JP2000309096A - Ink-jet head and production thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ink-jet head capable of solving defects such as peel-off or cracking of a bonding part due to repeated deformation of a bulkhead, and further, suitable for mass production, and a production method therefor. SOLUTION: An ink-jet head comprises a plurality of bulkheads 33 made of at least partially a piezoelectric substance, formed parallel between a pair of substrates 31, 39, and partition walls 37 for partitioning the grooves between the bulkheads 33 so as to provided a plurality of ink pressuring rooms, and guide holes 45 formed in the substrate 39 for jetting the ink in the ink pressuring rooms, with the piezoelectric substance in the bulkheads 33 held by electrodes 38, wherein the bulkheads 33 and the partition walls 37 are formed integrally with the substrate 31.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is applied to various printers and recorders for facsimile, printing, and printing in the fields of printing and ceramics, etc., in which ink is ejected as droplets to form printing and images. And a method of manufacturing the same.

[0002]

2. Description of the Related Art In recent years, with the spread of multimedia, a printing apparatus using an ink jet head has been developed as a small and lightweight printing interface suitable for a variety of small-quantity applications without the need for a printing plate. It is expanding into various industrial fields.

[0003] With the recent increase in resolution,
As disclosed in Japanese Patent Application Laid-Open No. 7-76083, there has been proposed an ink jet head for ejecting ink droplets in a direction perpendicular to the longitudinal direction of a groove forming an ink pressurizing chamber.

In the ink jet head disclosed in this publication, as shown in FIG. 7, a plurality of partition walls 3 made of a piezoelectric material are integrally formed on a first substrate 1, and a groove 5 between these partition walls 3 is partitioned. A plurality of ink pressurizing chambers are formed by being partitioned by the wall 7. Electrodes are formed on both sides of the partition 3 facing each ink pressurizing chamber.

A second substrate 9 is joined to the top of the partition wall 3 and the partition wall 7, and a nozzle hole 11 is formed on the upper surface of the second substrate 9.
Is joined. Nozzle hole 11
Are the grooves 5 in the nozzle plate 13 and the guide holes 1 in the second substrate 9.
5 are drilled correspondingly. The second substrate 9 has a guide hole 15 connected to the nozzle hole 11 and an ink introduction passage 17 for introducing ink into the ink pressurizing chamber.

In such an ink-jet head, a partition 5 is formed by forming a groove 5 on a first substrate 1 made of a piezoelectric material using a diamond cutting disk, and the partition 3 is formed in a direction perpendicular to the groove 5. Group 3 is cut using a diamond cutting disk, and a partition wall 7 made of an insulating member such as glass is accommodated in a groove 19 formed at right angles to the groove 5 and joined. Thereafter, the partition 3 and the partition 7
The second substrate 9 is bonded to the top of the second substrate 9, and a nozzle plate 13 having nozzle holes 11 is bonded to the upper surface of the second substrate 9.

In such an ink-jet head, when a voltage is applied to the electrode sandwiching the partition wall 3, the partition wall 3 is deformed, the internal pressure of the ink pressurizing chamber is increased, and the ink is applied from the nozzle hole 11 through the guide hole 15. Ink is ejected in a direction perpendicular to the longitudinal direction of the groove forming the pressure chamber.

[0008]

However, in the above-described ink jet head, the group of the partition walls 3 is cut using a diamond cutting disk, and an insulating material such as glass is formed in a groove 19 formed at right angles to the groove 5. Since the partition wall 7 made of a member is accommodated and bonded with an adhesive to seal the ink pressurizing chamber, it is difficult to bond the partition wall 3 having a very small thickness to the partition wall 7, and it is difficult to seal the partition. If the bonding conditions (for example, application amount, bonding pressure, etc.) of the adhesive used are not appropriate, there is a problem in that the adhesive protrudes and poor bonding such as communication of the ink pressurizing chamber occurs due to insufficient adhesive.

[0009] Further, due to the repeated deformation of the driven partition wall 3, the adhesive portion between the partition wall 3 and the partition wall 7 and between the partition wall 7 and the first substrate 1 are peeled off, and the ink is not normally ejected, resulting in printing unevenness.
There was a problem of poor reliability.

Further, when a groove 19 for sealing (for a partition wall) is formed in the partition wall 3 using a diamond cutting disk in a direction perpendicular to the longitudinal direction of the groove 5, the partition wall 3 is often damaged. However, there is a problem that the mass production yield does not increase and the cost increases.

