JP2000009968A - Photodetecting module - Google Patents
Photodetecting moduleInfo
- Publication number
- JP2000009968A JP2000009968A JP10172956A JP17295698A JP2000009968A JP 2000009968 A JP2000009968 A JP 2000009968A JP 10172956 A JP10172956 A JP 10172956A JP 17295698 A JP17295698 A JP 17295698A JP 2000009968 A JP2000009968 A JP 2000009968A
- Authority
- JP
- Japan
- Prior art keywords
- optical fiber
- light receiving
- light
- refractive index
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
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- Optical Couplings Of Light Guides (AREA)
- Light Receiving Elements (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、入力した光信号を
電気信号に変換して出力する受光素子と光ファイバとを
光学的に結合してなる受光モジュールに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light receiving module which is formed by optically coupling a light receiving element for converting an inputted optical signal into an electric signal and outputting the electric signal and an optical fiber.
【０００２】[0002]
【従来の技術】一般的な光通信システムの受信側では、
光伝送路（光ファイバ）を介して伝送されてきた光信号
をフォトダイオード等の受光素子により光−電気変換し
て電気信号を得て、この電気信号に基づいて情報の再生
を行うようにしている。このようなシステムにおいて使
用される受光モジュールは、受光素子と光ファイバとを
所定の位置関係で固定して構成される。また、光ファイ
バと微細化する方向にある受光素子を光結合するに際し
て、受信感度を高めるために、光学的な結合率が高いこ
とが要求される。2. Description of the Related Art On the receiving side of a general optical communication system,
An optical signal transmitted through an optical transmission line (optical fiber) is converted from light to electricity by a light receiving element such as a photodiode to obtain an electric signal, and information is reproduced based on the electric signal. I have. The light receiving module used in such a system is configured by fixing a light receiving element and an optical fiber in a predetermined positional relationship. In addition, when optically coupling an optical fiber with a light receiving element in a direction of miniaturization, a high optical coupling rate is required to enhance reception sensitivity.
【０００３】図７は従来の受光モジュールの構成を示す
図である。FIG. 7 is a diagram showing a configuration of a conventional light receiving module.
【０００４】光通信等に使用される光−電気変換部分を
含む受光モジュールは、高速応答特性、高周波特性、雑
音特性が良好で、光ファイバと受光素子との光結合効率
が高く小型なものが必要とされる。高速化、広帯域化の
ためには、受光素子の受光面と電気信号の流れる方向と
を同一にして、受光素子と電気回路との接続を直接実装
（フリップ・フロップ・ボンディング）すること、ま
た、小型化のためには、光ファイバの光軸の方向と電気
信号の流れる方向とが同一であるように光−電気変換部
分を光実装することが必要となる。A light receiving module including an optical-electrical conversion portion used for optical communication and the like has a high-speed response characteristic, a high-frequency characteristic, and a good noise characteristic, and has a high optical coupling efficiency between an optical fiber and a light receiving element and is small. Needed. In order to increase the speed and the bandwidth, the light receiving surface of the light receiving element and the direction in which the electric signal flows are made the same, and the connection between the light receiving element and the electric circuit is directly mounted (flip-flop bonding). For miniaturization, it is necessary to optically mount the optical-electrical conversion part so that the direction of the optical axis of the optical fiber is the same as the direction in which an electric signal flows.
【０００５】このため従来は、図７に示すように、コア
７２を有する光ファイバ７１の先端部を斜めに研磨して
全反射を起こさせるか、あるいはその傾斜研磨面７３に
金等の反射特性が良好な物質を蒸着することにより、反
射を起こさせ、その傾斜研磨面７３で反射して光ファイ
バ７１の側方から出射した信号光７４をセラミックス等
から基板７６上面に実装されているアバランシェ・フォ
ト・ダイオード（ＡＰＤ）等の受光素子７５に入射させ
るようにしていた。なお、図７には図示されていない
が、受光素子７５等が外気の影響を受けないようにケー
スによって気密封止されている。For this reason, conventionally, as shown in FIG. 7, the tip of an optical fiber 71 having a core 72 is polished obliquely to cause total reflection, or the inclined polished surface 73 has a reflection characteristic such as gold. A good material is vapor-deposited to cause reflection, and the signal light 74 reflected from the inclined polished surface 73 and emitted from the side of the optical fiber 71 is made of ceramics or the like. The light was incident on a light receiving element 75 such as a photodiode (APD). Although not shown in FIG. 7, the light receiving element 75 and the like are hermetically sealed by a case so as not to be affected by outside air.
