JP2002043654A - Multilayer thin film magnetic sensor - Google Patents
Multilayer thin film magnetic sensorInfo
- Publication number
- JP2002043654A JP2002043654A JP2000225229A JP2000225229A JP2002043654A JP 2002043654 A JP2002043654 A JP 2002043654A JP 2000225229 A JP2000225229 A JP 2000225229A JP 2000225229 A JP2000225229 A JP 2000225229A JP 2002043654 A JP2002043654 A JP 2002043654A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- magnetic field
- sensor
- coil
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 172
- 239000010409 thin film Substances 0.000 title claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 78
- 230000005284 excitation Effects 0.000 claims abstract description 36
- 239000000696 magnetic material Substances 0.000 claims abstract description 22
- 239000002245 particle Substances 0.000 claims abstract description 11
- 238000004519 manufacturing process Methods 0.000 claims abstract description 10
- 238000010030 laminating Methods 0.000 claims abstract description 6
- 239000000470 constituent Substances 0.000 claims abstract description 4
- 238000001514 detection method Methods 0.000 claims description 44
- 239000000463 material Substances 0.000 claims description 27
- 239000003973 paint Substances 0.000 claims description 7
- 239000013078 crystal Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 230000003321 amplification Effects 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 230000010354 integration Effects 0.000 claims description 4
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims description 3
- 238000007639 printing Methods 0.000 claims description 2
- 230000003068 static effect Effects 0.000 abstract description 3
- 230000005358 geomagnetic field Effects 0.000 abstract 1
- 239000000203 mixture Substances 0.000 description 8
- 239000004593 Epoxy Substances 0.000 description 7
- 230000004907 flux Effects 0.000 description 7
- 238000005530 etching Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 230000035699 permeability Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 230000005347 demagnetization Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005294 ferromagnetic effect Effects 0.000 description 2
- -1 for example Substances 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 230000005389 magnetism Effects 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Measuring Magnetic Variables (AREA)
- Thin Magnetic Films (AREA)
- Hall/Mr Elements (AREA)
Abstract
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【０００１】[0001]
【発明の属する技術分野】本発明は、主として地磁気の
正確な検出を行うフラックスゲートタイプの薄膜積層型
磁気センサとその製造法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluxgate type thin-film magnetic sensor for accurately detecting terrestrial magnetism and a method of manufacturing the same.
【０００２】[0002]
【従来技術】フラックスゲート型の磁気センサは、リン
グコアと励磁コイルと検出コイルを備え、励磁コイルに
よって飽和磁化されたリングコアの磁束が外部磁界によ
って変化したときにこれを検出コイルによって検出して
出力する。したがって、コイルの高度な巻き線技術が必
要であり、小型化にも限界があった。本発明者は、特開
平１１−１１８８９２号において、フラックスゲート型
磁気センサの改良を図り、小型化と製造容易な薄膜積層
型の磁気センサを提案した。先行するこの薄膜積層型の
磁気センサは、リングコアを備えたセンサコアの上下に
磁界検出コイル基板と磁磁コイル基板を相対するように
積層して成る。図５にこの磁気センサを分解して簡単に
示す。2. Description of the Related Art A flux gate type magnetic sensor includes a ring core, an exciting coil and a detecting coil. When a magnetic flux of a ring core saturated and magnetized by the exciting coil is changed by an external magnetic field, the magnetic flux is detected and output by a detecting coil. . Therefore, advanced coil winding technology is required, and there is a limit to miniaturization. The present inventor has proposed, in Japanese Patent Application Laid-Open No. H11-118892, an improvement of a flux gate type magnetic sensor, and proposed a thin film laminated type magnetic sensor which is small in size and easy to manufacture. The preceding thin-film laminated magnetic sensor is formed by laminating a magnetic field detecting coil substrate and a magnetic magnetic coil substrate on and under a sensor core having a ring core. FIG. 5 shows a simplified exploded view of the magnetic sensor.
【０００３】センサコアＡは、アモルファス薄板をリン
グ状にカットし、これにトロイダルコアを巻いたように
エッチング処理することにより形成され、あるいは所定
パターンを上下導通可能にエッチングした薄板状のエポ
キシ基板の表裏面に環状エッチングを施したアモルファ
ス薄板をパターンを合わせて積層して成る。磁界検出コ
イル基板Ｂは、Ｘ軸方向成分磁界検出コイル形成用のコ
イルパターンを有する第一検出コイル基板Ｃと、Ｙ軸方
向成分磁界検出コイル形成用のコイルパターンを有する
第二検出コイル基板Ｄとから成る。The sensor core A is formed by cutting an amorphous thin plate into a ring shape and etching it as if a toroidal core is wound thereon, or a thin plate-like epoxy substrate formed by etching a predetermined pattern so as to be vertically conductive. It is formed by laminating amorphous thin plates that have been subjected to annular etching on the back surface in accordance with the pattern. The magnetic field detection coil substrate B includes a first detection coil substrate C having a coil pattern for forming an X-axis direction component magnetic field detection coil, and a second detection coil substrate D having a coil pattern for forming a Y-axis direction component magnetic field detection coil. Consists of
【０００４】第一検出コイル基板Ｃは、センサコアＡを
上下から挟むようにして互いに導通可能に積層される２
枚のＸコイル基板ｃ１，ｃ２を有する。各Ｘコイル基板
ｃ１，ｃ２は、エポキシ基板の表面にＸ軸方向成分磁界
検出コイル用のＸコイルパターンＸ１を形成してある。
第二検出コイル基板Ｄは、センサコアＡを上下から挟む
ようにして互いに導通可能に積層される２枚のＹコイル
基板ｄ１，ｄ２を有する。各Ｙコイル基板ｄ１，ｄ２
は、エポキシ基板の表面にＹ軸方向成分磁界検出コイル
用のＹコイルパターンＹ１を形成してある。[0004] The first detection coil substrate C is laminated so as to be mutually conductive so as to sandwich the sensor core A from above and below.
It has the X coil substrates c1 and c2. Each of the X coil substrates c1 and c2 has an X coil pattern X1 for the X-axis direction component magnetic field detection coil formed on the surface of the epoxy substrate.
The second detection coil board D has two Y coil boards d1 and d2 that are stacked so as to be conductive with each other so as to sandwich the sensor core A from above and below. Each Y coil substrate d1, d2
Has a Y coil pattern Y1 for a Y-axis direction component magnetic field detection coil formed on the surface of an epoxy substrate.
