JP2001166317A - Electrooptical device, method of manufacture and projection display device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance the uniformity of a gap between substrates, to reduce an adverse effect due to the lateral electric field generated at the time of line inverse-driving and dot inverse-driving and to executing image display in high brightness and contrast, in an electro-optical device, such as a liquid crystal device, having an electro-optical substance such as a liquid crystal interposed between a pair of substrates. SOLUTION: In the electro-optical device, plural pixel electrodes (9a) are disposed on the side opposed to a liquid crystal layer (50) of a first substrate (10) and a first pixel electrodes group to be inverse-driven in a first period and a second pixel electrodes group to be inverse-driven in a second period complementary to the first period are included. A second substrate is provided with a counter electrode. A partition wall consisting of a dielectric material, disposed between the first and the second substrates, regulating the gap therebetween and partitioning the first and the second pixel electrode groups at a line therebetween in a plane view is further provided. The electro-optical device is line or dot inversion-driven.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electro-optical device such as a liquid crystal device in which an electro-optical material such as a liquid crystal is sandwiched between a pair of substrates, a method of manufacturing the same, and a projection using such an electro-optical device. It belongs to the technical field of a liquid crystal display device, and particularly adopts a line inversion driving method in which the driving voltage polarities of a plurality of pixel electrodes arranged in a matrix are inverted for each row or column, and a dot inversion driving method for inverting each pixel. The invention belongs to the technical field of an electro-optical device such as a liquid crystal device and a method of manufacturing the same, and a projection display device using such an electro-optical device.

[0002]

2. Description of the Related Art In an electro-optical device such as a liquid crystal device, pixel electrodes, scanning lines, data lines, and thin film transistors (hereinafter referred to as appropriate) are formed on one substrate in accordance with a driving method such as active matrix driving, passive matrix driving, or segment driving. ,
TFTs), thin-film diodes (hereinafter appropriately referred to as TFDs) and the like are formed. On the other substrate, a counter electrode, a wiring, a light-shielding film for defining an opening area of each pixel, a color filter, and the like are also formed according to the driving method. These substrates are bonded together with a sealant around an image display area where an image is actually displayed. A TN (Twisted Nematic) is provided between the pair of substrates thus bonded.
matic) liquid crystal, STN (Super Twisted Nematic) liquid crystal,
An electro-optical material such as a VA (Vertically Aligned) liquid crystal is sandwiched. During operation, a vertical electric field generated between a pixel electrode formed on one substrate and a counter electrode formed on the other substrate is applied to liquid crystal or the like sandwiched between a pair of substrates, As a result, the state of the electro-optical material such as the alignment state of the liquid crystal is changed, and an image is displayed by changing the polarization state of the display light passing therethrough.

[0003] In particular, deterioration of the electro-optical material (for example, decomposition of a liquid crystal component, contamination by impurities generated in a liquid crystal cell, burn-in of a display image, and the like) due to application of a DC voltage to the electro-optical material such as a liquid crystal is observed. So as not to get up
The polarity of the drive voltage for each pixel electrode is inverted at a constant period, for example, one frame or one field in an image signal. In particular, when the number of pixels is large, in order to prevent the occurrence of flicker and crosstalk in the fixed cycle, for example, the polarity of the drive voltage is inverted for each row of the pixel electrodes (for example, for each scanning line) in the fixed cycle. A line inversion driving method such as an inversion driving method and a 1S inversion driving method for inverting each pixel electrode column (for example, each data line) have been proposed. Further, a dot inversion driving method has been proposed in which the polarity of the driving voltage is inverted for each dot (that is, for each row and each column) at the predetermined cycle.

In order to make the distance (ie, gap) between the pair of substrates described above a predetermined value, in a large-sized liquid crystal device or the like, a gap material having a predetermined diameter called a spacer is scattered in the display area. On the other hand, if a gap material is placed in the display area, the shadow of the gap material and poor alignment around the gap material are enlarged and projected to deteriorate the image quality, so that the gap material is included in the sealing material. Only included.

[0005]

However, in the case of the above-described line inversion driving method, a horizontal electric field is generated between pixel electrodes adjacent to each other in a column direction or a row direction to which voltages having different polarities are applied. Further, in the case of the dot inversion driving method,
A horizontal electric field is generated between pixel electrodes adjacent to each other in a row direction and a column direction to which voltages having different polarities are applied. When a horizontal electric field is generated between adjacent pixel electrodes in this way, in an electro-optical device in which it is planned to control the alignment state of liquid crystal or the like by a vertical electric field generated between the pixel electrode and the counter electrode, An operation defect of the electro-optical material such as a liquid crystal alignment defect is caused. The malfunction of the electro-optical material is caused by a decrease in contrast ratio due to light leakage at the malfunction portion.
Alternatively, the aperture ratio of each pixel (that is, the ratio of the area of a region where light contributing to display is output to the entire area of each pixel) is reduced by concealing the defective operation portion, and the displayed image becomes dark. There is a problem that it becomes. In particular, with the recent increase in definition of a display image, as the distance between adjacent pixel electrodes becomes shorter, the strength of the horizontal electric field increases in inverse proportion to the distance, so that this problem is serious. Increase.

On the other hand, in this type of electro-optical device, particularly in a small liquid crystal device, the gap material cannot be put in the display region, and therefore, it is necessary to improve the uniformity of the cell gap over the entire image display region. It will be difficult. When the uniformity of the cell gap is reduced in this manner, there is a problem that an image of a constant quality cannot be displayed in the entire image display area. In particular, in the case of a vertical alignment type electro-optical device using a liquid crystal having a negative dielectric anisotropy, the cell gap is one of the main parameters for determining the transmittance, so that the cell gap deviates from a design value. If so, this problem becomes more serious because the transmittance is reduced.

In addition, in the process of injecting a vertical alignment type electro-optical material between substrates on which a vertical alignment film is formed in the manufacture of this type of electro-optical device, the electro-optical material is in a vertical alignment state. It is injected while keeping it. For this reason, TN liquid crystal or S liquid, which is injected while the liquid crystal is twisted in parallel to the substrate,
Unlike in the case of TN liquid crystal, even if the liquid crystal is injected while being sandwiched between a pair of polarizing plates in which the polarization axes are crossed, the color change of the panel surface due to the injection due to the birefringence effect does not occur. There is also a problem that it is difficult to detect the optimal point in time when the operation should be stopped. As a result, insufficient injection or excessive injection is likely to occur, and the center of the image display area is depressed or swollen, which makes it more difficult to improve the uniformity of the cell gap.

The present invention has been made in view of the above-mentioned problems, and has improved uniformity of the layer thickness of an electro-optical material such as a liquid crystal sandwiched between a pair of substrates. An electro-optical device such as a liquid crystal device capable of displaying a bright, high-contrast, high-quality image and a method of manufacturing the same, and a projection including such an electro-optical device, in which adverse effects due to a lateral electric field generated during inversion driving are reduced. It is an object to provide a type display device.

[0009]

In order to solve the above-mentioned problems, an electro-optical device according to the present invention comprises a pair of first and second substrates opposed to each other while sandwiching an electro-optical material, and A first electrode disposed on the side facing the electro-optical material;
A first pixel electrode group for inversion driving in a cycle and the first pixel electrode group;
A plurality of pixel electrodes including a second pixel electrode group for inversion driving at a second period complementary to the period, a counter electrode disposed on a side of the second substrate facing the electro-optical material, A first partition disposed between the first and second substrates to define a gap between the first and second substrates and to partition the first and second pixel electrode groups in a plan view;

According to the electro-optical device of the present invention, at the time of its operation, a vertical electric field is generated between the first and second pixel electrode groups on the first substrate and the opposing electrodes on the second substrate opposed thereto. The electro-optical material sandwiched between these substrates is driven. Here, in particular, the first pixel electrode group is inversion-driven in the first cycle, and the second pixel electrode group is inversion-driven in the second cycle complementary to the first cycle. That is, the electro-optical device is driven by an inversion driving method such as the above-described line inversion driving and dot inversion driving. Therefore, it is possible to prevent flicker and crosstalk while avoiding deterioration of the electro-optical material due to application of a DC voltage to the electro-optical material. However, a lateral electric field is generated between the first pixel electrode group and the second pixel electrode group disposed on the first substrate. Therefore, if no countermeasure is taken here, the electro-optical material that is scheduled to be driven by the vertical electric field may cause poor operation such as poor alignment of liquid crystal due to the horizontal electric field. In particular, a partition made of a dielectric is provided between the first pixel electrode group and the second pixel electrode group. That is, in the region between the two electrode groups where the lateral electric field occurs, there is a partition wall made of a dielectric,
The transverse electric field is weakened by the partition. In addition, in the region where the horizontal electric field is generated, the electro-optical material does not exist as much as the partition walls exist, so that there is an electro-optical material portion (for example, a portion in a gap between pixels) which receives a strong horizontal electric field and causes poor alignment. Accordingly, it is possible to prevent the electro-optical material portion (for example, a portion near the edge of the pixel) continuous with the electro-optical material portion due to an interaction such as an intermolecular force from being poorly aligned. On the other hand, since the partition does not exist between the pixel electrode and the counter electrode, the vertical electric field is not weakened by the partition. As a result, the vertical electric field is strengthened relatively to the horizontal electric field by the partition walls, and the adverse effect of the horizontal electric field on the electro-optical material is reduced.

