JP2001009653A - Tilt device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve machining precision of a work supported and machined by a tilt device. SOLUTION: A tilt table 20 to support a pallet is situated with a pair of stewing shafts 21A (21B) having a common stewing axis O protruding and rotatably supported at a pair of support parts 11a (11b) through the respective stewing shafts. Servo motors 33A (33B) to rotate the tilt table are two in a number and situated between the respective supports and the tilt table and the same input is exerted and the tilt table is simultaneously rotationally driven from both sides to decide a rotation angle. Further, the upper surface of a pallet to support the work W is caused to coincide with a plane containing the stewing axis O. Offsetting of an unbalance moment by gravity generated at the tilt table is effected from both sides by balance cylinder devices 40A (40B). Constraint of the tilt table after the rotation angle is decided is also executed from both sides by two sets of brake devices 50A (50B).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a tilt device which is provided on a bed of a machine tool, supports a work mounted on a pallet, and rotates so as to take a posture required for machining.

[0002]

2. Description of the Related Art As this kind of tilt device, there is, for example, a technology disclosed in Japanese Patent Application Laid-Open No. Hei 6-179138.
In this technique, as shown in a schematic structure in FIG. 7, a pair of turning shafts 2a and 2b having a common turning axis O project outward and are fixed to the upright portions on both sides of the U-shaped tilt table 1 and fixed outward. The pivots 2a and 2b are beds (not shown).
It is supported via a bearing 3 on a pair of supporting portions provided upright. The pallet 5 supporting the work W on the upper surface 5a is carried in and out of the tilt table 1, and is turned around the turning axis O by a servomotor (not shown) provided on the turning shaft 2b on the driving side. The rotation angle is the rotation axis 2
It is detected by the encoder 4 attached to the tip of b and feedback-controlled. The upper surface 5a of the pallet 5 that supports the work W is generally separated from the turning axis O by a certain distance C.

In this type of tilt device, the center of gravity of the rotating portion including the tilt table 1 and the work W does not coincide with the turning axis O. Therefore, as the rotating portion is rotated by the servomotor, the unbalance moment due to gravity is generated. Changes. As a result, the load torque applied to the servomotor also changes, so that the accuracy of the positioning angle of the work W decreases,
There is a possibility that the processing accuracy of the work W is reduced. Therefore, in the technique of Japanese Patent Application Laid-Open No. Hei 6-179138, a balance cylinder device (not shown in FIG. 7) is provided on the drive side of the tilt table 1, and the pressure of the pressure oil supplied thereto is adjusted to the rotation angle of the tilt table 1. Such an unbalanced moment is offset to reduce the load applied to the servomotor to increase the accuracy of the positioning angle. The control of the supply pressure is performed based on the value of the unbalance moment calculated from data such as the weight of the workpiece input to the control device in advance or from the load current of the servomotor for rotation detected as needed.

In the technique disclosed in JP-A-6-179138, a brake device (not shown in FIG. 7) for preventing rotation of the tilt table 1 during machining is provided by a disk fixed to the turning shaft 2b. The brake shoe is pressed against an outwardly projecting flange.

[0005]

In the above prior art, the tilt table 1 is supported by the turning shafts 2a and 2b provided on both sides, but the servo motor and the balance cylinder device are provided on the turning shaft 2b on the driving side. Therefore, the torsion moment due to the unbalance moment described above is applied to the tilt table 1 and the turning shaft 2b between the mounting portion of the pallet 5 and the servomotor or the balance cylinder device, thereby causing torsion. For this reason, an error occurs between the rotation angle detected by the encoder 4 and the actual rotation angle of the work W, and the work W may be twisted by the tilt table 1 in some cases. However, there is a problem that the processing accuracy is reduced.

[0006] Except for the rotation angle error due to the unbalance moment described above, the positioning accuracy of the rotation angle of the tilt table 1 depends on the resolution of the encoder 4. The error increases in proportion to the distance from the turning axis O to the processing surface. That is, as shown in FIG. 8, when the positioning accuracy is the angle Δα and the processing surface Wa is the top surface of the workpiece W,
The error ΔD of the processing position in the circumferential direction is the distance L from the turning axis O to the top surface Wa (= the distance C from the turning axis O to the upper surface 5a of the pallet 5 + the height H of the work W). In the prior art, as described above, since the upper surface 5a of the pallet 5 is located above the turning axis O by the distance C, the error ΔD increases by the distance C, and the machining accuracy decreases. is there.

