JP2002127133A - Scribing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a scribing apparatus capable of efficiently transmitting a vibration of a vibration actuator to a cutter without laterally deviating the cutter. SOLUTION: The scribing apparatus comprises a housing 25, a main shaft 26 partly contained in the housing 25 and allowed to linearly move in an axial direction to the housing 25, the vibration actuator 27 disposed between the housing 25 and the shaft 26 to vibrate the shaft 26, and the cutter 12 coupled to the shaft 26. The apparatus further comprises a plurality of keyways 26c extended parallel to the axial direction and formed on an outer periphery of the shaft 26. A rotation inhibitor 36 engaged with the keyway 26 is provided in the housing 25. The rotation inhibitor 36 is adjustable at its position toward the keyway 26c.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scribe apparatus for forming a scribe line on a work made of a brittle material such as glass and semiconductor.

[0002]

2. Description of the Related Art A scribe apparatus for forming a scribe line on the surface of a work made of a brittle material has been known. The scribe device has a piezo actuator for generating vibration in the scribe main body, and vibrates a cutter provided at a lower end of the scribe main body by the piezo actuator. Then, the vibrated cutter is pressed against the surface of the work, the cutter is moved, and a scribe line (cut line) is formed on the surface of the work. The workpiece is cut by applying a load along the scribe line.

FIG. 7 shows a vibration generating mechanism (scribe main body) of a scribing device proposed by the applicant (Japanese Patent Application No. Hei 11 (1999)).
223546). The housing 1 accommodates piezo actuators 3 and 3 as vibration actuators. The upper portion of the main shaft 2 is arranged in the housing 1 so as to be able to reciprocate up and down. A cutter (not shown) is attached to a lower end of the main shaft 2. The piezo actuators 3 are arranged in the main shaft 2 such that the main shaft 2 can vibrate in the axial direction with respect to the housing 1.

[0004] The main shaft 2 is supported by the housing 1 by a first support mechanism 4 and a second support mechanism 5 so as to be able to move a small amount in the direction along the center line L. The first support mechanism 4 is arranged above the piezo actuators 3, 3, and the second support mechanism 5 is arranged below the piezo actuators 3, 3. The first support mechanism 4 includes a guide member 4 a provided on the upper wall of the housing 1 and a slide hole 4 b having a circular cross section formed through the upper wall of the main shaft 2. The guide member 4a penetrates the upper wall of the housing 1 and is inserted into the slide hole 4b with a small clearance. Thus, the upper end of the main shaft 2 is slidably supported by the housing 1. The second support mechanism 5 includes a leaf spring 6 and a spherical ball 7 made of rubber. The both ends of the leaf spring 6 are fixed to the projecting portion 1 a of the housing 1, and the center thereof is fixed to the spring fixing portion 2 a of the main shaft 2.

According to the conventional scribing device, since the vertical movement of the main shaft 2 is only guided by the first support mechanism 4, the piezoelectric actuators 3, 3
Can be efficiently transmitted to the main shaft. Also,
Since the plate spring 6 of the second support mechanism 5 applies a pressure to the piezo actuators 3 and 3 via the main shaft 2, the vibration of the main shaft 2 and the vibration of the cutter are added to the vibration of the piezo actuators 3 and 3. Can be followed.

[0006]

However, in the conventional scribing device, the main shaft 2 is supported only by the first support mechanism 4 and the second support mechanism 5, so that the main shaft 2 is not horizontal. There is a problem of swinging in the direction.
For this reason, along with the vibration in the vertical direction where the cutter is desired,
In some cases, it could swing in the horizontal direction. If the cutter oscillates in the horizontal direction, it becomes impossible to form a scribe line on the workpiece with high accuracy, for example, at the same position repeatedly. Further, when the main shaft 2 swings in the horizontal direction, a lateral component force is generated in the pressing force applied from the cutter to the work, and it becomes difficult to generate cracks in the work in the vertical direction.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a scribing device that does not swing the cutter in the lateral direction and that can efficiently transmit the vibration of the vibration actuator to the cutter.

