JP2000135583A - Laser light collector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily perform monitoring with visible radiation. SOLUTION: A YAG laser light 2 (wavelength of 1.06 μm) generated at a Nd: YAG laser oscillator 1 is totally reflected in a rectangle direction by a lens 6, an optical fiber 7, and a 45 degree total reflection mirror 51. The laser light totally reflected by the total reflection mirror 51 is condensed at a light condensing lens 11 for processing, passed through a protecting window 12, and radiated to a workpiece 10. A ring-shaped white light source 30 irradiates the surface and the like of the workpiece 10 with a white light 30a via the total reflection mirror 51, the light condensing lens 11 and the like, and the image is picked up by a CCD camera 22 using the reflection lights. Coating on both sides of the light condensing lens 11, and the coating on the surface and the back face of the total reflection mirror, are designed to transmit visible radiation for monitoring at a good condition. Also, the coating on the surface of the total reflection mirror is designed to have a reflection rate of some extent against the enfolding guide light.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser beam collector, and more particularly, to a laser beam collector applied to a laser beam focusing section of a laser beam machine.

[0002]

2. Description of the Related Art Among laser devices used in general industries, a carbon dioxide gas laser and a YA which are known to generate high output are known.
The G laser is a typical laser device used for cutting or welding metal. In particular, a YAG laser that generates a high output has an oscillation wavelength of near-infrared 1.
It has a high transmittance for glass parts such as transparent quartz, and is widely used in laser processing machines.

That is, a laser device having an oscillation wavelength in this wavelength range can use an optical fiber cable made of quartz or a condensing optical component made of quartz (such as a lens) for guiding or condensing laser light. In addition, there is an advantage that light can be easily guided to a processing object and can be incorporated into a processing system in which the distance from a processing object having a three-dimensional shape or a laser oscillator to a processing point is long.

[0004] In order to thermally process an object to be processed by the guided laser beam, an energy density of a certain value or more is required to cause melting or the like of the object. Therefore, a laser light concentrator capable of efficiently condensing laser light and irradiating the object to be processed is required.

In order to collect YAG laser light (wavelength 1.06 μm), an optical component made of quartz is often used as described above. At this time, it is customary to use a coated material to improve the transmission efficiency at the interface between the optical component and air. The coating is selected to have a transmittance of at least 95% or more for a YAG laser light wavelength of 1.06 μm.

FIGS. 2 and 3 show a typical light guide system for laser processing using an Nd: YAG laser oscillator having an oscillation wavelength of 1.06 μm. FIG. 2 shows an example of a direct beam processing system,
d: The laser light 2 generated from the YAG laser
Processing object 1 using 5 degree total reflection mirror 3, condensing lens 4, etc.
It leads directly to zero. In this specification, the term “total reflection mirror” is used to mean “a mirror that substantially (at least 95% or more) reflects laser light having an oscillation wavelength used for processing”. This is in accordance with conventions in the art.

FIG. 3 shows an example of a fiber light guide processing system.
Laser light 2 generated from Nd: YAG laser oscillator 1
Is incident on a quartz optical fiber cable 7 by a 45 ° total reflection mirror 3, a condenser lens 6 (for fiber incidence) and the like, and the emitted laser light 8 is further guided to a processing object 10 by a condenser lens 9 and the like. It has become.

In any case, the laser beam is focused on the object 10 using a condenser lens, and the focal point is set near the surface of the object to perform thermal processing.

Next, FIG. 4 shows an example of the configuration of a main part of a conventional processing apparatus using the latter light guide system. Referring to FIG.
The YAG laser beam 2 (wavelength 1.06 μm) generated by the Nd: YAG laser oscillator 1 is
Through the optical fiber 7 made of quartz. The optical fiber 7 transmits the laser beam over a long distance and guides it to a condensing optical system for processing. When a direct beam processing system is used, spatial transmission is performed using a 45-degree total reflection mirror 3 (see FIG. 2) instead of a light guide system using a quartz optical fiber 7.

The laser beam 8 emitted from the emission surface 7b of the optical fiber 7 is totally reflected in a direction perpendicular to the 45 ° total reflection mirror 5 (a reflectance of 95% or more with respect to a wavelength of 1.06 μm).