【０００６】上述した構成によれば、受光素子７５の受
光面と電気信号の流れる方向が同一であるから、高速化
・広帯域化が可能になり、また、光ファイバ７１の光軸
の方向と電気信号の流れる方向が同一であるから、装置
の小型化が可能になる。According to the above-described configuration, since the light receiving surface of the light receiving element 75 and the direction of the flow of the electric signal are the same, the speed and the bandwidth can be increased, and the direction of the optical axis of the optical fiber 71 and the Since the signal flows in the same direction, the size of the device can be reduced.
【０００７】[0007]
【発明が解決しようとする課題】しかしながら、上述し
た従来の受光モジュールにおいては、以下に記す問題を
有している。However, the above-mentioned conventional light receiving module has the following problems.
【０００８】（イ）全反射して光ファイバ７１の側方よ
り出射する信号光７４は外部に発散されて損失となる。(A) The signal light 74 which is totally reflected and emitted from the side of the optical fiber 71 is diverged to the outside and becomes a loss.
【０００９】（ロ）光ファイバ７１の側方より出射する
信号光７４が、空気層を介してＡＰＤ等の受光面に入射
するとき、空気層とＡＰＤ受光面との境界面において反
射が起こり、光結合効率が低下する。(B) When the signal light 74 emitted from the side of the optical fiber 71 enters the light receiving surface of an APD or the like via the air layer, reflection occurs on the boundary surface between the air layer and the APD light receiving surface. Optical coupling efficiency decreases.
【００１０】（ハ）光ファイバ７１の支持構造が、光フ
ァイバ７１を固定する光ファイバブロック７７から先端
までの長さが長く、片持ち構造であるために、製造時に
光結合効率が最大となるように調整されても、経時的に
光ファイバ７１が撓み、適正な位置関係を維持すること
が難しい。(C) Since the supporting structure of the optical fiber 71 has a long length from the optical fiber block 77 for fixing the optical fiber 71 to the tip and is cantilevered, the optical coupling efficiency is maximized during manufacturing. Even if adjusted as described above, the optical fiber 71 bends over time, and it is difficult to maintain an appropriate positional relationship.
【００１１】（ニ）光ファイバ７１中の信号光７４が傾
斜研磨面７３で全反射する場合、臨界全反射研磨角度は
光ファイバコア７２の屈折率、信号光７４の波長等によ
り定まるので、必ずしも光伝送方向に対して直角方向に
光を出射するような研磨角度（４５°）を形成すること
はできない。そのため、受光素子７５の受光面上の出射
ビームは楕円形となる。また、光ファイバ７１側方より
信号光７４が垂直出射される場合に比べ、光路長が長く
なるので損失となり、その結果、光結合効率が低下す
る。(D) When the signal light 74 in the optical fiber 71 is totally reflected by the inclined polishing surface 73, the critical total reflection polishing angle is determined by the refractive index of the optical fiber core 72, the wavelength of the signal light 74, etc. A polishing angle (45 °) that emits light in a direction perpendicular to the light transmission direction cannot be formed. Therefore, the outgoing beam on the light receiving surface of the light receiving element 75 has an elliptical shape. Further, as compared with the case where the signal light 74 is vertically emitted from the side of the optical fiber 71, the optical path length becomes longer, resulting in a loss, and as a result, the optical coupling efficiency decreases.
【００１２】（ホ）光ファイバ７１中の信号光７４が傾
斜研磨面７３で全反射する場合、傾斜研磨面７３に結露
が付着すると信号光７４の反射角が変化し、光軸ずれが
起こる。従来、受光モジュールは、結露対策として光結
合部をケースによって気密封止されていたが、生産性が
悪くコスト高になる。(E) When the signal light 74 in the optical fiber 71 is totally reflected by the inclined polished surface 73, if dew condensation adheres to the inclined polished surface 73, the reflection angle of the signal light 74 changes and an optical axis shift occurs. Conventionally, in a light receiving module, an optical coupling portion is hermetically sealed by a case as a countermeasure against dew condensation. However, productivity is low and cost is high.
