JP2001024213A - Reflection type optical sensor and its manufacture - Google Patents
Reflection type optical sensor and its manufactureInfo
- Publication number
- JP2001024213A JP2001024213A JP19241099A JP19241099A JP2001024213A JP 2001024213 A JP2001024213 A JP 2001024213A JP 19241099 A JP19241099 A JP 19241099A JP 19241099 A JP19241099 A JP 19241099A JP 2001024213 A JP2001024213 A JP 2001024213A
- Authority
- JP
- Japan
- Prior art keywords
- light
- collective
- sensor
- type optical
- sealing resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
Landscapes
- Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は被検出物の表面から
の反射光を検出する反射型光センサとその製造方法に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a reflection type optical sensor for detecting light reflected from the surface of an object to be detected and a method of manufacturing the same.
【0002】[0002]
【従来の技術】反射型光センサは非接触で物体の有無を
検出するセンサであり、モータ等の回転体の制御や、
紙、フィルム等の位置、端部の検出などに使用される。
図9は反射型光センサの原理的な構成を示し、パッケー
ジ1に、発光素子2(例えば赤外LED)と受光素子3
(例えばフォト・トランジスタ)を収容してあり、発光
素子2から光が矢印のように出て検出対象の物体4で反
射するのを、受光素子3で検知する。これによって、反
射型光センサの近傍における物体4の有無や位置に応じ
て受光素子3からの出力が変化し、これを検出信号とし
て用いるのである。2. Description of the Related Art A reflection type optical sensor is a sensor for detecting the presence or absence of an object in a non-contact manner.
It is used to detect the position of paper, film, etc., and the edge.
FIG. 9 shows a principle configuration of a reflection type optical sensor, in which a package 1 includes a light emitting element 2 (for example, an infrared LED) and a light receiving element 3.
(E.g., a phototransistor), and the light-receiving element 3 detects light emitted from the light-emitting element 2 as shown by an arrow and reflected by the object 4 to be detected. As a result, the output from the light receiving element 3 changes according to the presence or absence and the position of the object 4 in the vicinity of the reflection type optical sensor, and this is used as a detection signal.
【0003】図10は以前に発明者らが提案した反射型
光センサの例で、図10(A)が外観、(A)のB−B
断面が同図(B)である。ガラス繊維入りエポキシ樹脂
等で作った基板9に、遮光性樹脂で成形した遮光枠10
を接合してあり、遮光枠10には貫通穴の窓8が二つあ
る。同図(B)のごとく、それぞれの窓8の内側で発光
素子2と受光素子3を基板9上の導電パターンにダイボ
ンドし、金属線13でワイヤボンドして、窓8に透光性
の封止樹脂11を充填して両素子を封入してある。基板
9の側面の導電部12はスルーホール技術により円弧状
の窪みに導電層を形成したもので、これにより基板9上
面の導電パターンを基板下面の端子電極に接続してい
る。発光素子2から出た光は発光素子側の窓8から出て
被検出物体を照射し、物体表面からの反射光が受光素子
側の窓8から戻って受光素子3に達し、検出が行われ
る。FIG. 10 shows an example of a reflection type optical sensor proposed by the present inventors. FIG. 10 (A) shows the appearance, and FIG.
The cross section is shown in FIG. A light-shielding frame 10 formed of a light-shielding resin on a substrate 9 made of an epoxy resin or the like containing glass fiber.
The light-shielding frame 10 has two windows 8 having through holes. As shown in FIG. 3B, the light emitting element 2 and the light receiving element 3 are die-bonded to the conductive pattern on the substrate 9 inside each window 8 and wire-bonded with a metal wire 13 to form a light-transmitting seal on the window 8. Both elements are encapsulated by filling a sealing resin 11. The conductive portion 12 on the side surface of the substrate 9 is formed by forming a conductive layer in an arc-shaped depression by a through-hole technique, thereby connecting the conductive pattern on the upper surface of the substrate 9 to the terminal electrode on the lower surface of the substrate. The light emitted from the light emitting element 2 exits through the window 8 on the light emitting element side and irradiates the object to be detected, and the reflected light from the object surface returns from the window 8 on the light receiving element side to reach the light receiving element 3 and is detected. .
【0004】図11の反射型光センサも発明者らが提案
したもので、図11(A)が斜視図、(A)のB−B断
面図が同図(B)である。先の図10のものと同様に、
基板9に発光素子2と受光素子3を実装して金属線13
でワイヤボンドし、これを封止樹脂11中に封入してあ
るが、図10と違って遮光枠10を用いることをせず、
台形の封止樹脂11の側面を金属のメッキ層などの遮光
膜14で被覆してある。封止樹脂11の上面は遮光膜が
なく、全面が透光面で光が出入りする窓であり、この窓
の面積を小さくすることにより検出精度を上げることが
できる。The reflection type optical sensor shown in FIG. 11 has also been proposed by the present inventors. FIG. 11A is a perspective view, and FIG. 11B is a sectional view taken along line BB of FIG. Like the previous one in FIG.
The light emitting element 2 and the light receiving element 3 are mounted on
This is sealed in the sealing resin 11, but unlike FIG. 10, the light shielding frame 10 is not used,
The side surface of the trapezoidal sealing resin 11 is covered with a light shielding film 14 such as a metal plating layer. The upper surface of the sealing resin 11 has no light-shielding film, and the entire surface is a window through which light enters and exits.
【0005】図12は特開平8−297011号に開示
された反射型光センサである。センサヘッド21は基部
22の貫通穴23、24に一対の光ファイバー25、2
6をそれぞれ通して、圧力ばめあるいは接着等で保持す
る構造である。光ファイバー25は出力端部27を有
し、他端が光源29に接続される。一方、光ファイバー
26は入力端部28を有し、他端が光強度検出手段30
に接続される。光ファイバーの出力端部27と入力端部
28の端面は光ファイバーの軸線に対し斜めに削ってあ
り、互いに接触するか、あるいはそれに近い程度に接近
して配置されている。このセンサヘッド21を物体31
に近づけると、光源29から出た光が光ファイバー25
を経て出力端27から出射されて物体31に当たり、物
体31の表面からの反射光が入力端部28から光ファイ
バー26に入り、光強度検出手段30に伝えられて検出
されるのである。FIG. 12 shows a reflection type optical sensor disclosed in Japanese Patent Application Laid-Open No. 8-297011. The sensor head 21 has a pair of optical fibers 25, 2 in through holes 23, 24 of the base 22.
6 through which each is held by pressure fitting or bonding. The optical fiber 25 has an output end 27, and the other end is connected to the light source 29. On the other hand, the optical fiber 26 has an input end 28, and the other end has a light intensity detecting means 30.
Connected to. The end faces of the output end 27 and the input end 28 of the optical fiber are cut at an angle to the axis of the optical fiber, and are arranged so as to be in contact with each other or close to each other. This sensor head 21 is
, The light emitted from the light source 29 is
The reflected light from the surface of the object 31 enters the optical fiber 26 from the input end 28, is transmitted to the light intensity detecting means 30, and is detected.
【0006】[0006]
【発明が解決しようとする課題】上述のような従来の反
射型光センサのうち、図10および図11のものは構造
簡単で、大きな集合基板を用いて製作することが可能で
ある。すなわち集合基板上に個々の基板9となる多数の
領域を縦横に行列状に配置して、多数個分の発光素子2
と受光素子3を実装した後、集合基板に集合遮光枠を接
着して集合遮光枠の窓に封止樹脂11を充填したり、あ
るいは集合遮光枠を用いず、基板全面に封止樹脂11を
充填して封止樹脂層だけを斜面を形成しながらハーフダ
イシングし、封止樹脂11の側面に遮光膜14をメッキ
したりしてから、全体をカッターで縦横にダイシングす
れば、切り落とされた各部分が個別の反射型光センサに
なる。従って非常に生産性がよいが、光が封止樹脂中で
散乱したり吸収されたりするので、検出感度や検出精度
等の性能や、光の利用効率はあまり高くすることができ
ない。Among the above-mentioned conventional reflection-type optical sensors, those shown in FIGS. 10 and 11 are simple in structure and can be manufactured using a large collective substrate. In other words, a large number of regions to be individual substrates 9 are arranged in rows and columns on the collective substrate, and
After mounting the light-receiving element 3 and the collective light-shielding frame, the collective light-shielding frame is adhered to the collective substrate, and the sealing resin 11 is filled in the window of the collective light-shielding frame. After filling, only the sealing resin layer is half-diced while forming a slope, the light shielding film 14 is plated on the side surface of the sealing resin 11, and then the whole is vertically and horizontally diced with a cutter. The part becomes an individual reflection type optical sensor. Therefore, although the productivity is very good, since light is scattered or absorbed in the sealing resin, performance such as detection sensitivity and detection accuracy and light use efficiency cannot be made very high.