The laser light totally reflected by the total reflection mirror 5 is condensed by a processing condenser lens 9 having an entrance surface 9a and an exit surface 9b, and is output from the tip of an irradiation nozzle. Reference numeral 10 represents an object to be processed. Reference numeral 12 denotes a protection window.

The path of the processing laser light has been described above. In order to visually recognize (use the naked eye or a camera) the incident position or the expected incident position of the processing laser light on the object to be processed, the processing laser light is coaxial with the processing laser light. The guide light for superimposition is irradiated as needed. For example, Nd: YAG
A He—Ne laser oscillator (not shown) built in the laser oscillator 1 is used. The guide light for superposition passes through the lens 6, the optical fiber 7, the total reflection mirror 5, and the condenser lens 9 and is output from the tip of the path irradiation nozzle coaxially with the optical axis of the processing laser light, and is appropriately applied on the processing object or the like. Form spots of various diameters.

On the other hand, an observation means is provided above the total reflection mirror 5. Here, a CCD camera 22, a white light source 23, and a polarizing filter 29 for laser light are provided. The white light source 23 emits light before, during, and
Alternatively, the surface or the like of the processing object 10 is illuminated with white light 23a via the total reflection mirror 5 and the converging lens 9 after the irradiation, and an image is taken by the CCD camera 22 using the reflected light. Note that the polarizing filter 29 is configured to detect the irregularly reflected light coming from the processing target 10 during processing by the CCD camera 2.
2 is a filter for protecting the filter 2.

The image captured by the CCD camera 22 is sent to the control device 31 and used for analyzing the observation result. For example, the image data is digitized in position information, contour shape, chromaticity, and the like via the graphic board 38, and the large-capacity memory 3
3 is compared with the reference data stored in No. 3 to determine whether the machining result is acceptable or not.

The control device 31 is additionally provided with a RAM 35
a, a ROM 35b, a CPU 36, etc., and have a normal configuration (hardware and software). The CRT 39 connected to the control device 31 is used for observation images, processed images, result display, and the like. The operation panel 37 connected via the I / O unit 32 is for various operations of the processing apparatus.

[0016]

However, when actually observing by the CCD camera 22 with the above configuration, an image which can be used practically cannot be obtained. That is, in the concentrator in the configuration of FIG. 4, the ratio of the white light 24 emitted from the white light source 23 to the inner processing object 10 is extremely low, and the ratio of the reflected light returning to the CCD camera 22. Will be even lower.

This is mainly due to the fact that light in the visible wavelength range is not transmitted well through the total reflection mirror 5 and the condenser lens 9. That is, the total reflection mirror 5 and the condensing lens (condensing optical component) 9 used in the conventional concentrator have not been given sufficient consideration for the transmittance in the visible wavelength region. Therefore, as shown in FIG. 4, the white light 24 is considerably attenuated through the total reflection mirror 5 on the outward path, and many components thereof are reflected by the incident surface 9 a of the condenser lens 9 and the like.

In the conventional condenser, both surfaces of the optical component 9 such as a condenser lens (the entrance surface 9a and the exit surface 9b) are provided with YAG.
Generally, an antireflection coating suitable for the wavelength of the laser beam 2 is provided. However, such a laser light anti-reflection coating is not suitable for visible light (Nami 400-70).
The transmittance at 0 nm) is usually low, generally only about 20% at most.

The visible light transmission of one light condensing optical component 9 has two interfaces of an entrance surface and an exit surface. For example, if the transmittance per interface is 20%, only four interfaces are required at two interfaces. %
(= 0.2 × 0.2) transmittance.

As an alternative means for observation, an external white light source 25 from around the light collecting unit 26
Illuminating 0 is also conceivable. However, the light collection unit 2
6) Mechanical interference around the periphery is likely to occur, and the physical dimensions are also increased. In addition, since the external white light source 25 is exposed to the laser processing surface, the surface is easily stained by sputtering or the like at the time of laser processing, and the number of maintenance steps is increased.

Further, when the object 10 illuminated by the external white light source 25 is observed by the CCD camera 22, the light reflected from the object 10 passes through the condenser lens 9 and the total reflection mirror 5 by one.
The times must be transmitted. Therefore, although a slight improvement can be expected, a bright image cannot be obtained.