Further, since the ink is ejected by deforming the partition wall 3, stress concentration occurs on the side of the partition wall 3 on the first substrate 1 side and on the partition wall 7 side, and there is a problem that this portion is easily damaged. .

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problem, and an object of the present invention is to provide a shear mode type in which ink supplied to a groove is ejected in a direction perpendicular to the longitudinal direction of the groove. It is an object of the present invention to provide an ink jet head which eliminates defects such as peeling and cracking of a bonded portion due to repeated deformation of a partition wall and is suitable for mass production, and a method of manufacturing the same.

[0013]

Means for Solving the Problems The present inventors have made intensive studies in view of the above-mentioned problems, and as a result, by integrating a partition wall and a partition wall constituting an ink pressurizing chamber in a shear mode type ink jet head, Eliminating the need for the conventional partition wall bonding process eliminates defects such as peeling and cracking of the bonded portion, and can improve the mass production yield by using a machining method or a molding die without a sealing process. ,
The inventors have found that the cost can be reduced, and have reached the present invention.

That is, the ink jet head of the present invention comprises:
A plurality of ink pressurizing chambers are formed between a pair of substrates by providing a plurality of partition walls formed in parallel, at least a part of which is formed of a piezoelectric body, and a partition wall that partitions a groove between the partition walls. A guide hole for ejecting ink in the ink pressurizing chamber is formed on one of the substrates, and an ink jet head comprising a piezoelectric body of the partition wall sandwiched between electrodes; The partition wall and the partition wall are formed integrally.

Here, the partition walls are preferably formed in a staggered manner on both sides of the partition wall. Further, it is desirable that a radius is formed at a corner between the substrate, the partition wall, and the partition wall.

According to the method of manufacturing an ink jet head of the present invention, a step of forming a groove on a substrate made of a piezoelectric material with a plurality of disk-shaped cutting tools to integrally form a partition wall and a partition wall on a substrate; Adhering the substrate on which is formed to the partition wall and the partition wall. Here, it is desirable that the outer peripheral surface of the disk-shaped cutting tool is chamfered.

In another method for manufacturing an ink jet head according to the present invention, there is provided a step of producing a substrate having a mold filled with a slurry containing a piezoelectric material adhered thereto, removing the mold and forming a partition on the substrate. A step of forming a body and a partition wall formed body, a step of firing to form a partition and a partition wall integrally with the substrate, and a step of bonding a substrate having an ink guide hole formed to the partition and the partition wall. And a process. Here, a polymerizable organic substance is contained in the slurry, and the organic substance is preferably polymerized to maintain the shapes of the partition wall molded body and the partition wall molded body.

[0018]

According to the ink jet head of the present invention, a partition wall and a partition wall are formed on a substrate in a shear mode ink jet head which ejects ink supplied to a groove in a direction perpendicular to the longitudinal direction of the groove. Because it was formed integrally,
The conventional joining process of the partition wall and the partition can be eliminated,
By eliminating the need for the bonding portion of the partition wall to the substrate and the bonding portion of the partition wall to the partition wall, it is possible to eliminate defects such as peeling and cracking of these bonding portions, and to extrude the conventional adhesive, Adhesion failure such as communication of the ink pressurization chamber due to insufficient adhesive does not occur. In addition, breakage of the partition wall due to groove processing can be prevented.

Further, when the partition walls are linear, the ink pressurizing chambers are also arranged linearly, and the distance between the guide holes formed corresponding to the ink pressurizing chambers is smaller than that of the ink pressurizing chambers. It is equivalent to the width, that is, the distance between the partition walls, and there is a limit in increasing the dot density.However, by forming the partition walls in a staggered manner on both sides of the partition wall, the ink pressure chambers are formed in a staggered manner. That is, the interval between the axis orthogonal to the arrangement direction of the guide hole group on one side of the partition wall and the axis orthogonal to the arrangement direction of the guide hole group on the other side is smaller than the pitch of the guide hole on one side. This makes it possible to increase the dot density, increase the dot density, and obtain high-resolution printing and images.

Further, by forming a radius at a corner between the substrate, the partition, and the partition wall, even if the partition is deformed,
It is possible to reinforce the substrate-side portion and the partition wall-side portion of the partition, and it is possible to suppress breakage of this portion.