【0007】また、図12のものは光ファイバー25、
26を用いていて光をこれに閉じ込めるので、検出性能
や光の利用効率を高めることはできるが、センサヘッド
21の構成として、基部22の貫通穴23、24に光フ
ァイバー25、26を挿入したりせねばならず、また光
ファイバー25、26の他端を光源29や光強度検出手
段30に連結する構造も必要であって、1個ずつ個別に
作らねばならず、先の図10や図11のもののように集
合的に能率よく製作することができなくてコスト高にな
る。本発明はこれらの問題を解決して、簡単な構造で光
ファイバーを用いて高性能化した反射型光センサと、こ
れを集合基板を用いた多数個取により廉価に製作する方
法を実現するものである。FIG. 12 shows an optical fiber 25,
Since the light is confined to this by using the 26, the detection performance and the light use efficiency can be improved. However, as the configuration of the sensor head 21, the optical fibers 25 and 26 are inserted into the through holes 23 and 24 of the base 22. Also, a structure for connecting the other ends of the optical fibers 25 and 26 to the light source 29 and the light intensity detecting means 30 is necessary, and they must be individually manufactured one by one. It cannot be efficiently manufactured collectively like products, resulting in high costs. The present invention solves these problems, and realizes a reflection type optical sensor which has a high performance by using an optical fiber with a simple structure, and a method of manufacturing the same at a low cost by using a multi-unit using a collective substrate. is there.
【0008】[0008]
【課題を解決するための手段】本発明のフォトリフレク
タは、基板上に発光素子と受光素子を実装して透光性の
封止樹脂中に封入してあり、この点は図10や図11の
ものと共通するが、その上に発光側と受光側の2本の光
ファイバーを樹脂中にインサートしたセンサヘッドを積
層して構成する点が異なる。なお、両光素子が直接作用
し合うことを防ぐために、基板上、両素子の間に遮光板
を置いて上記の封止樹脂を分離してある。樹脂に封入し
た2本の光ファイバーは樹脂の上下面を貫通していて、
光ファイバーの上下端面がセンサヘッド上下面の一部に
なっている。In the photoreflector of the present invention, a light emitting element and a light receiving element are mounted on a substrate and sealed in a translucent sealing resin. However, the difference is that a sensor head in which two optical fibers on the light emitting side and the light receiving side are inserted in a resin is laminated thereon. In order to prevent the two optical elements from directly acting on each other, a light-shielding plate is placed between the two elements on the substrate to separate the sealing resin. The two optical fibers sealed in the resin penetrate the upper and lower surfaces of the resin,
The upper and lower end surfaces of the optical fiber are part of the upper and lower surfaces of the sensor head.
【0009】前記2本の光ファイバーの端面は、センサ
ヘッドの表面では接近していてほぼ隣接しており、反対
側である前記封止樹脂との接合面では互いに離れてい
て、それぞれ前記発光素子および受光素子に面してい
る。従って、両光ファイバーの軸線をそれぞれ含む互い
に平行な2平面の方向への両軸線の投影がある角度で交
わっている。そして、これら平行な2平面間の距離は少
なくとも両光ファイバーの半径の和以上である。すなわ
ち、かりに両光ファイバーをそれらの端面以上に延長し
た場合、両光ファイバーは互いに突き当たらずにすれ違
う。The end faces of the two optical fibers are close to each other and substantially adjacent to each other on the surface of the sensor head, and are separated from each other on the bonding surface with the sealing resin on the opposite side. Facing the light receiving element. Accordingly, the projections of the two optical fibers in directions of two parallel planes including the axes of the two optical fibers intersect at an angle. The distance between these two parallel planes is at least equal to the sum of the radii of both optical fibers. That is, when the two optical fibers are extended beyond their end faces, the two optical fibers pass each other without abutting each other.
【0010】このような反射型光センサの製造は、大型
の集合基板であって縦横に分割すると多数の反射型光セ
ンサの基板になるもの、例えば100〜200mm角の
集合基板を用いて行う。集合基板の導電パターン面に多
数の発光素子と受光素子を実装し、発光素子と受光素子
の間の基板上に遮光板を土手状に接着する。そして集合
基板の全面に、透光性の封止樹脂を遮光板とほぼ同じ高
さに充填して、これらの素子群を封入する。この上に発
光素子、受光素子と位置を合わせて、光ファイバーを封
入した樹脂のセンサヘッドを接着するが、このセンサヘ
ッドも光センサ1個分のものを多数配置するのでなく、
何個分も1列につながった集合センサヘッドを必要な数
だけ並べて用いる。こうしてできた集合体を縦横に切断
して発光素子と受光素子、および発光側光ファイバーと
受光側光ファイバーが対になった領域別に分割すれば、
各小片がそれぞれ反射型光センサの完成品になる。The production of such a reflection-type optical sensor is carried out using a large-sized collective substrate which, when divided vertically and horizontally, becomes a substrate for a large number of reflective-type optical sensors, for example, a collective substrate of 100 to 200 mm square. A large number of light emitting elements and light receiving elements are mounted on the conductive pattern surface of the collective substrate, and a light-shielding plate is bonded in a bank shape on the substrate between the light emitting elements and light receiving elements. Then, the entire surface of the collective substrate is filled with a light-transmitting sealing resin at substantially the same height as the light-shielding plate to encapsulate these element groups. A light emitting element and a light receiving element are aligned thereon, and a resin sensor head in which an optical fiber is sealed is adhered. However, this sensor head is not provided with a large number of elements for one optical sensor.
A required number of collective sensor heads connected in one row are arranged in a necessary number and used. If the assembly thus formed is cut vertically and horizontally and divided into light-emitting elements and light-receiving elements, and light-emitting side optical fibers and light-receiving side optical fibers are paired,
Each small piece is a completed reflection type optical sensor.
【0011】上記のように、集合基板による反射型光セ
ンサの製造においては、センサヘッドが何個分も1列に
つながった集合センサヘッドを用いるが、本発明ではこ
のような集合センサヘッドを次の方法で能率よく製作す
る。すなわち樹脂の成形用の型あるいは容器に、1個の
センサヘッドの封入長さの何倍もの長さの光ファイバー
を複数本ずつ2列に取り付ける。取り付け方は各列内で
は光ファイバーが互いに平行で所定の一定間隔をとり、
列間では光ファイバーが前記一定の角度で交差しながら
互いにほぼ接するようにしたもので、これに樹脂を注入
して固化する。従って、多くの光ファイバーが筋交い状
に封入された樹脂板が得られる。この樹脂板を光ファイ
バー同士の交点を結んで通る平行線群、およびこれらの
平行線群の中間を通る平行線群に沿ってカッターで短冊
状に切断、分割すれば、短冊状の各片が集合基板への取
り付け用の集合センサヘッドになる。これらの方法によ
り、反射型光センサを多数個取りで能率よく製造でき
る。As described above, in the manufacture of the reflection type optical sensor using the collective substrate, a collective sensor head in which a number of sensor heads are connected in one line is used. It is manufactured efficiently by the method described above. That is, a plurality of optical fibers each having a length many times as long as the length of one sensor head are attached to a resin molding die or container in two rows. The installation method is that the optical fibers are parallel to each other in each row and take a predetermined fixed interval,
Optical fibers are arranged between the rows so as to be substantially in contact with each other while intersecting at the predetermined angle, and resin is injected into the optical fibers and solidified. Therefore, a resin plate in which many optical fibers are sealed in a staggered manner is obtained. If this resin plate is cut and divided into strips by a cutter along a parallel line group passing through the intersections of the optical fibers and a parallel line group passing through the middle of these parallel line groups, each strip-shaped piece is assembled It becomes a collective sensor head for attachment to a substrate. By these methods, a large number of reflection-type optical sensors can be efficiently manufactured.