Further, since a gap between the first and second substrates is defined by a partition wall disposed between the first and second substrates,
The gap (cell gap) between the substrates can be accurately controlled regardless of whether or not the gap material is contained in the display area. Therefore, in the case of a vertical alignment type electro-optical device in which the gap between the substrates is one of the main parameters determining the transmittance, the transmittance can be improved by improving the accuracy of the gap between the substrates, which is very effective. It is. In particular, in the case of a vertical alignment type liquid crystal device in which color change on the panel surface does not occur due to the birefringence effect at the time of liquid crystal injection as described above and a small liquid crystal device in which a gap material cannot be dispersed in a display region, the present invention Such effects are maximized.

As described above, according to the present invention, the gap between the substrates can be controlled relatively easily, and the uniformity of the layer thickness of the electro-optical material such as liquid crystal sandwiched between the substrates is improved. In addition, adverse effects due to the horizontal electric field generated at the time of line inversion driving or dot inversion driving are reduced, and finally a bright, high-contrast, high-quality image display can be performed.

In one embodiment of the electro-optical device according to the present invention, the electro-optical material is a vertically-oriented electro-optical material having a negative dielectric constant anisotropy, and the electro-optical material is one of the first and second substrates. At least one of the alignment films is disposed facing the electro-optical material and has been subjected to a rubbing process so that the alignment state of the electro-optical material is substantially vertical when no voltage is applied and has a predetermined pretilt angle. Is further provided.

According to this aspect, the electro-optical device includes:
When no voltage is applied, the electro-optical material is vertically oriented at a predetermined pretilt angle (for example, at an angle of about 0.5 degrees from the direction perpendicular to the substrate surface), and when the voltage is applied, the electro-optical material is aligned in the pretilt direction. Thus, it is constructed as a vertical alignment type electro-optical device which falls down in parallel with the substrate surface. Therefore, since the gap between the substrates can be controlled and the electro-optical material falls down in a certain direction when a voltage is applied, the transmittance is increased, and a bright display is possible. Moreover, by using the vertical alignment type, the contrast ratio, the viewing angle characteristics, and the response characteristics can be improved.

If an alignment film subjected to the rubbing treatment is formed on one of the first and second substrates,
The direction in which the electro-optical material falls when no voltage is applied can be controlled. That is, for the other substrate, it is not necessary to perform a rubbing treatment on the alignment film. However, a rubbing treatment may be performed on both alignment films.

In the aspect using the vertical alignment type electro-optical material, the plurality of pixel electrodes are arranged in a matrix in a row direction and a column direction, and the first and second pixel electrodes are arranged in a matrix.
A plurality of pixel electrode groups are alternately arranged along the row direction, and the partition walls extend along the row direction,
The rubbing process may be configured to be performed along the column direction when viewed in plan.

According to this aspect, the pixel electrodes are driven to be inverted for each row, and the line inversion drive is performed by the 1H inversion drive method described above. The partition extends in the row direction, that is, is arranged in a region where a lateral electric field is generated.
On the other hand, the rubbing process is performed along the column direction, and the electro-optical material rotates and falls down in the column direction when a voltage is applied.

Here, in the case where the electro-optical device of the present invention is applied to a liquid crystal device, the transmittance when the electro-optical device is disposed between a pair of polarizing plates whose polarization axes cross each other will be described.

That is, in the electro-optical device according to the present invention in which the liquid crystal is inclined in one axis direction, the transmittance T is given by the following equation (1).

T = Sin ² (2α) Sin ² (πΔnd / λ) (1) where α is the polarization axis of the polarizing plate and the tilt direction of the liquid crystal (uniaxial direction).
[Delta] nd: Optical film thickness of liquid crystal (n: Refractive index of liquid crystal, d: Film thickness of liquid crystal) [lambda]: Wavelength of incident light (In addition, a pair of polarizing plates are arranged such that their polarizing axes are orthogonal to each other. Therefore, in a configuration such as the present invention, by making 2α and πΔnd / λ close to π / 2, respectively, the transmittance T becomes theoretically 1 unit.
00% can be approached. Moreover, according to the study by the inventor of the present application, the main obstacle to achieving the theoretical transmittance T = 100% is the condition where these two numerical values (2α and πΔnd / λ) are fixed. It has been found that a major obstacle in practice for trying to increase the transmittance T as much as possible is displacement or fluctuation of the liquid crystal molecules constituting the liquid crystal from one axis direction due to the transverse electric field. That is, when the lateral electric field causes a variation in the tilt direction of the liquid crystal, the above formula (1) itself is not satisfied (for example, the transmittance is 8 because the liquid crystal does not tilt in a uniaxial direction).
(It is reduced to about 0%).

However, in this embodiment, since the rubbing process is performed along the column direction (ie, along the direction of the horizontal electric field), the variation of each liquid crystal molecule from the uniaxial direction due to such a horizontal electric field. Has been reduced. That is, even if a horizontal electric field acts, the liquid crystal molecules only act as an electric field along the rotation plane of each liquid crystal molecule defined by the rubbing direction, and therefore, each liquid crystal molecule does not deviate from this plane due to the horizontal electric field. Therefore, in this embodiment, it is possible to obtain a transmittance T close to 100%, which is the theoretical maximum value, or to set the transmittance T under the condition that these two numerical values (2α and πΔnd / λ) are fixed. It is possible to make it larger.

As described above, according to this aspect, the display can be made brighter by improving the transmittance, and the display can be performed by the 1H inversion driving method while the adverse effect of the horizontal electric field is reduced by the partition walls. By doing so, the contrast ratio, viewing angle characteristics, and response characteristics can be improved.

Alternatively, in the aspect using the vertical alignment type electro-optical material, the plurality of pixel electrodes are arranged in a matrix in a row direction and a column direction, and the first and second pixel electrode groups are arranged in a matrix. , The plurality of partitions are alternately arranged along the column direction, the partition walls extend along the column direction, and the rubbing process is performed along the row direction in plan view. May be configured.

According to this aspect, the pixel electrodes are driven inversion for each column, and the line inversion driving is performed by the 1S inversion driving method described above. The partition extends in the column direction, that is, is arranged in a region where a lateral electric field is generated.
On the other hand, the rubbing process is performed along the row direction, and the electro-optical material rotates and falls down in the row direction when a voltage is applied.

Therefore, the rubbing direction described with reference to the equation (1) is along the column direction, and the theoretical maximum value is 10 according to the same principle as that of the mode in which the 1H inversion driving method is performed.
A transmittance T close to 0% can be obtained, or
The transmittance T can be increased under the condition that the two numerical values (2α and πΔnd / λ) are fixed.

As described above, according to this embodiment, a bright display can be achieved by improving the transmittance, and the display can be performed by the 1S inversion driving method while the adverse effect of the horizontal electric field is reduced by the partition walls. By doing so, the contrast ratio, viewing angle characteristics, and response characteristics can be improved.

In another aspect of the electro-optical device of the present invention, the plurality of pixel electrodes are arranged in a matrix in a row direction and a column direction, and the first and second pixel electrode groups are arranged in the row direction. , And the partition walls extend along the row direction.

According to this aspect, the pixel electrodes are driven inversion every row, and the line inversion driving is performed by the above-described 1H inversion driving method. The partition extends in the row direction, that is, is arranged in a region where a lateral electric field is generated.
Therefore, it is possible to perform display by the 1H inversion driving method while reducing the adverse effect of the horizontal electric field by the partition, and further, by using the vertical alignment type, it is possible to improve the contrast ratio, the viewing angle characteristics, and the response characteristics.

In another aspect of the electro-optical device of the present invention, the plurality of pixel electrodes are arranged in a matrix in a row direction and a column direction, and the first and second pixel electrode groups are arranged in the column direction. Are arranged alternately along the line, and the partition extends along the column direction.

According to this aspect, the pixel electrodes are driven inversion for each column, and the line inversion driving is performed by the 1S inversion driving method described above. The partition extends in the column direction, that is, is arranged in a region where a lateral electric field is generated.
Therefore, display by the 1S inversion driving method can be performed while the adverse effect of the horizontal electric field is reduced by the partition, and the contrast ratio, the viewing angle characteristic, and the response characteristic can be improved by using the vertical alignment type.

In another aspect of the electro-optical device of the present invention, the plurality of pixel electrodes are arranged in a matrix in a row direction and a column direction, and the first and second pixel electrode groups are arranged in the row direction. And the partition walls are alternately arranged in the column direction, and the partition walls have a lattice shape.

According to this aspect, the pixel electrodes are inverted and driven for each row and each column, and the above-described one-dot inversion drive is performed. The partition has a lattice shape and surrounds each pixel electrode, that is, is arranged in a region where a horizontal electric field is generated. Therefore, while reducing the adverse effect of the lateral electric field by the partition walls, 1
Display by the dot inversion drive method becomes possible, and moreover,
By using the vertical alignment type, the contrast ratio, viewing angle characteristics, and response characteristics can be improved.

