5, for example, a bonding apparatus and a bonding method for a liquid crystal panel substrate of this type include a pair of upper and lower pressing plates 1 'and 2' and positioning means such as an XY table. A vacuum chamber 11 is formed so as to be openable and closable in the vertical direction so as to surround the whole of 8 ', and a drive shaft 8 for connecting the positioning means 8' and its drive source 8b '.
c 'is provided through the vacuum chamber 11 by a vacuum penetrating component 12 such as a bellows. After the vacuum chamber 11 is closed and the inside thereof is evacuated, the positioning means 8 'is actuated by the drive shaft 8c' from the outside to adjust the two pressing plates 1 'and 2' relatively in the XYθ direction. By being moved, the two substrates A and B are roughly and finely aligned.

【0003】[0003]

【発明が解決しようとする課題】しかし乍ら、このよう
な従来の液晶パネル用基板の貼り合わせ装置及び貼り合
わせ方法では、外部から駆動伝達により真空チャンバー
内の位置決め手段をXYθ移動してアライメントするた
め、駆動軸の真空貫通部品が複雑化して、真空チャンバ
ー内外の真空遮断にコストがかさむだけでなく、シール
材の粘度によっては、粗合わせや微合わせに相当な力が
必要で、駆動形態の制約が多いという問題がある。ま
た、真空チャンバーが上下一対の加圧板及び位置決め手
段の全体を囲むため、真空となる空間が大きくなってし
まい、真空ポンプの容量を大きくする必要があると共
に、使用できる基板の大きさにも限界があって、大型の
基板は製造できないという問題がある。
However, in such a conventional apparatus and method for bonding substrates for liquid crystal panels, alignment is performed by moving the positioning means in the vacuum chamber by XYθ by external drive transmission. Therefore, the vacuum penetrating parts of the drive shaft become complicated, which not only increases the cost of shutting off the vacuum inside and outside the vacuum chamber, but also requires considerable force for rough adjustment and fine adjustment depending on the viscosity of the sealing material. There is a problem that there are many restrictions. In addition, since the vacuum chamber surrounds the entire pair of upper and lower pressure plates and the positioning means, the space for vacuum becomes large, and it is necessary to increase the capacity of the vacuum pump and limit the size of the substrate that can be used. Therefore, there is a problem that a large-sized substrate cannot be manufactured.

【0004】本発明のうち請求項1、2記載の発明は、
両加圧板の間のみを密閉状態にしたままその外部でXY
θ移動してアライメントすることを目的としたものであ
る。請求項3、4記載の発明は、請求項1または2に記
載の発明の目的に加えて、剛体製加圧板の平坦度や平行
精度に関係なく基板同士の局所加圧を防止することを目
的としたものである。請求項5記載の発明は、請求項2
または4に記載の発明の目的に加えて、ので、後工程で
液晶を注入せずに液晶パネルを制作することを目的とし
たものである。
[0004] The invention according to claims 1 and 2 of the present invention,
While keeping only the space between the two pressure plates in a sealed state, XY
It is intended to perform the alignment by moving θ. According to the third and fourth aspects of the present invention, in addition to the object of the first or second aspect of the present invention, it is another object of the present invention to prevent local pressurization between substrates irrespective of flatness and parallel accuracy of a rigid pressure plate. It is what it was. The invention according to claim 5 is the invention according to claim 2.
Or, in addition to the object of the invention described in 4, the object is to produce a liquid crystal panel without injecting liquid crystal in a later step.

【0005】[0005]

【課題を解決するための手段】前述した目的を達成する
ために、本発明のうち請求項1記載の発明は、両加圧板
の対向面に設けられた基板を移動不能に保持する保持手
段と、両加圧板の対向する周縁部間の密閉状態を維持し
たまま相対的にXYθ方向へ移動自在に支持する上下方
向へ弾性変形可能な移動シール手段と、両加圧板を相対
的に接近移動して、これら両加圧板の間に両基板が囲ま
れるように閉空間を区画形成すると共に、両基板を所定
間隔まで接近させる第一加圧手段と、上記閉空間内の気
体を出し入れして所定の真空度にする吸気手段と、上記
第一加圧手段により接近させた両基板を、それらの間が
環状接着剤で密閉される位置まで更に接近させる第二加
圧手段と、上記第一加圧手段及び第二加圧手段の作動状
態で、両加圧板を相対的にXYθ方向へ調整移動させる
ための閉空間外に配設した位置決め手段と、を備えたこ
とを特徴とするものである。請求項2記載の発明は、両
加圧板の対向面に夫々二枚の基板を移動不能に保持する
ステップと、これら両加圧板の接近移動により、相互の
対向する周縁部の間を上下方向へ弾性変形可能な移動シ
ール手段で密閉して、両基板が囲まれるように閉空間を
区画形成すると共に、該閉空間内の両基板を所定間隔ま
で接近させるステップと、この閉空間内の空気を抜きな
がら、両加圧板を相対的にXYθ方向へ調整移動させ
て、両基板の粗合わせを行うステップと、この閉空間内
が所定の真空度に到達してから、上記移動シール手段を
変形させて、両基板の間が環状接着剤で密閉される位置
まで更に接近させるステップと、上記両加圧板を相対的
にXYθ方向へ調整移動させて、更に接近した両基板の
微合わせを行うステップと、上記加圧板のどちらか一方
から一枚の基板を解放させ、上記閉空間内を大気圧に戻
して、両基板の内外に生じる気圧差により所定のギャッ
プまで均等に押し潰すステップとからなり、これらのス
テップを順次行うことを特徴とするものである。請求項
3記載の発明は、請求項1記載の発明の構成に、前記第
二加圧手段が、一方加圧板の対向面中央に形成された凹
部を閉塞すると共に一方基板を移動不能に保持する上下
方向のみ弾性変形可能な可撓性薄板材と、この可撓性薄
板材で閉鎖された凹部内の気体を出し入れして微合わせ
時に可撓性薄板材が他方基板へ向け膨出するように変形
させる加圧部とからなる構成を加えたことを特徴とす
る。請求項4記載の発明は、請求項2記載の発明の構成
に、前記一方加圧板の対向面中央に形成された凹部を閉
塞する上下方向のみ弾性変形可能な可撓性薄板材に一方
基板を移動不能に保持するステップと、上記閉鎖凹部の
内圧と閉空間の内圧を同じにして粗合わせするステップ
と、この粗合わせ後に閉空間内が所定の真空度に到達し
てから上記閉鎖凹部の内圧上昇により可撓性薄板材を膨
出変形させてそれに保持された一方基板を他方基板へ向
け更に接近移動させるステップとを有する構成を加えた
ことを特徴とする。請求項5記載の発明は、請求項2ま
たは4記載の発明の構成に、前記粗合わせを行う前の時
点で、両基板の間に適正量の液晶を注入した構成を加え
たことを特徴とする。
In order to achieve the above-mentioned object, according to the first aspect of the present invention, there is provided a holding means for immovably holding a substrate provided on opposing surfaces of both pressure plates. Moving seal means capable of elastically deforming in the vertical direction for supporting the movable portions relatively in the XYθ directions while maintaining the sealed state between the opposing peripheral portions of the two pressing plates; A first pressurizing means for forming a closed space between the two pressurizing plates so as to surround the two substrates, and for bringing the two substrates close to a predetermined interval, A suction means for reducing the degree of vacuum, a second pressure means for bringing the two substrates brought closer by the first pressure means closer to a position where the two substrates are sealed with an annular adhesive, and the first pressure means In the operating state of the means and the second pressing means, both pressing plates are It is characterized in that it comprises a positioning means which is disposed outside the closed space for moving the adjustment pairs to the XYθ direction. According to a second aspect of the present invention, the step of holding the two substrates immovably on the opposing surfaces of the two pressing plates, and the approaching movement of the two pressing plates causes a vertical space between the opposing peripheral portions. Sealing with elastically deformable moving sealing means to form a closed space so as to surround both substrates, and to bring both substrates in the closed space closer to a predetermined distance; and Adjusting and moving the two pressure plates relatively in the XYθ directions while pulling them out to roughly match the two substrates, and deforming the moving seal means after the inside of the closed space reaches a predetermined degree of vacuum. A step of further bringing the two substrates closer to a position where the two substrates are sealed with an annular adhesive; and a step of relatively moving the two pressure plates in the XYθ directions to finely align the two substrates closer together. , One of the above pressure plates Releasing one substrate from one side, returning the inside of the closed space to atmospheric pressure, and crushing evenly up to a predetermined gap by a pressure difference generated between the inside and outside of the two substrates, and sequentially performing these steps. It is characterized by the following. According to a third aspect of the present invention, in the configuration of the first aspect, the second pressing means closes a concave portion formed in the center of the opposing surface of the one pressing plate and holds the one substrate immovably. A flexible thin plate material that can be elastically deformed only in the vertical direction, and a gas in a recess closed by the flexible thin plate material is taken in and out so that the flexible thin plate material swells toward the other substrate during fine alignment. It is characterized in that a configuration comprising a pressurizing portion for deformation is added. According to a fourth aspect of the present invention, in the configuration of the second aspect of the present invention, the one substrate is provided with a flexible thin plate material that can be elastically deformed only in the vertical direction to close a concave portion formed at the center of the opposing surface of the one pressure plate. The step of maintaining the inner space of the closed recess and the inner pressure of the closed space to be roughly equalized, and the inner pressure of the closed recess after the roughening reaches a predetermined degree of vacuum after the rough adjustment. A step of causing the flexible thin plate material to bulge and deform by the ascending and further moving the one substrate held thereon toward the other substrate. A fifth aspect of the present invention is characterized in that a configuration in which an appropriate amount of liquid crystal is injected between both substrates before the rough alignment is added to the configuration of the second or fourth aspect of the present invention. I do.

