JP2002170484A - Barrier rib forming method for flat display device and its device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a barrier rib forming method for a flat display device, which can simplify manufacturing processes, and further, can improve quality and processing accuracy, and also can manufacture a barrier rib at a low cost by improving the use of materials, in addition, can form even if a high aspect ratio for the barrier rib is required. SOLUTION: In this barrier rib forming method, a first light radiation unit 17 accelerates hardening of a first barrier rib material M1 by radiating ultraviolet rays on it at just after the material M1 is discharged from a first nozzle 16 on a moving substrate S, then, a second barrier rib material M2 is discharged from a second nozzle 18 on a first barrier rib material M1 just after its hardening is accelerated, namely, on a first barrier rib part W1 keeping its shape, and further, a second light irradiation unit accelerates hardening of the barrier rib material M2 by radiating ultraviolet rays on it just after discharged.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma display panel (hereinafter referred to as a PDP) incorporated in a display panel terminal of a computer or a wall-mounted television.
The present invention relates to a method of forming a partition (rib) on a substrate such as a back plate or a front plate used for a flat panel display device such as a flat panel display device and a device therefor.

[0002]

2. Description of the Related Art As a conventional method of forming a partition, for example, a partition material is applied to the entire surface of a substrate, a photosensitive film is applied thereon, and exposure and development are performed to form a partition. In the state where only the resist is left, blast processing is performed to remove unnecessary partition material, and the resist is removed.
After baking `` sand blast method '' or `` screen printing method '', after applying a photosensitive resist on the entire surface of the substrate, performing exposure and development so that only the photosensitive resist of the part where the partition wall is to be formed is removed , Embedding partition material in the recess,
A “lift-off method” for removing the photosensitive resist, a “press method” in which a partition material is applied to the entire surface of the substrate and a mold having a concave portion formed in a portion where the partition is formed is pressed.

[0003]

However, the prior art having such a structure has the following problems. That is, the above-described typical “sand blast method” and “lift-off method” have a problem that the number of steps is large, the processing time is long, and the material use efficiency is low.

[0004] In addition, the "screen printing method" has a problem that the quality and processing accuracy are low, and the "press method" has a problem that the partition walls are damaged when the mold is removed and the quality and processing accuracy are low. is there.

As described in, for example, Japanese Patent Application Laid-Open No. 9-92134, a method has been proposed in which a partition material is discharged from a nozzle to make it into a partition. In this method, a partition having a large aspect ratio is not used. It cannot be formed and is not realistic.

[0006] The object of the present invention, in view of the above points,
While improving quality and processing accuracy by simplifying the process, partition walls can be formed at low cost by increasing the use efficiency of materials, and furthermore, for flat display devices capable of forming partition walls with a high aspect ratio. It is an object of the present invention to provide a method and apparatus for forming a partition.

[0007]

According to a first aspect of the present invention, there is provided a method of forming a partition on a substrate used in a flat panel display, the method comprising: forming a first partition on the substrate;
A first partitioning step of forming a first partition by linearly applying the partition material of the second step, and linearly coating a second partition material on the first partition to form a second partition. And forming a second coating step.

According to a second aspect of the present invention, in the method for forming a partition wall for a flat panel display device according to the first aspect, the first coating step includes the step of: The first coating step includes a first discharging step of linearly discharging the first partition wall material, and the second coating step includes forming a second partition wall on the first partition section from a second nozzle relatively moved with respect to the substrate. The method includes a second discharging step of discharging the material in a linear shape.

According to a third aspect of the present invention, in the method of forming a partition wall for a flat panel display device according to the second aspect, the first coating step includes discharging the first nozzle from the first nozzle onto the substrate after the first discharging step. The first partition material immediately after the first partition material is irradiated with light or heat to promote the curing, and the second application step includes the step of forming the first partition material on the first partition part after the second discharge step. Second
A second curing promotion step of irradiating the second partition material immediately after being discharged from the nozzle with light or heat to promote curing.

According to a fourth aspect of the present invention, in the method of forming a partition for a flat panel display device according to any one of the first to third aspects, the first partition material applied in the first coating step is made of a first material. The first partition is made white, and the second partition material applied in the second coating step is made to black the second partition.