【０００５】励磁コイル基板Ｅは、センサコアＣを上下
から挟むようにして互いに導通可能に積層される２枚の
励磁コイル用基板ｅ１，ｅ２を有する。各励磁コイル用
基板ｅ１，ｅ２は、エポキシ基板の表面に励磁コイルパ
ターンＥ１を形成してある。従来のこの磁気センサは、
センサコアＡと励磁コイル基板Ｅと磁界検出コイル基板
Ｂを、センサコアＡを中心に順次積重ね、プレスして層
状に一体化される。これにより、高度な巻線技術が不要
となり、断線の心配もなく、小型でかつ高い量産性を有
する。[0005] The excitation coil substrate E has two excitation coil substrates e1 and e2 which are stacked so as to be mutually conductive so as to sandwich the sensor core C from above and below. Each of the excitation coil substrates e1 and e2 has an excitation coil pattern E1 formed on the surface of an epoxy substrate. This conventional magnetic sensor,
The sensor core A, the exciting coil substrate E, and the magnetic field detecting coil substrate B are sequentially stacked around the sensor core A, pressed, and integrated into a layer. This eliminates the need for advanced winding technology, eliminates the risk of disconnection, and is compact and has high mass productivity.
【０００６】[0006]
【発明が解決しようとする課題】上記薄膜積層型磁気セ
ンサは、センサコアＡを形成するアモルファス合金が結
晶構造を有さず、結晶磁気異方性を持たない性状である
ために、外部磁界の磁界検出感度が高い。しかし、その
ために、逆に、地球磁場の静磁界以外に、外部環境にお
ける動磁界（交流磁界）、例えば建築構造躯体を成す鋼
材からの微弱な動磁界をも検出する。したがって、先行
する磁気センサを、特に地磁気を検出する方位センサと
して利用した場合、誤動作をきたし易くなる。In the above-mentioned thin film laminated magnetic sensor, since the amorphous alloy forming the sensor core A has no crystal structure and does not have crystal magnetic anisotropy, the magnetic field of the external magnetic field is reduced. High detection sensitivity. However, conversely, in addition to the static magnetic field of the earth's magnetic field, a dynamic magnetic field (AC magnetic field) in an external environment, for example, a weak dynamic magnetic field from a steel material forming a building structure skeleton is also detected. Therefore, when the preceding magnetic sensor is used as an azimuth sensor for detecting terrestrial magnetism, malfunctions are likely to occur.
【０００７】また、上記磁気センサは、前記公報の図３
にも見られるようにセンサ出力を検出するための回路基
板が別体で設けられ、磁気センサとセンサ出力検出用回
路基板とがリード線等によって接続される関係上、その
分、小型化及び軽量化に限界がある。[0007] The above magnetic sensor is disclosed in FIG.
As can be seen from the above, the circuit board for detecting the sensor output is provided separately, and the magnetic sensor and the circuit board for sensor output detection are connected by the lead wire, so that the size and weight are reduced accordingly. There is a limit to conversion.
【０００８】本発明の目的は、交流磁界に影響を受ける
ことなく、地球磁場による静磁界を正確に検出可能な、
薄膜積層型の磁気センサとその製造法を提供することに
ある。本発明のもう一つの目的は、磁界を正確に検出で
き、小型化と軽量化により一層貢献できる、薄膜積層型
の磁気センサとその製造法を提供することにある。SUMMARY OF THE INVENTION It is an object of the present invention to accurately detect a static magnetic field caused by an earth magnetic field without being affected by an alternating magnetic field.
An object of the present invention is to provide a thin-film laminated magnetic sensor and a method of manufacturing the same. Another object of the present invention is to provide a thin-film laminated magnetic sensor capable of accurately detecting a magnetic field and further contributing to miniaturization and weight reduction, and a method of manufacturing the same.
【０００９】[0009]
【課題を達成するための手段】本発明は、上記した目的
を達成するために次の構成を備える。すなわち、本磁気
センサは、シート状をしたセンサコアの両面に、励磁用
の環状コイルパターンを有する励磁コイル基板を積層
し、励磁コイル基板の外面に、Ｘ軸方向磁界を検出する
コイルパターンを有する第一の磁界検出コイル基板とＹ
軸方向磁界を検出するコイルパターンを有する第二の磁
界検出コイル基板を交互に積層して成る磁気センサを改
良したものである。センサコアは、アモルファス磁性材
料によって形成されたリングコアを備え、このリングコ
アに結晶化しない程度の熱を加えるキュアリングを施す
ことによって、アモルファス磁性材料の組成粒子の磁化
される磁極の方向が略一定になるようにしてある。アモ
ルファス磁性材料として、Ｆｅ−Ｐ−Ｃ合金など強磁性
金属と半金属の合金あるいは強磁性金属とIVａ族金属
（Ｔｉ、Ｚｒ、Ｈｆ）との合金など公知のアモルファス
材料が用いられる。The present invention has the following configuration to achieve the above object. That is, the present magnetic sensor is configured such that an excitation coil substrate having an annular coil pattern for excitation is laminated on both surfaces of a sheet-shaped sensor core, and a coil pattern for detecting a magnetic field in the X-axis direction is provided on an outer surface of the excitation coil substrate. One magnetic field detection coil substrate and Y
A magnetic sensor in which second magnetic field detecting coil substrates having a coil pattern for detecting an axial magnetic field are alternately stacked. The sensor core includes a ring core formed of an amorphous magnetic material, and by applying heat to the ring core so as not to crystallize, the direction of the magnetized magnetic pole of the composition particles of the amorphous magnetic material becomes substantially constant. It is like that. As the amorphous magnetic material, a known amorphous material such as an alloy of a ferromagnetic metal and a semimetal such as an Fe-PC alloy or an alloy of a ferromagnetic metal and a group IVa metal (Ti, Zr, Hf) is used.