Further, the conventional brake device for preventing the rotation of the tilt table 1 is assembled with a small gap around the brake shoe in order to move the brake shoe, so that the flange is held by pressing the brake shoe. When heavy cutting is performed on the work W in this state, the brake shoe moves in the circumferential direction by an amount corresponding to the play caused by the gap, and the flange rotates, whereby the tilt table 1 supporting the work W is rotated.
Also rotates, so that there is a problem that machining accuracy is reduced.
An object of the present invention is to solve each of these problems.

[0008]

For this purpose, a tilt device according to the present invention comprises a support base provided with a pair of support parts which are arranged opposite to each other at a predetermined distance, and a support base for the two support parts. A tilt table which is rotatably supported by the two support portions via a pair of pivot shafts located between the pivot shafts and has a common pivot axis, and on which a pallet for supporting a work is mounted on an upper surface; A servo motor that rotates with respect to the table, a balance cylinder device that is provided between the support table and the tilt table and cancels an unbalance moment due to gravity generated in the tilt table with rotation around the rotation axis; In a tilt device including a brake device for restraining rotation of the tilt table with respect to a support table, the number of the servo motors is two, and This servomotors provided with respectively between the tilt table is characterized in that it has rotated the tilt table simultaneously giving the same input. Since the tilt table is rotationally driven from both sides by each servo motor to which the same input is given, the torsional moment applied to the tilt table by the unbalance moment is reduced by half.

It is preferable that the upper surface of the pallet is a plane including the turning axis of the turning shaft. By doing so, the distance from the pivot axis to the upper surface of the pallet is 0,
The distance from the rotation axis to the processing surface (= the distance from the rotation axis to the upper surface of the pallet + the height of the work) is reduced by that amount.

The balance cylinder devices are provided as two sets between each support portion and the tilt table, and the same input is applied to each balance cylinder device so as to cancel the unbalance moment by the same amount. Is preferred. In this way, the load due to the unbalanced moment applied to the two servomotors is canceled by the same amount by each balance cylinder device to have a value of 0 or the same small value. Does not occur.

The above-mentioned brake devices are divided into two sets. Each of the brake devices is provided between the outer periphery of each turning shaft and the inner periphery of a supporting portion for rotatably supporting the turning shaft. An elastic ring that contracts and expands its outer diameter,
It is preferable that the elastic ring is made of a piston which is pressed in the axial direction to frictionally engage the inner surface and the outer surface of the elastic ring with the outer periphery of each pivot shaft and the inner periphery of a member which rotatably supports them. . In this way, the respective pivots and the respective support portions are directly frictionally engaged with the inner and outer surfaces of the elastic ring, and thus are restrained from each other without rattling. Further, since the rotation of the tilt table is restricted from both sides, even when a large moment about the rotation axis is applied to the work due to heavy cutting or the like, the twist of the tilt table is reduced, and high-precision machining can be performed.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A tilt device according to the present invention will be described below with reference to an embodiment shown in FIGS. Mainly as shown in FIGS. 1, 3 and 4, a first and second support portions 11a and 11b are provided on a support base 11 provided on a bed 10 of a machine tool such as a machining center at a predetermined distance. And are arranged facing each other. This support portion 11a,
11b, the first and second pivot shafts 21A, 21A having a common pivot axis O above a pair of upright portions 20a, 20b formed on both sides thereof.
21B protrudes outward and is fixed.
Annular members 22A, 2 coaxially surrounding the roots of A, 21B
2B is fixed. Each of the turning shafts 21A and 21B extends outwardly through inside of the inward bosses 11c and 11d formed on each of the support portions 11a and 11b of the support base 11, and extends inwardly of each of the inward boss portions 11c and 11d and the annular member 22A. The tilt table 20 is supported by the support base 11 so as to be rotatable around the rotation axis O via cross roller bearings 14A and 14B provided between the bases 22B.

As shown in FIG. 3, the outer end surface of the first support portion 11a is closed by a cover plate 16A, and the first pivot 21A
Is rotatably supported by a lid plate 16A via a ball bearing 15. As shown in FIG. 4, the outer end surface of the second support portion 11b is closed by a cover plate 16B, and the encoder 27 attached to the central portion 16a of the protruding cover plate 16B has a detection shaft 27a whose second rotation shaft 2
1B is connected to the joint member 28 fixed to the tip of the second
The rotation angle of the rotation shaft 21B and the tilt table 20 is detected.