【0012】[0012]
【発明の実施の形態】以下、図面に基づいて本発明の実
施形態を説明する。なお、前記の説明を含め、同種の部
品や部分については同じ符号を用いることにする。図1
は本発明の反射型光センサの第1の実施形態で、同図
(A)は透視的な斜視図である。基板9上に発光素子2
と受光素子3をそれぞれ実装し、両素子の間に遮光板4
1を設けて両素子が直接影響し合うことを防ぎ、これら
を透光性の封止樹脂11中に封入してある。その上にセ
ンサヘッド42を接合して積層してあり、センサヘッド
42は樹脂43中に発光側の光ファイバー44と受光側
の光ファイバー45をインサートしたもので、光ファイ
バー44、45は樹脂43を貫通して両端面が樹脂43
の上下面の一部として露出している。Embodiments of the present invention will be described below with reference to the drawings. Note that the same reference numerals are used for the same kind of parts and parts including the above description. FIG.
1 is a first embodiment of the reflection type optical sensor of the present invention, and FIG. 1 (A) is a transparent perspective view. Light emitting element 2 on substrate 9
And the light receiving element 3 are mounted respectively, and the light shielding plate 4 is provided between the two elements.
1 is provided to prevent both elements from directly affecting each other, and these are sealed in a light-transmitting sealing resin 11. A sensor head 42 is bonded and laminated thereon, and the sensor head 42 has a light emitting side optical fiber 44 and a light receiving side optical fiber 45 inserted in a resin 43, and the optical fibers 44 and 45 penetrate the resin 43. Both ends are resin 43
Is exposed as a part of the upper and lower surfaces.
【0013】図1(B)は同図(A)の左手前から見た
正面図、(C)は(A)の上面図で、いずれも透視的に
描いてある。これらの図に見るように、基板9の導電パ
ターン15に発光素子2と受光素子3をダイボンドし、
金属線13でワイヤボンドしてある。16は基板上面の
端子電極であるが、基板側面の導電部12により、図で
は見えないが基板9の下面に設けた端子電極に接続され
ている。基板下面の端子電極は、反射型光センサを他の
機器の回路基板に実装するためのもので、このように本
発明の反射型光センサは回路基板への表面実装に適する
形式である。導電部12は基板9の縁部に設けた円弧状
の窪みの表面が導電膜を持つものであるが、製造工程で
はこの部分は全円のスルーホールだったのである。FIG. 1B is a front view as viewed from the front left of FIG. 1A, and FIG. 1C is a top view of FIG. 1A, all of which are drawn in perspective. As shown in these figures, the light emitting element 2 and the light receiving element 3 are die-bonded to the conductive pattern 15 of the substrate 9,
Wire bonding is performed with a metal wire 13. Reference numeral 16 denotes a terminal electrode on the upper surface of the substrate, which is connected to a terminal electrode provided on the lower surface of the substrate 9 by a conductive portion 12 on the side surface of the substrate, though not shown in the drawing. The terminal electrodes on the lower surface of the substrate are for mounting the reflection type optical sensor on the circuit board of another device. Thus, the reflection type optical sensor of the present invention is of a type suitable for surface mounting on a circuit board. The conductive portion 12 has a conductive film on the surface of the arc-shaped depression provided at the edge of the substrate 9, and in the manufacturing process, this portion was a full-circle through hole.
【0014】図に見るように、光ファイバー44と45
は一定の角度で交差しており、センサヘッド42と封止
樹脂11の接合面では光ファイバーの端面が発光素子2
と受光素子3にそれぞれ面していて、センサヘッド42
の上面では光ファイバーの端面が互いに接近してほぼ隣
接している。これにより、センサヘッド42の上面を被
検出物体に近づけると、発光素子2から出た光が光ファ
イバー44を通って物体の表面を照射し、反射光が隣接
する光ファイバー45の端面から入ってセンサ内に戻
り、受光素子3によって検出されるのである。As can be seen, the optical fibers 44 and 45
Intersect at a fixed angle, and the end face of the optical fiber is connected to the light emitting element 2 at the joint surface between the sensor head 42 and the sealing resin 11.
And the light receiving element 3, respectively, and the sensor head 42
On the upper surface, the end faces of the optical fibers are close to each other and almost adjacent to each other. Thus, when the upper surface of the sensor head 42 is brought close to the object to be detected, the light emitted from the light emitting element 2 irradiates the surface of the object through the optical fiber 44, and the reflected light enters from the end face of the adjacent optical fiber 45, and the light is emitted from the sensor. And is detected by the light receiving element 3.
【0015】本発明の特徴として、2本の光ファイバー
44、45を次のように配置する。すなわち図1(C)
に見るように、光ファイバー44と45の軸線をそれぞ
れ通って互いに平行な二つの平面を想定した時、この2
平面間の距離aが2本の光ファイバーのそれぞれの半径
の和と同等以上であり、従って両光ファイバーの直径が
同じならaが直径と同寸法以上であることで、簡単に言
えば、両光ファイバーを延長したとき、互いに突き当た
らずにすれ違うことである。2本の光ファイバーの交差
角は、焦点距離や光変換効率等を考慮して任意に決定す
る。この構成を取ることにより、後述するように極めて
便利な製造方法が可能になる。As a feature of the present invention, two optical fibers 44 and 45 are arranged as follows. That is, FIG.
As can be seen from FIG. 2, when two planes parallel to each other are respectively passed through the axes of the optical fibers 44 and 45,
If the distance a between the planes is equal to or greater than the sum of the respective radii of the two optical fibers, and if the diameters of the two optical fibers are the same, then a is equal to or greater than the diameter. When they extend, they pass each other without hitting each other. The intersection angle between the two optical fibers is arbitrarily determined in consideration of the focal length, light conversion efficiency, and the like. With this configuration, an extremely convenient manufacturing method can be realized as described later.
【0016】図1の反射型光センサの実施形態では、発
光素子2と受光素子3を封入している透光性の封止樹脂
11層が反射型光センサの側面に露出しているので、発
光素子2から出た光や受光素子3に戻ってきた光の一部
が封止樹脂11で散乱して側面から漏れることがある。
このような漏れをなくして光の利用効率や検出感度を上
げ、他の部品との干渉を防ぐようにしたのが、図2に示
す第2の実施形態である。ここでは基板9上に遮光性樹
脂の遮光枠46を設けて、封止樹脂11が光センサ側面
に露出しないようにしている。遮光枠46には二つの大
きな貫通穴があって、それぞれの穴に発光素子2と受光
素子3を収容し、これらの穴に封止樹脂11を充填して
各素子を封入する。これにより光センサ側面からの光の
漏れがなくなる。遮光枠46の二つの貫通穴の間の壁の
部分は、図1における遮光板41と同じく、発光素子2
と受光素子3が直接作用し合うのを防ぐ。In the embodiment of the reflection type optical sensor shown in FIG. 1, the light-transmitting sealing resin layer 11 enclosing the light emitting element 2 and the light receiving element 3 is exposed on the side of the reflection type optical sensor. Part of the light emitted from the light emitting element 2 and the light returned to the light receiving element 3 may be scattered by the sealing resin 11 and leak from the side surface.
The second embodiment shown in FIG. 2 eliminates such leakage and increases the light use efficiency and detection sensitivity to prevent interference with other components. Here, a light-shielding frame 46 made of a light-shielding resin is provided on the substrate 9 so that the sealing resin 11 is not exposed on the side surface of the optical sensor. The light-shielding frame 46 has two large through holes. The light-emitting element 2 and the light-receiving element 3 are accommodated in the respective holes, and these elements are filled with the sealing resin 11 to enclose each element. This eliminates light leakage from the side of the optical sensor. The portion of the wall between the two through holes of the light shielding frame 46 is similar to the light shielding plate 41 in FIG.
And the light receiving element 3 do not directly interact with each other.
【0017】図3は本発明の第3の実施形態で、同じく
光センサ側面からの光漏れを防ぐ構造である。図1の第
1の実施形態の構成をそのまま含むものであるが、光セ
ンサ側面に現れた封止樹脂の表面に遮光材料の薄層から
なる遮光膜47を被覆してある。遮光膜47は例えば無
電解メッキによるニッケルメッキ膜であり、これによっ
て光漏れが防がれる。FIG. 3 shows a third embodiment of the present invention, which also has a structure for preventing light leakage from the side surface of the optical sensor. Although the configuration of the first embodiment of FIG. 1 is included as it is, the surface of the sealing resin that appears on the side surface of the optical sensor is covered with a light shielding film 47 made of a thin layer of a light shielding material. The light shielding film 47 is, for example, a nickel plating film formed by electroless plating, thereby preventing light leakage.