【００１０】センサコアは、例えば、有機質系のシート
材（フィルム材あるいはプレート材を含む）の表裏面に
アモルファス磁性材料（１０乃至２０μ程度の薄膜材）
をプレスコーティングして成り、このコーティングされ
たシート材のアモルファス磁性材料をリング状にスクラ
イブ加工することによってリングコアが形成されてい
る。無機質系のシート材を用いる場合、シート材の表裏
面に、粉末状のアモルファス磁性材料（上記薄膜材を粉
末状にしたもの）を混合した導電性塗料によって印刷さ
れたリングコアを有する。有機質系のシート材には、リ
ングコイルになるような所定のパターンが上下導通可能
にエッチング処理されて形成されている。また、無機質
系のシート材には、同様なリングコイルがニッケル粉末
と銅粉末を混合した導電性塗料によって印刷されてい
る。The sensor core is made of, for example, an amorphous magnetic material (a thin film material of about 10 to 20 μm) on the front and back surfaces of an organic sheet material (including a film material or a plate material).
Is press-coated, and a ring core is formed by scribing the amorphous magnetic material of the coated sheet material into a ring shape. When an inorganic sheet material is used, a ring core printed on the front and back surfaces of the sheet material with a conductive paint mixed with a powdery amorphous magnetic material (the above-mentioned thin film material in a powdered form) is provided. A predetermined pattern for forming a ring coil is formed on the organic-based sheet material by etching so as to be vertically conductive. A similar ring coil is printed on the inorganic sheet material by a conductive paint obtained by mixing nickel powder and copper powder.
【００１１】センサコアのベースとなる有機質系もしく
は無機質系のシート材には、キュアリングに熱処理に耐
えられる材料が選定される。有機質系のシート材として
は例えばセラミックが、また無機質系のシート材として
は、例えばポリエチレン塩化フィルム、ガラスエポキシ
フィルムが用いられる。無機質系のシート材にリングコ
アを形成するための印刷用の塗料は、粉末状のアモルフ
ァス磁性材料と導電性塗料とを、望ましくは１０：３の
重量比で混合したものが使用される。塗料には、この他
に導電性塗料と高透磁率磁性材料であるパーマロイ粉末
を同量比で混合したものを用いる手法も考えられる。こ
の場合には、キュアリングを施す必要はない。As the organic or inorganic sheet material serving as the base of the sensor core, a material that can withstand heat treatment in curing is selected. As the organic sheet material, for example, ceramic is used, and as the inorganic sheet material, for example, a polyethylene chloride film or a glass epoxy film is used. As a printing paint for forming a ring core on an inorganic sheet material, a mixture of a powdery amorphous magnetic material and a conductive paint, preferably in a weight ratio of 10: 3, is used. In addition to this, a method using a mixture of a conductive paint and a permalloy powder, which is a high-permeability magnetic material, in the same ratio may be considered. In this case, there is no need to perform curing.
【００１２】キュアリングによるアニーリング処理に用
いられる温度は、アモルファスが結晶化を起こす約５０
０度Ｃ以下の温度（望ましくは４００度Ｃ以上）で、ア
モルファス合金の組成や膜厚などに応じて適宜設定され
る。キュアリングによって、熱脱磁が行われると同時に
アモルファスの組成粒子が結晶化には至らない程度の範
囲で略一定方向になる。これにより、結晶構造ではない
にも拘わらずある程度の磁気異方性を付与され、磁界方
向特性に優れ、外部磁界流の直流磁界に反応しやすく、
交流磁界に反応しにくい磁性体となる。また、磁化され
ることにより、磁束密度も増加し、高透磁性が維持され
る。特に、キュアリングによってＢ−Ｈ曲線は、ループ
幅が小さくなり、かつ傾斜角度も急になる。[0012] The temperature used for the annealing treatment by curing is about 50 ° C at which the amorphous material is crystallized.
At a temperature of 0 ° C. or lower (preferably 400 ° C. or higher), the temperature is appropriately set according to the composition and the film thickness of the amorphous alloy. As a result of the curing, thermal demagnetization is performed, and at the same time, the direction of the amorphous composition particles is substantially constant within a range that does not lead to crystallization. As a result, a certain degree of magnetic anisotropy is imparted in spite of not having a crystal structure, the magnetic field direction characteristics are excellent, and it is easy to respond to a DC magnetic field of an external magnetic field flow,
It becomes a magnetic material that does not easily respond to an AC magnetic field. Further, by being magnetized, the magnetic flux density also increases, and high magnetic permeability is maintained. In particular, the BH curve has a small loop width and a steep inclination angle due to the curing.
【００１３】キュアリング処理は、本磁気センサを製造
する課程中のいずれの時点で行っても良いが、センサコ
アの作成時あるいは他の基板との積層一体化が行われた
後で行うと良い。センサコア基板を励磁コイル基板等の
他の基板と一体化するときに、圧力と熱とによって一次
キュアリングによる上記した作用が薄れるため、望まし
くは、両時点で行われる。二次キュアリングを行う場合
には、一次キュアリングと温度及び時間条件を変えても
良い。The curing process may be performed at any time during the course of manufacturing the magnetic sensor, but is preferably performed at the time of forming the sensor core or after lamination and integration with another substrate. When the sensor core substrate is integrated with another substrate such as an excitation coil substrate, the above-described action due to the primary curing is weakened by pressure and heat, so that it is desirably performed at both times. When performing the secondary curing, the temperature and time conditions may be changed from those of the primary curing.
【００１４】本薄膜積層型磁気センサは、センサコアと
励磁コイル基板と第一及び第二の磁界検出コイル基板と
を積層した磁気センサ本体に、励磁コイルを一定周波数
の信号で励磁させる駆動回路と上記磁気センサ本体から
のセンサ出力を検出する回路とが内蔵されたカスタムＩ
Ｃを、ベースにフリップチップまたはボンディングによ
ってマウントして成る駆動・検出回路基板を、ビルドア
ップによりさらに積層させるようにすることにより、小
型化により一層貢献できる。駆動回路は、励磁コイルの
駆動を制御する励磁回路とシーケンサ回路とを備える。
また、センサ出力検出回路は、前記磁気センサ本体から
のＸ軸方向磁界出力とＹ軸方向磁界出力を電圧値に変換
してこれを積分する積分回路と、積分回路からの出力信
号を増幅して演算装置に入力する増幅回路とを備える、This thin-film laminated magnetic sensor comprises a drive circuit for exciting an exciting coil with a signal of a constant frequency in a magnetic sensor body in which a sensor core, an exciting coil substrate, and first and second magnetic field detecting coil substrates are laminated. Custom I with built-in circuit for detecting sensor output from magnetic sensor body
By further laminating a drive / detection circuit board formed by mounting C on the base by flip chip or bonding, it is possible to further contribute to miniaturization. The drive circuit includes an excitation circuit that controls driving of the excitation coil and a sequencer circuit.