In another aspect of the electro-optical device according to the present invention, the partition is formed by patterning an insulating material layer on at least one of the first and second substrates.

According to this aspect, on at least one of the first and second substrates, for example, ITO (Indium T
By patterning the insulating material layer, for example, by patterning a resin on the counter electrode formed of an im Oxide) film, the partition can be formed relatively easily.

In another aspect of the electro-optical device according to the present invention, the partition is formed by patterning a groove in at least one of the first and second substrates.

According to this aspect, in at least one of the first and second substrates, a groove is formed in the substrate main body or the interlayer insulating film laminated on the substrate by etching, for example, in a region on the substrate excluding the partition walls. By forming the groove, the partition can be formed relatively easily.

According to another aspect of the electro-optical device of the present invention, a plurality of switching elements arranged in a matrix on the first substrate and connected to the plurality of pixel electrodes, respectively, are provided on the first substrate. And a plurality of scanning lines and a plurality of data lines which are arranged and are connected to the plurality of switching elements, respectively, and cross each other.

According to this embodiment, an active matrix type electro-optical device using switching elements such as TFTs and TFDs can be realized. Therefore, a high driving frequency, high definition, and a bright image can be displayed.

In order to solve the above-mentioned problems, a first method of manufacturing an electro-optical device according to the present invention includes, on a first substrate, a first pixel electrode group for inversion driving in a first cycle and the first cycle. Forming a plurality of pixel electrodes including a second pixel electrode group for inversion driving at a second period complementary to the first and second substrates; forming an opposing electrode on a second substrate; A partition made of a dielectric material is provided between the first and second substrates to define a gap therebetween and to separate the first and second pixel electrode groups when viewed in plan. A step of filling an electro-optical material into a space defined by the partition, and a step of bonding the first and second substrates to each other after filling the electro-optical material.

According to the first method of manufacturing an electro-optical device of the present invention, the above-described electro-optical device of the present invention can be manufactured easily. In particular, since the gap between the first and second substrates is defined by the partition wall disposed between the first and second substrates,
As described above, the present invention is effective for a liquid crystal device of a vertical alignment type in which a color change on a panel surface due to a birefringence effect does not occur at the time of liquid crystal injection and a small liquid crystal device in which a gap material cannot be dispersed in a display area.

Further, since the first and second substrates are bonded to each other after filling the space separated by the partition with the electro-optical material, the electro-optical material is bonded after the first and second substrates are bonded to each other. This is advantageous because the difficulty of injection due to the formation of the partition walls does not cause any problem as compared with the manufacturing technique of vacuum injection. In particular, when manufacturing an electro-optical device in a mode in which the partition walls are driven by the dot inversion driving method described above and the partition is in a grid shape, it is expected that a manufacturing technique of vacuum-injecting the electro-optical material is very difficult, The present invention is very effective.

According to one aspect of the first method for manufacturing an electro-optical device of the present invention, the step of adding the electro-optical material includes:
This is performed by an inkjet method.

According to this aspect, the step of introducing the electro-optical material by the ink jet method can be performed relatively easily.

In order to solve the above-mentioned problems, a second method of manufacturing an electro-optical device according to the present invention includes, on a first substrate, a first pixel electrode group for inversion driving at a first cycle and the first cycle. Forming a plurality of pixel electrodes including a second pixel electrode group for inversion driving at a second period complementary to the first and second substrates; forming an opposing electrode on a second substrate; A partition made of a dielectric material is provided between the first and second substrates to define a gap therebetween and to separate the first and second pixel electrode groups when viewed in plan. And after forming the partition, the first
Bonding a second substrate and a second substrate to each other with a sealing material, and via an inlet formed by partially removing the sealing material in a gap between the bonded first and second substrates in plan view. And vacuum-injecting the electro-optical material.

According to the second method of manufacturing an electro-optical device of the present invention, the above-described electro-optical device of the present invention can be manufactured easily. In particular, since the gap between the first and second substrates is defined by the partition wall disposed between the first and second substrates,
As described above, the present invention is effective for a liquid crystal device of a vertical alignment type in which a color change on a panel surface due to a birefringence effect does not occur at the time of liquid crystal injection and a small liquid crystal device in which a gap material cannot be dispersed in a display area.

According to one aspect of the second manufacturing method of the electro-optical device of the present invention, the injection port is located on an extension in a direction in which the partition wall portion extends in a plan view.

According to this aspect, after the first and second substrates are bonded to each other, the electro-optical material is evacuated through the inlet positioned on an extension of the direction in which the partition wall portion extends in plan view. The injection is advantageous because the flow resistance of the electro-optical material due to the formation of the partition can be suppressed. In particular, the present invention is very effective when manufacturing an electro-optical device in a mode in which the partition walls are driven by a line inversion drive method such as the above-described 1H inversion drive or 1S inversion drive and the partition walls are in a line or stripe shape. In addition, if the end of each partition in the form of a line or a stripe is formed at a slight distance from the inner wall of the sealing material, the electro-optical material spreads to the space between the partitions via the space without the partition. it can.

According to another aspect of the invention, there is provided a projection display apparatus including: a light valve including the electro-optical device according to any one of claims 1 to 10; and a projection light incident on the light valve. And an optical system for projecting the projection light emitted from the light valve.

According to the projection display device of the present invention, since the above-described electro-optical device (including various aspects thereof) of the present invention is provided as a light valve, a bright, high-contrast, high-quality image can be displayed. Become.

The operation and other advantages of the present invention will become more apparent from the embodiments explained below.

[0051]

Embodiments of the present invention will be described below with reference to the drawings. In the following embodiments, the present invention is applied to a liquid crystal device.

(Overall Configuration of Electro-Optical Device) First, the overall configuration of the electro-optical device of the present embodiment will be described with reference to FIGS.
This will be described with reference to FIG. Here, TF with built-in drive circuit
A description will be given by taking a T active matrix driving type liquid crystal device as an example. 1 is a plan view of the TFT array substrate together with the components formed thereon as viewed from the counter substrate side, and FIG. 2 is a cross-sectional view taken along the line HH 'of FIG.

In FIGS. 1 and 2, the electro-optical device comprises:
A vertical alignment type liquid crystal having a negative dielectric anisotropy as an example of an electro-optical material is provided between a TFT array substrate 10 as an example of a first substrate and a counter substrate 20 as an example of a second substrate. The liquid crystal layer 50 is sandwiched. The TFT array substrate 10 and the opposing substrate 20 are fixed to each other by a seal member 52 provided in a seal region located around the image display region 10a.

The sealing material 52 is made of, for example, an ultraviolet-curing resin, a thermosetting resin, or the like for bonding both substrates.
After being applied on the TFT array substrate 10 in a manufacturing process to be described later, it is cured by ultraviolet irradiation, heating, or the like. Further, a gap material (spacer) such as glass fiber or glass beads for setting a distance between the two substrates (gap between the substrates) to a predetermined value may be scattered in the sealing material 52, but in the present embodiment, Since the partition wall 301 for controlling the gap between the substrates is provided in the region where the horizontal electric field is generated as described later, the gap material does not need to be sprayed in the sealing material 52. On the other hand, in the display area,
Do not spray gap material. Therefore, the electro-optical device is suitable for performing a small-sized enlarged display as in a projector.

In FIG. 1, a light-shielding film 53 for defining the frame of the image display area 10a is provided (on the counter substrate 20 side) in parallel with the inside of the seal area where the seal material 52 is arranged.

In FIG. 1, a data line driving circuit 1 is provided in a peripheral area outside the seal area where the seal material 52 is disposed.
01 and the mounting terminals 102 are provided along one side of the TFT array substrate 10, and the scanning line driving circuit 104 is provided along two sides adjacent to this one side. Further T
On one remaining side of the FT array substrate 10, a plurality of wirings 105 for connecting between the scanning line driving circuits 104 provided on both sides of the screen display area are provided. In addition, the counter substrate 2
In at least one of the 0 corners, an upper / lower conductive material 106 for providing electrical continuity between the TFT array substrate 10 and the opposing substrate 20 is provided. The data line driving circuit 101 and the scanning line driving circuit 104 apply the pixel switching TFTs 30 formed in a matrix on the TFT array substrate 10 to pixel electrodes provided for each pixel.
Each of them is electrically connected to a data line (source electrode) and a scanning line (gate electrode) for selectively supplying an image signal via (see FIG. 2). An image signal converted into a format that can be immediately displayed from a control circuit (not shown) is input to the data line driving circuit 101, and the scanning line driving circuit 104 sequentially sends a scanning signal (gate voltage) to the scanning lines in a pulsed manner. In response, the data line driving circuit 101 sends an image signal (source voltage) to the data line.

In FIG. 2, pixel switching TFTs 30 and wiring lines such as scanning lines, data lines, and capacitance lines are formed on the TFT array substrate 10, and the uppermost layer is
An alignment film 16 for vertical alignment made of a polyimide material is formed. On the other hand, on the opposing substrate 20 (on the lower surface in FIG. 2), in addition to the opposing electrode 21, a light-shielding film 23 for defining a non-opening area for each pixel, a color filter, and a partition 301
And the like, and an alignment film 22 for vertical alignment made of a polyimide material is formed on the uppermost layer. In the present embodiment, in particular, since a vertical alignment type liquid crystal is used as the liquid crystal layer 50, one of the alignment films 16 and 22 may be subjected to a rubbing treatment in a predetermined direction. However,
Rubbing treatment in a predetermined direction may be performed on both the alignment film 16 and the alignment film 22.