According to a fifth aspect of the present invention, there is provided an apparatus for forming a partition on a substrate used in a flat panel display, comprising: a mounting table on which the substrate is mounted; and a first base mounted on the substrate mounted on the mounting table. A first nozzle for discharging a partition material, a second nozzle for discharging a second partition material on the first partition material discharged from the first nozzle, and a first nozzle for the mounting table. Moving means for integrally moving the second nozzle relative to each other,
The first partition material is linearly discharged from the first nozzle relatively moved by the moving means onto the substrate mounted on the mounting table to form the first partition portion on the substrate, and the moving is performed. The second partition material is linearly discharged from the second nozzle relatively moved by the means onto the first partition portion to form the second partition portion on the first partition portion. And

According to a sixth aspect of the present invention, in the partition wall forming apparatus for a flat panel display device according to the fifth aspect, light or heat is applied to the first partition wall material immediately after being discharged from the first nozzle onto the substrate. A first irradiating section for irradiating the first nozzle from the second nozzle;
And a second irradiator for irradiating light or heat onto the second partition material immediately after being discharged onto the second partition, and the first nozzle, the first irradiator, and the second Characterized in that the nozzle and the second irradiation unit are integrally moved relative to the mounting table.

[0013]

Preferred embodiments of the present invention will be described below with reference to the drawings.

<First Embodiment> FIG. 1 is a view showing a schematic configuration of a partition wall forming apparatus for a flat panel display according to a first embodiment which is an example of an embodiment of the present invention.

The substrate S for a flat display device is, for example, a glass substrate to be a back plate or a front plate for a flat display device, and is mounted on the mounting table 1. A guide rail 5 is provided upright on the base 3, and a slide member 7 attached to the lower surface of the mounting table 1 is slidably fitted on the guide rail 5. With these configurations, the mounting table 1 is movable in the left-right direction in FIG.

Further, a motor 9 is mounted on the upper surface of the base 3 with the rotating shaft oriented sideways. A screw shaft 11 is provided on the rotation shaft of the motor 9, and a connection piece 13 attached to the lower surface of the mounting table 1 is screwed to the screw shaft 11. Therefore, the mounting table 1 moves in the left-right direction by operating the motor 9.
The motor 9 and the like correspond to the moving means in the present invention.

A discharge unit 15 for discharging the partition wall forming material is disposed near the right end of the mounting table 1 and near the center of the base 3. The discharge unit 15 includes a first nozzle 16 and a second nozzle 18 in order from the relative movement direction (the right direction in FIG. 1), and is erected on the base 3 so as to straddle the mounting table 1. It is attached to the frame 20.

The first nozzle 16 discharges a first partition wall material onto the substrate S. As the material of the first partition, for example, a material whose viscosity is slightly lowered to facilitate discharge from the first nozzle 16 is used.

The first nozzle 16 has a first check valve 21
Is connected to the first supply pipe 23 in which the first supply pipe 23 is disposed. The first supply pipe 23 is branched into two at the upstream side of the first check valve 21, and one of the branch pipes is connected to the first pump 25 in a flow path. The other branch pipe is connected to the first partition material tank 27 through a first opening / closing valve 29 in a flow path.

The second nozzle 18 is formed by discharging a second partition wall material of the same kind as the first partition wall material discharged from the first nozzle 16 from the first nozzle 16, which will be described later. The liquid is discharged onto the first partition W1.

The second nozzle 18 has a second check valve 22
Is connected to the second supply pipe 24 in which the channel is disposed. The second supply pipe 24 is branched into two at the upstream side of the second check valve 22, and one branch pipe is connected to the second pump 26 in a flow path. The other branch pipe is connected to the second partition material tank 28 through a second opening / closing valve 30 in a flow path.