The sensor output detection circuit converts an X-axis direction magnetic field output and a Y-axis direction magnetic field output from the magnetic sensor main body into a voltage value and integrates the voltage value, and amplifies an output signal from the integration circuit. An amplification circuit for inputting to the arithmetic unit,
【００１５】[0015]
【実施の最良の形態】本発明を図示した実施例に基づい
て詳説する。図１は本発明の一実施例に係る磁気センサ
の製造工程を示すブロック図、図２はセンサ本体部の概
略構成を示す分解斜視図、図３はセンサ本体部への駆動
・検出回路基板部の組み付け状態を示す概略説明図、図
４は磁気センサ本体部と駆動・検出回路との関係を示す
ブロック図である。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail with reference to the illustrated embodiments. FIG. 1 is a block diagram showing a manufacturing process of a magnetic sensor according to one embodiment of the present invention, FIG. 2 is an exploded perspective view showing a schematic configuration of a sensor main body, and FIG. FIG. 4 is a block diagram showing the relationship between the magnetic sensor body and the drive / detection circuit.
【００１６】図中符号１はセンサ本体部で、センサコア
２と励磁コイル用基板３と第一及び第二の磁界検出コイ
ル用基板４，５とを備える。センサコア２は、有機質系
シート材の表裏面に、０．２ｍｍ厚以下程度のアモルフ
ァス薄膜を蒸着した２枚のシート材２１，２１から成
る。センサコアシート材２１は、アモルファス薄膜がコ
ーティングされた後、酸化皮膜等の絶縁層を成膜し、イ
オンビームで溝を作り、フォトリソグラフティーとイオ
ンビームエッチングによってリング状にスクライブ加工
することによって形成されたリングコア２２を備える。
センサコア２は、アモルファスが結晶化しない程度の温
度の一次加熱（アニーリング）処理によって、初期キュ
アリングが施され、脱磁されると同時にアモルファスの
組成粒子の方向をある程度そろえてある。キュアリング
は、例えば４００度ｃから４９０度ｃで６０分行われ
る。センサコア２に無機質系シート材を用いる場合に
は、リングコア２２はアモルファスの粉末材料を導電塗
料に約１０対３の重量割合いで混合したものによって、
印刷形成される。In the figure, reference numeral 1 denotes a sensor body, which comprises a sensor core 2, an exciting coil substrate 3, and first and second magnetic field detecting coil substrates 4 and 5. The sensor core 2 is composed of two sheet materials 21 and 21 in which an amorphous thin film having a thickness of about 0.2 mm or less is vapor-deposited on the front and back surfaces of an organic sheet material. The sensor core sheet material 21 is formed by coating an amorphous thin film, forming an insulating layer such as an oxide film, forming a groove with an ion beam, and performing scribing in a ring shape by photolithography and ion beam etching. The ring core 22 is provided.
The sensor core 2 is subjected to initial curing by primary heating (annealing) at a temperature that does not cause crystallization of the amorphous phase, is demagnetized, and at the same time aligns the direction of the amorphous composition particles to some extent. The curing is performed at 400 ° C. to 490 ° C. for 60 minutes, for example. When an inorganic sheet material is used for the sensor core 2, the ring core 22 is formed by mixing an amorphous powder material with a conductive paint at a weight ratio of about 10 to 3,
Print formed.
【００１７】励磁コイル用基板３と磁界検出コイル用基
板６（４，５）は、前記した従来の薄膜積層型磁気セン
サに用いられるものと同じ構造を有する。すなわち、ま
ず、励磁コイル用基板３は、センサコア２を上下から挟
むようにして互いに導通可能に積層される２枚の励磁コ
イル基板３１，３１から成る。各励磁コイル基板３１
は、エポキシ基板の表面に銅箔エッチングによって形成
された励磁コイルパターン３２を有し、周縁部に各励磁
コイルパターン３２を接続する端子用のスルーホール３
３が形成されている。The exciting coil substrate 3 and the magnetic field detecting coil substrate 6 (4, 5) have the same structure as that used in the above-mentioned conventional thin-film laminated magnetic sensor. That is, first, the excitation coil substrate 3 is composed of two excitation coil substrates 31, 31 which are stacked so as to be mutually conductive so as to sandwich the sensor core 2 from above and below. Each excitation coil substrate 31
Has an exciting coil pattern 32 formed by copper foil etching on the surface of an epoxy substrate, and a through hole 3 for a terminal for connecting each exciting coil pattern 32 at a peripheral portion.
3 are formed.
【００１８】磁界検出コイル用基板６は、Ｘ軸方向成分
磁界検出コイル形成用のコイルパターンを有する第一検
出コイル基板４と、Ｙ軸方向成分磁界検出コイル形成用
のコイルパターンを有する第二検出コイル基板５とから
成る。第一検出コイル基板４は、センサコア２を上下か
ら挟むようにして互いに導通可能に積層される２枚のＸ
コイル基板４１，４１から成る。各Ｘコイル基板４１
は、表面にＸコイルパターン４２が形成され、周縁部に
各Ｘコイルパターン４２を接続する端子用のスルーホー
ル４３が形成されている。同様にして、第二検出コイル
基板５は、センサコア２を上下から挟むようにして互い
に導通可能に積層される２枚のＹコイル基板５１，５１
を有する。各Ｙコイル基板５１は、エポキシ基板の表面
にＹ軸方向成分磁界検出コイル用のＹコイルパターン５
２を形成する一方、周縁部に各Ｙコイルパターン５２を
接続する端子用のスルーホール５３を形成してある。こ
れらセンサコア２と磁界検出コイル用基板６と励磁コイ
ル用基板３は、センサコア２を中心に各スルーホールが
一致するようにして順次積重ねられ、プレスされて層状
のセンサ本体部１として形成される。The magnetic field detection coil substrate 6 includes a first detection coil substrate 4 having a coil pattern for forming an X-axis direction component magnetic field detection coil and a second detection coil having a coil pattern for forming a Y-axis direction component magnetic field detection coil. And a coil substrate 5. The first detection coil substrate 4 is composed of two X layers stacked so as to be conductive with each other so as to sandwich the sensor core 2 from above and below.