In the present embodiment, in particular, the alignment film 16 is formed by applying a polyimide-based material and firing the same in a manufacturing process described later, and then aligns the liquid crystal in the liquid crystal layer 50 in a predetermined direction and sets the liquid crystal to have a predetermined pretilt angle. A rubbing treatment is performed so as to provide the rubbing. The light-shielding film 23 has functions such as improvement of contrast in a display image and prevention of color mixture of color materials, and is generated along the scanning lines and data lines as described above (that is, at the boundary of each pixel). It also has a function of hiding a poorly-aligned region such as a reverse tilt domain. Such a light shielding film 23 may be formed on the TFT array substrate 10 instead of the counter substrate 20 side.

When no voltage is applied, the liquid crystal layer 50 has an angle of about 89.5 degrees between the two substrates due to the action of the alignment films 16 and 22 for vertical alignment.
It takes a substantially vertical alignment state. Furthermore, since the liquid crystal layer 50 has a negative dielectric anisotropy, it falls down in a direction parallel to the substrate surface when a voltage is applied. At this time, each liquid crystal molecule falls down uniaxially in the rubbing direction applied to the alignment film 16. Liquid crystal layer 50
As shown in FIG. 1, the liquid crystal is sealed between the substrates by a sealing material 53 in which a portion of a liquid crystal injection port is missing and a sealing material 54 for sealing the liquid crystal injection port after a liquid crystal injection step described later. .

As shown in FIG. 2, in this embodiment, in particular, a partition wall 301 is provided on the counter electrode 21 on the counter substrate 20 side in a region where a horizontal electric field is generated as described later. By controlling the height of the partition 301,
The gap between the substrates is controlled. For this reason, in the present embodiment, the gap between the substrates, that is, the thickness of the liquid crystal layer 50 is made uniform with high accuracy over the entire image display area.
Note that such a partition 301 may be provided on the TFT array substrate 10 side. In any case, when it is difficult to perform the rubbing process on the alignment film 22 due to the unevenness on the counter substrate 20 side on which the partition wall 301 is provided, as in the present embodiment, the partition wall 301 and the alignment film 16 to be subjected to the rubbing process are combined. It is preferable to provide them on different substrates (the TFT array substrate 10 side or the opposing substrate 20 side).

In the present embodiment, the alignment film 22 is formed on the partition 3
It is formed so as to cover the entire surface of the opposing substrate 20, including the counter substrate 01. However, if the alignment film 22 is provided in a region excluding the partition wall 301 (that is, a region facing the liquid crystal layer 50), the liquid crystal layer 50 can be vertically aligned.
Therefore, a configuration in which the partition wall 301 is formed after the formation of the alignment film 22 can be employed.

(Circuit Configuration of Electro-Optical Device) Next, the circuit configuration of the electro-optical device of the present embodiment and the overall operation thereof will be described with reference to FIG. FIG. 3 is an equivalent circuit of various elements, wirings, and the like in a plurality of pixels formed in a matrix forming an image display area of the electro-optical device.

In FIG. 1, a plurality of pixels formed in a matrix forming an image display area of the electro-optical device according to the present embodiment include a plurality of pixel electrodes 9a and a plurality of TFTs 30 for controlling the pixel electrodes 9a. The data line 6a formed and supplied with the image signal is connected to the TFT
It is electrically connected to 30 sources. Data line 6a
, Sn to be written may be supplied line-sequentially in this order, or may be supplied to a plurality of adjacent data lines 6a for each group. The scanning line 3a is electrically connected to the gate of the TFT 30, and the scanning line 3a is provided at a predetermined timing.
The scanning signals G1, G2,..., Gm are applied to a in a pulse-wise manner in this order. The pixel electrode 9a is electrically connected to the drain of the TFT 30, and by closing the switch of the TFT 30 as an example of a switching element for a certain period, the data line 6 is turned off.
The image signals S1, S2,..., Sn supplied from a are written at a predetermined timing. The image signals S1, S2,..., S of a predetermined level written in the liquid crystal through the pixel electrode 9a
n is held for a certain period between the counter electrode and the counter electrode formed on the counter substrate. The liquid crystal modulates light by changing the orientation and order of the molecular assembly according to the applied voltage level.
Enables gradation display. In the normally white mode, the incident light cannot pass through the liquid crystal portion according to the applied voltage. In the normally black mode, the incident light passes through the liquid crystal portion according to the applied voltage. Light having a contrast according to the image signal is emitted from the electro-optical device as a whole. Here, in order to prevent the held image signal from leaking, a storage capacitor 70 is added in parallel with a liquid crystal capacitor formed between the pixel electrode 9a and the counter electrode.

In each of the embodiments described below, the above-described line inversion drive system or dot inversion drive system is adopted. As a result, it is possible to perform image display with reduced flicker occurring in the frame or field cycle and particularly reduced vertical crosstalk while avoiding deterioration of the liquid crystal due to the application of the DC voltage.

(First Embodiment) Next, a detailed configuration centering on the partition wall 301 in each pixel in the electro-optical device according to the first embodiment will be described with reference to FIGS.

FIG. 4 is a plan view of a plurality of pixel groups adjacent to each other on a TFT array substrate on which data lines, scanning lines, pixel electrodes, etc. are formed. FIG. FIG. 6 is a partial perspective view in which the side is viewed obliquely from below, and FIG.
FIG. 7 is a cross-sectional view taken along the line AA ′ of FIG. 4. FIG. 7 is a schematic plan view of a pixel electrode showing a voltage polarity and a region where a horizontal electric field is generated in each electrode in the 1H inversion driving method.
FIG. 9 is a cross-sectional view in various modified examples of the partition. FIG.
In FIG. 8 and in FIG. 8, the scale of each layer and each member is made different in order to make each layer and each member a recognizable size in the drawing.

In FIG. 4, a plurality of transparent pixel electrodes 9 are arranged in a matrix on the TFT array substrate of the electro-optical device.
a (the outline is indicated by a dotted line portion 9a ′), and the data line 6a, the scanning line 3a, and the capacitor line 3b are provided along the vertical and horizontal boundaries of the pixel electrode 9a. The data line 6a is electrically connected via a contact hole 5 to a source region described later in the semiconductor layer 1a made of, for example, a polysilicon film. The pixel electrode 9a is electrically connected to a drain region described later in the semiconductor layer 1a via the contact hole 8. In addition, the channel region 1 of the semiconductor layer 1a, which is indicated by a hatched region falling rightward in FIG.
The scanning line 3a is arranged so as to face a ′, and the scanning line 3a functions as a gate electrode. As described above, pixel switching TFTs 30 in which the scanning lines 3a are opposed to each other as gate electrodes in the channel region 1a 'are provided at intersections of the scanning lines 3a and the data lines 6a.

The capacitance line 3b has a main line extending substantially linearly along the scanning line 3a, and a protruding portion protruding upward in the drawing along the data line 6a from a location intersecting the data line 6a.

In the present embodiment, in particular, a plurality of stripe-shaped partitions 301 are provided on the counter substrate side in a region along the scanning line 3a and the capacitance line 3b (a region whose outline is indicated by a thick line in the drawing). ing.

That is, as shown in FIG. 5, a stripe-shaped partition wall 301 having a predetermined height ΔH is formed on the opposing substrate 20 so as to define a gap between the substrates when the scanning line 3a and the capacitance line 3b are viewed in plan. (See Fig. 4)
Is formed.

As shown in the cross-sectional view of FIG. 6, the partition 301 defines the gap between the substrates between the TFT array substrate 10 and the counter substrate 20 or the thickness of the liquid crystal layer 50.

In FIG. 6, the electro-optical device has a transparent T
It includes an FT array substrate 10 and a transparent counter substrate 20 disposed opposite to the FT array substrate 10. The TFT array substrate 10
For example, a quartz substrate, a glass substrate, a silicon substrate,
The opposite substrate 20 is made of, for example, a glass substrate or a quartz substrate. A pixel electrode 9a is provided on the TFT array substrate 10, and an alignment film 16 is provided above the pixel electrode 9a. The pixel electrode 9a is made of, for example, ITO (Indium Tin Oxid).
e) It consists of a transparent conductive thin film such as a film. The pixel electrode 9
By using a a reflective metal material such as aluminum,
It is also possible to use a reflection type electro-optical device.

On the other hand, the counter substrate 20 is provided with a counter electrode (common electrode) 21 over the entire surface. The counter electrode 21 is made of, for example, a transparent conductive thin film such as an ITO film.

Each pixel electrode 9 is provided on the TFT array substrate 10.
A pixel switching TFT 30 that controls switching of each pixel electrode 9a is provided at a position adjacent to the pixel electrode 9a.