The lower surface of the first nozzle 16 shown in FIG. 2A and the lower surface of the second nozzle 18 shown in FIG. A plurality of discharge ports 16a and 18a are respectively formed along a direction orthogonal to the moving direction (relative moving direction). These discharge ports 16a and 18a have, for example, an elliptical shape having a long axis in the moving direction of the mounting table 1. Each discharge port 16a,
The diameter of 18a is about 30 μm, and the arrangement pitch P1 of each discharge port 16a (or 18a) is about 150 μm. The plurality of discharge ports 16a formed in the first nozzle 16 and the second
The first nozzle 16 and the second nozzle 18 are arranged in a frame such that the plurality of discharge ports 18a formed in the nozzle 18 are arranged on a straight line indicated by a dashed line along the moving direction of the mounting table 1. Attached to body 20. Thus, the arrangement pitch of the discharge ports 16a and the arrangement pitch of the discharge ports 18a are the same arrangement pitch P1, and
6a and the discharge port 18a are arranged on a straight line along the direction of movement of the mounting table 1, so that the first nozzle 16 is discharged onto the substrate S from the first nozzle 16 as described later. The second partition material can be discharged from the second nozzle 18.

Returning to FIG. 1, the control unit 31 includes a CPU and the like, and the motor 9, the first pump 25, the first on-off valve 29, the second pump 26, the second on-off valve 30
Are respectively controlled.

Next, the formation of the partition wall by the apparatus of the first embodiment will be described with reference to FIGS. 1, 2, 3 and 4 described above.
It will be described based on. FIG. 3 is a side view schematically showing a partition forming process, and FIG. 4 is a perspective view schematically showing the formed partition.

First, the substrate S is mounted on the mounting table 1 arranged at the initial position shown by the two-dot chain line on the right side of FIG.
The substrate S is fixed to the mounting table 1 by suction or the like. Next, the mounting table 1 is moved to the left at a constant speed by rotating the screw shaft 11 by operating the motor 9.

<First Coating Step> The tip of the substrate S mounted on the mounting table 1 moving as described above is
, The first partition wall material M1 is discharged from the first nozzle 16 onto the substrate S. In this discharge operation, the first pump 25 is suction-operated with the first on-off valve 29 opened, and the first partition material tank is placed in the first supply pipe 23 branched to the first pump 25 side. The first partition material stored in 27 is sucked. At this time, the first check valve 21 operates so that the first partition wall material remaining in the first nozzle 16 is not pulled back. Next, the first pump 25 is discharged while the first on-off valve 29 is closed, and the first partition wall material sucked into the first supply pipe 23 is pushed out through the first check valve 21. First nozzle 16
Is supplied with a first partition wall material. By repeating such a series of operations, the first partition wall material M1 is continuously discharged from each of the discharge ports 16a of the first nozzle 16 (first discharge step).

As described above, the plurality of first partition wall materials M1 discharged from the first nozzles 16 onto the substrate S are transferred to the substrate S at a constant speed in the leftward direction. At the arrangement pitch P1 of the discharge ports 16a on the upper surface, the plurality of first partition walls W1 are formed by being discharged linearly while maintaining the discharged shape.

<Second Coating Step> Next, the first nozzle 1
When the first partition wall material M1 immediately after being discharged from the nozzle 6 reaches the position below the second nozzle 18 with the movement of the mounting table 1, the second partition wall material M2 is transferred from the second nozzle 18 to the first partition wall material M2. Is discharged onto the partition wall portion W1. This discharge operation is performed by causing the second pump 26 to perform a suction operation with the second on-off valve 30 opened and the second supply pipe 24 branched to the second pump 26 side.
The second partition material stored in the second partition material tank 28 is sucked therein. At this time, the second check valve 22 operates so that the second partition wall material remaining in the second nozzle 18 is not pulled back. Next, the second on-off valve 3
0 is closed and the second pump 26 is discharged,
The second partition wall material sucked into the second supply pipe 24 is
To supply a second partition wall material to the second nozzle 18. By repeating such a series of operations, each discharge port 18 of the second nozzle 18 is
a, the second partition wall material M2 is continuously discharged (second
Discharge process).

As described above, the plurality of second partition wall materials M2 discharged from the second nozzles 18 onto the plurality of first partition wall portions W1, respectively, allows the mounting table 1 to move leftward at a constant speed. Since it is moving, it is linearly discharged onto the plurality of first partition walls W1 while maintaining the discharged shape. As a result, a partition W in which the first partition W1 and the second partition W2 are stacked is formed. And finally, 500-60
By firing at a temperature of 0 ° C., the partition walls of the flat display device are completed.