[0008]

Hereinafter, the present invention will be described. In addition, in order to facilitate understanding of the present invention, reference numerals in the accompanying drawings are added in parentheses, but the present invention is not limited to the illustrated embodiment.

The inventor of the present invention has provided a keyway extending in the axial direction on the main shaft, and provided in the housing a detent portion which fits into the keyway so as to be able to advance and retreat toward the keyway. It has been found that the vibration of the vibration actuator is efficiently transmitted to the cutter without vibration. More specifically, the present invention relates to a scribing device for forming a scribe line on a workpiece (11) by applying vibration to a cutter (12), comprising a housing (25) and a housing (2).
5) a part of which is accommodated in the housing (25) and which is allowed to linearly move only in the axial direction with respect to the housing (25), and is disposed between the housing (25) and the main shaft (26). A vibration actuator (27) for vibrating the main shaft (26); and a cutter (12) connected to the main shaft (26).
A plurality of key grooves (26c) extending parallel to the axial direction of the main shaft (26) are formed, and the housing (25) is provided with a detent part (3) fitted into the key groove (26c).
6) is provided, and the above-described problem is solved by the scribe device, wherein the position of the detent portion (36) is adjustable toward the key groove (26c).

According to the present invention, the main shaft is formed with a key groove like a spline shaft, and the housing is provided with a rotation preventing portion which fits into the key groove, so that the main shaft is linearly aligned with the housing in the axial direction. Movement is allowed and rotation is prevented. Therefore, it is possible to prevent the main shaft from oscillating in the lateral direction, and hence the cutter from oscillating in the lateral direction.

Further, according to the present invention, the position of the rotation preventing portion can be adjusted toward the keyway, so that the gap between the main shaft and the rotation preventing portion can be adjusted, and the vibration of the vibration actuator can be efficiently reduced. The power can be transmitted to the main shaft and thus to the cutter. If the detent is pressed too much on the main shaft, the main shaft will not vibrate. On the other hand, if there is too much clearance between the detent portion and the main shaft, the main shaft will swing in the lateral direction.

[0012] The present invention also relates to the key groove (2).
6c) is provided at regular intervals in the circumferential direction of the main shaft (26).

According to the present invention, the main shaft can be supported substantially evenly in the circumferential direction, so that the main shaft can be supported with good balance.

The present invention also relates to the housing (25).
Is provided with a leaf spring (28) having both ends fixed to the housing (25), and the main shaft (26) has an outer peripheral surface in line contact with the leaf spring (28) and a leaf spring (2).
A pin (52) extending in a direction perpendicular to the axis of 8) is provided, and the leaf spring (28) applies a pressure to the vibration actuator (27) via the pin (52). .

According to the present invention, since the leaf spring applies pressure to the vibration actuator, the vibration of the main shaft can follow the vibration of the vibration actuator. Also, since the outer peripheral surface of the pin makes line contact with the leaf spring and extends in a direction perpendicular to the axis of the leaf spring, the pin moves in the axial direction of the leaf spring by bending of the leaf spring. Is suppressed. This suppresses the main shaft from oscillating in the lateral direction.

Further, according to the present invention, a through hole (51) is formed in the main shaft (26) in a direction perpendicular to the axis, and the pin (52) is bridged in the through hole (51), A spring (28) passes through the through-hole (51) and passes through the main shaft (2).
6).

According to the present invention, the pins can be arranged on the axis of the main shaft, and a pressure can be applied on the center line of the main shaft.

Further, the present invention is characterized in that the natural frequency of the leaf spring (28) is set higher than the frequency of the vibration actuator (27).

According to the present invention, the main shaft can be kept in close contact with the vibration actuator regardless of the vibration frequency of the vibration actuator, and therefore, the vibration of the main shaft can reliably follow the vibration of the vibration actuator.