【0006】[0006]

【作用】請求項1、2の発明は、二枚の基板を保持した
加圧板が接近移動することにより、相互の周縁部の間を
移動シール手段で密閉して閉空間が区画形成されると共
に、両基板が所定間隔まで接近し、その後、この閉空間
内の空気を抜きながら、両加圧板を相対的にXYθ方向
へ調整移動させて、両基板の粗合わせが行われ、所定の
真空度に到達してから、上記移動シール手段を変形させ
て両基板の間が環状接着剤で密閉される位置まで更に接
近し、この状態で、上記両加圧板を相対的にXYθ方向
へ調整移動させて、両基板の微合わせが行われ、その
後、上記加圧板の一方からのみ基板を解放して、上記閉
空間内を大気圧に戻すことにより、両基板の内外に生じ
る気圧差で均等に押し潰されて所定のギャップが形成さ
れるものである。請求項3、4の発明は、請求項1記載
の構成に対して、前記第二加圧手段が、一方加圧板の対
向面中央に形成された凹部を閉塞すると共に一方基板を
移動不能に保持する上下方向のみ弾性変形可能な可撓性
薄板材と、この可撓性薄板材で閉鎖された凹部内の気体
を出し入れして微合わせ時に可撓性薄板材が他方基板へ
向け膨出するように変形させる加圧部とからなる構成を
追加するか、または或いは請求項2記載の構成に対し
て、前記一方加圧板の対向面中央に形成された凹部を閉
塞する上下方向のみ弾性変形可能な可撓性薄板材に一方
基板を移動不能に保持するステップと、上記閉鎖凹部の
内圧と閉空間の内圧を同じにして粗合わせするステップ
と、この粗合わせ後に閉空間内が所定の真空度に到達し
てから上記閉鎖凹部の内圧上昇により可撓性薄板材を膨
出変形させてそれに保持された一方基板を他方基板へ向
け更に接近移動させるステップとを有する構成を追加し
たので、粗合わせ後、閉鎖凹部の内圧上昇により可撓性
薄板材が膨出変形して、それに保持された一方基板を他
方基板へ更に接近して両者間が環状接着剤Cで密閉させ
ることにより、これら両基板が微合わせ時に最終ギャッ
プ近くまで均等に潰される。請求項5の発明は、請求項
2記載または請求項4記載の構成に対して、前記粗合わ
せを行う前の時点で、両基板の間に適正量の液晶を注入
した構成を追加したので、閉空間内の雰囲気を大気圧に
戻すことにより、両基板の内外に生じる気圧差で均等に
押し潰されて、液晶が封入された状態で所定のギャップ
形成が可能となる。
According to the first and second aspects of the present invention, the pressurizing plate holding the two substrates moves close to each other, whereby the space between the peripheral edges is sealed by moving seal means to form a closed space. The two substrates approach each other up to a predetermined distance, and then, while bleeding the air in the closed space, the two pressurizing plates are relatively moved in the X, Y, and θ directions to roughly adjust the two substrates. After that, the moving sealing means is deformed to further approach the position where both substrates are sealed with the annular adhesive, and in this state, the two pressing plates are relatively adjusted and moved in the XYθ directions. Then, the two substrates are finely aligned, and thereafter, the substrate is released from only one of the pressure plates, and the inside of the closed space is returned to the atmospheric pressure. It is crushed to form a predetermined gap. According to the third and fourth aspects of the present invention, the second pressing means closes a concave portion formed at the center of the facing surface of the one-side pressing plate and holds the one substrate immovably. A flexible thin plate material elastically deformable only in the vertical direction, and a gas in a concave portion closed by the flexible thin plate material is taken in and out so that the flexible thin plate material swells toward the other substrate at the time of fine alignment. Or a configuration in which a pressing portion for deforming the pressure plate is added, or the configuration described in claim 2 can be elastically deformed only in a vertical direction that closes a concave portion formed in the center of the facing surface of the one pressing plate. A step of holding the one substrate immovably on the flexible thin plate material, a step of roughly adjusting the internal pressure of the closed recess and the internal pressure of the closed space to be the same, and after the rough adjustment, the inside of the closed space is brought to a predetermined degree of vacuum. After reaching, the internal pressure of the closed recess increases A step of expanding and deforming the flexible thin plate material and moving the one substrate held by the flexible thin plate material further toward the other substrate, so that after the rough alignment, the internal pressure of the closed recess increases and the flexible thin plate material is increased. Is swelled and deformed, the one substrate held by the substrate is brought closer to the other substrate, and the two substrates are sealed with the annular adhesive C, whereby the two substrates are evenly crushed to near the final gap at the time of fine alignment. According to a fifth aspect of the present invention, a configuration in which an appropriate amount of liquid crystal is injected between both substrates before the rough alignment is added to the configuration of the second or fourth aspect, By returning the atmosphere in the closed space to the atmospheric pressure, the substrates are evenly crushed by the pressure difference between the inside and outside of the substrates, and a predetermined gap can be formed in a state where the liquid crystal is sealed.

