JP2002042663A - Ac drive plasma display device and method of manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an AC drive plasma display device having a structure capable of increasing a charge storage amount to increase the brightness. SOLUTION: This AC drive plasma display device comprises a first panel 10 having discharge sustaining electrodes 12 formed on a first substrate 11 and dielectric layers 14 and 15 formed on discharge sustaining electrodes 12 and a second panel 20 connected to each other at the outer peripheral part thereof. The thicknesses of the dielectric layers 14 and 15 are 1.5×10-5 m or less.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an AC-driven plasma display device characterized by a dielectric layer and a method of manufacturing the same.

[0002]

2. Description of the Related Art Various types of flat-panel (flat-panel) display devices have been studied as image display devices to replace the current mainstream cathode ray tube (CRT). Examples of such a flat display device include a liquid crystal display device (LCD), an electroluminescence display device (ELD), and a plasma display device (PDP: plasma display). Above all, the plasma display device has advantages such as relatively easy enlargement of the screen and wide viewing angle, excellent resistance to environmental factors such as temperature, magnetism and vibration, and long life. It is expected to be applied not only to home wall-mounted TVs but also to large public information terminals.

[0003] In a plasma display device, a voltage is applied to a discharge cell in which a discharge gas composed of a rare gas is sealed in a discharge space, and a vacuum ultraviolet ray generated based on a glow discharge in the discharge gas emits phosphors in the discharge cell. A display device that emits light by exciting a layer. That is, the individual discharge cells are driven by a principle similar to that of a fluorescent lamp, and the discharge cells are usually assembled in the order of several hundred thousand to form one display screen. The plasma display device has a direct current drive type (DC type) and an alternating current drive type (AC type) depending on a method of applying a voltage to a discharge cell.
Type), and each has its advantages and disadvantages. The AC-type plasma display device is suitable for high definition because partition walls which serve to partition individual discharge cells in a display screen may be formed in a stripe shape, for example. In addition, since the surface of the electrode for discharging is covered with the dielectric layer, the electrode is hardly worn and has a long service life.

FIG. 1 is a schematic exploded perspective view of a part of a typical configuration example of an AC type plasma display device. This A
The C-type plasma display device belongs to a so-called three-electrode type, and discharge occurs between a pair of discharge sustaining electrodes 12. The AC plasma display device shown in FIG. 1 includes a first panel 10 corresponding to a front panel and a second panel 20 corresponding to a rear panel joined at their outer peripheral portions. The light emission of the phosphor layer 25 on the second panel 20 is observed, for example, through the first panel 10.

[0005] The first panel 10 comprises a transparent first substrate 11.
And a plurality of pairs of discharge sustaining electrodes 12 provided in a stripe shape on the first substrate 11 and made of a transparent conductive material.
And provided on the sustain electrode 12 to reduce the impedance of the sustain electrode 12,
A bus electrode 13 made of a material having a lower electric resistivity than
It is composed of a dielectric layer formed on the first substrate 11 including the bus electrodes 13 and the sustain electrodes 12. This dielectric layer is made of a first dielectric film 14 made of a dielectric material and formed on a first substrate 11 including a bus electrode 13 and a sustain electrode 12, and MgO formed thereon. It has a two-layer structure with a second dielectric film 15 (also called a protective film 15).

On the other hand, the second panel 20 includes a second substrate 21
A plurality of address electrodes (also referred to as data electrodes) 22 provided in a stripe on the second substrate 21; and a dielectric material layer 23 formed on the second substrate 21 including on the address electrodes 22. An insulating partition wall 24 extending in parallel with the address electrode 22 in a region between the adjacent address electrodes 22 on the dielectric material layer 23, and extending from the dielectric material layer 23 to the side wall surface of the partition wall 24. Phosphor layer 2 provided
And 5. The phosphor layer 25 includes a red phosphor layer 25R, a green phosphor layer 25G, and a blue phosphor layer 2 when performing color display in an AC plasma display device.
5B, and the phosphor layer 25 of each of these colors.
R, 25G, and 25B are provided in a predetermined order. FIG. 1 is a partially exploded perspective view in which the top of the partition wall 24 on the second panel 20 side is actually the protective film 1 on the first panel 10 side.
5 abuts. A region where the pair of discharge sustaining electrodes 12 and the address electrode 22 located between the two partition walls 24 overlap corresponds to a discharge cell. And the adjacent partition 2
A discharge gas is sealed in a discharge space surrounded by the phosphor layer 4, the phosphor layer 25, and the protective film 15. First panel 1
0 and the second panel 20 are joined at their outer peripheral portions using frit glass.

The direction in which the projected image of the sustain electrode 12 extends is orthogonal to the direction in which the projected image of the address electrode 22 extends. The pair of the sustain electrode 12 and the phosphor layers 25R, 25G, An area where one set of 25B overlaps corresponds to one pixel (one pixel). Since glow discharge occurs between the pair of sustain electrodes 12, this type of A
The C-type plasma display device is called “surface discharge type”. For example, immediately before a voltage is applied between the pair of discharge sustaining electrodes 12, for example, by applying a pulse voltage lower than the discharge starting voltage of the discharge cell to the address electrode 22, wall charges are accumulated in the discharge cell ( Selection of a discharge cell for display), and the apparent discharge start voltage decreases. Next, the discharge started between the pair of discharge sustaining electrodes 12 can be maintained at a voltage lower than the discharge starting voltage. In the discharge cell,
The phosphor layer excited by the irradiation of vacuum ultraviolet rays generated based on the glow discharge in the discharge gas exhibits a specific emission color according to the type of the phosphor material. In addition, vacuum ultraviolet rays having a wavelength corresponding to the type of the sealed discharge gas are generated.

Usually, the discharge gas sealed in the discharge space is an inert gas such as a neon (Ne) gas, a helium (He) gas, an argon (Ar) gas, or a xenon (Xe) gas.
Gas 4 is composed of a volume% of mixed gas mixture, the total pressure of the mixed gas ^{6 × 10 4 Pa~7 × 10 4} Pa approximately, xenon (Xe) partial pressure 3 × 10 ³ Pa about Gas It is. The distance between the pair of sustain electrodes 12 is 1
It is about 00 μm.

[0009]

The low brightness of the AC type plasma display device currently commercialized is a problem. For example, the luminance of a 42-inch AC type plasma display device is at most about 500 cd / m ² . Moreover, in actually commercializing the AC type plasma display device, for example, it is necessary to attach a sheet or film to the outer surface of the first panel 10 for shielding electromagnetic waves or preventing reflection of external light. The actual display light at the point becomes considerably dark.

The first panel 10 in the AC type plasma display device is provided with a dielectric layer composed of a first dielectric film 14 made of a dielectric material such as a low melting point glass paste. The first dielectric film 14 is usually formed by a screen printing method. In driving the AC type plasma display device, electric charges are accumulated in the first dielectric film 14, and the accumulated electric charges are released by applying a reverse voltage to the discharge sustaining electrode to generate plasma. Brightness depends on the amount of vacuum ultraviolet light generated from this plasma. Therefore, it is necessary to accumulate as much charge as possible in the first dielectric film 14 in order to improve the luminance.

Accordingly, it is an object of the present invention to provide an AC-driven plasma display device having a structure capable of increasing the amount of charge stored in order to improve luminance and a method of manufacturing the same.

[0012]

According to a first aspect of the present invention, there is provided an AC-driven plasma display device, comprising: a discharge sustaining electrode formed on a first substrate; An AC-driven plasma display device comprising: a first panel having a dielectric layer formed on a substrate and a sustain electrode; and a second panel joined at an outer peripheral portion thereof. The thickness of the body layer is not more than 1.5 × 10 ⁻⁵ m, preferably not more than 1.0 × 10 ⁻⁵ m.

In the AC-driven plasma display device according to the first aspect of the present invention, the lower limit of the thickness of the dielectric layer is, for example, 5 × 10 ⁻⁷ m, preferably 1 × 10 ⁻⁶ m. It is desirable. The dielectric layer may have a single-layer structure or a multilayer structure.

In the AC-driven plasma display device according to the first embodiment of the present invention, the thickness of the dielectric layer in the conventional AC-driven plasma display device (usually 2.5 × 10 ^-5).
m), a sufficiently thin dielectric layer is formed, so that the capacitance of the dielectric layer can be increased.
As a result, the drive voltage can be reduced, and
Since the charge storage amount can be increased, it is possible to improve the luminance and reduce the driving power of the AC-driven plasma display device.

The second object of the present invention for achieving the above object.
An AC-driven plasma display device according to an aspect of the present invention provides a first panel including: a sustain electrode formed on a first substrate; and a dielectric layer formed on the first substrate and the sustain electrode. And an AC-driven plasma display device in which the second panel is joined at the outer periphery thereof, wherein the dielectric layer comprises at least an aluminum oxide layer.

In the AC-driven plasma display device according to the second aspect of the present invention, the dielectric layer is formed on a first dielectric film composed of an aluminum oxide layer and on the first dielectric film. A two-layer structure with the second dielectric film, or a single-layer structure of an aluminum oxide layer. As a material constituting the second dielectric film, magnesium oxide (MgO), magnesium fluoride (MgO)
F ₂ ) and calcium fluoride (CaF ₂ ) can be exemplified. Among them, magnesium oxide has a high secondary electron emission ratio, a low sputtering rate, and a low light transmittance at the emission wavelength of the phosphor layer. It is a suitable material having characteristics such as high and low discharge starting voltage. Note that the second dielectric film may have a laminated film structure made of at least two kinds of materials selected from the group consisting of these materials.
The second dielectric film in various AC-driven plasma display devices of the present invention described below can also be made of the above-mentioned materials.

According to the third aspect of the present invention, there is provided the above-mentioned object.
An AC-driven plasma display device according to an aspect of the present invention provides a first panel including: a sustain electrode formed on a first substrate; and a dielectric layer formed on the first substrate and the sustain electrode. And an AC-driven plasma display device in which the second panel is joined at the outer periphery thereof, wherein the dielectric layer has at least a laminated structure of an aluminum oxide layer and a silicon oxide layer. Features.

In the AC-driven plasma display device according to the third aspect of the present invention, an aluminum oxide layer and a silicon oxide layer may be stacked in this order from the bottom, or a silicon oxide layer and an aluminum oxide layer may be stacked in that order. They may be stacked. A plurality of aluminum oxide layers and silicon oxide layers may be alternately stacked. In this case, the number of layers may be an even number or an odd number. Further, the dielectric layer includes a first dielectric film having a laminated structure of an aluminum oxide layer and a silicon oxide layer, and a second dielectric film formed on the first dielectric film. May be used. As described above, by forming the dielectric layer from the laminated structure of the aluminum oxide layer and the silicon oxide layer, the stress in the dielectric layer can be reduced, and the generation of cracks in the dielectric layer can be prevented.

The fourth object of the present invention to achieve the above object.
An AC-driven plasma display device according to an aspect of the present invention provides a first panel including: a sustain electrode formed on a first substrate; and a dielectric layer formed on the first substrate and the sustain electrode. And an AC-driven plasma display device in which the second panel is joined at the outer periphery thereof, wherein the dielectric layer is at least composed of a silicon oxide layer.

In an AC-driven plasma display device according to a fourth aspect of the present invention, a first dielectric film composed of a silicon oxide layer and a second dielectric film formed on the first dielectric film are provided. And a two-layer structure with the above dielectric film.

According to the fifth aspect of the present invention, there is provided the above-mentioned object.
An AC-driven plasma display device according to an aspect of the present invention provides a first panel including: a sustain electrode formed on a first substrate; and a dielectric layer formed on the first substrate and the sustain electrode. And an AC-driven plasma display device in which the second panel is joined at the outer periphery thereof, wherein the dielectric layer is at least a diamond-like carbon layer, a boron nitride (boron nitride) layer, or And a chromium (III) oxide layer.

In an AC-driven plasma display device according to a fifth aspect of the present invention, a first dielectric film composed of a diamond-like carbon layer, a boron nitride layer, or a chromium (III) oxide layer; It may have a two-layer structure with a second dielectric film formed on the first dielectric film.

The sixth object of the present invention to achieve the above object.
An AC-driven plasma display device according to an aspect of the present invention provides a first panel including: a sustain electrode formed on a first substrate; and a dielectric layer formed on the first substrate and the sustain electrode. And an AC-driven plasma display device in which the second panel is joined at the outer periphery thereof, wherein the dielectric layer comprises at least a diamond-like carbon layer, a boron nitride layer, or a chromium oxide (III) ) Layer and a laminated structure of a silicon oxide layer or an aluminum oxide layer.

The structure of the dielectric layer in the AC-driven plasma display device according to the sixth aspect of the present invention includes a double-layered structure of an “A” layer and a “B” layer, a “A” layer, and a “B” layer,
A three-layer structure of an “A” layer, an “A” layer, a “B” layer, an “A” layer,
There can be mentioned a multilayer structure of “B” layers. Here, when the “A” layer is a diamond-like carbon layer, a boron nitride layer, or a chromium (III) oxide layer, the “B” layer is a silicon oxide layer, an aluminum oxide layer, or a silicon oxide layer. It is a laminated structure of an aluminum layer. In this case, when there are two or more “A” layers, the layers constituting each “A” layer may be the same type or different types of layers. In the case described above, the layers constituting each “B” layer may be the same type of layers or different types of layers. Also, the “A” layer is
In the case of a silicon oxide layer, an aluminum oxide layer, or a stacked structure of a silicon oxide layer and an aluminum oxide layer, the “B” layer is a diamond-like carbon layer, a boron nitride layer, or a chromium (III) oxide layer.
In this case, when there are two or more “A” layers, the layers constituting each “A” layer may be the same type or different types of layers. In the case described above, the layers constituting each “B” layer may be the same type of layers or different types of layers. As described above, by using a silicon oxide layer, an aluminum oxide layer, or a laminated structure of a silicon oxide layer and an aluminum oxide layer as a component of the dielectric layer, stress in the dielectric layer is reduced, and cracks are formed in the dielectric layer. Can be prevented.

In an AC-driven plasma display device according to a sixth aspect of the present invention, a first dielectric film having the above-mentioned laminated structure and a first dielectric film formed on the first dielectric film are provided. A multilayer structure with the second dielectric film can also be used.

The seventh object of the present invention to achieve the above object.
An AC-driven plasma display device according to an aspect of the present invention provides a first panel including: a sustain electrode formed on a first substrate; and a dielectric layer formed on the first substrate and the sustain electrode. And an AC-driven plasma display device in which the second panel is joined at the outer periphery thereof, wherein the dielectric layer is a diamond-like carbon layer, a boron nitride layer,
And at least two layers selected from the group consisting of chromium (III) oxide layers.

As the structure of the dielectric layer in the AC-driven plasma display device according to the seventh aspect of the present invention, a two-layer structure of “A” layer and “B” layer, “A” layer, and “B” layer,
A three-layer structure of a “C” layer, an “A” layer, a “B” layer, a “C” layer,
There can be mentioned a multilayer structure of “D” layers. Here, the diamond-like carbon layer, the boron nitride layer, and the chromium (III) oxide layer are referred to as material layers for convenience.
The materials that make up adjacent material layers (eg, “A” layer and “B” layer) are different. The materials constituting the non-adjacent material layers (eg, the “A” layer and the “C” layer) may be different or the same.

In the AC-driven plasma display device according to the seventh aspect of the present invention, the dielectric layer further comprises a silicon oxide layer, an aluminum oxide layer, or a laminated structure of a silicon oxide layer and an aluminum oxide layer. Configuration. In the above-described example, for example, when a silicon oxide layer is further provided, from the bottom, a silicon oxide layer, “A”
Layer, three-layer structure of “B” layer, “A” layer, silicon oxide layer,
Examples include a three-layer structure of a “B” layer, a three-layer structure of an “A” layer, a “B” layer, and a silicon oxide layer. "A" layer, "B"
Layer, three-layer structure of “C” layer, “A” layer, “B” layer,
In the multi-layer structure of “C” layers, “D” layers,..., At least one silicon oxide layer is inserted between any of the material layers, or the silicon oxide layer is disposed on the lowermost or uppermost layer. I just need. As described above, by using the silicon oxide layer, the aluminum oxide layer, and the laminated structure of the silicon oxide layer and the aluminum oxide layer as components of the dielectric layer, stress in the dielectric layer is reduced, and cracks are formed on the dielectric layer. Can be prevented from occurring.