The ink jet head forms a groove on the base made of a piezoelectric material with one or a plurality of disk-shaped cutting tools so that the groove becomes an ink pressurizing chamber, thereby integrally forming a partition wall and a partition wall. When forming by a method including a step and a step of bonding a substrate having an ink guide hole to a partition wall and a partition wall, it is possible to easily obtain an ink jet head in which the partition wall and the partition wall are integrally formed on the substrate. Can be. For example, by forming a groove on one side of the partition wall by a plurality of disk-shaped cutting tools, by slightly shifting the cutting tool in the axial direction to form a groove on the other side of the partition wall, the partition wall, the partition wall Can be formed in a zigzag on both sides.

When the outer peripheral surface of the disk-shaped cutting tool is chamfered and a groove is formed by using the cutting tool, it is possible to easily form a radius at a corner between the substrate, the partition wall and the partition wall. Become.

A step of forming a substrate on which a mold filled with the slurry containing the piezoelectric material is adhered; a step of removing the mold to form a partition wall and a partition wall on the substrate; Baking, forming a partition and a partition wall integrally on the substrate, and a method including a step of bonding a substrate having ink guide holes formed to the partition and the partition wall, An inkjet head in which a partition and a partition wall are integrally formed on a substrate can be easily obtained.

Furthermore, when the slurry contains an organic substance having polymerizability, and the organic substance is polymerized to maintain the shapes of the partition wall molding and the partition wall molding, an ink jet head can be further easily obtained. .

Therefore, according to the manufacturing method of the present invention, since it is manufactured using a machining process or a molding die without a sealing step, breakage of the partition walls and the like can be prevented, the mass production yield can be improved, and the cost can be reduced. This enables a high-density, high-resolution print and image to be obtained with a high dot density by a shear mode ink jet head that ejects ink droplets in a direction perpendicular to the longitudinal direction of the groove that forms the ink pressurizing chamber. Inexpensive inkjet heads can be provided at low cost.

[0026]

FIG. 1 is a perspective view showing a part of an ink jet head according to the present invention, and FIG. 2 is a longitudinal sectional view of a groove, that is, a sectional view taken along line aa of FIG. It is.

In the ink jet head of the present invention, a plurality of partitions 33 made of a piezoelectric material are integrally formed on the first substrate 31, and the grooves 35 between these partitions 33 form the respective ink pressurizing chambers A. Is partitioned by a partition wall 37. The partition wall 37 is also formed integrally with the substrate 31, and the partition wall 33 and the partition wall 37 are integrated. Electrodes 38 for applying a driving electric field are formed on both surfaces of the upper half of the partition 33 facing each ink pressurizing chamber A, and sandwich the partition 33.

A second part is provided on the top of the partition wall 33 and the partition wall 37.
A substrate 39 is joined, and a nozzle plate 43 having nozzle holes 41 is joined to the upper surface of the second substrate 39. The nozzle hole 41 is formed in the nozzle plate 43 so as to correspond to the groove 35 (ink pressurizing chamber A). In the second substrate 39, a guide hole 45 connected to the nozzle hole 41, an ink introduction path 47 for introducing ink into the ink pressurizing chamber A, and an ink lead-out path 49 for drawing ink from the ink pressurizing chamber A are formed. ing. The nozzle hole 41 of the nozzle plate 43 and the guide hole 45 of the second substrate 39 communicate with each other.

In the ink jet head of the present invention, the partition wall 33 and the partition wall 37 are formed integrally on the first substrate 31.

In the ink jet head constructed as described above, for example, as shown in FIGS. 3A to 3C, first, a base 51 made of a polarized piezoelectric material is prepared.
The piezoelectric material is not particularly limited, but a lead zirconate titanate-based ceramic material is optimal. Next, the groove 35 is formed at a desired pitch and width by one or a plurality of disc-shaped cutting tools 52 by grooving, for example, slicing.
(Partition walls) and partition walls 37 are formed. The material of the cutting tool 52 is not particularly limited, and the radius of the cutting tool can be appropriately selected in accordance with the curvature K of the partition wall 37 on the side of the ink pressurizing chamber A.

For example, as the cutting tool 52 for forming a groove, a plurality of disk-shaped cutting tools 5 having the same thickness as the groove width are used.
2 is fixed to the rotating shaft at the same interval as the thickness of the partition wall (the interval between the ink pressurizing chambers). As shown in FIG. After being fed in the longitudinal direction of the groove by a distance, it is pulled up from the base body 51, and thereafter, as shown in FIG. 3 (c), the cutting tool 52 is moved by the width of the partition wall 37 and processed in the same manner as described above. The partition wall 33 and the partition wall 37 are integrally formed on the first substrate 31.

