JP2001217217A - Method and device for treatment by using treating liquid and method of manufacturing semiconductor device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and device for treatment by using treating liquids by which the problems raised by the supply of a wrong treating liquid can be prevented surely, and appropriately exchanging one treating liquid with another at the time of performing treatment by using the treating liquids, and, in addition, management can be performed by utilizing the data about the exchange of the treating liquids, and a method of manufacturing semiconductor device. SOLUTION: In this method of treating a work (semiconductor wafer, etc.), by using two or more kinds of treating liquids 1 and 2, (1) the suitability of an exchange liquids is decided by recognizing identification codes 21 and 22, such as bar codes, which identify treating solutions and comparing the codes 21 and 22 with registered data. In addition, the treating liquids are managed based on the history obtained at the time of recognizing the identification codes 21 and 22. (2) A device for treatment is at least provided with recognizing means 31 and 32 which recognize the codes 21 and 22, a decision means 6 which decides the suitability of the exchanged treating liquid by comparing the recognized codes with the registered data, and a history storing means which stores the history obtained at the time of recognizing the identification codes. A method of manufacturing semiconductor device uses the method and device of (1).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a processing method and a processing apparatus using a processing solution, and a method for manufacturing a semiconductor device. INDUSTRIAL APPLICABILITY The present invention can be widely used as a processing method and a processing apparatus for performing processing in various fields using various processing liquids, and a method for manufacturing various semiconductor devices including at least a step of performing processing using such a processing method. .

[0002]

2. Description of the Related Art Conventionally, when an object to be processed such as a semiconductor wafer is treated with a treatment liquid such as a chemical solution in the case of manufacturing a semiconductor device or the like, it may be necessary to replace the treatment liquid such as a chemical solution. For example, when a processing liquid such as a chemical liquid is used up or becomes insufficient, it is necessary to newly apply the chemical liquid or the like to the process system and replace it with a new processing liquid. When supplying a processing liquid such as a chemical solution at the time of such a processing liquid exchange or the like, in the related art, the processing liquid is supplied by manual visual confirmation. For example, in general, when a can containing chemicals etc. is empty, replace it with a new can.However, at the time of this exchange, the person performing the replacement work checks the name etc. written on the can. And exchange them. However, in this method, there is a concern that the shape of the can is almost the same, and there is no doubt that there is a concern that the can is mistakenly replaced with a can of a different chemical solution or the like.

[0003] If processing is performed by replacing a can of chemicals or the like by mistake, the processing is performed with the wrong processing liquid, and the object to be processed, such as a semiconductor wafer, in an apparatus such as a device manufacturing apparatus is all defective. There is a risk of becoming. Conventionally, as a result of relying on manual work and visual confirmation as described above, there has been no adoption of a system that detects erroneous supply of a chemical solution or the like and does not operate (stops) equipment or the like if there is an erroneous supply. The aforementioned concerns remained.

[0004] Further, in the prior art, as described above,
Since the chemicals and the like were exchanged by visual confirmation, data on the exchange of the processing liquids such as the chemicals was not accumulated, and a technique using this data could not be conceived.

[0005]

DISCLOSURE OF THE INVENTION The present invention has been made in view of the above circumstances, and in processing with a processing solution, it is possible to reliably perform appropriate replacement of the processing solution and to produce defective products by supplying different types of chemicals. And a processing method using a processing liquid, and a method of manufacturing a semiconductor device, in which various problems associated with erroneous supply of the processing liquid are prevented beforehand, and management using data of the processing liquid exchange is enabled. The purpose is to provide.

[0006]

A processing method using a processing liquid according to the present invention is a processing method for processing an object to be processed using the processing liquid, wherein a new processing liquid is applied such as replacing a can of the processing liquid. When performing, recognize the identification code that identifies the processing solution, compare it with the registered data and judge the suitability of the replaced processing solution, thereby preventing the supply of different types of processing solution when supplying the processing solution In addition, the management of the processing liquid is performed based on the history at the time of recognition of the identification code.

