JP2002075690A - Electrode for discharging - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electrode for discharging which can generate a uniform discharge without damaging a base-material under processing and an electrode. SOLUTION: The electrode for discharging is integrated with a conductor and dielectrics through conductive rubber or conductive grease.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a discharge electrode.

[0002]

2. Description of the Related Art Conventionally, a discharge is performed by surface-treating a substrate (for example, plastic, paper, metal, glass, fiber, ceramic, etc.) with generated discharge plasma, or by supplying oxygen gas into the discharge plasma. It is known that ozone gas can be generated.

In order to stably generate such discharges, it is necessary to use an electrode in which a metal surface serving as an electrode substrate is coated with a dielectric to prevent spark discharge. As the dielectric, any material may not be used. Particularly, in view of durability, not an organic material but glass or ceramic is preferable. Here, the electrode refers to an integrated electrode base and dielectric.

As such an electrode, Japanese Patent Application Laid-Open No. 11-19 / 1999
In the 1500 publication, plating, vapor deposition,
There have been proposed techniques for forming a metal conductive layer by a method such as thermal spraying or coating, or attaching a metal piece and a ceramic with an adhesive. Further, Japanese Patent Application Laid-Open No. H11-307227 discloses an electrode in which a metal and a dielectric are closely bonded with a sheet-like insulating adhesive.

[0005]

However, according to these techniques, although the durability of the electrodes can be obtained, according to the study by the present inventors, the electrodes generate a remarkable amount of heat at high voltage and high frequency. Problems such as damage of the substrate to be processed, such as melting, and dielectric breakdown of the dielectric are likely to occur.

Therefore, the metal part of the electrode was cooled,
Since the dielectric is hard to be cooled, the metal part and the dielectric part, which are substances having different thermal expansion coefficients, were separated from each other. Due to such separation, a discharge phenomenon occurs in the space formed by the separation between the metal portion and the dielectric portion, and there has been a problem that uniform discharge cannot be performed. Therefore, when a metal part and a dielectric part are bonded to each other using a sheet-like insulating adhesive having a strong adhesive force, the dielectric may be broken.

[0007] Further, the metal portion and the dielectric portion are adhered to each other with rubber or grease. However, unevenness of the dielectric constant due to uneven thickness causes discharge unevenness.

The present invention has been made to solve the above-mentioned problems of the prior art, and provides a discharge electrode capable of generating a uniform discharge without damaging a substrate to be processed or an electrode. It is intended to be.

[0009]

According to the present invention, there is provided a discharge electrode comprising:
The conductor and the dielectric are integrated via the conductive rubber.

[0010] As described above, in the discharge electrode of the present invention, since the conductor and the dielectric are integrated via the conductive rubber, by cooling the conductor, the thermal expansion is reduced by the dielectric and the dielectric. Even if the conductors are different from each other, the conductive rubber can be stably and uniformly discharged for a long time without exfoliating the conductor and the dielectric due to expansion and contraction of the conductive rubber.

As described above, since the discharge electrode of the present invention can be used without separating the conductor and the dielectric even when the conductor is cooled, the substrate to be treated is melted or the dielectric is broken down. Nothing to do.

[0012] Even if the thickness of the conductive rubber is uneven, the conductive rubber does not hinder uniform discharge.

When the conductive rubber is a two-component conductive rubber, the thickness of the conductive rubber layer between the conductor and the dielectric can be reduced, so that the cooling efficiency of the electrode can be improved. .

In another discharge electrode, a conductor and a dielectric are
They are integrated via conductive grease.

As described above, in the discharge electrode of the present invention, since the conductor and the dielectric are integrated via the conductive grease, by cooling the conductor, the thermal expansion is reduced by the conductor and the dielectric. Even if the body is different, the conductive grease follows, so that a uniform discharge can be realized stably for a long time without separation of the conductor and the dielectric.

Since the electric discharge electrode can be used without separating the electric conductor and the dielectric even when the electric conductor is cooled, the substrate to be treated does not melt and the dielectric does not break down.

Even if the thickness of the conductive grease is uneven, the conductive grease does not hinder uniform discharge.

[0018]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The discharge electrode of the present invention will be described below with reference to FIG. 1 which is a schematic sectional view of the discharge electrode of the present invention.

In the discharge electrode of the present invention, the plate-shaped conductor 11 and the plate-shaped dielectric 31 are integrated via a conductive rubber 21.

