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JP2001317658A - Leakage detection sensor of diaphragm valve - Google Patents

Leakage detection sensor of diaphragm valve

Info

Publication number
JP2001317658A
JP2001317658A JP2000137064A JP2000137064A JP2001317658A JP 2001317658 A JP2001317658 A JP 2001317658A JP 2000137064 A JP2000137064 A JP 2000137064A JP 2000137064 A JP2000137064 A JP 2000137064A JP 2001317658 A JP2001317658 A JP 2001317658A
Authority
JP
Japan
Prior art keywords
diaphragm
valve
liquid
contact
main body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000137064A
Other languages
Japanese (ja)
Other versions
JP4427164B2 (en
Inventor
Masao Iritani
正夫 入谷
Kaoru Ozawa
薫 小澤
Toru Tateishi
透 立石
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOYO STAINLESS KOGYO KK
Original Assignee
TOYO STAINLESS KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOYO STAINLESS KOGYO KK filed Critical TOYO STAINLESS KOGYO KK
Priority to JP2000137064A priority Critical patent/JP4427164B2/en
Priority to US09/788,839 priority patent/US6508266B2/en
Priority to EP20010104405 priority patent/EP1138989B1/en
Priority to DE2001633677 priority patent/DE60133677T2/en
Priority to DE2001612639 priority patent/DE60112639T2/en
Priority to EP20040015521 priority patent/EP1462693B1/en
Priority to CNB011121963A priority patent/CN1208567C/en
Publication of JP2001317658A publication Critical patent/JP2001317658A/en
Priority to HK02101226.2A priority patent/HK1039976B/en
Application granted granted Critical
Publication of JP4427164B2 publication Critical patent/JP4427164B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Examining Or Testing Airtightness (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a leakage detection sensor of a diaphragm valve capable of detecting a leakage of a liquid securely even in case of the liquid having extremely poor electroconductivity like demineralized water. SOLUTION: In the diaphragm valve in which a diaphragm 14 is mounted at a position opposing to a valve seat 13 so as to shut off a surface side in contact with a liquid and a rear surface side and the diaphragm 14 comes into contact with and leaves the valve seat 13 by driving an operation shaft connected with a central part on the rear surface side to open and close a flow passage, a sensor main body 1 formed by sealing a strong electrolyte into a sealed casing 5 formed by arranging an osmotic film 4 which allows penetration of a liquid into the inside from the outside but does not allow its penetration to the outside partially and arranging cathode and anode electrodes a, b opposingly is provided in such a way that the osmotic film 4 is in contact with the liquid leaking out onto the rear surface side of the diaphragm 14. A detection circuit 2 detecting an electric conductivity condition between both electrodes a and b in the sealed easing 5 is provided.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、食品工業や医薬品
工業等における各種液体配管において、その液体配管の
流路を開閉するのに使用されるダイアフラム弁の漏洩検
知センサーに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a leak detection sensor for a diaphragm valve used for opening and closing the flow path of various liquid pipes in the food industry, the pharmaceutical industry, and the like.

【0002】[0002]

【従来の技術及びその課題】この種のダイアフラム弁
は、弁ボディ内の弁座と対向する位置に、弁体を形成す
るダイアフラムが、接液する表面側と背面側とを遮断す
るように取り付けられ、その背面側中央部に連結された
作動軸の軸方向進退駆動により、ダイアフラムの表面側
が弁座に対し離接して流路を開閉するようになってい
る。しかして、このようなダイヤフラム弁にあっては、
ダイヤフラムは表面側と作動機構を有する背面側とが周
縁部の固定部分で完全に遮断されて常時表面側のみで接
液し、且つダイヤフラムの変形のみで弁作動が行われ、
他の各種弁の弁軸部のような液洩れを生じ易いような摺
接部分が存在せず、弁部での封止性が高いため、特に安
全および衛生面での高信頼性が要求される食品や薬品分
野で賞用されている。
2. Description of the Related Art A diaphragm valve of this type is mounted at a position facing a valve seat in a valve body such that a diaphragm forming a valve body shuts off a front side and a rear side in contact with a liquid. The front side of the diaphragm is separated from and closes to the valve seat to open and close the flow path by the axially moving drive of the operating shaft connected to the central portion on the back side. Thus, in such a diaphragm valve,
As for the diaphragm, the front side and the back side having the operating mechanism are completely shut off at the fixed portion of the peripheral part, and the diaphragm always contacts the liquid only on the front side, and the valve operation is performed only by deformation of the diaphragm,
There is no sliding part that easily causes liquid leakage like the valve shaft part of other various valves, and the sealing performance in the valve part is high, so high reliability is required especially in safety and hygiene. It has been awarded in the food and pharmaceutical fields.