A processing apparatus using a processing liquid according to the present invention is a processing apparatus for processing an object to be processed using the processing liquid, the processing liquid being supplied when a new processing liquid is applied such as replacing a can of the processing liquid. Recognition means for recognizing the identification code to be identified, determination means for comparing the data registered with the identification code to determine whether the exchanged processing liquid is appropriate, and history storage means for storing the history at the time of recognition of the identification code And at least the following.

According to a method of manufacturing a semiconductor device according to the present invention, there is provided a method of manufacturing a semiconductor device including a processing step of processing an object to be processed by using a processing liquid. When performing the processing liquid supply, the identification code for identifying the processing liquid is recognized, and the identification code is compared with the registered data to determine whether the replaced processing liquid is appropriate. In addition, the processing liquid is managed based on the history at the time of recognition of the identification code.

According to the present invention, an identification code (for example, a bar code attached to a chemical solution can) for identifying a processing solution is recognized, and this is compared with registered data to identify a replacement processing solution. Judgment as to whether or not (in the case of can replacement, whether or not the can has been replaced with an appropriate can) can reliably prevent the supply of different types of processing liquid when supplying the processing liquid, and the history of recognition of the identification code of the processing liquid supply. Thus, the processing liquid can be managed.

[0010] Japanese Patent No. 263633 discloses an invention in which the processing in two or more containers provided with a recognition code is controlled by a processing unit in accordance with the recognition of the code. Although this is an excellent technique for performing a plurality of processes on a wafer, it is a control technology for a series of processes, and does not use the history at the time of code recognition to manage the processing liquid.

Japanese Patent Application Laid-Open No. 9-225008 discloses a liquid medicine dispensing apparatus capable of accurately and repeatedly dispensing complex prescriptions different for each patient, and affixing a label such as a bar code to the dispensing container. Although there is described a technique for performing reading by using a method, this is a technique for preparing a medical drug, and is not a technique relating to processing with a processing liquid.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The embodiments of the present invention will be further described below, and preferred specific examples will be described with reference to the drawings. Needless to say, the present invention is not limited to the illustrated embodiment.

In each invention, it is a preferable embodiment that the identification code is a bar code. The present invention can be accurately and easily implemented using a bar code reader such as an optical reader. It is also a preferable embodiment that the identification code is attached to the processing liquid container. The treatment liquid can be various chemical liquids. For example, it can be a resist stripping liquid or a cleaning liquid. When the processing liquids are zero or short, for example, when the cans storing the processing liquids are emptied, it can be preferably replaced with a new can containing the corresponding processing liquids. At this time, a form in which an identification code such as a barcode is attached to a can which is a container of the processing liquid is preferable as a form when the processing liquid is replaced with the can.

According to the present invention, when a processing solution such as a chemical solution is exchanged, it is determined whether or not the exchanged processing solution is correct by using a barcode reader and comparing it with data registered in advance. It can be preferably implemented in a form in which the supply of different kinds of processing liquids at the time of supply is prevented. Further, the present invention is embodied in a system that retains a history when reading recorded data such as barcode data, and the history at the time of recognizing the identification code,
Performing various process controls is a preferred mode. Based on this history, for example, the time to replace the next chemical, etc.
And it becomes possible to grasp appropriately. In addition, it is possible to grasp the current remaining amount of the processing liquid such as the chemical liquid of the processing liquid, and the usage amount per month, for example. In addition, for example, the date and time of replacement can be recorded, and based on this, the amount of processing liquid used in a specific period can be ascertained, and it becomes possible to reduce excess inventory.

Hereinafter, specific preferred embodiments of the present invention will be described. Here, a case where a semiconductor wafer is treated with a chemical solution will be described.

Embodiment 1 FIG. 1 shows a configuration of a chemical solution supply system according to this embodiment.
And FIG. 2 showing a flowchart. Here, an example will be described in which each of the chemical solutions 1 and 2 is exchanged. In this embodiment, in particular, the container 41 (can) (container 42) storing the chemical 1 (chemical 2) is stored.
This is an example in which each (can)) is replaced with a new liquid. Here, the chemical solution 1 is, for example, a resist stripping solution, and the chemical solution 2 is
For example, a cleaning liquid.