It is composed of coil substrates 41, 41. Each X coil substrate 41
The X coil pattern 42 is formed on the surface, and a through hole 43 for a terminal connecting each X coil pattern 42 is formed on a peripheral portion. Similarly, the second detection coil substrate 5 is composed of two Y coil substrates 51 and 51 which are stacked so as to be conductive with each other so as to sandwich the sensor core 2 from above and below.
Having. Each Y coil substrate 51 has a Y coil pattern 5 for a Y-axis direction component magnetic field detection coil on the surface of the epoxy substrate.
On the other hand, a through hole 53 for a terminal for connecting each of the Y coil patterns 52 is formed in the peripheral portion. The sensor core 2, the magnetic field detection coil substrate 6, and the excitation coil substrate 3 are sequentially stacked so that the through holes are aligned with the sensor core 2 as a center, and are pressed to form the layered sensor main body 1.
【００１９】一体化されたセンサ本体部１は、センサコ
ア２の部分に磁界をかけながら再キュアリングが施され
る。再キュアリングは、一次キュアリングと同様にアモ
ルファスが結晶化しない程度の温度と時間に設定され
る。具体的な処理条件は、上記した一次キュアリングと
同じで良い。再キュアリングによって、センサ本体部１
は、プレス時の圧力と熱（例えば１９０度ｃ前後）とに
よって低減されたキュアリングの効果が修正されると同
時に、磁化によってリングコア２２の組成粒子の磁極が
ほぼ一定方向に統一される。再キュアリングされたリン
グコア２２は、Ｂ−Ｈ減磁曲線が処理前に比べて立ち上
がり、ヒステリシス損も少ない。透磁率も略５０％程度
向上することが判明している。The integrated sensor body 1 is recured while applying a magnetic field to the sensor core 2. The re-curing is set to such a temperature and time that the amorphous is not crystallized, similarly to the primary curing. Specific processing conditions may be the same as the above-described primary curing. By re-curing, the sensor body 1
The effect of the curing reduced by the pressure and heat (for example, around 190 ° C.) at the time of pressing is corrected, and at the same time, the magnetic poles of the composition particles of the ring core 22 are unified in a substantially constant direction by the magnetization. In the recured ring core 22, the BH demagnetization curve rises as compared to before the processing, and the hysteresis loss is small. It has been found that the magnetic permeability is also improved by about 50%.
【００２０】図中符号７はセンサ本体部１に更に積層一
体化された駆動・検出回路基板である。駆動・検出回路
基板７は、励磁コイルを一定周波数の信号で励磁させる
駆動回路と上記磁気センサ本体からのセンサ出力を検出
する回路とが内蔵されたカスタムＩＣ７１を、ベース７
２にフリップチップまたはボンディングによってマウン
トして成る。駆動・検出回路基板７は、図３に示すよう
にセンサ本体部１に形成された電極用のスルーホール１
１に、ビルドアップ電極７３を導通可能に差し込んで接
着することにより、センサ本体部１と積層一体化されて
いる。Reference numeral 7 in the drawing denotes a drive / detection circuit board which is further laminated and integrated with the sensor main body 1. The drive / detection circuit board 7 includes a custom IC 71 having a built-in drive circuit for exciting the exciting coil with a signal of a constant frequency and a circuit for detecting the sensor output from the magnetic sensor main body.
2 mounted by flip chip or bonding. The drive / detection circuit board 7 includes a through hole 1 for an electrode formed in the sensor main body 1 as shown in FIG.
1, the build-up electrode 73 is conductively inserted and bonded to the sensor body 1 so as to be laminated and integrated.
【００２１】駆動回路８は、図４に示すように励磁コイ
ルの駆動を制御する励磁回路８１とシーケンサ回路８２
とを備える。シーケンサ回路８２は、演算装置１０が励
磁回路８１を介してセンサ本体部１の励磁コイルに励磁
電流を流す時間を設定する。本磁気センサを、例えば本
出願人の提案する特願平２０００−１０４６８９号に示
す携帯電話の現在位置表示装置に利用する場合、携帯電
話に搭載されたＣＰＵの能力によって励磁電流を流す時
間が決定される。例えば５００Ｋｈｚの駆動周波数を出
力する場合、シーケンサ回路８２は、励磁コイルに１０
ｍｍＡの電流が約１μsecの時間、流されるよう制御す
る。励磁回路８１は、シーケンサ回路８２とともに励磁
コイルに電流を流す時間と電流値を制御する。電流値と
電流の流される時間は、携帯電話の電池の能力に規制さ
れる。The drive circuit 8 includes an excitation circuit 81 for controlling the driving of the excitation coil and a sequencer circuit 82 as shown in FIG.
And The sequencer circuit 82 sets the time during which the arithmetic unit 10 supplies an exciting current to the exciting coil of the sensor body 1 via the exciting circuit 81. When the present magnetic sensor is used, for example, in the present position display device of a mobile phone disclosed in Japanese Patent Application No. 2000-104689 proposed by the present applicant, the time required for the excitation current to flow is determined by the capability of the CPU mounted on the mobile phone. Is done. For example, when outputting a drive frequency of 500 Khz, the sequencer circuit 82
Control is performed so that a current of mmA flows for a time of about 1 μsec. The excitation circuit 81 together with the sequencer circuit 82 controls the time and the current value of the current flowing through the excitation coil. The current value and the time during which the current flows are regulated by the battery capacity of the mobile phone.
【００２２】駆動回路８によって励磁コイルを一定周波
数の信号で励振された磁気センサ本体部１は、外部磁界
が存在しない場合、リングコア２２が飽和磁化されてい
るために第一と第二の磁界検出コイルに電流は流れな
い。外部磁界が現れると、磁束に不均衡を生じ、励磁コ
イルに電流が流れ、Ｘ軸方向およびＹ軸方向の磁気信号
が得られる。リングコア２２は、組成粒子の磁極の方向
が統一されているために、交流磁界による影響を受けに
くく、地球磁場による直流磁界により強く反応して所定
の磁気信号を出力する。When the excitation coil is excited by the drive circuit 8 with a signal of a fixed frequency, the magnetic sensor body 1 detects the first and second magnetic fields when the external magnetic field does not exist because the ring core 22 is saturated. No current flows through the coil. When an external magnetic field appears, an imbalance occurs in the magnetic flux, a current flows through the exciting coil, and magnetic signals in the X-axis direction and the Y-axis direction are obtained. Since the direction of the magnetic poles of the composition particles is unified, the ring core 22 is hardly affected by the AC magnetic field, and reacts more strongly with the DC magnetic field due to the earth magnetic field to output a predetermined magnetic signal.