The light blocking film 2 is provided on the non-opening region of each pixel between the counter substrate 20 and the counter electrode 21.
3, the incident light does not enter the channel region 1a ', the low-concentration source region 1b, and the low-concentration drain region 1c of the semiconductor layer 1a of the pixel switching TFT 30 from the side of the counter substrate 20. Further, the light shielding film 23 is
It has a function of improving contrast and preventing color mixture of color materials when a color filter is formed. In the present embodiment, the light-shielding data line 6a made of Al or the like is used to shield a portion of the non-opening area of each pixel along the data line 6a, so that the data line 6a of the opening area of each pixel is light-shielded.
a may be defined, or a non-opening area along the data line 6a may be shielded redundantly or independently by the light shielding film 23 provided on the counter substrate 20. Is also good.

The sealing material (see FIGS. 1 and 2) is provided between the TFT array substrate 10 and the opposing substrate 20, which are configured as described above and are arranged so that the pixel electrode 9a and the opposing electrode 21 face each other. The liquid crystal layer 50 is formed in the enclosed space. The liquid crystal layer 50 includes the alignment films 16 and 22 for vertical alignment in a state where no electric field is applied from the pixel electrode 9a.
As a result, the substrate is oriented substantially perpendicular to the substrate surface (a state in which a minute pretilt angle is given in a certain direction by rubbing the alignment film 16). The liquid crystal layer 50 is made of, for example, a liquid crystal having a negative dielectric anisotropy obtained by mixing one or several kinds of nematic liquid crystals.

In this embodiment, in particular, as shown in FIGS. 4 to 6, the partition 301 is not provided on the counter substrate 20 facing the gap between the pixel electrodes 9a adjacent to each other in FIG. The counter electrode 21 is formed flat. On the other hand, a partition 301 is provided on the counter substrate 20 facing the gap between the pixel electrodes 9a vertically adjacent to each other in FIG.

Referring to FIG. 7, adjacent pixel electrodes 9 in the 1H inversion driving method employed in the present embodiment.
The relationship between the voltage polarity a and the region where the lateral electric field is generated will be described.

That is, as shown in FIG. 7A, during the period of displaying the image signal of the nth (where n is a natural number) field or frame, the liquid crystal indicated by + or-for each pixel electrode 9a. The polarity of the drive voltage is not inverted, and the pixel electrodes 9a are driven with the same polarity for each row. Thereafter, as shown in FIG. 7B, when displaying the image signal of the (n + 1) th field or one frame, the voltage polarity of the liquid crystal driving voltage in each pixel electrode 9a is inverted, and the (n + 1) th field or one frame of the one frame is displayed. During the period of displaying the image signal, the polarity of the liquid crystal drive voltage indicated by + or-is not inverted for each pixel electrode 9a, and the pixel electrodes 9a are driven with the same polarity for each row. Then, the states shown in FIGS. 7A and 7B are repeated at a cycle of one field or one frame, and the driving by the 1H inversion driving method in the present embodiment is performed. As a result, according to the present embodiment, image display with reduced crosstalk and flicker can be performed while avoiding deterioration of the liquid crystal due to the application of the DC voltage. The 1H inversion drive method is advantageous in that there is almost no crosstalk in the column direction as compared with the 1S inversion drive method.

As can be seen from FIGS. 7 (a) and 7 (b), in the 1H inversion driving method, the horizontal electric field generation region C1 always has a gap between the pixel electrodes 9a adjacent to each other in the column direction (Y direction). It will be near.

Therefore, as shown in FIGS. 4 to 6, this embodiment employs a configuration in which the partition wall 301 is formed of a dielectric material such as resin in a region where a horizontal electric field is generated, and is driven by 1H inversion driving. As a result, the lateral electric field is weakened by the partition 301, and the adverse effect of the lateral electric field on the liquid crystal layer 50 is reduced. Further, since the gap between the substrates is defined by the partition wall 301, the gap between the substrates can be accurately controlled without dispersing the gap material in the display area. Therefore, in the case of an electro-optical device using a vertical alignment type liquid crystal in which the inter-substrate gap is one of the main parameters for determining the transmittance according to the above equation (1), the transmission accuracy is improved by improving the accuracy of the inter-substrate gap. Rate can be improved. Further, since the gap between the substrates can be controlled and each liquid crystal molecule in the liquid crystal layer 50 falls down in the column direction (rubbing direction with respect to the alignment film 16) when a voltage is applied, the transmittance is increased and the bright display is achieved. Becomes possible. Specifically, as shown by a plurality of arrows at the bottom of FIG. 4, the vertically-oriented electro-optical device configured as described above is sandwiched between a pair of polarizing plates whose polarization axes A1 and A2 are orthogonal to each other. If the rubbing process is performed in the rubbing direction A3 parallel to the data line 6a and the 1H inversion driving is performed, a good black display can be obtained to the extent that the characteristics substantially depend on the characteristics of the polarizing plate when no voltage is applied. On the other hand, when a voltage is applied, the adverse effect of the horizontal electric field is reduced by the partition wall 301 provided in the region where the horizontal electric field is generated, and a very high transmittance is obtained by uniaxially falling down of the liquid crystal molecules according to the above-mentioned equation (1). Can be. Moreover, since the vertical alignment type liquid crystal is used, the contrast ratio, the viewing angle characteristic and the response characteristic are very excellent.

As shown in FIGS. 4 to 6, the partition 301 is not formed in the region facing the data line 6a, but in this portion, as shown in FIG. Since no horizontal electric field is generated therebetween, it is not necessary to take measures against the horizontal electric field. Conversely, forming the stripe-shaped partition wall 301 extending only in one direction as described above facilitates the manufacture thereof and also facilitates the vacuum injection step of the liquid crystal and the like.

In FIG. 6, the TFT array substrate 10
A base insulating film 12 is provided between the pixel switching TFT 30 and the plurality of pixel switching TFTs 30. The base insulating film 12 is made of T
By being formed on the entire surface of the FT array substrate 10, T
It has a function of preventing deterioration of the characteristics of the pixel switching TFT 30 due to roughening of the surface of the FT array substrate 10 during polishing, dirt remaining after cleaning, and the like. The base insulating film 12
For example, NSG (non-doped silicate glass), P
It is made of a highly insulating glass such as SG (phosphorous silicate glass), BSG (boron silicate glass), BPSG (boron phosphorus silicate glass), a silicon oxide film, a silicon nitride film, or the like.

In this embodiment, the semiconductor layer 1a extends from the high-concentration drain region 1e to form a first storage capacitor electrode 1f, and a part of the capacitor line 3b opposed to the first storage capacitor electrode 1f serves as a second storage capacitor electrode. The insulating thin film 2 including the film is connected to the scanning line 3a.
The storage capacitor 70 is formed by extending from a position facing the first dielectric film and forming a first dielectric film sandwiched between these electrodes.

In FIG. 6, the pixel switching TFT
Reference numeral 30 denotes an LDD (Lightly Doped Drain) structure, and includes a scanning line 3a and a channel region 1 of a semiconductor layer 1a in which a channel is formed by an electric field from the scanning line 3a.
a ', an insulating thin film 2 including a gate insulating film for insulating the scanning line 3a from the semiconductor layer 1a, a data line 6a, a low-concentration source region 1b and a low-concentration drain region 1c of the semiconductor layer 1a, and a high-concentration source of the semiconductor layer 1a. A region 1d and a high-concentration drain region 1e are provided. A corresponding one of the plurality of pixel electrodes 9a is connected to the high-concentration drain region 1e via the contact hole 8. Also, scanning line 3
A first interlayer insulating film 4 having a contact hole 5 leading to the high-concentration source region 1d and a contact hole 8 leading to the high-concentration drain region 1e is formed on the capacitor line 3a and the capacitor line 3b. Further, the data line 6a and the first
On the interlayer insulating film 4, a second interlayer insulating film 7 in which a contact hole 8 to the high concentration drain region 1e is formed. The above-described pixel electrode 9a is provided on the upper surface of the second interlayer insulating film 7 configured as described above.

As shown in FIGS. 4 and 6, a data line 6a is provided in a non-opening area of each pixel located in a gap between pixel electrodes 9a adjacent to each other on the left and right in FIG. A portion along the data line 6a in the contour of the opening area is defined, and the data line 6a prevents light leakage in the non-opening area. A storage capacitor 70 is formed below the data line 6a by using a portion of the capacitor line 3b protruding below the data line 6a from a main line portion of the capacitor line 3b. Have been.

Next, a modification of the first embodiment will be described with reference to FIG. In the first embodiment described above,
As shown in FIG. 6, the partition wall 301 can be formed relatively easily by patterning the counter electrode 21 with a resin. On the other hand, as shown in FIG. 8A, the light-shielding film 23 below (the upper side in the figure) the opposing electrode 21 made of an ITO film is patterned as an insulating material layer on the opposing substrate 20 to form a partition 301. 'May be formed. In this case, a transparent insulating film 302 may be provided between the pixel electrode 9a and the counter electrode 21 between them (at least on one of the substrates) to prevent a short circuit. As shown in FIG.
A partition 401 may be provided on the T array substrate side. In this case, a partition 401 is formed on the pixel electrode 9a via a transparent insulating film 402, and a rubbing process may be performed on the alignment film 22 on the counter substrate 20 side (not shown). Alternatively, as shown in FIG. 8C, after forming the alignment film 22 on the counter substrate 20, a partition wall 301 ″ may be provided. In this case, a rubbing process is performed on the alignment film 22. Further, instead of patterning and forming the partition wall 301 from the insulating material layer, for example, the substrate body (the counter substrate 20 or the TFT array substrate 10) is etched.
Insulating films (interlayer insulating films 12, 4)
Or by forming a groove (recess) in the region on the substrate except for the region where the partition 301 is to be formed, such as by forming a groove in 7).
The partition may be formed from a convex portion other than the groove. In this case, as in the case of the modification of FIG.
It is preferable to provide a transparent insulating film in order to prevent a short circuit between the electrode and the counter electrode 21.

In the above-described embodiment, the pixel switching TFT 30 is preferably set to a low level as shown in FIG.
Although it has a DD structure, it may have an offset structure in which impurity ions are not implanted into the low-concentration source region 1b and the low-concentration drain region 1c. A self-aligned TFT in which ions are implanted to form high-concentration source and drain regions in a self-aligned manner may be used. In the present embodiment, the gate switching TFT 30 has a single gate structure in which only one gate electrode is disposed between the high-concentration source region 1d and the high-concentration drain region 1e, but two or more gate electrodes are provided between them. It may be arranged.

The first embodiment described above is different from the first embodiment in that
Whether applied to a liquid crystal device other than the active matrix driving method, such as the TFD active matrix driving method and the passive matrix driving method, the unique effects of the present application for making the gap between the substrates uniform and reducing the adverse effect of the lateral electric field are obtained. Be demonstrated. Further, a liquid crystal device with a built-in drive circuit (FIG. 1)
And FIG. 2), the same effect can be obtained even if the first embodiment is applied to a liquid crystal device in which a driving circuit is externally provided.

(Second Embodiment) A second embodiment of the electro-optical device according to the present invention will be described with reference to FIGS. FIG. 9 is a partial perspective view of the lower side of the opposing substrate on which the partition walls are formed, as viewed obliquely from below. FIG. 10 is a pixel showing a voltage polarity and a region where a lateral electric field is generated in each electrode in the 1S inversion driving method. FIG. 2 is a schematic plan view of an electrode.

The second embodiment is different from the first embodiment in that the partition walls 501 are provided in stripes in the column direction (Y direction) along the data lines as shown in FIG.
The difference is that the 1S inversion driving method as shown in FIG. 10 is adopted, and the other configuration is the same as that of the first embodiment.

In the case of the 1S inversion driving method, as shown in FIG. 10A, during the period of displaying the image signal of the n-th field or frame, + or-for each pixel electrode 9a.
The polarity of the liquid crystal drive voltage indicated by is not inverted, and the pixel electrode 9a is driven with the same polarity for each column. Thereafter, as shown in FIG. 10B, when displaying the image signal of the (n + 1) th field or one frame, the voltage polarity of the liquid crystal driving voltage in each pixel electrode 9a is inverted, and the (n + 1) th field or one frame of the one frame is displayed. During the period of displaying the image signal, the polarity of the liquid crystal drive voltage indicated by + or-is not inverted for each pixel electrode 9a, and the pixel electrode 9a is driven with the same polarity for each column. Then, the states shown in FIGS. 10A and 10B are repeated at a cycle of one field or one frame. As a result, image display with reduced crosstalk and flicker can be performed while avoiding deterioration of the liquid crystal due to the application of the DC voltage. As can be seen from FIGS. 10A and 10B, in the 1S inversion driving method, the lateral electric field generation region C
2 is a pixel electrode 9a which is always adjacent in the row direction (X direction).
It is near the gap between them.

In the second embodiment, however, the partition 501 is provided in the horizontal electric field generation region C2, so that the display by the 1S inversion driving method can be performed while the adverse effect of the horizontal electric field is reduced by the partition 501. By using the vertical alignment type liquid crystal, the contrast ratio, viewing angle characteristics, and response characteristics can be improved.

(Third Embodiment) A third embodiment of the electro-optical device according to the present invention will be described with reference to FIGS. FIG. 11 is a partial perspective view of the lower side of the opposing substrate on which the partition walls are formed, as viewed obliquely from below. FIG. 12 is a pixel showing the voltage polarity and the region where a lateral electric field is generated in each electrode in the dot inversion driving method. FIG. 2 is a schematic plan view of an electrode.

In the third embodiment, as compared with the first embodiment described above, as shown in FIG. 11, the partition walls 601 are provided in a lattice shape so as to surround each pixel electrode in plan view. The second embodiment is different from the first embodiment in that a dot inversion driving method as shown in FIG. 12 is employed.

In the case of the dot inversion driving method, FIG.
As shown in the figure, during the period of displaying the image signal of the n-th field or the frame, the polarity of the liquid crystal drive voltage indicated by + or-is not inverted for each pixel electrode 9a, and is adjacent to each other in the row direction and the column direction. The pixel electrode 9a is alternately driven with the opposite polarity for each dot. Thereafter, as shown in FIG.
When displaying the (n + 1) th field or one frame image signal, the voltage polarity of the liquid crystal driving voltage in each pixel electrode 9a is inverted, and during the period of displaying the (n + 1) th field or one frame image signal, the pixel The polarity of the liquid crystal drive voltage indicated by + or-is not inverted for each electrode 9a, and the pixel electrode 9a is driven with the opposite polarity alternately for each dot adjacent in the row direction and the column direction. And FIG.
The state shown in FIG. 12A and FIG. 12B is repeated at a cycle of one field or one frame. As a result, image display with reduced crosstalk and flicker can be performed while avoiding deterioration of the liquid crystal due to the application of the DC voltage. FIG. 12 (a)
12 (b), in the dot inversion driving method, the horizontal electric field generation regions C1 and C2 are always near the four edges of each pixel electrode 9a.

However, in the third embodiment, since the partition 601 is provided in the horizontal electric field generation regions C1 and C2, the display can be performed by the dot inversion driving method while the adverse effect of the horizontal electric field is reduced by the partition 601. Moreover, by using the vertical alignment type liquid crystal, the contrast ratio, the viewing angle characteristics and the response characteristics can be improved.

In the electro-optical device according to each of the embodiments described above, the partition walls are in the form of stripes or grids. For example, in the first embodiment, islands are formed in the regions along the scanning lines except for the portions that intersect with the data lines. Partitions may be provided for each side of each pixel, or in the second embodiment, island-shaped partitions may be provided for each side of each pixel in a region along a data line except for a portion intersecting a scanning line. Alternatively, in the third embodiment, island-shaped partitions are provided for each pixel side in a region along a scanning line except for a portion intersecting with a data line and in a region along a data line except for a portion intersecting with a scanning line. You may. Further, in the electro-optical device of each embodiment, the outer surface of the opposing substrate 20 and the TF
On the outer surface of the T array substrate 10, a polarizing film, a retardation film, a polarizing plate, and the like are arranged in a predetermined direction according to a normally white mode / normally black mode or the like.

Further, in each of the above embodiments, JP-A-9-127497, JP-B-3-52611, JP-A-3-125123, and JP-A-8-171.
As disclosed in Japanese Patent Publication No. 101-101 or the like, a light-shielding film made of, for example, a high-melting-point metal may be provided on the TFT array substrate 10 at a position facing the pixel switching TFT 30 (that is, below the TFT). . Thus, TFT
If a light-shielding film is also provided on the lower side, reflection on the back surface (return light) from the side of the TFT array substrate 10 and a combination of a plurality of liquid crystal devices via a prism or the like constitute another optical system. It is possible to prevent a projected light portion or the like that penetrates through the prism or the like from the liquid crystal device described above from entering the TFT of the liquid crystal device. Further, a micro lens may be formed on the counter substrate 20 so as to correspond to one pixel. In this case, a bright liquid crystal device can be realized by improving the efficiency of collecting incident light. Furthermore, a dichroic filter that produces RGB colors using light interference may be formed by depositing a number of interference layers having different refractive indexes on the counter substrate 20. According to the counter substrate with the dichroic filter, a brighter color liquid crystal device can be realized.

(Manufacturing Process of Electro-Optical Device) Next, a manufacturing process of the electro-optical device of the present embodiment will be described with reference to FIG.
This will be described with reference to FIG. Here, FIG. 13 is a process chart showing the manufacturing process in order, and FIGS. 14 to 16 show the liquid crystal in the manufacturing process of the electro-optical device for 1H inversion driving, 1S inversion driving, and dot inversion driving, respectively. FIG. 4 is a schematic plan view showing a state of an injection step. Also,
FIG. 17 is a schematic side view showing a state of the liquid crystal injection step of the ink jet system.

As shown in FIG. 13, the manufacturing process of the electro-optical device according to the above-described embodiment includes a process on the TFT array substrate 10 side, a process on the counter substrate 20 side, and a process after bonding both. Divided into

On the other hand, in FIG. 13, the process on the TFT array substrate 10 side is as follows: an element substrate in which pixel electrodes, TFT 30 and other elements and wiring such as scanning lines and data lines are formed on a substrate such as quartz by planar technology. For
First, receiving cleaning is performed to remove dirt, dust, and dust attached thereto (step S1).

Next, an alignment film 16 for vertical alignment is formed (step S2). Specifically, for example, baking is performed after a polyimide (PI) -based material that is a material of the alignment film 16 is applied to the entire surface of the substrate.