【0018】次に、図4以下を参照しながら本発明の反
射型光センサの製造方法を説明する。図4にて、まず大
型の集合基板51を用意する。これは完成時に個々の反
射型光センサとなる多数の領域を縦横に行列状に配列し
て、導電パターン15やスルーホール52を設けたもの
で、縦横の分割線53、54によって区分される1区画
が1個の反射型光センサに相当する。そして発光素子2
群と受光素子3群を導電パターン15にダイボンドし、
金属線13でワイヤボンドする。集合基板の材質は黒色
素を混合したガラス繊維入りエポキシ樹脂などであっ
て、例えば寸法が100〜200mm角の集合基板であ
れば、1,000個前後の反射型光センサに分割するこ
とができる。Next, a method for manufacturing the reflection type optical sensor of the present invention will be described with reference to FIG. In FIG. 4, first, a large collective substrate 51 is prepared. This is one in which a large number of regions that become individual reflection-type optical sensors at the time of completion are arranged vertically and horizontally in a matrix and provided with conductive patterns 15 and through holes 52, and are divided by vertical and horizontal dividing lines 53 and 54. The section corresponds to one reflection-type optical sensor. And light emitting element 2
Group and the light receiving element 3 group are die-bonded to the conductive pattern 15,
Wire bonding is performed with the metal wire 13. The material of the collective substrate is an epoxy resin containing glass fiber mixed with a black pigment, and for example, if the collective substrate has a size of 100 to 200 mm square, it can be divided into about 1,000 reflective optical sensors. .
【0019】次に、集合遮光板55を集合基板51に接
着する。集合遮光板51は遮光性樹脂の成形品で何本も
の横棒55aがある枠状であり、横棒55aの部分が後
に図1の遮光板41になる。集合基板51上に2点鎖線
56で示したのは、集合遮光板55の合わせ位置であ
る。集合基板51上の1区画には発光素子2と受光素子
3が1個ずつ含まれて、集合遮光板55の横棒55aで
隔てられた配置となる。Next, the collective light shielding plate 55 is bonded to the collective substrate 51. The collective light-shielding plate 51 is a molded product of a light-shielding resin and has a frame shape having a number of horizontal bars 55a, and the portion of the horizontal bar 55a later becomes the light-shielding plate 41 in FIG. What is indicated by a two-dot chain line 56 on the collective substrate 51 is the position where the collective light shielding plate 55 is aligned. One section on the collective substrate 51 includes one light emitting element 2 and one light receiving element 3, and is arranged so as to be separated by the horizontal bar 55 a of the collective light shielding plate 55.
【0020】次に、集合基板51上に接着した集合遮光
板55の横棒55aの間にエポキシ樹脂等の透光性樹脂
を注入し、集合遮光板55の上面とほぼ同じ高さに充填
する。集合遮光板55は、ワイヤボンドした発光素子2
や受光素子3の金属線13を含めた高さよりも高いもの
を用いるので、このように樹脂を充填することにより各
素子は金属線も含めて完全に樹脂中に封入される。こう
して充填した樹脂が図1の封止樹脂11となる。封止樹
脂注入の際、集合基板51のスルーホール52から樹脂
が流れ出たりしないよう、必要に応じてスルーホールを
テープ材で塞ぐなどの処理をしておく。Next, a translucent resin such as an epoxy resin is injected between the horizontal bars 55a of the collective light-shielding plate 55 adhered to the collective substrate 51, and is filled to substantially the same height as the upper surface of the collective light-shielding plate 55. . The collective light shielding plate 55 is a light-emitting element
Since the height of the light receiving element 3 and the height of the light receiving element 3 including the metal wire 13 are used, each element including the metal wire is completely sealed in the resin by filling the resin. The resin filled in this way becomes the sealing resin 11 in FIG. At the time of injection of the sealing resin, processing such as closing the through hole with a tape material is performed as necessary so that the resin does not flow out of the through hole 52 of the collective substrate 51.
【0021】次に、このように集合遮光板55の横棒5
5a間に封止樹脂を充填した上に集合センサヘッド57
を接着する。集合センサヘッド57は、図1に見られる
センサヘッド42を何個分も横に1列につないだ形の直
方体である。従って集合センサヘッド57は1対の発光
側光ファイバー44と受光側光ファイバー45を何対も
含んでいる。集合基板55に封止樹脂を充填した上に接
着剤を塗布し、光ファイバー44、45の下端面を発光
素子2と受光素子3に合わせながら、集合センサヘッド
57を何個も並べて接着する。光ファイバー44、45
の下端面には接着剤がつかないように、封止樹脂上面へ
の接着剤の塗布は発光素子2や受光素子3から離れた位
置に行う。接着剤の塗布は任意の方法で行えばよいが、
不要箇所に接着剤がつかないように封止樹脂面上にマス
ク材をあてがって塗布するのが便利である。スクリーン
印刷によるのもよい。図4にて、分割線53a、54a
で区分される集合センサヘッド57の1区画が、図1に
おける1個のセンサヘッド42になる。Next, as described above, the horizontal bar 5
After filling the sealing resin between 5a, collective sensor head 57
Glue. The collective sensor head 57 is a rectangular parallelepiped formed by connecting a number of the sensor heads 42 shown in FIG. 1 in a row. Therefore, the collective sensor head 57 includes a number of pairs of the light emitting side optical fiber 44 and the light receiving side optical fiber 45. After the sealing resin is filled in the collective substrate 55, an adhesive is applied, and a number of collective sensor heads 57 are arranged and adhered while aligning the lower end surfaces of the optical fibers 44 and 45 with the light emitting element 2 and the light receiving element 3. Optical fiber 44, 45
The adhesive is applied to the upper surface of the sealing resin at a position away from the light emitting element 2 and the light receiving element 3 so that the adhesive does not adhere to the lower end surface of the light emitting element 2. The application of the adhesive may be performed by any method,
It is convenient to apply a mask material on the sealing resin surface so that the adhesive does not adhere to unnecessary portions. Screen printing is also good. In FIG. 4, the dividing lines 53a, 54a
One section of the collective sensor head 57 divided by is the one sensor head 42 in FIG.
【0022】集合基板51と集合遮光板55と集合セン
サヘッド57を、中間に封止樹脂の充填工程を伴って積
層した集合体を、分割線53、54(すなわち53a、
54a)に沿って切断するダイシングを行えば、得られ
る各小片がそれぞれ反射型光センサの完成品になる。図
4の集合基板51に設けてあったスルーホール52は、
図1の完成品では窪みに導電材が被覆された導電部12
となる。このようにして、本発明の反射型光センサは多
数個取りにより極めて能率よく製作することができる。An assembly obtained by laminating the collective substrate 51, the collective light shielding plate 55, and the collective sensor head 57 together with a sealing resin filling step is formed by dividing lines 53 and 54 (that is, 53a, 53a).
If dicing for cutting along 54a) is performed, each of the obtained small pieces becomes a completed reflective optical sensor. The through hole 52 provided in the collective substrate 51 of FIG.
In the completed product of FIG. 1, the conductive portion 12 in which the conductive material is coated in the depressions
Becomes In this way, the reflection type optical sensor of the present invention can be manufactured very efficiently by multi-cavity production.