As described above, the first partition wall portion W1 maintaining the discharge shape from the first nozzle 16 and the second partition portion W2 maintaining the discharge shape from the second nozzle 18 are stacked to form a partition wall. Since W is formed, the partition wall W having high quality and high processing accuracy can be formed.

The first nozzle 16 discharged from the first nozzle 16
The first partition wall portion W1 is formed of the partition wall material M1.
By forming the second partition wall portion W2 on the partition wall portion W1 by using the second partition wall material M2 discharged from the second nozzle 18, the partition wall W having a high aspect ratio can be formed.

Further, since the utilization efficiency of the first partition wall material M1 and the second partition wall material M2 is high, the cost can be reduced. In addition, since the first partition wall portion W1 and the second partition wall portion W2 are continuously formed by one ejection operation, the process can be simplified.

<Second Embodiment> FIG. 5 is a view showing a schematic configuration of a partition wall forming apparatus for a flat panel display according to a second embodiment which is another embodiment of the present invention. In FIG. 5, components denoted by the same reference numerals as those in FIG. 1 have the same functions as those described in the above-described first embodiment, and thus detailed description is omitted here.

The second embodiment differs from the first embodiment in that the first light irradiator 17, the first ultraviolet light source 35, the first optical fiber 33, the second light irradiator 19, The point is that a second ultraviolet light source 36 and a second optical fiber 34 are provided.

The first light irradiating section 17 includes a first nozzle 16
This is for irradiating light (ultraviolet light) to the first partition wall material immediately after the first partition wall material is discharged onto the substrate S to accelerate the curing of the first partition wall material. In the second embodiment, the mounting table 1
Is configured to discharge the first partition wall material when moving to the left with respect to the first nozzle 16, so that the first light irradiating unit 17 includes the above-described first partition wall material. In order to accelerate the curing of the first nozzle 16 during the movement,
Nozzle 16 corresponding to the opposite side of the relative movement direction of
It is attached to the left side of. The first light irradiating section 17 corresponds to the first irradiating section in the present invention.

The first ultraviolet light source 35 is connected to the first nozzle 1
6 generates ultraviolet light to be irradiated from the first light irradiation unit 17 in order to accelerate the curing of the first partition wall material discharged onto the substrate S from the first light source 6. It is connected to the irradiation unit 17. The first ultraviolet light source 35 is controlled by the control unit 31.

The second light irradiating section 19 irradiates light (ultraviolet light) to the second partition wall material immediately after being discharged from the second nozzle 18 onto the first partition wall material, thereby forming the second partition wall material. It promotes curing. In order to promote the curing of the second partition wall material in this manner, the second light irradiating section 19 is provided with the second nozzle 18 corresponding to the opposite side of the relative movement direction of the second nozzle 18 during movement. It is attached to the left side of. The second light irradiating section 19 corresponds to the second irradiating section in the present invention.

The second ultraviolet light source 36 is connected to the second nozzle 1
8 to generate ultraviolet rays to be irradiated from the second light irradiating section 19 in order to accelerate the curing of the second partition material discharged onto the first partition material. 2 light irradiation unit 19. This second
The ultraviolet light source 36 is controlled by the control unit 31.

Next, formation of a partition by the apparatus of the second embodiment will be described with reference to FIGS. 5, 6, and 4 described above. FIG. 6 is a side view schematically showing a partition forming process, and FIG. 4 is a perspective view schematically showing the formed partition.

<First Coating Step> First, 2
The substrate S is placed on the mounting table 1 arranged at the initial position indicated by the dashed line, and the substrate S is fixed to the mounting table 1 by suction or the like. Next, the mounting table 1 is moved to the left at a constant speed by rotating the screw shaft 11 by operating the motor 9.