As described above, according to the prior art, it is substantially impossible to observe the processing progress or the processing result with a CCD camera, particularly during or after processing. Therefore, C
Neither can the results of CD camera observation be used for real-time control of processing conditions, determination of optimum processing conditions, and the like.

Therefore, conventionally, when performing laser processing, the laser output, the output form, the irradiation time, the position of the focal point, and the like are determined in advance by trial and error for the same material as the object to be processed by the laser processing. In addition, various processing condition parameters, such as the focal length of the condensing lens, the type of the assist gas, and the ejection amount, must be obtained.

In this conventional method, machining is performed by following the same conditions with respect to the above-mentioned machining condition parameters determined in the past. Therefore, the success or failure of laser machining is determined until a series of laser thermal machining is completed. It was difficult to judge. In particular, when an unexpected situation occurs that exceeds the processing condition parameters determined in the past, laser processing cannot be controlled in real time within the same time.

An object of the present invention is to solve the above-mentioned problems of the prior art. That is, an object of the present invention is to make it possible to observe the surface state of an object to be processed by laser processing with visible light transmitted through a light-collecting optical component that sufficiently transmits visible light.

Further, thereby, the position of the laser processing object is corrected by itself, and even during a series of laser heat processing, automation or intelligence such as self-determination and correction correction by judging processing conditions such as laser output by itself. It is also intended to obtain a laser beam concentrator that can satisfy the prerequisites for realizing an integrated laser processing apparatus.

[0027]

SUMMARY OF THE INVENTION The present invention is applied to a laser beam condensing device for converging a laser beam and irradiating the object with a laser beam. The laser light condensing device according to the present invention is a condensing optical component having a coating on both sides for improving the transmittance in a wavelength range of laser light irradiated for processing and visible light for observation. And a total reflection mirror arranged at a position for guiding the laser light to the condensing optical component.

On the surface of this total reflection mirror, a coating is applied to reflect the laser light and the guide light for superimposition incident on the surface and to improve the transmission of visible light for observation. The back surface of the total reflection mirror is provided with a coating for improving transmission of visible light for observation incident on the back surface. This makes it possible to observe the area around the laser light irradiation area with visible light through the condensing optical component and the total reflection mirror.

According to a preferred embodiment, the coating applied to both sides of the condensing optical component has a transmittance of 95% or more to a laser beam irradiated for processing, and has a wavelength of 400%. 6 for visible light in the range of
It has a transmittance of 0% or more.

Further, the coating applied to the surface of the total reflection mirror is 95% to the laser beam irradiated for processing.
% And at least 20% with respect to the superposing guide light, and has a wavelength of 400 to 60.
It has a transmittance% of 60% or more for visible light in the range of 0 nm, and the coating applied to the back surface of the total reflection mirror has a transmittance of 6% for visible light in the wavelength range of 400 to 700 nm.
Preferably, it has a transmittance of 0% or more.

For observation, for example, a light source and a camera, which are provided behind the total reflection mirror and emit visible light for observation, are provided, and the surface of the object to be processed is illuminated via the total reflection mirror and the condensing optical parts. It can be executed in the form of shooting.

In the present invention, an optical component (optical part) provided with an antireflection coating for transmitting visible light for observing the surface state of the object subjected to laser thermal processing is used. Therefore, by illuminating the object to be processed with the white light source inside the light collecting unit, it is possible to capture the position information of the object to be processed and image data of the laser processing result, for example, by providing a CCD camera in the light collecting unit. Become.

The use of the image data makes it possible to perform automation such as judging whether the machining state is acceptable or not in accordance with, for example, acceptance / rejection software taught by the control device.

It is also possible to execute correction for a position shift during laser processing and a defect during laser processing. Accordingly, it is easy to always perform uniform laser processing, and it is possible to stabilize the laser processing and to whiten the judgment of the laser processing that has conventionally relied on the experience of a skilled person. In addition, it becomes easy for the operator to execute the repair work for the defect at the time of laser processing while viewing the image such as the CRT screen.

[0035]

FIG. 1 is a diagram schematically showing an embodiment in which the present invention is applied to a light collector of a processing apparatus using an optical fiber light guide system. Referring to the figure, Nd: YAG
YAG laser light 2 (wavelength 1.
06 μm) is incident on a quartz optical fiber 7 via a fiber incident lens 6. The optical fiber 7 transmits the laser beam over a long distance and guides it to a condensing optical system for processing.

The laser light 8 emitted from the emission surface 7b of the optical fiber 7 is totally reflected in a direction perpendicular to the 45 ° total reflection mirror 51 (a reflectance of 95% or more with respect to a wavelength of 1.06 μm). The laser light totally reflected by the total reflection mirror 51 is condensed by the condensing lens 11 (one or more) for processing, and is output from the tip of the irradiation nozzle. Reference numeral 10 represents an object to be processed. Reference numeral 12 denotes a protection window. As described above, the path of the processing laser light is not basically different from the conventional one (FIG. 4).

In order to visually recognize (use the naked eye or a camera) an incident position or an expected incident position of the processing laser light on the object to be processed, a guide light for superimposition is irradiated as necessary coaxially with the processing laser light. . As a light source of the superimposition guide light, for example, a He— built in the Nd: YAG laser oscillator 1 is provided.
A Ne laser oscillator (not shown) is used. The guide light for superposition passes through the lens 6, the optical fiber 7, the total reflection mirror 51, the condenser lens 11, and the protective window 12, and is output from the tip of the path irradiation nozzle coaxially with the optical axis of the processing laser light.
A spot having an appropriate diameter is formed on an object to be processed or the like.

On the other hand, a means for observation is provided behind (above) the total reflection mirror 51. Here, the CCD camera 2
2. A white light source 30 and a polarizing filter 29 are provided. The ring-shaped white light source 30 is used for processing the workpiece 1 via the total reflection mirror 51, the converging lens 11, and the protective window 12 before, during, or after the irradiation of the processing laser light.
The surface 0 is illuminated with white light 30a, and the reflected light is used to capture an image with the CCD camera 22. The white light ring light 30 is, for example, 20
The light is guided by an optical fiber from a white light source having a power consumption of about 0 W, and is arranged about 60 around the CCD camera 22.

The polarizing filter 29 is a filter for protecting the CCD camera 22 from irregularly reflected light coming from the processing object 10 during processing. The CCD camera 22 includes an objective lens 27 and a focus correction mechanism 28.

The image captured by the CCD camera 22 is sent to the control device 31 and used for analyzing the observation result. For example, the image data is digitized in position information, contour shape, chromaticity, and the like via the graphic board 38, and the large-capacity memory 3
3 is compared with the reference data stored in No. 3 to determine whether the machining result is acceptable or not.

The control device 31 also includes a RAM 35a, an RO
It has a normal configuration (hardware and software) equipped with M35b, CPU 36, and the like. The CRT 39 connected to the control device 31 is used for observation images, processed images, result display, and the like. The operation panel 37 connected via the I / O unit 32 is for various operations of the processing apparatus.

In the conventional configuration shown in FIG. 4, the white light 23a suffers a large reflection loss on the outward path to the processing object 10 and the return path from the white light 23a to the CCD camera 22, so that good observation is impossible. However, such a situation is avoided in the present embodiment. This is because the total reflection mirror 51 and the condenser lens 11 are devised to enhance the transmittance of visible light. Specifically, the following coatings are applied to these optical components.

(1) Condensing lens 1 as a condensing optical component
The coating applied to both surfaces has a transmittance of 95% or more with respect to a laser beam irradiated for processing (at the time of vertical incidence) and a visible light with a wavelength of 400 to 600 nm. 60% or more transmittance (reflectance 40% or less:
(At normal incidence).

(2) The coating applied to the surface of the total reflection mirror (front surface; the surface facing downward right in the figure) has a reflectance (not less than 95%) of the laser beam irradiated for processing. 45
At oblique incidence), a reflectance of 20% or more with respect to the superposing guide light, and a wavelength of 400 to 60.
60% or more transmittance (4%) for visible light in the range of 0 nm.
5 ° oblique incidence).

The wavelength of the superposing guide light (visible light) is typically 633 nm. The wavelength of 633 nm is a wavelength of a He-Ne laser generally used as a superposing laser (red guide light). As described above, the He-Ne laser is arranged on the same optical axis as the YAG laser light, which is invisible light (not shown).

(3) The coating applied to the back surface of the total reflection mirror (surface facing upward and left in the figure) has a wavelength of 400 to 700 n.
It has a transmittance of 60% or more for visible light in the range of m.