【0023】上記の説明は図1に示した第1の実施形態
のものの製造方法であるが、図2の遮光枠46を備えた
第2の実施形態のものも、集合部品を用いて同様の工程
により製作される。ただし、その場合、図4の集合遮光
板55でなく、図5に示す集合遮光枠58を用いる。こ
れは形が格子状でいくつも窓があり、分割線53b、5
4bによる1区画が完成品1個分である。遮光枠58を
図4の集合基板51に接着し、窓枠内に封止樹脂を充填
して、発光素子2と受光素子3を封入する。そして前述
のように集合センサヘッド57を接合した集合体を作っ
てダイシングすれば、集合遮光枠58は図5の分割線5
3b、54bで切り離されて、図2のごとく封止樹脂1
1の周辺が遮光枠46で囲われて光の漏れない反射型光
センサが得られる。Although the above description is of a method of manufacturing the first embodiment shown in FIG. 1, the second embodiment having the light-shielding frame 46 shown in FIG. It is manufactured by a process. However, in this case, the collective light-shielding frame 58 shown in FIG. 5 is used instead of the collective light-shielding plate 55 of FIG. This is a grid-like shape with a number of windows, dividing lines 53b, 5
One section by 4b is equivalent to one completed product. The light-shielding frame 58 is adhered to the collective substrate 51 shown in FIG. 4, the window frame is filled with a sealing resin, and the light emitting element 2 and the light receiving element 3 are sealed. Then, as described above, if an assembly in which the assembly sensor head 57 is joined is formed and diced, the assembly light-shielding frame 58 is
3b, 54b, and the sealing resin 1 as shown in FIG.
The periphery of 1 is surrounded by a light-shielding frame 46, and a reflection-type optical sensor with no light leakage can be obtained.
【0024】図3に示すような、封止樹脂11の側面に
遮光膜47を被覆した反射型光センサの製作は、図1の
実施形態のものを前述の方法で製作した単品について、
側面に現れた封止樹脂11表面に遮光膜を被覆して行っ
てもよいが、やはり集合基板工程に含めるのがはるかに
能率的である。図1の実施形態のものと同じく、各集合
部品を積層するまでを図4に示す工程によって行う。そ
して集合部品を積層した集合体ができたら、まず、上方
から分割線53a、54aに沿って、集合センサヘッド
57とその下部の封止樹脂層を基板に達するまでハーフ
・ダイシングする。これで、集合基板51はまだ一体の
ままであるが、封止樹脂とセンサヘッドには側面を生じ
るから、無電解ニッケルメッキにより集合体をメッキ液
に浸漬してニッケル被膜を作るなどして、図3のごとく
封止樹脂11の側面に遮光膜47を形成する。As shown in FIG. 3, the reflection type optical sensor in which the side surface of the sealing resin 11 is covered with the light-shielding film 47 is manufactured by using the above-described embodiment of FIG.
The light-shielding film may be coated on the surface of the sealing resin 11 that appears on the side surface, but it is much more efficient to include the light-shielding film in the collective substrate process. As in the embodiment of FIG. 1, the steps shown in FIG. When an assembly in which the assembly components are stacked is formed, first, the assembly sensor head 57 and the sealing resin layer under the assembly sensor head 57 are half-diced along the dividing lines 53a and 54a from the top until they reach the substrate. With this, although the collective substrate 51 is still integrated, since the sealing resin and the sensor head have side surfaces, the collective substrate is immersed in a plating solution by electroless nickel plating to form a nickel film, and the like. As shown in FIG. 3, a light shielding film 47 is formed on the side surface of the sealing resin 11.
【0025】この時、遮光膜不要部分はマスクしておく
のであり、例えば集合基板裏面の端子電極やスルーホー
ル内面の導電部に遮光膜材料が被覆されないよう、集合
基板21の裏面にはマスク用のシート材などを貼付して
おく。センサヘッド上面はもとより遮光膜を設けない
が、この面についてはマスクしてメッキを防ぐ方法のほ
か、側面とともにメッキした後にエッチング等によって
メッキ層を除去する方法を取ってもよい。反射型光セン
サの側面で遮光膜47が必要なのは図3に示すように封
止樹脂11の層であるが、センサヘッド42の側面をマ
スクしてメッキを防ぐのは不便であり、またメッキを防
ぐ必要もないから、光センサ側面はセンサヘッド42も
含めて遮光膜を形成して差し支えない。この後、集合基
板51を分割線53、54に従ってフル・ダイシングす
れば、図3の反射型光センサが完成する。At this time, the unnecessary portion of the light-shielding film is masked. For example, the terminal electrode on the rear surface of the collective substrate and the conductive portion on the inner surface of the through hole are not covered with the light-shielding film material. Affix the sheet material. Although the light-shielding film is not provided on the upper surface of the sensor head, a method of masking the surface to prevent plating or a method of removing the plating layer by etching or the like after plating with the side surface may be used. Although the light shielding film 47 is required on the side surface of the reflection type optical sensor as shown in FIG. 3, it is inconvenient to prevent the plating by masking the side surface of the sensor head 42. Since there is no need to prevent this, a light-shielding film including the sensor head 42 may be formed on the side surface of the optical sensor. Thereafter, when the collective substrate 51 is fully diced along the dividing lines 53 and 54, the reflection type optical sensor of FIG. 3 is completed.
【0026】図1ないし図3に見るように、本発明の反
射型光センサのセンサヘッド42はサイコロ状の樹脂4
3に光ファイバー44、45がインサートされたもので
あるが、図4に示す集合基板51を用いた製造工程で使
用するのは、センサヘッドが何個もつながった集合セン
サヘッド57であり、以下、集合センサヘッド57を製
作する方法を説明する。まず、図6に示すように、樹脂
43中に反射型光センサの完成品に含まれる光ファイバ
ーの何倍もの長さの光ファイバー44群と45群をイン
サート成形した集合センサヘッド板59を製作する。同
図(A)は上面図、同図(B)は正面図である。As shown in FIGS. 1 to 3, the sensor head 42 of the reflection type optical sensor of the present invention has a die-shaped resin 4.
3, optical fibers 44 and 45 are inserted, but in the manufacturing process using the collective substrate 51 shown in FIG. 4, a collective sensor head 57 connected with a number of sensor heads is used. A method of manufacturing the collective sensor head 57 will be described. First, as shown in FIG. 6, a collective sensor head plate 59 is manufactured by insert-molding a group of optical fibers 44 and 45, which are many times longer than the optical fibers included in the completed reflection optical sensor, in a resin 43. FIG. 1A is a top view, and FIG. 1B is a front view.
【0027】光ファイバー44同士と光ファイバー45
同士はそれぞれ平行で間隔一定であり、そして光ファイ
バー44群と光ファイバー45群は一定の角度で交差し
ている。交差の角度は図1(B)における光ファイバー
44と光ファイバー45の交差角と同じである。図6
(B)に分割線60を描いてあるが、これは正面から見
て光ファイバー群の交点を通る平行線群とその中間の平
行線群で、分割線60の間隔は一様である。分割線60
に沿った平行な光ファイバー群のピッチは、図4の集合
基板51の分割線54の間隔に等しくする。。The optical fibers 44 and the optical fibers 45
The optical fibers 44 and the optical fibers 45 intersect at a fixed angle. The crossing angle is the same as the crossing angle between the optical fiber 44 and the optical fiber 45 in FIG. FIG.
(B) shows the dividing line 60, which is a parallel line group passing through the intersection of the optical fiber groups and a parallel line group in the middle thereof when viewed from the front, and the interval between the dividing lines 60 is uniform. Dividing line 60
The pitch of the parallel optical fiber group along is set equal to the interval between the dividing lines 54 of the collective substrate 51 in FIG. .
【0028】図6(A)に現れている集合センサヘッド
板59の厚さは、図1(C)における反射型光センサの
上下幅に等しい。図6(A)の距離aは光ファイバー4
4群の軸線を含む平面と光ファイバー45群の軸線を含
む平面間の距離であるが、これは図1(C)のaと同じ
であって両光ファイバーの半径の和にほぼ等しく、光フ
ァイバー44群と光ファイバー45群は互いにほぼ接し
て交差している。このような集合センサヘッド板59
は、光ファイバー44群と光ファイバー45群を交差さ
せて取り付けた成形用の型または容器に樹脂を注入、固
化して製作する。The thickness of the collective sensor head plate 59 shown in FIG. 6A is equal to the vertical width of the reflection type optical sensor in FIG. The distance a in FIG.
The distance between the plane including the axes of the four groups and the plane including the axes of the optical fibers 45 is the same as a in FIG. 1C and substantially equal to the sum of the radii of the two optical fibers. And the optical fiber 45 group cross each other almost in contact with each other. Such a collective sensor head plate 59
Is manufactured by injecting and solidifying a resin into a molding die or container in which the optical fiber 44 group and the optical fiber 45 group are crossed and attached.