Next, although not shown, electrodes are formed on both surfaces of the upper half of the partition wall 33, the side surfaces and the upper surface of the upper half of the partition wall 37. Means for forming an electrode can be formed by, for example, a sputtering method, a plating method, an evaporation method, an ion plating method, a CVD method, or the like.

Various metals can be used as the electrode material. For example, single metals such as gold, silver, copper, platinum, nickel, tungsten, chromium, and aluminum, and alloys thereof can be suitably used.

Thereafter, the unnecessary electrode film adhered on the uppermost surface is removed by polishing or laser to obtain an electrode wiring pattern. After the masking, an electrode film may be formed on the entire surface by using the vapor deposition method or the like, and then the masking may be removed to obtain an electrode wiring pattern. Although not shown, a wiring pattern for applying a voltage to electrodes formed on both surfaces of the partition wall 33 is formed on the upper surface of the partition wall 37.

On the other hand, the second substrate 39 is not limited to a piezoelectric material, and any material can be used. For example, it can be formed of ceramic, plastic, metal, or the like. However, in the case of metal, an insulating layer can be provided to prevent a short circuit with the electrode wiring pattern. The molding method is not particularly limited, for example, injection molding, machining,
It can be formed by means such as laser processing. It suffices that a guide hole 45 finally connected to the nozzle hole 41, an ink introduction path 47 for introducing ink into the ink pressurizing chamber A, and an ink lead-out path 49 be formed. Next, an electrode pattern is formed on the lower surface of the second substrate 39. The method for forming the electrode pattern is not particularly limited, but for example, a printing method, a vapor deposition method, and an etching method can be suitably used. After the electrode pattern on the lower surface of the second substrate 39 is formed, the guide holes 4 are formed.
5 and the ink introduction path 47 and the ink lead-out path 49 do not cause any problem.

The nozzle plate 43 is formed by piercing a predetermined size with a laser or the like to form the nozzle hole 41. As the material, any material such as various plastics, metals and ceramics can be used. For example, plastics such as polyethylene terephthalate, polyimide, polyetherimide, polyetherketone, polyethersulfone, polycarbonate, and cellulose acetate, or metals such as stainless steel, chromium molybdenum steel, and aluminum, or alumina, zirconia, and zirconate titanate Ceramics such as lead may be mentioned, but in particular,
From the viewpoint of ease of processing, a plastic plate made of polyethylene terephthalate or polyimide is preferable.

As shown in FIG. 3 (e), the second substrate 39 and the nozzle plate 43 thus obtained are bonded to the first substrate 31 with an adhesive or the like corresponding to the constituent members, and assembled. As shown in FIG. 3 (f), the shear mode ink jet head of the present invention can be manufactured.

Next, another example of the method for producing an ink jet according to the present invention will be described. First, as shown in FIG. 3A, a molding die 55 is prepared. The molding die 55 is not particularly limited as long as it can form a partition wall and a partition wall having a desired shape. For example, various materials such as a metal mold, a ceramic mold, a resin mold, and a rubber mold can be used. In particular, a metal mold can be suitably used from the viewpoints of workability and dimensional accuracy of the mold. Also, there is no problem if the molding die is of course an integral type or a split type. Further, a release agent may be applied to the surface of the mold, or a surface treatment may be applied for the purpose of improving the releasability.

Next, a slurry containing a piezoelectric material is prepared. The piezoelectric material that can be used in the present invention is not particularly limited as described above, but for example, a lead zirconate titanate-based ceramic material can be suitably used.

The slurry is a mixture of a binder solution composed of a resin, a solvent, and the like, in addition to the piezoelectric material, and may contain various additives such as a dispersant and a thickener. As the resin, it is possible to use thermoplastic waxes, acrylic resins, and butyral-based resins, as well as containing an organic material having polymerizability, in view of the strength of the obtained partition wall molded body. Preferably, for example, unsaturated polyester resin, phenol resin, epoxy resin, urethane resin, ultraviolet curable resin, polymerizable monomer and the like can be suitably used.

The means for preparing the slurry is not particularly limited.
The present roll, a planetary stirrer, a planetary stirrer, and the like can be used.

