JP2000182949A - Processing device and clean air supply method therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To supply clean air only to a required place and to remove an excessive load applied on a blower and a fan, etc., when a needless process device is omitted, for reduced running cost. SOLUTION: An air blow-out part 40 is provided above a processing part while an object to be processed corresponding to each process part for a specified process, and an air recovering part 43 is provided below the process part while corresponding to each process part. Clean air blown out downward perpendicularly of the air blow-out part 40 passes a process part installed in the device, and then recovered through the air recovering part 43 facing the air blow-out part 40 by an air suction mechanism 45 before being supplied again to the air blow-out part 40 through a return duct 44.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing apparatus such as a coating / developing processing system for applying and developing a resist solution on a glass substrate used for, for example, a liquid crystal display (LCD), and clean air in the apparatus. Related to the supply method.

[0002]

2. Description of the Related Art In an LCD manufacturing process, a photolithography technique similar to that used in the manufacture of semiconductor devices is used to form an ITO (Indium Tin Oxide) thin film and an electrode pattern on an LCD glass substrate. Used. In the photolithography technique, a photoresist is applied to a substrate, exposed, and further developed.

In such a coating / developing processing system, a clean air blowing section is provided at an upper portion so as to prevent particles from adhering to a substrate which is a processing target, and clean air is always supplied to reduce a downflow airflow. Has formed. Then, the air sucked below the floor from the opening leaching on the floor below the coating / developing system is reused through the return zone.

[0004]

The coating / developing processing system includes a plurality of resist coating devices, a plurality of developing devices, and the like, which are disposed with a conveyance path for a glass substrate to be processed interposed therebetween. However, depending on the number of processed glass substrates or the like, only some of these devices may be used. In such a case, the processing is performed after removing unnecessary devices. However, since the clean air blowing section installed above the coating / developing processing system and the air recovery section installed below are not provided for each processing apparatus, the apparatus is installed. The supply and suction (recovery) of the clean air are performed even in a place where no cleaning air is supplied. The clean air supplied at a place where this apparatus is not installed is unnecessary air from the viewpoint of preventing particles from adhering to the glass substrate to be processed. Since the air is sucked (recovered) and blown out again, an extra load is applied to the blower constituting the suction mechanism and the fan constituting the blowout section.

[0005] The present invention has been made in view of the above,
A processing apparatus and a processing apparatus capable of supplying clean air only to a necessary portion and eliminating an unnecessary load on a blower, a fan, and the like when the unnecessary processing apparatus is omitted as described above and reducing running costs. It is an object to provide a method for supplying clean air in an apparatus. In other words, compared to circulating the air in the entire room where the device is installed, it is possible to overwhelmingly reduce the "amount of air to move", thereby reducing the blower capacity, refrigeration capacity, number of filters, etc. It is an object of the present invention to provide a processing apparatus capable of performing the method and a method for supplying clean air in the processing apparatus.

[0006]

According to a first aspect of the present invention, there is provided a processing apparatus comprising: a plurality of processing units for performing a predetermined process on an object to be processed; And an air blowing section provided above the processing section and blowing clean air directly downward, and corresponding to each processing section, provided below the processing section and opposed to the air blowing section. An air collection unit that collects air that has passed through the processing unit in order to resupply air to the air blowing unit through a return duct by a suction force of an air suction mechanism.

According to a second aspect of the present invention, there is provided a processing apparatus, comprising: a processing section for performing a predetermined processing on an object to be processed; and an air passage section for surrounding the processing section and blowing air to the outside on a side portion. The formed processing unit protection cover member, corresponding to the processing unit, provided above the processing unit, and an air blowing unit that blows clean air directly downward, corresponding to the processing unit, The air passing through the processing unit is collected below the processing unit, facing the air blowing unit, and resupplying the air to the air blowing unit through a return duct by a suction force of an air suction mechanism. And an air recovery unit.

According to a third aspect of the present invention, there is provided a processing apparatus for performing a predetermined process on an object to be processed, and corresponding to the processing section, provided above the processing section and directing clean air directly below the processing section. An air blowout portion having a protruding blowout portion that can be blown out and that can blow out clean air directly below even outside the processing portion, and provided along an outer edge of the protruding blowout portion. A curtain member corresponding to the processing unit, and provided below the processing unit and opposed to the air blowing unit excluding the protruding blowing unit of the air blowing unit, and the suction force of the air suction mechanism. In order to resupply the air to the air blow-out unit through the return duct, an air collection unit that collects the air that has passed through the processing unit is provided.

According to a fourth aspect of the present invention, there is provided the processing apparatus according to any one of the first to third aspects, wherein the air blowing unit includes a blower fan and a blower side of the blower fan. And a filter provided.

A processing apparatus according to a fifth aspect of the present invention is the processing apparatus according to any one of the first to fourth aspects, wherein the air suction mechanism comprises: a heat exchanger for cooling the sucked air; It is characterized in that it comprises a blower that sucks air through the air collection unit and supplies the collected air to the air blowing unit through the return duct.

A processing apparatus according to a sixth aspect of the present invention is the processing apparatus according to any one of the first to fifth aspects, wherein an external air intake is provided to the air suction mechanism. And

According to a seventh aspect of the present invention, there is provided the processing apparatus according to any one of the first to sixth aspects, wherein a chemical trap is disposed between the air blowing section and the air collecting section. It is characterized by having been done.

According to a further aspect of the present invention, there is provided a processing apparatus for performing a predetermined process on an object to be processed, and corresponding to each of the processing units, provided above the processing unit and provided with a clean air. An air blowout section that blows out directly below, and corresponding to each of the processing sections, provided below the processing section, opposite to the air blowout section, and blown out from each of the air blowout sections. A box-shaped air recovery unit for temporarily storing the clean air that has passed through the processing unit; an air suction mechanism and a return duct for attracting the clean air stored in each of the air recovery units and re-supplying the air to the air blowing unit And characterized in that:

A processing apparatus according to a ninth aspect of the present invention is the processing apparatus according to the eighth aspect, wherein each of the air collecting units is
It is characterized by being freely connectable so that air can flow in and out of each other.

According to a tenth aspect of the present invention, there is provided a processing apparatus having a plurality of processing units and a supply unit for supplying clean air to each processing unit. It is characterized in that the presence / absence of at least one of the cleanness, temperature and humidity of the clean air can be set.

A processing apparatus according to an eleventh aspect of the present invention is a processing apparatus having a plurality of processing units and a supply unit for supplying clean air to each processing unit, and detects a maintenance time for the processing unit. Means for controlling the wind speed of clean air supplied to a predetermined processing unit among the processing units when the maintenance time is detected.

According to a twelfth aspect of the present invention, there is provided a method for supplying clean air in a processing apparatus according to the present invention, wherein an air blowing section is provided above the processing section so as to correspond to each processing section which performs a predetermined processing on the object to be processed. After the clean air is blown downward from the air blow-out section, the air passing through the processing section is caused to correspond to each processing section by the suction force of an air suction mechanism, and the air provided below the processing section. It is characterized in that it is collected through the collection unit and is supplied again to the air blowing unit through the return duct.

According to a thirteenth aspect of the present invention, there is provided a method for supplying clean air in a processing apparatus according to the present invention, wherein an air blowing section is provided above a processing section for performing a predetermined processing on an object to be processed, and clean air is directly discharged from the air blowing section. After being blown out toward the processing unit, the air that has passed through the processing unit is collected by an air collecting unit provided below the processing unit, corresponding to each processing unit by the suction force of an air suction mechanism, and a return duct is provided. The air particles are supplied again to the air blow-out unit, and an air passage portion is formed on a side surface of a cover member for protecting the processing unit that surrounds the processing unit, and the air is blown out to the outside through the air passage portion, whereby external particles are discharged. It is characterized by forming an airflow that prevents intrusion of air.

According to a fourteenth aspect of the present invention, there is provided a method for supplying clean air in a processing apparatus, comprising: an air blowing part having a blowing part projecting outward from a processing part above a processing part for performing a predetermined processing on an object to be processed. Is provided, and after the clean air is blown out from the air blow-out section toward directly below, the air passing through the processing section is caused to correspond to each of the processing sections by a suction force of an air suction mechanism, and is provided below the processing section. While collecting through the provided air collecting unit and supplying it again to the air blowing unit via the return duct, the clean air is blown out directly from the protruding blowing unit to the outside of the processing unit, so that external particles are removed. It is characterized by forming an airflow that prevents intrusion.

In the processing apparatus according to the first aspect of the present invention, an air blowing section is provided above the processing section so as to correspond to each processing section for performing a predetermined process on the object to be processed. Correspondingly, an air recovery section provided below the processing section is provided. Therefore, the clean air blown directly downward from the air blowout unit passes through the processing unit installed in the apparatus, and then is suctioned by the air suction mechanism.
The air is recovered through the air recovery unit facing the air blowing unit, and is supplied again to the air blowing unit via the return duct. That is, since an air blowing unit and an air collecting unit are provided for each processing device, for example,
In the coating / developing processing system, the processing apparatus is unnecessary, and when the processing apparatus is omitted, the air blowing section, the air recovery section, and the like provided in the processing apparatus are also removed. For this reason, in the coating / developing processing system, it is possible to supply clean air only to necessary parts (processing equipment), and if unnecessary processing equipment is omitted, no extra load is applied to the blower, fan, etc. The running cost can be reduced as compared with the case of FIG.

According to a second aspect of the present invention, an air blowing section is provided above the processing section so as to correspond to each processing section for performing a predetermined process on the object to be processed. Correspondingly, an air recovery section provided below the processing section is provided, and an air passage section is formed on a side surface of a cover member for protecting the processing section surrounding the processing section. Therefore, the clean air blown directly downward from the air blowout unit passes through the processing unit installed in the device,
By the suction force of the air suction mechanism, the air is recovered through the air recovery unit facing the air blowing unit, and is again supplied to the air blowing unit via the return duct. An airflow that prevents particles from entering can be formed.
For this reason, for example, in a coating and developing processing system,
Clean air can be supplied only to the necessary places (processing equipment), and if unnecessary processing equipment is omitted, no extra load is applied to the blower, fan, etc., and the running cost can be reduced compared to the past. And adhesion of particles to the object to be processed can be more effectively prevented.

According to a third aspect of the present invention, an air blowing section is provided above the processing section so as to correspond to each processing section for performing a predetermined process on the object to be processed. Correspondingly, an air recovery section provided below the processing section is provided. In addition, a protruding blow-out portion capable of blowing clean air directly below the processing portion is provided, and a curtain member is provided along an outer edge of the protruding blow-out portion. Therefore, the clean air blown directly downward from the air blowout section passes through the processing section installed in the apparatus, and then, by the suction force of the air suction mechanism, passes through the air recovery section facing the air blowout section. It is collected and supplied again to the air blowing section via the return duct. On the other hand, a down-blow airflow can be formed between the curtain member and the processing section through the protruding blowing section. For this reason, when performing maintenance processing on the processing unit, it is possible to prevent external particles from entering the processing unit when an operator enters the curtain member.

According to a fourth aspect of the present invention, in the processing apparatus of the present invention, the air blowing section includes a blowing fan and a filter provided on a blowing side of the blowing fan. Therefore, clean air that has been cleaned by the filter immediately before blowing is supplied to each processing apparatus.

According to a fifth aspect of the present invention, since the air suction mechanism has a heat exchanger and a blower, when the air is sucked and recovered through the air recovery section,
The air can be cooled and then supplied to the air blowing section via a return duct.

According to a sixth aspect of the present invention, the air suction / suction mechanism is provided with an external air intake. For this reason, the air leaked out of the apparatus can be supplemented with fresh external air.

In the processing apparatus according to the present invention, since a chemical trap is disposed between the air blowing section and the air collecting section, it is possible to supply cleaner air.

In the processing apparatus according to the present invention, a box-shaped air recovery section for temporarily storing clean air blown out from each air blowing section and passing through each processing section is provided separately from the return duct and the like. Therefore, it is possible to perform a uniform suction or a suction whose distribution is changed as required.

In the processing apparatus according to the ninth aspect of the present invention, the respective air recovery sections can be connected to each other so that air can flow in and out of each other.

[0029] In the processing apparatus of the present invention described in claim 10,
Since it is possible to set at least one of the control of the degree of cleanness, temperature, and humidity of the supplied clean air for each processing unit, an optimal and inexpensive device configuration can be obtained.

[0030] In the processing apparatus according to the eleventh aspect of the present invention,
It has means for detecting the maintenance time of the processing apparatus, and when the maintenance time is detected, the wind speed of the clean air supplied to a predetermined processing unit among the processing units is controlled. It is possible to prevent particles and the like from entering the processing section.

According to the method for supplying clean air in the processing apparatus of the present invention, since the air blowing section and the air recovery section are provided and supplied corresponding to each processing apparatus, a necessary portion (processing apparatus) is provided. 2), clean air can be supplied only when unnecessary processing equipment is omitted, and no extra load is applied to the blower, the fan, etc., and the running cost can be reduced as compared with the conventional case.

According to the method for supplying clean air in the processing apparatus according to the thirteenth aspect of the present invention, by blowing air to the outside through the air passage portion, it is possible to form an airflow for preventing intrusion of external particles. Therefore, it is possible to more effectively prevent particles from adhering to the object.

According to the method for supplying clean air in the processing apparatus of the present invention, a down-blow airflow can be formed outside the processing section through the protruding blowing section. For this reason, when performing a maintenance process on the processing unit, it is possible to prevent external particles from entering the processing unit when an operator approaches.

[0034]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the drawings. First, an ITO thin film and an electrode pattern are formed on a glass substrate for LCD, which is a combination of the processing apparatus of the present invention. The overall configuration of the photoresist coating / developing processing system will be described.

As shown in FIG. 1, in front of the coating / developing processing system 1, a loader / unloader unit 2 for loading / unloading the glass substrate G with respect to the coating / developing processing system 1.
Is provided. This loader / unloader unit 2 includes:
A cassette mounting table 3 on which a cassette C containing, for example, 25 glass substrates G is aligned and mounted at a predetermined position;
Take out the glass substrate G to be processed from each cassette C,
Further, a loader / unloader 4 for returning the glass substrate G, which has been processed in the coating / developing processing system 1, to each cassette C is provided. The illustrated loader / unloader 4 moves in the direction in which the cassettes C are arranged by traveling of the main body 5, takes out the glass substrate G from each cassette C by the plate-like tweezers 6 mounted on the main body 5, and
The glass substrate G is returned. Further, on both sides of the tweezers 6, there are provided substrate positioning members 7 for holding and positioning the four corners of the glass substrate G.

At the center of the coating and developing system 1,
Corridor-like transport paths 10, 11 arranged in the longitudinal direction are the first.
Are provided in a straight line via the transfer unit 12 of
Various processing apparatuses for performing each processing on the glass substrate G are arranged on both sides of the transport paths 10 and 11.

In the illustrated coating / developing processing system 1, for example, two cleaning devices 16 for cleaning the glass substrate G by brush and high-pressure jet water are provided on one side of the transport path 10. Has been established. In addition, transport path 1
Two developing devices 17 are arranged side by side on the opposite side with respect to 0,
Two heating devices 18 are stacked next to each other.

Further, on one side of the transport path 11, an adhesion device 20 for hydrophobically treating the glass substrate G before applying the resist liquid to the glass substrate G is provided. Below the adhesion device 20, a cooling device is provided. A cleaning device 21 is provided. Further, adjacent to the adhesion device 20 and the cleaning device 21, two heating devices 22 are stacked and arranged in two rows. On the opposite side of the transport path 11, a resist coating device 23 that forms a resist film on the surface of the glass substrate G by applying a resist liquid on the surface of the glass substrate G is disposed. Although not shown, an exposure device or the like for exposing a predetermined fine pattern to a resist film formed on the glass substrate G via a second transfer unit 28 is provided on a side portion of the coating device 23. . The second transfer unit 28 includes a loading / unloading tweezers 29 for loading and unloading the glass substrate G, and a delivery table 30.

The above processing units 16 to 18 and 20 to
23 is disposed on both sides of the transport paths 10 and 11 with the entrance of the glass substrate G facing inward. First
Transfer device 25 moves on the transfer path 10 to transfer the glass substrate G between the loader / unloader unit 2, each of the processing devices 16 to 18, and the first transfer unit 12, and the second transfer device 26 Move on the transfer path 11 to transfer the glass substrate G between the first transfer unit 12, the second transfer unit 28, and each of the processing devices 20 to 23.

Each of the transfer devices 25 and 26 has a pair of upper and lower arms 27 and 27, respectively.
When accessing 18 and 20 to 23, the processed glass substrate G is unloaded from the chamber of each processing apparatus by one arm 27, and the unprocessed glass substrate G is loaded into the chamber by the other arm 27. Is configured.

FIG. 2 is a perspective view showing a schematic configuration of a resist coating unit 23 and a heating unit 22 of the processing units constituting the coating / developing processing system shown in FIG. 1, and FIG. 3 is a sectional view thereof. .

As shown in FIG.
The heating device 22 and the heating device 22 are usually provided so as to constitute one processing unit with the transport path 11 interposed therebetween. By connecting a plurality of processing units each including a pair of processing apparatuses in this manner, a required number of resist coating apparatuses 23 and heating apparatuses 22 are provided according to the number of processed glass substrates G to be processed. . That is, each processing apparatus is provided with a caster 35 at a lower portion, and is moved for each processing apparatus to be disposed on a line or removed from the line, so that the resist coating apparatus 23 and the heating apparatus 22 Can be adjusted.

In this embodiment, as described above, one processing unit is constituted by the resist coating device 23 and the heating device 22, and the air suction mechanism 45 and the return duct 44 described later are provided separately for each processing device. And is provided for each processing unit. Both the air suction mechanism 45 and the return duct 44 include the air blowing section 40 and the air collecting section 43.
Although it can be provided corresponding to each processing device as described above, the configuration can be simplified if provided for each processing unit as in the present embodiment. The air collecting sections 43 are separated and independent for each unit, and are connected by a joint pipe 43b when combined with the system.

The resist coating device 23 and the heating device 22, which are the processing devices according to the present embodiment, constitute a set of processing units with the conveyance path 11 interposed therebetween. A spin chuck 31 on which a resist is discharged and uniformly spread on the glass substrate G while being rotated corresponds to a processing unit.
In 2, the hot plate 32 that heats the mounted glass substrate G by heating is equivalent to the processing unit. In the transport path 11, a transport device 26 that travels to take the glass substrate G in and out of the resist coating device 23 and the heating device 22 corresponds to a processing unit.

In the resist coating device 23, the air blowing unit 40 is located above the spin chuck 31 and the heating device 2.
2 is provided above the hot plate 32, and in the transfer path 11 is provided above the transfer device 26. The air blowing section 40 includes a blower fan 41 and the blower fan 4.
And a filter 42 disposed closer to the outlet side than the filter 42. The filter 42 includes an air recovery unit 43 described later.
Although it is possible to dispose the collected air in the return duct 44, the collected air may come into contact with minute floating particles while passing through the air collection unit 43 or the return duct 44. As in the embodiment, it is preferable to dispose it at a stage subsequent to the blower fan 41, that is, immediately before blowing out the air. Of course, in addition to the filter 42, chemical traps 61 and 62 can be further disposed in the return duct 44 or the like. This makes it possible to supply cleaner air.

The air collecting section 43 is located at a position facing the air blowing section 40, that is, the spin chuck 31.
, Below the hot plate 32, and below the transfer device 26, respectively. The air collecting section 43 has a perforated plate 43a having a plurality of air passage holes formed on an upper surface, and has a structure in which air is collected through the air passage holes by the operation of an air suction mechanism 45 described later. . Further, in the present embodiment, the air collection unit 43 is always
The moving casters 35 are provided at the lower part of the frame forming the air collecting section 43 because the moving casters 35 are provided integrally with the processing device. Further, in the present embodiment, since the air suction mechanism 45 and the return duct 44 are provided for each set of processing units, the air collection units 43 provided in each processing device are connected to each other via the joint pipe 43b. ing.

A resist coating device 2 which is one of the processing devices
A cover member 31 for protecting the processing unit is provided around the spin chuck 31 of No. 3 to protect the spin chuck 31.
a is provided. Cover member 3 for protecting this processing section
1 is provided with a maintenance window 31b on the side surface thereof. In the present embodiment, the maintenance window 31b is used as an air passage portion, and is provided so that clean air can be positively discharged to the outside through the window 31b. As a result, the inside of the processing apparatus becomes a positive pressure, and the outside becomes a negative pressure atmosphere. Therefore, intrusion of external particles from the window 31b is positively prevented. Similarly, a cover member 32a for protecting the processing section is provided around the hot plate 32 of the heating device 22, and an air passage section 32b is formed on the side surface of the cover member 32a for protecting the processing section. I have.

The air suction mechanism 45 has a blower 45a and a case 45b for holding the blower 45a, and the holding case 45b is connected to the air collection unit 43 of any of the processing units constituting the processing unit by an exhaust duct. 45c. The holding case 45b is provided with an external air intake 45d for taking in fresh external air, and the exhaust duct 45c is provided with a heat exchanger 45e for cooling the collected air. . The air suction mechanism 45 may be disposed on the floor on which the processing apparatus is installed. However, it is necessary to draw out the return duct 44 to be connected in advance and bury the predetermined number under the floor. Is also possible.

The holding case 45b is further connected to the air blowing section 40 via a return duct 44. More specifically, three air blowing portions 40 are provided in front of the blower fan 41 constituting the air blowing portion 40.
Are provided with a communication duct 46 that communicates with each other. The return duct 44 is connected to the communication duct 46. In addition, a refrigerator (not shown) for cooling the air resupplied to the air blowing unit 40 may be provided at an appropriate position of the return duct 44.

As described above, the air blowing section 40 and the air collecting section 43 are provided so as to face above or below the processing section, but in the present embodiment, the air blowing section 40 is provided with the device. A blowing portion 40a protruding outside is provided. The protruding blowout portion 40a is attached to the air blowout portion 40 disposed above the resist coating device 23 provided with the maintenance window portion 31b.
Is formed so as to protrude outward on the same side as the surface on which the. Further, a curtain member 48 made of a plastic film or the like is provided so as to hang down along the outer surface of the protruding blowout portion 40a. When the maintenance work is performed, the worker enters the inside of the curtain member 48 and performs a predetermined work through the window 31b. In this manner, the protruding blowout part 40a is provided, and the cleaning is performed by down blow. By supplying air, it is possible to prevent external particles from entering through the window 31b due to turbulence in the airflow when the operator enters the inside of the curtain member 48.

According to the present embodiment, in each of the resist coating device 23, the heating device 22, and the processing device of the transfer path 11, the air blowout disposed above each of the spin chuck 31, the hot plate 32, and the transfer device 26. Part 40
, Clean air is supplied downward. Then, in these processing units, the clean air supplied so as to prevent particles from adhering to the glass substrate G as the object to be processed is then supplied to the blower 45 constituting the air suction mechanism 45.
The air is sucked by the operation of a, and is collected via the air collection unit 43 provided correspondingly. In addition, air is discharged to the outside of the apparatus through the window 31b of the resist coating device 23 and the air passage 32b of the heating device 22. Therefore, intrusion of external particles through the window 31b and the like can be prevented. Since a part of the clean air leaks to the outside in this way, the amount of the collected clean air alone will result in a shortage of the clean air to be supplied next. The air is sucked from the external air inlet 45d formed in the case 45b, supplied to the air blowing unit 40 together with the collected air through the return duct 44, and passed through the filter 42, so that the air is cleaned again toward the processing unit as clean air. Supplied.

As described above, according to the present embodiment, since the air blowing section 40 and the air collecting section 43 are provided for each processing apparatus, when an unnecessary processing apparatus is removed, Air blowing section 40 and air collecting section 4
Since 3 is removed together, it is possible to prevent an unnecessary load from being applied to the air suction mechanism 45 as in the related art.

Note that, as shown in FIG.
A step table 51 used for maintenance may be provided on the side where 8 is formed, and a function as an air suction mechanism may be provided in the step table 51 so that the air in the air recovery section 43 may be sucked.

Further, the nature of the air supplied through the return duct may be changed for each processing unit. For example, air having different properties from the respective return ducts corresponding to the respective processing units indicated by reference numerals 52, 53 and 54 in FIG. 4, for example, air whose temperature and humidity are controlled from the return duct 52, and only cleaning from the return duct 53 are performed. Alternatively, it is also possible to supply clean air from the return duct 54 and air with a low flow velocity. That is, it is possible to set an optimal and inexpensive apparatus configuration by setting whether or not to control the cleanness, temperature, humidity, and the like of the supplied clean air for each processing unit.

Further, as in the configuration of the return ducts indicated by reference numerals 71 and 72 in FIG. 5, the air may be broadly divided into a spin system, a transport system, and the like, and the air controlled as described above, for example, may be supplied.

Further, when a person enters or exits an operation surface such as a front surface or a side surface of the apparatus, or when a front cover of the processing unit is opened, the state is detected by a pressure sensor, a wind speed sensor, a door switch, or the like. Alternatively, the wind speed of a necessary part may be controlled.

In the above description, the case where the resist coating device 23 and the heating device 22 constituting the coating / developing processing system are provided with the air blowing section 40 and the like as the processing device is described as an example. Of course, it is also possible to adopt a configuration in which such an air blowing unit 40 or the like is provided in another processing apparatus.

[0058]

According to the processing apparatus of the present invention, the air blowing section and the air collecting section are provided for each processing apparatus. When the processing device is unnecessary and the processing device is omitted, the air blowing unit, the air recovery unit, and the like provided in the processing device are also removed. Therefore, in the coating / developing processing system, necessary parts (processing equipment)
In the case where unnecessary processing equipment is omitted, unnecessary load is not applied to the blower, the fan and the like, and the running cost can be reduced as compared with the related art.

According to the processing apparatus of the present invention, for example, in a coating / developing processing system, clean air can be supplied only to a necessary portion (processing apparatus), and unnecessary processing apparatuses can be omitted. In this method, no extra load is applied to the blower, the fan, etc., so that the running cost can be reduced as compared with the related art, and the adhesion of particles to the object can be more effectively prevented.

According to the processing apparatus of the third aspect of the present invention, the clean air blown directly downward from the air blowing section passes through the processing section installed in the apparatus, and
Due to the suction force of the air suction mechanism, the air is recovered through the air recovery section facing the air blowing section, and is again supplied to the air blowing section via the return duct. On the other hand,
A down-blow airflow can be formed between the curtain member and the processing section through the protruding blowing section. For this reason, when performing maintenance processing on the processing unit, it is possible to prevent external particles from entering the processing unit when an operator enters the curtain member.

According to a fourth aspect of the present invention, the air blowing section includes a blower fan and a filter provided on the blower side of the blower fan. Therefore, clean air that has been cleaned by the filter immediately before blowing is supplied to each processing apparatus.

According to the processing apparatus of the present invention, since the air suction mechanism has a heat exchanger and a blower, when the air is sucked and collected through the air collecting section, The air can be cooled and then supplied to the air blowing section via a return duct.

According to the processing apparatus of the present invention, the air suction / suction mechanism is provided with an external air intake. For this reason, the air leaked out of the apparatus can be supplemented with fresh external air.

According to the processing apparatus of the present invention, since the chemical trap is arranged between the air blowing section and the air collecting section, it is possible to supply more clean air.

According to the processing apparatus of the present invention, the box-shaped air recovery section for temporarily storing the clean air blown out from each air blowing section and passing through each processing section is separate from the return duct and the like. , It is possible to perform a uniform suction or a suction whose distribution is changed as required.

According to the processing apparatus of the ninth aspect of the present invention, the respective air recovery units can be connected to each other so that air can flow in and out of each other.

According to the processing apparatus of the present invention, the cleanliness of the supplied clean air is determined for each processing section.
Since at least one control of temperature and humidity can be set, an optimal and inexpensive device configuration can be obtained.

According to the eleventh aspect of the present invention, there is provided the processing apparatus of the present invention, which has a means for detecting a maintenance time of the processing apparatus, and when the maintenance time is detected, supplies to a predetermined processing unit among the processing units. Since the wind speed of the clean air is controlled, it is possible to prevent particles and the like from entering a predetermined processing unit during maintenance.

According to the method for supplying clean air in the processing apparatus of the present invention, since an air blowing section and an air recovery section are provided and supplied for each processing apparatus, a necessary portion (processing apparatus) is provided. 2), clean air can be supplied only when unnecessary processing equipment is omitted, and no extra load is applied to the blower, the fan, etc., and the running cost can be reduced as compared with the conventional case.

According to the method for supplying clean air in the processing apparatus according to the thirteenth aspect of the present invention, by blowing air to the outside through the air passage section, it is possible to form an air flow for preventing intrusion of external particles. Therefore, it is possible to more effectively prevent particles from adhering to the object.

According to the method for supplying clean air in the processing apparatus of the present invention, it is possible to form a down-blow airflow outside the processing section through the protruding blowing section. For this reason, when performing a maintenance process on the processing unit, it is possible to prevent external particles from entering the processing unit when an operator approaches.

[Brief description of the drawings]

FIG. 1 is a perspective view of a coating / developing processing system according to an embodiment of the present invention.

FIG. 2 is a perspective view showing a schematic configuration of a resist coating device and a heating device among processing devices constituting the coating / developing processing system shown in FIG.

FIG. 3 is a sectional view of FIG. 2;

FIG. 4 is a cross-sectional view of a resist coating device and a heating device according to another embodiment of the present invention.

FIG. 5 is a sectional view of a coating / developing processing system according to another embodiment of the present invention.

[Explanation of symbols]

 26 Conveying device 31 Spin chuck 31a Cover member 32 Hot plate 32a Cover member 40 Air blow-out part 40a Protruding air draw-out part 41 Blower fan 42 Filter 43 Air recovery part 44 Return duct 45 Air suction mechanism 45a Blower 45d External air intake 45e Heat Exchanger 48 Curtain member G Glass substrate

Claims (14)

[Claims] 1. A plurality of processing units for performing predetermined processing on an object to be processed, and provided above the processing units corresponding to the processing units,
An air blowing section for blowing clean air directly downward, corresponding to each processing section, provided below the processing section and opposed to the air blowing section, and provided with a return duct by a suction force of an air suction mechanism. And an air recovery unit that recovers air that has passed through the processing unit in order to resupply the air to the air blowing unit through the air processing unit. 2. A processing unit for performing a predetermined processing on an object to be processed, and a cover member for protecting the processing unit, the processing unit surrounding the processing unit and having an air passage formed on a side surface for blowing air to the outside. Corresponding to the processing unit, an air blowing unit provided above the processing unit and blowing clean air directly downward, and corresponding to the processing unit, the air blowing below the processing unit. An air collection unit that is provided to face the unit and collects air that has passed through the processing unit in order to resupply air to the air blowing unit through a return duct by a suction force of an air suction mechanism. Characteristic processing device. A processing unit for performing predetermined processing on the object to be processed; a processing unit provided above the processing unit corresponding to the processing unit, and capable of blowing clean air directly below the processing unit; An air blowing portion having a protruding blowing portion that can blow clean air directly downward even outside the portion, a curtain member provided along an outer edge of the protruding blowing portion, Then, below the processing unit, the air blowing unit is provided to face the air blowing unit excluding the blowing unit protruding outside the processing unit, and the suction force of the air suction mechanism causes the return unit to pass through the return duct. A processing apparatus comprising: an air recovery unit that recovers air that has passed through the processing unit in order to resupply air to the air blowing unit. 4. The processing apparatus according to claim 1, wherein the air blowing unit includes a blower fan,
A processing device, comprising: a filter provided on a blowing side of the blower fan. 5. The processing apparatus according to claim 1, wherein the air suction mechanism removes the air through a heat exchanger that cools the sucked air and the air recovery unit. A processing apparatus, comprising: a blower that sucks air and supplies the collected air to the air blowing unit via the return duct. 6. The processing apparatus according to claim 1, wherein an external air intake is provided to the air suction mechanism. 7. The processing apparatus according to claim 1, wherein a chemical trap is disposed between the air blowing section and the air recovery section. . 8. A plurality of processing units for performing predetermined processing on the object to be processed, and provided above the processing units corresponding to the processing units,
An air blowing section for blowing clean air directly downward, corresponding to each of the processing sections, provided below the processing section, opposite to the air blowing section, and blown from each of the air blowing sections. A box-shaped air collection unit that temporarily accumulates the clean air that has passed through each of the processing units; and an air suction mechanism for attracting the clean air accumulated in each of the air collection units and re-supplying the air to the air blowing unit. A processing device, comprising: a return duct. 9. The processing apparatus according to claim 8, wherein each of the air recovery units is freely connectable so that air can flow in and out of each other. 10. A processing apparatus comprising: a plurality of processing units; and a supply unit for supplying clean air to each processing unit, wherein the cleanliness of the supplied clean air is determined for each of the processing units.
A processing apparatus characterized in that the presence or absence of at least one of temperature and humidity can be set. 11. A processing apparatus comprising: a plurality of processing units; and a supply unit for supplying clean air to each processing unit, wherein: a unit for detecting a maintenance time for the processing unit; A processing device for controlling a wind speed of clean air supplied to a predetermined processing unit among the processing units. 12. An air blowing unit is provided above the processing unit in correspondence with each processing unit that performs a predetermined process on the object to be processed, and after the clean air is blown from the air blowing unit directly downward, The air that has passed through the processing unit is collected by an air collection unit provided below the processing unit by the suction force of the air suction mechanism, and is returned to the air blowing unit via a return duct. A method for supplying clean air in a processing apparatus, characterized by supplying. 13. An air blowing section is provided above a processing section for performing a predetermined processing on the object to be processed, and after the clean air is blown downward from the air blowing section, air passing through the processing section is removed by the air. By the suction force of the suction mechanism, corresponding to each of the processing units, the air is recovered through an air recovery unit provided below the processing unit and supplied again to the air blowing unit via a return duct, while surrounding the processing unit. Forming an air passage on the side surface of the cover member for protecting the processing unit, and blowing air to the outside through the air passage to form an airflow preventing entry of external particles. How to supply clean air. 14. An air blowing section having a blowing section protruding outward from the processing section is provided above a processing section for performing a predetermined processing on the object to be processed, and clean air is blown from the air blowing section directly downward. After that, the air that has passed through the processing unit is collected by an air collecting mechanism provided below the processing unit by the suction force of an air suction mechanism, and the air is blown out through a return duct. While supplying the air again to the processing unit, the cleaning air is blown out from the blowing unit protruding out of the processing unit to the outside of the processing unit just below, thereby forming an airflow that prevents intrusion of external particles. A method for supplying clean air in a processing apparatus.