When the tip of the substrate S mounted on the mounting table 1 moving as described above reaches below the first nozzle 16,
The first partition material M1 is discharged onto the substrate S from the first nozzle 16. In this discharge operation, the first pump 25 is suction-operated with the first on-off valve 29 opened, and the first partition material tank is placed in the first supply pipe 23 branched to the first pump 25 side. The first partition material stored in 27 is sucked. At this time, the first check valve 21 operates so that the first partition wall material remaining in the first nozzle 16 is not pulled back. Next, in a state where the first on-off valve 29 is closed, the first pump 25 is discharged, and the first supply pipe 2 is discharged.
The first partition wall material sucked into 3 is pushed out through the first check valve 21, and the first nozzle 16 is supplied with the first partition wall material. By repeating such a series of operations, the first partition wall material M1 is continuously discharged from each discharge port 16a of the first nozzle 16 (first discharge step).

When the first partition wall material M 1 immediately after being discharged from the first nozzle 16 onto the substrate S reaches below the first light irradiating section 17 with the movement of the mounting table 1, FIG. As shown by the dotted line, ultraviolet rays are irradiated from the first light irradiating section 17 to accelerate the curing (first curing promoting step).

As described above, the plurality of first partition wall materials M1 discharged onto the substrate S from the first nozzle are placed on the mounting table 1
Is moving at a constant speed in the left direction, and is thus ejected linearly on the upper surface of the substrate S. Further, since the first partition wall material M1 is promoted to be hardened immediately after the discharge, the dripping can be more reliably prevented, and the arrangement of the discharge ports 16a on the substrate S while maintaining the shape is maintained. Plural firsts at pitch P1
Is formed.

<Second Coating Step> Next, when the first partition wall material M 1 immediately after the curing is accelerated reaches below the second nozzle 18 with the movement of the mounting table 1, The second partition wall material M2 is discharged from the nozzle 18 on the first partition wall material M1 immediately after the above-described curing promotion. This discharging operation is performed in the second
The second pump 26 is suction-operated in a state where the on-off valve 30 is opened, and the second pump 26 stored in the second partition material tank 28 in the second supply pipe 24 branched to the second pump 26 side.
Of the partition wall material. At this time, the second nozzle 18
The second check valve 22 acts to prevent the second partition material remaining inside from being pulled back. Next, the second pump 26 is discharged while the second on-off valve 30 is closed, and the second partition wall material sucked into the second supply pipe 24 is pushed out through the second check valve 22. Second nozzle 1
8 is supplied with a second partition wall material. By repeating such a series of operations, the second partition wall material M2 is continuously discharged from each discharge port 18a of the second nozzle 18 (second discharge step).

Then, the second partition wall material M2 immediately after being discharged from the second nozzle 18 onto the first partition wall material M1 (first partition wall portion W1) on the substrate S is transferred to the mounting table 1. Accordingly, when the light reaches below the second light irradiating section 19, as shown by a dotted line in FIG. 6, ultraviolet rays are irradiated from the second light irradiating section 18 to accelerate curing (second curing accelerating step). .

As described above, the plurality of second partition wall materials M2 discharged from the second nozzles 18 onto the plurality of first partition wall portions W1, respectively, allows the mounting table 1 to move leftward at a constant speed. Since it is moving, it is discharged linearly onto the plurality of first partition walls W1. Further, the second partition wall material M2 is promoted to be hardened immediately after the discharge, so that the second partition wall material M2 can be more reliably prevented from sagging, and the second partition wall material M2 is kept on the first partition wall W1 while maintaining its shape. A portion W2 is formed. As a result, a partition W in which the first partition W1 and the second partition W2 are stacked is formed. And finally, 500-60
By firing at a temperature of 0 ° C., the partition walls of the flat display device are completed.

As described above, when the first partition wall material M1 and the second partition wall material M2 immediately after the discharge are irradiated with ultraviolet rays, the shapes of the discharged first partition wall material M1 and the second partition wall material M2 are changed. Can be more reliably maintained, so that the high-quality and high-precision partition wall W can be formed more reliably. In addition, the first partition W
Since the first and second partition walls W2 are formed continuously, the process can be simplified.

The first nozzle 16 discharged from the first nozzle 16
The first partition wall portion W1 is formed of the partition wall material M1.
By forming the second partition wall portion W2 on the partition wall portion W1 using the second partition wall material M2 discharged from the second nozzle 18, the partition wall W having a high aspect ratio can be formed.