Next, as shown in FIG. 3B ', the molding die is filled with the slurry 57. The means for filling the slurry 57 is a doctor blade method, a roll coater method,
A printing method, an injection molding method, or the like can be used. afterwards,
Depending on the resin of the slurry, for example, drying, cooling,
The shape can be kept by means such as heating, exposure, addition of a reaction accelerator, etc., but the means for keeping the shape is not particularly limited as long as the shape can be finally kept. When the organic material is used to maintain the shape, heating, exposure, addition of a reaction accelerator and the like can be suitably used. Thereafter, the substrate is brought into close contact with the mold, the mold is removed, and a partition wall molded body and a partition wall molded body are formed on the substrate.

In addition, first, a paste containing a piezoelectric material is first solid-printed on a substrate, and then a screen mask having a predetermined size is provided.
It is also possible to form a molded partition wall or a molded partition wall.

Further, a paste containing a piezoelectric material and a resin having photosensitivity is uniformly applied on a substrate, dried, and then dried.
Batch exposure is performed, after which a pattern mask having a predetermined dimension is set, and then application, drying, exposure, development, drying, and lamination are repeated to produce a partition wall molded body or a partition wall molded body.

Subsequently, the molded partition wall and the molded partition wall are degreased and fired, and if necessary, are polished by machining to produce a substrate in which the partition wall and the partition wall are integrated. it can.

Thereafter, the second substrate and the nozzle plate can be the same as those described above.
As shown in (e) and (f), the shear mode ink jet head of the present invention can be manufactured by assembling with an adhesive or the like corresponding to each constituent member.

In the ink jet head configured as described above, since the partition wall 33 and the partition wall 37 are integrally formed on the first substrate 31, the conventional step of joining the partition wall can be eliminated, and the partition wall can be removed. Defects due to adhesion can be eliminated, and destruction due to groove processing for forming partition walls can be prevented.

In the above example, the partition 33 is provided on the first substrate 31.
And the partition wall 37 are integrally formed. However, the partition wall and the partition wall are integrally formed on the upper and lower substrates, and the partition walls and the partition walls are bonded to each other so that the polarization directions are opposite to each other. You may comprise. In addition, two substrates having opposite polarization directions are joined to form a base, a groove is formed from one side to form a partition wall and a partition wall integrally with the substrate, and the partition wall is formed of two types of opposite polarization directions. It may be formed of a piezoelectric body.

FIG. 4 shows another example of the present invention. In this ink jet head, the partition wall 61 has a partition wall 63.
Are formed in a zigzag on both sides. That is, considering the partition wall 63 as a center, the partition walls 61 are formed on both sides of the partition wall 63 at alternately shifted positions. In other words, the positions of the ink pressure chambers A are alternately shifted on both sides of the partition wall 63.
Are formed. The second substrate 65 includes an ink pressurizing chamber A
The formation position of the guide hole 67 is deviated correspondingly. Thus, the position of the axis perpendicular to the array direction of the guide hole 67 group, a h ₁ pitch on both sides of the partition wall 63.

In such an ink jet head, for example, a disk-shaped cutting tool having the same thickness as the groove width is fixed to the rotating shaft at the same interval as the thickness of the partition (the interval between the ink pressurizing chambers). Is used to form a group of partitions 61 on one side of the partition wall 63, and thereafter, the rotation axis is shifted in the axial direction to form a group of partitions 61 on the other side of the partition wall 63. In addition, about a manufacturing method, it is needless to say that it may be manufactured using the above-mentioned mold.

In the ink jet head configured as described above, the pitch between the axis perpendicular to the arrangement direction of the guide holes 67 on one side of the partition wall 63 and the axis perpendicular to the arrangement direction of the guide holes 67 on the other side. There h _1. On the other hand it becomes smaller than the pitch x of the side of the guide hole 67 group, can increase the dot density, high-resolution printing, the image can be obtained.

As shown in FIG. 5, the partition walls 71 are formed in a zigzag pattern on both sides of the partition wall 73, and
The direction in which the partition wall 71 is formed is inclined with respect to an axis orthogonal to the direction in which the guide holes 77 are arranged in the second substrate 75.

In such an ink jet head, the pitch between the axis orthogonal to the arrangement direction of the guide holes 77 on one side of the partition wall 73 and the axis orthogonal to the arrangement direction of the guide holes 77 on the other side is h ₂ . Since the pitch x is considerably smaller than the pitch x of the group of guide holes 77 on one side, the dot density can be increased, and high-resolution printing and images can be obtained.