【0003】ところで、輸液の製造ライン、即ち純水ラ
イン等で用いられるダイアフラム弁のダイアフラムが、
疲労その他の要因によって破損した場合には、不良輸液
を製造継続しないためにも、その破損を検知する機能が
必要となる。従来では、ダイアフラムが破損しないうち
に早目にダイヤフラムを定期交換する手法が採用されて
いるが、このような早期交換ではまだ充分に長期使用に
耐え得る状態のダイヤフラムも廃棄されることになって
不経済であった。
The diaphragm of a diaphragm valve used in an infusion production line, that is, a pure water line or the like,
In the case of damage due to fatigue or other factors, a function to detect the damage is necessary in order not to continue manufacturing a defective infusion. Conventionally, a method has been adopted in which the diaphragm is periodically replaced as early as possible before the diaphragm is damaged.However, in such an early replacement, the diaphragm that is still in a state that can sufficiently withstand long-term use will be discarded. It was uneconomic.

【0004】また、ダイアフラム弁に付設される従来の
漏洩検知センサーとして、ダイアフラムに導電性ゴム層
を設けて、液洩れを電気的に検出するようにしたものが
知られているが、医薬品工業における純水ライン等にあ
っては、純水そのものが、導電性が極めて悪いため、正
確な液洩れ検出が行えず、実用性に乏しかった。
Further, as a conventional leak detection sensor attached to a diaphragm valve, there is known a sensor in which a conductive rubber layer is provided on a diaphragm to detect liquid leakage electrically. In a pure water line or the like, since pure water itself has extremely poor conductivity, accurate detection of liquid leakage cannot be performed, and the utility is poor.

【0005】本発明は、上記の問題点に鑑み、純水のよ
うに導電性の極めて悪い液体の場合でも、その液漏れを
確実に検知できるダイアフラム弁の漏洩検知センサーを
提供することを目的としている。
SUMMARY OF THE INVENTION In view of the above problems, it is an object of the present invention to provide a leak detection sensor for a diaphragm valve that can reliably detect a liquid leak even in the case of extremely poorly conductive liquid such as pure water. I have.

【0006】[0006]

【課題を解決するための手段】請求項1に係る発明の漏
洩検知センサーは、弁ボディ11内の弁座13と対向す
る位置に、弁体を形成するダイアフラム14が、接液す
る表面側と背面側とを遮断するように取り付けられ、そ
の背面側中央部に連結された作動軸35の軸方向進退駆
動により、ダイアフラム14の表面側が弁座13に対し
離接して流路を開閉するダイアフラム弁において、外部
から内部に液体を通すが内部から外部には通さない浸透
膜4を一部に配して形成される密閉ケーシング5の内部
に強電解質を封入し且つ一対の電極a,bを対向配置し
てなるセンサー本体1を、前記浸透膜4がダイアフラム
14の背面側に漏れ出た液体と接触する位置に設けると
共に、前記密閉ケーシング5内の両電極a,b間の導通
状態を検知する検知回路2を設けてなることを特徴とす
る。
According to a first aspect of the present invention, there is provided a leak detection sensor, wherein a diaphragm forming a valve element is provided at a position facing a valve seat in a valve body. A diaphragm valve that is mounted so as to shut off the rear side, and that opens and closes the flow path when the front side of the diaphragm 14 comes into contact with the valve seat 13 by the axial advance / retreat driving of an operating shaft 35 connected to the central part on the rear side. In the above, a strong electrolyte is sealed in a sealed casing 5 formed by partially arranging a permeable membrane 4 which allows a liquid to pass from the inside to the inside but does not pass from the inside to the outside, and a pair of electrodes a and b are opposed to each other. The sensor body 1 arranged is provided at a position where the permeable membrane 4 comes into contact with the liquid leaking to the back side of the diaphragm 14 and detects the conduction between the electrodes a and b in the closed casing 5. Inspection Characterized by comprising providing a circuit 2.

【0007】請求項2は、請求項1に記載のダイアフラ
ム弁の漏洩検知センサーにおいて、ダイアフラム14
が、フッ素樹脂製の薄い本体膜14aと、これの裏側に
重合配置されるゴム製の厚いバックアップ膜14bとか
らなり、バックアップ膜14bに漏洩報せ孔10を設け
てなることを特徴とする。
According to a second aspect of the present invention, there is provided a sensor for detecting a leakage of a diaphragm valve according to the first aspect.
However, it is characterized by comprising a thin main body film 14a made of fluororesin and a thick backup film 14b made of rubber disposed on the back side of the main body film 14a, and the backup film 14b is provided with a leak reporting hole 10.

【0008】[0008]

【発明の実施の形態】図1は本発明に係るダイアフラム
弁の半縦断面正面図、図2はその底面図である。これら
の図において、11は円管状の弁ボディで、この弁ボデ
ィ11内の長手方向中央部には凹曲面状の弁座13を形
成する堰23が突設されている。12は弁体を形成する
ダイアフラム14の表面側周縁部を取り付けるためのダ
イアフラム取付座で、弁ボディ11の側壁部11aに形
成され、このダイアフラム取付座12の内側には、堰2
3を挟んでその両側に形成される出入管部21,22に
通じる弁口21a,22aが開口している。
FIG. 1 is a front view of a diaphragm valve according to the present invention in a semi-longitudinal section, and FIG. 2 is a bottom view thereof. In these figures, reference numeral 11 denotes a tubular valve body, and a weir 23 forming a concavely curved valve seat 13 protrudes from a central portion of the valve body 11 in the longitudinal direction. Reference numeral 12 denotes a diaphragm mounting seat for mounting a surface side peripheral edge of a diaphragm 14 forming a valve body. The diaphragm mounting seat 12 is formed on a side wall 11a of the valve body 11, and inside the diaphragm mounting seat 12, a weir 2 is provided.
The valve ports 21a and 22a open to the inlet / outlet pipe portions 21 and 22 formed on both sides of the valve body 3 with the hole 3 interposed therebetween.