【００１３】（ヘ）光ファイバ７１の先端部端面を斜め
研磨する際に、光ファイバ７１のエッジが欠けるなど、
生産性が悪くコストの低減が困難である。(F) When the end face of the tip of the optical fiber 71 is obliquely polished, the edge of the optical fiber 71 may be chipped.
It is difficult to reduce costs due to poor productivity.
【００１４】本発明は、上記従来の問題点を解決するも
のであり、光結合効率が高い光ファイバと受光素子の光
結合構造であり、さらに経時劣化が少なく、小型で高密
度実装に適した受光モジュールを提供することを目的と
する。The present invention is to solve the above-mentioned conventional problems, and is an optical coupling structure of an optical fiber and a light receiving element having high optical coupling efficiency. An object is to provide a light receiving module.
【００１５】[0015]
【課題を解決するための手段】上記目的を達成するため
の本発明は、端面を光ファイバ光軸に対して直角、かつ
平滑な切り口に切断した後、光ファイバコアを含む箇所
まで斜め研磨加工を施した光ファイバを、基板平面に対
して所定角度に傾け、光ファイバ先端の研磨面で反射し
て出射した光が、光ファイバクラッドの屈折率と等しい
屈折率整合接着剤を介して、基板上に設けられた受光素
子の受光部に垂直に入射するようにしたものである。SUMMARY OF THE INVENTION In order to achieve the above-mentioned object, the present invention provides a method for cutting an end face into a smooth cut at a right angle to the optical axis of an optical fiber and then obliquely polishing the cut to a location including the optical fiber core. The optical fiber subjected to the above is tilted at a predetermined angle with respect to the plane of the substrate, and the light emitted from the polished surface at the tip of the optical fiber is reflected by the polished surface of the optical fiber. The light is vertically incident on the light receiving portion of the light receiving element provided above.
【００１６】以上により、光ファイバコア部を含む箇所
のみ斜め研磨加工を施すので、研磨除差部が少なく、生
産性が良い受光モジュールを得ることができる。また、
屈折率整合接着剤により、光の発散、および空気層とＡ
ＰＤ受光面との境界面で起こる光の反射を抑制するた
め、高い光結合効率が得られるとともに、光ファイバ先
端部を屈折率整合接着剤により受光素子受光面に固定す
るので、特性の経時的劣化が少ない受光モジュールを得
ることができる。また、傾斜研磨面には発水性樹脂によ
る薄膜が形成されているので、傾斜研磨面に水分は付着
されず、結露による光軸のずれを防止することができ
る。As described above, since the oblique polishing is performed only on the portion including the optical fiber core portion, a light receiving module having a small number of polishing difference portions and high productivity can be obtained. Also,
The index matching adhesive allows for light divergence and air layer and A
High light coupling efficiency is obtained to suppress the reflection of light that occurs at the boundary surface with the PD light receiving surface, and the optical fiber tip is fixed to the light receiving element light receiving surface with a refractive index matching adhesive, so that the characteristics over time A light receiving module with little deterioration can be obtained. Further, since a thin film made of a water-repellent resin is formed on the inclined polishing surface, moisture does not adhere to the inclined polishing surface, and the optical axis can be prevented from shifting due to dew condensation.
【００１７】[0017]
【発明の実施の形態】本発明の請求項１記載の発明は、
光ファイバ光軸に対して斜めに研磨してなる傾斜研磨面
を先端に有する光ファイバから出射した光を、基板上に
設けられた受光素子の受光面に、光ファイバクラッドの
屈折率と等しい屈折率整合接着剤を介して入射させるよ
うに構成した受光モジュールであり、全反射して光ファ
イバの側方より出射する光の発散、および空気層とＡＰ
Ｄ受光面との境界面で起こる光の反射を屈折率整合接着
剤によって抑制するので、高い光結合効率を得ることが
できるという作用を有する。また、光ファイバ先端と受
光素子受光面は該屈折率整合接着剤により位置固定され
るので、光ファイバの経時的撓みによる特性劣化が少な
い受光モジュールを得ることができるという作用を有す
る。BEST MODE FOR CARRYING OUT THE INVENTION
The light emitted from the optical fiber having an inclined polished surface at the tip, which is polished obliquely with respect to the optical axis of the optical fiber, is refracted to the light receiving surface of the light receiving element provided on the substrate, the refractive index being equal to that of the optical fiber cladding. A light receiving module configured to be incident through a rate matching adhesive, the divergence of light totally reflected and emitted from the side of the optical fiber, and the air layer and the AP
Since the reflection of light occurring at the boundary surface with the D light receiving surface is suppressed by the refractive index matching adhesive, it has an effect that high optical coupling efficiency can be obtained. Further, since the tip of the optical fiber and the light receiving surface of the light receiving element are fixed in position by the refractive index matching adhesive, there is an effect that it is possible to obtain a light receiving module in which the characteristic deterioration due to the bending of the optical fiber with time is small.