The present invention also relates to the housing (25).
Is provided with a pressurizing adjustment mechanism (42) for adjusting the position of the vibration actuator (27) in the axial direction, and the housing (25) is connected to the housing (25) by the repulsive force of the main shaft (26). (25) An assembly adjustment magnet (29a, 29b) biasing to a predetermined position is provided.

When the position of the vibration actuator in the axial direction is adjusted by the pressure adjustment mechanism, the pressure applied from the leaf spring to the vibration actuator is adjusted. In order to apply an appropriate pressurization to the vibration actuator, it is necessary to accurately manage the amount by which the pin provided on the main shaft deflects the leaf spring. According to the present invention, when the preload adjusting mechanism is operated and the main shaft is moved, the urging of the main shaft to the housing is released. Thereby, a repulsive force by the assembly adjustment magnet acts on the pressurizing adjustment mechanism. By sensing this repulsive force, it can be seen that the main shaft has slightly moved from the predetermined position. If the preload adjusting mechanism is further operated based on this position, the amount of movement of the spindle can be accurately grasped. Thus, the amount by which the pin provided on the main shaft deflects the leaf spring can be accurately managed.

Further, according to the present invention, the vibration actuator (27) includes the housing (25) and the main shaft (2).
It is characterized by being substantially covered by 6).

According to the present invention, since the sound generated from the vibration actuator or the like is trapped in the housing, the noise can be suppressed.

[0024]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 shows a scribe device according to an embodiment of the present invention. This scribing apparatus is provided with a cutter 12 (a head, a chisel, etc.)
A scribe line is formed by using a contact member. Work 1
The cutter 12 is in contact with the surface 1. By vibrating the cutter 12 and vibrating the pressing force applied to the work 11 from the cutter 12, a vertical crack 14 is generated perpendicular to the work surface 11a.

The scribing device includes a base plate 15
And a moving mechanism 23 for moving the base plate 15 two-dimensionally in the horizontal direction, a linear guide device 21 such as a linear guide attached to the base plate, and attached to the linear guide device 21 to be capable of linearly moving in the vertical direction. Scribe body 17, a weight 18 for applying a load to scribe body 17, a pair of load magnets 19 for transmitting the load of weight 18 to scribe body 17 using magnetic force, and a static load applied to the workpiece from the cutter using magnetic force. And a pair of levitation magnets 20 for adjusting the height. A linear guide device 22 such as a linear guide is provided between the base plate 15 and the weight 18 so that the weight 18 can linearly move in a direction perpendicular to the base plate 15.

FIG. 2 and FIG. 3 show the scribe main body 17. FIG. 2 is a vertical sectional view of the scribe main body 17, and FIG. 3 is a bottom view of the scribe main body 17 (excluding the main shaft). The scribe main body 17 is connected to the housing 2
5, a main shaft 26 whose upper part is housed in the housing 25 and which is allowed to linearly move only in the axial direction with respect to the housing 25, and which is disposed between the housing 25 and the main shaft 26, and vibrates the main shaft 26. A piezo actuator 27 as a vibrating actuator and a cutter 12 (see FIG. 1) connected to a lower end of the main shaft 26 are provided. A pressure is applied to the piezo actuator 27 by a leaf spring 28. In addition, the housing 25 is provided with a pair of assembly adjusting magnets 29a and 29b that repel each other to facilitate assembly adjustment. Housing 2
5. The center lines L of the main shaft 26 and the piezo actuator 27 substantially coincide with each other. In the case of this embodiment, the center line L
Is oriented vertically.

The housing 25 has the shape of a vertically elongated box. The housing 25 has a housing body 25a having a through hole formed in the vertical direction, an upper lid 25b attached to the upper surface of the housing body 25a, and a through hole 30 attached to the lower surface of the housing body 25a and through which the main shaft 26 passes. And a pedestal 31 provided on the upper surface of the lower lid 25c and supporting the assembly adjustment magnets 29a and 29b. Housing body 25
In a, a first accommodating chamber 32 mainly accommodating the piezo actuator 27, a second accommodating chamber 33 mainly accommodating the main shaft 26, and a second accommodating magnet 29a and 29b for assembling adjustment. And three accommodation chambers 34. The second storage chamber 33 is formed to have a circular cross section, and the diameter thereof is set slightly larger than the diameter of the main shaft 26. The first accommodation room 32
The inner diameter of the housing 25 is larger than that of the second storage chamber 33 so as to form a large space in the housing 25. The diameter of the third storage chamber 34 is slightly larger than that of the second storage chamber 33 so that a step 35 is formed between the third storage chamber 34 and the second storage chamber 33. This step 35 has a flange 2 of a spindle 26 to be described later.
6a engage.

The second storage chamber 33 of the housing body 25a
A plurality of detent portions 36 are provided in the portion at equal intervals in the circumferential direction, for example, at equal intervals of 120 degrees. In the case of this embodiment, a total of six detents 36 are provided vertically (see FIG. 4). The detent portions 36 are composed of a spherical body 36a and a male screw 36b for adjusting the position of the spherical body 36a by moving the spherical body 36a back and forth toward a key groove (described later in detail) formed in the main shaft 26. A female screw 37 screwed to the male screw 36b is formed in the housing main body 25a so as to communicate with the second storage chamber 33. By turning the male screw 36b and adjusting the position of the male screw 36b with respect to the female screw 37, the spherical body 36 is formed.
Adjust the position of a ... As the material of the spheres 36a, an alloy such as duralumin is used.

On one side surface of the housing main body 25 on the side of the linear guide device 21, a screw portion 38 for mounting to the linear guide device 21 is formed. An intake port 40 and an exhaust port 39 for cooling the piezo actuator 27 are formed on the other side surface of the housing body 25a. Inlet 40
Is provided so as to communicate with the second accommodation room 33, and the exhaust port 39 is provided so as to communicate with the first accommodation room 32. Dry air is taken in and out from the inlet 40 and the outlet 39. In addition, in the intake port 40 and the exhaust port 39,
A silencer is provided as necessary so as to suppress noise generated from the piezo actuator 27.

A screw hole 41 is formed in the upper lid 25b of the housing 25, and a pressure adjusting screw 42 serving as a pressure adjusting mechanism is screwed into the screw hole 41. The lower end of the adjusting screw 42 is in contact with the upper surface of a receiving seat 43 provided on the upper end of the piezo actuator 27. The lower end of the adjusting screw 42 has a convex conical surface and is fitted into the concave conical surface of the receiving seat 43. The adjustment screw 42 has an upper lid 25
A lock nut 47 for fixing the adjustment screw 42 is screwed into b. The load magnet 1 is provided on the upper surface of the upper lid 25b.
One of 19 is fixed.

As shown in FIG. 3, a slit 44 is formed in the lower lid 25c of the housing 25. Lower lid 25
A bush 46 having a slit 45 is provided between c and the main shaft 26. Lower cover 25 with gap adjusting screw 47
c. Tighten the slit of the bush 46. The gap between the slits 44 and 45 is adjusted such that a slight gap is left between the bush 46 and the main shaft 26 without the bush touching the main shaft 26.

As shown in FIG. 2, the housing 25 includes
The piezo actuator 27 is housed. The piezo actuator 27 has a rectangular cross section, and has a piezoelectric element inside. The piezo actuator 27 is provided with an electrode (not shown). When a high-frequency electric field is applied to this electrode, the piezoelectric actuator 27 periodically generates an axial vibration. The upper end surface of the piezo actuator 27 contacts the seat 43, and the lower end surface of the piezo actuator 27 contacts the main shaft 26. Note that a plurality of piezo actuators 27 may be connected in series to increase the amplitude.