Referring to FIG. In the present embodiment, a semiconductor wafer as a processing target is processed, and a first processing liquid 1 (here, a processing liquid, which is referred to as a chemical liquid 1) and a second processing liquid 2 (shown in FIG. 1) shown in FIG. In this case, the chemical liquid for processing (hereinafter referred to as chemical liquid 2) is exchanged independently.

Each of the processing liquids 1 and 2 has an identification code 21 and 22. The identification code 21 of the first processing liquid 1 is defined as a first identification code, and the identification code 22 of the second processing liquid 2 is defined as a second identification code. Each of the identification codes 21 and 22 is a bar code in this example, and is attached to each of the processing liquids 1 and 2. Identification code 2 for identifying such processing solutions 1 and 2
In this example, recognition means 31 and 32 for reading the identification codes 21 and 22 are provided as recognition means for recognizing the processing liquids 1 and 22, respectively. That is, here, the processing solution 1
Recognition means 31 (referred to as first recognition means 31) for reading the identification code 21 of the processing liquid, and recognition means 32 (referred to as second recognition means 32) for reading the identification code 22 of the processing liquid 2. 31, 32 are used. In this example, the identification code 2
Recognition means 31 and 32 are bar code readers, corresponding to the fact that 1 and 22 are bar codes.

In the present embodiment, the bar codes as the identification codes 21 and 22 are provided on the surfaces of the first container 41 (can 1) and the second container 42 (can 2) in which the respective processing liquids 1 and 2 are stored. It is attached to. A bar code reader, which is the recognition means 31, 32, reads each identification code 21, 22 (bar code) to obtain data.

The case where the first processing liquid 1 (chemical liquid 1) is replaced with a new liquid will be described below. Here, the processing liquid 1 (chemical solution 1) is exchanged for each new container 41 (can 1). At this time, the identification code 21 (bar code) attached to the new container 41 (can 1) is recognized. The reading means 31 (bar code reader) reads the identification data 51 (bar code data) of the read identification code 21 (bar code) and sends it to the judging means 6 for judging whether or not the treatment liquid replacement is appropriate. In the present embodiment, a chemical solution supply sequencer is provided, and processing solution exchange data is registered in the chemical solution supply sequencer, and this constitutes the determination means 6. The chemical supply sequencer performs data registration and determination of suitability. That is, the data registered in the chemical supply sequencer is compared with the read identification data 51 to determine whether the exchanged processing liquid (container) is appropriate. Is determined.

When the second processing liquid 2 (chemical liquid 2) is replaced with a new liquid, the new container 42 to be replaced is similarly replaced.
The recognition means 32 (bar code reader) reads the identification code 22 (bar code) attached to the (can 2), and the identification data 52 of the read identification code 22 (bar code).
The (bar code data) is sent to the chemical solution supply sequencer, which is the judging means 6 for judging the suitability of the replacement of the processing solution, and the suitability of the replaced processing solution (container) is determined in the same manner as described above.

In FIG. 1, reference numeral 71 denotes a warning means, in which a buzzer is used. This serves as a warning when the processing liquid replacement is not appropriate.For example, in the case where the registered data and the read identification data are not the same and a chemical solution supply signal is issued, a buzzer is generated as an error. I made it sound. Reference numeral 72 denotes a supply start switch,
And a buzzer (warning means) reset switch.

In this embodiment, a processing liquid 1 (chemical liquid 1) supply enable signal 91 and a processing liquid 2 are supplied to the equipment body sequencer 8 from the chemical liquid supply sequencer serving as the judgment means 6 (data registration unit).
A (chemical liquid 2) supply enable signal 92, a processing liquid 1 (chemical liquid 1) supply start signal 93, a processing liquid 2 (chemical liquid 2) supply start signal 94, and the like are sent. Further, a signal 95 indicating that the processing liquid 1 (chemical liquid 1) is being supplied and a signal 96 indicating that the processing liquid 2 (chemical liquid 2) is being supplied are sent from the equipment body sequencer 8 to the chemical liquid supply sequencer.

