JP2000189750A - Organic solvent vapor treating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent the deposition of dimethyl solfoxide contained in treating air on an adsorption rotor by providing the device with the adsorption rotor, a treating zone and a 1st desorption zone and providing the 1st desorption zone therein with a 2nd desorption zone, to which desorbed air having higher temp. than that of the desorbed air is sent, in the 1st desorption zone. SOLUTION: The treating air containing the organic solvent vapor discharged from a semiconductor plant or the like is sent to a treating zone 4 by a blower 10 to allow the organic solvent vapor to be adsorbed on the adsorption rotor 1 and the purified air discharged therefrom is released to the atmosphere. The organic solvent vapor adsorbed on the adsorption rotor 1 is desorbed by air heated by a heater 8 for desorption in the 1st desorption zone 5 and discharged to a combustion device or the like by a blower 9 for desorption. If dimethyl sulfoxide is contained in the treating air and is not desorbed in this time, a part facing the 2nd desorption zone 11 in the adsorption rotor 1 is completely desorbed by supplying the desorbing air at about 220 deg.C in the 2nd desorption zone 11.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an organic solvent vapor processing apparatus for concentrating an organic solvent vapor discharged from, for example, a semiconductor factory.

[0002]

2. Description of the Related Art Conventionally, an adsorption type organic solvent vapor processing apparatus is used in a paint factory, a chemical factory, a semiconductor factory, or the like, and performs an organic solvent vapor discharged from such a factory by adsorbing and concentrating it to perform a combustion process or the like. Things have been developed.

[0003] These are a column type in which an adsorbent such as activated carbon or zeolite is packed in a column to perform adsorption and desorption alternately, or a sheet carrying the adsorbent is formed in a honeycomb rotor shape, and the adsorption rotor is rotated. However, it is of an adsorption rotor type that continuously performs adsorption and desorption.

[0004] In particular, in recent years, the adsorption rotor type which consumes a larger amount of processing air and consumes less energy than the column type has become widespread.

In such an adsorption-rotor-type organic solvent vapor processing apparatus, a chamber having an adsorption rotor is divided into an adsorption zone and a desorption zone, and processing air containing organic solvent vapor is supplied to the adsorption zone while rotating the adsorption rotor. While adsorbing organic solvent vapor in the adsorption zone and cleaning the air that has exited the adsorption zone, the hot air is applied to the adsorption rotor in the desorption zone to desorb the organic solvent in the desorption zone, thereby allowing the air to flow out of the desorption zone. The organic solvent vapor is concentrated.

The concentrated organic solvent vapor leaving the desorption zone in this way is rendered harmless by means such as combustion treatment. That is, by setting the amount of air sent to the desorption zone to be, for example, 1/10 of the amount of air sent to the treatment zone, the concentration of the organic solvent vapor at the outlet side of the desorption zone becomes 10 times, which facilitates the combustion process.

[0007]

As described above, the adsorption rotor type has high performance as an organic solvent vapor processing apparatus, but has the following problems when processing a specific organic solvent vapor.

That is, a small amount of dimethyl sulfoxide (hereinafter referred to as DM) is contained in an organic solvent vapor discharged from a recent semiconductor factory.
SO), which can impair the performance of the suction rotor. This is because DMSO has a very high adsorptivity regardless of whether the adsorbent is activated carbon or zeolite, and has a relatively high boiling point of about 200 ° C., and is inherently difficult to desorb from the adsorption rotor.

When the temperature of the desorption air sent to the desorption zone is raised to, for example, about 250 to 300 ° C., the desorption of DMSO is completely performed. However, when the temperature of the desorption air is raised too much, the desorbed organic solvent vapor ignites. This poses a safety problem. In particular, if the adsorption rotor is made of activated carbon paper, there is also a risk that the rotor will ignite.

[0010] In addition, DMSO has extremely high hygroscopicity and, if not completely desorbed and remains on the adsorption rotor, adsorbs moisture contained in the processing air. Then, the DMSO in the treated air is newly adsorbed to the moisture, and the DMSO
Aqueous solution adheres to the adsorption rotor.

In this case, water and DMS are required for desorption.
Both O must be desorbed, and the energy required for desorption increases, and eventually DMSO is not desorbed and remains on the adsorption rotor. In this way, once DMSO remains on the adsorption rotor, a vicious cycle occurs and gradually adheres to the adsorption rotor.

Accordingly, the adsorbent of the adsorption rotor is covered with DMSO, so that the adsorption capacity gradually decreases.

An object of the present invention is to provide an organic solvent vapor processing apparatus capable of processing even when DMSO is contained in the processing air.

[0014]

The present invention comprises a honeycomb-shaped adsorption rotor, a treatment zone, and a first desorption zone, into which desorption air having a higher temperature than desorption air in the first desorption zone is sent. A second desorption zone was provided.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention according to claim 1 of the present invention provides a honeycomb-shaped adsorption rotor having an organic solvent vapor adsorbent, a processing zone for supplying at least air to be adsorbed to the adsorption rotor, and a desorbed air. And a second desorption zone in which desorption air having a higher temperature than desorption air is sent is provided in the first desorption zone.
It has an effect of desorbing an organic solvent that cannot be desorbed in the desorption zone in the second desorption zone.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a first embodiment of the organic solvent vapor treatment apparatus of the present invention will be described in detail with reference to the drawings. FIG. 1 is an exploded perspective view of an organic solvent vapor treatment apparatus of the present invention, and FIG. 2 is a perspective view of a main part thereof.