【0007】[0007]

【発明の実施の形態】以下、本発明の実施例を図面に基
づいて説明する。この実施例は、図1〜図2に示す如く
上方の加圧板1が、上下方向へは往復動自在だがXYθ
方向へは移動不能に支持された上定盤であると共に、下
方の加圧板2が固定台板9上に例えばXYテーブルなど
の位置決め手段8を介してXYθ方向へ調整移動自在に
支持された下定盤であり、これら上定盤1及び下定盤2
の対向面に吸着保持した二枚のガラス製基板A,Bを、
真空雰囲気中でアライメントするものである。
Embodiments of the present invention will be described below with reference to the drawings. In this embodiment, as shown in FIGS. 1 and 2, the upper pressing plate 1 can reciprocate up and down,
The lower platen is supported so as not to be movable in the direction, and the lower pressing plate 2 is supported on a fixed base plate 9 via a positioning means 8 such as an XY table so as to be adjustable in the XYθ direction. The upper surface plate 1 and the lower surface plate 2
The two glass substrates A and B held by suction on the opposing surfaces of
The alignment is performed in a vacuum atmosphere.

【0008】上定盤1及び下定盤2は、例えば金属やカ
ーボンなどの剛体で構成され、これら対向面の中央部に
は、両基板A,Bを移動不能に保持する保持手段3とし
て複数の吸引孔が開穿され、これら吸引孔3…と例えば
真空ポンプなどの吸引源(図示せず)とを配管連絡させ
る。この吸引源は、コントローラー(図示せず)で動作
制御され、両基板A,Bをセットする初期状態に吸引が
開始され、両基板A,Bの微合わせ後にどちらか一方、
本実施例では上方基板Aの吸引を解除し、後述する閉空
間Sが大気圧に戻った後は下方基板Bの吸引を解除して
初期状態に戻す。
The upper stool 1 and the lower stool 2 are made of a rigid material such as metal or carbon. A plurality of holding means 3 for holding the substrates A and B immovably are provided at the center of these opposing surfaces. Suction holes are formed, and the suction holes 3 are connected to a suction source (not shown) such as a vacuum pump by piping. The operation of this suction source is controlled by a controller (not shown), and suction is started in an initial state in which both substrates A and B are set.
In this embodiment, the suction of the upper substrate A is released, and after the closed space S described later returns to the atmospheric pressure, the suction of the lower substrate B is released to return to the initial state.

【0009】これら基板A,Bには、例えば所望のパタ
ーンが形成されたカラーフィルターとTFT基板からな
り、これら対向面のどちらか一方、図示例の場合には下
方の基板Bの周縁部に沿って環状接着剤Cが枠状に塗布
され、必要に応じて他方には多数のスペーサ(図示せ
ず)が散布される。
The substrates A and B are composed of, for example, a color filter on which a desired pattern is formed and a TFT substrate, and are arranged along one of these opposing surfaces, in the illustrated example, along the peripheral edge of the lower substrate B. The annular adhesive C is applied in a frame shape, and a large number of spacers (not shown) are dispersed on the other side as necessary.

【0010】更に、上定盤1の周縁部1aと下定盤2の
周縁部2aとの間には、これら両者間の密閉状態を維持
したまま相対的にXYθ方向へ移動自在に支持する移動
シール手段4が、両基板A,Bを囲むように環状に設け
られる。この移動シール手段4は、本実施例の場合、上
定盤1及び下定盤2の平面形状に合わせて断面円形又は
矩形に形成された移動ブロック4aと、この移動ブロッ
ク4aの上面に装着した上定盤1の周縁部1aと接離す
る例えばOリングなどの上下方向へ弾性変形可能な環状
シール材4bと、移動ブロック4aの下面に装着した下
定盤2の周縁部2aと常時接触する必要に応じて例えば
真空グリースが使用された駆動真空シール4cと、この
駆動真空シール4cに上定盤1や移動ブロック4aの重
量などの力が作用しないように支持する荷重受ボール4
dとから構成される。
Further, a movable seal is provided between the peripheral portion 1a of the upper surface plate 1 and the peripheral portion 2a of the lower surface plate 2 for relatively movably supporting in the XYθ directions while maintaining a sealed state therebetween. Means 4 is provided in an annular shape so as to surround both substrates A and B. In the case of the present embodiment, the moving sealing means 4 includes a moving block 4a formed in a circular or rectangular cross section in accordance with the planar shape of the upper stool 1 and the lower stool 2, and an upper surface mounted on the upper surface of the moving block 4a. An annular sealing member 4b, such as an O-ring, which is elastically deformable in the vertical direction, such as an O-ring, which comes in contact with and separates from the peripheral portion 1a of the surface plate 1, and a peripheral portion 2a of the lower surface plate 2 mounted on the lower surface of the moving block 4a. Accordingly, a driving vacuum seal 4c using, for example, vacuum grease, and a load receiving ball 4 supporting the driving vacuum seal 4c so that a force such as the weight of the upper platen 1 or the moving block 4a does not act on the driving vacuum seal 4c.
d.

【0011】特に必要に応じて、これら上定盤1と移動
ブロック4aがXYθ方向へ一体的に連結させるため
に、上定盤1から移動ブロック4aに亘って複数本の連
結ピン4eを、上下方向へは往復動自在であるがXYθ
方向へは移動不能に挿通させることが好ましく、更に移
動ブロック4aと下定盤2が上下方向へ離れるのを防止
するために両者に亘って例えば引っ張りバネなどの弾性
材料4fを掛け渡すことが好ましい。
In order to connect the upper platen 1 and the moving block 4a integrally in the X, Y, and θ directions as necessary, a plurality of connecting pins 4e are vertically moved from the upper platen 1 to the moving block 4a. Can reciprocate freely in the direction
In order to prevent the moving block 4a and the lower stool 2 from separating in the vertical direction, it is preferable to extend an elastic material 4f such as a tension spring over both of them in order to prevent the moving plate 4a and the lower platen 2 from separating in the vertical direction.

【0012】そして、上定盤1には、図1の符号5に示
すような例えば上下駆動用シリンダーなどからなる第一
加圧手段が連設される。この第一加圧手段5は、コント
ローラー(図示せず)で動作制御され、基板A,Bをセ
ットする初期状態で、図1の一点鎖線及び図2(a)に
示す如く上定盤1を上限位置で待機しており、基板A,
Bのセット完了後に、図1の実線及び図2(b)に示す
如く上定盤1を下降させて、下定盤2との間に閉空間S
が両基板A,Bを囲むように区画形成し、両基板A,B
の微合わせ終了後か、或いは後述する閉空間Sが大気圧
に戻った後は上昇させて初期状態に戻す。
The upper platen 1 is provided with a first pressurizing means, such as a vertical drive cylinder, as indicated by reference numeral 5 in FIG. The operation of the first pressurizing means 5 is controlled by a controller (not shown). In an initial state in which the substrates A and B are set, the upper platen 1 as shown by the alternate long and short dash line in FIG. 1 and FIG. Waiting at the upper limit position, substrate A,
After the setting of B is completed, the upper surface plate 1 is lowered as shown by the solid line in FIG. 1 and FIG.
Are formed so as to surround both substrates A and B.
After the completion of the fine adjustment, or after a closed space S described later returns to the atmospheric pressure, it is raised to the initial state.

