JP2000188484A - Accommodation facility with clean device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent leakage from a through hole, eliminate the need for treating a coating material on a junction surface, and facility assembly operation by mounting a connection piece with a bolt through hole to at least one portion of the front end part of the side plate of a body for forming a chamber. SOLUTION: An accommodation facility is composed of a chamber part 2, a partition chamber 3, and an accommodation part 4 that are provided at a body 1. Then, the chamber part 2 is formed by a top 2a, a side plate 2b, and a back face plate 2c at the rear portion of the body 1, while the side plate 2b becomes a junction surface 16 of the chamber part 2 when connecting in parallel. When adjacent units are to be connected, a connection piece 11 with a bolt through hole is provided at an appropriate portion of the front end part of the side plates 2b and 3b of the chamber part 2 and the partition chamber 3 of the body 1 that becomes the junction surface 16 in connection by welding or other appropriate means. Since no bolt holes are provided at the body, no air leaks from the junction surface 16. Also, since the connection operation is made outside the body, the operation can be made easily.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a storage facility with a clean device used for storing, for example, products such as semiconductors which extremely dislike dust.

[0002]

2. Description of the Related Art Conventionally, a storage facility with a clean device dedicated to product storage used for storing products such as semiconductors which extremely dislike dust is provided with a main body 1 as shown in FIGS.
And a storage section 4 provided in front of the chamber section 2 and having open front and rear faces, and a compartment 3 provided at a lower portion of the main body 1. The chamber portion 2 has a filter 5 attached to the side opposite to the rear surface side of the storage portion 4, and further, behind the filter 5, a top plate 2 a, a side plate 2 b, and a side plate 2 forming the chamber portion 2 of the main body 1. An air supply passage 9 formed inside is communicated with the back plate 2c. In addition, compartment 3
Is provided at a lower portion of the main body 1, and a fan (not shown) is installed inside the main body 1. Further, a suction port 17 is provided on the front surface, and a pre-filter 18 is attached to the suction port 17. A shelf (not shown) on which products are placed is installed in the storage section 4 in front of the chamber section 2.

In this way, by the operation of the fan provided in the compartment 3, the outside air passes through the pre-filter 18 from the suction port 17 and is sucked into the compartment 3, and further the air supply passage 9 provided in the chamber 2 is opened. The air passes through the filter 5 through the filter 5 and is supplied to the storage section 4 as clean air.

[0004] When it is necessary to increase the size of the above-mentioned storage facility with a clean device, storage facilities constructed in units are connected. In this case, conventionally, as shown in FIG. 5, a bolt through hole 12 is provided in the positive pressure portion on the upstream side of the filter 5 on the joint surface 16 formed by the side plate 2b of the main body 1, and the side plate 2b of the adjacent main body 1 Bolt through-holes 12 provided between joining surfaces 16
A bolt 13 is inserted through the nut and tightened by a nut 14 to connect the bolts.

However, in order to connect the joining surface 16 with the bolts 13 and the nuts 14, it is necessary to perform a connecting operation inside the main body 1 so as not to damage the internal components such as the filter 5 and the fan. Care must be taken, and the work is performed in a narrow space, so that the construction time is extremely long.

Further, since the bolt through hole 12 is provided in the positive pressure portion on the upstream side of the filter 5, unpurified air passes through the bolt through hole 12 from the air supply passage 9 and passes through the bolt 1. A sealing process is performed around the head of the bolt 13 with a caulking material 15 so as not to leak outside, and the entire circumference of the joining surface 16 of one main body 1 and the joining surface 16 of the adjacent main body is covered with the caulking material 15. Sealing had to be performed. Therefore, another filter 5 to be implemented
In addition to the processing by the caulking material 15 between the body and the main body 1, there is a problem that the work of the caulking material processing takes a long time and the like.

[0007]

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems in the conventional equipment, has no leak from the through-hole, and does not require the treatment of the caulking material on the joint surface. It is an object of the present invention to provide a storage facility with a clean device that can perform on-site construction and assembly work easily and in a short time.

[0008]

That is, according to the present invention, there is provided a storage facility with a clean device for achieving the above object.
As set forth in claim 1, in a storage facility with a clean device, a chamber is arranged on the rear side of the storage section with the front and rear faces opened, and a fan filter unit including a filter and a fan is arranged in the chamber. At least one location on the front edge of the side plate of the body forming the chamber,
A connection piece having a bolt through hole is attached. Further, the storage facility with a clean device according to the second aspect is characterized in that a chamber is disposed on the rear surface side of the storage part having the front and rear surfaces opened, and a fan filter unit including a filter and a fan is disposed in the chamber. In the storage facility with a device, a connecting piece having a bolt through hole is attached to at least one position of the front edge of the side plate of the main body forming the chamber, and provided at the front edge of the side plate of each main body of the storage facility with a clean device adjacent thereto. A bolt is inserted into a bolt through hole of a connecting piece, and both connecting pieces are fastened to connect the main bodies of adjacent storage equipment with a clean device.

[0009]

Embodiments of the present invention will be described below. FIG. 1 is a perspective view showing one embodiment of the storage facility with a clean device of the present invention, FIG. 2 is a longitudinal side view of one embodiment of the storage facility with a clean device of the present invention, and FIG. It is a cross section of a part.

As shown in FIGS. 1 to 3, the storage facility with a clean device of the present invention comprises a chamber 2, a compartment 3, and a storage 4 provided in a main body 1. Chamber part 2
Is formed by a top plate 2a, a side plate 2b, and a back plate 2c at a rear portion of the main body 1. The side plate 2b serves as a joint surface 16 of the chamber unit 2 when connecting the storage equipment with the clean device of the present invention in parallel. On the front side of the chamber section 2, filters 5 mounted on a filter mounting frame 6 are provided in three stages, and a space between the filter 5 and the filter mounting frame 6 is sealed with a caulking material 15. Further, the filter 5
An air supply passage 9 is formed by the top plate 2a, the side plate 2b, and the back plate 2c of the chamber portion 2 and communicates with the compartment 3.

On the other hand, the compartment 3 is provided below the chamber section 2 so as to communicate with the air supply passage 9, inside which a fan 7 is installed, and a pre-filter 18 is mounted on the front. Suction port 17 is provided. Further, the side plate 3b forming the compartment 3 is also provided in the chamber 2
As in the case of the side plate 2b that forms the partition wall 3, the joint surface 16 becomes the joint surface 16 of the compartment 3 at the time of connection.

The storage section 4 is provided in front of the chamber section 2 and is open at the front and rear sides. Further, on the front side, a shelf plate 7 is formed in eight steps at intervals.
The rear side of the storage section 4 is opposed to the filter 5 provided in the chamber section 2.

Thus, by the operation of the fan 7 installed in the compartment 3, the outside air is passed from the suction port 17 to the pre-filter 18.
Through the filter chamber 5 through the air supply path 9 to supply the purified air to the storage unit 4 to clean the product 8 placed on the shelf 7. The storage in the state is the same as the above-mentioned conventional equipment.

The present invention relates to an improvement in a structure for connecting adjacent units in a storage facility with a clean device configured and operating as described above. That is, in the present invention, as shown in FIGS. 1 to 3, at an appropriate position of the front edge of each of the side plates 2 b and 3 b of the chamber portion 2 and the compartment 3 of the main body 1 which becomes the joining surface 16 at the time of connection, The connecting piece 11 having the bolt through hole 12 is provided by welding or other appropriate means. In the case shown in the figure, two portions are provided in the chamber portion and one portion is provided in the compartment 3.

Therefore, in order to connect the main bodies 1 and 1, first, the main bodies 1 and 1 to be connected are arranged adjacent to each other, and the connecting pieces 1 provided at the above-mentioned locations of the respective main bodies 1 and 1 are opposed to each other.
1 are brought into close contact with each other, the positions of the through holes 12 provided in each are adjusted, and then the bolts 13 are inserted into the through holes 12 and tightened with the nuts 14 to connect the connecting pieces 11 to each other. Can be easily connected. As described above, in the present invention, since the bolt holes are not provided in the main bodies 1 and 1, there is no air leak from the joint surface 16. In the present invention, since the connecting operation is performed outside the main body 1, the operation is extremely easy. In addition, the installation position and the number of the connecting pieces 11 are not limited to those shown in the figure, and may be appropriately installed at appropriate places as needed.

In the above embodiment, an example was described in which one fan 7 was installed in the compartment 3 provided below the chamber section 2. However, the present invention is limited to such a configuration. For example, Japanese Patent Laid-Open No. 6-263206
The present invention can also be applied to a device using a plurality of fan filter units as described in Japanese Patent Application Laid-Open No. H10-260, 1988.

[0017]

As described above, in the storage facility with a clean device according to the present invention, since the connecting operation of the main bodies can be performed outside the main body, the storage facility with the clean device is used. Therefore, it is not necessary to perform the operation inside the main body, so that a wide working space is secured and the operation can be easily performed. Also, since there is no hole in the positive pressure part on the upstream side of the filter, there is no leakage from the connection joint surface,
Therefore, the treatment of the caulking material on the joint surface becomes unnecessary, and the product can be cleaned, and the on-site construction and assembly work can be performed easily and in a short time, and the construction time can be reduced. And so on.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of the present invention.

FIG. 2 is a vertical side view showing one embodiment of the present invention.

FIG. 3 is a cross-sectional plan view of a connecting portion according to one embodiment of the present invention.

FIG. 4 is a perspective view of a conventional storage facility with a clean device.

FIG. 5 is a cross-sectional plan view of a connecting portion in a conventional storage facility with a clean device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Main body 2 Chamber part 2a Top plate 2b Side plate 2c Back plate 3 Partition room 3b Side plate 4 Storage part 5 Filter 6 Filter mounting frame 7 Shelf 8 Product 9 Air supply path 10 Fan 11 Connection piece 12 Through hole 13 Bolt 14 Nut 15 Caulking Material 16 Joining surface 17 Suction port 18 Pre-filter

Claims (2)

[Claims] A chamber is formed in a storage facility with a clean device in which a chamber is disposed on the rear surface side of a storage section having an open front and rear surface, and a fan filter unit including a filter and a fan is disposed in the chamber. A storage device with a clean device, wherein a connection piece having a bolt through hole is attached to at least one portion of a front edge of a side plate of a main body. 2. A storage facility with a clean device, wherein a chamber is disposed on the rear side of a storage section having an open front and rear face, and a fan filter unit including a filter and a fan is disposed in the chamber. A connecting piece having a bolt through hole is attached to at least one portion of the side plate front edge of the main body to be connected, and bolts are inserted into the bolt through holes of the connecting piece provided at the side plate front edge of each main body of the storage facility with the adjacent cleaning device. A storage facility with a clean device, characterized in that the main bodies of adjacent storage devices with a clean device are connected with each other by inserting and fastening both connecting pieces.