JP2000168094A - Manufacture of ink-jet head - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacture for ink-jet heads whereby costs of an actuator substrate can be reduced and a plurality of actuator substrates can be processed efficiently. SOLUTION: A conductive layer is formed to all faces of an actuator substrate 2. The conductive layer is partly removed, and electrodes 5B are formed in jet channels 12 and electrodes 5A are formed in dummy channels 11. The conductive layer of a rear end face 2B of the actuator substrate 2 is partly removed to be separated from the electrodes 5B and connected to all electrodes 5A. A conductive pattern is thus formed. The rear end face 2B of the actuator substrate 2 is coated with an insulating plate 17. Openings 17A are formed to parts of the plate 17 corresponding to the jet channels 12.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an ink jet head.

[0002]

2. Description of the Related Art Among non-impact type printing apparatuses whose market is greatly expanding today, the ink jet type printing is considered to be the simplest in principle and easy to realize multiple gradations and colors. Device. Above all, a drop that ejects only ink drops used for printing
The on-demand type is rapidly spreading due to its good injection efficiency and low running cost.

The Kaiser type disclosed in Japanese Patent Publication No. 53-12138 as a drop-on-demand type,
A typical example is a thermal jet type disclosed in Japanese Patent Publication No. 61-59914.
However, the former is difficult to miniaturize, and the latter requires the heat resistance of the ink to apply high heat to the ink, and each has a difficult problem.

Japanese Patent Laid-Open No. 63-247051 proposes a new method for solving the above-mentioned defects simultaneously.
This is a shear mode type disclosed in Japanese Patent Application Laid-Open Publication No. HEI 10-303, 1988.

A conventional shear mode type ink jet head 100 will now be described with reference to FIGS. 11, 13 and 14.
This will be described with reference to FIG.

In FIG. 11, a conventional shear mode ink jet head 100 has a bottom wall 24, a top wall (cover plate) 10, and a piezoelectric side wall 3 therebetween. The piezoelectric side wall 3 is erected from the bottom wall 24 and includes a lower wall 26 polarized downward in the figure and an upper wall 25 polarized upward in the figure. The piezoelectric side wall 3 is paired with the adjacent piezoelectric side wall 3 to form an ejection channel 12 for ejecting ink therebetween, and a dummy channel 11 for not ejecting ink is provided between the next pair of piezoelectric side walls 3. Has formed.

On the front surface of the ink jet head 100,
Nozzle plate 15 having nozzles 16 (see FIG. 13)
Are fixed on both sides of each piezoelectric side wall 3 with electrodes 5A, 5B.
Is provided as a metallized layer. Each of the electrodes 5A and 5B is covered with an insulating layer (not shown) for insulating the ink. The electrode 5A provided in the dummy channel 11 is connected to an actuator drive circuit,
The electrode 5B provided in the injection channel 12 is grounded.

Next, a method for manufacturing the ink jet head 100 will be described. First, the actuator substrate 2 is formed by bonding a piezoelectric ceramic layer polarized upward in the figure to a piezoelectric ceramic layer polarized downward in the figure. Then, a groove parallel to the actuator substrate 2 is formed by cutting with a diamond cutter or the like to form the piezoelectric side wall 3 including the upper wall 25 and the lower wall 26. The electrodes 5A and 5B are formed on the side surfaces of the thus formed piezoelectric side wall 3 by vacuum deposition or the like, and an insulating layer is provided on the electrodes 5A and 5B.

A cover plate 10 is adhered to the upper surface of the piezoelectric side wall 3, and every other groove between the piezoelectric side walls 3 forms a dummy channel 11 and an ejection channel 12. Then, the nozzle plate 15 in which the nozzle 16 is perforated is bonded to one end of the ejection channel 12 and the dummy channel 11 such that the nozzle 16 corresponds to the ejection channel 12.

The electrode 5 connected to the piezoelectric side wall 3
By applying a voltage to A and 5B, the piezoelectric side wall 3 undergoes a piezoelectric thickness-shear deformation in a direction to increase the volume of the ejection channel 12, and after a predetermined time elapses, the application of the voltage is stopped, and the volume of the ejection channel 12 is reduced. From the increasing state to the natural state, pressure is applied to the ink in the ejection channel 12, and the ink droplet is ejected from the nozzle 16.