【0013】この閉空間Sには、図1の符号6に示すよ
うな外部に配設した例えば真空ポンプと連絡して、該閉
空間S内の気体、本実施例では空気を出し入れして所定
の真空度にする吸気手段が設けられる。この吸気手段6
は、コントローラー(図示せず)で動作制御され、上定
盤1及び下定盤2の接近移動により閉空間Sが形成され
た後に閉空間Sから吸気を開始し、両基板A,Bの微合
わせの終了後は閉空間Sに空気を供給して大気圧に戻
す。
The closed space S is connected to, for example, a vacuum pump disposed outside as shown by reference numeral 6 in FIG. There is provided a suction means for making the degree of vacuum equal to. This intake means 6
Is controlled by a controller (not shown) to start suction from the closed space S after the closed space S is formed by the approaching movement of the upper surface plate 1 and the lower surface plate 2, and finely align the substrates A and B. Is completed, air is supplied to the closed space S to return to the atmospheric pressure.

【0014】また、前記第一加圧手段5により接近させ
た両基板A,Bを、それらの間が環状接着剤Cで密閉さ
れる位置まで更に接近させる第二加圧手段7が設けられ
る。この第二加圧手段7は、本実施例の場合、前記移動
ブロック4aの上面から上定盤1の周縁部1aへ向けて
配設した上下方向へ伸縮自在なシリンダー7aからな
り、このシリンダー7aを上下方向へ短縮化して前記環
状シール4bを上下方向へ圧縮変形させることにより、
両基板A,Bが更に加圧されるようにしている。更に、
この第二加圧手段7は、コントローラー(図示せず)で
動作制御され、初期状態で図2(a)に示す如く上下方
向へ伸長しており、両基板A,Bの粗合わせ終了後に図
2(c)に示す如く短縮させ、両基板A,Bの微合わせ
終了後か、或いは後述する閉空間Sが大気圧に戻った後
は上昇させて初期状態に戻す。
Further, there is provided a second pressing means 7 for bringing the two substrates A and B brought closer by the first pressing means 5 closer to a position where the substrates A and B are closed by the annular adhesive C. In the case of the present embodiment, the second pressurizing means 7 comprises a vertically expandable and contractible cylinder 7a disposed from the upper surface of the moving block 4a toward the peripheral portion 1a of the upper surface plate 1. Is shortened in the vertical direction to compress and deform the annular seal 4b in the vertical direction.
Both substrates A and B are further pressed. Furthermore,
The operation of the second pressurizing means 7 is controlled by a controller (not shown), and in the initial state, the second pressurizing means 7 extends in the vertical direction as shown in FIG. After the fine adjustment of the two substrates A and B, or after the closed space S described later returns to the atmospheric pressure, it is raised and returned to the initial state as shown in FIG.

【0015】そして、前記閉空間Sの外側となる下定盤
2の底面には、例えばXYテーブル8aと、下定盤2を
XYθ方向へ移動させるための駆動源8bなどからなる
位置決め手段8が連設され、両基板A,Bに表示された
マークを顕微鏡とカメラで構成した検出手段8cから出
力されるデータに基づいて駆動源8bを作動させること
により、下定盤2及びこれに保持された下方基板BがX
Yθ方向へ調整移動して、粗合わせと微合わせを行う。
On the bottom surface of the lower stool 2 outside the closed space S, there are provided, for example, an XY table 8a and positioning means 8 including a drive source 8b for moving the lower stool 2 in the XYθ directions. By operating the drive source 8b based on data output from the detection means 8c composed of a microscope and a camera, the lower platen 2 and the lower substrate B is X
Adjustment and movement are performed in the Yθ direction to perform coarse and fine alignment.

【0016】更にまた、必要に応じて、前記上定盤1及
び下定盤2の対向面の両基板A,Bと当接する中央部分
には、クッション性に優れた材質でありながら上記位置
決め手段8によるXYθ方向への調整移動の際に位置ズ
レが発生しない程度の厚さ寸法に形成された緩衝材10
を配設しても良い。図示例の場合には、下定盤2の対向
面2bのみに、数mm厚さ寸法の緩衝材10を設けたが、
これに限定されず、上定盤1及び下定盤2の対向面の両
方か又は上定盤1の対向面のみに緩衝材10に設けても
良い。
Furthermore, if necessary, the center of the upper surface plate 1 and the lower surface plate 2 facing the two substrates A and B, which is in contact with both substrates A and B, is made of a material having excellent cushioning properties. Cushioning material 10 having such a thickness that no positional deviation occurs during the adjustment movement in the XYθ directions due to
May be provided. In the case of the illustrated example, the cushioning material 10 having a thickness of several mm is provided only on the facing surface 2b of the lower platen 2.
The present invention is not limited to this, and the cushioning material 10 may be provided on both the opposing surfaces of the upper stool 1 and the lower stool 2 or only on the opposing surface of the upper stool 1.

【0017】次に、斯かる液晶パネル用基板の貼り合わ
せ方法を工程順に従って説明する。先ず、図2(a)に
示す如く上定盤1及び下定盤2の対向面に基板A,Bを
夫々プリアライメントしてセットする。それにより、保
持手段3で両基板A,Bが夫々移動不能に吸着保持され
る。
Next, such a method of bonding the substrates for a liquid crystal panel will be described in the order of steps. First, as shown in FIG. 2A, substrates A and B are pre-aligned and set on opposing surfaces of an upper surface plate 1 and a lower surface plate 2, respectively. As a result, both substrates A and B are suction-held by the holding means 3 so as to be immovable.

【0018】その後、第一加圧手段5の作動で図2
(b)に示す如く上定盤1と下定盤2を互いに近づけ、
上定盤1の周縁部1aが環状シール4bに密接して、上
定盤1と下定盤2との間には、これら捧持された両基板
A,Bを囲むように閉空間Sが区画形成される。
Thereafter, the operation of the first pressurizing means 5 causes
As shown in (b), the upper surface plate 1 and the lower surface plate 2 are brought close to each other,
A peripheral space 1a of the upper stool 1 is in close contact with the annular seal 4b, and a closed space S is formed between the upper stool 1 and the lower stool 2 so as to surround the two substrates A and B thus dedicated. Is done.

【0019】これと同時に両基板A,Bは、上定盤1と
下定盤2の接近移動により、所定間隔まで接近し、この
状態で1mm以下の隙間をもって対峙している。しかし、
一方の基板Bに塗布した環状接着剤Cには、他方の基板
Aが接触せず、これら両基板A,Bの間と閉空間Sは連
通している。
At the same time, the substrates A and B approach each other up to a predetermined distance due to the approach movement of the upper surface plate 1 and the lower surface plate 2, and face each other with a gap of 1 mm or less in this state. But,
The other substrate A does not come into contact with the annular adhesive C applied to one substrate B, and the closed space S communicates between the two substrates A and B.