【００２３】センサ出力検出回路９は、センサ本体部１
からＸ軸方向磁界出力とＹ軸方向磁界出力を電圧値に変
換してこれを積分する積分回路９１と、積分回路９１か
らの出力信号を増幅して演算装置に入力する増幅回路９
２とを備える。積分回路９１は、磁気センサ本体部から
の磁気信号を電圧信号に変換する回路と、磁気信号が数
μsecレベルの極めて短時間に発生するものであるため
にこれを取り込むためのスイッチング回路と、変換され
た電圧値（数１０μＶ）を積分する回路とを含む。増幅
回路９２は、積分回路による増幅（例えば約１０００倍
程度）ではＣＰＵにＡ／Ｄ値として入力するのにいまだ
十分でないことから、さらにその電圧値を約１００倍程
度増幅する。したがって、上記した駆動回路８によって
駆動された磁気センサ本体部１は、地球磁場によるＸ軸
方向磁界とＹ軸方向磁界を検出し、その磁気信号をセン
サ出力検出回路９に出力する。センサ出力検出回路９
は、この磁気信号を積分および増幅して所定の演算装置
のＡ／Ｄに直接入力し、演算装置によって種々の処理が
行われる。The sensor output detection circuit 9 includes the sensor body 1
An integrating circuit 91 for converting the X-axis magnetic field output and the Y-axis magnetic field output into voltage values and integrating them, and an amplifying circuit 9 for amplifying an output signal from the integrating circuit 91 and inputting it to the arithmetic unit.
2 is provided. The integrating circuit 91 includes a circuit for converting a magnetic signal from the magnetic sensor main body into a voltage signal, a switching circuit for capturing the magnetic signal generated in a very short time of the order of several μsec, and a conversion circuit. And a circuit for integrating the obtained voltage value (several tens of μV). The amplification circuit 92 further amplifies the voltage value by about 100 times because amplification by the integration circuit (for example, about 1000 times) is not yet enough to be input to the CPU as an A / D value. Therefore, the magnetic sensor main unit 1 driven by the drive circuit 8 detects the X-axis direction magnetic field and the Y-axis direction magnetic field due to the earth magnetic field, and outputs the magnetic signals to the sensor output detection circuit 9. Sensor output detection circuit 9
Integrates and amplifies the magnetic signal and directly inputs the signal to an A / D of a predetermined arithmetic device, and various processes are performed by the arithmetic device.
【００２４】[0024]
【発明の効果】本発明によれば、シート状のセンサコア
と励磁コイル基板と第一及び第二の磁界検出コイル基板
とを積層した薄膜積層型磁気センサにあって、センサコ
アに設けられるリングコアを、アモルファス磁性材料に
よって形成し、これに結晶化しない程度の熱を加えるキ
ュアリングによって、アモルファス磁性材料の組成粒子
の磁極の方向を統一させるようにしてあるので、磁束密
度が増加し、高透磁性が維持されているにもかかわら
ず、磁界方向特性に優れ、外部磁界流の直流磁界に反応
しやすく、交流磁界に反応しにくい磁性体となり、動磁
界に影響されることなく、地球磁場による静磁界を正確
に検出することができる。また、本発明によれば、セン
サコアと励磁コイル基板と第一及び第二の磁界検出コイ
ル基板とを積層した磁気センサ本体に、駆動回路と磁気
センサ本体からのセンサ出力を検出する回路とが内蔵さ
れたカスタムＩＣをベースにマウントして成る駆動・検
出回路基板を、ビルドアップによりさらに積層させるよ
うにしたので、この種の磁気センサの小型化と軽量化に
より貢献できる。According to the present invention, there is provided a thin-film laminated magnetic sensor in which a sheet-shaped sensor core, an exciting coil substrate, and first and second magnetic field detecting coil substrates are laminated, wherein a ring core provided on the sensor core comprises: It is made of an amorphous magnetic material, and the direction of the magnetic pole of the constituent particles of the amorphous magnetic material is unified by curing that applies heat to the extent that it does not crystallize, so the magnetic flux density increases and the high magnetic permeability increases. Despite being maintained, it has excellent magnetic field direction characteristics, easily reacts to the DC magnetic field of the external magnetic field flow, and is hard to respond to the AC magnetic field. Can be accurately detected. Further, according to the present invention, a drive circuit and a circuit for detecting a sensor output from the magnetic sensor main body are built in the magnetic sensor main body in which the sensor core, the exciting coil substrate, and the first and second magnetic field detecting coil substrates are laminated. The drive / detection circuit board mounted on the base of the custom IC is further laminated by build-up, so that it is possible to contribute to the reduction in size and weight of this type of magnetic sensor.
【図１】本発明の一実施例に係る磁気センサの製造工程
を示すブロック図。FIG. 1 is a block diagram showing a manufacturing process of a magnetic sensor according to one embodiment of the present invention.
【図２】図１のセンサ本体部の概略構成を示す分解斜視
図。FIG. 2 is an exploded perspective view showing a schematic configuration of a sensor main body in FIG.
【図３】センサ本体部への駆動・検出回路基板部の組み
付け状態を示す概略説明図。FIG. 3 is a schematic explanatory view showing an assembled state of a drive / detection circuit board to a sensor main body.
【図４】本磁気センサの磁気センサ本体部と駆動・検出
回路との関係を示すブロック図。FIG. 4 is a block diagram showing a relationship between a magnetic sensor main body of the present magnetic sensor and a drive / detection circuit.
【図５】従来の薄膜積層型磁気センサの概略構成を示す
分解斜視図。FIG. 5 is an exploded perspective view showing a schematic configuration of a conventional thin-film magnetic sensor.