FIG. 6 is a sectional view of the ink pressurizing chamber A and its vicinity. In this example, the first substrate 81,
A radius R is formed at a corner between the partition wall 83 and the partition wall. Such a radius R can be easily formed by chamfering the outer peripheral surface of a disk-shaped cutting tool and forming a groove using the cutting tool.

By forming such a radius R, even if the partition wall 83 is deformed, the portion of the partition wall 83 on the first substrate 81 side or the partition wall side can be reinforced, and damage to this portion can be prevented. Can be suppressed.

Incidentally, in the ink jet head of the present invention,
As the ink to be ejected, any ink containing a pigment or / and a dye and an aqueous solvent such as water or alcohol, or a non-aqueous solvent such as hexane or toluene as a main component can be applied.

[0057]

According to the ink jet head of the present invention, the ink pressurizing chamber is formed in a shear mode ink jet head in which ink droplets are ejected in a direction perpendicular to the longitudinal direction of the groove forming the ink pressurizing chamber. By integrating the partition wall and the partition wall with the substrate, the conventional step of bonding the partition wall can be omitted, whereby defects such as peeling of the bonded portion and cracks due to the step of bonding the partition wall can be eliminated. .

Further, since the partition walls and the partition walls are formed integrally with the substrate, a conventional groove forming step for forming the partition walls is not required, and breakage of the partition walls due to the groove forming step can be prevented. As a result, the mass production yield can be improved and the cost can be reduced. This makes it possible to easily and inexpensively obtain a highly reliable ink jet head having high dot density and high resolution printing and images.

[Brief description of the drawings]

FIG. 1 is a perspective view of a main part of an inkjet head according to the present invention, with a part of the main part cut away.

FIG. 2 is a sectional view taken along line aa of FIG.

FIG. 3 is a process chart for explaining a method of manufacturing an ink jet head according to the present invention.

FIG. 4 is an explanatory view showing another ink jet head of the present invention in which partitions formed on both sides of a partition wall are formed in a staggered manner.

FIG. 5 is an explanatory view showing still another ink jet head of the present invention in which partitions formed on both sides of a partition wall are formed in a staggered and inclined manner.

FIG. 6 is a cross-sectional view showing an ink pressurizing chamber and its vicinity.

FIG. 7 is a perspective view of a conventional inkjet head with a part cut away.

[Explanation of symbols]

 31, 81: first substrate 33, 61, 71, 83: partition wall 35: groove 39, 65, 75: second substrate 37, 63, 73: partition wall 38: Electrode 43: nozzle plate 45, 67, 77: guide hole 51: base 52: cutting tool 55: mold 57: slurry A: ink pressurization chamber R ·R

Claims (7)

[Claims] A plurality of ink pressurizations are provided between a pair of substrates by providing a plurality of partition walls which are formed in parallel and at least a part of which is formed of a piezoelectric material, and partition walls which partition grooves between the partition walls. A chamber is formed, and a guide hole for ejecting ink in the ink pressurizing chamber is formed in one of the substrates, and at least one of the substrates is provided in an inkjet head having a piezoelectric body of the partition wall sandwiched between electrodes. Wherein the partition wall and the partition wall are integrally formed. 2. The ink jet head according to claim 1, wherein the partition walls are formed in a zigzag pattern on both sides of the partition wall. 3. The method according to claim 1, wherein a radius is formed at a corner between the substrate, the partition wall and the partition wall.
The inkjet head according to the above. 4. A step of forming a groove on a substrate made of a piezoelectric material with a disk-shaped cutting tool to form a partition wall and a partition wall integrally with the substrate; Adhering to a partition wall. 5. The method for manufacturing an ink jet head according to claim 4, wherein the disk-shaped cutting tool has a chamfered outer peripheral surface. 6. A step of producing a substrate on which a mold filled with the slurry containing piezoelectric material is adhered, and a step of removing the mold to form a partition wall molded body and a partition wall molded body on the substrate. An ink jet head comprising: a step of forming a partition wall and a partition wall integrally with the substrate by firing; and a step of bonding a substrate having an ink guide hole formed to the partition wall and the partition wall. Manufacturing method. 7. The ink jet according to claim 6, wherein the slurry contains an organic substance having polymerizability, and the organic substance is polymerized to maintain the shape of the partition wall molded body and the partition wall molded body. Head manufacturing method.