【００１８】また、請求項２記載の発明は、前記光ファ
イバ光軸を、基板平面に対して所定角度に傾け、前記傾
斜研磨面で反射した光が、前記受光素子の受光面に垂直
に入射するようにしたものであり、受光素子の受光面上
における出射ビームの形状は円形になるとともに、光フ
ァイバより出射された信号光の光路長は最短となるた
め、光結合効率が向上するという作用を有する。Further, according to a second aspect of the present invention, the optical axis of the optical fiber is inclined at a predetermined angle with respect to the plane of the substrate, and the light reflected by the inclined polished surface is perpendicularly incident on the light receiving surface of the light receiving element. The shape of the emitted beam on the light receiving surface of the light receiving element is circular, and the optical path length of the signal light emitted from the optical fiber is the shortest, so that the optical coupling efficiency is improved. Having.
【００１９】また、請求項３記載の発明は、前記傾斜研
磨面に、前記屈折率接着剤による薄膜を形成することに
より、屈折率整合接着剤と空気層との境界面で反射した
光を受光素子に入射させるようにしたものであり、傾斜
研磨面の面粗さによる信号光の反射損失、および研磨加
工条件による反射率のばらつきを防ぐという作用を有す
る。According to a third aspect of the present invention, a light reflected at a boundary surface between the refractive index matching adhesive and the air layer is received by forming a thin film of the refractive index adhesive on the inclined polishing surface. It is designed to be incident on the element, and has an effect of preventing signal light reflection loss due to the surface roughness of the inclined polished surface and variation in reflectance due to polishing processing conditions.
【００２０】また、請求項４記載の発明は、前記傾斜研
磨面に、発水性樹脂による薄膜を形成したものであり、
傾斜研磨面に水分は付着されず、結露による光軸位置ず
れを防ぐという作用を有する。Further, according to a fourth aspect of the present invention, a thin film made of a water-repellent resin is formed on the inclined polishing surface,
Moisture does not adhere to the inclined polished surface, and has the effect of preventing the optical axis from shifting due to condensation.
【００２１】また、請求項５記載の発明は、前記光ファ
イバの端面を、光ファイバコアを含む前記傾斜研磨面
と、前記傾斜研磨面の先端部に形成され、前記光ファイ
バ光軸に対して直角かつ平滑な切り口からなる直角研磨
面とから構成した受光モジュールであり、光ファイバコ
アを含む箇所のみ斜め研磨加工を施すので、研磨除差部
が少なく、生産性が良い受光モジュールを得ることがで
きるという作用を有する。According to a fifth aspect of the present invention, an end face of the optical fiber is formed on the inclined polishing surface including an optical fiber core and a tip portion of the inclined polishing surface, and the optical fiber has an end face with respect to the optical fiber optical axis. This is a light receiving module composed of a right-angled polished surface consisting of a right-angled and smooth cut surface.Because only the portion including the optical fiber core is obliquely polished, it is possible to obtain a light-receiving module with less polishing difference and good productivity. Has the effect of being able to.
【００２２】以下、本発明の実施の形態について、図１
から図６を用いて説明する。Hereinafter, an embodiment of the present invention will be described with reference to FIG.
This will be described with reference to FIG.