Next, an alignment process is performed on the formed alignment film 16 by rubbing the surface of the alignment film 16 in a fixed direction (step S3). At this time, the liquid crystal can be oriented in a predetermined direction and a predetermined pretilt angle can be given to the liquid crystal by selecting the above-described polyimide material and rubbing conditions in the rubbing process.

Next, the sealing material 52 is applied to the sealing area.
Is printed (step S4), and the upper and lower conductive members 106 are applied to the four corners of the sealing material 52 (step S5).

In FIG. 13, on the other hand, the process on the counter substrate 20 side is as follows. First, dirt and dust adhered to the counter substrate 20 on which a counter electrode and wiring are formed on a substrate such as glass. A cleaning for receiving dust is performed (step S6).

Next, an alignment film 22 for vertical alignment is formed (step S7). Specifically, for example, baking is performed after a polyimide (PI) -based material that is a material of the alignment film 22 is applied to the entire surface of the substrate. In this embodiment, the alignment film 2
The rubbing process for No. 2 need not be performed.

Next, the insulating resin is patterned by photolithography and etching to form partitions (step S8).

In FIG. 13, the TFT array substrate 10 having passed through steps S1 to S5 and the counter substrate 20 having passed through steps S6 to S7 are bonded together with a sealing material 52 (step S9), and after being accurately aligned (step S10). Then, the substrates are clamped under pressure until the gap between the substrates becomes a desired liquid crystal cell gap (Step S11). At this time, such a desired inter-substrate gap is obtained by the partition walls (see FIGS. 5 and 9) having a predetermined height provided over the entire image display area on the counter substrate 20 side.

Next, the sealing material 52 is cured by irradiating ultraviolet rays, heating, or both of them (step S12).

Next, a liquid crystal injection step is performed (step S13).

Here, the liquid crystal injection step will be described in detail with reference to FIGS.

As shown in FIG. 14, when the stripe-shaped partition wall 301 is formed in the row direction as in the first embodiment, the injection port 53 in which a part of the sealing material 53 is missing is formed.
a is arranged on a line extending in the row direction in which the partition wall 301 extends in a plan view. Then, the liquid crystal is vacuum-injected through the injection port 53a. As a result, an increase in the flow resistance of the liquid crystal due to the formation of the partition wall 301 can be suppressed.
In particular, since the end of the partition 301 located on the left side in the figure is formed at a slight distance from the inner wall of the sealing material 53, as shown by the arrow 50a, each partition 301 is inserted through a space without the partition 301. The liquid crystal can be distributed in the space between 301.

Alternatively, as shown in FIG. 15, when striped partition walls 401 are formed in the column direction as in the second embodiment, the injection port 53a in which a part of the sealing material 53 is missing is The partition 401 is arranged on a line extending in the row direction in a plan view. Then, the liquid crystal is vacuum-injected through the injection port 53a. As a result, an increase in the flow resistance of the liquid crystal due to the formation of the partition 401 can be suppressed. In particular, in the figure, since the end of the partition 401 located on the lower side is formed at a slight distance from the inner wall of the sealing material 53, as shown by an arrow 50a, each end is formed through a space without the partition 401. The liquid crystal can be distributed over the space between the partitions 401.

Returning to FIG. 13 again, the liquid crystal injection port is sealed with the sealing material 54 (step S14), and the substrate is divided into a plurality of FIG.
After dividing into the liquid crystal device as shown in FIG. 2 (step S15), washing again (step S16), and after conducting continuity / insulation inspection of predetermined wiring and elements, inspection of display unevenness, and the like ( Step S17), mounting processing such as connection of external wiring, attachment of a polarizing plate, a retardation film, and the like is performed (step S18), and the electro-optical device is completed.

According to the manufacturing method described above, the electro-optical device according to the first and second embodiments of the present invention can be manufactured easily. In particular, since the gap between the two is defined by the partition wall 301 or 401 disposed between the substrates, the injection of the vertical alignment type liquid crystal that does not cause a color change on the panel surface due to the birefringence effect at the time of liquid crystal injection is excessively or insufficiently performed. Can be done without. Even if the gap material is not scattered in the display area, no problem occurs.

In the manufacturing method described above, the liquid crystal is vacuum-injected into the gap between the two substrates after the two substrates are bonded. However, after the space defined by the partition walls is filled with the electro-optical material, You may make it bond both substrates. According to this manufacturing method, in particular, since the partition 601 is in a lattice shape for the dot inversion driving method as in the third embodiment shown in FIG. 16, the liquid crystal is injected into the space 50b divided by each partition 601 by vacuum injection. The liquid crystal can be filled in the space 50b even when it is difficult to secure a flow path for injecting the liquid crystal. Specifically, for example, as shown in FIG. 17, the liquid crystal 5 is formed in a space 50 b partitioned by the partition wall 601 by using an inkjet head 800 capable of ejecting the liquid crystal 50 c at a fine pitch.
0c may be dropped (in this case, the liquid crystal 50c is dropped by turning over the opposite substrate 20 on which the partition wall 601 is formed,
Thereafter, the TFT array substrate 10 which is also turned over
To be attached). As described above, the step of filling the liquid crystal by the ink jet method can be performed relatively easily. Note that the first or second ink jet method is used.
The liquid crystal may be filled in the space partitioned by the stripe-shaped partition as in the embodiment.

(Electronic Apparatus) Next, an embodiment of an electronic apparatus including the electro-optical device according to the embodiment described in detail above will be described with reference to FIGS.

First, FIG. 18 shows a liquid crystal device 100 including the electro-optical device according to the above-described embodiment and a driving circuit 1004 thereof.
1 shows a schematic configuration of an electronic device provided with.

In FIG. 18, the electronic equipment includes a display information output source 1000, a display information processing circuit 1002, and a drive circuit 1.
004, a liquid crystal device 100, a clock generation circuit 1008, and a power supply circuit 1010. The display information output source 1000 includes a ROM (Read Only Memory),
It includes a memory such as an AM (Random Access Memory), an optical disk device, and a tuning circuit that tunes and outputs an image signal, and displays display information such as an image signal in a predetermined format based on a clock signal from a clock generation circuit 1008. Output to the information processing circuit 1002. The display information processing circuit 1002 includes various known processing circuits such as an amplification / polarity inversion circuit, a phase expansion circuit, a rotation circuit, a gamma correction circuit, and a clamp circuit. Digital signals are sequentially generated from the information and output to the driving circuit 1004 together with the clock signal CLK. The drive circuit 1004 drives the liquid crystal device 100. The power supply circuit 1010 supplies a predetermined power to each of the above-described circuits. Note that the drive circuit 1004 may be mounted on the TFT array substrate included in the liquid crystal device 100, and in addition, the display information processing circuit 1002 may be mounted.

Next, FIGS. 19 to 21 show specific examples of the electronic apparatus thus configured.

In FIG. 19, a liquid crystal projector 1100, which is an example of electronic equipment, prepares three liquid crystal modules each including the liquid crystal device 100 in which the above-described drive circuit 1004 is mounted on a TFT array substrate, and each of them has a light valve for RGB. The projector is used as 100R, 100G, and 100B. LCD projector 11
In 00, when the projection light is emitted from a lamp unit 1102 of a white light source such as a metal halide lamp, three mirrors 1106 and two dichroic mirrors 1108
Light components R, G, and B corresponding to the three primary colors RGB.
Light valves 100R, 1R corresponding to each color
00G and 100B respectively. At this time, in particular, the B light is applied to the incident lens 1 to prevent light loss due to a long optical path.
122, relay lens 1123 and emission lens 1124
And is guided through a relay lens system 1121 composed of Then, the light components corresponding to the three primary colors modulated by the light valves 100R, 100G, and 100B, respectively, are combined again by the dichroic prism 1112, and then projected as a color image on the screen 1120 via the projection lens 1114.

In FIG. 20, a laptop personal computer (PC) 1200 for multimedia, which is another example of electronic equipment, includes the above-described liquid crystal device 100 in a top cover case, and further includes a CPU,
The keyboard 1202 accommodates a memory, a modem, and the like.
Is provided.

Further, as shown in FIG.
Liquid crystal device 1 which does not include the display device 4 or the display information processing circuit 1002
In the case of 00, the IC 1324 including the drive circuit 1004 and the display information processing circuit 1002
TCP (Tape Carrier Package) 1 mounted on 2
The liquid crystal device 100 can be physically, electrically and electrically connected to the TFT array substrate 320 via an anisotropic conductive film provided on the peripheral portion of the TFT array substrate 1 to produce, sell, use, and the like.

In addition to the electronic devices described with reference to FIGS. 19 to 21, a liquid crystal television, a viewfinder type or a monitor direct-view type video tape recorder, a car navigation device, an electronic organizer, a calculator, a word processor, an engineering machine, etc. A workstation (EWS), a mobile phone, a video phone, a POS terminal, a device including a touch panel, and the like are examples of the electronic device illustrated in FIG.

The present invention is not limited to the above-described embodiments, but can be appropriately modified without departing from the spirit or spirit of the invention which can be read from the claims and the entire specification. Such an electro-optical device and a projection type display device having the same are also included in the technical scope of the present invention.