【0009】ダイアフラム14は、フッ素樹脂製の薄い
本体膜14aと、この本体膜14aの裏側に重合配置さ
れるゴム製の厚いバックアップ膜14bとからなるもの
で、両膜14a,14bはその中心部に取り付けられた
連結軸24によって連結されている。図3に示すよう
に、本体膜14aは、フッ素樹脂であるテフロン(登録
商標)によって厚さ1mm程度の円板状に形成されてい
て、その表面の周縁部に断面角形の環状凸部25が条設
され、この環状凸部25の内周側に環状突条部19が条
設されると共に、この環状突条部19を直径方向につな
ぐ直線状突条部20が条設されている。バックアップ膜
14bは、温度変化に強い合成ゴムによって、厚さが4
mm程度で本体膜14aよりも僅かに径大の円板状に形
成されている。バックアップ膜14bの背面には金属製
のリテーナ26が配置され、このリテーナ26とバック
アップ膜14bと本体膜14aとは連結軸24を介して
互いに回転しないよう一体的に結合される。
The diaphragm 14 is composed of a thin main body film 14a made of fluororesin and a thick backup film 14b made of rubber which is arranged on the back side of the main body film 14a. Are connected by a connection shaft 24 attached to the first shaft. As shown in FIG. 3, the main body film 14a is formed in a disk shape having a thickness of about 1 mm by Teflon (registered trademark) which is a fluororesin, and an annular convex portion 25 having a square cross section is formed on a peripheral portion of the surface. An annular ridge 19 is provided on the inner peripheral side of the annular ridge 25, and a linear ridge 20 connecting the annular ridge 19 in the diameter direction is provided. The thickness of the backup film 14b is 4
It is formed in a disk shape having a diameter of about mm and slightly larger in diameter than the main body film 14a. A metal retainer 26 is disposed on the back surface of the backup film 14b. The retainer 26, the backup film 14b, and the main film 14a are integrally connected via a connecting shaft 24 so as not to rotate with each other.

【0010】図1及び図4に示すように、ダイアフラム
取付座12の外周側には、弁操作部15側のブラケット
取付用フランジ16とボルト結合する環状台座27がダ
イアフラム取付座12の座面から所定高さ突出するよう
に周設されている。また、ダイアフラム取付座12の内
周側には上向きに突出する環状凸部28が条設され、そ
れによってこの環状凸部28の外周には環状の凹段部2
9が形成される。この場合、ダイアフラム取付座12の
座面とは、実質的に環状凸部28の上面を意味する。
As shown in FIGS. 1 and 4, on the outer peripheral side of the diaphragm mounting seat 12, an annular pedestal 27 which is bolted to the bracket mounting flange 16 on the valve operating portion 15 side is provided from the seating surface of the diaphragm mounting seat 12. It is provided so as to protrude by a predetermined height. On the inner peripheral side of the diaphragm mounting seat 12, an upwardly protruding annular convex portion 28 is provided.
9 is formed. In this case, the bearing surface of the diaphragm mounting seat 12 substantially means the upper surface of the annular projection 28.

【0011】また図4に示すように、ブラケット取付用
フランジ16にはその内周縁部に環状のダイアフラム押
え部30が当該フランジ16と一体に突出形成され、し
かしてこのダイアフラム押え部30の下端押え面30a
は、環状台座27に当接するブラケット取付用フランジ
16の当接面16aから下方へ所定長さα突出した位置
にある。このようにダイアフラム押え部30をフランジ
16の当接面16aから下方へ突出した環状体に形成す
ることにより、ダイアフラム14の周縁部を有効に圧縮
することができる。この押え部30の突出長さαは、所
定厚みを有するダイアフラム14の周縁部を図示のよう
にダイアフラム取付座12に嵌め入れた状態で、環状突
条部19が環状凸部28上に十分に密着するように当該
周縁部を加圧して圧縮できる長さに設定されるもので、
この設定にあたっては、ダイアフラム取付座12の環状
突条部19からのダイアフラム取付座12の突出高さ、
ダイアフラム14の厚さ及びその弾性力を考慮する。
As shown in FIG. 4, an annular diaphragm pressing portion 30 is formed integrally with the bracket mounting flange 16 at its inner peripheral edge so as to protrude integrally with the flange 16, and the lower end pressing of the diaphragm pressing portion 30 is performed. Surface 30a
Is located at a position protruding downward by a predetermined length α from the contact surface 16 a of the bracket mounting flange 16 that contacts the annular pedestal 27. By forming the diaphragm pressing portion 30 in an annular body protruding downward from the contact surface 16a of the flange 16 in this manner, the peripheral edge of the diaphragm 14 can be effectively compressed. The projecting length α of the pressing portion 30 is such that the annular ridge 19 is sufficiently positioned on the annular convex portion 28 in a state where the peripheral portion of the diaphragm 14 having a predetermined thickness is fitted into the diaphragm mounting seat 12 as shown in the figure. It is set to a length that can press and compress the peripheral part so that it closely adheres,
In this setting, the projecting height of the diaphragm mounting seat 12 from the annular ridge portion 19 of the diaphragm mounting seat 12,
Consider the thickness of the diaphragm 14 and its elastic force.