【００２３】（実施の形態１）図１は本発明の実施の形
態１の受光モジュールにおける光ファイバと受光素子と
光結合構造を示す側面断面図であり、１１は光ファイ
バ、１２はコア、１３は光ファイバ１１の先端を斜めに
研磨することにより形成された傾斜研磨面、１４は信号
光、１５は受光素子、１６は基板、１７は屈折率整合接
着剤である。光ファイバ１１のコア１２間を伝搬してき
た信号光１４は、光ファイバ１１の傾斜研磨面１３によ
って全反射され、基板１６上に直接実装（フリップ・チ
ップ・ボンディング）されているアバランシェ・フォト
・ダイオード（ＡＰＤ）等からなる受光素子１５の受光
面に入射される。光ファイバ１１の側方と受光素子１５
との間には、光ファイバ１１のクラッドと屈折率の等し
い屈折率整合接着剤１７が充填されており、信号光１４
の導波路が形成されている。(Embodiment 1) FIG. 1 is a side sectional view showing an optical coupling structure between an optical fiber, a light receiving element, and an optical fiber in a light receiving module according to Embodiment 1 of the present invention. Is an inclined polished surface formed by obliquely polishing the tip of the optical fiber 11, 14 is a signal light, 15 is a light receiving element, 16 is a substrate, and 17 is a refractive index matching adhesive. The signal light 14 propagating between the cores 12 of the optical fiber 11 is totally reflected by the inclined polished surface 13 of the optical fiber 11 and is directly mounted on the substrate 16 (flip chip bonding). The light is incident on the light receiving surface of the light receiving element 15 made of (APD) or the like. Side of optical fiber 11 and light receiving element 15
Is filled with a refractive index matching adhesive 17 having the same refractive index as that of the cladding of the optical fiber 11, and the signal light 14.
Is formed.
【００２４】以上のように構成された受光モジュールに
ついて、光結合構造の製造方法を説明する。まず、アバ
ランシェ・フォト・ダイオード（ＡＰＤ）等からなる受
光素子１５については、例えば、フリップ・チップ・ボ
ンディングによりセラミック等からなる基板１６上に固
定しておく。次に、受光素子１５の受光面に、光ファイ
バ１１のクラッドと屈折率の等しい屈折率整合接着剤１
７を塗布する。塗布後、光ファイバ１１の先端を受光素
子１５の受光面上に載置し、光ファイバ１１の傾斜研磨
面１３における反射光軸が受光素子１５の受光面垂線と
一致するように光ファイバ１１を回転調整する。回転調
整後、十分な光結合効率を得るために、光ファイバ１１
と受光面を近接させ、受光素子１５上に塗布された屈折
率整合接着剤１７に光ファイバ１１の先端部側面を浸
す。次に、前記反射光軸上に受光素子１５の受光面が位
置するように、光ファイバ１１を基板１６上平面方向に
移動調整する。調整後、屈折率整合接着剤１７を硬化さ
せる。屈折率整合接着剤１７としては、例えば、紫外線
硬化型樹脂を使用する。そして、光軸調整後に、紫外線
硬化型樹脂に対して紫外線を照射することによって、短
時間に硬化作業を行うことができる。A method of manufacturing an optical coupling structure for the light receiving module configured as described above will be described. First, the light receiving element 15 made of an avalanche photo diode (APD) or the like is fixed on a substrate 16 made of ceramic or the like by, for example, flip chip bonding. Next, the refractive index matching adhesive 1 having the same refractive index as the clad of the optical fiber 11 is provided on the light receiving surface of the light receiving element 15.
7 is applied. After the application, the tip of the optical fiber 11 is placed on the light receiving surface of the light receiving element 15, and the optical fiber 11 is placed such that the reflection optical axis of the inclined polished surface 13 of the optical fiber 11 coincides with the perpendicular to the light receiving surface of the light receiving element 15. Adjust rotation. After the rotation adjustment, in order to obtain a sufficient optical coupling efficiency, the optical fiber 11
And the light-receiving surface are brought close to each other, and the side surface of the tip of the optical fiber 11 is immersed in the refractive index matching adhesive 17 applied on the light-receiving element 15. Next, the optical fiber 11 is moved and adjusted in the plane direction on the substrate 16 so that the light receiving surface of the light receiving element 15 is located on the reflected optical axis. After the adjustment, the refractive index matching adhesive 17 is cured. As the refractive index matching adhesive 17, for example, an ultraviolet curable resin is used. By irradiating the ultraviolet curable resin with ultraviolet light after the optical axis adjustment, the curing operation can be performed in a short time.