Further, in the present embodiment, the chemical liquid supply sequencer also serves as a history storage means for storing the history at the time of identification code recognition. The read identification data (barcode data) is stored here. The identification data (barcode data) may be stored in the equipment sequencer 8 instead of the chemical supply sequencer. As described above, in this embodiment, the system is configured to be able to grasp the current remaining amount of the processing liquid such as the chemical liquid and the usage amount per month, for example, by retaining the history when the barcode data is read. Thus, various processes can be managed based on the history at the time of identification code recognition. For example, as an example of the content of the history, "'00 .1.1AM1: 00
Information is exchanged. By accumulating such a history record, the time to replace the next drug solution, etc., can be determined in advance.
And it can be properly grasped. In addition, it is possible to grasp the current remaining amount of the processing liquid such as the chemical liquid of the processing liquid, and the usage amount per month, for example. Further, based on this, it is possible to grasp the processing solution usage amount (monthly usage amount, etc.) in a specific period, and it is possible to reduce unnecessary inventory.

Next, referring to the flowchart of FIG.
The operation of the system of this example will be described. An example in the case of replacing the processing liquid 1 (chemical liquid 1) will be described.

Here, the equipment is stopped to exchange the chemical. That is, the equipment is stopped by the start (start) 101 of the chemical liquid exchange (exchange of the processing liquid 1 (chemical liquid 1)).

Next, the operation of the chemical solution exchange 102 (specifically, the operation of exchange for a new can) is started. This allows
The barcode (identification code) attached to the chemical can is read by a barcode reader (recognition means). More specifically, a determination 103 is made as to whether or not a start switch (a start switch for supplying a chemical solution) is on. If the start switch is not on, a barcode reading 104 of the chemical solution is performed.

Next, the read data and the registered data are compared, and if they are the same, a chemical solution supply enable signal is output. If the comparison shows that the data is not the same, the above (replacement of the chemical solution) and this data comparison are repeated until the read data becomes the same. More specifically, a determination 105 is made as to whether or not a barcode (identification code) as data is read from a barcode reader (recognition means).
If YES, it is determined whether the read data matches the registered data. If NO, the process returns.
If the result of the determination 106 as to whether or not the read data matches the registered data is YES, the signal indicating that the chemical solution can be supplied is set to output ON 107. If the data are not the same (decision 107 is NO), the process returns to the exchange of the chemical solution (exchange of the can). repeat.

A start switch (start switch for supplying a chemical solution) by outputting a chemical supply enable signal 107
103 is YES, thereby making a determination 108 as to whether the supply permission signal is ON.
If S, it is possible to start the chemical solution supply start. If the determination 108 as to whether or not the supply permission signal is on is NO, that is, if the start switch (see reference numeral 72 in FIG. 2) is turned on while the chemical solution supply enable signal is not output, an error 110 is generated. Then, the buzzer as the warning means 71 operates.

When the supply of the chemical is started, the start switch of the apparatus main body is operated (the switch is pressed), and the supply of the chemical is started 109.

In this example, when the supply of the chemical solution to the equipment is started, the data of the bar code (identification code) is cleared (history is separately stored). Unless is read, the chemical supply start is not started.

In the present embodiment, a teaching function is provided for the data of the bar code (identification code) to be registered in advance, so that even if the type of the chemical and the bar code (identification code) data are changed, it can be handled. So that For example, a teaching switch is provided, and bar code (identification code) data read while the switch is pressed is registered.

As described above, according to the present embodiment, by applying the present invention, it is possible to realize the proper replacement of the processing liquid. This makes it possible to prevent product defects due to supply of different types of chemicals.

Second Embodiment This embodiment is a modification of the first embodiment, and is implemented as follows. That is, in the present embodiment, the processing liquid name (chemical liquid name) corresponding to the bar code (identification code) is registered in advance, so that when the bar code (identification code) data is read, the processing liquid name (chemical liquid name) is read. ) Is displayed. For example, using a display screen such as a touch panel,
The read processing solution name (chemical solution name) is displayed on this.

According to the present embodiment, in addition to the effect of the first embodiment, the effect of preventing replacement failure can be further enhanced.
Efficiency can also be improved.

[0036]

As described above, according to the processing method and the processing apparatus using the processing liquid and the method for manufacturing the semiconductor device of the present invention, when processing using the processing liquid, it is possible to surely exchange the processing liquid properly. . This can prevent various problems associated with erroneous supply of the processing liquid, such as defective product production due to supply of different types of chemicals. Furthermore, the effect that the management using the processing liquid exchange data is possible is exhibited.

[Brief description of the drawings]

FIG. 1 is a system configuration diagram of a first embodiment of the present invention.

FIG. 2 is a flowchart showing an operation of the first embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... 1st processing liquid (chemical liquid 1), 2 ... 2nd processing liquid (chemical liquid 3), 21 ... 1st identification code (barcode), 22 ... 2nd identification Code (barcode), 3
1.. First recognition means (bar code reader), 32
... Second recognition means (barcode reader), 41
..First container (can 1), 42... Second container (can 2), 51, 52... Identification data (barcode data), 6... Determination means (data registration unit, chemical liquid) Supply sequencer), 71 ... Warning means (buzzer), 8 ...
Equipment sequencer.

Claims (18)

[Claims] In a processing method for processing an object to be processed using a processing liquid, an identification code for identifying the processing liquid is recognized when the processing liquid is applied to a storage section of the processing liquid, and the identification code is registered and registered. Judging the suitability of the supplied processing liquid by comparing it with certain data, thereby preventing the supply of different types of processing liquid when supplying the processing liquid, and managing the processing liquid based on the history at the time of recognition of the identification code. A processing method using a processing solution. 2. The method according to claim 1, wherein the processing liquid is applied by replacing the storage part with a new storage part storing the processing liquid when the amount of the processing liquid in the storage part becomes zero or a predetermined amount. The method according to claim 1, wherein the treatment is performed by using the treatment liquid. 3. The processing method according to claim 1, wherein the object to be processed is a semiconductor wafer. 4. The processing method according to claim 1, wherein the identification code is a barcode. 5. The processing liquid container according to claim 1, wherein the identification code is attached to a processing liquid container forming a storage section of the processing liquid.
A processing method using the processing liquid described in 1. 6. The processing method according to claim 1, wherein the processing liquid is a chemical. 7. A processing apparatus for processing an object to be processed using a processing liquid, comprising: a recognizing means for recognizing an identification code for identifying a processing liquid when applying the processing liquid to a storage section of the processing liquid; A processing solution characterized by comprising at least a determining means for determining whether or not the replaced processing liquid is appropriate in comparison with registered data; and a history storage means for storing a history at the time of recognition of the identification code. By processing equipment. 8. The treatment liquid is applied by replacing the storage part with a new storage part storing the treatment liquid when the amount of the treatment liquid in the storage part becomes zero or a predetermined amount. The processing apparatus according to claim 7, wherein the processing is performed by a processing liquid. 9. The processing apparatus according to claim 7, wherein the object to be processed is a semiconductor wafer. 10. The processing apparatus according to claim 7, wherein the identification code is a barcode. 11. The processing apparatus according to claim 7, wherein the identification code is attached to a processing liquid container forming a storage section of the processing liquid. 12. The processing method according to claim 7, wherein the processing liquid is a chemical. 13. A method of manufacturing a semiconductor device, comprising a processing step of processing an object to be processed using a processing liquid, wherein an identification code for identifying the processing liquid is recognized when the processing liquid is applied to a storage section of the processing liquid. Then, comparing this with the registered data, it is determined whether or not the replaced processing liquid is appropriate, thereby preventing the supply of different types of processing liquid at the time of supplying the processing liquid, and by using the history at the time of recognizing the identification code, A method for manufacturing a semiconductor device, comprising managing a treatment liquid. 14. The method according to claim 1, wherein when the amount of the processing liquid in the storage unit becomes zero or a predetermined amount, the storage unit is replaced with a new storage unit containing the processing liquid. 14. The method according to claim 13, wherein the method is performed. 15. The method according to claim 13, wherein the object to be processed is a semiconductor wafer. 16. The method according to claim 13, wherein the identification code is a bar code. 17. The method of manufacturing a semiconductor device according to claim 13, wherein the identification code is attached to a processing liquid container forming a storage section of the processing liquid. 18. The method according to claim 13, wherein the processing solution is a chemical solution.