As shown in FIG. 1, a turntable 25 that removably supports a pallet 26 on which a work W is mounted and that rotates about an axis orthogonal to the rotation axis O is provided above the center of the tilt table 20. The upper surface 26a of the pallet 26 provided and on which the work W is mounted is coincident with a plane including the turning axis O. Tilt table 20 and support base 11
Drive devices 30A and 30B for driving the pallet 26 to rotate with respect to the support table 11, and balance cylinder devices 40A and 40A for canceling an unbalance moment due to gravity generated in the tilt table 20 due to the rotation about the rotation axis O.
40B and brake devices 50A and 50B for restraining the rotation of the tilt table 20 with respect to the support base 11 are provided.
Each of them has one set of left and right.

Next, the first support portion 11a and the first pivot 21
A description will be given of the first driving device 30A provided between A and A.
As shown in FIGS. 2 and 3, a worm wheel 31 is attached to an annular member 22A fixed to the root of the first turning shaft 21A.
Are coaxially fixed to the turning axis O. A worm 32 meshing with the worm wheel 31 is provided in a support hole 34A formed in the first support portion 11a in the first support portion 11a at a position slightly radially outward from the worm wheel 31 and orthogonal to the turning axis O.
It is rotatably supported via sleeves 35a and 35b on both sides and needle roller bearings. Output shaft 3 of first servomotor 33A attached to one side of first support 11a
The spur gear 36 fixed to the shaft 3a and the spur gear 37 fixed to the shaft portion 32a at one end of the worm 32 mesh with each other. If the first servo motor 33A is driven to rotate in the forward and reverse directions, the tilt table 20 is rotated. And the turning shafts 21A and 21B are decelerated and rotated in forward and reverse directions.

The second driving device 30B provided between the second support portion 11b and the second pivot 21B is shown in FIG. 4 corresponding to FIG. 3, but has substantially the same structure as the first driving device 30A. If the second servo motor 33B (see FIG. 1) is rotationally driven in the forward and reverse directions, the tilt table 20 and the pivots 21B and 21A are decelerated and rotated in the forward and reverse directions. Servo motor 33 of first and second drive devices 30A, 30B
A and 33B are given the same position command from a control device (not shown), and the first and second pivot axes 21A and 21B are respectively provided.
The tilt table 20 is simultaneously driven to rotate with the same torque via 1B. The control device includes a closed loop in which the rotation angle of the second turning shaft 21B (= the rotation angle of the tilt table 20) detected by the encoder 27 is fed back.

Next, the first support portion 11a and the first pivot 21
The first balance cylinder device 40A provided between A will be described. As shown in FIGS. 2 and 3, a pinion 46 keyed to the first turning shaft 21 </ b> A is provided in a space 17 </ b> A immediately inside the lid plate 16 </ b> A, and the first support portion 11 is provided.
In a, a support hole 34 </ b> A that is orthogonal to the turning axis O is formed slightly outside in the radial direction from the pinion 46. The pair of cylinder tubes 42a and 42b inserted into the support holes 34A from both ends are provided with pinions 46 at the middle of the round bar.
A rack bar 44 formed with rack teeth 44b meshing with the rack bar 44 is slidably supported. The piston portion 44a formed on one end side of the rack bar 44 has one cylinder tube 4
2a and a cap 43 which is fitted in a liquid-tight manner and seals the distal end of the cylinder tube 42a.
Is formed. A hydraulic pressure is applied to the cylinder chamber 45 via a conduit (not shown) so as to always cancel an unbalance moment due to gravity generated by the rotation of the tilt table 20. The supply pressure required for this is calculated by calculating the unbalance moment based on data such as the weight of the workpiece input to the control device in advance, or calculating the unbalance moment from the load current of the servo motors 33A and 33B detected as needed. This is a value calculated so as to cancel the unbalance moment.

A second balance cylinder device 40B provided between the second support portion 11b and the second pivot 21B is also shown in FIG.
FIG. 4 corresponding to FIG. 4 is shown, but has substantially the same structure as the first balance cylinder device 40A.
5, the same hydraulic pressure as that of the first balance cylinder device 40A is applied. Therefore, in order to cancel the unbalance moment, the balance cylinder device 40A,
From 40B, the upright portions 20 on both sides of the tilt table 20
a, 20b have the same rotational moment,
This value is half of the total unbalance moment due to gravity caused by the center of gravity of the entire rotating part including the tilt table 20, the turntable 25, the pallet 26, the work W, and the like not coinciding with the turning axis O.

Next, the first support portion 11a and the first pivot 21
A description will be given of the first brake device 50 </ b> A provided between A and A. As shown in FIGS. 3 and 5, a stepped hole 51 including a small diameter portion 51a and a large diameter portion 51b is formed on the inner peripheral surface of the inward boss portion 11c of the first support portion 11a, and a pinion 46 is provided. The large-diameter portion 51b serving as the space 17A is formed by a lid member 52.
Is closed by The elastic ring 54 provided in the small diameter portion 51a is a sleeve made of high elasticity special steel,
It has a bellows shape in which a plurality of annular grooves are alternately formed on the inner circumference and the outer circumference. The elastic ring 54 is fitted between the outer periphery of the first turning shaft 21A and the small-diameter portion 51a of the stepped hole 51 with a slight gap in a free state. The elastic ring 54
When pressed in the axial direction, the inner diameter shrinks and the outer diameter expands due to the bellows effect. An annular piston 53 is fitted to the inner surface of the large diameter portion 51b and the outer surface of the cylindrical portion 52a protruding inward from the lid member 52 via oil seals 58a and 58b including a seal ring and a backup ring. . By introducing pressure oil into the cylinder chamber 55 formed between the lid member 52 and the cylinder chamber 55 through the oil passage 57, the annular piston 53 moves and presses the elastic ring 54 in the axial direction by the inner protrusion 53a thereof. As a result, the inner diameter and the outer diameter of the elastic ring 54 are contracted and the outer diameter is expanded, and the inner surface and the outer surface are frictionally engaged with the outer peripheral surface of the first pivot shaft 21A and the inner peripheral surface of the small diameter portion 51a. Is restrained from rotating with respect to the first support portion 11a. If the pressure in the cylinder chamber 55 is reduced to 0, the elastic ring 54 springs back, the inner diameter is expanded, and the outer diameter is contracted.
The restriction between the first turning shaft 21A and the first support portion 11a is released.

The second brake device 50B provided between the second support portion 11b and the second pivot 21B is shown only in FIG. 4 corresponding to FIG. 3, but has substantially the same structure as the first brake device 50A. By introducing pressure oil into the cylinder chamber 55, the inner surface and the outer surface of the elastic ring 54 frictionally engage with the second turning shaft 21B and the inner circumferential surface of the small diameter portion 51a, and the second turning shaft 21B It is restrained by the support part 11b. Each brake device 50A, 50B can be provided between the outer circumference of each turning shaft 21A, 21B and the inner circumference of the inward boss portions 11c, 11d of the support portions 11a, 11b of the support base 11, so that the entire device is made compact. Can be put together.

Next, the operation of the above-described embodiment will be described. The pallet 26 supporting the work W on the upper surface 26a, directly or through a jig, is carried into the turntable 25, and is mounted and rotated at a predetermined angle. Then, the tilt table 20 is rotated. The control device is a double drive device 30
The same pulse is output to the servo motors 33A and 33B of A and 30B, and the tilt table 20 is rotationally driven from both sides via both turning shafts 21A and 21B. As described above, since the tilt table 20 is driven to rotate from both sides, the torsional moment applied to the tilt table 20 is reduced by half, so that the torsion is suppressed, thereby improving the machining accuracy. Further, the distance L from the rotation axis O to the processing surface Wa is reduced by the distance of 0 from the rotation axes 21A and 21B to the upper surface 26a of the pallet 26, so that the processing error in the circumferential direction on the processing surface Wa is reduced. .

During operation of both servo motors 33A and 33B,
The same hydraulic pressure is applied to both the balance cylinder devices 40A and 40B, thereby canceling the unbalance moment due to gravity, and the two servo motors 33A and 33B.
Have the same small value. Accordingly, since the tilt table 20 is not twisted due to the difference between the loads applied to the servo motors 33A and 33B, the machining accuracy is further improved.

The control device controls the servo motor 33B of the second driving device 30B so that the rotation angle detected by the encoder 27 attached to the tip of the second turning shaft 21B becomes a target value.
And the servomotor 33A of the first driving device 30A is controlled so that the same load as that of the servomotor 33B is generated. When the rotation angle detected by the encoder 27 reaches a target value, the two servomotors 33A and 33B are driven.
Is stopped.