【００２５】受光モジュールの光結合構造において、光
ファイバ１１による光の反射から受光素子１５への入射
経路を、図２を用いてその動作を説明する。光ファイバ
２１のコア２２間を伝搬してきた信号光２４は傾斜研磨
面２３で全反射した後、光ファイバ２１の側方より出射
する。光ファイバ２１側方から出射された光ビームの強
度分布はガウス形状とみなすことができ、回折により出
射された光ビームは図２に示すように広がる。光ビーム
の１／ｅ2となる光ビームの半径をωとし、光ファイバ
２１側方から出射された信号光２４が受光素子２５の受
光面までに到達する光路長をＺとすると、半径ωは（数
１）により表される。The operation of the optical coupling structure of the light receiving module from the reflection of light by the optical fiber 11 to the light incident on the light receiving element 15 will be described with reference to FIG. The signal light 24 propagating between the cores 22 of the optical fiber 21 is totally reflected by the inclined polished surface 23 and then emitted from the side of the optical fiber 21. The intensity distribution of the light beam emitted from the side of the optical fiber 21 can be regarded as a Gaussian shape, and the light beam emitted by diffraction spreads as shown in FIG. Assuming that the radius of the light beam that is 1 / e 2 of the light beam is ω, and the optical path length of the signal light 24 emitted from the side of the optical fiber 21 to the light receiving surface of the light receiving element 25 is Z, the radius ω is It is represented by (Equation 1).
【００２６】[0026]
【数１】ω2＝ω0 2{１＋(λＺ／πω0 2ｎ)2} ω0：光ファイバのコア径 λ ：光の波長 ｎ ：媒質間の屈折率 屈折率整合接着剤１７の屈折率ｎは１．４６程度である
ため、屈折率整合接着剤１７中を伝搬する信号光２４は
空気層（ｎ＝１）中を伝搬する光に比べて、光の発散が
小さくなる。また、信号光２４が光ファイバ２１の側方
より射出する際、および受光素子２５の受光面に入射す
る際には、光の反射が伴う。反射光強度は、媒質間の屈
折率差が大きくなるに伴い大きくなる。したがって、光
ファイバ２１の側方と受光素子２５との間に光ファイバ
２１のクラッドと屈折率の等しい屈折率整合接着剤１７
を充填すれば、空気層の場合に比べて媒質間の屈折率の
差が小さくなるので、反射光２８による損失が小さくな
る。Ω 2 = ω 0 2 {1+ (λZ / πω 0 2 n) 2 } ω 0 : core diameter of optical fiber λ: wavelength of light n: refractive index between media Refraction of refractive index matching adhesive 17 Since the rate n is about 1.46, the divergence of the signal light 24 propagating in the refractive index matching adhesive 17 becomes smaller than that of the light propagating in the air layer (n = 1). Further, when the signal light 24 is emitted from the side of the optical fiber 21 and is incident on the light receiving surface of the light receiving element 25, light is reflected. The reflected light intensity increases as the refractive index difference between the media increases. Therefore, between the side of the optical fiber 21 and the light receiving element 25, the refractive index matching adhesive 17 having the same refractive index as that of the clad of the optical fiber 21.
Is filled, the difference in the refractive index between the media becomes smaller than in the case of the air layer, so that the loss due to the reflected light 28 is reduced.
【００２７】以上のように実施の形態１によれば、先端
が斜めに研磨された光ファイバより出射した光を、光フ
ァイバクラッドの屈折率と屈折率整合接着剤を介して、
基板上に設けられた受光素子の受光面に入射されるよう
にした光結合構造とすることにより、全反射して光ファ
イバの側方より出射する光の発散、および空気層とＡＰ
Ｄ受光面との境界面で起こる光の反射を抑制するので、
高い光結合効率を得ることができる。As described above, according to the first embodiment, the light emitted from the optical fiber whose tip is obliquely polished is transmitted through the refractive index matching adhesive with the refractive index of the optical fiber clad.
The light coupling structure is designed to be incident on the light receiving surface of the light receiving element provided on the substrate, so that the divergence of the light totally reflected and emitted from the side of the optical fiber and the air layer and the AP
Since it suppresses light reflection that occurs at the interface with the D light receiving surface,
High optical coupling efficiency can be obtained.
【００２８】本発明の実施の形態１による受光モジュー
ルの特性と従来の受光モジュールの特性との比較を図８
に示した。FIG. 8 shows a comparison between the characteristics of the light receiving module according to the first embodiment of the present invention and the characteristics of the conventional light receiving module.
It was shown to.
【００２９】図８から明らかなように、実施の形態１に
よる受光モジュールは、光ファイバと受光素子１５を光
結合するに際して光学的な結合率が高く、受信感度の点
で優れた効果が得られる。As is apparent from FIG. 8, the light receiving module according to the first embodiment has a high optical coupling rate when optically coupling the optical fiber and the light receiving element 15, and an excellent effect in terms of receiving sensitivity can be obtained. .