In an AC-driven plasma display device according to a seventh aspect of the present invention, a first dielectric film having the above-mentioned laminated structure and a second dielectric film formed on the first dielectric film are provided. A multilayer structure with the second dielectric film can also be used.

In the AC-driven plasma display device according to the second to seventh aspects of the present invention, the thickness of the dielectric layer is 1.5 × 10 ⁻⁵ m or less, preferably 1.0 × 10 ⁻⁵ m or less. ^-Five
m or less. The lower limit of the thickness of the dielectric layer is, for example, preferably 5 × 10 ⁻⁷ m, and more preferably 1 × 10 ⁻⁶ m. When the dielectric layer is composed of the first dielectric film and the second dielectric film, the thickness of the dielectric layer is determined by the thickness of the first dielectric film and the thickness of the second dielectric film. Is the total value of the film thicknesses. When the dielectric layer is composed of the first dielectric film and the second dielectric film, the thickness of the second dielectric film is
It is desirable that the ^{thickness be} 1 × 10 ⁻⁶ m to 1 × 10 ⁻⁵ m.
Thus, by defining the thickness of the dielectric layer,
As the capacity of the dielectric layer can be increased, the driving voltage can be reduced, and the charge storage amount can be increased. Therefore, the luminance of the AC driven plasma display device can be improved, and the driving power can be reduced. Can be achieved.

In the AC-driven plasma display device according to the first to seventh aspects of the present invention, the discharge sustaining electrodes formed on the first panel may be configured to operate in pairs. The distance between the pair of discharge sustaining electrodes is essentially arbitrary as long as the required glow discharge occurs at a predetermined discharge voltage, but the distance between the pair of sustaining electrodes is less than 5 × 10 ⁻⁵ m. , Preferably 5.0 × 10
It is desirably less than ^-5 m, more preferably 2 × 10 ^-5 m or less. The distance between the pair of sustain electrodes is 1 ×
In the case of about 10 ⁻⁴ m or less, if the thickness of the dielectric layer is too large, discharge breakdown occurs in the dielectric layer, and it may be difficult to accumulate charges in the dielectric layer. In the AC-driven plasma display device according to the first aspect of the present invention, since the thickness of the dielectric layer is made thinner than before, the present invention also relates to the second to seventh aspects of the present invention. In the AC-driven plasma display device, the thickness of the dielectric layer is made smaller than that of the related art, that is, the thickness of the dielectric layer is set to 1.5 × 1.
When the thickness is 0 ^-5 m or less, preferably 1.0 × 10 ^-5 m or less, the occurrence of such a phenomenon can be surely suppressed.

In the AC-driven plasma display device according to the second to seventh aspects of the present invention, the dielectric layer is made of a material having a relatively large relative dielectric constant (for example, in the sputtering method). The relative permittivity of the aluminum oxide layer formed is 9 to 10), and the capacitance of the dielectric layer can be increased. As a result, the charge storage amount can be increased, so that the luminance of the AC-driven plasma display device can be improved and the driving power can be reduced.

The first object of the present invention for achieving the above object is as follows.
The method for manufacturing an AC-driven plasma display device according to the above aspect, includes a discharge sustain electrode formed on the first substrate, and a dielectric layer formed on the first substrate and the discharge sustain electrode. This is a method for manufacturing an AC-driven plasma display device in which a first panel and a second panel are joined at their outer peripheral portions, and includes various physical vapor deposition methods such as a sputtering method, a vacuum deposition method, and an ion plating method. Phase growth method (PVD
Method) or a chemical vapor deposition method (CVD method), and has a thickness of 1.5 × 10 ⁻⁵ m or less, preferably 1.0 × 1 ⁻⁵ m or less.
Characterized in that it comprises a a 0 ^-5 m or less of the dielectric layer to form the first substrate and the discharge sustain on the electrodes. in this way,
PVD (Physical Vapor Deposition) method and CVD (Che
mical Vapor Deposition)
A thin dielectric layer having a uniform film thickness can be formed.

Here, the PVD method more specifically depends on the material constituting the dielectric layer. (A) Various vacuum evaporation methods such as an electron beam heating method, a resistance heating method, and flash evaporation. b) Plasma deposition method (c) Various sputtering methods such as bipolar sputtering, DC sputtering, DC magnetron sputtering, high frequency sputtering, magnetron sputtering, ion beam sputtering, bias sputtering, etc. (d) DC (direct current ) Method, RF method, multi-cathode method, activation reaction method, electric field vapor deposition method, high-frequency ion plating method, reactive ion plating method, and other various ion plating methods.

The atmospheric pressure CVD method (APCVD) depends on the material constituting the dielectric layer.
Method), low pressure CVD method (LPCVD method), low temperature CVD method,
High temperature CVD method, plasma CVD method (PCVD method, PEC
VD method), ECR plasma CVD method, optical CVD method, MO
A CVD method can be exemplified.

The second object of the present invention for achieving the above object is as follows.
The method for manufacturing an AC-driven plasma display device according to the above aspect, includes a discharge sustain electrode formed on the first substrate, and a dielectric layer formed on the first substrate and the discharge sustain electrode. A method for manufacturing an AC-driven plasma display device comprising a first panel and a second panel joined at their outer peripheral portions, wherein the thickness is 1.5 × 10 ⁻ based on a solution containing a dielectric material. A dielectric layer having a thickness of ⁵ m or less, preferably 1.0 × 10 ⁻⁵ m or less, is formed on the first substrate and the sustain electrode.

In the method for manufacturing an AC-driven plasma display device according to the second aspect of the present invention, a solution containing a dielectric material is applied to the first substrate and the discharge sustaining electrode based on a spin coating method. A configuration including a step can be adopted. Alternatively, a configuration including a step of forming a solution containing a dielectric material (including a paste) on the first substrate and the sustain electrode based on a screen printing method can be adopted. In addition, as a solution containing a dielectric material, a suspension of water glass or glass powder can be exemplified. Although it depends on the material constituting the dielectric layer, the dielectric layer can be obtained by applying a solution containing the dielectric material, followed by drying and firing.

Here, as the water glass, Nos. 1 to 4 specified in Japanese Industrial Standards (JIS) K1408, or equivalents thereof can be used. Nos. 1 to 4 describe sodium oxide (Na ₂₎ which is a constituent of water glass.
O) This is a four-grade grade based on the difference in the number of moles of silicon oxide (SiO ₂ ) per mole (about 2 to 4 moles), each of which has a significantly different viscosity. Therefore, when using water glass, it is preferable to select the optimum grade of water glass having a viscosity suitable for the screen printing method, or to prepare and use water glass equivalent to these grades. . still,
Examples of the solvent in the water glass include organic solvents such as water and alcohol. In order to obtain a viscosity suitable for the screen printing method, it is desirable to add a dispersing aid or a surfactant.

In the AC-driven plasma display device according to various aspects of the present invention, by providing a dielectric layer, it is possible to prevent direct contact between ions and electrons and the discharge sustaining electrode. Can be prevented. The dielectric layer has not only a function of accumulating wall charges but also a function as a resistor for limiting an excessive discharge current and a memory function for maintaining a discharge state.

In the AC-driven plasma display device of the present invention, one of the pair of sustain electrodes may be formed on the first panel and the other may be formed on the second panel. The AC-driven plasma display device having such a configuration is referred to as a two-electrode type for convenience. In this case, the projected image of one of the sustain electrodes extends in the first direction, the projected image of the other sustain electrode extends in the second direction different from the first direction, and the pair of sustain electrodes faces each other. They are arranged facing each other as much as possible. Alternatively, a configuration in which a pair of sustaining electrodes are formed on the first panel and so-called address electrodes are formed on the second panel may be adopted. The AC-driven plasma display device having such a configuration is called a three-electrode type for convenience.
In this case, the projected images of the pair of sustain electrodes extend in the first direction parallel to each other, the projected images of the address electrodes extend in the second direction, and the pair of sustain electrodes and the address electrodes face each other so as to face each other. However, the present invention is not limited to such a configuration. In these cases, the first direction and the second direction are preferably orthogonal to each other from the viewpoint of simplifying the structure of the AC-driven plasma display device.