Further, since the utilization efficiency of the first partition wall material M1 and the second partition wall material M2 is high, the cost can be reduced. In addition, since the first partition wall portion W1 and the second partition wall portion W2 are continuously formed by one ejection operation, the process can be simplified.

<Modification> The embodiment described above may be modified as in the following modification. (1) In the above-described first and second embodiments, the same type of partition material is discharged from the first nozzle 16 and the second nozzle 18, but different types of partition material are used. It may be ejected. For example, as shown in FIG. 7, the first partition material M1 discharged from the first nozzle 16
h is a white color containing a white pigment, and the second nozzle 18
The second partition material M2b ejected from is black with a black pigment. Then, the first partition wall material M1h is discharged from the first nozzle 16 onto the moving substrate S, and the first partition wall material M1h immediately after the discharge is irradiated with ultraviolet rays from the first light irradiating section 17 to be cured. Promote white first partition wall W
1h is formed. The second partition wall material M2b is discharged from the second nozzle 18 onto the first partition wall portion W1h, and the second partition wall material M2b immediately after the discharge is irradiated with ultraviolet rays from the second light irradiation section 19 to be cured. To promote the black second partition wall W
2b is formed. As a result, a partition wall W in which the first white partition wall portion W1h and the second black partition wall portion W2b are stacked on the substrate S is formed. Since the first partition W1n of such a partition W is white, it has a function of improving the coloring characteristics of the phosphor in the flat display device, and the second partition W2b is black, so that It is displayed as a black stripe on the display screen, and has a function of adding sharpness to the image. In this modification, the first light irradiating unit 1
The first partition wall material M1h such as 7 and the second light irradiation section 19
Alternatively, a mechanism for accelerating the curing of the second partition wall material M2b may be omitted.

(2) The partition wall W may be formed by laminating three or more partition portions. For example, as shown in FIG.
Light irradiator 19 along the direction of movement relative to
A third nozzle 40 for discharging the third partition material M3 onto the second partition W2 and a third partition material M3 immediately after being discharged from the third nozzle 41 And a third light irradiator 41 is provided to promote curing. Then, the first partition W1 and the second partition W
The partition wall W is formed by stacking the second and third partition portions W3. In this manner, the nozzles and the light irradiating units may be provided in parallel according to the number of partitions to be stacked. In this modification, the first partition wall material M1, the second partition wall material M2, and the third partition wall material such as the first light irradiation section 17, the second light irradiation section 19, and the third light irradiation section 41 are used. A mechanism for accelerating the curing of M3 may be omitted.

(3) The shapes of the discharge ports 16a and 18a formed in the nozzles such as the first nozzle 16 and the second nozzle 18 are not limited to elliptical shapes, but may be rectangular or trapezoidal. The discharge ports 16a, 1
By devising the shape of 8a, even if the curing is promoted, it is possible to prevent the partition walls from collapsing due to dripping of the partition wall material such as the first partition wall material or the second partition wall material to some extent.

(4) In the above-described second embodiment and the like, in order to accelerate the hardening of the partition wall materials such as the first partition wall material M1 and the second partition wall material M2, each of the first and second ultraviolet rays is irradiated. Light irradiation unit 17 and second light irradiation unit 19
However, the type of light to be applied is not limited to ultraviolet light, and may be any light as long as it can promote the curing of the partition wall material. In addition to using light such as ultraviolet light, a configuration may be employed in which heat is applied to the partition wall material in order to accelerate the curing of the partition wall material. Specifically, for example, the first light irradiation unit 1 shown in FIG.
7, a nozzle (first irradiation unit) for blowing hot air onto the discharged first partition wall material is provided, and the second light irradiation unit 1 is provided.
Instead of 9, a nozzle (second irradiation unit) for blowing hot air onto the discharged second partition wall material may be provided.