【0012】弁操作部15は、図1に示すように、下端
部にフランジ16を形成したブラケット18に連結され
たエアシリンダからなるもので、このシリンダ15は、
シリンダ本体33とピストン(図示省略)とこのピスト
ンと一体に軸方向に往復移動するピストンロッド35と
によって構成され、このピストンロッド35がダイアフ
ラム弁の作動軸を形成する。このピストンロッド(作動
軸)15bの下端部がリテーナ26に連結され、ピスト
ンロッド35の軸方向進退駆動によって、ダイアフラム
14が、図1の実線図示のように弁座13に接した閉弁
形態と、同図の仮想線図示のように弁座13から離間し
た開弁形態とに形態変換する。
As shown in FIG. 1, the valve operating section 15 is composed of an air cylinder connected to a bracket 18 having a flange 16 formed at a lower end thereof.
It is composed of a cylinder body 33, a piston (not shown), and a piston rod 35 that reciprocates in the axial direction integrally with the piston. The piston rod 35 forms an operating shaft of the diaphragm valve. The lower end of the piston rod (operating shaft) 15b is connected to a retainer 26, and the piston rod 35 is driven in the axial direction to drive the diaphragm 14 into contact with the valve seat 13 as shown by the solid line in FIG. As shown by the imaginary line in the figure, the form is changed to a valve-open form separated from the valve seat 13.

【0013】ダイアフラム14を弁ボディ11のダイア
フラム取付座12に取り付けるには、先ず、ブラケット
18が弁ボディ11から取り外された状態で、外周が環
状台座27によって囲繞されているダイアフラム取付座
12にダイアフラム14を嵌め入れ、図4に示すよう
に、本体膜14a側の環状凸部25を取付座12側の環
状凸部28の外周に形成される凹段部29に係嵌させ
て、環状突条部19を取付座12の環状凸部28に当接
させると共に、直線状突条部20を弁座13に当接させ
る。この状態から、ブラケット18のフランジ16を環
状台座27上に載せながら、ダイアフラム押え部30の
下端部を、バックアップ膜14bの背面側に形成された
環状溝37に突入係合させ、そして環状台座27のねじ
孔(図示せず)からフランジ16のねじ孔(図示せず)
にボルト17(図2参照)をねじ込んで締め付け、フラ
ンジ16を環状台座27にボルト結合すればよい。これ
によって、ダイアフラム押え部30がダイアフラム14
の周縁部をその全周にわたり一様に圧縮して、本体膜1
4aの環状突条部19をダイアフラム取付座12の環状
凸部29に押し付け、本体膜14aと取付座12の環状
凸部29との間を完全にシールすることができる。
To attach the diaphragm 14 to the diaphragm mounting seat 12 of the valve body 11, first, the diaphragm 18 is attached to the diaphragm mounting seat 12 whose outer periphery is surrounded by the annular pedestal 27 with the bracket 18 removed from the valve body 11. 4, the annular projection 25 on the main body film 14a side is engaged with a concave step 29 formed on the outer periphery of the annular projection 28 on the mounting seat 12 side as shown in FIG. The portion 19 is brought into contact with the annular projection 28 of the mounting seat 12, and the linear ridge 20 is brought into contact with the valve seat 13. In this state, while the flange 16 of the bracket 18 is placed on the annular pedestal 27, the lower end of the diaphragm pressing portion 30 is pushed into and engaged with the annular groove 37 formed on the back side of the backup film 14b. Screw hole (not shown) to screw hole (not shown) of flange 16
Then, a bolt 17 (see FIG. 2) may be screwed in and tightened, and the flange 16 may be bolted to the annular pedestal 27. As a result, the diaphragm holding portion 30 is
Of the main membrane 1 is compressed uniformly over its entire circumference.
The annular ridge 19 of 4a is pressed against the annular projection 29 of the diaphragm mounting seat 12, and the space between the main body film 14a and the annular projection 29 of the mounting seat 12 can be completely sealed.

【0014】次に、上記のように構成のダイアフラム弁
に設けられる漏洩検知センサーについて説明すると、こ
の漏洩検知センサーは、図1及び図4に示すように、ブ
ラケット18の所要部に設けた開口部31に挿入配備さ
れるセンサー本体1と、このセンサー本体1からブラケ
ット18の外側に引き出して設けられる検知回路2とか
ら構成される。また、ダイアフラム14のバックアップ
膜14bには漏洩報せ孔10を設けている。
Next, a description will be given of a leak detection sensor provided in the diaphragm valve constructed as described above. The leak detection sensor is provided with an opening provided in a required portion of the bracket 18 as shown in FIGS. The sensor main body 1 is inserted into the sensor main body 31 and a detection circuit 2 is provided to be drawn out of the sensor main body 1 to the outside of the bracket 18. Further, a leak reporting hole 10 is provided in the backup film 14b of the diaphragm 14.