Techniques for obtaining a coating having these spectral transmission / reflection characteristics are well known and are not the subject of the present invention, so that detailed description will be omitted. These coatings are composed of, for example, a dielectric multilayer film, and coatings (filters) having various spectral transmission / reflection characteristics can be realized by a combination of the number of layers, the refractive index of each layer, and the layer thickness.

The accuracy of the image of the surface of the processing object captured by the CCD camera 22 depends on the number of the condensing lenses 11 or the reflectance in the visible light wavelength range (wavelength 400 to 700 nm).

For example, when the transmittance of visible light in the wave area is 60% or less, a total of five condensing optical systems including four condensing lenses 11 and one protective window 12 is a practical limit, If the number of images exceeds this, it is difficult to obtain clear images.

As an object (work) to be processed by the condensed laser light, iron, copper, aluminum or the like is often used in the general industry, but any material can be used as long as it can absorb laser light to some extent.

As one specific embodiment, welding of an aluminum material was performed using a pulse laser having a high peak output. The emitted laser has a diameter of 4 on the aluminum surface of the work.
A processing mark of 00 to 600 μm is left.

Therefore, the size of the processing marks was monitored by the control device 31 on the image of the CCD camera 22 and the following automation was performed.

If the processing trace is small (or large) for some reason and the monitored laser output energy is smaller (or larger) than normal,
When the determination is made in step 1, the control device 31 outputs a feedback command to increase (or decrease) the laser output by several% for the next laser emission condition.

Normally, this feedback is performed by current control of an excitation source (excitation lamp or semiconductor laser for excitation) of a laser oscillator.

Further, there is no change in the monitored laser beam output energy, the focal length between the condenser lens 11 and the workpiece 10 changes, and the size of the processing mark also changes. If it is determined that the light collection unit has been changed, the height and the position of the light collecting unit are changed.

Further, when it is determined that laser processing has not been performed on a predetermined position of the object to be processed and that laser processing has been performed on a position beyond an allowable range, the condensing unit is processed in the same manner as described above. The position of the tab 26 itself was corrected.

The above-mentioned feedback is determined and executed by comparing with the reference data in the memory 33 via the graphic board 38 included in the control device 31. Instead of this control device, the operator can display the screen of the CRT 39. Each feedback may be performed after confirming the image data and determining an abnormality.

In laser processing for emitting 300 shot pulses per work, about 100 shots before introducing this system.
Although one welding defect having a frequency of occurrence was found in the work after the laser processing, the frequency of welding defects found after the laser processing was reduced to about 1 in 10 ^{3 according} to the results of the above embodiment.

[0059]

As described above, according to the present invention, in a laser concentrator, a high transmittance coating is applied to a visible light wave area for observing a surface state of an object subjected to laser thermal processing. By using the condensing lens (optical component) thus obtained, observation with an observation device becomes easy.

In addition, thereby, for example, automation or correction such as correcting the position of the laser processing object by itself and determining and correcting the processing conditions such as laser output by itself even during a series of laser thermal processing. It is now possible to satisfy the prerequisites for realizing an intelligent laser processing device.

[Brief description of the drawings]

FIG. 1 is a diagram schematically illustrating an embodiment in which the present invention is applied to a light collector of a processing apparatus using an optical fiber light guide system.

FIG. 2 is a diagram showing a conventional example of a direct beam processing system using an Nd: YAG laser oscillator having an oscillation wavelength of 1.06 μm.

FIG. 3 is a diagram showing a conventional example of a straight fiber light guide processing system using an Nd: YAG laser oscillator having an oscillation wavelength of 1.06 μm.

FIG. 4 is a diagram schematically illustrating a conventional configuration example of a processing apparatus using an optical fiber light guide system.

