JP2001297700A - Method and device for producing plasma display panel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To restrain dispersion of discharging characteristics of a plasma display panel as a product and reduce the decrease in yield due to insufficient aging on the like. SOLUTION: An aging device with a gas analyzer or an infrared spectral analyzer is used to do work, while seizing aging processes. An aging ending time is judged from the measurement result.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plasma display panel (PDP) used for a display device or the like.

[0002]

2. Description of the Related Art Conventionally, as a PDP, a shape shown in FIG. 4 has been known. The front substrate 2 and the rear substrate 3 are provided facing each other at a predetermined interval, and a gas that emits ultraviolet rays by discharge is sealed in the interval. A plurality of strip-shaped first electrodes 4 (scanning electrodes 4a,
A sustain electrode 4b) is provided on the rear substrate 3 with a strip-shaped second electrode 5 perpendicular to the first electrode 4.

[0003] The conventional method of producing this PDP is based on a surface substrate
After each of the rear substrates is formed, bonding, sealing, exhausting, gas sealing, and sealing are performed as an assembly process to complete the panel. However, in this state, a very high voltage is required for panel lighting. Therefore, in order to stabilize the discharge characteristics of the panel, aging is performed to discharge the entire discharge region for a certain period of time.

In the preparation of a conventional PDP, this aging step is performed during various steps. For example, when aging is performed only on the front substrate before bonding the front substrate and the rear substrate, or when aging is performed during the exhaust process and then gas sealing and sealing is performed, or aging after gas sealing and sealing is performed. And so on.

[0005]

In this conventional aging method, a long discharge time of about 8 hours is required for stabilization of a desired discharge voltage, and this process time is based on empirical rules. The variation between panels does not follow. For this reason, in the aging time of 8 hours, for example, a certain panel may be insufficiently aged and the discharge voltage may not be stable, resulting in a failure in an inspection process. In order to stabilize the image quality, extra process time is required, and further, extra luminance degradation is caused.

SUMMARY OF THE INVENTION In view of the above-mentioned problems, an object of the present invention is to provide an aging time suitable for each panel in an aging process for producing a PDP, suppress variations in product characteristics, and improve the yield.

[0007]

According to the present invention, in order to solve the above-mentioned problems, after forming a protective film on a surface substrate, in a chamber provided with an analyzer for grasping an aging state,
Aging is performed only on the surface substrate, and aging is terminated based on the analysis result.

The first invention relates to a method provided with an outgassing analyzer, and the second invention relates to a method provided with an infrared spectrometer.

[0009]

(Embodiment 1) An embodiment of the first invention will be described with reference to the drawings. FIG. 1 is a schematic sectional view of an aging device according to one embodiment of the present invention.

A surface substrate 12 on which a protective layer is formed is placed in a vacuum chamber 11, and as shown in FIG.
Then, the first short electrode 6 is connected to the sustain electrode 4b, and the second short electrode 7 is connected to the sustain electrode 4b. Thereafter, the inside of the vacuum chamber 11 is evacuated to a high vacuum by a vacuum evacuation system 13 and a discharge gas is sealed from a gas introduction system 14.

The gas composition at this time does not need to be the same as the gas composition when the panel is formed. It is desirable that the gas pressure at this time be lower than that at the time of panel formation. Under this condition, the sputter rate by the generated plasma increases, and the aging time can be shortened.

Thereafter, aging is performed by applying a high voltage between the electrodes by an aging power supply 15. At this time, the process proceeds while monitoring the change in the gas composition of the discharge gas with the quadrupole mass spectrometer 16 installed in the chamber 11.
As the impurity gas generated in this step, H ₂ O,
There are O ₂ , H ₂ , CO, CO ₂ , N ₂ , and the intensity of these compositions is monitored. From the measurement result, when the intensity of the predetermined gas is saturated to a certain value, the surface substrate 1
Assuming that the cleaning of No. 2 has been completed, the aging operation is terminated. This is performed by judging the measurement result of the quadrupole mass spectrometer 16 by the arithmetic unit 17 and feeding it back to the control system 18 to control the aging power supply 15.

(Embodiment 2) An embodiment of the second invention will be described with reference to the drawings. FIG. 3 is a schematic sectional view of an aging device according to one embodiment of the present invention.

The aging method in the present embodiment is the same as in the first embodiment. In the present embodiment, infrared spectroscopy is used as means for grasping the aging state. This monitors the state of the panel during aging and controls the aging time. MgCO ₃ , Mg (OH) _{2 and the} like are formed on the front substrate 12 under the influence of the atmosphere. Changes in these impurities during aging are monitored from spectra absorbed by the surface substrate by infrared spectroscopy.