【0029】次いで集合センサヘッド板59を分割線6
0に沿ってカッターで切断する。この切断は切断面に現
れる光ファイバー端面の仕上げ加工を兼ねるので精密に
行う。集合センサヘッド板59を何枚も重ねて固定した
ものを切断すれば、能率よく切断することができる。Next, the collective sensor head plate 59 is connected to the dividing line 6.
Cut with a cutter along 0. This cutting is performed precisely because it also serves as finishing processing of the end face of the optical fiber appearing on the cut surface. If a plurality of collective sensor head plates 59 are cut and fixed, the cutting can be efficiently performed.
【0030】集合センサヘッド板59を分割線60に沿
って切断して得られる直方体片に、図6にて上から順に
1、2、3...と番号をつけ、奇数番目のものを上下
裏返し、図7に示すように各直方体を左右にずらして揃
えると、各直方体を縦の分割線61で区分した各部分は
同じものであり、それぞれ1個のセンサヘッドに相当す
る。従って図7の各直方体が図4の集合基板工程で用い
る集合センサヘッド57となる。こうして図6のような
集合センサヘッド板59を作って分割することにより、
集合センサヘッド57を能率よく製作できる。なお、図
6(B)の分割線60について、前記のように正面から
見て光ファイバー群の交点を通る平行線群とその中間の
平行線群と定義すると、それに該当する平行線は分割線
60に直交する縦方向にも引けるわけであるが、どちら
を取るべきかは自明である。The rectangular parallelepiped pieces obtained by cutting the collective sensor head plate 59 along the dividing lines 60 are shown in FIG. . . When the odd-numbered ones are turned upside down and the rectangular parallelepipeds are shifted to the left and right as shown in FIG. 7, each part obtained by dividing each rectangular parallelepiped by a vertical dividing line 61 is the same, and Sensor heads. Therefore, each rectangular parallelepiped of FIG. 7 becomes the collective sensor head 57 used in the collective substrate process of FIG. By forming and dividing the collective sensor head plate 59 as shown in FIG.
The collective sensor head 57 can be manufactured efficiently. 6B, when the parallel line group passing through the intersection of the optical fiber group and the intermediate parallel line group are defined as described above, the corresponding parallel line is the dividing line 60. Can also be pulled in the vertical direction perpendicular to, but it is obvious which should be taken.
【0031】図6の集合センサヘッド板59の考えをさ
らに進めたのが、図8の集合センサヘッド・ブロック6
2である。これは集合センサヘッド板59を何枚も重ね
て一体化したような形で光ファイバー44、45をイン
サートした樹脂ブロックである。図8(A)は上面図、
(B)は正面図で、(A)に見るように光ファイバー4
4群と45群が交差して対をなすものが何列も含まれて
いる。この集合センサヘッド・ブロック62を分割線6
0で切断しさらに分割線63で切断すれば、図4の工程
に用いる多数の集合センサヘッド57が得られる。The idea of the collective sensor head plate 59 of FIG. 6 is further advanced by the collective sensor head block 6 of FIG.
2. This is a resin block in which optical fibers 44 and 45 are inserted in such a manner that a number of integrated sensor head plates 59 are stacked and integrated. FIG. 8A is a top view,
(B) is a front view, and as shown in (A), an optical fiber 4
There are several rows in which the 4th and 45th groups intersect and form a pair. This collective sensor head block 62 is
By cutting at 0 and further cutting at the dividing line 63, a large number of collective sensor heads 57 used in the process of FIG. 4 are obtained.
【0032】図8の集合センサヘッド・ブロック62を
用いる場合、図4の集合基板工程に用いるセンサヘッド
の集合部品としては、図8(A)の分割線63では分割
せず、同図(B)の分割線60で分割しただけの板状の
ものを、前述の図6の集合センサヘッド板59の場合の
ように1枚置きに上下裏返しにして用いればよい。これ
もまた板状であるが、図6の集合センサヘッド板59と
は違ってこれと直交する方向に広がるものである。図4
に描いた集合センサヘッド57群はそれぞれ別個のもの
で、分割線53aに沿って溝で隔たっているが、上記の
ような板状のものを用いると、つながっていて溝のない
集合センサヘッド板を集合遮光板55上に接着するので
あり、集合体をダイシングする際、分割線53aに沿う
方向もセンサヘッド層を切断することになる。When the collective sensor head block 62 of FIG. 8 is used, the collective parts of the sensor head used in the collective substrate process of FIG. 4 are not divided by the dividing line 63 of FIG. 6) may be used by turning the plate upside down every other sheet as in the case of the collective sensor head plate 59 of FIG. 6 described above. This is also plate-shaped, but, unlike the collective sensor head plate 59 of FIG. 6, it expands in a direction orthogonal to this. FIG.
Are separated from each other by grooves along the dividing line 53a. However, if the plate-like members described above are used, they are connected and have no grooves. Is bonded onto the collective light-shielding plate 55, and when dicing the aggregate, the sensor head layer is also cut in the direction along the dividing line 53a.
【0033】図8の集合センサヘッド・ブロック62に
よれば1回の成形で非常に多くのセンサヘッドを含む集
合部品が得られるが、それとともに成形用の型あるいは
容器が複雑化し、これに光ファイバーを取り付ける手間
も増えるから、一概にこの方法が有利とは限らない。図
6の集合センサヘッド板59を用いるか図8の集合セン
サヘッド・ブロック62を用いるかは、実状に応じて決
めるのがよい。According to the collective sensor head block 62 of FIG. 8, a collective part including a large number of sensor heads can be obtained by one molding, but the molding die or the container becomes complicated, and the optical fiber This method is not always advantageous because it increases the time and labor for attaching the. Whether to use the collective sensor head plate 59 in FIG. 6 or the collective sensor head block 62 in FIG. 8 is preferably determined according to the actual situation.
【0034】以上、反射型光センサとして完結している
回路部品について説明したが、反射型光センサを構成の
一部とする回路部品もまた存在する。例えば、光マイク
ロホンという回路部品があり、これは反射型光センサと
そのセンサヘッド近傍に配置した被検出物である振動膜
を含めて構成したもので、音響等による振動膜の振動を
光信号に変換して処理するものである。本発明の反射型
光センサとその製造方法は、光マイクロホンのように構
成の一部に反射型光センサを含む部品にも及ぶものであ
る。While the circuit components completed as a reflection type optical sensor have been described above, there are also circuit components whose configuration is a reflection type optical sensor. For example, there is a circuit component called an optical microphone, which includes a reflective optical sensor and a vibrating film, which is an object to be detected, arranged near the sensor head, and converts the vibration of the vibrating film due to sound or the like into an optical signal. It is converted and processed. The reflection-type optical sensor and the method of manufacturing the same according to the present invention extend to components including a reflection-type optical sensor in a part of the configuration, such as an optical microphone.
【0035】[0035]
【発明の効果】以上述べたように、本発明によって得ら
れる反射型光センサは光ファイバーで光路を形成するの
で、光の利用効率が向上して高性能の光センサが得られ
る。しかも構造簡単であって小型、薄型化に適し、ま
た、製造に関しては集合基板を始めとする集合部品を用
いて製造を進め、最後に切断して分割し、一度に多数の
製品を得るので極めて生産性が高く、製造コストを低減
できる。このように本発明によれば、超小型、高性能で
信頼性が高く、表面実装に適する反射型光センサを廉価
に提供できるのである。As described above, since the reflection type optical sensor obtained by the present invention forms an optical path with an optical fiber, the light use efficiency is improved and a high performance optical sensor can be obtained. In addition, it has a simple structure and is suitable for miniaturization and thinning. In terms of manufacturing, manufacturing is promoted using collective components such as collective boards, and finally cut and divided to obtain many products at once. High productivity and reduced manufacturing costs. As described above, according to the present invention, it is possible to provide an inexpensive reflection type optical sensor suitable for surface mounting, which is ultra-small, high-performance, highly reliable.
【図1】本発明の反射型光センサを透視的に示し、
(A)は斜視図、(B)は正面図、(C)は上面図であ
る。FIG. 1 shows a perspective view of a reflective optical sensor of the present invention;
(A) is a perspective view, (B) is a front view, and (C) is a top view.
【図2】本発明の別の反射型光センサを透視的に示す斜
視図である。FIG. 2 is a perspective view showing another reflection type optical sensor of the present invention in a see-through manner.