【0020】その後、吸気手段6の作動で閉空間Sから
空気が抜かれて所定の真空度になると共に、両基板A,
Bの間からも空気が抜かれて真空となる。この状態で、
位置決め手段8の作動により上定盤1と下定盤2を相対
的にXYθ方向へ調整移動させて、両基板A,Bの粗合
わせが行われる。
Thereafter, the air is evacuated from the closed space S by the operation of the suction means 6 to a predetermined degree of vacuum.
Air is also evacuated from between B and a vacuum is created. In this state,
By the operation of the positioning means 8, the upper surface plate 1 and the lower surface plate 2 are relatively adjusted and moved in the XYθ directions, and the two substrates A and B are roughly aligned.

【0021】そして、所定の真空度に到達したら、第二
加圧手段7の作動で図2(c)に示す如く上定盤1と下
定盤2が更に接近して環状シール4bを圧縮変形させ、
それにより両基板A,Bが更に接近して、一方の基板B
に塗布した環状接着剤Cに、他方の基板Aが密接して両
者間が密閉される。この状態で、位置決め手段8の作動
により上定盤1と下定盤2を相対的にXYθ方向へ調整
移動させて、両基板A,Bの微合わせが行われる。
When a predetermined degree of vacuum is reached, the upper platen 1 and the lower platen 2 come closer to each other as shown in FIG. ,
As a result, both substrates A and B come closer to each other, and one substrate B
The other substrate A is in close contact with the annular adhesive C applied on the substrate, and the two are sealed. In this state, the upper surface plate 1 and the lower surface plate 2 are relatively adjusted and moved in the X, Y, and θ directions by the operation of the positioning means 8, so that the two substrates A and B are finely aligned.

【0022】その後、図2(d)に示す如く保持手段3
の作動により上定盤1からのみ上方基板Aの吸着を解除
して、吸気手段6の作動により閉空間S内に空気を入れ
てその雰囲気を大気圧に戻す。それにより、両基板A,
Bの内外に生じる気圧差で均等に押し潰され、所定のギ
ャップが形成される。
Thereafter, as shown in FIG.
The suction of the upper substrate A is released only from the upper surface plate 1 by the operation of, and air is introduced into the closed space S by the operation of the suction means 6 to return the atmosphere to the atmospheric pressure. Thereby, both substrates A,
B is evenly crushed by a pressure difference generated inside and outside B, and a predetermined gap is formed.

【0023】この際、粗合わせを行う前の時点、具体的
には両基板A,Bのセット時に適正量の液晶を適正状態
で封入すれば、閉空間S内の雰囲気を大気圧に戻すこと
により、両基板A,Bの内外に生じる気圧差で均等に押
し潰されて、液晶が封入された状態で所定のギャップ形
成が可能となり、後工程で液晶を注入せずに液晶パネル
が制作できる。
At this time, the atmosphere in the closed space S is returned to the atmospheric pressure if a proper amount of liquid crystal is sealed in a proper state at the time before the rough alignment is performed, specifically, when the substrates A and B are set. Accordingly, a predetermined gap can be formed in a state where the liquid crystal is sealed by being evenly crushed by a pressure difference generated between the inside and outside of the substrates A and B, and a liquid crystal panel can be manufactured without injecting the liquid crystal in a later process. .

【0024】それ以降は、閉空間S内が大気圧に戻った
ら、第一加圧手段5の作動により上定盤1と下定盤2を
離して閉空間Sが開放され、アライメントされた両基板
A,Bを取り出して、上述した動作が繰り返される。
After that, when the inside of the closed space S returns to the atmospheric pressure, the first pressurizing means 5 operates to separate the upper surface plate 1 and the lower surface plate 2 to open the closed space S, and to align the aligned substrates. A and B are taken out and the above operation is repeated.

【0025】従って、上定盤1及び下定盤2の間のみを
密閉状態にしたままその外部でXYθ移動してアライメ
ントできる。その結果、位置決め手段8やその駆動源8
bなどが大気中に設置可能となり、通常部品が使用でき
ると共に、真空貫通部品もなくなり、それにより、構造
の簡略化が図れ、しかも真空遮断にコストもかかず、粗
合わせや微合わせに相当な力を必要としないから、駆動
形態の制約が無い。また、真空となる空間を最小にし
て、その分だけ真空ポンプの容量が小さくてすみ、大型
の基板でも生産性が高く製造できる。
Therefore, it is possible to perform XYθ movement outside and to align while keeping only the space between the upper surface plate 1 and the lower surface plate 2 in a sealed state. As a result, the positioning means 8 and its driving source 8
b can be installed in the atmosphere, normal parts can be used, and there is no vacuum penetrating part. Therefore, the structure can be simplified, and the cost of vacuum shut-off is not high. Since no force is required, there is no restriction on the driving form. In addition, the vacuum space can be minimized, the capacity of the vacuum pump can be reduced accordingly, and even a large substrate can be manufactured with high productivity.

【0026】更に必要に応じて、前記上定盤1及び下定
盤2の対向面のどちらか一方又は両方に、クッション性
に優れてXYθ方向への調整移動の際に位置ズレが発生
しない緩衝材10を配設した場合には、上定盤1及び下
定盤2の片当たりを防止して均一なギャップ形成が容易
となる。
Further, if necessary, one or both of the opposing surfaces of the upper surface plate 1 and the lower surface plate 2 have excellent cushioning properties and do not generate a positional shift when performing adjustment movement in the XYθ direction. When 10 is provided, the upper surface plate 1 and the lower surface plate 2 are prevented from coming into contact with one another, and uniform gap formation is facilitated.

【0027】一方、図3及び図4に示すものは、本発明
の他の実施例であり、このものは、前記第二加圧手段7
が、移動ブロック4aの上面から上定盤1の周縁部1a
へ向けて配設した上下方向へ伸縮自在なシリンダー7a
に代えて、上定盤1の対向面中央に形成された凹部1b
を閉塞すると共に上方基板Aを移動不能に保持する上下
方向のみ弾性変形可能な可撓性薄板材7bと、この可撓
性薄板材7bで閉鎖された凹部1b内の気体を出し入れ
して微合わせ時に可撓性薄板材7bが下方へ基板Bへ向
け膨出するように変形させる加圧部7cとからなる構成
が、前記図1及び図2に示した実施例とは異なり、それ
以外の構成は図1及び図2に示した実施例と同じもので
ある。
On the other hand, FIG. 3 and FIG. 4 show another embodiment of the present invention.
From the upper surface of the moving block 4a to the peripheral portion 1a of the upper platen 1.
Up and down telescopic cylinder 7a
In place of the recess 1b formed in the center of the facing surface of the upper platen 1.
And a flexible thin plate member 7b elastically deformable only in the vertical direction for holding the upper substrate A immovably and a gas in the concave portion 1b closed by the flexible thin plate member 7b for fine fitting. A configuration comprising a pressing portion 7c which deforms the flexible thin plate member 7b so as to swell downward toward the substrate B at times is different from the embodiment shown in FIG. 1 and FIG. Is the same as the embodiment shown in FIGS.