In the AC-driven plasma display device according to the first to seventh aspects of the present invention, the gap shape between the opposing edges of the pair of discharge sustaining electrodes provided on the first panel is linear. Or a gap shape between the opposing edges of the pair of discharge sustaining electrodes may be a pattern bent or curved in the width direction of the discharge sustaining electrodes, thereby contributing to discharge. The area of the discharge sustaining electrode can be increased.

For example, the AC-driven plasma display device of the present invention will be described below by taking a three-electrode AC-driven plasma display device as an example. If necessary, the "address electrode" in the following description may be replaced with the "other sustaining electrode".

The conductive material constituting the discharge sustaining electrode differs depending on whether the AC-driven plasma display device is a transmission type or a reflection type. In the transmission type AC driven plasma display device, since the light emission of the phosphor layer is observed through the second substrate, it does not matter whether the conductive material constituting the discharge sustaining electrode is transparent or opaque. Second
The address electrodes need to be transparent because they are provided on the substrate. On the other hand, in the reflection type AC driven plasma display device, since the light emission of the phosphor layer is observed through the first substrate, the conductive material forming the address electrode is transparent / transparent.
It does not matter whether the electrode is opaque, but the conductive material constituting the sustain electrode must be transparent. The transparency / opacity described here is based on the light transmittance of the conductive material at an emission wavelength (visible light region) specific to the phosphor material. That is, if it is transparent to the light emitted from the phosphor layer, it can be said that the conductive material forming the sustain electrode and the address electrode is transparent. As opaque conductive materials, Ni, Al,
Au, Ag, Al, Pd / Ag, Cr, Ta, Cu, B
Materials such as a, LaB ₆ , Ca _0.2 La _0.8 CrO ₃ can be used alone or in appropriate combination. As a transparent conductive material, ITO (indium tin oxide) or SnO
₂ can be mentioned. The discharge sustaining electrode and the address electrode can be formed by a sputtering method, an evaporation method, a screen printing method, a sandblast method, a plating method, a lift-off method, or the like.

In addition to the sustain electrode, a bus electrode made of a material having a lower electric resistivity than the sustain electrode is provided in contact with the sustain electrode to reduce the impedance of the entire sustain electrode. It can also be. The bus electrode is typically made of a metal material, for example, A
g, Au, Al, Ni, Cu, Mo, Cr, Cr / Cu
/ Cr laminated film. In a reflective AC drive type plasma display device, the bus electrode made of such a metal material reduces the amount of visible light transmitted from the phosphor layer and passing through the first substrate, thereby lowering the brightness of the display screen. Therefore, it is preferable to form the discharge sustaining electrode as thin as possible within a range where the electric resistance required for the entire discharge sustaining electrode can be obtained. The bus electrode can be formed by a sputtering method, an evaporation method, a screen printing method, a sand blast method, a plating method, a lift-off method, or the like.

The material constituting the dielectric layer is required to be transparent since the light emission of the phosphor layer is observed through the first substrate in the reflection type AC drive type plasma display device.

In the AC-driven plasma display device of the present invention, high strain point glass and soda glass (Na _{2) are} used as constituent materials of the first substrate forming the first panel and the second substrate forming the second panel. O.CaO.SiO ₂ ), borosilicate glass (Na ₂ O.B ₂ O ₃ .SiO ₂ ), forsterite (2MgO.SiO ₂ ), lead glass (Na ₂ O.Pb)
O.SiO ₂ ). The constituent materials of the first substrate and the second substrate may be the same or different.

The phosphor layer is made of, for example, a phosphor material selected from the group consisting of a phosphor material that emits red light, a phosphor material that emits green light, and a phosphor material that emits blue light. It is provided above. When the AC-driven plasma display device performs color display, specifically, for example, a phosphor layer (red phosphor layer) made of a phosphor material that emits red light is provided above the address electrode, and the green color is displayed. A phosphor layer (green phosphor layer) composed of a phosphor material that emits light is provided above another address electrode, and a phosphor layer (blue phosphor layer) composed of a phosphor material that emits blue light is provided. It is provided above another address electrode, and a phosphor layer that emits these three primary colors forms one set and is provided in a predetermined order. And
A region where a pair of discharge sustaining electrodes overlaps with a pair of phosphor layers emitting these three primary colors corresponds to one pixel. The red phosphor layer, the green phosphor layer, and the blue phosphor layer may be formed in a stripe shape or in a lattice shape. Further, the phosphor layer may be formed only in a region where the discharge sustaining electrode and the address electrode overlap.

As the phosphor material constituting the phosphor layer,
Among the known phosphor materials, high quantum efficiency, vacuum
Select a phosphor material that is less saturated with ultraviolet light
Can be used. Assuming color display, color pure
The degree is close to the three primary colors specified by NTSC, and the three primary colors are mixed
White balance, short afterglow time, and three primary colors
Combine phosphor materials with almost equal afterglow times.
Is preferred. Emit red light when irradiated with vacuum ultraviolet light
As a phosphor material, (Y_TwoO_Three: Eu), (YBO)_ThreeE
u), (YVO_Four: Eu), (Y_0.96P_0.60V_0.40O_Four:
Eu_0.04), [(Y, Gd) BO_Three: Eu], (GdB
O_Three: Eu), (ScBO)_Three: Eu), (3.5MgO.
0.5MgF_Two・ GeO_Two: Mn).
You. Phosphor material that emits green light when irradiated with vacuum ultraviolet light
As (ZnSiO_Two: Mn), (BaAl)₁₂O₁₉:
Mn), (BaMg_TwoAl₁₆O₂₇: Mn), (MgGa_Two
O_Four: Mn), (YBO)_Three: Tb), (LuBO)_Three: T
b), (Sr_FourSi_ThreeO₈Cl_Four: Eu)
it can. Phosphor that emits blue light when irradiated with vacuum ultraviolet light
As a material, (Y_TwoSiO_Five: Ce), (CaWO)_Four: P
b), CaWO_Four, YP_{0. 85}V_0.15O_Four, (BaMgAl
₁₄O_{twenty three}: Eu), (Sr_TwoP_TwoO₇: Eu), (Sr _TwoP_Two
O₇: Sn). Formation of phosphor layer
Thick film printing method, method of spraying phosphor particles
Method, attach a sticky substance to the phosphor layer
Method of attaching phosphor particles, photosensitive phosphor
The phosphor layer by exposure and development.
Unnecessary after forming phosphor layer on the entire surface
To remove parts by sandblasting
Can be.

The phosphor layer may be formed directly on the address electrode, or may be formed over the address electrode and on the side wall surface of the partition. Alternatively, the phosphor layer may be formed on the dielectric material layer provided on the address electrode, or may extend from the dielectric material layer provided on the address electrode to the side wall surface of the partition. May be formed. Further, the phosphor layer may be formed only on the side wall surface of the partition. As a constituent material of the dielectric material layer, a low-melting glass or silicon oxide can be used, and the dielectric material layer can be formed by a screen printing method, a sputtering method, a vacuum evaporation method, or the like. In some cases, a protective layer made of magnesium oxide (MgO), magnesium fluoride (MgF ₂ ), calcium fluoride (CaF ₂ ), or the like may be formed on the surface of the phosphor layer or the partition.

It is preferable that a partition (rib) extending in parallel with the address electrode is formed on the second substrate.
Note that the partition walls (ribs) may have a meander structure.
When the dielectric material layer is formed on the second substrate and the address electrode, the partition may be formed on the dielectric material layer. As a constituent material of the partition, a conventionally known insulating material can be used. For example, a material obtained by mixing a metal oxide such as alumina with a widely used low-melting glass can be used. Examples of the method for forming the partition include a screen printing method, a sand blast forming method, a dry film method, and a photosensitive method. Here, with the screen printing method, an opening is formed in a part of the screen corresponding to a part where a partition is to be formed, and a partition forming material on the screen is passed through the opening using a squeegee,
A method of forming a partition-forming material layer on a second substrate or a dielectric material layer (hereinafter, collectively referred to as a second substrate or the like) and then firing the partition-forming material layer It is. The dry film method is a method of laminating a photosensitive film on a second substrate or the like, removing the photosensitive film at a portion where a partition is to be formed by exposure and development, and embedding a material for forming a partition into an opening formed by the removal. And firing. The photosensitive film is burned and removed by baking, leaving a material for forming a partition embedded in the opening,
It becomes a partition. The photosensitive method is a method of forming a photosensitive material layer for forming a partition on a second substrate or the like, patterning this material layer by exposure and development, and then performing baking. The sand blasting method is, for example, forming a partition-forming material layer on a second substrate or the like by using screen printing, a roll coater, a doctor blade, a nozzle discharge type coater, and the like, drying, and then forming a partition. In this method, a portion of the material layer for forming a partition to be formed is covered with a mask layer, and then the exposed portion of the material layer for forming a partition is removed by sandblasting. Note that by making the partition walls black, a so-called black matrix can be formed, and the display screen can have high contrast. As a method for making the partition walls black, a method of forming the partition walls using a color resist material colored black can be exemplified.

