JP2000199731A - Optical characteristics measuring device and film formation apparatus provided with the optical- characteristic measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain an optical-characteristic measuring device by which the optical characteristics of an optical thin film can be measured with good accuracy and easily irrespective of the state on the surface of the optical thin film and to obtain a film formation apparatus, which is provided with the optical-characteristic measuring device. SOLUTION: This optical-characteristic measuring device 1 is used to measure the optical characteristics of an optical thin film having the optical characteristic. The measuring device 1 is provided with a light irradiating means 3, with which the optical thin film is irradiated with light. In addition, the measuring device 1 is provided with a condensing means 5, whose inner circumferential face is a spherical diffusion reflecting face and which condenses the light from the optical thin film. In addition, the measuring device 1 is provided with a light-detecting means 7 which detects a quantity of light condensed by the condensing means 5. In addition, the measuring device 1 is provided with a measuring means 9, which measures the optical characteristic of the optical thin film on the basis of the quantity of light by the light-detecting means 7. Then, the optical characteristic of the optical thin film as an object, to be measured, which is conveyed continuously is measured.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical characteristic measuring device for measuring the optical characteristics of an optical thin film and a film forming apparatus provided with the optical characteristic measuring device.

[0002]

2. Description of the Related Art Conventionally, there is a film forming apparatus for forming an optical thin film (hereinafter, abbreviated as a thin film) having predetermined optical characteristics such as reflectance and transmittance on the surface of a film such as plastic. Such a conventional film forming apparatus forms a thin film on a film surface by, for example, a sputtering method, a vapor deposition method, or a chemical vapor deposition method. A thin film formed by a conventional film forming apparatus irradiates a predetermined light to the thin film, and the optical characteristics (for example, the reflectance) of the reflected light or the like are measured by a predetermined optical characteristic measuring device. . In a conventional optical characteristic measuring device, for example, there is a device in which a film on which a thin film is formed is brought into close contact with a black roll, and the reflection there is measured as a mirror surface.

[0003]

However, in the measurement of the optical characteristics of such a thin film, the optical characteristics of the thin film cannot be accurately measured because the film on which the thin film is formed is deformed. This is because, in addition to the above-described deformation of the film, an error occurs in the measurement of optical characteristics due to the fact that the film surface during measurement does not become completely flat.

Accordingly, the present invention has solved the above-mentioned problems, and has an optical characteristic measuring apparatus and an optical characteristic measuring apparatus capable of easily and accurately measuring the optical characteristics of an optical thin film regardless of the state of the surface of the optical thin film. It is intended to provide a film forming apparatus.

[0005]

According to the present invention, an object of the present invention is to provide an optical characteristic measuring apparatus for measuring the optical characteristics of an optical thin film having optical characteristics. A light irradiating means for irradiating the light, a condensing means for condensing the light from the optical thin film with an inner peripheral surface being a spherical diffuse reflection surface, and detecting a light amount condensed by the condensing means Light detecting means, and measuring means for measuring the optical characteristics of the optical thin film based on the amount of light of the light detecting means, the optical thin film as an object to be continuously transmitted is measured. This is achieved by an optical property measuring device characterized by measuring optical properties.

According to the above configuration, the optical characteristic measuring apparatus irradiates the optical thin film with light by the light irradiating means, and condenses the reflected light by the condensing means of the diffuse reflection surface having a spherical inner peripheral surface. The light amount condensed by the light condensing means is detected by the light detecting means. The measuring means measures the optical characteristics of the optical thin film continuously transmitted as an object to be measured, based on the light amount as a detection result of the light detecting means.

[0007]

Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. Note that the embodiments described below are preferred specific examples of the present invention,
Although various technically preferable limits are given, the scope of the present invention is not limited to these modes unless otherwise specified in the following description.

First Embodiment FIG. 1 is a block diagram showing a state in which an optical characteristic measuring apparatus 1 according to a first embodiment of the present invention is provided in a film forming apparatus 10. In the film forming apparatus 10, for example, the running means 19, 19 having a roller shape and having a predetermined driving means are rotated in predetermined directions different from each other with the film 13 made of a material such as a plastic film sandwiched therebetween. 13 is traveling in the F direction. Film forming apparatus 10
Is an optical monitor as an optical property measuring device for measuring optical properties of a thin film (optical thin film) as an object to be measured formed in a film forming step 21 for forming a thin film on the surface of the film 13. 1 (spectrophotometer system). Here, the thin film is, for example, an antireflection film for preventing light reflection, a dichroic mirror, an interference filter, or a narrow band filter.

The film forming step 21 is performed in a vacuum chamber 25 by, for example, sputtering, vapor deposition or chemical vapor deposition (CVD: C
chemical Vapor Deposition)
Thus, a thin film is formed on the surface of the film 13. The film forming apparatus 10 includes, for example, a spectrophotometer controller 9 described later.
(Measurement means) is arranged outside the vacuum chamber 25, and the optical monitor 1 and the film forming process 21 except for the spectrophotometer controller 9 are arranged inside the vacuum chamber 25.

The optical monitor 1 has a spectrophotometer controller 9 (measuring means, light irradiating means) and a spectrophotometer 23 as shown in FIG.
(Surface forming means). Spectrophotometer controller 9
Is for controlling a spectrophotometer 23 described later. The spectrophotometer 23 includes a light source head 3 (light irradiation unit),
It is composed of an integrating sphere 5 (light collecting means) and a detector head 7 (light detecting means). The spectrophotometer 23 has an integrating sphere 5
, And is arranged such that the light entrance is near the film 13. The spectrophotometer 23 is arranged, for example, on the opposite side of the light trap 11 with the film 13 interposed therebetween.

The light source head 3 is provided, for example, on the integrating sphere 5 and includes a spectrophotometer controller 9 and an optical fiber 1.
5 (optical fiber cable),
Under the control, a predetermined light (irradiation light 3a) is applied to the film 1
Irradiate 3 The integrating sphere 5 has an inner peripheral surface formed of, for example, a spherical diffuse reflection surface, and the light source head 3 and the detector head 7 are provided on the inner play surface.

The integrating sphere 5 is composed of a reflected light 3b in which the irradiation light 3a irradiated by the light source head 3 is reflected by the thin film formed on the surface of the film 13, and a reflected light 3b by the thin film formed on the surface of the film 13. The scattered reflected light 3c is collected and received by a detector head 7 described later.

The detector head 7 is provided, for example, on the integrating sphere 5 and is connected to the spectrophotometer controller 9 by an optical fiber 15, and receives the reflected light 3b and the scattered reflected light 3c by its control. The detector head 7 has, for example, a photodetector.

The light trap 11 is for preventing the light transmitted through the film 13 from entering the integrating sphere 5 described later again. The light trap 11 may have various configurations and shapes. For example, the light trap 11 may have a configuration in which a black hole is formed on the inside and the incident light is not reflected, for example, two absorptive mirrors may be used. Arranged in a V-shape,
A configuration in which the light incident thereon is absorbed almost 100% by several reflections, a black rubber-like configuration, or the like can be employed. That is, the light trap 11 may be of any type as long as it reduces the amount of reflected light on the surface.

In the optical monitor 1, the film 13
Another method for keeping the surface of the film 13 in a predetermined state and running the film 13 stably is, for example, a black roll 1 as a black roll-shaped member rotating as shown in FIG.
The film 13 may be caused to run with the film 13 in close contact with 7 (continuous transport mechanism). The black roll 17 is also made of rubber, for example.

Optical monitor 1 of FIG. 1 and its optical monitor 1
Is formed as described above, and the operation thereof will be described below with reference to FIGS. The film forming apparatus 10 controls the film 1
3, a thin film is formed on the surface. The film 13 is running in the F direction by predetermined running means 19. The film forming apparatus 10 allows the film 13
Has an optical monitor 1 for measuring the optical characteristics of a thin film formed on the surface of the device. The optical monitor 1 includes a spectrophotometer 2
3, and the optical characteristics of the film 13 are measured by the spectrophotometer controller 9 for controlling the spectrophotometer 23 as follows.

The spectrophotometer controller 9 irradiates, for example, the light 13 from the light source head 3 via the optical fiber 15 to the film 13 which is flattened and traveled by the light trap 11, for example. The irradiation light 3a applied to the film 13 is reflected by the thin film on the surface of the film 13, and becomes reflected light 3b and scattered reflected light 3c.
The integrating sphere 5 has a spherical inner peripheral surface. The integrating sphere 5 collects the reflected light 3b and the scattered reflected light 3c which are repeatedly reflected on the inner peripheral surface, and causes the detector head 7 to receive the light.

The detector head 7 receives the reflected light 3b and the scattered reflected light 3c. The received light is sent to the spectrophotometer controller 9 via the optical fiber 15 (optical fiber cable). Spectrophotometer controller 9
Converts the amount of received light into an electric signal for each wavelength, and calculates light reflectance based on the electric signal.

According to the embodiment of the present invention, the optical monitor 1 causes the light source head 3 to irradiate a thin film as an object to be measured which is continuously transmitted, with a light source head 3 so that the inner peripheral surface is diffused. The reflected light is collected by the integrating sphere 5 on the reflecting surface,
The light amount collected by the integrating sphere 5 is detected by a detector head 7.
To detect. The spectrophotometer controller 9 measures the reflectance as an example of the optical characteristics of the thin film based on the light amount as a detection result of the detector head 7. As described above, according to the optical monitor 1 and the film forming apparatus 10 including the same according to the first embodiment of the present invention, regardless of the state of the surface of the thin film formed on the surface of the film 13, the optical characteristics of the thin film can be improved. It can be easily and accurately measured. Specifically, the following effects can be obtained. (1) For example, it is possible to accurately evaluate a thin film formed on the surface of a film 13 made of plastic or the like which is not a flat substrate such as glass. (2) Since the detector head 7 can receive not only the reflected light 3b in which the irradiation light 3a is specularly reflected but also the scattered reflected light 3c, the light reflectance can be measured efficiently. (3) During the measurement of the optical characteristics, the integrating sphere 5 efficiently collects the reflected light 3b and the scattered reflected light 3c even when the film 13 is running and the measurement surface vibrates and is unstable. To make the detector head 7 receive light, so that the optical monitor 1
Can easily and accurately perform optical measurement of reflectance.

Second Embodiment In the second embodiment, the portions denoted by the same reference numerals in FIG. 1 as those in the first embodiment have substantially the same configuration, and therefore only different points will be described.

FIG. 3 is a block diagram showing a state in which an optical characteristic measuring apparatus 1a according to a second embodiment of the present invention is provided in a film forming apparatus 10a. In the optical monitor 1a (optical characteristic measuring device) of the second embodiment, the light source head 3 is arranged on the integrating sphere 5 in the first embodiment,
The light source head 3 (light irradiation means) is arranged instead of the light trap 11 so as to be on the opposite side with the film 13 interposed therebetween. Note that the light trap 11 may be arranged so that its position is shifted.

Accordingly, the spectrophotometer controller 9 (FIG. 3)
Is omitted because it is a simplified representation of FIG. 1)
Irradiation light 3a emitted from the light source head 3 operated by the above control becomes a linearly transmitted light 3e transmitted linearly through the film 13, and a scattered transmitted light 3d transmitted through the film 13 and scattered. In substantially the same manner as the optical monitor 1 according to the first embodiment, these linear transmitted light 3e and scattered transmitted light 3e
d is condensed by the integrating sphere 5 and received by the detector head 3. The received light is sent to the spectrophotometer controller 9 via the optical fiber 15. The spectrophotometer controller 9 converts the amount of received light into an electric signal for each wavelength, and calculates light transmittance and absorptivity based on the electric signal.

As described above, according to the optical monitor 1a and the film forming apparatus 10a including the same according to the second embodiment of the present invention, regardless of the state of the thin film formed on the surface of the film 13, Optical characteristics can be easily and accurately measured. Specifically, the following effects can be obtained. (1) For example, it is possible to accurately evaluate a thin film formed on the surface of a film 13 made of plastic or the like that is not a flat substrate such as glass. (2) Since the detector head 7 can receive not only the directly transmitted light 3e of the irradiation light 3a but also the scattered transmitted light 3d, the light transmittance and the absorptance can be measured efficiently. (3) During the measurement of the optical characteristics, the integrating sphere 5 efficiently condenses the direct transmitted light 3e and the scattered transmitted light 3d efficiently even when the film 13 is running and the measurement surface vibrates and is unstable. Then, the light is received by the detector head 7, so that the optical monitor 1a can easily and accurately perform the optical measurement of the transmittance and the absorptance.

The present invention is not limited to the above embodiment. The optical monitors 1 and 1a can be applied not only to the film forming apparatus 10 but also to an apparatus that handles a thin film having optical characteristics.

[0025]

As described above, according to the present invention,
It is possible to provide an optical property measuring apparatus capable of easily and accurately measuring the optical properties of an optical thin film regardless of the state of the surface of the optical thin film, and a film forming apparatus including the optical property measuring apparatus.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a state in which an optical characteristic measuring apparatus according to a first embodiment of the present invention is provided in a film forming apparatus.

FIG. 2 is a block diagram showing a modification of the optical characteristic measuring device of FIG.

FIG. 3 is a block diagram showing a state in which an optical characteristic measuring device according to a second embodiment of the present invention is provided in a film forming device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Optical monitor (optical characteristic measuring device as 1st embodiment), 1a ... Optical monitor (optical characteristic measuring device as 2nd embodiment), 3 ... Light source head (light irradiation means), 5: integrating sphere (light collecting means), 7: detector head (light detecting means), 9: spectrophotometer controller (light irradiating means, measuring means), 10: film forming apparatus,
11 ... light trap (surface forming means), 13 ...
Film (measurement object), 17: black roll (surface forming means), 21: film forming process, 23: spectrophotometer (measuring means)

Claims (18)

[Claims] 1. An optical property measuring device for measuring the optical properties of an optical thin film having optical properties, comprising: a light irradiating means for irradiating the optical thin film with light; A reflecting surface, a light collecting unit for collecting the light from the optical thin film, a light detecting unit for detecting a light amount collected by the light collecting unit, and a light amount of the light detecting unit. Measuring means for measuring the optical characteristics of the optical thin film based on the measured optical characteristics of the optical thin film as an object to be measured which is continuously transmitted. 2. An optical characteristic measuring apparatus according to claim 1, further comprising a surface forming means for closely adhering to said optical thin film and for forming a surface thereof into a predetermined shape. 3. The light-collecting means is an integrating sphere.
The optical property measuring device according to 1. 4. A surface of the surface forming means facing the optical thin film is formed of a member which does not reflect light transmitted through the optical thin film out of light irradiated by the light irradiating means,
The optical characteristic measuring device according to claim 2, wherein the measuring unit measures a reflectance of the optical thin film. 5. The optical characteristic measuring apparatus according to claim 4, wherein the surface of said surface forming means facing said optical thin film is black. 6. The optical characteristic measuring apparatus according to claim 5, wherein said surface forming means is a roll-shaped member. 7. The optical characteristic measuring device according to claim 6, wherein the roll-shaped member is made of rubber. 8. The optical characteristic measuring device according to claim 4, wherein said optical thin film is an anti-reflection film for preventing light reflection. 9. The optical characteristic measuring device according to claim 4, wherein the optical thin film is a dichroic mirror. 10. The optical characteristic measuring device according to claim 4, wherein the optical thin film is an interference filter. 11. The optical characteristic measuring apparatus according to claim 4, wherein the optical thin film is a narrow band filter. 12. The light irradiating means is arranged on the opposite side of the optical thin film from the light detecting means so that irradiated light passes through the optical thin film, and the measuring means comprises The optical characteristic measuring device according to claim 1, wherein the optical transmittance and the absorptance of the thin film are measured. 13. A film forming apparatus, comprising: a film forming step for forming an optical thin film having optical characteristics; and an optical characteristic measuring device for measuring the optical characteristics of the optical thin film, A light irradiating means for irradiating light to the optical thin film; a light collecting means for condensing the light from the optical thin film with an inner peripheral surface being a spherical diffuse reflection surface; A film forming apparatus comprising: a light detecting unit for detecting a light amount emitted; and a measuring unit for measuring an optical characteristic of the optical thin film based on a light amount of the light detecting unit. 14. The film forming apparatus according to claim 13, wherein in the film forming step, an optical thin film is formed on a film surface made of plastic. 15. The film forming apparatus according to claim 13, wherein a measurement result of the optical characteristics of the optical thin film by the measuring unit is fed back to the film forming step to form a film. 16. The film forming apparatus according to claim 13, wherein said film forming step forms an optical thin film by a sputtering method. 17. The film forming apparatus according to claim 13, wherein said film forming step forms an optical thin film on said film surface by vapor deposition. 18. The method according to claim 1, wherein in the film forming step, an optical thin film is formed on the film surface by a chemical vapor deposition method.
4. The film forming apparatus according to 3.