【図3】本発明のさらに別の反射型光センサを透視的に
示す斜視図である。FIG. 3 is a perspective view perspectively showing still another reflection type optical sensor of the present invention.
【図4】本発明の反射型光センサの製造方法を示す斜視
図である。FIG. 4 is a perspective view showing a method for manufacturing the reflection type optical sensor of the present invention.
【図5】本発明の反射型光センサの製造に用いる集合遮
光枠の斜視図である。FIG. 5 is a perspective view of a collective light shielding frame used for manufacturing the reflection type optical sensor of the present invention.
【図6】本発明の反射型光センサの製造に用いる集合セ
ンサヘッド板を示し、(A)は上面図、(B)は正面図
である。6A and 6B show a collective sensor head plate used for manufacturing the reflection type optical sensor of the present invention, wherein FIG. 6A is a top view and FIG. 6B is a front view.
【図7】図6の集合センサヘッド板を分割して得た集合
センサヘッドである。FIG. 7 is a collective sensor head obtained by dividing the collective sensor head plate of FIG. 6;
【図8】本発明の反射型光センサの製造に用いる集合セ
ンサヘッド・ブロックを示し、(A)は上面図、(B)
は正面図である。8A and 8B show a collective sensor head block used for manufacturing the reflection type optical sensor of the present invention, wherein FIG. 8A is a top view and FIG.
Is a front view.
【図9】反射型光センサの原理的構成図である。FIG. 9 is a diagram illustrating the basic configuration of a reflection type optical sensor.
【図10】従来の反射型光センサを示し、(A)は斜視
図、(B)は(A)のB−B断面図である。10A and 10B show a conventional reflection-type optical sensor, in which FIG. 10A is a perspective view, and FIG. 10B is a sectional view taken along line BB of FIG.
【図11】従来の別の反射型光センサを示し、(A)は
斜視図、(B)は(A)のB−B断面図である。11A and 11B show another conventional reflection-type optical sensor, in which FIG. 11A is a perspective view and FIG. 11B is a cross-sectional view taken along the line BB of FIG.
【図12】従来のさらに別の反射型光センサの図面であ
る。FIG. 12 is a drawing of another conventional reflection type optical sensor.
2 発光素子 3 受光素子 8 窓 9 基板 10、46 遮光枠 11 封止樹脂 12 導電部 14、47 遮光膜 15 導電パターン 16 端子電極 21、42 センサヘッド 25、26、44、45 光ファイバー 41 遮光板 43 樹脂 51 集合基板 52 スルーホール 55 集合遮光板 57 集合センサヘッド 58 集合遮光枠 59 集合センサヘッド板 62 集合センサヘッド・ブロック Reference Signs List 2 light emitting element 3 light receiving element 8 window 9 substrate 10, 46 light shielding frame 11 sealing resin 12 conductive part 14, 47 light shielding film 15 conductive pattern 16 terminal electrode 21, 42 sensor head 25, 26, 44, 45 optical fiber 41 light shielding plate 43 Resin 51 Collective board 52 Through hole 55 Collective light shielding plate 57 Collective sensor head 58 Collective light shielding frame 59 Collective sensor head plate 62 Collective sensor head block
───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 2F065 AA01 AA03 AA12 AA67 BB01 CC02 DD02 FF22 FF44 GG12 GG15 JJ01 JJ15 JJ26 LL02 LL03 PP22 QQ28 5F089 BA01 BA02 BB03 BC11 BC17 CA03 CA20 EA03 EA10 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2F065 AA01 AA03 AA12 AA67 BB01 CC02 DD02 FF22 FF44 GG12 GG15 JJ01 JJ15 JJ26 LL02 LL03 PP22 QQ28 5F089 BA01 BA02 BB03 BC11 BC17 CA03 CA20 EA03 EA10
Claims (10)
光素子を隔てる遮光板を搭載して両光素子を封止樹脂中
に封入し、その上に、樹脂中に発光側光ファイバーと受
光側光ファイバーを該樹脂の上下面を貫通して埋設した
センサヘッドを積層した構造であって、前記2本の光フ
ァイバーの端面がセンサヘッドの表面では接近し、反対
側の前記封止樹脂との接合面では互いに離れていてそれ
ぞれ前記発光素子および受光素子に面しており、両光フ
ァイバーの軸線をそれぞれ含む平行な2平面方向への両
軸線の投影が一定の角度をなしていて、かつ、これら2
平面間の距離が両光ファイバーの半径の和以上であるこ
とを特徴とする反射型光センサ。1. A light-emitting element, a light-receiving element, and a light-shielding plate for separating both optical elements are mounted on a circuit board, and both optical elements are sealed in a sealing resin. A sensor head in which optical fibers are embedded through the upper and lower surfaces of the resin, and the sensor heads are stacked, wherein end surfaces of the two optical fibers are close to each other on the surface of the sensor head, and a bonding surface with the sealing resin on the opposite side. Are separated from each other and face the light emitting element and the light receiving element, respectively, and the projection of the two axes in two parallel plane directions including the axes of the two optical fibers is at a certain angle, and
A reflective optical sensor, wherein the distance between the planes is equal to or greater than the sum of the radii of the two optical fibers.
て、封止樹脂層の周囲を遮光枠で囲ってあることを特徴
とする反射型光センサ。2. The reflection type optical sensor according to claim 1, wherein a periphery of the sealing resin layer is surrounded by a light shielding frame.
て、封止樹脂層の周囲に遮光膜を被覆してあることを特
徴とする反射型光センサ。3. The reflection type optical sensor according to claim 1, wherein a light shielding film is coated around the sealing resin layer.
方法であって、多数の製品領域を行列状に含む集合基板
に発光素子群と受光素子群を実装し、同一製品領域にあ
る発光素子と受光素子を隔てる遮光板の部分を集合的に
有する集合遮光板を集合基板上に接着し、集合基板上に
上記集合遮光板とほぼ同高さに透光性の封止樹脂を充填
して前記発光素子群および受光素子群を封入し、上記集
合遮光板と封止樹脂上に、反射型光センサ1個当たり2
本の光ファイバーを樹脂に封入したセンサヘッドの複数
個分を含む集合センサヘッドを所要の数だけ接着し、こ
うして得た集合体を縦横に切断して製品を多数個取りす
ることを特徴とする反射型光センサの製造方法。4. The method of manufacturing a reflection type optical sensor according to claim 1, wherein the light emitting element group and the light receiving element group are mounted on a collective substrate including a large number of product regions in a matrix, and are located in the same product region. A collective light-shielding plate that collectively has a portion of a light-shielding plate that separates the light-emitting element and the light-receiving element is adhered to the collective substrate, and the collective substrate is filled with a translucent sealing resin at substantially the same height as the collective light-shielding plate. Then, the light emitting element group and the light receiving element group are encapsulated, and two reflection type optical sensors are provided on the collective light shielding plate and the sealing resin.
A required number of sensor heads each including a plurality of optical fiber-encapsulated sensor heads are bonded together, and the obtained assembly is cut lengthwise and crosswise to obtain a large number of products. Method of manufacturing optical sensor.
方法であって、多数の製品領域を行列状に含む集合基板
に発光素子群と受光素子群を実装し、同一製品領域にあ
る発光素子と受光素子を隔てる遮光板の部分および製品
領域の分割線に沿った窓枠部分を集合的に有する集合遮
光枠であって、分割線に沿った窓枠部分は切断後に両側
が残るだけの幅を持つものを集合基板上に接着し、上記
窓枠内に上記集合遮光枠とほぼ同高さに透光性の封止樹
脂を充填して前記発光素子群および受光素子群を封入
し、上記集合遮光枠と封止樹脂上に、反射型光センサ1
個当たり2本の光ファイバーを樹脂に封入したセンサヘ
ッドの複数個分を含む集合センサヘッドを所要の数だけ
接着し、こうして得た集合体を縦横に切断して製品を多
数個取りすることを特徴とする反射型光センサの製造方
法。5. The method of manufacturing a reflection type optical sensor according to claim 2, wherein the light emitting element group and the light receiving element group are mounted on a collective substrate including a large number of product regions in a matrix, and are located in the same product region. A collective light-shielding frame having collectively a light-shielding plate part separating a light-emitting element and a light-receiving element and a window frame part along a dividing line of a product area, and the window frame part along the dividing line only remains on both sides after cutting. Are bonded to the collective substrate, and the light emitting element group and the light receiving element group are sealed by filling a translucent sealing resin in the window frame at substantially the same height as the collective light shielding frame. The reflection type optical sensor 1 is mounted on the collective light shielding frame and the sealing resin.