【0015】センサー本体1は、図4に示すように、一
側面部が開口した箱状のケーシング本体3と、このケー
シング本体3の開口面側に配設された浸透膜4とからな
る密閉ケーシング5の内部に、強電解質を封入すると共
に、陽極と陰極の一対の電極a,bを対向配置すること
によって構成される。浸透膜4は、密閉ケーシング5の
外部からその内部に液体を通過させるが、このケーシン
グ5の内部に入った液体を外部には漏出させないように
ケーシング本体3の開口面側に配設された膜である。
As shown in FIG. 4, the sensor main body 1 is a closed casing comprising a box-shaped casing main body 3 having one side open and a permeable membrane 4 disposed on the opening side of the casing main body 3. 5, a strong electrolyte is sealed therein, and a pair of anode and cathode electrodes a and b are arranged to face each other. The permeable membrane 4 allows the liquid to pass from the outside of the closed casing 5 to the inside thereof, but is provided on the opening side of the casing main body 3 so as to prevent the liquid entering the inside of the casing 5 from leaking outside. It is.

【0016】センサー本体1の密閉ケーシング5内に封
入する強電解質としては、NaCl(食塩等として使用
される塩化ナトリウム)を使用するが、この他に、Na
OH(カセイソーダ、水酸化ナトリウム)等も使用可能
である。検知回路2は、図4に示すように、密閉ケーシ
ング5内に配設された電極a,bと、電池からなる電源
6と、電流計7と、ランプ8とによって形成される電気
回路である。
As the strong electrolyte sealed in the closed casing 5 of the sensor body 1, NaCl (sodium chloride used as salt or the like) is used.
OH (caustic soda, sodium hydroxide) and the like can also be used. As shown in FIG. 4, the detection circuit 2 is an electric circuit formed by electrodes a and b disposed in a closed casing 5, a power supply 6 composed of a battery, an ammeter 7, and a lamp 8. .

【0017】このセンサー本体1をブラケット18の開
口部31に取り付けるにあたっては、浸透膜4がブラケ
ット18の内部側に位置する状態、即ち浸透膜4がダイ
アフラム14の背面側に漏洩した液体と接触するように
位置させた状態で、ケーシング本体3をシール材9を介
して開口部31に取り付け固定する。
When attaching the sensor body 1 to the opening 31 of the bracket 18, the osmosis membrane 4 is located inside the bracket 18, that is, the osmosis membrane 4 comes into contact with the liquid leaking to the back side of the diaphragm 14. In such a state, the casing body 3 is attached and fixed to the opening 31 via the sealing material 9.

【0018】上記のように構成される漏洩検知センサー
において、いま、このダイアフラム弁が純水ラインに設
置されているものとした場合に、ダイアフラム14の本
体膜14aが破損すると、本体膜14a表面の破損箇所
からその裏面側へ漏れ出た水(純水)は、本体膜14a
裏面とバックアップ膜14b表面との間の隙間に浸入し
て、バックアップ膜14bの漏洩報せ孔10を通り、ブ
ラケット18の内部、即ちダイアフラム14の背面側空
間部Sに流入して溜まる。この空間部Sに溜まった漏洩
水は、センサー本体1の密閉ケーシング5に配設されて
いる浸透膜4を通過して、密閉ケーシング5内部のNa
Clと混和する。こうして漏洩水がNaClと混和する
と、水の誘電率が大きいため、NaClは、Naイオン
(+)とClイオン(−)とに解離する、つまり電離す
る。しかも、NaClは、強電解質であることから、水
中では完全解離(電離しない分子はない)する。
In the leak detection sensor configured as described above, if the diaphragm valve is installed in a pure water line and the main membrane 14a of the diaphragm 14 is damaged, the surface of the main membrane 14a is damaged. Water (pure water) leaking from the damaged portion to the back side thereof is removed from the main body film 14a.
It penetrates into the gap between the back surface and the front surface of the backup film 14b, passes through the leak reporting hole 10 of the backup film 14b, and flows into the inside of the bracket 18, ie, the space S on the back surface side of the diaphragm 14, and accumulates. The leaked water accumulated in the space S passes through the permeable membrane 4 provided in the closed casing 5 of the sensor main body 1 and passes through the Na inside the closed casing 5.
Mix with Cl. When the leaked water is mixed with NaCl, the dielectric constant of the water is large, so that NaCl is dissociated into Na ions (+) and Cl ions (-), that is, it is ionized. Moreover, since NaCl is a strong electrolyte, it completely dissociates in water (there is no molecule that does not ionize).

【0019】上記のようにセンサー本体1の密閉ケーシ
ング5内部に浸入した漏洩水の中でNaClが電離する
と、その水の導電率が高まって、ケーシング5内の両電
極a,b間が導通状態となる。両電極a,bの導通状態
はランプ8の点灯によって検知され、またその導通の度
合いは電流計7の表示によって確認される。従って、ダ
イアフラム14の本体膜14aが破損していることを、
この漏洩検知センサーによって知ることができる。
As described above, when NaCl is ionized in the leaked water that has entered the inside of the closed casing 5 of the sensor body 1, the conductivity of the water increases, and the two electrodes a and b in the casing 5 are in a conductive state. Becomes The conduction state of the two electrodes a and b is detected by the lighting of the lamp 8, and the degree of conduction is confirmed by the display of the ammeter 7. Therefore, it is determined that the main body film 14a of the diaphragm 14 is damaged.
It can be known by this leak detection sensor.

