JP2000117670A - Robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a robot which does not contaminate a work within a cleaned environment inside a clean room or the like, is easily operated, and is compact in size. SOLUTION: This robot 10 is provided with a vertically telescopic driving shaft 11, and a working shaft unit 20 provided on a top portion of the driving shaft 11 and having a rotatable base 21. In this case, the driving shaft 11 is composed of the required number of hollow shaft dividing elements 12a, 12b, 12c, and the shaft dividing elements 12a, 12b, 12c are allowed to entirely extend between an extending state where a tip end successively extends in a direction of the driving shaft 11 from a base end and a contracting state where the tip end approaches the base end overlapping in the direction of the driving shaft 11, by a main elevating means and a secondary elevating means 40 built therein so as not to be exposed at the time of operating.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a robot that can expand and contract vertically. More specifically, the present invention relates to a robot suitable for work in a clean room.

[0002]

2. Description of the Related Art Conventionally, even in a manufacturing facility installed in a clean room such as a semiconductor wafer manufacturing facility, when a large vertical movement stroke is required, a cylindrical coordinate type robot as shown in FIGS. A is used to handle a workpiece w such as a semiconductor wafer.

In this cylindrical coordinate type robot a, as shown in FIG. 23, in order to carry out rotation and conveyance in a θ direction around the Z axis in a horizontal plane, a columnar Z axis is formed from the surface d of the rotating member c of the base unit b. A member e is erected upward, and a horizontal member f having a wafer handling unit g is mounted on the Z-axis member e.
Is mounted to be able to move up and down. The wafer handling unit g is mounted so as to be able to reciprocate in the X-axis direction in the figure. The horizontal member f can move up and down between the lower end position shown in FIG. 23 and the upper end position shown in FIG. 24 by having the Z-axis member e and the horizontal member f. Can rotate in the θ direction around the Z axis as shown in FIG. 23, so that the wafer handling unit g can transport a work w such as a semiconductor wafer to a predetermined position.

In the above equipment, a general articulated robot h as an industrial robot is used as shown in FIGS. 25 and 26, instead of the cylindrical coordinate robot a shown in FIGS. Sometimes it is done. In this articulated robot h, a wafer handling unit k is mounted on a distal end of an arm j whose base end is mounted on a rotatable base unit i. The arm j has a plurality of joints m ₁ ,
m _2, m is capable ₃ has bent, for wafer handling unit k, and a raised position shown in FIG. 25, it is possible to displacement in the Z axis direction between the lowered position shown in FIG. 26. With this configuration of the articulated robot h, as shown in FIG. 26, the wafer handling unit k can move in the X-axis direction in the horizontal plane, and the arm j moves in the θ direction around the Z-axis. Can be displaced.

However, as shown in FIG. 26, an articulated robot h as shown in FIGS. 25 and 26, when bending the arm j at a large angle to reduce the length in the Z-axis direction, If you try to reduce the height of the handling unit k, the greater the amount of projection of the horizontal direction X such as rheumatoid m _2, tends to interfere with peripheral. Therefore, it is difficult to reduce the size of the apparatus using the articulated robot h.

However, in a clean room or a clean booth where a very high level of cleanliness is required, the air purification equipment requires a considerable cost. It is preferable to make the footprint (scaffold area) as small as possible. As a result, the devices are arranged vertically. For this reason, the robot used for the equipment also requires more work in the Z-axis direction. Therefore, there is little interference with the surroundings,
23 and FIG. 2
A cylindrical coordinate robot a as shown in FIG. 4 will be used.

However, in the cylindrical coordinate type robot a as shown in FIGS. 23 and 24, as shown in a plan view in FIG. 27, a space is provided beside the space of the wafer handling unit g for transferring the work w in the X-axis direction. Since the space for the Z-axis member is required, the interference area n is expanded. This interference range n is
Although it is smaller than the interference area of the articulated robot h shown in FIGS. 25 and 26, it further hinders further compactness of the apparatus using the cylindrical coordinate robot a.

Further, when handling a plate-shaped work w such as a semiconductor wafer or a glass electrode for a liquid crystal in a horizontal posture, dust is generated from an upper part of a Z-axis member e located above the work w,
Dust due to this may fall on the surface of the work w and contaminate it. For this reason, it may be difficult to maintain the cleanness required for the work w.

Further, since the Z-axis member e has a length greater than the Z-axis displacement stroke of the wafer handling unit g of the horizontal member f, installation and maintenance are difficult.
In particular, when carrying in and out of the clean room, it must be handled in a long state, which deteriorates workability. In addition, even when transported from a manufacturing plant to a place of use, if it is left for a long time, it is not only susceptible to damage, but also the space efficiency during transport is poor.

The semiconductor wafer handling apparatus also employs a horizontal multi-stage stroke type slide mechanism. For example, JP-A-58-84435 and JP-A-6-84435
Japanese Patent Application Laid-Open Nos. 2-2970085 and 9-36200 disclose prior art of a wafer handling apparatus using a multi-stage slide mechanism.

However, in these prior art configurations, it is difficult to change the drive shaft from the horizontal direction to the vertical direction, and further to any direction. In addition, since one long belt is connected to form a driving belt, and a spring is provided at the end, not only is it difficult to increase rigidity, but also the position of each step is determined by the engagement between the belt and the roller. Or it is determined by friction. further,
Since the holding force of each stage is determined by friction, using a highly rigid belt such as a stainless steel belt or a stainless steel wire reduces the frictional force with the roller, making it impossible to keep the holding force of each stage high. There are also problems. Therefore, the configuration proposed in each of the above publications cannot be directly applied to the cylindrical coordinate robot a.

[0012]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems in the prior art, and is intended to provide an easy-to-handle and compact robot which does not contaminate a work in a clean environment such as a clean room. It is intended to provide.

[0013]

According to the present invention, there is provided a robot having a drive shaft which can be vertically extended and contracted,
The drive shaft is composed of a required number of hollow shaft divided bodies, and the shaft divided body is continuously connected in the drive shaft direction and extends in the distal end with respect to the base end. It is characterized in that it is entirely expandable and contractable with a contracted state approaching the base end, and that the expansion and contraction means for expanding and contracting the drive shaft is built in without being exposed in the same drive shaft.

A preferred embodiment of the robot according to the present invention is a robot having a drive shaft which is vertically expandable and contractible, and a work shaft unit having a rotatable base provided on a top portion of the drive shaft. The drive shaft is composed of a required number of hollow shaft divided bodies, and the shaft divided bodies are continuously connected in the drive shaft direction and extend in the distal end with respect to the base end. It is characterized in that it is entirely expandable and contractible with a contracted state approaching the end, and that the expansion and contraction means for expanding and contracting the drive shaft is built in without being exposed inside the drive shaft.

In the robot according to the present invention, the size of the shaft segment may be reduced from the base end to the tip, or the size of the shaft segment may increase from the base end to the tip. It may be made to become.

In the robot according to the present invention, an exhaust means is provided at a lower end portion of the drive shaft, or an exhaust duct is connected to a lower end portion of the drive shaft, so that the inside of the drive shaft is formed. Preferably, the pressure is negative.

Further, in the robot according to the present invention, the expansion / contraction means includes a main elevating means for elevating and lowering a second axis divided body located above a first axis divided body located at a base end; Subsequent elevating means for elevating and lowering the remaining axis split body following up and down movement of the two-axis split body is provided.

In this case, it is preferable that the cross section of the drive shaft is rectangular, and that the main elevating means and the sub-elevating means are arranged in the longitudinal direction.

Further, in the robot according to the present invention, for example, the main lifting / lowering means includes a ball screw portion and a ball screw driving portion for driving the ball screw portion. A driving member comprising a flexible band-shaped or linear member, and a rotating member, wherein the rotating member is rotatably mounted on an intermediate shaft divided body, and a lower end of the driving member is a lower shaft divided body. The intermediate part is folded back by the rotating member, and the upper end is attached to the upper shaft divided body.

In this case, it is preferable that a plurality of drive members made of the belt-like or linear members are provided, and the plurality of drive members are hung in parallel on the rotating member.

In addition, in the robot of the present invention, it is preferable that the shaft divided body is provided with a detachable portion for inspection and maintenance of the main elevating means, the sub-elevating means and the like. It is also preferable that a guide mechanism for guiding the lifting by the lifting / lowering means and the secondary lifting / lowering means be provided. When the drive shaft has a rectangular shape, it is preferable that a guide mechanism for guiding the elevation by the main elevating means and the subordinate elevating means is provided in the width direction.

[0022]

In the robot of the present invention, since the expansion and contraction means for expanding and contracting the shaft divided body is built in without being exposed in the shaft divided body, dust generated by the expansion and contraction of the shaft divided body is scattered in the clean room. Is prevented.

In addition, since transportation and installation can be performed in a state where the drive shaft is contracted, space efficiency is improved during transportation and complexity during installation is eliminated.

In a preferred embodiment of the robot according to the present invention, since the working shaft unit is rotatably disposed on the top of the drive shaft, the bottom of the first shaft divided body located substantially at the base end of the robot scaffolding area. The area can be reduced, and the equipment can be made more compact, and the operation of the drive shaft does not cause contamination of a work such as a semiconductor wafer.

[0025]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described based on embodiments with reference to the accompanying drawings, but the present invention is not limited to only such embodiments.

Embodiment 1 A telescopic robot (hereinafter simply referred to as a robot) 10 suitable for use in a clean room or the like according to Embodiment 1 of the present invention is schematically shown in FIG. Each is shown in the figure. This robot 10 is shown in FIGS.
As shown in the figure, the drive shaft 11 is composed of a three-stage hollow frame (shaft divided body) 12, that is, a first frame 12a, a second frame 12b, and a third frame 12c, and the first frame 12a to the third frame 12c. Has a telescopic type structure that can be extended and retracted as a whole in a manner similar to a barrel of a telescope, and a work shaft unit 20 is mounted on the top of the third frame 12c. The expansion and contraction of the robot 10 according to the first embodiment is based on the first frame 12a on the base end side having the largest cross-section, and the second frame 12b and the third frame 12c whose cross-sections are sequentially reduced become along the Z-axis. To expand and contract in parallel vertical directions,
That is, a telescopic operation is performed.

A ball screw shaft 32 having a gear 33 at the lower end of a ball screw portion 31 serving as the main lifting / lowering means 30 is mounted inside the side surface of the first frame 12a on the base end side. The gear 33 has a drive shaft 3 of a motor 37 of a ball screw drive unit 36 disposed on a side surface side of the ball screw shaft 32.
The side of the gear 39 attached to the tip of the gear 8 meshes. The ball screw shaft 32 is screwed to a nut member 34 of a ball screw portion 31 provided at a lower end of the second frame 12b provided inside the first frame 12a.
Thus, when the ball screw shaft 32 is rotationally driven by the motor 37, the rotational force is converted by the nut member 34 of the ball screw portion 31 into a vertical driving force in the Z-axis direction. That is, by rotating the motor 37, the second frame 12b can be moved up and down with respect to the first frame 12a.

The first frame (lower shaft divided body A) 1
At the lower end inside the surface opposite to the surface on which the ball screw shaft 32 of 2a is mounted, a flexible elevating belt 41,
For example, a lower end 41a of an elevating belt 41 made of a stainless steel strip having flexibility is fixed (see FIG. 4).
The upper end 41b of the elevating belt 41 corresponds to the surface of the first frame (lower shaft divided body A) 12a of the second frame (intermediate shaft divided body B) 12a to which the lower end 41a of the elevating belt 41 is fixed. A belt roller (rotating member) 42 provided at the upper inside of the surface to
c is folded back, and the second frame (intermediate portion shaft divided body B)
First frame (lower shaft divided body A) 1 of third frame (upper shaft divided body C) 12c disposed inside 12b
The lower end 41a of the lifting belt 41 of 2a is fixed to the outer lower end of the surface corresponding to the surface to which the lower end 41a is fixed. The belt roller 42 has a second frame (intermediate shaft divided body B) 12 at its upper end in a state where the lifting belt 41 is suspended.
The mounting position is adjusted so as not to protrude from the upper end of b (see FIG. 5).

With this configuration, when the ball screw shaft 32 is driven to rotate by the motor 37 and the second frame 12b moves up and down, the third frame 12c moves up and down accordingly. For example, when the second frame 12b rises, the second frame 12b is folded back by the belt roller 42 provided on the upper inside of the second frame 12b, and the third frame 1
The upper end 4 of the elevating belt 41 fixed to the lower end of 2c
1b is pulled up, thereby raising the third frame 12c (see FIG. 4). Conversely, when the second frame 12b descends, the upper end 41b of the elevating belt 41 descends,
As a result, the third frame 12c descends (see FIG. 6).

As described above, when the second frame 12b is raised and lowered by the main lifting / lowering means 30 by the cooperation of the lifting belt 41 and the belt roller 42, the third frame 12c
Also follows it. That is, the first embodiment
Lifting Belt 41 and Belt Roller 42
Functions as the sub-elevating means 40 with respect to the main elevating means 30. Further, as described above, the main elevating means 30 and the sub-elevating means 40 include the first frame 12 a to the third frame 12.
It is built in the device c without being exposed during operation. In addition, in the example shown in FIGS. 4 to 6, the number of the elevating belt 41 is one, but as shown in FIG.
It is preferable that the number is plural. This is because maintenance of the elevating belt 41 can be performed alternately, so that a jig for maintaining the position of the frame during maintenance of the elevating belt 41 becomes unnecessary.

The second frame 12b by the main lifting / lowering means 30
A pair of guide rails 45 are provided inside each surface of the first frame 12a adjacent to the surface on which the main lifting / lowering means 30 is provided, in parallel with the Z-axis. A guide bearing 46 slidably fitted to the guide rail 45 is provided at a lower end outside each surface corresponding to the surface of the two frames 12b (see FIG. 3). In addition, the third belt 41
In order to smoothly move the frame 12c up and down, a pair of guide rails 4 is provided inside each surface of the second frame 12c adjacent to the surface on which the belt roller 42 is provided.
5 is provided in parallel with the Z axis, and a guide bearing 46 slidably fitted to the guide rail 45 is provided at a lower end outside each surface corresponding to the surface of the third frame 12c. (See FIG. 3). That is, the guide mechanism 44 including the guide rail 45 and the guide bearing 46 is provided.

Second frame 12b and third frame 1
2c, the first frame 12a and the second frame 1
In order to prevent dust from escaping into the clean room from the gap between the second frame 12b and the second frame 12b and the third frame 12c, ceiling members 12d and 12d are provided at the upper ends of the first frame 12a and the second frame 12b, respectively. 12
e is attached with a predetermined clearance provided to the opposing side surface. When the robot 10 is installed in a narrow place, as shown in FIG. 8, the drive shaft 11 is formed in a rectangular shape, and the main elevating means 30 and the sub-elevating means 40 are arranged in the longitudinal direction. The guide mechanism 44 is provided in the width direction.

As shown in FIG. 1, the working shaft unit 20 has a disk-shaped unit base 21 mounted on the top of the third frame 12c, and is rotatably mounted on the unit base 21. Turntable 22 and an arm 2 attached to the turntable 22 at an appropriate position.
3 and a wafer handling unit 24 mounted on the upper end of the arm 23. As the rotation mechanism of the turntable 22, a conventionally known rotation mechanism can be appropriately used, and the wafer handling unit 24 is also the same as the conventionally known one. The arm 23 includes a first arm 25 whose base end is rotatably mounted at an appropriate position on the turntable 22 and a second arm 26 which is rotatably mounted on the upper end of the first arm 25. ing.

As described above, in the first embodiment, since the working shaft unit 20 is rotatably disposed on the top of the third frame 12c, the footprint area occupied by the robot 10 in the equipment is substantially equal to the first frame. 12a bottom area is good,
Equipment compactness is promoted. Further, since the main elevating means 30 and the sub-elevating means 40 for elevating and lowering the second frame 12b and the third frame 12c are built in the drive shaft 11 without being exposed even during the operation, these elevating means 30, There is no risk of the inside of the clean room being contaminated by dust generated by the operation of the 40. further,
Since the wafer handling unit 24 is located at the uppermost position, there is no possibility that the work W such as a wafer is contaminated by dust generated by the operation of the work axis unit 20. Moreover,
The gap between the first frame 12a and the second frame 12b and the gap between the second frame 12b and the third frame 12c are determined by the ceiling member 1 disposed at the upper end of the first frame 12a.
Since it is closed by the ceiling member 12e provided at the upper end of the 2d and the second frame 12b, it is not necessary to separately provide an extensible cover outside each frame 12, so that the structure is simplified and the robot 10 Is avoided. Furthermore, since there is no rotating mechanism for rotating the drive shaft 11 inside the first frame 12a,
The inside is close to a cavity, so that the downward flow of air in the first frame 12a to the third frame 12c during contraction is not hindered. That is, since the air in the drive shaft 11 is smoothly exhausted to the outside from the lower part of the first frame 12a, there is no possibility that the air is blown out from the clearance provided in the sliding portion of each frame 12. In addition, since transportation and installation can be performed by contracting the drive shaft 11, space efficiency during transportation is improved and installation work is not complicated, thereby reducing transportation costs and installation costs. .

In the first embodiment, the frame 1
Although the number of 2 is three, the number of frames 12 is not limited to three, and can be increased as appropriate according to the equipment specifications, and may be four, for example. In this case, as shown in FIG. 9, the mounting position of the lifting / lowering belt (second lifting / lowering belt) 41B for lifting / lowering the fourth frame 12g and the lifting / lowering belt (first lifting / lowering belt) 41A for lifting / lowering the third frame 12c. The lower end 41a of the second lifting / lowering belt 41B is fixed to the lower end of the second frame (lower shaft divided body A) 12b, and a belt roller 42 is provided.
Is attached to the upper end of the third frame (intermediate shaft divided body B) 12c, and the upper end 41b of the second elevating belt 41B is fixed to the lower end of the fourth frame (upper shaft divided body C) 12g. Similarly, the second frame 12b to the fourth frame 12g can be expanded and contracted. Similarly, it is possible to cope with the case where the number of frames 12 becomes 5 or more. Also in this case, the lifting belt 41 is
Are staggered. Also, as shown in FIG.
In order to ensure smooth expansion and contraction of the second to fourth frames 12b to 12g, a guide mechanism 44 including a guide rail 45 and a guide bearing 46 is provided.

When the number of frames 12 is increased, the tension acting on the first lifting belt 41A becomes maximum, and the tension acting on the second lifting belt 41B becomes second largest. Therefore, the elevating belt 41 needs to have a strength corresponding to the acting tension. This can be dealt with, for example, by stacking several belts having a predetermined strength or by using a belt having a high strength.

Second Embodiment A main part of a robot 10 according to a second embodiment of the present invention is schematically shown in FIG. 11, and the second embodiment is a modification of the first embodiment, and includes a second frame. The position of the belt roller 42 provided on the second frame 12b is moved to the inside of the second frame 12b. That is, as shown in FIG.
The portion where the belt roller 42b of FIG. 2b is mounted is pushed into a predetermined dimension to form a groove 12h, and the belt roller 42 is mounted on the upper end of the groove 12h. At the upper end of the groove portion 12h, a mounting portion on which the end portion of the surface layer frame 12i that covers the elevating belt 41 is mounted. By forming such a mounting portion, the elevating belt 41 is connected to the surface frame 12i.
When covered with the second frame 12
b Can be flush with the side.

In the second embodiment, the groove 12
Since h projects into the second frame 12b, the size of the third frame 12c is reduced in consideration of this projection.

The remaining structure, operation and effects of the robot 10 according to the second embodiment are the same as those of the robot 10 according to the first embodiment.

Third Embodiment A main part of a robot 10 according to a third embodiment of the present invention is schematically shown in FIGS. 12 and 13, and the third embodiment is a modification of the first or second embodiment. Thing,
Frames 12f and 12i covering the lifting belt 41
Are divided into frame divisions 12f ₁ , 12f ₂ ,..., 12i ₁ , 1
2i _2, together constituting a ..., the frame divided body _{12f 1, 12f 2, ...,} 12i 1, 12i 2, is made by mounting the second frame 12b to ... detachably.
For example, it can be detached with bolts and nuts.

As described above, the portions of the frames 12f and 12i covering the lifting belt 41 are divided into the frame divided bodies 12f ₁ and 12f ₁ .
12f _2, ..., 12i _1, 12i _2, together constituting a ..., by detachably attached to the second frame 12b, the maintenance of the lifting belt 41 is facilitated.

The remaining structure, operation, and effects of the robot 10 according to the third embodiment are the same as those of the robot 10 according to the first or second embodiment.

Fourth Embodiment FIG. 14 shows a main part of a robot 10 according to a fourth embodiment of the present invention. The fourth embodiment is a modification of the first embodiment. As shown in FIG. 14, the lower end of the first frame 12a is an open end, and an exhaust fan 50 is provided at the lower end. It becomes. In FIG. 14, only portions different from the first embodiment are mainly illustrated from the viewpoint of simplification of drawing and ease of understanding, and portions that are the same as or similar to the first embodiment are omitted or simplified. .

As described above, in the fourth embodiment, the lower end of the first frame 12a is used as the open end, and the exhaust
12c is exhausted, so that dust is prevented from spouting out of the sliding surfaces of the frames 12a to 12c into the clean room.

In the fourth embodiment, the first frame 12
Although the exhaust fan 50 is provided at the lower end of the section a, an exhaust duct may be connected instead of the exhaust fan 50.

Fifth Embodiment FIG. 15 shows a main part of a robot 10 according to a fifth embodiment of the present invention. The fourth embodiment is a modification of the first embodiment. As shown in FIG. 15, the belt rollers provided on each frame are symmetrically arranged with respect to the center of the drive shaft. .

As described above, in the fifth embodiment, since the belt rollers are arranged symmetrically with respect to the center of the drive shaft, the force applied to each frame is equalized, and the distortion of each frame is prevented. .

Sixth Embodiment A robot 10 according to a fourth embodiment of the present invention is shown schematically in FIG. 16 and in sectional views in FIGS. 17 and 18. This robot 10 has a drive shaft 1 as shown in FIGS.
Reference numeral 6 denotes a three-stage hollow frame (shaft divided body) 17, that is, a first frame 17a, a second frame 17b, and a third frame 17c.
The frame 17c has a telescopic structure which can be extended and contracted as a whole in a manner similar to a telescope lens barrel, and a work shaft unit 20 is mounted on the top of the third frame 17c. The expansion and contraction of the robot 10 according to the sixth embodiment is based on the first frame 17a on the base end side having the minimum cross-section, and the second cross-section sequentially increases.
The frame 17b and the third frame 17c extend and contract in a vertical direction parallel to the Z axis.

The nut member 34 of the ball screw portion 31 of the main lifting / lowering means 30 is mounted on the inner upper end of the side surface of the first frame 17a on the base end side, and the nut member 34 descends from the second frame 17b. Ball screw shaft 3
2 is screwed. The base end of the ball screw shaft 32 is
It is connected to the drive shaft (not clearly shown) of the motor 37 of the ball screw drive unit 36, which is held by appropriate means in the second frame 17b. As a result, when the ball screw shaft 32 is driven to rotate by the motor 37, the rotation force is applied to the nut member 3 of the ball screw portion 31.
4 converts it into a vertical drive force in the Z-axis direction. That is, if the motor 37 is driven to rotate, the first frame 17a
, The second frame 17b can be moved up and down.

The first frame (lower shaft divided body A) 1
A lifting belt 41 is provided on the upper outer side of the surface of the ball screw portion 31 of 7a opposite to the surface on which the nut member 34 is mounted.
Is fixed to the lower end 41a. This lifting belt 41
Upper end 41b of the second frame (intermediate portion shaft divided body B) 1
The intermediate portion 41c of the first frame (lower shaft split body A) 7b is folded back by the belt roller 42 provided at the upper end of the surface corresponding to the surface to which the lower end 41a of the elevating belt 41 is fixed. For raising and lowering the first frame (lower shaft divided body A) 17a of the third frame (upper shaft divided body C) 17c disposed outside the second frame (intermediate shaft divided body B) 17b The lower end 41b of the belt 41 is fixed to an inner lower end on a surface corresponding to the surface to which the belt 41 is fixed.

With this configuration, when the ball screw shaft 32 is driven to rotate by the motor 37 and the second frame 17b moves up and down, the third frame 17c moves up and down accordingly. That is, when the second frame 17b rises, the intermediate portion 41c is folded back by the belt roller 42 provided at the upper end of the second frame 17b, and the upper end of the elevating belt 41 fixed to the lower end of the third frame 17c. 41b is raised, whereby the third frame 17c is raised. Conversely, the second frame 17
When b descends, the upper end 41b of the elevating belt 41 descends, whereby the third frame 17c descends. That is, the elevating belt 41 and the belt roller 42 in the fourth embodiment function as the sub-elevating means 40 with respect to the main elevating means 30 similarly to the elevating belt 41 and the belt roller 42 in the first embodiment. Also,
As described above, the main elevating means 30 and the sub-elevating means 40
Is built in the first frame 17a to the third frame 17c without being exposed even during the operation.

The second frame 17b by the main lifting / lowering means 30
A pair of guide rails 45 are provided inside each surface of the second frame 17b adjacent to the surface on which the main lifting / lowering means 30 is provided, respectively, in parallel with the Z axis in order to facilitate the vertical movement of the second frame 17b. A guide bearing 46 slidably fitted to the guide rate 45 is provided at an upper end outside each surface corresponding to the surface of the one frame 17a. Further, the third frame 17 by the elevating belt 41 is used.
In order to smoothly move up and down c, a pair of guide rails 45 are respectively provided in parallel with the Z-axis inside each surface of the third frame 17c adjacent to the surface on which the belt roller 42 is provided, and A guide bearing 46 slidably fitted to the guide rate 45 is provided at an upper end outside each surface corresponding to the surface of the second frame 17b. That is, the guide mechanism 44 including the guide rail 45 and the guide bearing 46 is provided.

Second frame 17b and third frame 1
7c, the first frame 17a and the second frame 1
In order to prevent dust from escaping into the clean room through the gap between the second frame 17b and the third frame 17c, the bottom members 17d and 17d are provided at the lower ends of the second frame 17b and the third frame 17c, respectively. 17
e is attached with a predetermined clearance provided to the opposing side surface. When the second frame 17b and the third frame 17c are expanded and contracted, in order to prevent the air inside the first frame 17a to the third frame 17c from blowing out from the clearance, as in the fourth embodiment,
An exhaust fan may be provided at the lower end of the first frame 17a, and the inside of the first to third frames 17a to 17c may be set to a negative pressure. Alternatively, an exhaust duct may be connected to a lower portion of the first frame 17a, and the inside of the first to third frames 17a to 17c may be set to a negative pressure.

The working shaft unit 20 is the same as the working shaft unit 20 of the first embodiment.

As described above, in the sixth embodiment, since the working shaft unit 20 is rotatably disposed on the top of the third frame 17c, the footprint area occupied by the robot 10 in the equipment is substantially equal to the first frame. 17a bottom area is good,
Equipment compactness is promoted. The main elevating means 30 and the sub-elevating means 40 for elevating and lowering the second frame 17b and the third frame 17c are the first frames 17a to 17a.
Since it is built in the 7c without being exposed even during the operation, there is no possibility that the dust generated by driving the elevating belt 41 or the like may contaminate the clean room. Further, since the wafer handling unit 24 is located at the highest position, there is no possibility that the work W such as a wafer is contaminated by dust generated by the operation of the working shaft unit 20. In addition, the first frame 17a and the second frame 17
b and the second frame 17b and the third frame 1
7c is closed by the bottom member 17d provided at the lower end of the second frame 17b and the bottom member 17e provided at the lower end of the third frame 17c. There is no need to provide a telescopic cover, so that the structure is simplified and the cost of the robot 10 is prevented from increasing. Furthermore, the first frame 17a
Since there is no rotating mechanism for rotating the drive shaft 16 inside the inside, the inside becomes close to a cavity, so that the downward flow of the air of the first frame 17a to the third frame 17c at the time of contraction is prevented. Instead, the air in the drive shaft 16 is smoothly exhausted to the outside from the lower part of the first frame 17a. Therefore, there is no fear that air is blown out from the clearance provided in the sliding portion of each frame 17. Furthermore, transportation and installation can be performed with the drive shaft 16 in a contracted state, so that space efficiency during transportation is improved,
In addition, complication of the installation work can be avoided, thereby reducing the transportation cost and the installation cost.

In the sixth embodiment, the frame 1
Although the number of 7 is three, the number of frames 17 is not limited to three, and can be increased as appropriate according to the equipment specifications. For example, four frames can be used.
In this case, as shown in FIG. 19, the lifting / lowering belt (second lifting / lowering belt) 41B is disposed at a position opposite to the mounting position of the lifting / lowering belt (first lifting / lowering belt) 41A for lifting / lowering the third frame 17c. Then, the lower end 41a of the second lifting / lowering belt 41B is fixed to the upper end of the second frame (lower shaft divided body A) 17b, and the belt roller 42 is connected to the upper end of the third frame (intermediate shaft divided body B) 17c. By fixing the upper end 41b of the elevating belt 41 to the lower end of the fourth frame (upper shaft divided body C) 17f, it is possible to expand and contract the fourth frame 17f from the second frame 17b in the same manner as described above. it can. Similarly, it is possible to cope with the case where the number of the frames 17 becomes 5 or more. In this case,
As described above, the elevating belts 41 are arranged alternately. Also, as shown in FIG. 20, in order to ensure smooth expansion and contraction of the second frame 17b to the fourth frame 17f,
A guide mechanism 44 including a guide rail 45 and a guide bearing 46 is provided.

Seventh Embodiment A main part of a robot 10 according to a seventh embodiment of the present invention is shown in a front view in FIG. 21 and in a sectional view in FIG. The seventh embodiment is a modification of the sixth embodiment, in which the lifting belt 4 of the frame 17 on which the lifting belt 41 is provided is provided.
1 is located at a position where the frame division body 18a,
, And these frame divisions 18a, 18b,... Are detachable. For example, it is mounted with bolts and nuts.

As described above, the part 18 of the frame 17 on which the elevating belt 41 is disposed is
, 18b,... and are detachable, maintenance of the elevating belt 41 is facilitated.

The remaining structure, operation and effects of the robot 10 according to the seventh embodiment are the same as those of the robot 10 according to the sixth embodiment.

As described above, the present invention has been described based on the embodiments. However, the present invention is not limited to only the embodiments, and various modifications can be made. For example, in the embodiment, the place where the elevating belt is disposed is a detachable cover divided body or a frame divided body,
The detachable cover or frame divided body is not limited to the place where the lifting belt is disposed, but may be a divided body at another place. For example, the portion where the ball screw portion is provided may be a detachable frame divided body. Further, in the embodiment, the sub-elevating means is constituted by the elevating belt and the belt roller, but the sub-elevating means may be constituted by the wire rope and the pulley. That is, the driving unit of the sub-elevating means may be configured by a belt roller, a wire rope, or the like. Also in this case, the wire rope has a strength corresponding to the applied tension.

[0061]

As described above, according to the present invention, the following excellent effects can be obtained.

(1) The expansion / contraction means for extending and retracting the drive shaft, that is, the main elevating / lowering means and the auxiliary elevating / lowering means are built in the drive shaft without being exposed even during the operation. There is no possibility that dust generated by the operation will be scattered in the clean room.

(2) Since the robot can be transported and installed in a contracted state, the space efficiency during transportation is improved and the installation work is not complicated, thereby reducing the transportation cost and installation cost. Can be

(3) In a preferred embodiment of the present invention,
Since the work shaft unit is rotatably disposed on the top of the drive shaft, the footprint area occupied by the robot in the equipment can be substantially the bottom area of the first frame at the base end, and the equipment can be made more compact. . Further, since the wafer handling unit is located at the highest position, there is no possibility that dust generated by the operation of the working shaft unit will contaminate a work such as a wafer.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view of a robot according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view in the X-axis direction of FIG.

FIG. 3 is a sectional view in the Y-axis direction of FIG. 1;

FIG. 4 is a schematic view of the sub-elevating means in the first embodiment, showing a state in which a third frame is at an upper end position.

FIG. 5 is a cross-sectional view of the belt roller according to the first embodiment.

FIG. 6 is a schematic view of the sub-elevating means in the first embodiment, showing a state where the third frame is at a lower end position.

FIG. 7 is a schematic diagram of a state in which a driving belt is hung in parallel with a belt roller in the first embodiment.

FIG. 8 is a schematic diagram showing a state in which the drive shaft is formed in a rectangular shape and the elevating means is disposed in the longitudinal direction in the first embodiment.

FIG. 9 is a diagram corresponding to FIG. 2 when the number of frames is four in the first embodiment.

FIG. 10 is a diagram corresponding to FIG. 3 when the number of frames is four in the first embodiment.

FIG. 11 is a schematic diagram of a main part of a second embodiment of the present invention.

FIG. 12 is a schematic diagram of a main part of a third embodiment of the present invention, which is applied to the first embodiment.

FIG. 13 is a schematic diagram of a main part of a third embodiment of the present invention, which is applied to the second embodiment.

FIG. 14 is a schematic diagram of Embodiment 4 of the present invention.

FIG. 15 is a schematic diagram of a main part of a fifth embodiment of the present invention.

FIG. 16 is a schematic perspective view of a robot according to a sixth embodiment of the present invention.

17 is a cross-sectional view in the X-axis direction of FIG.

18 is a sectional view in the Y-axis direction of FIG.

FIG. 19 is a diagram corresponding to FIG. 17 when the number of frames is four in the sixth embodiment.

FIG. 20 is a diagram corresponding to FIG. 18 when the number of frames is four in the sixth embodiment.

FIG. 21 is a front view of a main part according to a seventh embodiment of the present invention.

FIG. 22 is a cross-sectional view of a main part of the seventh embodiment of the present invention.

FIG. 23 is a perspective view of a conventional cylindrical coordinate robot, showing a state where a wafer handling unit is at a lower end position.

FIG. 24 is a perspective view of a conventional cylindrical coordinate robot, showing a state where a wafer handling unit is at an upper end position.

FIG. 25 is a perspective view of a conventional articulated robot.
This shows a state where the wafer handling unit is at the upper end position.

FIG. 26 is a perspective view of a conventional articulated robot.
This shows a state where the wafer handling unit is at the lower end position.

FIG. 27 is a plan view showing an interference area of a conventional cylindrical coordinate type robot.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Robot 11, 16 Drive shaft 12, 17 Frame (shaft divided body) 20 Working shaft unit 21 Unit base 22 Turntable 23 Arm 24 Wafer handling unit 30 Main elevating means 31 Ball screw part 32 Ball screw shaft 33 Gear 34 Nut member 36 Ball screw drive 37 Motor 40 Subordinate elevating means 41 Elevating belt 42 Belt roller 44 Guide mechanism 45 Guide rail 46 Guide bearing 50 Exhaust fan A Lower shaft split body B Intermediate shaft split body C Upper shaft split body W Work

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[Procedure amendment]

[Submission date] December 14, 1999 (1999.12.
14)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Claims

[Correction method] Change

[Correction contents]

[Claims]

3. A robot comprising: a drive shaft which is vertically expandable and contractible; and a work shaft unit having a rotatable base provided on the top of said drive shaft, wherein said drive shaft has a required number of hollows. The shaft divided body includes an extended state in which the distal end extends continuously with respect to the base end in a continuous manner in the drive axis direction, and a contracted state in which the distal end approaches the base end by overlapping in the drive axis direction. The expansion and contraction means for expanding and contracting the drive shaft is provided with a predetermined shaft divided body.
Main elevating means for elevating and lowering the shaft by the main elevating means
When the divided body is moved up and down, the remaining
A sub- elevating means for elevating and lowering the split body;
The shaft is moved up and down following the descending
Lifting belt and belt row installed in the divided body
And the lifting belt can be maintained alternately.
The main elevating means and the subordinate elevating means are provided with separate covers, etc.
A robot characterized by being built in without being exposed inside the same drive shaft.

4. The method of claim 1, 2 or 3, wherein the robot, characterized in that the shaft divided body is formed by such size toward the distal end from the proximal end is reduced.

5. The method of claim 1, 2 or 3, wherein the robot, characterized in that the shaft divided body is formed by such size increases toward the tip from the base end.

6. The method of claim 1, 2 or 3, wherein the robot, characterized in that the interior of the drive shaft is formed by a negative pressure.

7. A robot according to claim 6, wherein the exhaust means at a lower end portion of the drive shaft is disposed.

8. The method of claim 6 or 7, wherein the robot, characterized in that the exhaust duct to the lower end of the drive shaft is connected.

9. cross-section of the drive shaft is a rectangular, and the main lifting means and従昇descending means according to claim 1, wherein the robot is characterized by comprising disposed in the longitudinal direction.

Wherein said main lifting means, according to claim 1, wherein the robot is characterized by comprising a ball screw drive unit for driving the ball screw and the ball screw portion.

Wherein said shaft main lifting means to the divided body, inspections such従昇descending means, maintenance claim 1, wherein the robot detachable points, characterized in that the thus provided for, such as .

12. The main lifting means and従昇claim 1, wherein the robot guide mechanism for guiding the elevator by descending means, characterized in that is provided.

13. The robot according to claim 9, wherein the guide mechanism for guiding the lift by the main lifting means and従昇descending means is characterized by being provided in the width direction.

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0013

[Correction method] Change

[Correction contents]

[0013]

The first aspect of the robot according to the present invention is as follows .
The robot is provided with a drive shaft that is vertically expandable and contractible, wherein the drive shaft is formed of a required number of hollow shaft divided bodies, and the shaft divided bodies are continuously connected in the drive shaft direction to form a base end. An extended state in which the distal end is extended, and a contracted state in which the distal end approaches the base end by overlapping in the drive shaft direction, so that it is entirely expandable and contractable.
A main elevating means for elevating and lowering a predetermined shaft divided body;
When the shaft divided body is moved up and down by means,
Accordingly, there is provided a sub-elevating means for elevating the remaining shaft divided body.
The sub-elevating means is the shaft split body of the main elevating means.
So that the remaining shaft splits can be moved up and down
For lifting belts and belts installed in the shaft split body
And a roller, wherein the main elevating means and the sub-elevating means are
Characterized by comprising a built without exposed in the same drive shaft and without providing a separately etc. cover, also robot of the present invention
The second embodiment of the kit has a drive shaft which is vertically expandable and contractible.
Robot, wherein the drive shaft corresponds to a required number of hollow shafts.
The shaft divided body is continuously connected in the drive shaft direction.
And the drive shaft direction
In the contracted state where the tip approaches the proximal end with the
Extendable to extend and retract the drive shaft.
Shrinking means, a main elevating means for elevating and lowering a predetermined shaft divided body,
The shaft divided body is moved up and down by the main elevating means
And follow-up and down to move the remaining axis split
Means, and the secondary elevating means is provided in front of the main elevating means.
Following the vertical movement of the axis split body, raise and lower the remaining axis split body.
Lifting and lowering belt disposed in the shaft split body so that
And a belt roller, wherein the belt roller is
The main elevating means, which is symmetrically arranged with respect to the center of the drive shaft,
And the sub-elevation means are driven without separate cover
It is built-in without being exposed inside the shaft.
You.

[Procedure amendment 3]

[Document name to be amended] Statement

[Correction target item name] 0014

[Correction method] Change

[Correction contents]

A preferred embodiment of the robot according to the present invention is a robot including a drive shaft which is vertically expandable and contractible, and a work shaft unit having a rotatable base provided on a top portion of the drive shaft, The drive shaft is composed of a required number of hollow shaft divided bodies, and the shaft divided bodies are continuously connected in the drive shaft direction and extend in the distal end with respect to the base end. It is made entirely expandable and contractable between a contracted state approaching an end, and expands and contracts the drive shaft.
The expansion / contraction means is a main lifting / lowering means for raising / lowering a predetermined shaft divided body.
And the shaft divided body is raised and lowered by the main lifting / lowering means.
Then, follow it to raise and lower the remaining axis split body
Lowering means, wherein the sub-elevating means is
The remaining shaft divided body is moved up and down following the vertical movement of the shaft divided body.
Lifting and lowering belt and
And a belt roller.
The main elevating means and the sub-elevating means are provided with separate covers or the like so that maintenance can be performed alternately.
It is characterized by being built in without being exposed in the same drive shaft.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0017

[Correction method] Deleted

[Procedure amendment 5]

[Document name to be amended] Statement

[Correction target item name] 0019

[Correction method] Change

[Correction contents]

Further, in the robot of the present invention,
For example, the main elevating means includes a ball screw unit and a ball screw drive unit that drives the ball screw unit.

[Procedure amendment 6]

[Document name to be amended] Statement

[Correction target item name] 0020

[Correction method] Deleted

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor J 一 ichi Nishimura 322 Hashizushi Furukawacho, Fushimi-ku, Kyoto Dainichi Screen Manufacturing Co., Ltd. F-term (reference) 3F060 AA01 AA07 AA08 DA09 EB12 EC12 GA13 GB02 GB04 GB06 GB19 GB31 HA28 HA29

Claims (15)

[Claims] 1. A robot provided with a drive shaft that is vertically expandable and contractible, wherein the drive shaft comprises a required number of hollow shaft divided bodies, and the shaft divided bodies are continuously connected in the drive shaft direction. Extending and contracting means for extending and contracting the drive shaft as a whole is provided between an extended state in which the distal end extends with respect to the base end and a contracted state in which the distal end approaches the base end by overlapping in the drive shaft direction. A robot characterized by being built in the drive shaft without being exposed. 2. A robot comprising: a drive shaft that is vertically expandable / contractible; and a working shaft unit having a rotatable base provided on a top of the drive shaft, wherein the drive shaft has a required number of hollows. The shaft divided body includes an extended state in which the distal end extends continuously with respect to the base end in a continuous manner in the drive axis direction, and a contracted state in which the distal end approaches the base end by overlapping in the drive axis direction. A robot characterized in that it is capable of extending and contracting as a whole, and a telescopic means for extending and contracting the drive shaft is built in without being exposed in the drive shaft. 3. The robot according to claim 1, wherein the size of the shaft division body is reduced from a base end to a front end. 4. The robot according to claim 1, wherein the size of the shaft divided body increases from a base end to a front end. 5. The robot according to claim 1, wherein the inside of the drive shaft has a negative pressure. 6. The robot according to claim 5, wherein exhaust means is provided at a lower end of the drive shaft. 7. The robot according to claim 5, wherein an exhaust duct is connected to a lower end of the drive shaft. 8. A main lifting / lowering means for raising and lowering a second shaft divided body located above a first shaft divided body located at a base end of the drive shaft, and for raising and lowering the second shaft divided body. The robot according to claim 1 or 2, further comprising a sub-elevating means for following up and down the remaining axis divided body. 9. The robot according to claim 8, wherein a section of the drive shaft is rectangular, and a main elevating unit and a subordinate elevating unit are arranged in a longitudinal direction thereof. 10. The robot according to claim 8, wherein said main lifting / lowering means includes a ball screw portion and a ball screw driving portion for driving said ball screw portion. 11. The sub-elevating means includes a driving member made of a flexible band-shaped or linear member, and a rotating member, wherein the rotating member is rotatably mounted on the intermediate shaft divided body, 9. The robot according to claim 8, wherein a lower end of the driving member is attached to the lower shaft divided body, an intermediate portion is folded back by the rotating member, and an upper end is attached to the upper shaft divided body. 12. The robot according to claim 11, wherein a plurality of drive members made of the belt-like or linear members are provided, and the plurality of drive members are hung in parallel on the rotating member. 13. The robot according to claim 8, wherein said shaft divided body is provided with a detachable portion for inspection, maintenance and the like of a main elevating means and a sub-elevating means. 14. The robot according to claim 8, further comprising a guide mechanism for guiding the elevation by said main elevating means and said sub-elevating means. 15. The robot according to claim 9, wherein a guide mechanism for guiding the elevation by said main elevating means and the subordinate elevating means is provided in a width direction.