JP2000348961A - Dielectric material, its manufacture, laminated ceramic capacitor formed thereof, and its manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve a thin multi-layered dielectric layer in reliability by a method wherein dielectric material is composed of barium titanate, rare earth oxide, alkaline earth metal oxide or carbonate, manganese component, and glass component, and barium titanate and rare earth oxide contained in the dielectric material are previously calcinated. SOLUTION: A dielectric layer is manufactured through such a manner where barium titanate and rare earth oxide are mixed together into a mixed powder, and the mixed powder is dried out and calcinated in the air. Then, alkaline earth metal oxide or carbonate, a manganese component, and a glass component are added as additives to the calcinated powder, the calcinated powder is ground and mixed together with the additives at the same time, and the mixture is dried out. The dielectric material is formed into a dielectric layer, and if a laminated ceramic capacitor equipped with nickel electrode layers is manufactured by the use of the dielectric layer, a small laminated ceramic capacitor with a thin dielectric layer can be produced through a simple process. An outer electrode is provided, by which the laminated ceramic capacitor can be improved in moisture resistance.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dielectric material which is highly reliable even if it is made thinner, a method of manufacturing the same, a multilayer ceramic capacitor using the same, and a method of manufacturing the same.

[0002]

2. Description of the Related Art A multilayer ceramic capacitor has a structure in which electrodes and a dielectric material are layered, and is integrated and solidified by a ceramic manufacturing technique, so that a small-sized and large-capacity capacitor can be obtained. Furthermore, since the electrode is built in, it has little magnetic induction component and shows excellent performance for high frequency applications.
Since the chip type has no lead wires, it can be directly mounted at the time of component mounting, and meets the demand for smaller and lighter electronic devices, and further development is expected in the future.

[0003] On the other hand, according to the classification of the capacitor material, aluminum electrolytic capacitors, tantalum electrolytic capacitors,
Organic film capacitors, etc., are in competition with all of them from the capacity range of multilayer ceramic capacitors. Therefore, future demands for multilayer ceramic capacitors are miniaturization, large capacity, and low cost.

For miniaturization, the chip shape is 3.2 mm.
X 1.6mm to 2.0mm x 1.25mm or 1.6mm x 0.
Efforts have been made to reduce the size to 8 mm or even 1.0 mm x 0.5 mm.

To increase the capacity, efforts are being made to increase the dielectric constant of the dielectric material, increase the number of layers, and reduce the thickness of the dielectric layer.

[0006] Next is cost reduction, which is the greatest requirement. This is because miniaturization and large capacity are not contradictory demands for cost reduction, but are issues that must be addressed at the same time.

A conventional multilayer ceramic capacitor uses barium titanate as a main component of a dielectric material and uses noble metal palladium (Pd) for an internal electrode. Therefore, the ratio of the internal electrode material cost to the production cost is extremely high, and is said to be 70% or more. Especially for capacitors with large capacitance, the number of internal electrodes increases, which further increases the cost.Multilayer ceramic capacitors have high capacity efficiency, have excellent dielectric properties and high reliability. Had become.

For this reason, various studies have been made in various fields for cost reduction. Focusing on silver (Ag), which is relatively inexpensive among noble metals, a method of using Ag-Pd as an internal electrode material is being studied.

On the other hand, Ag is considered to be costly, and there is a direction toward base metalization. That is, nickel (Ni) is used as the electrode material. When a base metal such as Ni is used as the internal electrode, the dielectric containing barium titanate as a main component and the base metal internal electrode must be simultaneously fired in a non-oxidizing atmosphere in which Ni is not oxidized. However, in this case, the conventional dielectric made of barium titanate or a solid solution thereof is easily reduced and loses insulating properties, and as a result, there is a disadvantage that practical dielectric properties as a multilayer ceramic capacitor cannot be obtained. Was.
Therefore, a non-reducing ceramic dielectric material has been developed as a material that is not reduced even when fired in a neutral or reducing atmosphere, and has already been put to practical use.

As a technique for imparting reduction resistance to a dielectric material, it is known to add a manganese component and to make the A site excessive.

The direction of today's technology in which a multilayer ceramic capacitor using Ni as an internal electrode has already been put to practical use is to expand the capacity range by increasing the thickness of the dielectric layers to be higher.

As is clear from the calculation formula of the capacitance of the multilayer ceramic capacitor, there are two main means for increasing the capacitance within the range of standardized product dimensions. The first is to increase the dielectric constant, and the other is to increase the number of stacked layers by making the dielectric layers thinner.

Among them, the most effective method is to increase the thickness of the dielectric layers in order to increase the capacitance. This is because, within the standard dimensions, thinning the dielectric layer has a squared effect.

In the realization of the improvement of the dielectric constant, it is necessary to search for the material composition and at the same time, even if it is realized, the crystal grain size of the sintered body increases, and as a result, the effective layer cannot be made thinner and the capacity increases. The result is less effective.

[0015] Various companies are making various efforts to increase the thickness of thin layers. In particular, the thickness of the dielectric layer after sintering is 3 μm.
Nowadays, efforts are being made on manufacturing processes, such as improvements in manufacturing facilities and improvements in the accuracy of each process.

On the other hand, it is a reality that a conventional material system is used for the dielectric material.

[0017]

A multilayer ceramic capacitor using Ni as an internal electrode is an effective means for realizing a small-sized and large-capacity product at a low price as described in the section of the prior art. Therefore, even if the noble metal Pd is used for the internal electrode, there is little merit even if a low-capacity product occupying a small proportion of the electrode cost is replaced with a Ni-internal product. Therefore, inevitably Ni
The internal ceramic multilayer ceramic capacitor has a thin dielectric layer and a large number of stacked layers.

In a multilayer ceramic capacitor having a thin layer and a high lamination aiming at increasing the capacity, reliability is particularly important performance. At present, most of the approaches from the material side are to search for the composition and the material production process follows the conventional process. That is, the steps until the dielectric material is completed include a weighing step, a mixing step,
The flow is a calcining step and a pulverizing step. Since the mixing step and the pulverizing step are generally performed by a wet method, drying is performed after each step. Although progress in equipment and optimization of conditions in each process are constantly being made, the reality is that the major trends have not changed.

In particular, in the calcining step, the uniformity of the components in the material is improved by reacting each component in advance,
Although this is an important step performed for the purpose of absorbing lot-to-lot fluctuations of starting materials, all components are calcined at one time (all amounts are calcined). Therefore, opposing effects appear from the viewpoint of characteristics at the same time, and the ability of the material composition is not exhibited 100%.

From the above points, as a result of various studies focusing on the calcination step, it was found that the reliability can be significantly improved even with the same composition.

The present invention provides a highly reliable dielectric material even when the thickness of the dielectric layer is reduced. At the same time, the present invention provides a small-sized, large-capacity monolithic ceramic capacitor having excellent reliability and a thin, high-layer structure. The purpose is to:

[0022]

In order to solve the above-mentioned problems, the dielectric material of the present invention comprises at least barium titanate, a rare earth oxide, an oxide or carbonate of an alkaline earth metal, and a manganese component. , A dielectric material comprising a glass component, wherein barium titanate and a rare earth oxide in the dielectric material have been calcined in advance.

With this configuration, a highly reliable dielectric material can be obtained even if the thickness is reduced.

[0024]

BEST MODE FOR CARRYING OUT THE INVENTION The invention according to claim 1 of the present invention provides at least barium titanate, a rare earth oxide,
This dielectric material is composed of an oxide or carbonate of an alkaline earth metal, a manganese component, and a glass component, and barium titanate and a rare earth oxide in these materials are calcined in advance. Accordingly, a highly reliable dielectric layer can be formed even if the thickness is reduced.

According to a second aspect of the present invention, in the dielectric material according to the first aspect, the rare earth oxide is Y ₂ O ₃ or Dy.
_At least one of ₂ O ₃ , Yb ₂ O ₃ , and Er ₂ O ₃ is used, and use of these can improve the life.

According to a third aspect of the present invention, there is provided the dielectric material according to the first aspect, wherein the oxide or carbonate of the alkaline earth metal is MgO, CaCO ₃ , SrCO ₃ , BaCO _3.
And at least one of them. By using this, reduction resistance can be improved.

According to a fourth aspect of the invention, in the dielectric material of the first aspect, the manganese component is an oxide of manganese or manganese carbonate, and by using this, the reduction resistance can be improved. .