The main shaft 26 is moved by a small amount along the center line by the rotation preventing portion 36 so that the housing 25 is movable.
It is supported by. The main shaft 26 includes an upper main shaft 26d housed in the housing 25 and a lower main shaft 26e press-fit into the upper main shaft 26d. A piezo actuator housing hole 48 is formed in the upper main shaft 26d. On the bottom surface of the accommodation hole 48, a rectangular groove 49 having a flat rectangular shape matching the outer shape of the piezo actuator 27 is formed. The piezo actuator 27 is formed by the concave groove 49.
Is prevented from being displaced. On the outer peripheral surface of the upper main shaft 26d, a plurality of, for example, 3 extending parallel to the axial direction of the upper main shaft 26d so that the upper main shaft 26d becomes a spline axis.
The key grooves 26c are formed (see FIG. 5). The key grooves 26c have a substantially arc-shaped cross section and are provided at equal intervals in the circumferential direction of the upper main shaft 26d, for example, at intervals of 120 degrees. The radius of curvature of the key grooves 26c is
It substantially matches the radius of a.

The lower main shaft 26e has a housing 25
Has a flange 26a that engages with the step 35 of the first member, and a cutter mounting portion 50 to which a cutter is mounted at a lower portion. Between the flange 26a of the lower main shaft 26e and the cutter mounting portion 50, a through-hole 51 that penetrates the main shaft in a direction perpendicular to the axis is formed. The through hole 51 has a substantially quadrangular cross section, and a pin 52 is bridged substantially in the center.

FIG. 6 shows a leaf spring 28 for applying a pressure to the piezo actuator. (A) in the figure is VI-VI of FIG.
FIG. 4B is a cross-sectional view, and FIG. 4B is a plan view of the leaf spring 28 in FIG. The leaf spring 28 passes through the lower main shaft 26e through the through hole 51. Both ends of the leaf spring 28 are fixed to the lower lid 25 c of the housing 25. (A) in the figure
As shown in the figure, the outer peripheral surface of the pin 52 is in line contact with the leaf spring 28. Further, as shown in (B) in the figure, the axis of the pin 52 is orthogonal to the axis M of the leaf spring 28. That is, the pin 52 extends in a direction orthogonal to the axis M of the leaf spring 28. The axial length of the leaf spring 28 is set slightly larger than the diameter of the lower main shaft 26e. The thickness, width and the like of the leaf spring 28 are set so that the natural frequency of the leaf spring 28 is higher than the frequency of the piezo actuator 27. For example, when the frequency of the piezoelectric actuator is several k
Hz, the natural frequency of the leaf spring is set to several tens of kHz. When the leaf spring 28 bends, an upward force is applied to the pin 52, and a pressure is applied to the piezo actuator 27. The preload of the piezo actuator 27 is adjusted by turning an adjustment screw 42 provided at the upper end of the housing 25. A steel material is used for the material of the leaf spring 28.

As shown in FIG. 2, the housing 25
A pair of resilient ring magnets 29a and 29b are provided as assembly adjustment magnets. Due to the repulsive force of the pair of ring magnets 29a and 29b, the flange 26a of the main shaft 26 is moved to the step 35 of the housing 25.
It is urged to. The ring magnets 29a and 29b are supported by the pedestal 31. At the beginning of the assembly, a gap of, for example, about 1 mm is formed between the pair of ring magnets 29a and 29b due to the repulsive force.
It is biased to 5. Note that the ring magnet 29a,
A non-magnetic material is used for the main shaft 26 so that the magnetic field 29b does not adversely affect the piezo actuator 27.

A method for assembling the scribe body will be described. First, the main shaft 26 is inserted into the housing 25, and the pair of ring magnets 29a and 29b are assembled in the housing 25. Next, the main shaft 26 is turned so that the key groove 26 c of the main shaft 26 matches the screw hole 37 of the rotation preventing portion 36.
Next, the sphere 36a is inserted into the screw hole 37, and the set screw 36b is inserted.
Temporarily fix with.

Next, with the main shaft 26 urged to a predetermined position of the housing 25, the adjusting screw 42 of the pressurizing mechanism is turned to apply an appropriate pressurizing force to the piezo actuator 27. Here, in order to apply an appropriate preload to the piezo actuator 27, it is necessary to accurately manage the amount of the pin 52 provided on the main shaft 26 to bend the leaf spring 28. When the adjustment screw 42 is turned to move the main shaft 26 downward, the urging of the main shaft 26 to the housing 25 by the ring magnets 29a and 29b is released. Thereby, the adjusting screw 4
2, a repulsive force by the ring magnets 29a and 29b acts. By sensing this repulsive force, it can be seen that the main shaft 26 has slightly moved from the predetermined position. If the adjustment screw 42 is further turned with reference to the position where the main shaft 26 has slightly moved, the amount of lowering of the main shaft 26 from the reference position can be accurately grasped. Thus, the amount by which the pin 52 deflects the leaf spring 28 can be managed accurately.

Next, the piezo actuator 27 is vibrated. Here, the pushing amount of the spherical body 36a is adjusted by the external thread 3 so that the main shaft 26 vibrates in the vertical direction and does not vibrate in the horizontal direction.
Adjust by 6b. If the sphere 36a is pressed too much against the main shaft 26, the main shaft 26 will not vibrate. On the other hand, sphere 3
If there is too much gap between the main shaft 26a and the main shaft 26,
Swings sideways. According to the present invention, the sphere 36a
Is adjustable toward the key groove 26c, the gap between the key groove 26c of the main shaft 26 and the sphere 36a can be adjusted, and the vibration of the piezo actuator 27 can be transmitted to the main shaft 26 efficiently. . The sphere 36a is arranged in a delicate position whether or not it hits the key groove 26c of the main shaft 26.

As shown in FIG. 1, the cutter 12 is attached to the main shaft 26 via an attachment 55 so as to swing. The cutter 12 is disposed on the center line L, and the lower end thereof has a conical shape and is sharp. At the lower end of the cutter 12, diamond particles having a pyramid shape are fixed. The vertices of the diamond grains hit the work surface 11a. Note that, instead of the cutter 12, a chisel that has a disk shape, has an edge over the entire circumference, and is rotatably supported on the main shaft may be used. Further, the cutter 12 may be provided shifted from the center line L or may be provided at an angle.

A load leaf spring 40 is attached to the lower end of the weight 18. A recess 56 is formed at the lower end of the weight 18. The load leaf spring is stretched over the edges 57 on both sides of the recess 56 so that the load leaf spring 40 is flexible. The load magnet 19a is attached to the center of the lower end of the load leaf spring 40.

As described above, the scribe body 17 and the weight 18 are mounted on the base via the linear guide devices 21 and 22, respectively. As shown in FIG. 1, between the scribe main body 17 and the weight 18, a pair of load magnets 1 for transmitting the load of the weight 18 to the scribe main body 17 using magnetic force.
9a and 19b are provided. This pair of load magnets 19
a and 19b are each made of a permanent magnet, one 19a of which is attached to the lower surface of the leaf spring 40 and the other 19b.
Is attached to the upper surface of the scribe main body 17. Also,
The pair of load magnets 19a and 19b are arranged side by side in the vertical direction such that the same poles (for example, N poles) face each other, and repel each other. The load of the weight 18 is transmitted to the scribe main body 17 by the repulsive force of the magnetic force.

The cutter 1 is located below the scribe body 17.
A pair of levitating magnets 20a and 20b are provided for adjusting the static load applied to the workpiece 11 from 2 using magnetic force. Each of the pair of levitation magnets 20a and 20b is made of a permanent magnet, and one of the levitation magnets 20a is attached to the lower surface of the scribe main body 17. The other is attached to a height adjusting mechanism 59 provided on a horizontal plate 58 protruding from the base plate 15. The height adjusting mechanism 59 has the same structure as a known micrometer, and adjusts the height of the floating magnet 20b.

The pair of levitation magnets 20a and 20b are arranged in the vertical direction so that the same poles (for example, N poles) face each other, and repel each other. The repulsive force of the magnetic force gives the scribe body 17 a floating force, and the cutter 1
The static load applied to the work 11 from 2 is adjusted. Further, instead of the permanent magnet, an electromagnet whose magnetic force can be adjusted may be used as the floating magnet 20b. When an electromagnet is used, the magnetic force is adjusted by adjusting the voltage.

A method of using the above scribe device will be described. First, the mass of the weight 18 and the mass of the scribe main body 17 are changed to the work 11 made of gallium arsenide, silicon, glass, or the like.
Is determined according to the material, thickness, and the like.

Next, the work 11 is placed on the horizontal table 13, and the work 11 is positioned at a predetermined position. Cutter 1
When 2 is placed on the work 11, a static load is applied to the work 11 from the cutter 12. The height of the levitation magnet 20b is adjusted by the height adjustment mechanism 59 so that the static load becomes substantially constant in accordance with the work 11. Levitating magnet 20
By providing a and 20b, the static load is reduced by the amount of the repulsive force due to the magnetic force. If the static load is too large, lateral cracks may occur on the work surface 11a. Conversely, if the static load is too small,
When the scribe body is vibrated, the cutter 12 rises from the work 11 and the cutter 12 collides with the work 11 to damage the work surface 11a. For this reason,
The static load is carefully determined according to the work 11.

When a predetermined static load is obtained, a high-frequency electric field is applied to the piezo actuator 27. Thereby, the piezo actuator 27 expands and contracts periodically. Cutter 12
Is constantly in contact with the work 11 by a static load, so when the piezo actuator 27 vibrates, the scribe main body 17 vibrates, and a dynamic load is applied to the work 11 from the cutter 12. With the vibration of the scribe body 17,
Since the floating weight 18 also vibrates due to the repulsive force of the load magnets 19a, 19b, a pair of load magnets 19a, 19b is used.
There is little change in the distance between b and the repulsive force of the magnetic force of the pair of load magnets 19a and 19b does not change.
Therefore, an appropriate dynamic load can be applied from the cutter 12 to the work 11. Furthermore, even if the thickness of the work 11 changes or the work 11 undulates, the weight 18 moves following the work 11, so that even in such a case, the repulsive force of the magnetic force does not fluctuate.

The base plate 15 is moved in the horizontal direction by the moving mechanism 23. Thereby, the work surface 1
A scribe line composed of a vertical crack 14 is formed in 1a. The work 11 on which the scribe line is formed is removed from the table 13 and is broken along the scribe line by a breaker (not shown).

According to the present invention, the leaf spring 28 is
The main shaft 26 vibrates following the vibration of the piezo actuator 27 because the pressurized pressure is applied to the piezo actuator 27 via. Since the natural frequency of the leaf spring 28 is set to be higher than the frequency of the piezo actuator 27, the main shaft 26 can be always in close contact with the piezo actuator 27 regardless of the frequency of the piezo actuator 27. 26 can reliably follow the vibration of the piezo actuator 27.

The main shaft 26 is formed with a key groove 26c like a spline shaft, and the housing 25 is provided with a rotation preventing portion 36 which fits into the key groove.
Is allowed to linearly move in the axial direction with respect to the housing 25 and is prevented from rotating. Therefore, it is possible to prevent the main shaft 26 from oscillating in the lateral direction, and hence the cutter 12 from oscillating in the lateral direction. Also, the pin 52
The pin 52 moves in the axial direction of the leaf spring 28 when the leaf spring 28 bends because its outer peripheral surface is in line contact with the leaf spring 28 and extends in a direction perpendicular to the axis of the leaf spring 28. Is suppressed. Therefore, it is possible to suppress the main shaft 26 from oscillating in the lateral direction even in this portion. Further, since the bush 46 is provided at a lower portion of the main shaft 26, the main shaft 26 is prevented from swinging in the lateral direction even at this position. As a result, the cutter 12 can be vibrated up and down with a substantially constant amplitude and frequency with high reproducibility. In the scribe device of the present invention, the rigidity in the horizontal direction is increased 3 to 5 times as compared with the conventional scribe device, and there is no attenuation of the amplitude in the vertical direction.
50% vertical amplitude is large, and horizontal amplitude is also 1
３ to １ ／.