１ センサ本体部 ２ センサコア ２２ リングコア ３ 励磁コイル用基板 ４ Ｘ軸方向磁界検出コイル基板 ５ Ｙ軸方向磁界検出コイル基板 ６ 磁界検出用コイル基板 ７ 駆動・検出回路基板 ８ 駆動回路 ９ センサ出力検出回路 DESCRIPTION OF SYMBOLS 1 Sensor main body part 2 Sensor core 22 Ring core 3 Excitation coil board 4 X-axis direction magnetic field detection coil board 5 Y-axis direction magnetic field detection coil board 6 Magnetic field detection coil board 7 Drive / detection circuit board 8 Drive circuit 9 Sensor output detection circuit
Claims (9)
用の環状コイルパターンを有する励磁コイル基板を導通
可能に積層し、励磁コイル基板の外面に、Ｘ軸方向磁界
を検出するコイルパターンを有する第一の磁界検出コイ
ル基板とＹ軸方向磁界を検出するコイルパターンを有す
る第二の磁界検出コイル基板とを導通可能に積層した薄
膜積層型磁気センサにおいて、 上記センサコアは、アモルファス磁性材料によって形成
されたリングコアを有し、このリングコアに結晶化しな
い程度の熱を加えるキュアリングを施すことによって、
アモルファス磁性材料の組成粒子の磁極の方向をそろえ
るようにしてある、 薄膜積層型磁気センサ。An exciting coil substrate having an annular coil pattern for excitation is conductively laminated on both sides of a sheet-shaped sensor core, and the outer surface of the exciting coil substrate has a coil pattern for detecting a magnetic field in the X-axis direction. In a thin-film laminated magnetic sensor in which a first magnetic field detecting coil substrate and a second magnetic field detecting coil substrate having a coil pattern for detecting a magnetic field in a Y-axis direction are laminated in a conductive manner, the sensor core is formed of an amorphous magnetic material By having a ring core that has been cured by applying heat to such an extent that it does not crystallize,
A thin-film laminated magnetic sensor in which the directions of the magnetic poles of the constituent particles of an amorphous magnetic material are aligned.
用の環状コイルパターンを有する励磁コイル基板を導通
可能に積層し、励磁コイル基板の外面に、Ｘ軸方向磁界
を検出するコイルパターンを有する第一の磁界検出コイ
ル基板とＹ軸方向磁界を検出するコイルパターンを有す
る第二の磁界検出コイル基板とを導通可能に積層した薄
膜積層型磁気センサにおいて、 上記センサコアは、アモルファス磁性材料によって形成
されたリングコアを有し、このリングコアに結晶化しな
い程度の熱を加えるキュアリングを施すことによって、
アモルファス磁性材料の組成粒子の磁極の方向をそろえ
るようにしてあり、 センサコアと励磁コイル基板と第一及び第二の磁界検出
コイル基板とを積層した磁気センサ本体に、励磁コイル
を一定周波数の信号で励磁させる駆動回路と上記磁気セ
ンサ本体からのセンサ出力を検出する回路とが内蔵され
たカスタムＩＣをベースにマウントして成る駆動・検出
回路基板を、ビルドアップによりさらに積層させた、 薄膜積層型磁気センサ。2. An excitation coil substrate having an annular coil pattern for excitation is laminated on both sides of a sheet-shaped sensor core in a conductive manner, and an outer surface of the excitation coil substrate has a coil pattern for detecting a magnetic field in the X-axis direction. In a thin-film laminated magnetic sensor in which a first magnetic field detecting coil substrate and a second magnetic field detecting coil substrate having a coil pattern for detecting a magnetic field in a Y-axis direction are laminated in a conductive manner, the sensor core is formed of an amorphous magnetic material By having a ring core that has been cured by applying heat to such an extent that it does not crystallize,
The direction of the magnetic poles of the constituent particles of the amorphous magnetic material is aligned, and the excitation coil is applied with a signal of a constant frequency to the magnetic sensor body in which the sensor core, the excitation coil substrate, and the first and second magnetic field detection coil substrates are laminated. A thin-film laminated magnetic device in which a drive / detection circuit board mounted on a base of a custom IC having a built-in drive circuit for exciting and a circuit for detecting a sensor output from the magnetic sensor main body is further laminated by build-up. Sensor.
が上下導通可能に形成された有機質系シート材の表裏面
にアモルファス薄膜をコーティングして成り、 このアモルファス薄膜をコーティングしたシート材の表
裏面に、アモルファス薄膜をリング状にスクライブした
リングコアが形成されている、 請求項１もしくは２記載の薄膜積層型磁気センサ。3. The sensor core is formed by coating an amorphous thin film on the front and back surfaces of an organic sheet material in which a predetermined coil pattern is formed so as to be vertically conductive. The thin-film laminated magnetic sensor according to claim 1, wherein a ring core formed by scribing an amorphous thin film in a ring shape is formed.
が上下導通可能に導電塗料によって印刷形成された無機
質系のシート材の表裏面に、粉末状のアモルファス磁性
材料を混合した導電性塗料によってリングコアを印刷し
て成る、 請求項１もしくは２記載の薄膜積層型磁気センサ。4. The sensor core according to claim 1, wherein a ring core is formed of a conductive coating material mixed with a powdery amorphous magnetic material on the front and back surfaces of an inorganic sheet material formed by printing a predetermined coil pattern with a conductive coating material so as to be vertically conductive. The thin-film laminated magnetic sensor according to claim 1, which is printed.
性塗料とが、１０：３の重量比で混合されている、 請求項４記載の薄膜積層型磁気センサ。5. The thin-film laminated magnetic sensor according to claim 4, wherein the powdery amorphous magnetic material and the conductive paint are mixed in a weight ratio of 10: 3.
する励磁回路とシーケンサ回路とを備える、 請求項２記載の薄膜積層型磁気センサ。6. The thin-film laminated magnetic sensor according to claim 2, wherein the drive circuit includes an excitation circuit for controlling driving of an excitation coil and a sequencer circuit.
サ本体からのＸ軸方向磁界出力とＹ軸方向磁界出力を電
圧値に変換してこれを積分する積分回路と、積分回路か
らの出力信号を増幅して演算装置に入力する増幅回路と
を備える、 請求項２記載の薄膜積層型磁気センサ。7. An integrated circuit for converting an X-axis direction magnetic field output and a Y-axis direction magnetic field output from the magnetic sensor main body into a voltage value and integrating the voltage value, and an output signal from the integration circuit. The thin-film laminated magnetic sensor according to claim 2, further comprising: an amplification circuit that amplifies the signal and inputs the amplified signal to an arithmetic device.
