JP2002070870A5 - - Google Patents
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- Publication number
- JP2002070870A5 JP2002070870A5 JP2000257550A JP2000257550A JP2002070870A5 JP 2002070870 A5 JP2002070870 A5 JP 2002070870A5 JP 2000257550 A JP2000257550 A JP 2000257550A JP 2000257550 A JP2000257550 A JP 2000257550A JP 2002070870 A5 JP2002070870 A5 JP 2002070870A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- spindle device
- shows
- sectional drawing
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
なお、ＤＬＣ皮膜14に各種イオンを打ち込んだり、金属元素を添加することにより、ＤＬＣ皮膜14の膜特性の制御が可能であり、これらによって複合多層のＤＬＣ皮膜14を形成しても良い。例えば、炭化物と炭素の複合膜又は複合多層膜を形成すれば、応力の緩和と厚膜化が可能である。 It is to be noted that the film characteristics of the DLC film 14 can be controlled by implanting various ions into the DLC film 14 or adding a metal element, and a composite multilayer DLC film 14 may be formed by these. For example, when a composite film or composite multilayer film of carbide and carbon is formed, stress can be relaxed and the film can be made thicker.
【図面の簡単な説明】
【図１】
本発明の第１の実施形態を示す主軸装置の断面図である。
【図２】
本発明の第１の実施形態を示す静圧軸受メタルの内周側の展開図である。
【図３】
本発明の第２の実施形態を示す主軸装置の断面図である。
【図４】
本発明の第３の実施形態を示す主軸装置の断面図である。
【図５】
本発明の第４の実施形態を示す主軸装置の断面図である。
【図６】
本発明の第５の実施形態を示す主軸装置の断面図である。
【符号の説明】
2 主軸
3 静圧軸受メタル
4 支持面
5 静圧ポケット
14 ＤＬＣ皮膜
15 Ｃｒ−Ｎ皮膜
16 ＷＣ−Ｎ皮膜
17 皮膜
[Brief description of the drawings]
FIG.
It is a sectional view of a spindle device showing a 1st embodiment of the present invention.
FIG. 2
FIG. 2 is a development view of an inner peripheral side of the hydrostatic bearing metal according to the first embodiment of the present invention.
FIG. 3
It is sectional drawing of the spindle device which shows 2nd Embodiment of this invention.
FIG. 4
It is sectional drawing of the spindle device which shows 3rd Embodiment of this invention.
FIG. 5
It is sectional drawing of the spindle device which shows 4th Embodiment of this invention.
FIG. 6
It is sectional drawing of the spindle device which shows 5th Embodiment of this invention.
[Explanation of symbols]
2 spindle
3 Hydrostatic bearing metal
4 Support surface
5 Static pressure pocket
14 DLC coating
15 Cr-N skin film
16 WC-N coating
17 Coating
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000257550A JP2002070870A (en) | 2000-08-28 | 2000-08-28 | Bearing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000257550A JP2002070870A (en) | 2000-08-28 | 2000-08-28 | Bearing apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002070870A JP2002070870A (en) | 2002-03-08 |
| JP2002070870A5 true JP2002070870A5 (en) | 2007-07-12 |
Family
ID=18745992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000257550A Pending JP2002070870A (en) | 2000-08-28 | 2000-08-28 | Bearing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002070870A (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0612979D0 (en) * | 2006-06-30 | 2006-08-09 | Renishaw Plc | Gas bearing fabrication method |
| JP5064135B2 (en) * | 2007-08-07 | 2012-10-31 | 新日本製鐵株式会社 | Blow pin holder for ultrasonic impact treatment equipment |
| GB2456344B (en) * | 2008-01-14 | 2012-04-18 | Upm Ltd | Aerostatic bearing |
| JP5593842B2 (en) * | 2010-05-31 | 2014-09-24 | 日本精工株式会社 | Air slide device |
| DE102013225398B4 (en) | 2013-12-10 | 2017-05-11 | Eagleburgmann Germany Gmbh & Co. Kg | Bearing component with diamond inner coating |
| JP6869641B2 (en) * | 2016-03-28 | 2021-05-12 | 株式会社日立インダストリアルプロダクツ | Electric motors with plain bearings and plain bearings |
| CN106979227B (en) * | 2017-05-17 | 2023-06-02 | 西安工业大学 | Porous integrated throttling integral gas hydrostatic bearing |
| CN111720440A (en) * | 2019-03-22 | 2020-09-29 | 上海微电子装备（集团）股份有限公司 | Air floatation cushion structure |
-
2000
- 2000-08-28 JP JP2000257550A patent/JP2002070870A/en active Pending
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