Since the piezo actuator 27 is substantially covered by the housing 25 and the main shaft 26,
The sound generated from the piezo actuator 27 stays in the housing 25. Therefore, it was possible to suppress the noise by about 7 to 10 dbA.

[0052]

As described above, according to the present invention,
A keyway is formed on the main shaft like a spline shaft, and a detent is provided on the housing to fit into the keyway, so that the main shaft is allowed to linearly move in the axial direction with respect to the housing and rotated. Is prevented. Therefore, it is possible to prevent the main shaft from oscillating in the lateral direction, and hence the cutter from oscillating in the lateral direction.

Further, since the position of the rotation preventing portion can be adjusted toward the key groove, the gap between the main shaft and the rotation preventing portion can be adjusted, and the vibration of the vibration actuator can be efficiently transmitted to the main shaft and eventually to the cutter. can do.

[Brief description of the drawings]

FIG. 1 is a side view showing a scribe device according to an embodiment of the present invention.

FIG. 2 is a vertical sectional view of a scribe main body of the scribe device of FIG. 1;

FIG. 3 is a bottom view of the scribe device of FIG. 1;

FIG. 4 is a sectional view taken along the line IV-IV in FIG. 2;

FIG. 5 is a perspective view showing an upper main shaft.

FIG. 6 is a view showing a leaf spring ((A) is a sectional view taken along line VI-VI of FIG. 2, and (B) is a plan view).

FIG. 7 is a sectional view showing a conventional scribe main body.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Work 12 Cutter 25 Housing 26 Main shaft 26c Keyway 27 Piezo actuator (vibration actuator) 28 Leaf spring 29a, 29b Magnet for assembly adjustment 36 Detent part 42 Pressure adjustment mechanism 51 Through-hole 52 Pin

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor: Satoru Sakamoto 1-12-15 Kita-Otsuka, Toshima-ku, Tokyo F-term in Verdex Co., Ltd. (reference) 3C069 AA03 BA03 BB01 BB03 BB04 BC02 CA05 CA11 EA01 EA02 4G015 FA03 FB01 FC02

Claims (7)

[Claims] 1. A scribing device for applying a vibration to a cutter to form a scribe line on a work, comprising: a housing; a part of which is accommodated in the housing; and a linear movement only in an axial direction with respect to the housing. And a vibration actuator that is disposed between the housing and the main shaft and vibrates the main shaft, and a cutter connected to the main shaft. The outer periphery of the main shaft has an axial direction of the main shaft. A plurality of key grooves extending in parallel to the key groove, the housing is provided with a rotation preventing portion that fits into the key groove, and the position of the rotation preventing portion is adjustable toward the key groove. A scribing device, characterized in that: 2. The scribe device according to claim 1, wherein the plurality of keyways are provided at equal intervals in a circumferential direction of the main shaft. 3. The housing is provided with a leaf spring whose both ends are fixed to the housing, and the main shaft has an outer peripheral surface in line contact with the leaf spring and in a direction orthogonal to an axis of the leaf spring. The scribing device according to claim 1, wherein an extending pin is provided, and wherein the leaf spring applies a pressure to the vibration actuator via the pin. 4. A through hole is formed in the main shaft in a direction perpendicular to the axis, the pin is bridged in the through hole, and the leaf spring passes through the main shaft through the through hole. The scribe device according to claim 3, wherein 5. The scribe device according to claim 3, wherein a natural frequency of the leaf spring is set to be higher than a frequency of the vibration actuator. 6. The housing is provided with a pressurizing adjustment mechanism for adjusting a position of the vibration actuator in an axial direction thereof, and the housing is urged by a repulsive force of the main shaft to a predetermined position of the housing. The scribing device according to claim 3, further comprising a pair of assembly adjusting magnets that repel each other. 7. The scribe device according to claim 1, wherein the vibration actuator is substantially covered by the housing and the main shaft.