リングコアを備えるシート状のセンサコアを、アモルフ
ァスが結晶化しない程度の温度で加熱処理する一次キュ
アリングを行い、 キュアリングされたセンサコアの両面に、環状コイルパ
ターンを有する励磁コイル基板を導通可能に積層し、 励磁コイル基板の外面に、Ｘ軸方向磁界を検出するコイ
ルパターンを有する第一の磁界検出コイル基板とＹ軸方
向磁界を検出するコイルパターンを有する第二の磁界検
出コイル基板とをそれぞれ導通可能に積層し、 これらセンサコアと励磁コイル基板と第一及び第二磁界
コイル検出基板をプレスして一体化した後、 センサコアに磁界をかけながらアモルファスが結晶化し
ない程度の温度を加熱処理する二次キュアリングを行っ
て、リングコアの組成粒子の磁極が略一定方向になるよ
うにした、 ことを特徴とする薄膜積層型磁気センサの製造法。8. A sheet-shaped sensor core provided with a ring core formed of an amorphous magnetic material is subjected to primary curing at a temperature at which amorphous is not crystallized, and annular coils are provided on both surfaces of the cured sensor core. An excitation coil substrate having a pattern is laminated in a conductive manner, and a first magnetic field detection coil substrate having a coil pattern for detecting a magnetic field in the X-axis direction and a coil pattern for detecting a magnetic field in the Y-axis direction are provided on the outer surface of the excitation coil substrate. After laminating the second magnetic field detecting coil substrates so as to be conductive, respectively, and pressing and integrating the sensor core, the exciting coil substrate and the first and second magnetic field coil detecting substrates, the amorphous crystal is formed while applying a magnetic field to the sensor core. Perform secondary curing to heat to a temperature that does not cause A method of manufacturing a thin-film laminated magnetic sensor, wherein the magnetic poles of the formed particles are oriented in a substantially constant direction.
リングコアを備えるシート状のセンサコアを、アモルフ
ァスが結晶化しない程度の温度で加熱処理する一次キュ
アリングを行い、 キュアリングされたセンサコアの両面に、環状コイルパ
ターンを有する励磁コイル基板を導通可能に積層し、 励磁コイル基板の外面に、Ｘ軸方向磁界を検出するコイ
ルパターンを有する第一の磁界検出コイル基板とＹ軸方
向磁界を検出するコイルパターンを有する第二の磁界検
出コイル基板とをそれぞれ導通可能に積層し、 これらセンサコアと励磁コイル基板と第一及び第二磁界
コイル検出基板をプレスして一体化した後、 センサコアに磁界をかけながらアモルファスが結晶化し
ない程度の温度で加熱処理する二次キュアリングを行っ
て、リングコアの組成粒子の磁極が略一定方向になるよ
うにし、 センサコアと励磁コイル基板と第一及び第二磁界コイル
検出基板が一体化され、かつ二次キュアリングされた磁
気センサ本体に、励磁コイルを一定周波数の信号で励振
させる駆動回路と磁気センサ本体からのセンサ出力を検
出する回路とが内蔵されたカスタムＩＣをベースにマウ
ントして成る駆動・検出回路基板を、ビルドアップ方式
によりさらに積層した、 ことを特徴とする薄型積層型磁気センサの製造法。9. A sheet-shaped sensor core having a ring core formed of an amorphous magnetic material is subjected to primary curing in which heat treatment is performed at a temperature at which amorphous is not crystallized. An excitation coil substrate having a pattern is laminated in a conductive manner, and a first magnetic field detection coil substrate having a coil pattern for detecting a magnetic field in the X-axis direction and a coil pattern for detecting a magnetic field in the Y-axis direction are provided on the outer surface of the excitation coil substrate. After laminating the second magnetic field detecting coil substrates so as to be conductive, respectively, and pressing and integrating the sensor core, the exciting coil substrate and the first and second magnetic field coil detecting substrates, the amorphous crystal is formed while applying a magnetic field to the sensor core. Perform secondary curing with heat treatment at a temperature that does not cause The magnetic poles of the formed particles are oriented in a substantially constant direction, and the sensor coil, the excitation coil substrate, and the first and second magnetic field coil detection substrates are integrated, and the excitation coil is fixed at a constant frequency in the magnetic sensor body that is secondarily cured. A drive / detection circuit board mounted on a base based on a custom IC having a built-in drive circuit for exciting with the signal of the above and a circuit for detecting the sensor output from the magnetic sensor main body is further laminated by a build-up method. Characteristic method for manufacturing a thin laminated magnetic sensor.
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|---|---|---|---|
| JP2000225229A JP2002043654A (en) | 2000-07-26 | 2000-07-26 | Multilayer thin film magnetic sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000225229A JP2002043654A (en) | 2000-07-26 | 2000-07-26 | Multilayer thin film magnetic sensor |
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| Publication Number | Publication Date |
|---|---|
| JP2002043654A true JP2002043654A (en) | 2002-02-08 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000225229A Pending JP2002043654A (en) | 2000-07-26 | 2000-07-26 | Multilayer thin film magnetic sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100467839B1 (en) * | 2002-03-09 | 2005-01-24 | 삼성전기주식회사 | A weak-magnetic field sensor using printed circuit board and its making method |
| KR100619369B1 (en) | 2004-07-24 | 2006-09-08 | 삼성전기주식회사 | Printed circuit board having weak-magnetic field sensor and method for manufacturing the same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000117399A (en) * | 1998-10-08 | 2000-04-25 | Alps Electric Co Ltd | Production of amorphous soft magnetic alloy strip and producing apparatus of amorphous soft magnetic alloy strip and amorphous soft magnetic alloy strip and amorphous soft magnetic alloy member |
-
2000
- 2000-07-26 JP JP2000225229A patent/JP2002043654A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000117399A (en) * | 1998-10-08 | 2000-04-25 | Alps Electric Co Ltd | Production of amorphous soft magnetic alloy strip and producing apparatus of amorphous soft magnetic alloy strip and amorphous soft magnetic alloy strip and amorphous soft magnetic alloy member |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100467839B1 (en) * | 2002-03-09 | 2005-01-24 | 삼성전기주식회사 | A weak-magnetic field sensor using printed circuit board and its making method |
| KR100619369B1 (en) | 2004-07-24 | 2006-09-08 | 삼성전기주식회사 | Printed circuit board having weak-magnetic field sensor and method for manufacturing the same |
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