【0028】上記可撓性薄板材7bは、例えばステンレ
スなどの金属製フィルムなどの上下方向へは弾性変形可
能であるがXYθ方向へは変形不能に形成され、その中
央には、保持手段3として複数の吸引孔が開穿される。
上記加圧部7cは、コントローラー(図示せず)で動作
制御され、図4(a)に示す上記状態及び図4(b)に
示す粗合わせまで、閉鎖凹部1bの内圧が吸気手段6に
よる閉空間Sの内圧と同じになるように空気を出し入れ
し、粗合わせ後のみ図4(c)に示す如く閉鎖凹部1b
の内圧が閉空間Sの内圧より大きくなるように空気を入
れる。
The flexible thin plate member 7b is formed so as to be elastically deformable in the vertical direction but is not deformable in the XYθ direction, such as a metal film such as stainless steel. A plurality of suction holes are drilled.
The operation of the pressurizing section 7c is controlled by a controller (not shown), and the internal pressure of the closing recess 1b is closed by the intake means 6 until the state shown in FIG. 4A and the rough adjustment shown in FIG. Air is taken in and out so as to be the same as the internal pressure of the space S, and only after the rough adjustment, as shown in FIG.
Is supplied so that the internal pressure of the closed space S becomes larger than the internal pressure of the closed space S.

【0029】従って、図3及び図4に示すものは、粗合
わせ後、図4(c)に示す如く閉鎖凹部1bの内圧上昇
により可撓性薄板材7bが膨出変形して、それに保持さ
れた上方基板Aを下方基板Bへ更に接近して両者間が環
状接着剤Cで密閉させることにより、これら両基板A,
Bが微合わせ時に最終ギャップ近くまで均等に潰され
る。その結果、前記図1及び図2に示した実施例よりも
剛体製上定盤1及び下定盤2は対向面の平坦度や定盤間
の平行精度により基板A,B同士の局所加圧を招き易い
が、これら基板A,B同士の局所加圧を完全に防止でき
て製品が傷付かないという利点がある。
3 and 4, after the rough alignment, as shown in FIG. 4 (c), the internal pressure of the closed recess 1b causes the flexible thin plate 7b to swell and deform, and is held there. The upper substrate A is further approached to the lower substrate B and the space between them is sealed with the annular adhesive C.
B is evenly crushed to near the final gap at the time of fine alignment. As a result, compared to the embodiment shown in FIGS. 1 and 2, the rigid upper platen 1 and lower platen 2 apply local pressurization between the substrates A and B due to the flatness of the facing surface and the parallel accuracy between the platens. Although it is easy to invite, there is an advantage that the local pressurization between these substrates A and B can be completely prevented and the product is not damaged.

【0030】尚、前示実施例では、上方の加圧板1が、
上下方向へ往復動自在な上定盤であり、下方の加圧板2
がXYθ方向へ調整移動自在に支持された下定盤である
場合を示したが、これに限定されず、これと逆に上定盤
をXYθ方向へ調整移動自在に支持し、下定盤を上下方
向へ往復動自在に支持しても良い。更に真空雰囲気中で
アライメントする場合を示したが、これに限定されず、
特殊ガス雰囲気中でアラメイントする場合も同様である
In the embodiment shown above, the upper pressing plate 1 is
An upper surface plate that can reciprocate up and down.
Is a lower platen supported movably in the XYθ direction. However, the present invention is not limited to this. On the contrary, the upper platen is supported movably in the XYθ direction, and the lower platen is vertically moved. It may be supported reciprocally. Furthermore, the case where alignment is performed in a vacuum atmosphere has been described, but is not limited thereto.
The same applies when alaminate is used in a special gas atmosphere.

【0031】また、基板A,Bの保持手段3、移動シー
ル手段4、第一加圧手段5、吸気手段6、第二加圧手段
7及び位置決め手段8は、図示された構造に限定され
ず、同様に作用すれば他の構造でも良い。特に基板A,
Bを移動不能に保持する保持手段3は、吸気手段6によ
る閉空間S内の真空度が低真空であれば、真空差を利用
した真空吸着を使用できるが、この真空差を利用できな
くなる程度まで閉空間S内が高真空になる場合には、保
持手段3として静電チャックや粘着フィルムを使用する
ことにより基板A,Bを移動不能に保持する必要があ
る。また更に移動シール手段4の駆動真空シール4cに
代えて磁性流体式真空シールを使用しても良い。
The holding means 3, the moving sealing means 4, the first pressing means 5, the suction means 6, the second pressing means 7 and the positioning means 8 for the substrates A and B are not limited to the structures shown in the drawings. Other structures may be used as long as they work in the same manner. In particular, substrate A,
If the degree of vacuum in the closed space S by the suction means 6 is low, the holding means 3 for holding B immovably can use vacuum suction utilizing a vacuum difference, but this vacuum difference cannot be used. In the case where the inside of the closed space S is at a high vacuum, the substrates A and B need to be immovably held by using an electrostatic chuck or an adhesive film as the holding means 3. Further, a magnetic fluid type vacuum seal may be used in place of the drive vacuum seal 4c of the moving seal means 4.

【0032】[0032]

【発明の効果】以上説明したように、本発明のうち請求
項1、2記載の発明は、二枚の基板を保持した加圧板が
接近移動することにより、相互の周縁部の間を移動シー
ル手段で密閉して閉空間が区画形成されると共に、両基
板が所定間隔まで接近し、その後、この閉空間内の空気
を抜きながら、両加圧板を相対的にXYθ方向へ調整移
動させて、両基板の粗合わせが行われ、所定の真空度に
到達してから、上記移動シール手段を変形させて両基板
の間が環状接着剤で密閉される位置まで更に接近し、こ
の状態で、上記両加圧板を相対的にXYθ方向へ調整移
動させて、両基板の微合わせが行われ、その後、上記加
圧板の一方からのみ基板を解放して、上記閉空間内を大
気圧に戻すことにより、両基板の内外に生じる気圧差で
均等に押し潰されて所定のギャップが形成されるので、
両加圧板の間のみを密閉状態にしたままその外部でXY
θ移動してアライメントできる。従って、外部から駆動
伝達により真空チャンバー内の位置決め手段をXYθ移
動してアライメントする従来のものに比べ、位置決め手
段やその駆動源などが大気中に設置可能となり、通常部
品が使用できると共に、真空貫通部品もなくなり、その
結果、構造の簡略化が図れ、しかも真空遮断にコストも
かかず、粗合わせや微合わせに相当な力を必要としない
から、駆動形態の制約が無い。また、真空となる空間を
最小にして、その分だけ真空ポンプの容量が小さくてす
み、大型の基板でも生産性が高く製造できる。
As described above, according to the first and second aspects of the present invention, when the pressing plate holding the two substrates moves close to each other, the movable plate is moved between the peripheral portions. A closed space is defined by means closed, and the two substrates approach each other up to a predetermined distance.After that, while bleeding air from the closed space, the two pressing plates are relatively adjusted and moved in the XYθ directions. After the two substrates are roughly aligned and a predetermined degree of vacuum is reached, the moving sealing means is deformed to further approach a position where the two substrates are hermetically sealed with an annular adhesive. The two pressure plates are relatively adjusted in the XYθ directions to finely align the two substrates. Thereafter, the substrate is released from only one of the pressure plates, and the inside of the closed space is returned to atmospheric pressure. , Evenly crushed by the pressure difference between the inside and outside of both substrates Since a predetermined gap is formed,
While keeping only the space between the two pressure plates in a sealed state, XY
It can be moved by θ for alignment. Therefore, the positioning means and its driving source can be installed in the atmosphere as compared with the conventional method in which the positioning means in the vacuum chamber is moved by XYθ by external drive transmission, so that normal components can be used and vacuum penetration can be performed. There are no parts, and as a result, the structure can be simplified, the cost is not required for vacuum shut-off, and a considerable force is not required for rough or fine alignment, so that there is no restriction on the driving form. In addition, the vacuum space can be minimized, the capacity of the vacuum pump can be reduced accordingly, and even a large substrate can be manufactured with high productivity.