[Explanation of symbols]

 Reference Signs List 1 Nd: YAG laser oscillator 2 YAG laser light 3 45-degree total reflection mirror (for direct beam light) 5, 51 45-degree total reflection mirror (for optical fiber emission light) 6 Condensing lens (for fiber incidence) 7 Quartz light Fiber cable 7a Optical fiber incident surface 7b Optical fiber emitting surface 8 Optical fiber emitting laser beam 9 Condensing lens (for processing: difficult to transmit in visible light wavelength range) 9a Condensing lens incident surface 9b Condensing lens emitting surface 10 Processing object 11 Condensing lens (for processing; transmission of visible light wavelength range) 12 Protective window (transmission of visible light wavelength range) 22 CCD camera 23 White light source 23a White light 24 White reflected light 25 External white light source 26 Condensing unit 27 CCD camera Objective lens 28 Focus correction mechanism 29 Laser light filter (polarization filter) 30 White light source ring light 31 Laser control device 3 2 I / O unit 33 Large-capacity memory 34 CPU 35a RAM 35b ROM 36 CPU 37 Operation panel 38 Graphic board 39 CRT

[Procedure amendment]

[Submission date] November 29, 1999 (1999.11.
29)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Claims

[Correction method] Change

[Correction contents]

[Claims]

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0009

[Correction method] Change

[Correction contents]

Next, FIG. 4 shows an example of the configuration of a main part of a conventional processing apparatus using the latter light guide system. Referring to FIG.
The YAG laser beam 2 (wavelength 1.06 μm) generated by the Nd: YAG laser oscillator 1 is
Through the optical fiber 7 made of quartz. The optical fiber 7 transmits the laser beam over a long distance and guides it to a condensing optical system for processing. When a direct beam processing system is used, a 45 ° total reflection mirror 3 is used instead of the light guide system using the quartz optical fiber 7.
(See FIG. 2).

[Procedure amendment 3]

[Document name to be amended] Statement

[Correction target item name] 0038

[Correction method] Change

[Correction contents]

On the other hand, a means for observation is provided behind (above) the total reflection mirror 51. Here, the CCD camera 2
2. A white light source 30 and a polarizing filter 29 are provided. The ring-shaped white light source 30 is used for processing the workpiece 1 via the total reflection mirror 51, the converging lens 11, and the protective window 12 before, during, or after the irradiation of the processing laser light.
The surface 0 is illuminated with white light 30a, and the reflected light is used to capture an image with the CCD camera 22. The white light ring light 30 is, for example, 20
The light is guided by an optical fiber from a white light source having a power consumption of about 0 W, and about 60 CCD cameras 22 are arranged around the CCD camera 22.

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Hisadachu Machida 3580 Kobaba, Oshino-son, Oshino-mura, Minamitsuru-gun, Yamanashi F-Fac Co., Ltd. F-term (reference) 2H042 DA08 DB02 DE07 4E068 CA17 CB08 CC02 CD12 CD15

Claims (4)

[Claims] 1. A laser light condensing device for condensing a laser beam and irradiating the object to be processed with a laser beam condensing device for improving the transmittance in a wavelength range of a laser beam irradiated for processing and a visible light for observation. A light-collecting optical component having a coating on both surfaces thereof, and a total reflection mirror disposed at a position for guiding laser light to the light-collecting optical component. While a coating is applied to reflect the laser light and the guide light for superimposition incident on the front surface and to improve the transmission of visible light for observation, the rear surface of the total reflection mirror impinges on the rear surface. A coating is applied to improve transmission of visible light for observation, thereby enabling observation around the laser light irradiation area by visible light through the condensing optical component and the total reflection mirror. Laser light concentrator. 2. A coating applied to both surfaces of the condensing optical component has a transmittance of 95% or more with respect to a laser beam irradiated for processing, and has a wavelength of 400 to 60.
The laser beam concentrator according to claim 1, which has a transmittance of 60% or more for visible light in a range of 0 nm. 3. The coating applied to the surface of the total reflection mirror has a thickness of 95% with respect to a laser beam irradiated for processing.
% And at least 20% with respect to the superposing guide light, and has a wavelength of 400 to 60.
It has a transmittance% of 60% or more for visible light in the range of 0 nm, and the coating applied to the back surface of the total reflection mirror has a wavelength of 4%.
The laser beam concentrator according to claim 1, wherein the laser beam concentrator has a transmittance of 60% or more for visible light in a range of 00 to 700 nm. 4. A light source behind the total reflection mirror for illuminating the surface of the object with visible light for observation via the total reflection mirror and the condensing optical component; 4. The camera according to claim 1, further comprising a camera for photographing the surface of the processing object illuminated with visible light through the condensing optical component and the total reflection mirror. The described laser light collector.