A required number of sensor heads each including a plurality of sensor heads in which two optical fibers are sealed in resin are bonded together, and the resulting assembly is cut lengthwise and crosswise to obtain a large number of products. A method for manufacturing a reflection type optical sensor.
方法であって、多数の製品領域を格子状に含む集合基板
に発光素子群と受光素子群を実装し、同一製品領域にあ
る発光素子と受光素子を隔てる遮光板の部分を集合的に
有する集合遮光板を集合基板上に接着し、集合基板上に
上記集合遮光板とほぼ同高さに透光性の封止樹脂を充填
して前記発光素子群および受光素子群を封入し、上記集
合遮光板と封止樹脂上に、反射型光センサ1個当たり2
本の光ファイバーを樹脂に封入したセンサヘッドの複数
個分を含む集合センサヘッドを所要の数だけ接着し、こ
うして得た集合体のセンサヘッド層と集合遮光板層をほ
ぼ基板に達するまで縦横にハーフ・ダイシングし、ハー
フ・ダイシングによって生じた溝に現れた封止樹脂側面
に遮光膜を被覆し、次いで集合基板を縦横に切断して製
品を多数個取りすることを特徴とする反射型光センサの
製造方法。6. The method of manufacturing a reflection type optical sensor according to claim 3, wherein the light emitting element group and the light receiving element group are mounted on a collective substrate including a large number of product regions in a lattice shape, and are located in the same product region. A collective light-shielding plate that collectively has a portion of a light-shielding plate that separates the light-emitting element and the light-receiving element is adhered to the collective substrate, and the collective substrate is filled with a translucent sealing resin at substantially the same height as the collective light-shielding plate. Then, the light emitting element group and the light receiving element group are encapsulated, and two reflection type optical sensors are provided on the collective light shielding plate and the sealing resin.
A required number of sensor heads including a plurality of sensor heads in which the optical fiber is sealed in resin are adhered by a required number, and the sensor head layer and the light shielding plate layer of the obtained assembly are vertically and horizontally halved until almost reaching the substrate. Dicing, covering the side of the sealing resin that appeared in the groove created by half dicing with a light-shielding film, and then cutting the aggregate substrate vertically and horizontally to take a large number of products. Production method.
光センサの製造方法において、集合センサヘッドは複数
個のセンサヘッドが1列につながったものであることを
特徴とする反射型光センサの製造方法。7. The method of manufacturing a reflection-type optical sensor according to claim 4, wherein the collective sensor head comprises a plurality of sensor heads connected in one row. Manufacturing method of sensor.
光センサの製造方法において、集合センサヘッドは複数
個のセンサヘッドが行列状につながったものであること
を特徴とする反射型光センサの製造方法。8. The method of manufacturing a reflection-type optical sensor according to claim 4, wherein the collective sensor head comprises a plurality of sensor heads connected in a matrix. Manufacturing method of sensor.
方法において、集合センサヘッドは、長さが完成寸法の
何倍もある2組の光ファイバー群を、各光ファイバー群
の軸線がそれぞれ同一平面に含まれて互いに平行で一定
間隔であり、両光ファイバー群の軸線を含む2平面が互
いに平行で、かつ両平面間の距離が二つの光ファイバー
群のそれぞれに属する光ファイバーの半径の和以上であ
り、上記2平面方向への両光ファイバー群の投影が一定
角度で交差するように型または容器内に支持し、これに
樹脂を充填、固化して板状にし、上記投影における光フ
ァイバーの交点を通る平行線群および該平行線群の中間
を通る平行線群に沿って切断して得ることを特徴とする
反射型光センサの製造方法。9. The method of manufacturing a reflection-type optical sensor according to claim 7, wherein the collective sensor head includes two optical fiber groups each having a length many times as large as a completed dimension, and each optical fiber group having the same axis. The two planes including the axes of the two optical fiber groups are parallel to each other and are parallel to each other at a constant interval, and the distance between the two planes is equal to or greater than the sum of the radii of the optical fibers belonging to each of the two optical fiber groups. The two optical fiber groups are supported in a mold or a container so that the projections of the two optical fibers in the two plane directions intersect at a certain angle, and are filled with a resin, solidified into a plate shape, and parallel through the intersection of the optical fibers in the projection. A method for manufacturing a reflection-type optical sensor, wherein the method is obtained by cutting along a line group and a parallel line group passing through the middle of the parallel line group.
造方法において、集合センサヘッドは、長さが完成寸法
の何倍もある2組の光ファイバー群を、各光ファイバー
群の軸線がそれぞれ同一平面に含まれて互いに平行で一
定間隔であり、両光ファイバー群の軸線を含む2平面が
互いに平行で、かつ両平面間の距離が二つの光ファイバ
ー群のそれぞれに属する光ファイバーの半径の和以上で
あり、上記2平面方向への両光ファイバー群の投影が一
定角度で交差するように支持することを、複数組、所定
の間隔で平行に並べて行って型または容器内に支持し、 これに樹脂を充填、固化してブロック状にし、上記投影
における光ファイバーの交点を通る平行平面群および該
平行平面の中間を通る平行平面群に沿って切断して得る
ことを特徴とする反射型光センサの製造方法。10. The method of manufacturing a reflection type optical sensor according to claim 8, wherein the collective sensor head has two optical fiber groups whose lengths are many times the completed dimensions, and each of the optical fiber groups has the same axis. The two planes including the axes of the two optical fiber groups are parallel to each other and are parallel to each other at a constant interval, and the distance between the two planes is equal to or greater than the sum of the radii of the optical fibers belonging to each of the two optical fiber groups. A plurality of sets are supported so that the projections of the two optical fibers in the two plane directions intersect at a predetermined angle are arranged in parallel at a predetermined interval, and are supported in a mold or a container. Solidified into a block shape, and cut along a parallel plane group passing through the intersection of the optical fibers in the projection and a parallel plane group passing through the middle of the parallel planes. Method for producing a morphism type optical sensor.
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---|---|---|---|
JP19241099A JP4246855B2 (en) | 1999-07-06 | 1999-07-06 | Reflective optical sensor and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP19241099A JP4246855B2 (en) | 1999-07-06 | 1999-07-06 | Reflective optical sensor and manufacturing method thereof |
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Family
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US7026654B2 (en) * | 2002-04-05 | 2006-04-11 | Canon Kabushiki Kaisha | Package for optical semiconductor |
US7071458B2 (en) | 2003-05-23 | 2006-07-04 | Fujitsu Limited | Optical element, optical transmission unit and optical transmission system |
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Cited By (13)
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US7026654B2 (en) * | 2002-04-05 | 2006-04-11 | Canon Kabushiki Kaisha | Package for optical semiconductor |
US7137746B2 (en) | 2003-03-13 | 2006-11-21 | Fujitsu Limited | Optical transmission module and manufacturing method therefor |
US7071458B2 (en) | 2003-05-23 | 2006-07-04 | Fujitsu Limited | Optical element, optical transmission unit and optical transmission system |
JP2008241323A (en) * | 2007-03-26 | 2008-10-09 | Keio Gijuku | Liquid surface viscosity/elasticity measurement head, and liquid surface viscosity/elasticity measurement device using it |
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JP2011525239A (en) * | 2008-06-20 | 2011-09-15 | オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツング | Photoelectric switch and method for detecting objects |
JP2011209077A (en) * | 2010-03-29 | 2011-10-20 | Kyokko Denki Kk | Object detection device |
WO2015194360A1 (en) * | 2014-06-16 | 2015-12-23 | 日東電工株式会社 | Optical sensor |
JP2016004859A (en) * | 2014-06-16 | 2016-01-12 | 日東電工株式会社 | Optical sensor |
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WO2017179507A1 (en) * | 2016-04-14 | 2017-10-19 | 株式会社村田製作所 | Optical sensor |
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WO2019044381A1 (en) * | 2017-09-01 | 2019-03-07 | 株式会社村田製作所 | Optical sensor device and manufacturing method therefor |
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