As described above, the dummy channels 11 and the ejection channels 12 are formed alternately in the ink jet head 1. This means that unless the dummy channels 11 are provided between the ejection channels 12, the adjacent ejection channels 12 share the piezoelectric side wall 3 therebetween, and the ejection action of the ink is independently performed for each ejection channel 12. This is because it cannot be performed. As a method of forming such a dummy channel 11,
There is a structure as shown in FIG.

In FIG. 14, dummy channel 11
Is formed by cutting the upper portion of the actuator substrate 2 with a diamond cutter or the like. That is, a groove 4 serving as the dummy channel 11 is horizontally cut from one end of the actuator substrate 2 by a rotating diamond cutter (not shown), and the diamond cutter is raised when it moves a predetermined distance. To the closed shape. At this time, a substantially arc-shaped rising portion 23 having a predetermined length (L) is provided at the rear portion of the concave groove 4.
Is formed, and the ink flows into the dummy channel 1
Prevent it from flowing into 1.

[0013]

However, the ink jet head 100 having the dummy channel 11 having the above structure has the following problems. First, groove 4
Since the rising portion 23 formed at the rear portion has a predetermined length (L), the actuator substrate 2 becomes longer by that amount, and the cost of the actuator substrate 2 increases. It is known that the ejection cycle of the ink is determined by the length of the ejection channel 12 and the propagation speed of the pressure wave in the ink. There was a portion that did not perform the deformation operation, and the injection cycle was long. When the length of the ejection channel 12 is shortened to shorten the ejection cycle, the length of the deformable piezoelectric side wall 3 is also shortened, a high voltage is required at the time of ink ejection, and power consumption is increased.

Next, the ink jet head 100 is actually
When manufacturing the device, considering the case where the plurality of actuator substrates 2 are arranged in parallel and the dummy channel 11 is continuously processed, the work efficiency is deteriorated. That is, it is necessary to repeat the process of moving the diamond cutter in the horizontal direction to cut the individual actuator substrates 2 arranged in parallel, and raising the diamond cutters after moving a predetermined distance.

SUMMARY OF THE INVENTION The present invention has been made to solve such a problem, and an object of the present invention is to shorten the dummy channel and the ejection channel to reduce the cost of the actuator substrate on which they are formed. Provided is a method for manufacturing an ink jet head which can reduce the ink jetting cycle, and can reduce the work efficiency even when processing a dummy channel by simultaneously arranging a plurality of actuator substrates in parallel. It is in.

[0016]

According to a first aspect of the present invention, there is provided an actuator substrate comprising:
An ejection channel for ejecting ink, a dummy channel provided adjacent to the ejection channel and not ejecting ink, a piezoelectric sidewall deformed by electric charges to pressurize the ink in the ejection channel, and provided on the piezoelectric sidewall. A plurality of electrodes provided and a plurality of conductive patterns respectively connecting the electrodes to control means, wherein the conductive pattern is formed on at least a surface of the actuator substrate to which ink is supplied. A first step of forming a conductive layer to be at least a part of the conductive layer connected to the electrode, removing a part of the conductive layer, the electrode in the ejection channel and the electrode in the dummy channel, A second step of forming the conductive layer as a part of the conductive pattern by electrically separating A third step of covering the surface of the data substrate to which ink is supplied with an insulating plate-like member, and after the third step, supplying ink to a portion of the plate-like member corresponding to the ejection channel. And providing a fourth step.

Therefore, after electrically separating the electrode in the dummy channel and the electrode in the ejection channel, the rear end of the opened dummy channel is closed by the plate-like member, and the opening provided in the plate-like member is closed. Since the ink is supplied to the ejection channel from the nozzle, it is not necessary to form a rising portion having a predetermined length (L) behind the dummy channel, the dummy channel can be shortened, and the actuator substrate on which the dummy channel is formed can be formed. Can be reduced, and the ink ejection cycle can be shortened. Also, when a plurality of actuator substrates are arranged in parallel to continuously process a dummy channel, the dummy channel can be formed in a straight line from the front end to the rear end, and a diamond cutter is formed for each actuator substrate to be processed. It is not necessary to raise and lower the work, and the work efficiency can be improved. Moreover, by providing an opening corresponding to the ejection channel in the plate-like member fixed to the actuator substrate, the opening of the plate-like member can accurately correspond to the ejection channel, thereby producing a highly reliable inkjet head. Can be.

In the invention according to claim 2, the second step is:
A portion of the conductive layer corresponding to either the ejection channel or the dummy channel is removed. Accordingly, the conductive pattern for applying a voltage to the piezoelectric side wall can be easily manufactured by electrically separating the electrode in the dummy channel and the electrode in the ejection channel.

[0019] In the invention according to claim 3, the second step is:
A portion of the conductive layer between the injection channel and the dummy channel is removed.
Therefore, a conductive pattern for applying a voltage to the piezoelectric side wall by electrically separating the electrode in the dummy channel and the electrode in the ejection channel can be easily manufactured.

[0020] In the invention according to claim 4, the first step is:
The conductive layer is also formed on the upper surface of the actuator substrate including the inner surfaces of the two channels,
The method further includes a fifth step of removing the conductive layer formed on the upper surface of the piezoelectric side wall to form the conductive layers formed on both side surfaces of the piezoelectric side wall as a pair of electrodes. Therefore, since the conductive layers formed on both side surfaces of the piezoelectric side wall are electrically separated and used as the electrode corresponding to the dummy channel and the electrode corresponding to the ejection channel, the piezoelectric layer becomes difficult due to the fine structure. Can be easily and efficiently performed. In addition, since the conductive layer also forms the conductive pattern, the connection between the electrode and the conductive pattern can be reliably performed.

[0021] In the invention according to claim 5, the fourth step is:
By irradiating a laser beam, an opening for supplying ink is provided in a portion of the plate-shaped member corresponding to the ejection channel. Therefore, after attaching the plate-shaped member to the rear end surface of the actuator substrate, the opening work on the plate-shaped member, which is difficult due to the fine structure, can be performed accurately and easily by using the laser processing apparatus.

[0022]

Embodiments of the present invention will be described below with reference to the drawings.

First, the overall structure of the ink jet head 1 manufactured according to the present embodiment will be described with reference to FIGS.

In FIG. 1, the ink jet head 1
Is an actuator substrate 2, a cover plate 10,
Nozzle plate 15 and plate 17 as plate member
And a manifold member 13.

The actuator substrate 2 is formed by laminating a plurality of layers of piezoelectric materials made of ceramic materials such as lead zirconate titanate (PZT) and lead titanate (PT). Polarization processing is performed in mutually opposite directions (each in the thickness direction of the actuator substrate 2). A plurality of grooves 4 parallel to each other are formed on the upper surface 2A of the actuator substrate 2 facing the cover plate 10.
And the groove 14 is a diamond cutter (not shown)
It is formed by cutting in such as. The groove 14 serves as an ejection channel 12 for ejecting ink, and the groove 4 serves as a dummy channel 11 provided adjacent to the ejection channel 12 and not ejecting ink.

The grooves 4 and 14 are formed linearly at a predetermined depth from the front end face 2D to the rear end face 2B of the actuator substrate 2. Also, the actuator substrate 2
A vertical groove 9 is formed at a position corresponding to the concave groove 4 on the front end face 2D of the front end 2D. The concave grooves 4 and the concave grooves 14 are alternately arranged via the piezoelectric side walls 3. The piezoelectric side walls 3 are formed of a plurality of layers of piezoelectric materials polarized in directions opposite to each other in the thickness direction of the actuator substrate 2. ing. This piezoelectric side wall 3
Is for pressurizing the ink in the ejection channel 12 by being deformed by electric charges, as described later.

A conductive layer 27 of Ni or the like is formed on the dummy channel 11, the ejection channel 12, the rear end face 2B and the lower face 2C of the actuator substrate 2 by vapor deposition or plating. The front end face 2 of the actuator substrate 2
D and the upper surface 2A, the conductive layer 27 is removed as described later, the conductive layer 27 on each inner surface of the dummy channel 11 and the ejection channel 12 is made independent, the electrode 5A is provided on the inner surface of the dummy channel 11, and the electrode of the ejection channel electrode 12 is provided. An electrode 5B is formed on the inner surface. Thus, a plurality of electrodes 5A, 5B are formed on both side surfaces of the piezoelectric side wall 3.

On the bottom surface of the dummy channel 11, a first dividing groove 18A obtained by linearly removing the conductive layer 27 is formed from the front end to the rear end, and two independent conductive layers 27 on the inner surface of the dummy channel 11 are formed. Electrodes 5A and 5A. The vertical groove 9 communicating with the dummy channel 11 has the first
A second dividing groove 18B connected to the dividing groove 18A is formed. Further, as shown in FIG. 7, on the lower surface 2C of the actuator substrate 2, a third divided groove 18C connected to the second divided groove 18B is formed along the groove direction of the dummy channel 11 from the front end to the vicinity of the rear end. The fourth divided groove 18D is formed on the rear end side of the third divided groove 18C so as to be orthogonal to the plurality of third divided grooves 18C.

Third dividing groove 18C and fourth dividing groove 18D
Forms an individual conductive pattern 7 as one of a plurality of conductive patterns made of a conductive layer 27 on the lower surface of the actuator substrate 2. The individual conductive pattern 7 includes an electrode 5 </ b> A on one wall surface of the dummy channel 11 and the ejection channel 12.
Are electrically connected to the electrode 5A on the other wall surface of the dummy channel 11 adjacent to the dummy channel 11 via the vertical groove 9. In addition, the third divided groove 18C and the fourth divided groove 1
8D, a common conductive pattern 8 as one of a plurality of conductive patterns is formed on the outer periphery of the portion of the individual conductive pattern 7 surrounded by the conductive pattern 8D. It is connected to the electrodes 5A in all the injection channels 12 via the conductive layer 27.

Then, a pair of piezoelectric side walls 3 sandwiching the injection channel 12 and a pair of electrodes 5A, 5B formed on both side surfaces 3B, 3B are paired to form electrodes 5A, 5A outside the pair of piezoelectric side walls 3. A drive voltage is applied to the pair of piezoelectric side walls 3 and the electrodes 5B inside the pair of piezoelectric side walls 3 are grounded.
As in the conventional example described above, an electric field perpendicular to the polarization direction of the piezoelectric material is generated inside the piezoelectric side wall 3 so that the piezoelectric side wall 3 is deformed in the direction in which the volume of the ejection channel 12 changes. Has become.

In FIG. 7, a flexible printed board 6 is connected to the lower surface 2C of the actuator substrate 2 on which the individual conductive patterns 7 and the common conductive pattern 8 are formed. A board-side drive electrode 28 and a board-side ground electrode 29 are formed on the flexible printed board 6 corresponding to the individual conductive patterns 7 and the common conductive pattern 8. The board-side drive electrode 28 and the board-side ground electrode 29 are connected to a drive control unit (not shown). The board-side drive electrode 28 applies a drive voltage output from the drive control unit based on print data to the individual conductive pattern 7. The voltage is applied to each of the electrodes 5B.

As shown in FIG. 1, a flat cover plate 10 made of a ceramic material or a resin material is joined to the upper surface 2A of the actuator substrate 2 in a liquid-tight manner by an epoxy adhesive. As a result, the grooves 4 and 14 of the actuator substrate 2 are
By covering with 0, a dummy channel 11 and an ejection channel 12 whose front and rear ends are opened are formed.

A nozzle plate 15 is joined to the front end surfaces of the actuator substrate 2 having the ejection channels 12 and the dummy channels 11 and the cover plate 10 using an epoxy adhesive. The nozzle plate 15 is formed with nozzles 16 corresponding to the ejection channels 12 so as to eject ink droplets from the ejection channels 12. The nozzle plate 15 is made of polyalkylene, terephthalate, polyimide, polyetherimide,
It is formed of plastic such as polyether ketone, polyether sulfone, polycarbonate, and cellulose acetate.

On the other hand, a plate 17 is bonded to the rear end surfaces of the actuator substrate 2 and the cover plate 10 using an epoxy adhesive. The plate 17 is formed of the same insulating plastic as the nozzle plate 15. Further, a manifold member 13 is joined further to the rear. An ink supply port 13A is formed at the center of the manifold member 13, so that ink is supplied from an ink tank (not shown). The manifold member 13 forms an ink supply path communicating with all the ejection channels 12 through the opening 17A of the plate 17.

Next, a method of manufacturing the ink jet head 1 according to the present embodiment will be described with reference to FIGS. In FIG. 2, the actuator substrate 2 includes:
Groove 4 serving as dummy channel 11, injection channel 1
2 and the vertical groove 9 are formed by cutting with a diamond cutter (not shown). Any of the concave groove 4, the concave groove 14, and the vertical groove 9 can be cut in the actuator substrate 2 first.

When forming the grooves 14 in the actuator substrate 2, a diamond cutter corresponding to the number and width of the grooves 14 is prepared, and the diamond cutter is rotated so that the lower end thereof is positioned at the depth of the grooves 14. Is moved up and down, the actuator substrate 2 is moved in a horizontal direction from the front end face 2D to the rear end face 2B, and the upper portion is cut horizontally.

Similarly, when forming the grooves 4 in the actuator substrate 2, a diamond cutter corresponding to the number and width of the grooves 4 is prepared, and the diamond cutter is rotated so that the lower end is positioned at the groove depth of the grooves 4. After raising and lowering the diamond cutter to be moved, the actuator substrate 2 is moved in the horizontal direction from the front end face 2D to the rear end face 2B, and the upper part is cut horizontally. Therefore, the rear end of the groove 4 is open like the groove 14. Although these diamond cutters are different from each other because the widths of the concave groove 14 and the concave groove 4 are different, the same cutter may be used.

When forming the vertical grooves 9 in the actuator substrate 2, a diamond cutter corresponding to the number and width of the concave grooves 4 is prepared and rotated so that one side end thereof is located at the groove depth of the vertical grooves 9. After the diamond cutter is moved in the front-rear direction, it is moved vertically from the upper surface 2A to the lower surface 2C of the actuator substrate 2, and the front end is vertically cut.

After the grooves 4 and 14 and the vertical grooves 9 are formed on the actuator substrate 2, a conductive layer 27 of Ni or the like is deposited on the entire surface of the actuator substrate 2 including the inner surfaces of the grooves 4 and 14 by vapor deposition or plating. Form. The conductive layer 27 is formed of the electrode 5
A, 5B and the conductive patterns 7, 8 and, as will be described later, a conductive layer 27 serving as the common conductive pattern 8 is provided on the rear end face 2B of the actuator substrate 2 to which ink is supplied.
Are formed in a state of being connected to the electrodes 5A and 5B. This step is the first step of the method for manufacturing the inkjet head 1 according to the embodiment.

Next, as shown in FIG. 3, by grinding the upper surface 2A of the actuator substrate 2 with a grindstone or the like, the conductive layer 27 on the upper surface 3A of the piezoelectric side wall 3 is removed.
The conductive layers 27, 27 formed on both side surfaces 3B, 3B are separated to form a pair of electrodes 5A, 5B. That is, the conductive layer 27 corresponding to the groove 4 becomes the electrode 5A in the dummy channel 11, and the conductive layer 27 corresponding to the groove 14 becomes the electrode 5B in the ejection channel 12. In this manner, the electrodes 5A, 5B on the piezoelectric side wall 3, which are difficult due to the fine structure,
Can be easily and efficiently performed. This step is the fifth step of the method of manufacturing the inkjet head 1 according to the embodiment.

Then, the conductive layer 27 is linearly removed along the bottom surfaces of the concave groove 4 and the vertical groove 9 by using a laser processing device (not shown) or a diamond cutter.
A and 18B are formed. Similarly, as shown in FIG. 7, of the conductive layer 27 on the lower surface 2C of the actuator substrate 2, the portion behind the concave groove 4 is linearly removed to form a dividing groove 18C, and the plurality of dividing grooves 18C are formed. Dividing groove 1 so as to be orthogonal to
8D is formed. By dividing the conductive layer 27 in this manner, the dividing grooves 18C and 18C of the conductive layer 27 are formed.
The portion surrounded by D becomes the individual conductive pattern 7, and the other portions become the common conductive pattern 8.

Thereafter, as shown in FIG. 4, after the cover plate 10 is adhered to the upper surface 2A of the actuator substrate 2, the front end surface 2D of the actuator substrate 2 and the front end surface of the cover plate 10 are ground with a grindstone or the like. The portion of the conductive layer 27 is removed. Further, as shown in FIG. 5, the actuator substrate 2 is mounted on a laser processing device (not shown), and is emitted from an excimer laser oscillator and f
Excimer laser light 20 condensed by the θ lens 19
Thereafter, by irradiating the portion around the dummy channel 11 on the end face 2B, the conductive layer 27 in that portion is removed, and the electrode removal portion 21 is formed. Therefore, the electrode 5A in the dummy channel 11 and the electrode 5
B can be electrically separated. Here, when the excimer laser beam 20 is applied, if a mask having an opening shape corresponding to the electrode removing section 21 is transmitted, a plurality of electrode removing sections 21 can be formed by one irradiation.

In this embodiment, the portion corresponding to the dummy channel 11 in the conductive layer 27 on the rear end face 2B of the actuator substrate 2 is removed.
The present invention is not limited to this, and a portion corresponding to the injection channel 12 may be removed. Thus, on the rear end face 2B of the actuator substrate 2, the electrode 5B in the ejection channel 12 and the electrode 5A in the dummy channel 11 are formed.
Are electrically separated from each other, and the conductive layer 27 on the rear end face 2B becomes a part of the common conductive pattern 8, and connects the electrode 5B to the common conductive pattern 8 on the lower face 2C. This step is the second step of the method for manufacturing the inkjet head 1 according to the embodiment.

The second embodiment is different from the first embodiment in that
The electrode 5B of the ejection channel is connected to the individual conductive pattern 7, and the electrode 5A of the dummy channel is connected to the common conductive pattern 8, respectively.
Although A is grounded, if the polarization direction of the piezoelectric side wall 3 is opposite to that of the first embodiment, the piezoelectric side wall 3 is deformed similarly to the first embodiment.

Thereafter, as shown in FIG. 6, the rear end face 2B of the actuator substrate 2 is covered by bonding an insulating plate 17. As a result, the rear portions of the dummy channel 11 and the ejection channel 12, which have been opened as described above, are closed. This step is the third step of the method for manufacturing the inkjet head 1 according to the present embodiment.
Process.

The injection channel 1 of the plate 17
17A for supplying ink to the portion corresponding to 2
Is provided. That is, the inkjet head 1 is mounted on a laser processing device (not shown), and excimer laser light 20 emitted from an excimer laser oscillator and condensed by the f · θ lens 19 is applied to the ejection channel 12 of the plate 17.
By irradiating a portion corresponding to the above, that portion is removed. Therefore, after the plate 17 is attached to the rear end face 2B of the actuator substrate 2, the opening work on the plate 17 which is difficult due to the fine structure can be performed accurately and easily by using the laser processing apparatus. Here, when the excimer laser beam 20 is irradiated, if a mask having an opening shape corresponding to the plurality of openings 17A of the plate 17 is transmitted, the opening 17A can be irradiated by one irradiation.
Can be removed. This step is the fourth step of the method of manufacturing the inkjet head 1 according to the embodiment.

In the above embodiment (hereinafter sometimes referred to as “first embodiment”), the second step
In the conductive layer 27, the portion corresponding to either the ejection channel 12 or the dummy channel 11 is removed. However, the present invention is not limited thereto. The portion between them may be removed. Such an embodiment (hereinafter, referred to as “second embodiment”) will be described with reference to FIGS. 8 and 9. Note that, in the following description, the same components as those in the first embodiment are denoted by the same reference numerals as those in the first embodiment.

In FIG. 8, the actuator substrate 200
By removing a portion of the conductive layer 27 formed on the rear end face 2B between the ejection channel 12 and the dummy channel 11 linearly from the upper edge to the lower edge thereof, a plurality of electrode removal portions 22A are formed. Have been. As shown in FIG. 9, a portion between the ejection channel 12 and the dummy channel 11 in the conductive layer 27 formed on the lower surface 2C of the actuator substrate 200 is linearly removed from the rear edge to the front edge. By doing so, a plurality of electrode removing portions 22B are formed so as to be continuous from the electrode removing portion 22A. Electrode removal unit 2 adjacent to injection channel 12
2B are connected to each other at their front end portions.

In order to form the electrode removing portions 22A and 22B, the actuator substrate 200 is mounted on a laser processing device (not shown), and the Y and Y are formed on the rear end face 2B and the lower face 2C.
This is performed by irradiating an AG laser beam to remove a predetermined portion of the conductive layer 27. By dividing the conductive layer 27 in this manner, the electrode removing portion 22 of the conductive layer 27 is formed.
The portion surrounded by A and 22B becomes the individual conductive pattern 8, and the other portion becomes the common conductive pattern 7. In this manner, the electrode 5A in the dummy channel 11 and the electrode 5B in the ejection channel 12 can be electrically separated, and voltages can be applied independently of each other.

Next, the operation of the ink jet head 1 according to both embodiments will be described with reference to FIGS. FIG. 10 is a plan sectional view showing the internal structure of the inkjet head 1 according to the present embodiment, and FIG.
FIG. 2 is a side cross-sectional view illustrating an internal structure of an ejection channel portion of the inkjet head 1 according to the embodiment.

As shown in FIGS. 10 and 12, on the rear end face 2B of the actuator substrate 2, the electrode 5A in the dummy channel 11 and the electrode 5B in the ejection channel 12 are electrically separated, and the opened dummy is opened. Channel 1
1 and the rear end of the ejection channel 12 are closed by a plate 17, and the plate 17 is provided with an opening 17A communicating with the ejection channel 12, so that an ink supply source (not shown) passes through an ink supply port 13A. The ink supplied to the inside of the manifold member 13 is further supplied to the inside of the ejection channel 12 through the opening 17A, but does not flow into the inside of the dummy channel 11 blocked by the plate 17.

As described above, in the ink jet head 1 according to both embodiments, in order to prevent the ink from flowing into the dummy channel 11, a predetermined length (L) is provided behind the dummy channel 11 as in the related art. Since it is not necessary to form the rising portion 23 (see FIG. 14), the dummy channel 11 can be shortened by that amount, and the cost of the actuator substrate 2 can be reduced. Further, even if the length of the deformable piezoelectric side wall 3 is the same as that of the related art, the length of the ejection channel 12 is shortened, and the ejection period of the ink can be shortened with the same driving voltage. Further, with this configuration, the dummy channel 11 can be formed in a straight line from the front end to the rear end similarly to the injection channel 12, so that the plurality of actuator substrates 2 are arranged in Even when the channel 11 is processed, it is not necessary to raise and lower the diamond cutter for each actuator substrate 2 to be processed, so that work efficiency can be improved.

[0053]

As is apparent from the above description, according to the method of manufacturing an ink jet head according to the first aspect of the present invention, the electrodes in the dummy channel and the electrodes in the ejection channel are electrically separated. Then, the rear end of the opened dummy channel is closed with a plate-like member, and ink is supplied to the ejection channel from an opening provided in the plate-like member, so that the dummy channel has a predetermined length behind the dummy channel. There is no need to form a rising portion, the dummy channel can be shortened, and the cost of the actuator substrate on which they are formed can be reduced.
The ink ejection cycle can be shortened.

Also, when a plurality of actuator substrates are arranged in parallel to continuously process a dummy channel, the dummy channel is formed in a straight line from the front end to the rear end. It is not necessary to raise and lower the diamond cutter quickly, and the work efficiency can be improved. Moreover, by providing an opening corresponding to the ejection channel in the plate-like member fixed to the actuator substrate, the opening of the plate-like member can accurately correspond to the ejection channel, thereby producing a highly reliable inkjet head. Can be.

According to the second aspect of the present invention, the second step is to remove a portion of the conductive layer corresponding to either the ejection channel or the dummy channel. By electrically separating the electrode in the channel and the electrode in the ejection channel, a conductive pattern for applying a voltage to the piezoelectric side wall can be easily manufactured.

According to the method of manufacturing an ink jet head according to the third aspect, the second step is to remove a portion of the conductive layer between the ejection channel and the dummy channel. By electrically separating the electrodes from the electrodes in the ejection channel, a conductive pattern for applying a voltage to the piezoelectric side wall can be easily manufactured.

According to the method of manufacturing an ink jet head according to the fourth aspect, in the first step, a conductive layer is formed also on the upper surface of the actuator substrate including the inner surfaces of both channels, and further, the piezoelectric side wall is formed. By removing the conductive layer formed on the upper surface of the piezoelectric side wall, the fifth step of forming the conductive layer formed on both side surfaces of the piezoelectric side wall into a pair of electrodes is included. Electrode connection work can be performed easily and efficiently. In addition, since the conductive layer also forms the conductive pattern, the connection between the electrode and the conductive pattern can be reliably performed.

According to a fifth aspect of the present invention, in the fourth step, the laser light is irradiated to supply ink to a portion corresponding to the ejection channel of the plate-like member. Since the opening is provided, after the plate-shaped member is attached to the rear end face of the actuator substrate, the opening work on the plate-shaped member, which is difficult due to the fine structure, can be performed accurately and easily by using a laser processing device. Can be done.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing the entire structure of an ink jet head according to the embodiment.

FIG. 2 is a perspective view showing an actuator substrate in a state where a conductive layer is formed on the entire surface.

FIG. 3 is a perspective view showing the actuator substrate from which a conductive layer on an upper surface has been removed;

FIG. 4 is a perspective view showing the actuator substrate with a cover plate adhered thereto.

FIG. 5 is a perspective view showing a step of removing a part of a conductive layer formed on a rear end surface of the actuator substrate.

FIG. 6 is a perspective view showing a step of providing an opening in a plate adhered to a rear end surface of the actuator substrate.

FIG. 7 is an exploded perspective view showing the structure of the lower surface of the inkjet head according to the embodiment.

FIG. 8 is a perspective view of a state in which a cover plate is mounted on an actuator substrate according to a second embodiment as viewed from above.

FIG. 9 is a perspective view of the actuator substrate of FIG. 8 as viewed from below.

FIG. 10 is a plan sectional view showing the internal structure of the inkjet head according to the embodiment.

FIG. 11 is a front sectional view showing the internal structure of a conventional inkjet head.

FIG. 12 is a side sectional view showing an internal structure of an ejection channel portion of the inkjet head according to the embodiment.

FIG. 13 is a side sectional view showing an internal structure of an ejection channel portion of a conventional inkjet head.

FIG. 14 is a side sectional view showing an internal structure of a dummy channel portion of a conventional inkjet head.

[Explanation of symbols]

 Reference Signs List 1 inkjet head 2 actuator substrate 3 piezoelectric side wall 5A, 5B electrode 7 individual conductive pattern 8 common conductive pattern 11 dummy channel 12 ejection channel 17 plate (plate-like member) 20 excimer laser beam 27 conductive layer

Claims (5)

[Claims] 1. An ejection channel for ejecting ink on an actuator substrate, a dummy channel provided adjacent to the ejection channel and not ejecting ink, and deformed by electric charge to pressurize ink in the ejection channel. A method for manufacturing an ink jet head in which a piezoelectric side wall, a plurality of electrodes provided on the piezoelectric side wall, and a plurality of conductive patterns respectively connecting the electrodes to control means, wherein at least ink on the actuator substrate is A first step of forming a conductive layer to be at least a part of the conductive pattern on the supplied surface in a state of being connected to the electrode; and removing a part of the conductive layer to form the electrode in the ejection channel. And the electrode in the dummy channel is electrically separated from the conductive pattern by the conductive pattern. A second step of forming a part, a third step of covering the surface of the actuator substrate to which ink is supplied with an insulating plate-like member, and after the third step, the ejection channel of the plate-like member is A fourth step of providing an opening for supplying ink to a corresponding portion. 2. The ink jet head according to claim 1, wherein the second step removes a portion of the conductive layer corresponding to one of the ejection channel and the dummy channel. Production method. 3. The method according to claim 1, wherein the second step removes a portion of the conductive layer between the ejection channel and the dummy channel. . 4. The method according to claim 1, wherein the first step further includes forming the conductive layer on an upper surface of the actuator substrate including inner surfaces of the two channels, and further forming the conductive layer on an upper surface of the piezoelectric sidewall. 4. The inkjet head according to claim 1, further comprising a fifth step of removing the conductive layers formed on both side surfaces of the piezoelectric side wall into a pair of electrodes. Production method. 5. The method according to claim 1, wherein in the fourth step, an opening for supplying ink to a portion of the plate-shaped member corresponding to the ejection channel is provided by irradiating a laser beam. A method for manufacturing an ink jet head according to claim 4.