As shown in FIG. 3, the apparatus used in the present embodiment includes an infrared irradiation device 21 such as an infrared lamp, a concave mirror 22, a reflecting mirror 24, and an aperture 25, which are first condensing means, in a vacuum chamber 12. A concave mirror 2 serving as a second focusing means
6, prism 27, third concave mirror 28, vacuum thermocouple 29
Is provided. The surface substrate 23 to be aged is placed and wired on the reflecting mirror 24 so that the protective film serves as an infrared incident surface. Since infrared rays are absorbed by glass, the concave mirrors 22, 26, and 28 are formed by depositing a metal such as aluminum on the incident surface of the infrared rays.

The infrared light emitted from the infrared irradiation device 21 is collected by the concave mirror 22. The focal position of the infrared light by the concave mirror 22 is adjusted so as to be between the surface substrate and the reflection surface of the reflection mirror 24.

The aperture 25 removes the infrared flare component reflected by the front substrate 23 and the reflecting mirror 24.
The second concave mirror 26 converts the infrared light that has passed through the aperture 25 into parallel light, and the prism 27 converts the infrared light into second light.
The infrared rays that have become more parallel are decomposed into spectra,
Infrared rays that have passed through the prism 27 and are decomposed into spectra by the concave mirror 28 are collected.

Then, the spectral intensity of each wave number of the infrared light collected by the vacuum thermocouple 29 is converted into an electric signal.
This signal is recognized by the arithmetic unit 17 and the aging power supply 15 is controlled by the control unit 18.

Recognition of the aging end time is performed at a stage when a preset wave number of the measured electric signal of the spectral intensity of each wave number has reached a certain value.

In this embodiment, a concave mirror is used as a means for collecting infrared rays or turning them into parallel rays. However, a plurality of lenses may be used. In addition, although the substrate is fixed, inspection while moving on a belt conveyor is also possible. As a measurement mode, an infrared absorption spectrum of infrared light passing through the front substrate may be detected without using reflected light.

[0021]

As described above, according to the present invention, aging of only the surface substrate can be performed, and the progress of aging can be determined in real time by a gas analyzer or an infrared spectroscopic analyzer. Of the discharge characteristics can be suppressed, and a decrease in yield due to insufficient aging can be reduced.

[Brief description of the drawings]

FIG. 1 is a diagram showing an apparatus configuration according to a first embodiment of the present invention.

FIG. 2 is a diagram showing a technique of an aging step of the present invention.

FIG. 3 is a diagram showing a device configuration according to a second embodiment of the present invention;

FIG. 4 is a diagram showing a conventional plasma display panel.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Plasma display panel 2 Surface substrate 3 Back substrate 4 First electrode 4a Scan electrode 4b Sustain electrode 5 Second electrode (address electrode) 6 First short electrode 7 Second short electrode 11 Vacuum chamber 12 Surface substrate 13 Vacuum exhaust system 14 Gas Introduction system 15 Aging power supply 16 Quadrupole mass spectrometry system 17 Operation unit 18 Control system 21 Infrared irradiation device 22 First concave mirror 23 Surface substrate 24 Reflecting mirror 25 Aperture 26 Second concave mirror 27 Prism 28 Third concave mirror 29 Vacuum thermocouple

 ──────────────────────────────────────────────────の Continued on the front page (72) Inventor Hideaki Yasui 1006 Kazuma Kadoma, Osaka Prefecture Inside Matsushita Electric Industrial Co., Ltd. F-term (reference) 5C012 AA09 VV01 VV04 5C040 GC19 JA24 MA23 MA26

Claims (6)

[Claims] 1. A method of manufacturing a plasma display panel, comprising aging only a front substrate in a chamber provided with a gas analyzer. 2. A method of manufacturing a plasma display panel, wherein aging is performed only on a surface substrate, and a change in discharge gas is detected by a gas analyzer during the aging.
A method for manufacturing a plasma display panel, comprising determining an aging end time from the detection result. 3. A method for manufacturing a plasma display panel, comprising the steps of:
A plasma display panel comprising aging only a front substrate and a method for manufacturing the same. 4. A method of manufacturing a plasma display panel, comprising aging only a surface substrate, detecting changes in impurities on the surface substrate during the aging with an infrared spectroscopic analyzer, and performing aging based on the detection result. A method for manufacturing a plasma display panel, comprising determining an end time. 5. A method for manufacturing a plasma display panel having an aging step, comprising detecting an aging progress state of a substrate during the aging step, and judging an aging end time from the detection result. Display panel manufacturing method. 6. An aging apparatus for a plasma display panel, comprising: a gas analyzer or an infrared spectrometer; and a controller for controlling an aging end time based on a detection result of the gas analyzer or the infrared spectrometer. An aging device, characterized in that: