JP2000272962A - Piezoelectric ceramic composition - Google Patents
Piezoelectric ceramic compositionInfo
- Publication number
- JP2000272962A JP2000272962A JP11079910A JP7991099A JP2000272962A JP 2000272962 A JP2000272962 A JP 2000272962A JP 11079910 A JP11079910 A JP 11079910A JP 7991099 A JP7991099 A JP 7991099A JP 2000272962 A JP2000272962 A JP 2000272962A
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- Japan
- Prior art keywords
- piezoelectric ceramic
- composition
- piezoelectric
- ceramic composition
- tio2
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 15
- 239000000919 ceramic Substances 0.000 title claims abstract description 12
- 239000000654 additive Substances 0.000 claims abstract description 7
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims abstract description 3
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 claims description 6
- 230000000996 additive effect Effects 0.000 claims description 5
- GHPGOEFPKIHBNM-UHFFFAOYSA-N antimony(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Sb+3].[Sb+3] GHPGOEFPKIHBNM-UHFFFAOYSA-N 0.000 claims description 4
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 claims description 4
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum oxide Inorganic materials [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 claims description 3
- KTUFCUMIWABKDW-UHFFFAOYSA-N oxo(oxolanthaniooxy)lanthanum Chemical compound O=[La]O[La]=O KTUFCUMIWABKDW-UHFFFAOYSA-N 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 2
- 229910019639 Nb2 O5 Inorganic materials 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 9
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 abstract description 4
- 229910010252 TiO3 Inorganic materials 0.000 abstract description 4
- QDOXWKRWXJOMAK-UHFFFAOYSA-N dichromium trioxide Chemical compound O=[Cr]O[Cr]=O QDOXWKRWXJOMAK-UHFFFAOYSA-N 0.000 abstract description 4
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 abstract description 3
- 239000004372 Polyvinyl alcohol Substances 0.000 abstract description 2
- 239000011230 binding agent Substances 0.000 abstract description 2
- 238000001354 calcination Methods 0.000 abstract description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 abstract description 2
- 229910000027 potassium carbonate Inorganic materials 0.000 abstract description 2
- 229910000029 sodium carbonate Inorganic materials 0.000 abstract description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract 4
- WMWLMWRWZQELOS-UHFFFAOYSA-N bismuth(iii) oxide Chemical compound O=[Bi]O[Bi]=O WMWLMWRWZQELOS-UHFFFAOYSA-N 0.000 abstract 2
- 238000000748 compression moulding Methods 0.000 abstract 1
- 235000015320 potassium carbonate Nutrition 0.000 abstract 1
- 239000000843 powder Substances 0.000 abstract 1
- 239000002994 raw material Substances 0.000 abstract 1
- 235000017550 sodium carbonate Nutrition 0.000 abstract 1
- 235000010215 titanium dioxide Nutrition 0.000 abstract 1
- 230000008878 coupling Effects 0.000 description 11
- 238000010168 coupling process Methods 0.000 description 11
- 238000005859 coupling reaction Methods 0.000 description 11
- 238000005259 measurement Methods 0.000 description 3
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 229910000464 lead oxide Inorganic materials 0.000 description 2
- GNRSAWUEBMWBQH-UHFFFAOYSA-N nickel(II) oxide Inorganic materials [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 2
- UPWOEMHINGJHOB-UHFFFAOYSA-N oxo(oxocobaltiooxy)cobalt Chemical compound O=[Co]O[Co]=O UPWOEMHINGJHOB-UHFFFAOYSA-N 0.000 description 2
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 2
- 229910052573 porcelain Inorganic materials 0.000 description 2
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 1
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000002440 industrial waste Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000002075 main ingredient Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000005464 sample preparation method Methods 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、特に、波動デバイ
ス、センサー、アクチュエーター等の電子部品に好適な
圧電体磁器組成物に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric porcelain composition particularly suitable for electronic components such as wave devices, sensors and actuators.
【0002】[0002]
【従来の技術】従来、圧電体材料としては、二成分で構
成されるPZT(PbTiO3−PbZrO3)系セラ
ミックスや、三成分で構成されるPCM[PbTiO3
−PbZrO3−Pb(Mg0.5Nb0.5)TiO
3] 系セラミックスが主に用いられてきた。Conventionally, as the piezoelectric material, and a two-component PZT (PbTiO 3 -PbZrO 3) ceramics and, PCM consists of three components [PbTiO 3
-PbZrO 3 -Pb (Mg 0.5 Nb 0.5 ) TiO
3 ] series ceramics have been mainly used.
【0003】その理由としては、上記の材料が優れた圧
電特性を示すことはもちろんであるが、それ以外でも、
センサー、アクチュエーター、フィルター等、多種多様
の用途に用いられる際、各用途に要求される特性も様々
であり、要求に対応した圧電特性に適宜に得られるから
である。[0003] The reason for this is, of course, that the above-mentioned materials exhibit excellent piezoelectric properties.
This is because, when used in a wide variety of applications such as sensors, actuators, and filters, the characteristics required for each application are various, and the piezoelectric characteristics corresponding to the requirements can be obtained appropriately.
【0004】[0004]
【発明が解決しようとする課題】しかし、上述した従来
の圧電体材料には、次のような欠点がある。即ち、これ
らの材料の主成分は、酸化鉛であり、60wt%以上も
含有している。酸化鉛は、低温でも揮発性が高く、仮
焼、焼結工程において、大気中に微量でも放出される可
能性がある。However, the above-mentioned conventional piezoelectric materials have the following disadvantages. That is, the main component of these materials is lead oxide, which contains 60 wt% or more. Lead oxide has high volatility even at low temperatures, and may be released into the atmosphere even in a small amount in the calcining and sintering steps.
【0005】また、産業廃棄物中から溶出することも考
えられる。また、これらの対策のための設備投資に膨大
な費用を投じなければならない点も大きな問題である。[0005] It is also conceivable that the substance is eluted from industrial waste. Another major problem is that huge investments must be made in capital investment for these measures.
【0006】従って、本発明は、鉛を含有せず、かつ、
圧電セラミック素子の材料として実用可能な圧電体磁器
組成物を提供することである。[0006] Therefore, the present invention does not contain lead, and
An object of the present invention is to provide a piezoelectric ceramic composition that can be used as a material for a piezoelectric ceramic element.
【0007】[0007]
【課題を解決するための手段】本発明によれば、この問
題を解決するための手段として、鉛を含まない[Bi
0.5(Na1−xKx)0.5]TiO3系であっ
て、実用可能な圧電特性を有する圧電体材料が得られ
る。According to the present invention, this problem is solved.
As a means to solve the problem, lead-free [Bi
0.5(Na1-xKx)0.5TiO3System
As a result, a piezoelectric material having practical piezoelectric properties is obtained.
You.
【0008】即ち、本発明は、一般式[Bi0.5(N
a1−xKx)0.5] TiO3で表わされ、モル比x
が0.20<x≦0.30の範囲である圧電体磁器組成物
である。That is, the present invention relates to a compound represented by the general formula [Bi 0.5 (N
a 1-x K x ) 0.5 ] TiO 3 , the molar ratio x
Is in the range of 0.20 <x ≦ 0.30.
【0009】また、本発明は、前記圧電体磁器組成物
が、添加物として、Fe2O3、Cr 2O3、Mn
O2、NiO、Co2O3、La2O3、BaCO3、
Sb2O3、Nb2O5のうち、少なくとも一つを2w
t%以下含む圧電体磁器組成物である。Further, the present invention provides the above-mentioned piezoelectric ceramic composition.
However, as an additive, Fe2O3, Cr 2O3, Mn
O2, NiO, Co2O3, La2O3, BaCO3,
Sb2O3, Nb2O5At least one of them is 2w
This is a piezoelectric ceramic composition containing t% or less.
【0010】[0010]
【発明の実施の形態】以下、本発明の実施の形態につい
て説明する。Embodiments of the present invention will be described below.
【0011】(第1の実施の形態)まず、本発明の第1
の実施の形態について説明する。主成分原料として、化
学的に高純度であるBi2O3、Na2CO3、TiO
2、K2CO3を用いた。(First Embodiment) First, the first embodiment of the present invention will be described.
An embodiment will be described. Bi 2 O 3 , Na 2 CO 3 , TiO which are chemically high purity
2 , K 2 CO 3 was used.
【0012】これらを一般式[Bi0.5(Na1−x
Kx)0.5]TiO3(0.1≦x≦0.5)+添加物
(2wt%以下)に対し化学量論的に配合し、ボールミ
ルによりエタノール中で20時間混合した。These are represented by the general formula [Bi 0.5 (Na 1-x
K x) 0.5] TiO 3 ( 0.1 ≦ x ≦ 0.5) + additives (hereinafter 2 wt%) with respect to stoichiometric formulations were mixed in ethanol for 20 hours by a ball mill.
【0013】これを800℃で1時間保持して仮焼し、
次に、10時間粉砕を行った。バインダーとしてポリビ
ニールアルコールを用い造粒し、圧力1ton/cm2
で直径20mm、厚さ1mmの円板状に加圧成形した。
焼成は、温度1100℃で、2時間保持して行った。This is kept at 800 ° C. for 1 hour and calcined.
Next, grinding was performed for 10 hours. Granulated using polyvinyl alcohol as binder, pressure 1 ton / cm 2
To form a disc having a diameter of 20 mm and a thickness of 1 mm.
The firing was performed at a temperature of 1100 ° C. for 2 hours.
【0014】この焼結体の両面に銀電極を設け、100
℃シリコンオイル中で直流電圧4kv/mmを電極間に
加え、厚み方向に分極を行った。A silver electrode is provided on both sides of the sintered body,
A direct current voltage of 4 kv / mm was applied between the electrodes in silicone oil at ℃ to polarize in the thickness direction.
【0015】これらの試料について、圧電及び誘電的性
質の測定を行った。圧電測定は、LFインピーダンスア
ナライザーを用い、共振−反共振法により電気機械結合
係数、機械的品質係数を算出した。また、誘電特性は、
LCRメータを用いて測定周波数1MHzで測定を行っ
た。[0015] The piezoelectric and dielectric properties of these samples were measured. For the piezoelectric measurement, an electromechanical coupling coefficient and a mechanical quality coefficient were calculated by a resonance-antiresonance method using an LF impedance analyzer. The dielectric properties are
The measurement was performed at a measurement frequency of 1 MHz using an LCR meter.
【0016】表1は、本発明の実施の形態による[Bi
0.5(NaxK1−x)0.]TiO3(x:0.1
〜0.5)で示される圧電体磁器組成物の圧電及び誘電
特性(電気機械結合係数k33、kp、kt、機械的品
質係数Qm、比誘電率ε33 t/ε0)を示す。Table 1 shows [Bi according to the embodiment of the present invention.
0.5(NaxK1-x)0.TiO3(X: 0.1
~ 0.5) Piezoelectric and dielectric properties of the piezoelectric ceramic composition
Characteristics (electromechanical coupling coefficient k33, Kp, Kt, Mechanical goods
Quality factor Qm, Relative permittivity ε33 t/ Ε0).
【0017】[0017]
【表1】 [Table 1]
【0018】表1に示すように、xが0.21〜0.30
の範囲で比誘電率、電気機械結合係数が極大値を取るこ
とが確認できた。その値は、ktで42.3%、ε33
t/ε0で1033と、(Bi0.5Na0.5)Ti
O3 (kt=41.8%、ε33 t/ε0=82)に
比較して、比誘電率で大きな値が得られた。上記の範囲
外では、電気機械結合係数が小さく、実用には不向きと
考えられる。As shown in Table 1, x ranges from 0.21 to 0.30.
It was confirmed that the relative permittivity and the electromechanical coupling coefficient had the maximum values in the range of. Its value is 42.3% in the k t, ε 33
1033 at t / ε 0 and (Bi 0.5 Na 0.5 ) Ti
O 3 (k t = 41.8% , ε 33 t / ε 0 = 82) as compared to, a large value relative dielectric constant was obtained. Outside the above range, the electromechanical coupling coefficient is small and is considered unsuitable for practical use.