【0020】この漏洩検知センサーによれば、純水のよ
うに導電性の極めて悪い液体の場合でも、本体膜14a
からの漏洩を確実に検知することができる。また、ダイ
アフラム14が、フッ素樹脂製の薄い本体膜14aと、
これの裏側に重合配置されるゴム製の厚いバックアップ
膜14bとからなるものであって、バックアップ膜14
bに漏洩報せ孔10を設けることによって、本体膜14
aの破損箇所から漏れ出た水は、この漏洩報せ孔10を
通って直ちにダイアフラム14の背面側に出てきて、セ
ンサー本体1に接するようになるから、本体膜14aが
破損していることを迅速に知ることができる。
According to this leak detection sensor, even in the case of a very poorly conductive liquid such as pure water, the main body film 14a
Leakage from the vehicle can be reliably detected. Further, the diaphragm 14 includes a thin main body film 14a made of fluororesin,
A thick backup film 14b made of rubber and arranged on the back side of the backing film 14b.
b, the main body film 14 is provided.
The water leaking out from the damaged portion of a is immediately passed through the leak notification hole 10 to the rear side of the diaphragm 14 and comes into contact with the sensor main body 1, so that the main body membrane 14a is damaged. You can know quickly.

【0021】この実施形態では、純水ラインにおけるダ
イアフラム14での純水の漏洩検知について説明した
が、この漏洩検知センサーは、純水に限らず、純水以外
の液体の漏洩も検知することができるものである。
In this embodiment, detection of leakage of pure water at the diaphragm 14 in the pure water line has been described. However, this leakage detection sensor is not limited to pure water, and can also detect leakage of liquids other than pure water. You can do it.

【0022】[0022]

【発明の効果】請求項1に係る発明の漏洩検知センサー
によれば、ダイアフラムが破損した時は、その背面側へ
漏れ出た液体がセンサー本体の浸透膜を通ってケーシン
グ内部の強電解質と混和することにより、その強電解質
が電離して、その液体の導電率が高まるから、ケーシン
グ内の両電極間の導通状態を検知することによって、ダ
イアフラムの破損を知ることができ、従ってダイアフラ
ムをその寿命まで出来るだけ長く使用することができ
る。特に、この漏洩検知センサーによれば、純水のよう
に導電性の極めて悪い液体の場合でも、本体膜の破損に
よる液体の漏洩を確実に検知することができる。
According to the leak detecting sensor of the first aspect of the present invention, when the diaphragm is damaged, the liquid leaking to the back side of the diaphragm is mixed with the strong electrolyte inside the casing through the permeable membrane of the sensor body. By doing so, the strong electrolyte is ionized and the conductivity of the liquid increases, so that by detecting the conduction state between the two electrodes in the casing, it is possible to know the breakage of the diaphragm, and thus to determine the life of the diaphragm. Can be used as long as possible. In particular, according to this leak detection sensor, even in the case of a very poorly conductive liquid such as pure water, it is possible to reliably detect the leakage of the liquid due to the breakage of the main body film.

【0023】請求項2に記載のように、ダイアフラム
が、フッ素樹脂製の薄い本体膜と、この裏側に重合配置
されるゴム製の厚いバックアップ膜とからなるものであ
って、バックアップ膜に漏洩報せ孔を設けることによっ
て、本体膜が破損していることを迅速に知ることができ
る。
According to a second aspect of the present invention, the diaphragm is composed of a thin main body film made of a fluororesin and a thick backup film made of a rubber which is arranged on the back side of the main body. By providing the holes, it is possible to quickly know that the main membrane is damaged.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明に係る漏洩検知センサーを備えたダイ
アフラム弁の半断面正面図である。
FIG. 1 is a half sectional front view of a diaphragm valve provided with a leak detection sensor according to the present invention.

【図2】 図1に示すダイアフラム弁の底面図である。FIG. 2 is a bottom view of the diaphragm valve shown in FIG.

【図3】 (A)はダイアフラムの正面図、(B)は
(A)のX−X線断面図である。
3A is a front view of a diaphragm, and FIG. 3B is a cross-sectional view taken along line XX of FIG. 3A.

【図4】 図1に示すダイアフラム弁の一部拡大断面図
である。
FIG. 4 is a partially enlarged cross-sectional view of the diaphragm valve shown in FIG.