When the rotation angle detected by the encoder 27 becomes the target value and the two servo motors 33A, 33B are stopped, the control device introduces pressure oil into the respective cylinder chambers 55 of the two brake devices 50A, 50B. Each of the elastic rings 54 is pressed in the axial direction by each of the annular pistons 53, whereby the inner surface and the outer surface of each of the elastic rings 54 are moved to the respective rotating shafts 21 </ b> A,
1B is frictionally engaged with the inner peripheral surface of the small diameter portion 51a.
Each of the turning shafts 21A and 21B is restrained from rotating with respect to each of the supporting portions 11a and 11b. The work W is processed in this state. As described above, since the inner and outer surfaces of the elastic ring 54 are directly frictionally engaged with each other to prevent the swinging shafts 21A and 21B from being restrained by the respective support portions 11a and 11b, there is no play in the circumferential direction. There is no danger that the tilt table 20 will rotate due to such play during processing and the processing accuracy will be reduced. Also the brake device 50
Since the rotation of the tilt table 20 is restricted from both sides by A and 50B, even when a large moment about the turning axis O is applied by heavy cutting or the like, the twist of the tilt table 20 is reduced by half, and high-precision machining is performed. be able to.

In the above operation, the turntable 2
5 and the example in which machining is performed after the tilt table 26 is determined, the rotation of the turntable 25 or the tilt table 26 is synchronized with the relative movement between the main shaft of the machine tool and the work W, so-called simultaneous 5-axis control. Processing is also possible. In this case, both brake devices 5
0A and 50B are not operated and the servo motor 33
A and 33B, the servomotor for driving the turntable 25 and the servomotor for moving the main shaft are controlled synchronously, and the hydraulic pressure supplied to the balance cylinder devices 40A and 40B is controlled in synchronization with the servomotors 33A and 33B. I do.

FIG. 6 shows a modification of the brake device 50.
The following describes the first brake device 50A,
The same applies to the brake device 50B. This modification is different from the above-described embodiment only in the elastic ring 54 and its attached part, and therefore, the different part will be mainly described.
The elastic ring 54 of this modified example includes two parts, an inner ring 54a and an outer ring 54b. Each of the rings 54a and 54b has a wedge-shaped cross-sectional shape having a slope surface that abuts on the outer peripheral surface and the inner peripheral surface, and a part in the circumferential direction is cut away like a piston ring. In the free state, the inner diameter of the inner ring 54a is slightly larger than the outer diameter of the first turning shaft 21A,
The outer diameter of 4b is slightly smaller than the inner diameter of the small diameter portion 51a,
When the two rings 54a and 54b are pressed in the axial direction from a state in which they are slightly in contact with the inclined surface, the inner ring 54a is pushed into the outer ring 54b, so that the inner diameter is contracted and the outer diameter is expanded. In the small diameter portion 51a of the stepped hole 51, a plurality of holding holes 59a are formed on the bottom surface in the axial direction along the circumferential direction. Both rings 54a, 54
b is a state in which the first rotating shaft 21
A is fitted between the outer periphery of A and the small diameter portion 51a of the stepped hole 51,
Each spring 59 provided in each holding hole 59a urges the inner ring 54a in a direction to push the inner ring 54a from the outer ring 54b.

As in the case of the above-described embodiment, by introducing pressurized oil into the cylinder chamber 55, the annular piston 53 moves and its inner projection 53a causes the inner ring 54a to move.
Is pressed in the axial direction against the spring 59, whereby the inner diameter and the outer diameter of the elastic ring 54 are contracted and the outer diameter is expanded, so that the inner surface and the outer surface are formed on the outer peripheral surface of the first turning shaft 21A and the inner peripheral surface of the small diameter portion 51a. By frictionally engaging the surface, the first turning shaft 21A is restrained from rotating with respect to the first support portion 11a.
If the pressure in the cylinder chamber 55 is reduced to zero, the inner ring 5
4a is pushed back by the spring 59 and the elastic ring 5
In the case 4, the inner diameter is expanded and the outer diameter is contracted, so that the restraint between the first turning shaft 21 </ b> A and the first support portion 11 a is released.
The elastic ring 54 of this modified example has a large number of components but is easy to process.

[0028]

As described above, in the present invention, the tilt table is rotationally driven from both sides by two servomotors, whereby the torsional moment applied to the tilt table is reduced by half. And the processing accuracy can be improved.