A pair of partition walls formed on the second substrate;
A discharge sustain electrode and an address electrode occupying an area surrounded by a pair of partition walls, and a phosphor layer (for example, a red phosphor layer,
One discharge cell is constituted by one of the green phosphor layer and the blue phosphor layer). A discharge gas composed of a mixed gas is sealed in the discharge cell, more specifically, in a discharge space surrounded by partition walls, and the phosphor layer is provided with an alternating current generated in the discharge gas in the discharge space. It emits light when irradiated with vacuum ultraviolet rays generated based on glow discharge.

In the AC-driven plasma display device according to the first to seventh aspects of the present invention, the pressure of the rare gas sealed in the discharge space is 1 × 10 ² Pa to 5 × 10 ⁵ P
a, preferably 1 × 10 ³ Pa to 4 × 10 ⁵ Pa. The distance between the pair of discharge sustaining electrodes was 5 × 1.
When it is less than 0 ^-5 m, the pressure of the rare gas in the discharge space is 1 × 10 ² Pa or more and 3 × 10 ⁵ Pa or less, preferably 1 × 10 ³ Pa or more and 2 × 10 ⁵ Pa or less, more preferably. Is preferably 1 × 10 ⁴ Pa or more and 1 × 10 ⁵ Pa or less. By setting the pressure in such a range, the phosphor layer emits light by being irradiated with vacuum ultraviolet rays generated in a rare gas. Within such a pressure range, the higher the pressure, the lower the sputtering rate of the various members constituting the AC-driven plasma display device. As a result, the life of the AC-driven plasma display device can be extended. Here, the following (1) is required for the rare gas sealed in the discharge space.
As a rare gas, He (resonance line wavelength = 58.4 n)
m), Ne (74.4 nm), Ar (107 n)
m), Kr (124 nm) and Xe (147 nm) can be used alone or as a mixture, but a mixed gas that can be expected to lower the firing voltage due to the Penning effect is particularly useful. . As such a mixed gas, a Ne—Ar mixed gas, a He—Xe mixed gas, a Ne—
Xe mixed gas, He-Kr mixed gas, Ne-Kr mixed gas and Xe-Kr mixed gas can be exemplified. In particular,
Xe, which has the longest resonance line wavelength among the rare gases, emits a vacuum ultraviolet light that is strong even at the molecular beam wavelength of 172 nm, and is therefore a suitable rare gas.

From the viewpoint of extending the life of the AC-driven plasma display device, it is chemically stable and the gas pressure can be set high. From the viewpoint of increasing the brightness of the display screen, the emission intensity of the vacuum ultraviolet light is reduced. Large In order to increase the efficiency of energy conversion from vacuum ultraviolet light to visible light, the wavelength of the emitted vacuum ultraviolet light must be long. From the viewpoint of reducing power consumption, the firing voltage must be low.

[0054]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings based on embodiments of the invention (hereinafter abbreviated as embodiments).

(Embodiment 1) Embodiment 1 relates to the present invention.
The plasma display device according to the first and fourth aspects of the present invention
Related. The plasma display device according to the first embodiment has a dielectric layer
Is 1.5 × 10 ^-Fivem or less
You. The dielectric layer is made of silicon oxide (SiO_XThe first consisting of
Dielectric film and a second layer made of MgO formed on the dielectric film
And a dielectric film. And, the structure shown in FIG.
A three-electrode type plasma having the structure according to the first aspect of the present invention.
A display device was manufactured by the method described below.

The first panel 10 was manufactured by the following method.
First, an ITO layer is formed on the entire surface of the first substrate 11 made of high-strain point glass or soda glass by, for example, a sputtering method, and the ITO layer is patterned into stripes by a photolithography technique and an etching technique. A plurality of sustain electrodes 12 were formed. The sustain electrode 12 extends in the first direction. Next, an aluminum film, a copper film, etc. are formed on the entire surface by, for example, a vapor deposition method,
By patterning aluminum film, copper film, etc. by photolithography technology and etching technology,
A bus electrode 13 was formed along the edge of each discharge sustaining electrode 12. The distance between the pair of discharge sustaining electrodes 12 is 2 × 1
It was 0 ^-5 m (20 μm).

Thereafter, a first dielectric film 14 made of silicon oxide was formed on the entire surface by a sputtering method using a high-frequency magnetron sputtering apparatus under the conditions shown in Table 1 below. In this case, the thickness of the first dielectric film 14 was 1 μm, 3 μm, and 6 μm. A first dielectric film 14 mainly made of silicon oxide was formed on the entire surface by a screen printing method. Note that a paste was used as a solution containing a dielectric material. First dielectric film 1 in this case
The thickness of No. 4 was 10 μm. Further, for reference, a first dielectric film 14 made of silicon oxide having a thickness of 20 μm was formed on the entire surface by a screen printing method.

[Table 1] Target: SiO ₂ process gas: Ar / O ₂ = 500/100 sccm Ar gas pressure: 5 × 10 ^-1 Pa RF power: 1 kW

Next, a second dielectric film (protective film) 15 made of magnesium oxide (MgO) having a thickness of 0.6 μm was formed on the first dielectric film 14 by an electron beam evaporation method. Through the above steps, the first panel 10 was completed.

The second panel 20 was manufactured by the following method.
First, an address electrode 22 was formed on a second substrate 21 made of a high strain point glass or a soda glass by printing a silver paste in a stripe shape by, for example, a screen printing method, and performing baking. The address electrode 22 extends in a second direction orthogonal to the first direction. Next, a low-melting glass paste layer was formed on the entire surface by screen printing, and the low-melting glass paste layer was fired to form a dielectric material layer 23. Thereafter, a low-melting glass paste was printed on the dielectric material layer 23 above the region between the adjacent address electrodes 22 by, for example, a screen printing method, and baked to form the partition walls 24. The average height of the partition walls was set to 130 μm. next,
By sequentially printing and sintering the phosphor slurries of the three primary colors, the phosphor layers 25R, 25G, and 2 extend from the dielectric material layer 23 between the partition walls 24 to the side wall surfaces of the partition walls 24.
5B was formed. Through the above steps, the second panel 20 was completed.

Next, the plasma display device was assembled. That is, first, a frit glass layer was formed on the outer peripheral portion of the second panel 20 by, for example, screen printing. Next, the first panel 10 and the second panel 20 are attached to each other,
It was baked to harden the frit glass layer. Then the first
After the space formed between the panel 10 and the second panel 20 was evacuated, a Ne—Xe mixed gas was sealed, and the space was sealed to complete the plasma display device.

The luminance of the plasma display device was measured using the test plasma display device thus manufactured. The discharge was performed at an applied voltage of 150 volts. The result is shown in FIG. The measured value of the brightness of the plasma display device obtained by forming the first dielectric film 14 of silicon oxide having a thickness of 20 μm on the entire surface by a screen printing method is referred to as a reference value.

From the results of the luminance measurement, the thickness of the dielectric layer was set to 1.
5 × 10 ⁻⁵ m (15 μm) or less, preferably 1.0 × 1
By setting the thickness to 0 ^-5 m or less (10 μm) or less, a clear improvement in luminance was recognized.

Further, the discharge voltage of the plasma display device was measured using the test plasma display device manufactured as described above. The result is shown in FIG.

From the results of the luminance measurement, the thickness of the dielectric layer was set to 1.
5 × 10 ⁻⁵ m (15 μm) or less, preferably 1.0 × 1
By setting it to 0 ^-5 m (10 μm) or less, a reduction in discharge voltage was clearly observed.