The invention according to claim 5 has a step of mixing barium titanate and a rare earth oxide, a step of drying the mixed powder, and a step of calcining in air after drying. A step of adding at least an alkaline earth metal oxide or carbonate, a manganese component, and a glass component to the calcined powder obtained as an additive, and simultaneously pulverizing and mixing the additive with the calcined powder, This is a method for producing a dielectric material having a step of drying after that, and a highly reliable dielectric layer can be realized even if the thickness is reduced.

According to a sixth aspect of the present invention, there is provided a multilayer ceramic capacitor having the dielectric material according to the first aspect as a dielectric layer and having a plurality of electrode layers made of nickel. A small multilayer ceramic capacitor can be obtained.

According to a seventh aspect of the present invention, there is provided a dielectric material obtained by the method for producing a dielectric material according to the fifth aspect, a step of forming a slurry with at least an organic binder, a plasticizer, and a solvent; Forming a green sheet, forming an electrode layer made of nickel on the green sheet, laminating a desired number of layers of the sheet, cutting the laminate to obtain a raw chip, This is a method of manufacturing a multilayer ceramic capacitor comprising a step of forming an external electrode mainly composed of Cu after degreasing and firing a chip, and a small multilayer ceramic capacitor with a thin dielectric layer can be produced in a simple process.

According to an eighth aspect of the present invention, there is provided a dielectric material obtained by the method for producing a dielectric material according to the fifth aspect, a step of forming a slurry with at least an organic binder, a plasticizer, and a solvent, and the step of slurrying the slurry. Forming a green sheet, forming an electrode layer made of nickel on the green sheet, laminating a desired number of layers of the sheet, cutting the laminate to obtain a raw chip, A method for manufacturing a multilayer ceramic capacitor, comprising a step of applying a paste containing nickel as a main component to an end surface of a chip, and a step of forming an external electrode containing silver as a main component after degreasing and firing. Thereby, the moisture resistance can be improved.

Hereinafter, embodiments of the present invention will be described in detail.

(Embodiment 1) First, a method of manufacturing a dielectric material and a method of creating a functional model for evaluation will be described. The material composition used will be described later.

Materials were produced by three methods. The difference lies in the presence or absence of the calcining step and the calcining method.

FIG. 1 shows a process flow chart of the raw material production process.

The mixed powder process is a method of preparing a raw material powder through weighing, mixing and drying.

The total calcining process is a method of calcining a mixed powder, followed by pulverization and drying to produce a raw material, and the calcining method currently used is this method.

In the partial pre-calcining process, after preparing a mixed powder in which barium titanate as a main component and a part of the additive are mixed, calcination is performed, and then the remaining additive is additionally added and pulverized. . Simultaneous grinding of the calcined powder and mixing of additional additives. This method is the manufacturing process of the dielectric material of the present invention.

The conditions of each step will be briefly described below.

The mixing was performed by a wet ball mill method. The mixing conditions were as follows: 0.5 mol of powder, 350 g of 5 mmφ zirconia balls, 170 cc of pure water, 18 rpm at 150 rpm.
Time. A 610 cc polypot was used for the mixing container. For drying, a Teflon sheet was laid, and the whole amount was vat dried at 150 ° C.

The calcination was performed at a predetermined temperature using a box-type electric furnace by putting the mixed powder having passed # 32 into a porcelain crucible.
The holding was performed for 2 hours, the temperature raising / lowering rate was set to 200 ° C./h, and the temperature inside the furnace was measured by installing a measuring ring.

The pulverization was carried out using 100 g of calcined powder, 350 g of 5 mmφ zirconia balls, 150 cc of pure water, 150 rpm.
For 18 hours. In the case of partial pre-calcination, calcined powder 100
The amount of additional additive is calculated and added to g. The pulverization process was performed under condition control, and the particle size control of the pulverized powder was not performed. However, for calcined powder and pulverized powder, a laser diffraction type particle size distribution measuring device (LA-500) manufactured by Horiba, Ltd.
Is measured by

The evaluation of the completed dielectric material was performed using a functional model (five-layer product).

Next, FIG. 2 shows a flow chart of the process for producing a functional model.

The preparation of the dielectric slurry includes a wet dispersion step and a slurrying step. The wet dispersion conditions are shown in (Table 1).

[0046]

[Table 1]

The wet time was determined by confirming the state of the agglomerated powder in the wet slurry with an optical microscope. Usually the wetting time is 6 hours. After confirming the agglomerated powder, a vehicle is charged and a slurry is formed. Table 2 shows the vehicle composition. As a vehicle, 20 g of a vehicle prepared in advance at a mixing ratio shown in Table 2 is charged. The composition in the slurry is shown in (Table 3).

[0048]

[Table 2]

[0049]

[Table 3]

The slurrying time is 4 if the wetness is sufficient.
Time is sufficient, but 12 hours is actually used as a reference.

A sheet is formed using the slurry prepared as described above. The sheet was formed using an applicator. The molded thickness of the sheet was adjusted to about 5 to 6 μm by adjusting the gap of the applicator and the slurry viscosity. This is because the effective layer thickness was about 3 to 4 μm after firing.

The lamination was performed by an electrode transfer method. The internal electrodes were formed by screen printing on a PET film for transfer. Exposed fine peel 3 for PET film for transfer
00 (75 μm) was used. It has a melamine resin treatment on the surface. The printing plate was # 500 mesh manufactured by Tokyo Process Service, and NLP-43196 (spherical Ni powder) manufactured by Sumitomo Metal Mining was used for the internal electrode paste. The coating amount of the internal electrode was about 0.6 mg / cm ² as a standard. The pressing conditions are 85 ° C. and 85 kg / cm ² for 5 seconds.

As a functional model, a 3216 type 5-layer product was manufactured. After lamination, cutting, foaming and dispersion are performed to complete a green chip.

Next, the binder removal and firing were carried out in a nitrogen gas atmosphere using an inert gas oven manufactured by Koyo Lindberg. The heating rate is 100 ° C /
h, After completion of 4 hours at 400 ° C., the mixture was allowed to cool, and the flow rate of nitrogen gas was 80 l / min in all regions.

The firing was performed using an atmosphere electric furnace. After setting the sample, the inside of the furnace was replaced with nitrogen twice, and then fired with the temperature profile shown in FIG.

The temperature is raised from 500 ° C. to 1250 ° C.
_2: H ₂ of 100: 7, the oxygen concentration at the top holding temperature is about 0.5 orders of magnitude to 1-digit reducing side atmosphere relative equilibrium oxygen partial pressure and Ni.

As an external electrode, a simultaneous Ni external power was used. Before the binder is removed, the green chip is applied to the end face and baked. Simultaneous Ni paste is prepared by adding 5 to 35% by weight of dielectric powder to the internal electrode paste as a co-fabric and kneading with three rolls.

Next, Ag external electrodes were formed and plated. Ag external power paste includes NAMICS X
DP4502-3 was used. The baking was performed in air at 600 ° C. for 60 minutes in-out in a belt furnace. Plating is N on the base
i plating and solder plating thereon.

Various evaluations were performed using the functional model prepared as described above.

Next, in the embodiment of the present invention, a dielectric material having the following composition was used. The present dielectric material exhibits JIS B characteristics in temperature characteristics. (Composition formula 1) 100BT-0.6MgO-2.0DyO
_{3/2 -0.2MnO 4/3 -1.5wt% (Ba 0.5} Ca 0.5)
SiO _{3 The} above composition contains 100 bar of barium titanate (denoted as BT).
The additive was added in mol% as 1%. However, barium calcium silicate used as a glass component is added in wt%.

In order to show the effect of performing the method of calcining the dielectric material of the present invention (referred to as partial pre-calcination), the dielectric material including the comparative example was manufactured by using the dielectric material manufacturing process shown in FIG. Materials were produced.

The partial pre-calcination includes BT alone,
The test was performed by adding only one type of each additive to BT. Except for the partial pre-calcining of the rare earth oxide, it is a comparative example to the present invention.

The calcination was performed under a constant condition of 1100 ° C. for 2 hours. The measuring temperature at that time was 1147 ° C. After calcining, the remaining additives are added and pulverized so that the composition becomes Formula 1. The calcining conditions are the same for the full-quantity calcining process as a comparative example.

The material prepared as described above was evaluated for powder physical properties and initial properties. The results are summarized in (Table 4). The shrinkage ratio is data for a dry disc, but the others show the results for a functional model 5-layer product.

Here, the effective layer thickness of the dielectric layer was determined from an optical microscope photograph after a randomly selected one of the fired samples was filled with a resin in the L direction and polished to the center of the element body. .

[0066]

[Table 4]

The lots marked with * in Table 4 are outside the scope of the present invention and are described as comparative examples. The reliability was evaluated not by a test method in accordance with JIS but by a super-accelerated life test. In Table 4, the average life is shown. The unit is minutes.

[0068] Ultra accelerated life test where (H ighly A cceler
ated L ife T esting: abbreviated HALT and thereafter. ) Will be described briefly.

HALT is a method in which the temperature and applied voltage are extremely high with respect to the normal life test conditions, and the evaluation is performed in a short time. In general, in the case of a dielectric material, it is said that the acceleration coefficient of voltage is a cube law and the acceleration coefficient of temperature is an 8 degree double law or 10 degree double law.

Deterioration is judged when the insulation resistance of the sample falls below a certain value. We judge that the sample has deteriorated when the sample is short-circuited. Although the HALT test does not reveal the absolute value of the material life, it determines how the differences in the process affect the life, and whether the overall performance including the internal structural defects of the laminate is satisfactory. This is a very effective technique. The former appears as an average lifespan called MTTF. In the latter case, it is possible to judge from the HALT straight line how much the structural defect region appears in the wear region affected by the material itself. The conditions of HALT performed in the present embodiment were 150 ° C. and 128 V, and the number of samples was 50.

As is clear from the results shown in Table 4, the dielectric material produced by the calcining method of the present invention has an extremely long average life as compared with the comparative example. That is, by partially pre-calcining the rare-earth oxide Dy ₂ O ₃ , it is possible to extend the life by about one digit compared to the full-mass calcining process. However, a remarkable difference in characteristics only appears in reliability, and there is almost no difference in terms of dielectric constant, tan δ, and insulation resistance.

Next, the influence of the calcination temperature of the partial pre-calcination of the rare earth oxide is shown in Table 5.

[0073]

[Table 5]

As is clear from Table 5, the calcination temperature does not affect the characteristics in a wide range, and the rare-earth oxide partial calcination shows high reliability.

From the results shown in Table 5, the calcining temperature is desirably in the range of 1000 ° C. to 1200 ° C. as the measuring temperature.

(Embodiment 2) In Embodiment 1, the material composition shown in the following composition formula 1 was used. (Composition formula 1) 100BT-0.6MgO-2.0DyO
_{3/2 -0.2MnO 4/3 -1.5wt% (Ba 0.5} Ca 0.5)
In Embodiment 2 SiO ₃ present embodiment, the effects of the present invention in showing a composition formula as follows shown in the form of comparison with comparative examples.

(Composition formula 2) 100BT-αA-β / 2B-
0.2MnO _4/3 -1.5wt% (Ba _0.5 Ca _0.5 ) Si
O _{3 In the} above formula, A is an alkaline earth metal oxide or
B represents a carbonate, and B represents a rare earth oxide. Furthermore, α,
β represents the amount of addition, as in the case of Embodiment 1,
BT is 100 mol%, and is added in mol%. However, barium calcium silicate used as a glass component is added in wt%.

Table 6 shows the material compositions and the results. The characteristics are data of a functional model five-layer product, and indicate the reliability as an average life.

[0079]

[Table 6]

The lots marked with * in Table 6 are out of the scope of the present invention and are described as comparative examples.

As is evident from Table 6, the partial pre-calcination of the present invention has a remarkable effect on improving the reliability, that is, extending the life.

Although there is a slight difference in the average life depending on the type and amount of the alkali metal oxide or carbonate, and the type and amount of the rare earth oxide, a remarkably long life is realized as compared with the calcining of the entire amount. are doing.

In the embodiment of the present invention, manganese tetroxide is used for the addition of manganese. However, the addition of manganese is not limited to this, and similar results can be obtained by using other manganese oxides or manganese carbonate. Has been obtained. Similar results were obtained in the range of 0.1 to 1.0 MnO _4/3 .

Further, the barium calcium silicate added as a glass component is not limited to those described in the embodiment of the present invention, and the barium silicate, calcium silicate or the like may be used if the effects of the present invention are lost. Needless to say, there is nothing. Since the present invention is characterized by a method of calcining a dielectric material, it goes without saying that the composition of the dielectric material is not limited.