According to the pallet having the upper surface formed as a plane including the turning axis of the turning axis, the distance from the turning axis to the processing surface is reduced, so that the processing error in the circumferential direction on the processing surface is also reduced. Accuracy can be improved. In addition, since the pivot axis and the upper surface of the pallet, that is, the lower surface of the work coincide with each other, when the NC program is created based on the work, the calculation of the inclination angle of the work and the like is simplified, so that the creation is easy. .

According to the above-mentioned two sets of the balance cylinder device, which are provided between each support portion and the tilt table to cancel the unbalance moment, the load applied to each servomotor is reduced and the positioning angle is reduced. In addition to the improvement of the precision, the processing accuracy can be further improved because the tilt table does not twist due to the difference in load applied to each servomotor.

The above-mentioned brake device is composed of two sets, each of which comprises an elastic ring whose inner diameter is contracted and whose outer diameter is expanded when pressed in the axial direction, and a piston which presses this elastic ring in the axial direction. If the brake device is actuated, each of the pivots and the members that rotatably support the pivots are directly frictionally engaged with the inner and outer surfaces of the elastic ring, thereby causing a backlash in the circumferential direction. Therefore, there is no possibility that the processing accuracy is reduced due to such play. In addition, since the rotation of the tilt table is restricted from both sides, even when a large moment about the axis of rotation is applied by heavy cutting or the like, the twist of the tilt table is reduced by half, and high-precision machining can be performed. Furthermore, since each brake device can be provided between the outer periphery of each turning shaft and the inner periphery of each supporting portion that rotatably supports the turning shaft,
The entire device can be compactly assembled.

[Brief description of the drawings]

FIG. 1 is a front view showing the overall configuration of an embodiment of a tilt device according to the present invention.

FIG. 2 shows a first driving device and a first driving device of the embodiment shown in FIG.
It is a cross-sectional view showing a balance cylinder device.

FIG. 3 is a cross-sectional view taken along the line AA of FIG. 2, showing a structure near a first support portion of the embodiment shown in FIG. 1;

FIG. 4 is a cross-sectional view taken along line AA of FIG. 2, showing a structure near a second support portion of the embodiment shown in FIG. 1;

FIG. 5 is a partially enlarged sectional view showing the first brake device of the embodiment shown in FIG. 1;

FIG. 6 is a partially enlarged sectional view showing a modification of the first brake device.

FIG. 7 is a front view showing a main part of an example of a tilt device according to the related art.

8 is a side view showing a relationship between a pivot axis and a pallet according to the embodiment shown in FIG. 7;

[Explanation of symbols]

11: support base, 11a, 11b: support portion, 20: tilt table, 21A, 21B: turning axis, 26: pallet,
26a: upper surface, 33A, 33B: servo motor, 40
A, 40B ... balance cylinder device, 50A, 50B ...
Brake device, 53: annular piston, 54: elastic ring, O: turning axis, W: work.

Claims (4)

[Claims] 1. A support base provided with a pair of support portions disposed to face each other at a predetermined distance, and a pair of pivot shafts located between the two support portions and having a common pivot axis. A tilt table, which is rotatably supported by the two support portions via the support portion and which mounts a pallet for supporting a work on the upper surface, a servomotor for rotating the tilt table with respect to the support table, and the support table and tilt A balance cylinder device that is provided between the tables and cancels an unbalance moment due to gravity generated in the tilt table with the rotation about the pivot axis; and a brake device that restrains the rotation of the tilt table with respect to the support table. In the tilt device provided, two servo motors are provided between each of the support portions and the tilt table, and each of the servo motors is provided. A tilt device wherein the same input is given to a motor and the tilt table is simultaneously rotated. 2. The tilt device according to claim 1, wherein an upper surface of the pallet is a plane including a turning axis of the turning shaft. 3. The balance cylinder device is provided as two sets between each of the support portions and the tilt table, and the same input is applied to each of the balance cylinder devices to cancel the unbalance moment by the same amount. The tilt device according to claim 1 or 2, wherein the tilting is performed. 4. The brake device is provided in two sets, each brake device being provided between an outer periphery of each of the pivot shafts and an inner periphery of each of the support portions rotatably supporting the respective pivot shafts, and being pressed in an axial direction. An elastic ring whose inner diameter is contracted and whose outer diameter is expanded, and the inner surface and the outer surface of the elastic ring are pressed from the axial direction so that the inner surface and the outer surface of the elastic ring are formed on the outer periphery of each of the turning shafts and the inner periphery of each of the support portions. The tilt device according to any one of claims 1 to 3, comprising a piston to be frictionally engaged.