【0033】請求項3、4の発明は、請求項1または2
の発明の効果に加えて、粗合わせ後、閉鎖凹部の内圧上
昇により可撓性薄板材が膨出変形して、それに保持され
た一方基板を他方基板へ更に接近して両者間が環状接着
剤Cで密閉させることにより、これら両基板が微合わせ
時に最終ギャップ近くまで均等に潰されるので、剛体製
加圧板の平坦度や平行精度に関係なく基板同士の局所加
圧を防止する。従って、剛体製の加圧板は対向面の平坦
度や定盤間の平行精度により基板同士の局所加圧を招き
易いが、これら基板同士の局所加圧を完全に防止できて
製品が傷付かない。
The invention of claims 3 and 4 is the first or second invention.
In addition to the effect of the invention, after the rough alignment, the flexible thin plate material swells and deforms due to an increase in the internal pressure of the closed concave portion, and the one substrate held thereby is brought closer to the other substrate to form an annular adhesive therebetween. By sealing with C, these two substrates are evenly crushed to near the final gap at the time of fine alignment, thereby preventing local pressing of the substrates regardless of the flatness and parallel accuracy of the rigid pressing plate. Therefore, the rigid pressure plate easily causes local pressurization between the substrates due to the flatness of the opposing surface and the parallel accuracy between the surface plates, but the local pressurization between these substrates can be completely prevented and the product is not damaged. .

【0034】請求項5の発明は、請求項2または4の発
明の効果に加えて、閉空間内の雰囲気を大気圧に戻すこ
とにより、両基板の内外に生じる気圧差で均等に押し潰
されて、液晶が封入された状態で所定のギャップ形成が
可能となるので、後工程で液晶を注入せずに液晶パネル
を制作できる。
According to a fifth aspect of the present invention, in addition to the effect of the second or fourth aspect, by returning the atmosphere in the closed space to the atmospheric pressure, the substrate is evenly crushed by a pressure difference between the inside and outside of the two substrates. Thus, a predetermined gap can be formed in a state where the liquid crystal is sealed, so that a liquid crystal panel can be manufactured without injecting the liquid crystal in a later process.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明の一実施例を示す液晶パネル用基板の
貼り合わせ装置の縦断正面図である。
FIG. 1 is a longitudinal sectional front view of an apparatus for bonding a substrate for a liquid crystal panel according to an embodiment of the present invention.

【図2】 (a)〜(d)は液晶パネルの製造方法を工
程順に示す説明図である。
FIGS. 2A to 2D are explanatory views showing a method of manufacturing a liquid crystal panel in the order of steps.

【図3】 本発明の他の実施例を示す液晶パネル用基板
の貼り合わせ装置の縦断正面図である。
FIG. 3 is a vertical sectional front view of a liquid crystal panel substrate bonding apparatus according to another embodiment of the present invention.

【図4】 (a)〜(d)は液晶パネルの製造方法を工
程順に示す説明図である。
FIGS. 4A to 4D are explanatory views showing a method of manufacturing a liquid crystal panel in the order of steps.

【図5】 従来の液晶パネル用基板の貼り合わせ装置の
一例を示す縦断正面図である。
FIG. 5 is a vertical sectional front view showing an example of a conventional liquid crystal panel substrate bonding apparatus.

【符号の説明】[Explanation of symbols]

A,B 基板 C 環状接着剤 S 閉空間 1 加圧板(上定
盤) 1a 周縁部 1b 凹部 2 加圧板(下定盤) 2a 周縁部 3 保持手段 4 移動シール手
段 5 第一加圧手段 6 吸気手段 7 第二加圧手段 7b 可撓性薄板
材 7c 加圧部 8 位置決め手段
Reference Signs List A, B substrate C annular adhesive S closed space 1 pressure plate (upper platen) 1a peripheral portion 1b concave portion 2 pressure plate (lower platen) 2a peripheral portion 3 holding device 4 moving sealing device 5 first pressing device 6 suction device 7 Second pressing means 7b Flexible thin plate material 7c Pressing part 8 Positioning means

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 2H088 EA02 FA04 FA10 FA16 FA17 FA20 FA30 MA20 2H089 NA38 NA49 NA60 QA12 QA14 5G435 AA17 BB12 KK05 KK10  ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2H088 EA02 FA04 FA10 FA16 FA17 FA20 FA30 MA20 2H089 NA38 NA49 NA60 QA12 QA14 5G435 AA17 BB12 KK05 KK10

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 上下一対の加圧板(1,2)に対して夫
々着脱自在に保持された二枚の基板(A,B)を真空中
で重ね合わせ、位置決め手段(8)により相対的にXY
θ方向へ調整移動して両基板(A,B)の粗合わせ及び
微合わせを行い、更に両基板(A,B)を加圧して所定
のギャップまで潰す液晶パネル用基板の貼り合わせ装置
において、 前記両加圧板(1,2)の対向面に設けられた基板
(A,B)を移動不能に保持する保持手段(3)と、 両加圧板(1,2)の対向する周縁部(1a,2a)間
の密閉状態を維持したまま相対的にXYθ方向へ移動自
在に支持する上下方向へ弾性変形可能な移動シール手段
(4)と、 両加圧板(1,2)を相対的に接近移動して、これら両
加圧板(1,2)の間に両基板(A,B)が囲まれるよ
うに閉空間(S)を区画形成すると共に、両基板(A,
B)を所定間隔まで接近させる第一加圧手段(5)と、 上記閉空間(S)内の気体を出し入れして所定の真空度
にする吸気手段(6)と、 上記第一加圧手段(5)により接近させた両基板(A,
B)を、それらの間が環状接着剤(C)で密閉される位
置まで更に接近させる第二加圧手段(7)と、 上記第一加圧手段(5)及び第二加圧手段(7)の作動
状態で、両加圧板(1,2)を相対的にXYθ方向へ調
整移動させるための閉空間(S)外に配設した位置決め
手段(8)と、を備えたことを特徴とする液晶パネル用
基板の貼り合わせ装置。
1. Two substrates (A, B) detachably held on a pair of upper and lower pressing plates (1, 2) are superposed in a vacuum, and relatively positioned by a positioning means (8). XY
In a device for bonding a substrate for a liquid crystal panel, the two substrates (A, B) are adjusted and moved in the θ direction to roughly and finely adjust both substrates (A, B), and then pressurize the two substrates (A, B) to crush them to a predetermined gap. Holding means (3) for immovably holding the substrates (A, B) provided on the opposing surfaces of the pressure plates (1, 2); and opposing peripheral portions (1a) of the pressure plates (1, 2) , 2a), the movable sealing means (4), which is movably supported in the XYθ direction while maintaining the hermetically sealed state, and which can be elastically deformed in the vertical direction, and the pressure plates (1, 2) are relatively close to each other. It moves to form a closed space (S) between the two pressure plates (1, 2) so as to surround the two substrates (A, B), and to form the closed space (S).
A first pressurizing means (5) for bringing B) close to a predetermined interval; a suction means (6) for taking in and out gas in the closed space (S) to make a predetermined degree of vacuum; Both substrates (A,
(B) a second pressurizing means (7) for further bringing the space between them to a position sealed with an annular adhesive (C), and the first pressurizing means (5) and the second pressurizing means (7). ), A positioning means (8) disposed outside the closed space (S) for adjusting and moving the two pressing plates (1, 2) relatively in the XYθ directions. For bonding liquid crystal panel substrates.
【請求項2】 上下一対の加圧板(1,2)に対して夫
々着脱自在に保持された二枚の基板(A,B)を真空中
で重ね合わせ、位置決め手段(8)により相対的にXY
θ方向へ調整移動して両基板(A,B)の粗合わせ及び
微合わせを行い、更に両基板(A,B)を加圧して所定
のギャップまで潰す液晶パネル用基板の貼り合わせ方法
において、 前記両加圧板(1,2)の対向面に夫々二枚の基板
(A,B)を移動不能に保持するステップと、 これら両加圧板(1,2)の接近移動により、相互の対
向する周縁部(1a,2a)の間を上下方向へ弾性変形
可能な移動シール手段(4)で密閉して、両基板(A,
B)が囲まれるように閉空間(S)を区画形成すると共
に、該閉空間(S)内の両基板(A,B)を所定間隔ま
で接近させるステップと、 この閉空間(S)内の空気を抜きながら、両加圧板
(1,2)を相対的にXYθ方向へ調整移動させて、両
基板(A,B)の粗合わせを行うステップと、 この閉空間(S)内が所定の真空度に到達してから、上
記移動シール手段(4)を変形させて、両基板(A,
B)の間が環状接着剤(C)で密閉される位置まで更に
接近させるステップと、 上記両加圧板(1,2)を相対的にXYθ方向へ調整移
動させて、更に接近した両基板(A,B)の微合わせを
行うステップと、 上記加圧板(1,2)のどちらか一方から一枚の基板
(A,B)を解放させ、上記閉空間(S)内を大気圧に
戻して、両基板(A,B)の内外に生じる気圧差により
所定のギャップまで均等に押し潰すステップとからな
り、 これらのステップを順次行うことを特徴とする液晶パネ
ル用基板の貼り合わせ方法。
2. The two substrates (A, B) detachably held on a pair of upper and lower pressing plates (1, 2) are superposed in a vacuum, and relatively positioned by a positioning means (8). XY
In the method of bonding the substrates for liquid crystal panels, the substrates (A, B) are roughly adjusted and finely adjusted by adjusting and moving in the θ direction, and the substrates (A, B) are further pressed and crushed to a predetermined gap. Holding the two substrates (A, B) immovably on the opposing surfaces of the pressure plates (1, 2); and opposing each other by the approaching movement of the pressure plates (1, 2). The space between the peripheral portions (1a, 2a) is sealed by a movable sealing means (4) which can be elastically deformed in the vertical direction, and both substrates (A, 2a) are sealed.
Forming a closed space (S) so as to surround B), and bringing both substrates (A, B) in the closed space (S) closer to a predetermined distance; Adjusting the relative movement of the two pressing plates (1, 2) in the X, Y, and θ directions while bleeding air to roughly match the two substrates (A, B); After the degree of vacuum is reached, the moving sealing means (4) is deformed so that both substrates (A,
(B) further approaching a position to be sealed with the annular adhesive (C); and adjusting the two pressing plates (1, 2) relatively in the XYθ direction to move the two substrates ( (A) and (B), and one substrate (A, B) is released from one of the pressure plates (1, 2), and the inside of the closed space (S) is returned to atmospheric pressure. And a step of uniformly crushing a predetermined gap by a pressure difference between the inside and outside of the two substrates (A, B), and sequentially performing these steps.
【請求項3】 前記第二加圧手段(7)が、 一方加圧板(1)の対向面中央に形成された凹部(1
b)を閉塞すると共に、一方基板(A)を移動不能に保
持する上下方向のみ弾性変形可能な可撓性薄板材(7
b)と、 この可撓性薄板材(7b)で閉鎖された凹部(1b)内
の気体を出し入れして、微合わせ時に可撓性薄板材(7
b)が他方基板(B)へ向け膨出するように変形させる
加圧部(7c)と、からなる請求項1記載の液晶パネル
用基板の貼り合わせ装置。
3. A recess (1) formed in the center of the facing surface of the pressure plate (1).
b), and a flexible thin plate member (7) that can be elastically deformed only in the vertical direction to hold the substrate (A) immovably.
b), the gas in the recess (1b) closed by the flexible thin plate (7b) is taken in and out, and the flexible thin plate (7
2. The apparatus for bonding a substrate for a liquid crystal panel according to claim 1, wherein b) comprises a pressurizing portion (7c) for deforming so as to bulge toward the other substrate (B).
【請求項4】 前記一方加圧板(1)の対向面中央に形
成された凹部(1b)を閉塞する上下方向のみ弾性変形
可能な可撓性薄板材(7b)に、一方基板(A)を移動
不能に保持するステップと、 上記閉鎖凹部(1b)の内圧と閉空間(S)の内圧を同
じにして粗合わせするステップと、 この粗合わせ後に、閉空間(S)内が所定の真空度に到
達してから、上記閉鎖凹部(1b)の内圧上昇により可
撓性薄板材(7b)を膨出変形させて、それに保持され
た一方基板(A)を他方基板(B)へ向け更に接近移動
させるステップと、を有する請求項2記載の液晶パネル
用基板の貼り合わせ方法。
4. A substrate (A) is attached to a flexible thin plate (7b) elastically deformable only in the vertical direction to close a recess (1b) formed at the center of the facing surface of the one-side pressing plate (1). A step of keeping the inner space immovable; a step of roughly adjusting the inner pressure of the closed recess (1b) and the inner pressure of the closed space (S) to be the same; , The flexible thin plate member (7b) is swelled and deformed by an increase in the internal pressure of the closed recess (1b), and the one substrate (A) held by the flexible thin plate member (7b) further approaches the other substrate (B). 3. The method for bonding a substrate for a liquid crystal panel according to claim 2, comprising the step of moving.
【請求項5】 前記粗合わせを行う前の時点で、両基板
(A,B)の間に適正量の液晶を注入した請求項2また
は4記載の液晶パネル用基板の貼り合わせ方法。
5. The method according to claim 2, wherein a suitable amount of liquid crystal is injected between the substrates (A, B) before the rough alignment.
JP2000331179A 2000-10-30 2000-10-30 LCD panel substrate bonding equipment Expired - Fee Related JP3542956B2 (en)

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TW090126007A TWI250338B (en) 2000-10-30 2001-10-22 Lamination device for laminating substrate for liquid crystal panel
KR1020010066606A KR100653339B1 (en) 2000-10-30 2001-10-29 Apparatus and method for attaching substrate for Liquid Crystal Panel

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TWI250338B (en) 2006-03-01
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KR100653339B1 (en) 2006-12-04

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