Next, in the manufacturing method of the multilayer ceramic capacitor of the present invention, the case where the external electrode of Ni is applied in advance to the terminal portion of the unsintered laminated body as the external electrode, degreased and fired, and then the external electrode of Ag is baked is shown. However, the same result can be obtained by forming the external electrode by a method in which the unsintered laminated body is degreased and fired after firing, and thereafter, the external electrode mainly containing Cu is baked at about 900 ° C. in a nitrogen atmosphere. Obtained.

[0086]

According to the present invention as described above, it is possible to produce a dielectric material having excellent reliability even when the dielectric layers are thin and highly laminated, and the original performance of the dielectric material composition can be improved. It is possible to withdraw 100%. by this,
It is possible to realize a multilayer ceramic capacitor made of an extremely thin dielectric having a dielectric layer of 3 μm or less.

At the same time, the manufacturing method of the present invention makes it possible to easily manufacture the above-mentioned multilayer ceramic capacitor at a high yield.

Further, according to the present invention, it is possible to realize a small size, a large capacity, and a low price, which are demands of the market, and it is also possible to reduce the size and weight of an electronic device.

[Brief description of the drawings]

FIG. 1 is a process flowchart showing a dielectric material manufacturing process of the present invention.

FIG. 2 is a flowchart of a process for producing a functional model according to an embodiment of the present invention.

FIG. 3 is a diagram showing a firing temperature profile of the functional model shown in one embodiment of the present invention.

 ────────────────────────────────────────────────── ─── Continuing from the front page (72) Inventor Hiroshi Asano 1006 Kazuma Kadoma, Osaka Prefecture F-term (reference) 5E001 AB03 AC09 AE00 AE02 AE03 AE04 AF00 AF06 AH01 AH05 AH06 AH07 AH08 AH09 AJ01 AJ01 AJ02 AJ03

Claims (8)

[Claims] 1. At least barium titanate, a rare earth oxide, an oxide or carbonate of an alkaline earth metal, a manganese component, and a glass component, wherein barium titanate and the rare earth oxide in these materials are A dielectric material made of calcined in advance. 2. The method according to claim 1, wherein the rare earth oxide is Y ₂ O ₃ , Dy ₂ O ₃ , Yb.
_{2. The method according to} claim 1, wherein at least one of ₂ O ₃ and Er ₂ O ₃ is used.
3. The dielectric material according to item 1. 3. An oxide or carbonate of an alkaline earth metal
Salt is MgO, CaCO _Three, SrCO_Three, BaCO_ThreeNo
2. The dielectric material according to claim 1, which is at least one kind. 4. The dielectric material according to claim 1, wherein the manganese component is manganese oxide or manganese carbonate. 5. A step of mixing barium titanate and a rare earth oxide, a step of drying the mixed powder, and a step of drying and calcining in the air. A step of adding at least an alkaline earth metal oxide or carbonate to the powder, a manganese component, and a glass component as additives, and simultaneously pulverizing the calcined powder and mixing the additives,
A method for producing a dielectric material, comprising a step of drying thereafter. 6. A multilayer ceramic capacitor comprising the dielectric material according to claim 1 as a dielectric layer and a plurality of electrode layers made of nickel. 7. A step of forming a slurry using the dielectric material obtained by the method for manufacturing a dielectric material according to claim 5, at least an organic binder, a plasticizer, and a solvent, and forming the slurry into a green sheet. A step of forming an electrode layer made of nickel on the green sheet, a step of laminating the sheet in a desired number of layers, a step of cutting the laminate to obtain a raw chip, and a step of degreased and fired the raw chip. A method for manufacturing a multilayer ceramic capacitor, comprising a step of forming an external electrode containing Cu as a main component. 8. A step of forming a slurry with the dielectric material obtained by the method for manufacturing a dielectric material according to claim 5, at least an organic binder, a plasticizer, and a solvent; and forming the slurry into a green sheet. A step of forming an electrode layer made of nickel on the green sheet, a step of laminating a desired number of layers of the sheet, a step of cutting the laminate to obtain a raw chip, and a step of forming nickel on the end face of the raw chip. A step of applying a paste as an ingredient, and then degreasing,
A method for manufacturing a multilayer ceramic capacitor, comprising a step of forming an external electrode mainly composed of silver after firing.