Reference numeral 1 denotes a suction rotor, which is formed, for example, of ceramic paper carrying hydrophobic zeolite in a honeycomb shape and rotatably held in a casing 2. The casing 2 is divided by the separator 3 into a processing zone 4 and a first desorption zone 5.

The suction rotor 1 is configured to be driven to rotate in the direction of the arrow by a geared motor 6 and a drive belt 7. Reference numeral 8 denotes a detachable heater, which communicates with the first detachable zone 5. Reference numeral 9 denotes a detachable blower, and a suction port communicates with the outlet side of the first detachable zone 5. As a result, the air heated to 140 ° C. by the heater 8 for desorption passes through the first desorption zone 5.

Reference numeral 10 denotes a processing air blower for sending processing air containing an organic solvent vapor. Reference numeral 11 denotes a second desorption zone, which is tubular, and is provided in the first desorption zone 5. The second detachable zone 11 is attached to a drive screw 12 straddling the first detachable zone 5, and moves longitudinally through the first detachable zone 5 by rotation of the drive screw 12. The tip of the second desorption zone 11 is opposed to the suction rotor 1 via a minute gap.

Reference numeral 13 denotes a geared motor.
Is driven to rotate. That is, the driving screw 12 rotates by the driving force of the geared motor 13, and the second detachable zone 11 moves in the first detachable zone 5. When the second detachable zone 11 moves to one end of the first detachable zone 5, the geared motor 13 is rotated in the reverse direction to move the second detachable zone 11 toward the other end. Thus, the second desorption zone 11 reciprocates in the first desorption zone 5.

Reference numeral 14 denotes an auxiliary heater, which is a heater 8 for detaching and attaching.
At 140 ° C.
The temperature of the air heated up to 220 ° C. is raised. An outlet (not shown) of the auxiliary heater 14 is connected to the second desorption zone 11 via a heat-resistant flexible tube (not shown).

The tip of the second desorption zone 11 is the suction rotor 1
Because it is opposed to the air blower via a minute gap,
As a result, the inside of the second desorption zone 11 has a negative pressure, and the air heated by the auxiliary heater 14
To the suction rotor 1.

The first embodiment of the organic solvent vapor treatment apparatus according to the present invention has the above-described configuration, and its operation will be described below. First, power is supplied to the desorption blower 9 and the processing air blower 10, and then to the geared motor 6, the desorption heater 8, the geared motor 13, and the auxiliary heater 14.

As a result, the processing air containing the organic solvent vapor is sent by the processing air blower 10, enters the processing zone 4 and is adsorbed by the adsorption rotor 1. The air leaving the processing zone 4 is released as clean air to the atmosphere.

The organic solvent vapor adsorbed by the adsorption rotor 1 is desorbed by the air heated by the desorption heater 8, concentrated, and sent to a processing device such as a combustion device (not shown) by the desorption blower 9.

Here, DMSO is contained in the processing air and 1
If not completely desorbed by 40 ° C. desorption air, DMSO accumulates on the adsorption rotor 1. However, since the desorption air at 220 ° C. is supplied to the adsorption rotor 1 from the second desorption zone 11, the portion of the adsorption rotor 1 facing the second desorption zone 11 is completely desorbed.

The portion of the adsorption rotor 1 facing the second desorption zone 11 comes into contact with desorption air at 220 ° C.
There is no big problem for the following reasons. That is, since the second desorption zone 11 is provided in the first desorption zone 5, the portion of the adsorption rotor 1 facing the second desorption zone 11 has already been desorbed to some extent, and the concentration of the organic solvent vapor is low. There is little risk of ignition.

The desorption air at 140 ° C. flows around the portion of the adsorption rotor 1 facing the second desorption zone 11, and since the second desorption zone 11 is moving, the contact time with the desorption air at 220 ° C. The adsorption rotor 1 which has been short and has become high in temperature immediately drops to the first desorption air temperature.

Although the discharge temperature of the second desorption zone 11 is high and no seal member is provided to seal the space between the second desorption zone 11 and the suction rotor 1, the second desorption zone 11 is provided in the first desorption zone 5. However, the pressures of both are the same and there is no problem due to the absence of the sealing member.

FIG. 3 is an exploded perspective view of a second embodiment of the organic solvent vapor treatment apparatus of the present invention. The same components as those of the first embodiment are given the same reference numerals and will not be described repeatedly. Omitted.

Reference numeral 15 denotes a second desorption zone, which is provided in the first desorption zone 5. The second desorption zone 15 is connected to the auxiliary heater 14. The other configuration is the same as that of the first embodiment.

Also in the second embodiment, desorption air at 140 ° C. flows from the desorption heater 8 to the first desorption zone 5.
Desorption air at 220 ° C. flows from the auxiliary heater 14 to the second desorption zone 15.

The second embodiment of the organic solvent vapor treatment apparatus according to the present invention has the above-described configuration, and its operation will be described below. First, power is supplied to the removal blower 9 and the processing air blower 10, and then power is supplied to the geared motor 6, the removal heater 8, and the auxiliary heater 14.

As a result, the processing air containing the organic solvent vapor is sent by the processing air blower 10, enters the processing zone 4 and is adsorbed by the adsorption rotor 1. The air leaving the processing zone 4 is released as clean air to the atmosphere.

The organic solvent vapor adsorbed by the adsorption rotor 1 is desorbed by the air heated by the desorption heater 8, concentrated, and sent to a processing device such as a combustion device (not shown) by the desorption blower 9.

Here, DMSO is contained in the processing air, and 1
If not completely desorbed by 40 ° C. desorption air, DMSO accumulates on the adsorption rotor 1. However, since the desorption air at 220 ° C. is supplied to the adsorption rotor 1 from the second desorption zone 15, the portion of the adsorption rotor 1 facing the second desorption zone 15 is completely desorbed.

The portion of the adsorption rotor 1 facing the second desorption zone 15 comes into contact with desorption air at 220 ° C.
There is no big problem for the following reasons. That is, since the second desorption zone 15 is provided in the first desorption zone 5, the portion of the adsorption rotor 1 facing the second desorption zone 15 has already been desorbed to some extent, and the concentration of the organic solvent vapor is low. There is little risk of ignition.

The desorption air at 140 ° C. flows around the portion of the adsorption rotor 1 facing the second desorption zone 15, and once the adsorption rotor 1 has reached a high temperature, it passes through the first desorption zone 15 immediately after passing through the second desorption zone 15. The temperature drops to the desorption air temperature.

Even if the temperature of the air discharged from the second desorption zone 15 is high and a seal member for sealing the space between the second desorption zone 15 and the suction rotor 1 cannot be provided, the second desorption zone 15 will be the first desorption zone.
Since it is provided in the desorption zone 5, the air pressure in both zones is the same and there is no problem due to the absence of the sealing member.

In the above embodiment, the suction rotor 1 has a zeolite supported on ceramic paper. However, the suction rotor 1 can withstand high-temperature air supplied from the second desorption zone 11 or the second desorption zone 15. If so, activated carbon paper may be formed in a honeycomb shape.

[0041]

Since the organic solvent vapor treatment apparatus of the present invention is constructed as described above, even if DMSO is contained in the processing air and the DMSO adheres to the adsorption rotor, the DMSO on the adsorption rotor is removed.
Can be prevented from being deposited.

Further, since the organic solvent vapor treatment apparatus of the present invention prevents the deposition of DMSO while operating, it can be operated continuously for 24 hours.

In the second desorption zone, the adhered DMSO
Since only the desorption is sufficient, a small area is required, and the energy given to the second desorption zone does not need to be very large.

Since the second desorption zone is provided in the first desorption zone and is configured so that the pressures of air in both zones are equal, a seal for completely airtight between the adsorption rotor and the adsorption rotor is not required. There is no problem that the air temperature in the second desorption zone cannot be increased because there is no seal material that can withstand high temperatures.

Further, when the suction rotor passes through the second desorption zone, the temperature of the suction rotor becomes the temperature of the first desorption zone. Therefore, even if the air temperature of the second desorption zone is slightly increased, there is little danger of ignition.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a first embodiment of an organic solvent vapor treatment device of the present invention.

FIG. 2 is an enlarged view of a main part of the first embodiment of the present invention.

FIG. 3 is a perspective view showing a second embodiment of the organic solvent vapor treatment device of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Suction rotor 2 Casing 3 Separator 4 Processing zone 5 1st desorption zone 6 Geared motor 7 Drive belt 8 Desorption heater 9 Desorption blower 10 Blow for process air 11 Second desorption zone 12 Drive screw 13 Geared motor 14 Auxiliary heater

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 4D002 AB03 AC07 AC10 BA03 BA04 BA05 CA05 DA41 DA45 DA70 EA08 GA02 GB01 GB02 GB03 GB04 GB11 4D012 CA11 CC05 CD01 CE02 CF02 CF03 CF04 CF05 CF08 CG03 CK05 CK06

Claims (3)

[Claims] 1. A honeycomb-shaped adsorption rotor having an adsorbent of an organic solvent vapor, a treatment zone for supplying at least air to be treated to the adsorption rotor, and a first desorption zone for supplying desorption air to the first adsorption rotor. An organic solvent vapor treatment apparatus, wherein a second desorption zone for providing desorption air having a higher temperature than desorption air is provided in the desorption zone. 2. The organic solvent vapor treatment apparatus according to claim 1, wherein the second desorption zone moves within the first desorption zone. 3. The organic solvent vapor treatment device according to claim 1, wherein the second desorption zone is provided so as to partition the inside of the first desorption zone.