For example, the first dielectric film made of silicon oxide is formed by a low pressure CVD method using SiH ₄ / O ₂ as a source gas, an Ar gas as a carrier gas, and a deposition temperature of 420 ° C. It can also be formed. Alternatively, use pelleted SiO ₂ as a target,
The first dielectric film made of silicon oxide can also be formed by an electron beam heating method using O ₂ as a process gas. In addition, a first source made of silicon oxide is formed by an ion plating method using SiO ₂ , SiO or Si as an evaporation source and O ₂ as a reactive gas.
Can be formed. Further, the first dielectric film made of silicon oxide can be formed by a spin coating method using a solution containing silicon oxide.

(Embodiment 2) Embodiment 2 also relates to a plasma display device according to the first and fourth aspects of the present invention. In the second embodiment, the relationship between the brightness of the obtained plasma display device and the distance between the pair of discharge sustaining electrodes 12 was examined by changing the distance between the pair of discharge sustaining electrodes 12. In the second embodiment or in the third to seventh embodiments described later, a three-electrode type plasma display device having the structure shown in FIG. 1 was manufactured.

In the second embodiment, the first panel 10
Was produced by the following method. First, the steps up to the formation of the bus electrode 13 were performed in the same manner as in the first embodiment. afterwards,
In the same manner as in the first embodiment, a first dielectric film 14 of silicon oxide having a thickness of 3 μm was formed on the entire surface by sputtering. Alternatively, thereafter, a first dielectric film 14 of silicon oxide having a thickness of 10 μm was formed on the entire surface by a screen printing method. Next, a second dielectric film (protective film) made of 0.6 μm thick magnesium oxide (MgO) is formed on the first dielectric film 14 by an electron beam evaporation method.
No. 15 was formed. Through the above steps, the first panel 10 was completed. The fabrication of the second panel 20 and the assembly of the plasma display device were the same as in the first embodiment. The distance (d) between the pair of sustain electrodes 12 is 10 μm,
20 μm, 40 μm, and 70 μm.

The luminance of the plasma display device was measured using the test plasma display device thus manufactured. The applied voltage was the same as in the first embodiment. The results are shown in FIGS.

As is clear from FIGS. 4 and 5, the first
As the thickness of the dielectric film becomes thinner, the brightness of the plasma display device increases, and as the distance between the pair of discharge sustaining electrodes 12 becomes narrower, the brightness of the plasma display device improves.

(Embodiment 3) Embodiment 3 relates to a plasma display device according to the second aspect of the present invention. In the plasma display device according to the third embodiment, the dielectric layer includes a first dielectric film composed of an aluminum oxide layer, and a second dielectric film made of MgO formed thereon.

The first panel 10 was manufactured by the following method.
First, the steps up to the formation of the bus electrode 13 were performed in the same manner as in the first embodiment. Thereafter, a first dielectric film 14 made of aluminum oxide was formed on the entire surface under the conditions exemplified in Table 2 below based on the electron beam heating method. In this case, the thickness of the first dielectric film 14 was set to 1 μm to 20 μm. Next, a 0.6 μm-thick magnesium oxide (Mg) is formed on the first dielectric film 14 by an electron beam evaporation method.
A second dielectric film (protective film) 15 made of O) was formed. Through the above steps, the first panel 10 was completed. The fabrication of the second panel 20 and the assembly of the plasma display device were the same as in the first embodiment.

[Table 2] Evaporation source: Al ₂ O ₃ Process gas: O ₂ O ₂ Gas pressure: 1 × 10 ^-2 Pa RF power: 1 kW Heating temperature: 200 ° C.

Using the test plasma display device thus manufactured, the brightness of the plasma display device was measured. The applied voltage was the same as in the first embodiment. As a result, even when the thickness of the first dielectric film 14 was 20 μm, the plasma display device showed a value higher than the reference value. Further, as the film thickness of the first dielectric film is smaller, a higher luminance value is exhibited. In particular, when the film thickness of the dielectric layer is 15 μm or less,
Higher luminance values were shown.

The first dielectric film made of aluminum oxide can be formed by a sputtering method using Al ₂ O ₃ or Al as a target and O ₂ as a process gas. Also, the first dielectric film made of aluminum oxide can be formed by a sol-gel method.

(Embodiment 4) Embodiment 4 relates to a plasma display device according to the third aspect of the present invention. In the plasma display device according to the fourth embodiment, the dielectric layer is composed of a first dielectric film having a laminated structure of an aluminum oxide layer and a silicon oxide layer, and a second dielectric film made of MgO formed thereon. And a dielectric film.

The first panel 10 was manufactured by the following method.
First, the steps up to the formation of the bus electrode 13 were performed in the same manner as in the first embodiment. Thereafter, an aluminum oxide layer (thickness: 3 μm) was formed on the entire surface under the conditions exemplified in Table 2 based on the electron beam heating method, and then a silicon oxide layer (film) was formed in the same manner as described in Embodiment 1. 3 μm) was formed thereon. Next, a second dielectric film (protective film) 15 made of magnesium oxide (MgO) having a thickness of 0.6 μm was formed on the first dielectric film 14 by an electron beam evaporation method. Through the above steps, the first panel 10 was completed. The fabrication of the second panel 20 and the assembly of the plasma display device were the same as in the first embodiment.

Using the test plasma display device manufactured as described above, the luminance of the plasma display device was measured. The applied voltage was the same as in the first embodiment. As a result, the plasma display device of Embodiment 4 showed a value higher than the reference value.

(Embodiment 5) Embodiment 5 relates to a plasma display device according to a fifth aspect of the present invention. In the plasma display device according to the fifth embodiment, the dielectric layer includes a first dielectric film composed of a diamond-like carbon (DLC) layer, and a second dielectric film composed of MgO formed thereon. Consists of

The first panel 10 was manufactured by the following method.
First, the steps up to the formation of the bus electrode 13 were performed in the same manner as in the first embodiment. Thereafter, a diamond-like carbon layer (film thickness: 1 to 20 μm) was formed on the entire surface by a high-frequency CVD method or a thermal decomposition CVD method using a raw material gas containing carbon such as CH ₄ , for example. Then the first
A second layer made of magnesium oxide (MgO) having a thickness of 0.6 μm is formed on the dielectric film 14 by electron beam evaporation.
The dielectric film (protective film) 15 was formed. Through the above steps, the first panel 10 was completed. The fabrication of the second panel 20 and the assembly of the plasma display device are described in Embodiment 1.
The same as above.

The luminance of the plasma display device was measured using the test plasma display device manufactured as described above. The applied voltage was the same as in the first embodiment. As a result, even when the thickness of the first dielectric film 14 was 20 μm, the plasma display device showed a value higher than the reference value. Further, as the film thickness of the first dielectric film is smaller, a higher luminance value is exhibited. In particular, when the film thickness of the dielectric layer is 15 μm or less,
Higher luminance values were shown. The first dielectric film was composed of a boron nitride layer or a chromium (III) oxide layer instead of the diamond-like carbon layer, but similar results were obtained.

The first dielectric film made of boron nitride can be formed by a reactive RF sputtering method or a high-frequency CVD method, or fired after screen-printing a paste containing boron nitride. It can also be performed by a method, a method of forming a film by a spin coating method or a dipping method based on a suspension containing boron nitride.

Further, the first dielectric film comprising the chromium (III) oxide layer is formed by screen-printing a paste containing chromium (III) oxide and then firing the paste, and a suspension containing chromium (III) oxide. And a method of forming a film by a spin coating method or a dipping method based on the above method. Alternatively, chromium oxide (II
It is also possible to use I) and perform the RF sputtering method using Ar gas and O ₂ gas as the process gas, or the high frequency CVD method.

(Embodiment 6) Embodiment 6 relates to a plasma display device according to a sixth aspect of the present invention. In the plasma display device according to the sixth embodiment, the dielectric layer is formed of a first dielectric film having a laminated structure of a diamond-like carbon (DLC) layer and a silicon oxide layer, and MgO formed thereon. And a second dielectric film.

The first panel 10 was manufactured by the following method.
First, the steps up to the formation of the bus electrode 13 were performed in the same manner as in the first embodiment. Thereafter, a diamond-like carbon layer (1 μm thick) is formed on the entire surface by the CVD method, and then a silicon oxide layer (2 μm thick) is formed thereon by the sputtering method.
m) was formed. Then, on the first dielectric film 14,
A second dielectric film (protective film) 15 made of magnesium oxide (MgO) having a thickness of 0.6 μm by electron beam evaporation.
Was formed. Through the above steps, the first panel 10 was completed. The fabrication of the second panel 20 and the assembly of the plasma display device were the same as in the first embodiment.

Using the test plasma display device thus manufactured, the luminance of the plasma display device was measured. The applied voltage was the same as in the first embodiment. As a result, the plasma display device of Embodiment 6 showed a value higher than the reference value. Instead of the diamond-like carbon layer, a boron nitride layer or a chromium oxide (I
Although the first dielectric film was composed of the II) layer, similar results were obtained. In addition, a plasma display device in which the silicon oxide layer was replaced with an aluminum oxide layer was manufactured, and its luminance was measured. As a result, the value was higher than the reference value. Furthermore, a plasma display device in which the silicon oxide layer was replaced with a stacked structure of a silicon oxide layer / aluminum oxide layer was manufactured, and its luminance was measured. As a result, a value higher than the reference value was shown.

(Embodiment 7) Embodiment 7 relates to a plasma display device according to a seventh aspect of the present invention. In the plasma display device of the seventh embodiment, the dielectric layer is made of a first dielectric film having a laminated structure of a diamond-like carbon (DLC) layer and an aluminum oxide layer, and MgO formed thereon. And a second dielectric film.

The first panel 10 was manufactured by the following method.
First, the steps up to the formation of the bus electrode 13 were performed in the same manner as in the first embodiment. Thereafter, a diamond-like carbon layer (1 μm in thickness) was formed on the entire surface by a CVD method, and then an aluminum oxide layer (2 μm in thickness) was formed thereon by a sputtering method. Thereafter, a second dielectric film (protective film) 15 made of magnesium oxide (MgO) having a thickness of 0.6 μm was formed on the first dielectric film 14 by an electron beam evaporation method. By the above steps, the first panel 10
Was completed. The fabrication of the second panel 20 and the assembly of the plasma display device were the same as in the first embodiment.

The luminance of the plasma display device was measured using the test plasma display device thus manufactured. The applied voltage was the same as in the first embodiment. As a result, the plasma display device according to the seventh embodiment showed a value higher than the reference value. Instead of the diamond-like carbon layer, a boron nitride layer or a chromium oxide (I
Although the first dielectric film was composed of the II) layer, similar results were obtained. Furthermore, the first dielectric film was formed from a laminated structure of a diamond-like carbon layer and a silicon oxide layer, or a laminated structure of a diamond-like carbon layer, an aluminum oxide layer, and a silicon oxide layer. I was able to.

Although the present invention has been described based on the embodiments, the present invention is not limited to these embodiments. Structure and configuration of the plasma display device described in the embodiment,
The materials, dimensions, manufacturing methods, and the like used are merely examples, and can be changed as appropriate. The method of forming a dielectric layer (first dielectric film, second dielectric film) in the embodiment is an exemplification, and depends on the material forming the dielectric layer and is most suitable for the material forming the dielectric layer. What is necessary is just to form a dielectric layer based on a suitable formation method. For example, based on a solution such as a suspension of water glass or glass powder, a dielectric layer can be formed on the first substrate and the discharge sustain electrode based on spin coating or screen printing.

Further, the present invention can be applied to a transmission type plasma display device in which light emission of the phosphor layer is observed through the second substrate. In the embodiment, the plasma display device is constituted by a pair of discharge sustaining electrodes extending in parallel. Instead, a pair of bus electrodes extend in the first direction, and one bus is provided between the pair of bus electrodes. A structure in which one sustain electrode extends from the electrode in a second direction to just before the other bus electrode, and the other sustain electrode extends in the second direction from the other bus electrode to just before the one bus electrode; You can also. One of the pair of sustaining electrodes may be provided on the first substrate, and one of the sustaining electrodes extending in the first direction may be provided on the first substrate, and the other sustaining electrode may be formed on the upper side wall of the partition wall in parallel with the address electrode. . Further, the AC-driven plasma display device of the present invention may be a two-electrode type plasma display device. Further, the address electrodes may be formed on the first substrate. The AC drive type plasma display device having such a structure includes, for example, a pair of discharge sustaining electrodes extending in the first direction, and one of the pair of discharge sustaining electrodes in the vicinity of one of the pair of sustaining electrodes. An address electrode provided (provided that the length of the address electrode along one of the pair of sustain electrodes is within the length of the discharge cell in the first direction). In order to prevent a short circuit with the discharge sustaining electrode, an address electrode wiring extending in the second direction is provided via an insulating layer, and the address electrode wiring is electrically connected to the address electrode. The structure is such that the address electrode extends from the wiring for use.

In the embodiment, the gap shape between the opposing edges of the pair of discharge sustaining electrodes is linear, but the gap shape between the opposing edges of the pair of discharge sustaining electrodes is A pattern that is bent or curved in the width direction of the discharge sustaining electrode (for example, a combination of "-", a combination of "S" and an arc, or any combination of curves) can be used. With such a configuration, the lengths of the opposing edges of the pair of discharge sustaining electrodes can be increased, and the discharge efficiency can be improved. FIGS. 6A, 6B, and 6C are schematic partial plan views of a pair of discharge sustaining electrodes having such a structure.
Shown in

An example of the AC glow discharge operation of the plasma display device of the present invention will be described. First, for example, a pulse voltage higher than the discharge starting voltage V _bd is applied to all the one sustain electrodes 12 for a short time. As a result, a glow discharge occurs, and wall charges are generated on the surface of the dielectric layer 14 near one of the sustain electrodes due to dielectric polarization, and the wall charges accumulate.
The apparent discharge starting voltage decreases. Thereafter, while applying a voltage to the address electrode 22, a voltage is applied to one of the discharge sustaining electrodes 12 included in the discharge cells in which display is not performed, whereby the address electrode 22 and the one sustaining electrode 1 are applied.
A glow discharge is generated between them and the accumulated wall charges are erased. This erase discharge is sequentially executed in each address electrode 22. On the other hand, no voltage is applied to one of the sustain electrodes included in the discharge cells for displaying. This maintains the accumulation of wall charges. Thereafter, by applying a predetermined pulse voltage between all the pair of discharge sustaining electrodes 12, a glow discharge starts between the pair of discharge sustaining electrodes 12 in the cell in which the wall charge has been accumulated, and in the discharge cell. In the above, a phosphor layer excited by irradiation with vacuum ultraviolet rays generated based on a glow discharge in a discharge gas in a discharge space exhibits a specific emission color according to the type of the phosphor material. Note that the phases of the sustaining voltage applied to one sustaining electrode and the other sustaining electrode are shifted by a half cycle, and the polarity of the sustaining electrode is inverted according to the frequency of the alternating current.

Alternatively, the AC glow discharge operation of the plasma display device of the present invention can be performed as follows. First, an erasing discharge is performed on all the pixels to initialize all the pixels, and then a discharging operation is performed. The discharge operation is
An address period in which wall charges are generated on the surface of the dielectric layer by the initial discharge and a sustain period in which the glow discharge is maintained are performed. In the address period, a pulse voltage lower than the discharge start voltage V _bd is applied to the selected one sustaining electrode and the selected address electrode for a short time. The overlap region of one of the sustain electrodes to which the pulse voltage is applied and the address electrode is selected as a display pixel, and in this overlap region, wall charges are generated on the surface of the dielectric layer due to dielectric polarization, and the wall charges are generated. Stored. In the subsequent discharge sustain period,
A sustaining voltage V _sus lower than V _bd is applied to the pair of sustain electrodes. If greater than the sum the discharge starting voltage V _bd the wall voltage V _w which wall charges are induced and discharge sustain voltage V _{sus (i.e., V w + V sus> V} bd), glow discharge is initiated. The phases of the sustaining voltage V _sus applied to one sustaining electrode and the other sustaining electrode are shifted by half a cycle,
The polarity of the sustaining electrode is inverted according to the frequency of the alternating current.