Each side wall of the flat conductor 11 of the discharge electrode of the present invention in FIG. 1 is completely covered with the side wall dielectric 41. By being covered in this way,
It is designed so that discharge from the side wall of the flat conductor 11 does not occur. Note that, depending on the output, the size of the plate-shaped conductor 11, and the like, each side wall of the plate-shaped conductor 11 does not need to be completely covered, and may be partially covered.

In the present invention, the material constituting the flat conductor 11 is not particularly limited, but the specific resistance is 10 ^3.
Omega · cm or less (preferably less 10 ⁰ Ω · cm) can be used a conductor of, for example, a metal (e.g., stainless steel, aluminum, titanium, tungsten),
Conductive rubber 21 in which rubber is combined with a conductive agent such as conductive metal oxide, carbon, or metal powder or carbon powder.
Etc. can be used.

The entire surface of one surface of the flat conductor 11 is covered with the flat dielectric 31 so that the flat conductor 11 can stably generate a discharge without generating spark discharge or the like. The plate-shaped conductor 11 and the plate-shaped dielectric 31 are integrated via a conductive rubber 21.

The flat dielectric 31 is a flat conductor 1.
1 and is larger than the conductive rubber 21 and is in a protruding state. It is designed so that spark discharge does not occur in such a state.

In the present invention, examples of the material constituting the flat dielectric 31 include glass (for example, quartz, Pyrex (registered trademark), Tempax, etc.), ceramic (for example, alumina), and rubber (for example, Silicone rubber, chloroprene rubber, etc.) or a thermoplastic resin (eg, polytetrafluoroethylene, polyester, etc.) can be used. Among them, glass and ceramics are preferably used because of their excellent durability.

The thickness of the flat dielectric 31 is not particularly limited, but is preferably about 0.05 mm to 5 mm. The thickness of the flat dielectric 31 is 0.05 mm
If it is less than 5 mm, the mechanical strength is reduced and dielectric breakdown is likely to occur. If it exceeds 5 mm, a high voltage is required for discharging.

In the present invention, the material forming the side wall dielectric 41 can be made of the same material as the flat dielectric 31. That is, for example, glass (for example, quartz,
Pyrex, Tempax, etc.), ceramics (eg, alumina, etc.), rubber (eg, silicone rubber,
Chloroprene rubber) or a thermoplastic resin (eg, polytetrafluoroethylene, polyester, etc.) can be used.

The thickness of the side wall dielectric 41 varies depending on the output, the size of the flat conductor 11, and the like. Therefore, it is preferable to generate a discharge in advance and confirm that no discharge occurs between the side wall of the plate-shaped conductor 11 and the plate-shaped dielectric 31.

The flat dielectric 31 and the side wall dielectric 41
Does not need to be composed of the same material, and may be composed of different types of materials. In addition, in the discharge electrode of FIG.
Are separated from each other, but may be integrated.

The discharge electrode of the present invention is formed of a flat conductor 11
And the plate-like dielectric 31 are integrated via the conductive rubber 21, so that when the plate-like conductor 11 is cooled, the thermal expansion causes the plate-like conductor 11 and the plate-like dielectric 31.
However, even when the conductive rubber 21 expands and contracts, the flat conductive body 11 and the flat dielectric body 31 do not peel off, and a uniform discharge can be stably performed for a long time.

As described above, the discharge electrode of the present invention can be used without cooling the flat conductor 11 even if the flat conductor 11 is cooled. There is no melting or dielectric breakdown of the flat dielectric 31.

Further, even if the thickness of the conductive rubber 21 is uneven, since it is conductive, it does not hinder uniform discharge.

The conductive rubber 21 usable in the present invention
There is no particular limitation, and for example, a rubber material to which a conductive agent or the like is added to impart conductivity can be used. As the rubber material, for example, nitrile rubber (NB
R), ethylene propylene rubber (EPDM), styrene butadiene rubber (SBR), butadiene rubber (BR),
From one or more of isoprene rubber (IR), natural rubber (NR), silicone rubber, urethane rubber, acrylic rubber (ACR), chloroprene rubber (CR), butyl rubber (IIR), epichlorohydrin rubber (ECO), etc. Rubber material can be used.