【符号の説明】[Explanation of symbols]

1 センサー本体 2 検知回路 3 ケーシング本体 4 浸透膜 5 密閉ケーシング 10 漏洩報せ孔 11 弁ボディ 13 弁座 14 ダイアフラム 15 弁操作部 a,b 電極 DESCRIPTION OF SYMBOLS 1 Sensor main body 2 Detection circuit 3 Casing main body 4 Permeation membrane 5 Hermetic casing 10 Leakage reporting hole 11 Valve body 13 Valve seat 14 Diaphragm 15 Valve operation part a, b Electrode

─────────────────────────────────────────────────────
────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成12年5月12日(2000.5.1
2)
[Submission Date] May 12, 2000 (2000.5.1)
2)

【手続補正1】[Procedure amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0012[Correction target item name] 0012

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0012】弁操作部15は、図1に示すように、下端
部にフランジ16を形成したブラケット18に連結され
たエアシリンダからなるもので、このシリンダ15は、
シリンダ本体33とピストン(図示省略)とこのピスト
ンと一体に軸方向に往復移動するピストンロッド35と
によって構成され、このピストンロッド35がダイアフ
ラム弁の作動軸を形成する。このピストンロッド(作動
軸)35の下端部がリテーナ26に連結され、ピストン
ロッド35の軸方向進退駆動によって、ダイアフラム1
4が、図1の実線図示のように弁座13に接した閉弁形
態と、同図の仮想線図示のように弁座13から離間した
開弁形態とに形態変換する。
As shown in FIG. 1, the valve operating section 15 is composed of an air cylinder connected to a bracket 18 having a flange 16 formed at a lower end thereof.
It is composed of a cylinder body 33, a piston (not shown), and a piston rod 35 that reciprocates in the axial direction integrally with the piston. The piston rod 35 forms an operating shaft of the diaphragm valve. The lower end of this piston rod (operating shaft) 35 is connected to the retainer 26, and the diaphragm 1
4 changes its form into a valve-closed form in contact with the valve seat 13 as shown by the solid line in FIG. 1 and a valve-opened form separated from the valve seat 13 as shown by the phantom line in FIG.

【手続補正2】[Procedure amendment 2]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0013[Correction target item name] 0013

【補正方法】変更[Correction method] Change

【補正内容】[Correction contents]

【0013】ダイアフラム14を弁ボディ11のダイア
フラム取付座12に取り付けるには、先ず、ブラケット
18が弁ボディ11から取り外された状態で、外周が環
状台座27によって囲繞されているダイアフラム取付座
12にダイアフラム14を嵌め入れ、図4に示すよう
に、本体膜14a側の環状凸部25を取付座12側の環
状凸部28の外周に形成される凹段部29に係嵌させ
て、環状突条部19を取付座12の環状凸部28に当接
させると共に、直線状突条部20を弁座13に当接させ
る。この状態から、ブラケット18のフランジ16を環
状台座27上に載せながら、ダイアフラム押え部30の
下端部を、バックアップ膜14bの背面側に形成された
環状溝37に突入係合させ、そして環状台座27のねじ
孔(図示せず)からフランジ16のねじ孔(図示せず)
にボルト17(図2参照)をねじ込んで締め付け、フラ
ンジ16を環状台座27にボルト結合すればよい。これ
によって、ダイアフラム押え部30がダイアフラム14
の周縁部をその全周にわたり一様に圧縮して、本体膜1
4aの環状突条部19をダイアフラム取付座12の環状
凸部28に押し付け、本体膜14aと取付座12の環状
凸部28との間を完全にシールすることができる。
To attach the diaphragm 14 to the diaphragm mounting seat 12 of the valve body 11, first, the diaphragm 18 is attached to the diaphragm mounting seat 12 whose outer periphery is surrounded by the annular pedestal 27 with the bracket 18 removed from the valve body 11. 4, the annular projection 25 on the main body film 14a side is engaged with a concave step 29 formed on the outer periphery of the annular projection 28 on the mounting seat 12 side as shown in FIG. The portion 19 is brought into contact with the annular projection 28 of the mounting seat 12, and the linear ridge 20 is brought into contact with the valve seat 13. In this state, while the flange 16 of the bracket 18 is placed on the annular pedestal 27, the lower end of the diaphragm pressing portion 30 is pushed into and engaged with the annular groove 37 formed on the back side of the backup film 14b. Screw hole (not shown) to screw hole (not shown) of flange 16
Then, a bolt 17 (see FIG. 2) may be screwed in and tightened, and the flange 16 may be bolted to the annular pedestal 27. As a result, the diaphragm holding portion 30 is
Of the main membrane 1 is compressed uniformly over its entire circumference.
The annular ridge 19 of 4a is pressed against the annular projection 28 of the diaphragm mounting seat 12, and the space between the main body film 14a and the annular projection 28 of the mounting seat 12 can be completely sealed.

フロントページの続き (72)発明者 立石 透 岡山県津山市草加部字松尾峪1170番地9 東洋ステンレス工業株式会社内 Fターム(参考) 2G067 AA37 BB11 CC01 DD22 DD23 3H065 AA08 BB14 BB24 BC09 Continuation of the front page (72) Inventor Toru Tateishi 1170-9, Matsuoyu, Sokabe, Tsuyama-shi, Okayama Prefecture F-term in Toyo Stainless Steel Corporation (reference) 2G067 AA37 BB11 CC01 DD22 DD23 3H065 AA08 BB14 BB24 BC09