[0095]

According to the AC-driven plasma display device of the present invention, a sufficiently thin dielectric layer is formed as compared with the conventional AC-driven plasma display device, or a high dielectric constant is obtained. Since the dielectric layer is made of a material, the capacitance of the dielectric layer can be increased. As a result, the charge storage amount can be increased, and the driving power,
That is, not only can the power consumption be reduced, but also the luminance of the AC-driven plasma display device can be improved.
In addition, the aluminum oxide layer, the diamond-like carbon layer, the boron nitride layer, and the chromium (III) oxide layer have a high film density, are unlikely to cause abnormal discharge, and have improved discharge stability. Will be higher.
In addition, if a laminated structure with a silicon oxide layer or the like is used, stress in the dielectric layer can be reduced, and cracks in the dielectric layer can be prevented.

Further, the distance between the pair of discharge sustaining electrodes is less than 5 × 10 ⁻⁵ m, preferably less than 5.0 × 10 ⁻⁵ m,
If it is more preferably 2 × 10 ⁻⁵ m or less, the driving power can be reduced as compared with a conventional AC-driven plasma display device in which the distance between a pair of discharge sustaining electrodes is about 100 μm. Therefore, not only can the load on the drive circuit of the AC drive type plasma display device be reduced, but also the stability of discharge is improved. Further, when the driving power is set equal to or close to the conventional AC drive type plasma display device, the emission luminance of the AC drive type plasma display device of the present invention can be increased. On the other hand, when the driving power is the same as the conventional one, the brightness of the AC-driven plasma display device of the present invention can be increased. In addition, high definition and high density display can be achieved, or luminance can be improved with an increase in the area of the phosphor layer.

[Brief description of the drawings]

FIG. 1 is a partially exploded perspective view conceptually showing a general configuration example of a three-electrode type AC driven plasma display device.

FIG. 2 is a graph showing the results of measuring the luminance of the plasma display device using the test plasma display device manufactured in Example 1.

FIG. 3 is a graph showing the results of measuring the discharge voltage of the plasma display device using the test plasma display device manufactured in Example 1.

FIG. 4 is a graph showing the results of measuring the luminance of a plasma display device using the test plasma display device manufactured in Example 2 (however, the thickness of the first dielectric film: 3 μm). It is.

FIG. 5 is a graph showing the result of measuring the luminance of the plasma display device using the test plasma display device manufactured in Example 2 (however, the thickness of the first dielectric film: 10 μm). It is.

FIG. 6 shows a plasma display device according to the present invention in which a gap between opposing edges of a pair of discharge sustaining electrodes is a pattern bent or curved in the width direction of the discharge sustaining electrodes. FIG. 3 is a schematic partial plan view of a discharge sustaining electrode.

[Explanation of symbols]

10 ... first panel, 11 ... first substrate, 12 ...
..Discharge sustaining electrodes, 13 bus electrodes, 14 first dielectric films, 15 second dielectric films, 20
2nd panel, 21 ... 2nd substrate, 22 ... address electrode, 23 ... dielectric material layer, 24 ... partition, 2
5, 25R, 25G, 25B ... phosphor layer

Continuation of the front page (72) Inventor Hiroshi Mori F-term (reference) 5C027 AA05 AA06 AA07 5C040 FA01 GD01 GD02 GD07 GD09 JA02 JA07 KA03 KA04 KB19 LA10 MA03

Claims (18)

[Claims] A discharge sustaining electrode formed on a first substrate;
An AC-driven plasma display device comprising: a first panel having a dielectric layer formed on a first substrate and a sustain electrode; and a second panel joined at an outer peripheral portion thereof. The AC-driven plasma display device, wherein the thickness of the dielectric layer is 1.5 × 10 ⁻⁵ m or less. 2. The AC-driven plasma display device according to claim 1, wherein the thickness of the dielectric layer is 1.0 × 10 ⁻⁵ m or less. 3. A discharge sustain electrode formed on a first substrate,
An AC-driven plasma display device comprising: a first panel having a dielectric layer formed on a first substrate and a sustain electrode; and a second panel joined at an outer peripheral portion thereof. The AC-driven plasma display device, wherein the dielectric layer comprises at least an aluminum oxide layer. A discharge sustain electrode formed on the first substrate;
An AC-driven plasma display device comprising: a first panel having a dielectric layer formed on a first substrate and a sustain electrode; and a second panel joined at an outer peripheral portion thereof. The AC-driven plasma display device, wherein the dielectric layer has a laminated structure of at least an aluminum oxide layer and a silicon oxide layer. 5. A discharge sustaining electrode formed on a first substrate,
An AC-driven plasma display device comprising: a first panel having a dielectric layer formed on a first substrate and a sustain electrode; and a second panel joined at an outer peripheral portion thereof. The AC-driven plasma display device, wherein the dielectric layer comprises at least a silicon oxide layer. 6. A discharge sustaining electrode formed on a first substrate,
An AC-driven plasma display device comprising: a first panel having a dielectric layer formed on a first substrate and a sustain electrode; and a second panel joined at an outer peripheral portion thereof. The dielectric layer comprises at least a diamond-like carbon layer, a boron nitride layer, or chromium (III) oxide.
An AC-driven plasma display device comprising a layer. 7. A discharge sustaining electrode formed on a first substrate,
An AC-driven plasma display device comprising: a first panel having a dielectric layer formed on a first substrate and a sustain electrode; and a second panel joined at an outer peripheral portion thereof. The dielectric layer comprises at least a diamond-like carbon layer, a boron nitride layer, or chromium (III) oxide.
An AC-driven plasma display device comprising a stacked structure of a layer and a silicon oxide layer or an aluminum oxide layer. 8. A discharge sustaining electrode formed on a first substrate,
An AC-driven plasma display device comprising: a first panel having a dielectric layer formed on a first substrate and a sustain electrode; and a second panel joined at an outer peripheral portion thereof. The AC-driven plasma display device, wherein the dielectric layer comprises at least two layers selected from the group consisting of a diamond-like carbon layer, a boron nitride layer, and a chromium (III) oxide layer. 9. The AC drive according to claim 8, wherein the dielectric layer further comprises a silicon oxide layer, an aluminum oxide layer, or a laminated structure of a silicon oxide layer and an aluminum oxide layer. Type plasma display device. 10. The AC-driven plasma display device according to claim 3, wherein the thickness of the dielectric layer is 1.5 × 10 ⁻⁵ m or less. . 11. The AC-driven plasma display device according to claim 10, wherein the thickness of the dielectric layer is 1.0 × 10 ⁻⁵ m or less. 12. The discharge sustaining electrodes formed on the first panel operate in pairs, and the distance between the pair of sustaining electrodes is 5 ×.
The AC-driven plasma display device according to any one of claims 1 to 11, wherein the distance is less than 10 ^-5 m. 13. The distance between a pair of sustain electrodes is 2 × 1.
0 ^-5 AC-driven plasma display device according to claim 12, characterized in that m or less. 14. A first panel comprising: a discharge sustain electrode formed on a first substrate; a dielectric layer formed on the first substrate and the discharge sustain electrode; and a second panel. ,
A method for manufacturing an AC-driven plasma display device joined at the outer periphery thereof, comprising: a sputtering method, a vacuum deposition method, an ion plating method, or a chemical vapor deposition method, the thickness of which is 1.5 × 10
Forming a dielectric layer having a thickness of ^-5 m or less on the first substrate and the sustain electrode. 15. A first panel comprising: a discharge sustain electrode formed on a first substrate; and a dielectric panel formed on the first substrate and the discharge sustain electrode; and a second panel. ,
A method of manufacturing an AC-driven plasma display device joined at their outer peripheral portions, wherein the thickness is 1.5 × 10 ⁻⁵ m based on a solution containing a dielectric material.
A method for manufacturing an AC-driven plasma display device, comprising: forming the following dielectric layer on a first substrate and a sustain electrode. 16. The AC-driven plasma display according to claim 15, further comprising a step of applying a solution containing a dielectric material on the first substrate and the sustain electrode based on a spin coating method. Device manufacturing method. 17. The AC-driven plasma display according to claim 15, further comprising the step of forming a solution containing a dielectric material on the first substrate and the sustain electrode based on a screen printing method. Device manufacturing method. 18. The AC-driven plasma display device according to claim 14, wherein the thickness of the dielectric layer is 1.0 × 10 ⁻⁵ m or less. Production method.