[Brief description of the drawings]

FIG. 1 is a plan view illustrating an overall configuration of an electro-optical device according to an embodiment of the invention.

FIG. 2 is a sectional view taken along line H-H 'of FIG.

FIG. 3 is an equivalent circuit of various elements, wirings, and the like provided in a plurality of pixels in a matrix forming an image display area in the electro-optical device of the embodiment.

FIG. 4 is a plan view of a plurality of adjacent pixel groups on a TFT array substrate on which data lines, scanning lines, pixel electrodes, and the like are formed in the electro-optical device according to the first embodiment.

FIG. 5 is a partial perspective view illustrating a partition provided on an opposing substrate in the electro-optical device according to the first embodiment.

FIG. 6 is a sectional view taken along line A-A ′ of FIG. 4;

FIG. 7 is a schematic plan view of a pixel electrode showing a voltage polarity and a region where a lateral electric field is generated in each electrode in the 1H inversion driving method used in the first embodiment.

FIG. 8 is a cross-sectional view showing various modifications of the partition wall in the first embodiment.

FIG. 9 is a partial perspective view showing a partition provided on an opposing substrate in the electro-optical device according to the second embodiment of the present invention.

FIG. 10 is a schematic plan view of a pixel electrode showing a voltage polarity and a region where a lateral electric field is generated in each electrode in the 1S inversion driving method used in the second embodiment.

FIG. 11 is a partial perspective view showing a partition provided on a counter substrate in an electro-optical device according to a third embodiment of the present invention.

FIG. 12 is a schematic plan view of a pixel electrode showing a voltage polarity and a region where a horizontal electric field is generated in each electrode in a dot inversion driving method used in the second embodiment.

FIG. 13 is a process chart showing each step in the manufacturing process of the embodiment.

FIG. 14 is a schematic plan view showing a state of a liquid crystal injection step in a manufacturing process of the electro-optical device for 1H inversion driving.

FIG. 15 is a schematic plan view showing a state of a liquid crystal injection step in a manufacturing process of the electro-optical device for 1S inversion driving.

FIG. 16 is a schematic plan view showing a state of a liquid crystal injection step in a manufacturing process of the electro-optical device for dot inversion driving.

FIG. 17 is a schematic side view showing a state of a liquid crystal injection step of an inkjet system.

FIG. 18 is a block diagram illustrating a schematic configuration of an embodiment of an electronic device according to the present invention.

FIG. 19 is a cross-sectional view illustrating a liquid crystal projector as an example of an electronic apparatus.

FIG. 20 is a front view showing a personal computer as another example of the electronic apparatus.

FIG. 21 is a perspective view illustrating a liquid crystal device using TCP as another example of the electronic apparatus.

[Explanation of symbols]

 9a: Pixel electrode 10: TFT array substrate 16: Alignment film 20: Counter substrate 21: Counter electrode 22: Alignment film 23: Light shielding film 30: TFT 50: Liquid crystal layer 50c: Liquid crystal 52: Seal material 53: Light shielding film 53a: Note Entrance 54: sealing material 100: substrate 101: data line driving circuit 104: scanning line driving circuit 301, 301 ', 301 ", 501, 601: partition walls 302, 402 ... insulating film 800: inkjet head

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) G02F 1/1333 505 G02F 1/1333 505 5C094 1/1337 525 1/1337 525 5G435 1/1341 1/1341 1 / 1368 G09F 9/00 360D G09F 9/00 360 9/30 320 9/30 320 338 338 G02F 1/136 500 F term (reference) 2H088 EA12 FA20 HA04 HA08 HA12 HA14 MA01 2H089 LA09 MA01X NA14 NA17 NA22 NA04 PA05 QA14 TA TA05 TA09 TA12 TA13 TA18 UA05 2H090 HA04 HB02X HB08Y LA02 LA04 LA05 LA15 LA16 MA01 MA07 MB01 2H092 HA28 JA24 JB54 JB56 JB69 MA37 PA03 PA08 PA09 PA13 RA05 2H093 NA16 NA32 ND10 ND15 ND17 A12A13 A03 A03 A03 A03 A03 A03 A04 DA15 EA04 EA07 EB02 EC04 ED14 ED15 ED20 FB12 FB15 FB16 GB01 5G435 AA00 AA02 AA03 AA17 B B12 BB17 CC09 CC12 DD02 DD05 EE33 FF01 FF03 FF13 GG01 GG02 GG03 GG04 GG08 GG28 GG46 HH12 HH14 HH16 KK05 LL04 LL07 LL08 LL12 LL15 LL17

Claims (15)

[Claims] 1. A pair of first and second substrates opposing each other with an electro-optical material interposed therebetween, and disposed on a side of the first substrate opposing the electro-optical material, the first substrate being inverted and driven in a first cycle. A plurality of pixel electrodes including a first pixel electrode group for driving and a second pixel electrode group for inversion driving at a second period complementary to the first period, and facing the electro-optical material on the second substrate A counter electrode disposed on the side where the first and second substrates are disposed; and a dielectric that is disposed between the first and second substrates to define a gap therebetween and separates the first and second pixel electrode groups when viewed in plan. An electro-optical device comprising: a partition wall; 2. The electro-optic material according to claim 1, wherein the electro-optic material is a vertically oriented electro-optic material having a negative dielectric anisotropy, and at least one of the first and second substrates faces the electro-optic material. The liquid crystal display device further comprising: an alignment film disposed and rubbed so that the alignment state of the electro-optical material is substantially vertical when no voltage is applied and has a predetermined pretilt angle. Item 2. The electro-optical device according to item 1. 3. The plurality of pixel electrodes are arranged in a matrix in a row direction and a column direction, and the first and second pixel electrode groups are alternately arranged in a plurality in the row direction. The electro-optical device according to claim 2, wherein the partition extends along the row direction, and the rubbing is performed along the column direction when viewed in plan. 4. The plurality of pixel electrodes are arranged in a matrix in a row direction and a column direction, and the first and second pixel electrode groups are alternately arranged in the column direction. 3. The electro-optical device according to claim 2, wherein the partition extends along the column direction, and the rubbing process is performed along the row direction when viewed in plan. 4. 5. The plurality of pixel electrodes are arranged in a matrix in a row direction and a column direction, and the first and second pixel electrode groups are alternately arranged in a row direction. 3. The electro-optical device according to claim 1, wherein the partition extends along the row direction. 6. The plurality of pixel electrodes are arranged in a matrix in a row direction and a column direction, and the first and second pixel electrode groups are arranged alternately in the column direction. 3. The electro-optical device according to claim 1, wherein the partition extends along the column direction. 7. The plurality of pixel electrodes are arranged in a matrix in a row direction and a column direction, and the first and second pixel electrode groups are alternately arranged in the row direction and the column direction. The electro-optical device according to claim 1, wherein the partition has a lattice shape. 8. The partition according to claim 1, wherein the partition is formed by patterning an insulating material layer on at least one of the first and second substrates. An electro-optical device according to claim 1. 9. The method according to claim 1, wherein the partition is formed by patterning a groove in at least one of the first and second substrates. Electro-optical device. 10. A plurality of switching elements arranged in a matrix on the first substrate and connected to the plurality of pixel electrodes, respectively, and a plurality of switching elements arranged on the first substrate and The electro-optical device according to any one of claims 1 to 9, further comprising a plurality of scanning lines and a plurality of data lines which are respectively connected and cross each other. 11. A first pixel electrode group for inversion driving in a first cycle on a first substrate and a second pixel electrode group complementary to the first cycle.
A step of forming a plurality of pixel electrodes including a second pixel electrode group to be periodically inverted and driven; a step of forming a counter electrode on a second substrate; and a step of forming a counter electrode between the first and second substrates. A step of defining a gap between them and forming a partition made of a dielectric material that separates the first and second pixel electrode groups from at least one of the first and second substrates in plan view; An electro-optical device, comprising: a step of filling an electro-optical substance in a space defined by the above, and a step of bonding the first and second substrates to each other after filling the electro-optical substance. Manufacturing method. 12. The step of filling the electro-optical material,
The method according to claim 11, wherein the method is performed by an ink-jet method. 13. A first pixel electrode group for inversion driving in a first cycle on a first substrate and a second pixel electrode group complementary to the first cycle.
A step of forming a plurality of pixel electrodes including a second pixel electrode group to be periodically inverted and driven; a step of forming a counter electrode on a second substrate; and a step of forming a counter electrode between the first and second substrates. Forming a gap made of a dielectric material defining at least one of the first and second substrates, which defines a gap therebetween and separates the first and second pixel electrode groups when viewed in a plan view; After forming, the first and second substrates are bonded to each other with a sealing material, and a part of the sealing material is viewed in a plan view in a gap between the bonded first and second substrates. Vacuum-injecting the electro-optical substance through the missing inlet. 14. The method of manufacturing an electro-optical device according to claim 13, wherein the inlet is located on an extension in a direction in which the partition wall portion extends in a plan view. 15. A light valve comprising the electro-optical device according to any one of claims 1 to 10, a light source for projecting light to the light valve, and projecting the projection light emitted from the light valve. And a projection type display device comprising: