JP2000024432A - Mounting structure of filter unit with fan - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable to disassemble and transport a device and also to enable to simply perform an assemble work and an attaching work in a site by mounting a filter unit with a fan on a mounting piece of a butt shaped receiving material via a sealing material and also attaching a locking piece of the butt shaped receiving material to a mounting frame via the slealing material. SOLUTION: The filter unit 1 with a fan has respectively an air intake port 2 on the upper surface and an air blowing port 3 on the under surface, and also a blower 4 and a filter 5 are arranged in the inside, being confronted with respective openings 2, 3. The unit 1 is mounted on the mounting frame consisting of a stand frame 6a built on a ceiling frame 6 and a stand frame built on this frame. Namely, the butt shaped receiving member 10 in which the center of a bottom 10a is opened and the mounting piece 10b is formed on the peripheral edge, and provided with the locking piece 10d extending outwardly along the upper end edge of a side wall 10c, is used, and the unit 1 is mounted on the mounting piece 10b via a gasket 11 being a sealing material and also the locking piece 10d is mounted on the mounting frame via the gasket 12 being the sealing material.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a system ceiling of a clean room which forms a high cleanliness space for semiconductor manufacturing, etc., used in the clean room, parts processing and assembly factory of precision machinery, or food. Various clean room equipment that uses a filter unit with a fan that is used when purifying a part of the conveyor in a processing factory or the like, or when performing a part of air cleaning in a clean room for manufacturing precision machinery, for example, The present invention relates to a mounting structure of a filter unit with a fan in a clean booth, a clean bench, a pass box, a clean stocker, and the like.

[0002]

2. Description of the Related Art Conventionally, a filter unit with a fan is mounted on a system ceiling of a clean room or a device for a clean room.
A filter unit with a fan having an air outlet on the lower surface is placed via a gasket on an angle welded to the ceiling frame so as to close the opening of the ceiling plate, and the upper surface of the filter unit with the fan is fixed by bolting. ,
There is a clean booth in which the periphery of the ceiling plate is supported by columns, and a vinyl curtain is fastened and fixed to the side portions and the columns of the ceiling plate by bolts to shield the outside from the outside. Also, as another clean booth, a filter unit with a fan is placed via a gasket on the angle welded to the ceiling frame without providing a ceiling plate, and a vinyl curtain is installed up to the ceiling frame on the outer periphery of this filter unit with a fan. On the upstream side of the filter unit with a fan, sealing work is performed on site between the ceiling frame and the vinyl curtain on the outer periphery of the filter unit with a fan, and the downstream side of the filter unit with a fan is between the angle welded to the ceiling frame and the ceiling frame. It has been known that by performing a sealing operation, air that is not purified is prevented from flowing into a clean booth.

[0003]

However, in the case of the clean booth such as the former, there are disadvantages that the number of man-hours required for the tightening work on site is increased, and it is not easy to mount the filter unit with the fan.
Even in the case of the latter clean booth, there is an inconvenience that the sealing work on site is difficult, and the filter unit with the fan cannot be easily attached. In addition, in the case of a type in which a filter unit with a fan is provided on the ceiling of a clean booth, it is common to carry the ceiling to a site in a state where the framework of the ceiling has been integrated by welding in advance. There was a disadvantage that the transportation cost was high because the packing could not be made compact. Therefore, an object of the present invention is to provide a mounting structure for a filter unit with a fan in a system ceiling or various clean room devices such as a clean booth that can be disassembled and transported and can be easily assembled and mounted on site. I do.

[0004]

According to the present invention, there is provided a filter unit mounting structure with a fan for solving the above-mentioned problems.
In a mounting structure of a filter unit with a fan, which is configured by a fan and a filter and has an air outlet on a lower surface and has an air outlet on a lower surface, the filter unit with a fan is provided with an opening at a bottom center and a mounting piece formed on a peripheral edge. And attached to the mounting frame via a butt-shaped receiving member provided with a locking piece extending outward along the upper end edge of the side wall, wherein the fan-attached filter unit is attached to the butt-shaped via a sealing material. The butt-shaped receiving member is mounted on the mounting piece of the receiving member, and the locking piece of the butt-shaped receiving member is attached to the mounting frame via a sealing material. The mounting structure of the filter unit with the fan according to the second aspect is characterized in that a shielding material is sandwiched between the locking piece and the mounting frame. According to a third aspect of the present invention, there is provided a filter unit with a fan according to the first or second aspect, wherein the sealing member is a gasket.

The mounting structure of the filter unit with a fan according to the present invention can be applied not only to the system ceiling constituting the ceiling portion of the clean room by using the butt-shaped receiving member, but also to the filter unit with a fan for a filter device for a clean room. It can also be applied as a mounting structure.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment in which the mounting structure of the filter unit with a fan of the present invention is applied to a clean booth will be described below with reference to the drawings. FIG. 1 is a plan view of a clean booth to which a mounting structure of a filter unit with a fan is applied, FIG. 2 is a sectional view taken along line AA of FIG. 1, and FIG. As shown in FIG.
Has an air inlet 2 on its upper surface and an air outlet 3 on its lower surface. In the filter unit 1 with a fan, a blower 4 is provided facing the air intake 2, and a filter 5 is provided facing the air outlet 3.

The filter unit with fan 1 is formed of a frame 6a bridged to the ceiling frame 6 with the air outlet 3 facing the lower surface, and a frame 6b bridged to the frame 6a. It is placed on the mounting frame 6c. In detail, the filter unit 1 with a fan includes a bottom 1
0a is open at the center and the mounting piece 10b is
The filter unit with fan 1 is disposed on the mounting frame 6c via a butt-shaped receiving member 10 having a locking piece 10d extending outward along the upper edge of the fan unit 0c. The mounting piece 10 of the bat-shaped receiving member 10
b, and the locking piece 10d of the bat-shaped receiving member 10 is mounted on the mounting frame 6c via the gasket 12.

Further, the periphery of the ceiling frame 6 is supported by four columns 7, and a media guard 8 is provided on the lower surface of the air outlet 3. Further, a vinyl curtain 9 is sandwiched between the locking piece 10d of the bat-shaped receiving member 10 and the mounting frame 6c. A vinyl curtain 9 is hung.

Next, the assembly work and operation of the clean booth will be described. First, the ceiling frames 6, 6, 6, and 6 are fastened and fixed with screws 13 to form a skeleton. Next, the gantry frames 6a and 6a are attached to the two opposed ceiling frames 6 and 6, and the two frames are further attached. The gantry frames 6b, 6b are attached to the opposing gantry frames 6a, 6a.
Is bridged and fixed with screws 13 to form the mounting frame 6c.

[0010] Further, a reinforcing member (not shown) is provided on the column 7,
The ceiling frames 6, 6, 6, 6 and the posts 7, 7, 7, 7 are screwed and fixed. In this state, the installation portion of the filter unit with fan 1 covers the open vinyl curtain 9 and mounts the bat-shaped receiving member 10 on the mounting frame 6c via the gasket 12 so that the locking piece of the bat-shaped receiving member 10 is secured. 10d
And the mounting end of the vinyl curtain 9 between the mounting frame 6c.

Next, the filter unit 1 with a fan, in which the blower 4 and the filter 5 are built in, is mounted on the mounting piece 10b of the butt-shaped receiving member 10 via the gasket 11 in advance. Due to its own weight, airtightness is provided between the filter unit with fan 1 and the mounting piece 10b of the butt-shaped receiving member 10 and between the locking piece 10d of the bat-shaped receiving member 10 and the mounting frame 6c.

Next, the operation of the clean booth will be described. The air sucked into the filter unit 1 with the fan from the air inlet 2 by the blower 4 passes through the filter 5 and becomes purified air, and becomes clean air. It is guided inside, and further guided downward, and is discharged outside the clean booth.

In this embodiment, the number of filter units with fans 1 is one. However, the present invention is not limited to this, and a plurality of filter units with fans can be mounted by combining the frame 6a and the frame 6b vertically and horizontally. can do. Although the gaskets 11 and 12 are used as the sealing material, a so-called channel sealing method in which a flange is fitted into a groove filled with silicon gel or the like may be used.

In this embodiment, a vinyl curtain is used as a shielding material. However, any curtain material having no air permeability can be used without limitation. Further, by providing the casters on the legs of the column 7, the column 7 can be configured to be movable.

[0015]

As is apparent from the above description, according to the present invention, the filter unit with the fan can be fixed to the mounting frame via the butt-shaped receiving member, so that the seal between the filter unit with the fan and the mounting frame can be secured. Work becomes unnecessary. Also, if the present invention is applied to a clean booth, the butt-shaped receiving member makes it unnecessary to seal the filter unit with the fan and the mounting frame, and at the same time, covers the entire clean booth with a vinyl curtain without providing a ceiling plate, and provides vinyl. Sealing work between the curtain and the mounting frame is not required.
In addition, the ceiling frame and mounting frame can be disassembled and transported.Since they are fixed with screws and assembled, no special sealing work is required and the filter unit with fan can be mounted and installed by its own weight. Easy to do.

[Brief description of the drawings]

FIG. 1 is a plan view of an embodiment in which a mounting structure of a filter unit with a fan according to the present invention is applied to a clean booth.

FIG. 2 is a sectional view taken along line AA of FIG. 1;

FIG. 3 is an overall view of a bat-shaped receiving member.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 filter unit with fan 2 air inlet 3 air outlet 4 blower 5 filter 6 ceiling frame 6a gantry frame 6b gantry frame 6c mounting frame 7 support 8 media guard 9 vinyl curtain 10 bat-shaped receiving member 10a bottom surface 10b mounting piece 10c side wall 10d Locking piece 11 Gasket 12 Gasket 13 Screw

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Hiroyuki Suetsugu 630 Tarui-cho, Fuwa-gun, Gifu Prefecture F-term in the Tarui Plant of Nippon Inorganic Corporation 3L058 BD01 BE02 BF01 BF03 BF06 BF08 BG03 4D058 JA12 KB02 KC02 KC39 KC52 KC62 SA04

Claims (3)

[Claims] 1. A mounting structure for a filter unit with a fan, comprising a fan and a filter, the filter unit having a fan having an air outlet on a lower surface is mounted on a mounting frame. A mounting piece is attached to a mounting frame via a bat-shaped receiving member having a locking piece extending outward along the upper end edge of the side wall, and the filter unit with a fan is provided with a sealing material. A mounting structure for a filter unit with a fan, wherein the mounting piece is mounted on a mounting piece of the butt-shaped receiving member via a sealing member, and the locking piece of the butt-shaped receiving member is mounted to the mounting frame via a sealing material. 2. A mounting structure for a filter unit with a fan according to claim 1, wherein a shielding material is sandwiched between said locking piece and said mounting frame. 3. A mounting structure for a filter unit with a fan according to claim 1, wherein said sealing material is a gasket.