Examples of the conductive agent to be added to the rubber material include conductive carbon such as Ketjen black and acetylene black; and the grades in oil furnace black are CF, SAF, ISAF, HAF, and FE.
Carbon for rubber of F, GPF, SRF, FT, MT; carbon for oxidized color ink, pyrolytic carbon, natural graphite, artificial graphite, etc .; metal oxides such as tin oxide, titanium oxide, zinc oxide, nickel And metals such as copper; and conductive polymers such as polyaniline, polypyrrole, and polyacetylene.

When the conductive rubber 21 is a two-component conductive rubber, the layer of the conductive rubber 21 between the flat conductor 11 and the flat dielectric 31 can be thinned, and This is preferable because the cooling efficiency can be improved. Here, the two-component conductive rubber is a two-component conductive rubber which is cured by adding a predetermined amount of the curing agent to the main component, mixing and stirring. In the two-pack type, the curing reaction proceeds uniformly on the surface and inside regardless of the thickness of the rubber, so that the layer of the conductive rubber 21 between the plate-shaped conductor 11 and the plate-shaped dielectric 31 may be thinned. it can.

The “conductivity” of the conductive rubber 21 in the present invention means that the volume resistivity is 10 ⁴ Ω · cm or less, preferably 10 ³ Ω · cm or less.

The thickness of the conductive rubber 21 is not particularly limited, but is preferably 2 mm or less. 2
This is because if it exceeds mm, it becomes difficult to cool the plate-shaped dielectric 31.

Another discharge electrode of the present invention is exactly the same except that a conductive grease is used instead of the conductive rubber 21 of the discharge electrode of FIG. When the plate-shaped conductor and the plate-shaped dielectric are integrated via the conductive grease in this way, by cooling the plate-shaped conductor, the thermal expansion is increased by the plate-shaped conductor and the plate-shaped dielectric. Even if different
Since the conductive grease follows, the plate-shaped conductor and the plate-shaped dielectric do not peel off, and a uniform discharge can be realized stably for a long time.

This discharge electrode can also be used without cooling of the plate-shaped conductor and the plate-shaped dielectric even when the plate-shaped conductor is cooled. There is no dielectric breakdown.

Even if the thickness of the conductive grease is uneven, the conductive grease does not hinder uniform discharge.

This conductive grease is not particularly limited.
A material obtained by adding a conductive agent or the like to an appropriate grease material and imparting conductivity can be used. As the grease material, for example, hydrocarbon grease such as ester grease and olefin grease, silicone grease, or fluorine grease can be used.

The conductive agent to be added to the conductive grease is not particularly limited as long as it is a powder that imparts electrical conductivity. For example, carbon black such as acetylene black, Ketjen black, and channel black may be used. Conductive materials, fine powders of metals such as copper, iron, gold, silver, aluminum, platinum, zinc, and tin; silver compounds such as silver oxide and silver nitrate; and conductive polymers such as polyaniline, polypyrrole, and polyacetylene. Can be used.

The “conductivity” of the conductive grease in the present invention means that the volume resistivity is 10 ⁴ Ω · cm or less, preferably 10 ³ Ω · cm or less.

The thickness of the conductive grease is not particularly limited, but is preferably 2 mm or less. 2
This is because if it exceeds mm, it becomes difficult to cool the plate-shaped dielectric.

Such a discharge electrode of the present invention is arranged, for example, as shown in a schematic sectional view of a discharge device in FIG. By applying an AC voltage between the bodies 11 and 12, a discharge can be generated in the space between the planar dielectrics 31 and 32. In FIG. 2, one flat conductor 11 is connected to the AC power supply 1 and the other flat conductor 12 is grounded. Is grounded, and the other planar conductor 12
May be connected to an AC power supply.

[0045]

EXAMPLES Examples of the discharge electrode of the present invention will be described below, but the present invention is not limited to the following examples.

(Example 1) The thickness is 1.1 mm,
A self-adhesive, one-part room temperature-curable conductive silicone rubber (added with conductive carbon, RTV rubber KE3491 manufactured by Shin-Etsu Silicone Co., Ltd.) is applied to the center of a flat dielectric 31 made of Tempax glass having a thickness of 0 mm and a width of 240 mm. The coating was applied so that the thickness was 0.1 mm, the length was 70 mm, and the width was 220 mm, and then solidified.

Next, the plate-shaped conductor 11 made of aluminum (thickness: 50 mm, vertical: 50 mm, side: 20
A side wall dielectric 41 made of polytetrafluoroethylene (thickness: 2 cm) was attached to all side walls (0 mm), and a silver paste was applied to the center of the plate-shaped conductor 11.

Next, a self-adhesive two-part room temperature curing type rubber (non-conductive, Shin-Etsu Silicone, RTV rubber KE11)
8) is applied to the periphery of the silver paste, and then the conductive silicone rubber, which is an integrated product of the conductive silicone rubber and the planar dielectric 31, and the integrated product of the planar conductor 11, and the side wall dielectric 41 Was laminated and integrated so as to be in contact with each other to produce two discharge electrodes of the present invention as shown in FIG.

The two discharge electrodes are connected as shown in FIG.
Arranged so that the plate-shaped dielectrics 31 and 32 face each other (distance between opposed surfaces of the plate-shaped dielectrics 31 and 32: 1.5 mm)
did. Then, an AC voltage (pulse voltage: 18 KV, frequency: 2 KHz, rise time: 60 ns) is applied between the pair of flat conductors 11 and 12 under the atmospheric pressure, and discharge is continuously generated for one week. Was. When a discharge was generated, silicone oil at a temperature of 20 ° C. was supplied to the flat conductors 11 and 12 to cool the entire discharge electrode.

As a result, the discharge is stable, and the flat conductors 11 and 12 and the conductive rubbers 21 and 22, and the conductive rubbers 21 and 22 and the flat dielectrics 31 and 32 cannot be peeled off. Did not. The same experiment was repeated, but no abnormality was found.

Example 2 Discharge was generated for one week continuously in exactly the same manner as in Example 1 except that cooling was not performed during discharging.

As a result, although the discharge electrodes were not cooled, the discharge was stable, but the plate-like conductors 11 and 12 and the conductive rubbers 21 and 22, and the conductive rubbers 21 and 22 and the plate-like dielectric were not cooled. Neither 31 nor 32 peeled off. The same experiment was repeated, but no abnormality was found.

Example 3 A plate-shaped dielectric 31 made of the same Tempax glass as in Example 1 and a plate-shaped conductor 11 made of aluminum were prepared.

Next, a self-adhesive, two-part, room-temperature-curing conductive silicone rubber (containing silver-plated copper, manufactured by Taiyo Mesh Co., Ltd., shield compound CHO-BOND 1029) is provided between the flat dielectric 31 and the flat conductor 11. And pressurized, and further evacuated to remove bubbles to solidify the conductive silicone rubber. Then, the flat dielectric 31
The conductive silicone rubber which protruded from between the conductive material and the flat conductor 11 was removed.

Next, a side wall dielectric 41 made of polytetrafluoroethylene (thickness: 2 cm) is attached to all side walls of the plate-shaped conductor 11, and the side wall dielectric 41 and the plate-shaped dielectric 31 are self- Two discharge electrodes of the present invention as shown in FIG. 1 were manufactured by bonding with an adhesive two-part room temperature curing type rubber (RTV rubber KE118, manufactured by Shin-Etsu Silicone Co., Ltd.).

Next, in the same manner as in Example 1, the two discharge electrodes were arranged, an AC voltage was applied, and discharge was continuously generated for one week.

As a result, the discharge is stable, and the flat conductors 11 and 12 and the conductive rubbers 21 and 22, and the conductive rubbers 21 and 22 and the flat dielectrics 31 and 32 cannot be peeled off. Did not. The same experiment was repeated, but no abnormality was found. Further, the temperature of the plate-like dielectrics 31 and 32 at this time was lower than the temperature of the plate-like dielectric of the discharge electrode of Example 1, and the cooling was efficient.

Example 4 A silicone-based conductive grease (containing conductive carbon, manufactured by Shin-Etsu Silicone Co., Ltd., conductive oil compound KS660) was used in place of the self-adhesive two-part room temperature-curable conductive silicone rubber. Except for this, two discharge electrodes of the present invention were manufactured in exactly the same manner as in Example 3.

Next, in the same manner as in Example 1, the two discharge electrodes were arranged, an AC voltage was applied, and a discharge was continuously generated for one week.

As a result, the discharge was stable, and neither the flat conductor nor the conductive grease, nor the conductive grease and the flat dielectric were separated. The same experiment was repeated, but no abnormality was found.

(Comparative Example 1) Double-sided self-adhesive two-part room-temperature-curable conductive silicone rubber was replaced with a synthetic rubber-based double-sided pressure-sensitive adhesive tape (double-sided pressure-sensitive adhesive tape 5650 manufactured by Sliontec)
Two discharge electrodes were manufactured in exactly the same manner as in Example 3 except that was used.

Next, in the same manner as in Example 1, the two discharge electrodes were arranged, an AC voltage was applied, and a discharge was continuously generated for one week.

As a result, shortly after the discharge was generated, the pressure-sensitive adhesive tape and the plate-like dielectric were separated, and the discharge became non-uniform. Since the thermal expansion of the plate-like conductor and the thermal expansion of the plate-like dielectric were different, it was considered that they were separated.

(Comparative Example 2) Except that a self-adhesive two-part room temperature curing conductive silicone rubber was replaced with a heat-resistant super-strong adhesive double-sided tape (double-sided adhesive tape 5577, manufactured by Sliontec) instead of a self-adhesive two-part room temperature-curable conductive silicone rubber In the same manner as in Example 3, two discharge electrodes were manufactured.

Next, in the same manner as in Example 1, the two discharge electrodes were arranged, and an AC voltage was applied to generate a discharge.

Shortly after the discharge was generated, the flat dielectric material was broken and a spark discharge was generated. The thermal expansion of the plate-shaped conductor and that of the plate-shaped dielectric were different, and it was considered that the plate-shaped dielectric was cracked because the adhesive strength of the double-sided adhesive tape was too strong.

Comparative Example 3 A thickness of 1.1 mm and a length of 90 mm
mm, on a flat dielectric material 31 made of Tempax glass with a width of 240 mm, so that the thickness becomes 0.5 μm,
Aluminum was deposited.

Next, a flat conductor made of aluminum (thickness: 50 mm, vertical: 50 mm, side: 200 m)
m) on all side walls of polytetrafluoroethylene (thickness:
2 cm), and then a silver paste was applied to the center of the flat conductor. Next, a self-adhesive two-part room temperature curing type rubber (non-conductive, RTV rubber KE118, manufactured by Shin-Etsu Silicone Co., Ltd.) is applied around the silver paste, and then the aluminum-evaporated surface of the plate-shaped dielectric on which aluminum is evaporated is applied. Then, the silver paste as an integrated product of the plate-shaped conductor and the side wall dielectric was laminated and integrated so as to be in contact with each other to produce two discharge electrodes.

Next, in the same manner as in Example 1, the two discharge electrodes were arranged, and an AC voltage was applied to generate a discharge.

Shortly after the discharge was generated, the deposited aluminum was peeled off and stopped discharging.

[0071]

According to the discharge electrode of the present invention, even if the thermal expansion differs between the conductor and the dielectric, the conductor and the dielectric do not peel off due to the expansion and contraction of the conductive rubber, so that the discharge electrode can be stably and uniformly formed for a long time. Discharge can be realized.

Since the discharge electrode of the present invention can be used without separating the conductor and the dielectric even when the conductor is cooled, the substrate to be treated does not melt or the dielectric does not break down.

Further, even if the thickness of the conductive rubber is uneven, since it is conductive, it does not prevent uniform discharge.

When the conductive rubber is a two-component conductive rubber, the thickness of the conductive rubber layer between the conductor and the dielectric can be reduced, and the cooling efficiency of the electrode can be improved.

In another discharge electrode of the present invention, even if the thermal expansion of the conductor differs from that of the dielectric, the conductive grease follows and the conductor and the dielectric do not separate, so that a uniform discharge can be stably performed for a long time. Can be realized.

Since the electric discharge electrode can be used without separating the electric conductor and the dielectric even when the electric conductor is cooled, the substrate to be treated does not melt or the dielectric does not break down.

Even if the thickness of the conductive grease is uneven, the conductive grease does not hinder uniform discharge.

[0078]

[Brief description of the drawings]

FIG. 1 is a schematic sectional view of a discharge electrode of the present invention.

FIG. 2 is a schematic sectional view of a discharge device using the discharge electrode of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 AC power supply 11, 12 Plate-shaped conductor 21, 22 Conductive rubber 31, 32 Plate-shaped dielectric 41, 42 Side-wall dielectric

Claims (3)

[Claims] 1. A discharge electrode, wherein a conductor and a dielectric are integrated via a conductive rubber. 2. The discharge electrode according to claim 1, wherein the conductive rubber is a two-component conductive rubber. 3. A discharge electrode, wherein a conductor and a dielectric are integrated via conductive grease.