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 弁ボディ内の弁座と対向する位置に、弁
体を形成するダイアフラムが、接液する表面側と背面側
とを遮断するように取り付けられ、その背面側中央部に
連結された作動軸の軸方向進退駆動により、ダイアフラ
ムの表面側が弁座に対し離接して流路を開閉するダイア
フラム弁において、外部から内部に液体を通すが内部か
ら外部には通さない浸透膜を一部に配して形成される密
閉ケーシングの内部に強電解質を封入し且つ一対の電極
を対向配置してなるセンサー本体を、前記浸透膜がダイ
アフラムの背面側に漏れ出た液体と接触する位置に設け
ると共に、前記密閉ケーシング内の両電極間の導通状態
を検知する検知回路を設けてなるダイアフラム弁の漏洩
検知センサー。
1. A diaphragm forming a valve body is mounted at a position facing a valve seat in a valve body so as to shut off a front side and a rear side in contact with a liquid, and is connected to a central part on the rear side. In the diaphragm valve, the front side of the diaphragm moves away from and closes the valve seat to open and close the flow path by the axial movement of the operating shaft, and a part of the permeable membrane that allows liquid to pass from inside to outside but does not pass from inside to outside. A sensor body in which a strong electrolyte is sealed in a closed casing formed by disposing a pair of electrodes and opposed to each other is provided at a position where the permeable membrane comes into contact with the liquid leaking to the back side of the diaphragm. A leakage detection sensor for a diaphragm valve, further comprising a detection circuit for detecting a conduction state between both electrodes in the closed casing.
【請求項2】 ダイアフラムが、フッ素樹脂製の薄い本
体膜と、これの裏側に重合配置されるゴム製の厚いバッ
クアップ膜とからなり、バックアップ膜に漏洩報せ孔を
設けてなる請求項1に記載のダイアフラムの漏洩検知セ
ンサー。
2. The diaphragm according to claim 1, wherein the diaphragm comprises a thin main body film made of fluororesin and a thick backup film made of rubber which is arranged on the back side of the main film, and a leak reporting hole is provided in the backup film. Diaphragm leak detection sensor.
JP2000137064A 2000-03-31 2000-05-10 Diaphragm valve leak detection sensor Expired - Lifetime JP4427164B2 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2000137064A JP4427164B2 (en) 2000-05-10 2000-05-10 Diaphragm valve leak detection sensor
US09/788,839 US6508266B2 (en) 2000-03-31 2001-02-20 Diaphragm valve
DE2001633677 DE60133677T2 (en) 2000-03-31 2001-02-26 diaphragm valve
DE2001612639 DE60112639T2 (en) 2000-03-31 2001-02-26 diaphragm valve
EP20010104405 EP1138989B1 (en) 2000-03-31 2001-02-26 Diaphragm valve
EP20040015521 EP1462693B1 (en) 2000-03-31 2001-02-26 Diaphragm valve
CNB011121963A CN1208567C (en) 2000-03-31 2001-03-30 Diaphragm valve
HK02101226.2A HK1039976B (en) 2000-03-31 2002-02-20 Diaphragm valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000137064A JP4427164B2 (en) 2000-05-10 2000-05-10 Diaphragm valve leak detection sensor

Publications (2)

Publication Number Publication Date
JP2001317658A true JP2001317658A (en) 2001-11-16
JP4427164B2 JP4427164B2 (en) 2010-03-03

Family

ID=18644904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000137064A Expired - Lifetime JP4427164B2 (en) 2000-03-31 2000-05-10 Diaphragm valve leak detection sensor

Country Status (1)

Country Link
JP (1) JP4427164B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010121689A (en) * 2008-11-19 2010-06-03 Tokyo Electron Ltd Diaphragm valve
JP2016509182A (en) * 2013-03-08 2016-03-24 ゲオルク フィッシャー ローアライトゥングスズュステーメ アクチェンゲゼルシャフトGeorg Fischer Rohrleitungssysteme AG Valve with leak indicator
WO2020003799A1 (en) * 2018-06-30 2020-01-02 株式会社フジキン Diaphragm valve and monitoring method for same

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010121689A (en) * 2008-11-19 2010-06-03 Tokyo Electron Ltd Diaphragm valve
JP2016509182A (en) * 2013-03-08 2016-03-24 ゲオルク フィッシャー ローアライトゥングスズュステーメ アクチェンゲゼルシャフトGeorg Fischer Rohrleitungssysteme AG Valve with leak indicator
WO2020003799A1 (en) * 2018-06-30 2020-01-02 株式会社フジキン Diaphragm valve and monitoring method for same
TWI701405B (en) * 2018-06-30 2020-08-11 日商富士金股份有限公司 Diaphragm valve and its monitoring method
CN112334696A (en) * 2018-06-30 2021-02-05 株式会社富士金 Diaphragm valve and monitoring method thereof
JPWO2020003799A1 (en) * 2018-06-30 2021-08-02 株式会社フジキン Diaphragm valve and its monitoring method
US20210262576A1 (en) * 2018-06-30 2021-08-26 Fujikin Incorporated Diaphragm valve and monitoring method thereof
JP7300187B2 (en) 2018-06-30 2023-06-29 株式会社フジキン Diaphragm valve and its monitoring method
US11927280B2 (en) 2018-06-30 2024-03-12 Fujikin Incorporated Diaphragm valve and monitoring method thereof with improved leak detection

Also Published As

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