(5) In the case where the area of the substrate is large and the partition wall W cannot be formed in a desired area at one time, the above-described discharge operation of the first partition wall material and the second partition wall material is performed in a plurality of times. May be. Specifically, in the first embodiment, the second embodiment, or the like, the mounting table 1 after the first ejection operation is returned to the initial position, and the ejection unit 15 is moved by the feed mechanism (not shown) to FIG. The first partition wall material M which has been sent in a direction penetrating the paper surface of FIG.
What is necessary is just to perform the discharge process and the hardening acceleration process of the 1st and 2nd partition material M2. In the second embodiment and the like, in order to eject the first partition material M1 and the second partition material M2 in a reciprocating manner without returning the mounting table 1 to the initial position, the first nozzle 16 in FIG. A light irradiation unit may be further provided on the right side. In this case, at the time of the backward movement, the light irradiation unit on the right side of the first nozzle 16 promotes the curing of the first partition wall material M1 immediately after being discharged from the first nozzle 16, and the first light irradiation unit 17 The second nozzle 18
What is necessary is just to promote the hardening of the second partition wall material M2 immediately after being discharged from the second partition wall material M2.

(6) In each of the above-described embodiments and modifications, the mounting table 1 is moved with respect to the discharge unit 15 during the discharging operation. The unit 15, that is, the first nozzle 16 and the second nozzle in the first embodiment, and the first nozzle 16 and the first light irradiation unit 1 in the second embodiment.
7. The second nozzle 18 and the second light irradiating section 19 may be integrally moved by the moving means. Also, in the first embodiment, the first nozzle 1
The first moving means for moving the second nozzle 6 and the second moving means for moving the second nozzle 18 are separately provided, and in the second embodiment, the first nozzle 16 and the first light irradiating unit are provided. A first moving means for moving the first nozzle 17 and a second moving means for moving the second nozzle 18 and the second light irradiation unit 19 may be separately provided.

(7) In each of the above-described embodiments and modifications, when a “swell” is present on the substrate, the distance between the mounting table 1 and each of the first nozzles 16 and the second nozzles 18 is reduced. In order to keep the distance constant, a distance measuring means for measuring the distance between the upper surface of the substrate S and each nozzle, and a relative elevating means for moving each nozzle and the mounting table 1 may be provided. Thereby, the height of the partition wall W can be stabilized.

[0057]

As described above in detail, according to the first aspect of the present invention, the first partition material is linearly coated on the substrate in the first coating step to form the first partition portion. Then, in the second coating step, the second partition wall material is linearly coated on the first partition wall section to form the second partition wall section, so that the process can be simplified and the quality and processing accuracy can be improved. In addition, the partition wall can be formed at low cost, and the partition wall having a high aspect ratio can be formed.

According to the second aspect of the present invention, in the first coating step, the first nozzle which linearly discharges the first partition wall material onto the substrate from the first nozzle relatively moved with respect to the substrate. Since the second coating step includes a second discharging step of linearly discharging the second partition wall material onto the first partition section from the second nozzle relatively moved with respect to the substrate, The above effects can be reliably obtained.

According to the third aspect of the present invention, the first coating step includes irradiating the first partition wall material immediately after being discharged from the first nozzle onto the substrate after the first discharging step with light or heat. A second curing step of promoting the curing by applying a second curing step to the second partitioning material immediately after being discharged from the second nozzle onto the first partitioning part after the second discharging step. Since the second curing acceleration step of irradiating light or heat to accelerate the curing is included, the quality and processing accuracy can be more reliably improved, and the partition walls having a high aspect ratio can be more reliably formed. .

According to the fourth aspect of the present invention, the first partition wall material applied in the first coating step turns the first partition wall portion white, and is applied in the second coating step. Since the second partition wall material is used to make the second partition wall black,
A partition in which a white first partition and a black second partition are stacked over a substrate can be formed.

According to the fifth aspect of the present invention, the first partition material is discharged linearly from the first nozzle relatively moved by the moving means onto the substrate mounted on the mounting table. The first partition is formed on the first partition, and the first partition is moved from the second nozzle relatively moved by the moving means.
By forming a second partition on the first partition by discharging a second partition material linearly on the first partition, the process can be simplified and the quality and processing accuracy can be improved. In addition to the above, it is possible to increase the utilization efficiency of the material, to form the partition walls at low cost, and to form the partition walls having a high aspect ratio.

According to the sixth aspect of the present invention, the apparatus further includes the first irradiation section and the second irradiation section, and the first nozzle, the first irradiation section, the second nozzle and the second irradiation section are moved by the moving means. By moving the irradiation unit 2 relative to the mounting table integrally, the quality and processing accuracy can be more reliably improved, and the partition walls having a high aspect ratio can be formed more reliably.

[Brief description of the drawings]

FIG. 1 is a side view schematically showing a first embodiment of the present invention.

FIG. 2 is a plan view showing lower surfaces of a first nozzle and a second nozzle.

FIG. 3 is a side view schematically showing the ejection operation of the first embodiment.

FIG. 4 is a perspective view schematically showing a formed partition wall.

FIG. 5 is a side view schematically showing a second embodiment of the present invention.

FIG. 6 is a side view schematically showing an ejection operation and the like of a second embodiment.

FIG. 7 is a side view schematically showing a discharge operation and the like according to a modification of the present invention.

FIG. 8 is a side view schematically showing a discharge operation and the like of another modification of the present invention.

[Explanation of symbols]

 Reference Signs List 1 mounting table 9 motor 16 first nozzle 17 first light irradiation unit 18 second nozzle 19 second light irradiation unit 31 control unit S substrate M1 first partition material M2 second partition material W partition W1 first 1 partition wall part W2 second partition wall part

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) B05D 7/24 301 B05D 7/24 301T H01J 11/02 H01J 11/02 BF Term (Reference) 4D075 AC06 AE03 BB21Z BB41Z DA06 DC22 EA05 EA21 4F041 AA05 AB01 BA05 4F042 AA06 DB01 DB41 DB51 5C027 AA09 5C040 GF02 GF13 GF19 JA13 JA28 JA31 KA15 KA16 LA17 MA24 MA26

Claims (6)

[Claims] 1. A method for forming a partition on a substrate used in a flat panel display device, comprising: a first coating material forming a first partition by linearly coating a first partition material on the substrate. Forming a second partition material on the first partition portion in a linear manner;
And a second coating step of forming a partition wall portion of the flat panel display device. 2. The method according to claim 1, wherein the first coating step comprises applying a first partition wall material onto the substrate from a first nozzle relatively moved with respect to the substrate. The first coating step includes a first discharging step of discharging linearly, and the second applying step linearly discharges a second partition wall material from the second nozzle relatively moved with respect to the substrate onto the first partition section. A method of forming a partition wall for a flat panel display device, comprising a second discharging step of: 3. The method for forming a partition wall for a flat panel display device according to claim 2, wherein the first applying step includes the step of: after the first discharging step, immediately after discharging from the first nozzle onto the substrate from the first nozzle.
Irradiating light or heat to the partition wall material to promote curing
The second coating step includes irradiating light or heat to the second partition wall material immediately after being discharged from the second nozzle on the first partition section after the second discharging step. A method for forming a partition wall for a flat panel display, comprising a second curing acceleration step of accelerating the curing. 4. The partition wall forming method for a flat panel display device according to claim 1, wherein the first partition wall material applied in the first coating step causes the first partition wall portion to be white. A method of forming a partition for a flat panel display, wherein the second partition material applied in the second coating step blackens the second partition. 5. An apparatus for forming a partition on a substrate used in a flat panel display device, comprising: a mounting table on which the substrate is mounted; and a first material for discharging a first partition material onto the substrate mounted on the mounting table. A first nozzle, a second nozzle for discharging a second partition material onto the first partition material discharged from the first nozzle, and the first nozzle and the second nozzle integrated with the mounting table Moving means for relatively moving the first partition material linearly onto the substrate mounted on the mounting table from the first nozzle relatively moved by the moving means; While forming the first partition, the second partition material is linearly discharged onto the first partition from the second nozzle relatively moved by the moving means, and the second material is discharged onto the first partition. 2. A partition forming device for a flat panel display device, wherein the partition 2 is formed. . 6. The partition wall forming apparatus for a flat panel display device according to claim 5, wherein the first irradiation is performed by irradiating the first partition wall material immediately after being discharged from the first nozzle onto the substrate with light or heat. And a second irradiator for irradiating light or heat onto the second partition material immediately after being discharged from the second nozzle onto the first partition, and Nozzle, first irradiator, second
Wherein the nozzle and the second irradiation unit are integrally moved relative to the mounting table.