【0019】また、X線回折で調査した結果、範囲で菱
面体−正方晶間の結晶構造的な相境界が存在することが
確認された。これは、PZT系磁器で構造的相境界で圧
電特性が極大値を取るのと類似している。Further, as a result of investigation by X-ray diffraction, it was confirmed that a crystal structure phase boundary between rhombohedral and tetragonal crystals was present in the range. This is similar to the PZT-based porcelain having a maximum piezoelectric property at a structural phase boundary.
【0020】(第2の実施の形態)次に、本発明の第2
の実施の形態について説明する。主成分原料として、化
学的に高純度であるBi2O3、Na2CO3、TiO
2、K2CO3を用い、添加物として高純度であるFe
2O3、Cr2O3、MnO2、NiO、Co2O 3、
La2O3、BaCO3、Sb2O3、Nb2O5を用
いた。試料の作製方法及び測定方法は、第1の実施の形
態と同様に行った。(Second Embodiment) Next, a second embodiment of the present invention will be described.
An embodiment will be described. As a main ingredient material
Bi with high purity2O3, Na2CO3, TiO
2, K2CO3And high-purity Fe as an additive
2O3, Cr2O3, MnO2, NiO, Co2O 3,
La2O3, BaCO3, Sb2O3, Nb2O5For
Was. The sample preparation method and the measurement method are the same as those in the first embodiment.
Performed in the same manner.
【0021】表2は、[Bi0.5(Na0.79K
0.21)0.5]TiO3にFe2O3、Cr
2O3,NiO,MnO2,Co2O3を1〜3wt%
それぞれ添加した時の圧電及び誘電特性(電気機械結合
係数k33、kp、kt、機械的品質係数Qm、比誘電
率ε33 t/ε0)を示す。Table 2 shows that [Bi 0.5 (Na 0.79 K
0.21 ) 0.5 ] Fe 2 O 3 , Cr on TiO 3
2 to 3 wt% of 2 O 3 , NiO, MnO 2 , Co 2 O 3
Piezoelectric and dielectric characteristics when each added shown (electromechanical coupling coefficient k 33, k p, k t , the mechanical quality factor Q m, the dielectric constant ε 33 t / ε 0) and.
【0022】[0022]
【表2】 [Table 2]
【0023】表2に示すように、各添加物とも、2wt
%添加までは機械的品質係数Qmが飛躍的に向上した。
また、電気機械結合係数も、添加しない場合と比較し
て、同等の値が得られた。As shown in Table 2, each additive was 2 wt.
Up to the% addition, the mechanical quality factor Qm was dramatically improved.
In addition, an electromechanical coupling coefficient was equivalent to that in the case without addition.
【0024】しかし、それ以上添加すると、電気機械結
合係数の低下が見られた。よって、Fe2O3、Cr2
O3、NiO、MnO2、Co2O3を、それぞれ2w
t%添加することにより、機械的品質係数Qmを向上さ
せることができ、フィルター、振動子等の用途に適用可
能な特性が得られる。However, when added more, a decrease in the electromechanical coupling coefficient was observed. Therefore, Fe 2 O 3 , Cr 2
O 3 , NiO, MnO 2 , and Co 2 O 3 are each 2w
By adding t%, the mechanical quality factor Qm can be improved, and characteristics applicable to uses such as a filter and a vibrator can be obtained.
【0025】表3は、[Bi0.5(Na0.75K
0.25)0.5]TiO3に、La 2O3、BaCO
3、Sb2O3、Nb2O5を1〜3wt%それぞれ添
加した時の圧電及び誘電特性(電気機械結合係数
k33、kp、kt、機械的品質係数Qm、比誘電率ε
33 t/ε0)を示す。Table 3 shows [Bi0.5(Na0.75K
0.25)0.5TiO3And La 2O3, BaCO
3, Sb2O3, Nb2O51 to 3 wt% each
Piezoelectric and dielectric properties (electromechanical coupling coefficient
k33, Kp, Kt, Mechanical quality factor Qm, Relative permittivity ε
33 t/ Ε0).
【0026】[0026]
【表3】 [Table 3]
【0027】表3に示すように、各添加物とも、2wt
%添加までは、電気機械結合係数及び比誘電率ε33 t
/ε0の飛躍的向上が確認できた。しかし、それ以上添
加すると、電気機械結合係数の著しい低下が見られ、実
用には適さない。よって、La2O3、BaCO3、S
b2O3、Nb2O5を、それぞれ2wt%まで添加す
ることにより、高誘電率、高電気機械結合係数が望まれ
るアクチュエーター等の用途に適用可能な特性が得られ
る。As shown in Table 3, each additive was 2 wt.
%, The electromechanical coupling coefficient and the relative permittivity ε 33 t
/ Ε 0 was confirmed to be dramatically improved. However, if it is added more, a remarkable decrease in the electromechanical coupling coefficient is observed, which is not suitable for practical use. Therefore, La 2 O 3 , BaCO 3 , S
By adding each of b 2 O 3 and Nb 2 O 5 up to 2 wt%, characteristics applicable to applications such as actuators where a high dielectric constant and a high electromechanical coupling coefficient are desired are obtained.
【0028】[0028]
【発明の効果】以上、説明したごとく、本発明によれ
ば、環境対策として、鉛を含有しない材料で、大きな圧
電特性を有する圧電体材料が得られる。更に、高い機械
的品質係数Qmが望まれるフィルター、振動子、もしく
は高い誘電率が望まれるアクチュエーター等の用途への
適用を可能にする効果が期待できるものである。As described above, according to the present invention, as an environmental measure, a lead-free piezoelectric material having large piezoelectric characteristics can be obtained. Further, an effect that can be applied to a filter, a vibrator, or an actuator, for which a high dielectric constant is desired, where a high mechanical quality factor Qm is desired can be expected.
Claims (2)
0.5] TiO3で表わされ、モル比xが0.20<x
≦0.30の範囲であることを特徴とする圧電体磁器組
成物。[Claim 1] The general formula [Bi 0.5 (Na 1-x K x )]
0.5 ] TiO 3 and the molar ratio x is 0.20 <x
A piezoelectric ceramic composition characterized by being in the range of ≦ 0.30.
て、Fe2O3、Cr 2O3、MnO2、NiO、Co
2O3、La2O3、BaCO3、Sb2O3、Nb2
O5のうち、少なくとも一つを2wt%以下含むことを
特徴とする請求項1記載の圧電体磁器組成物。2. The method according to claim 1, wherein the piezoelectric ceramic composition is an additive.
And Fe2O3, Cr 2O3, MnO2, NiO, Co
2O3, La2O3, BaCO3, Sb2O3, Nb2
O5That at least one of them contains 2 wt% or less.
The piezoelectric ceramic composition according to claim 1, wherein:
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002326869A (en) * | 2001-04-27 | 2002-11-12 | Tdk Corp | Piezoelectric ceramic |
JP2005082422A (en) * | 2003-09-05 | 2005-03-31 | Tdk Corp | Piezoelectric ceramic |
CN1298672C (en) * | 2005-07-19 | 2007-02-07 | 清华大学 | Bismuth-sodium titanate-bismuth potassium titanate barium zirconate titanate lead free piezoelectric ceramics |
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1999
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JP2002326869A (en) * | 2001-04-27 | 2002-11-12 | Tdk Corp | Piezoelectric ceramic |
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CN100357221C (en) * | 2005-02-01 | 2007-12-26 | 四川大学 | Bi.Na.Ag Ba titanate series lead-free piezoelectric ceramics |
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JP2012072027A (en) * | 2010-09-29 | 2012-04-12 | Taiheiyo Cement Corp | Piezoelectric ceramic and piezoelectric element |
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CN114242454A (en) * | 2021-11-09 | 2022-03-25 | 北京工业大学 | Sodium bismuth titanate-based quaternary high-temperature stable high-dielectric lead-free ceramic capacitor dielectric material and preparation |
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