【００３０】以上のように実施の形態１によれば、光フ
ァイバ１１の側方と受光素子１５との間に、光ファイバ
１１のクラッドと屈折率の等しい屈折率整合接着剤１７
を充填することにより、高い光結合効率を得ることがで
きる。また、光ファイバ１１の先端部を屈折率整合接着
剤１７により受光素子１５の受光面に固定するので、光
ファイバ１１の経時的撓みによる特性劣化が少ない受光
モジュールを得ることができる。また、従来は受光素子
等が外気の影響を受けないようにケースによって気密封
止されていたが、実施の形態１によれば、屈折率整合接
着剤１７により樹脂封止することによって受光素子１５
は外気の影響を受けず、受光モジュール構造の簡素化、
および生産性が良い受光モジュールを得ることができ
る。As described above, according to the first embodiment, the refractive index matching adhesive 17 having the same refractive index as the clad of the optical fiber 11 is provided between the side of the optical fiber 11 and the light receiving element 15.
By filling, high optical coupling efficiency can be obtained. In addition, since the distal end of the optical fiber 11 is fixed to the light receiving surface of the light receiving element 15 with the refractive index matching adhesive 17, a light receiving module with less characteristic deterioration due to the temporal bending of the optical fiber 11 can be obtained. Conventionally, the light receiving element and the like are hermetically sealed by a case so as not to be affected by the outside air. However, according to the first embodiment, the light receiving element 15 is sealed by resin with the refractive index matching adhesive 17.
Is not affected by outside air, simplifies the light receiving module structure,
Further, a light receiving module with good productivity can be obtained.
【００３１】（実施の形態２）図３は本発明の実施の形
態２の光ファイバ先端部分における信号光の反射経路を
示す説明図である。光ファイバ３１先端部の研磨角度を
θp，光ファイバ３１のコア３２内を伝搬する信号光３
４の伝搬角度をθc，コア３２の屈折率をｎ1とすると、
信号光３４が傾斜研磨面３３で全反射する条件は、（数
２）となる。(Embodiment 2) FIG. 3 is an explanatory diagram showing a reflection path of signal light at the tip of an optical fiber according to Embodiment 2 of the present invention. The polishing angle of the tip of the optical fiber 31 is θ p , and the signal light 3 propagating in the core 32 of the optical fiber 31 is
4 is θ c and the refractive index of the core 32 is n 1 .
The condition that the signal light 34 is totally reflected by the inclined polishing surface 33 is (Equation 2).
【００３２】[0032]
【数２】θp≦90−θc−arcsin(１／ｎ1) コア３２の屈折率(ｎ1)が１．４５，信号光３４の波長
(λ)が１．５５μｍの場合、臨界全反射角度（θp）は
４４．４°となる。また、光ファイバ３１からのビーム
中心の出射角度（θa）は、（数３）となる。[Number 2] θ p ≦ 90-θ c -arcsin (1 / n 1) the refractive index of the core 32 (n 1) is 1.45, the wavelength of the signal light 34
When (λ) is 1.55 μm, the critical total reflection angle (θ p ) is 44.4 °. The emission angle (θ a ) of the beam center from the optical fiber 31 is (Equation 3).
【００３３】[0033]
【数３】θa＝arcsin［ｎ2sin(90−２θp)］ ｎ2：クラッドの屈折率 製造精度を考慮して光ファイバ３１の先端部の研磨角度
を４０°とした場合、θaは１５°になる。その結果、
光ファイバ３１より出射された信号光３４は受光素子の
受光面垂線に対し、傾いて入射されるため、受光面上の
出射ビームは楕円形となる。また、光ファイバ３１側方
より信号光３４が垂直出射される場合に比べ、光路長が
長くなるので損失となるとともに、受光面に斜めより光
が入射されるので反射損失が大きくなり、その結果、光
結合効率が低下する。Θ a = arcsin [n 2 sin (90−2θ p )] n 2 : refractive index of clad When the polishing angle of the tip of the optical fiber 31 is set to 40 ° in consideration of manufacturing accuracy, θ a Becomes 15 °. as a result,
Since the signal light 34 emitted from the optical fiber 31 is obliquely incident on the perpendicular to the light receiving surface of the light receiving element, the emitted beam on the light receiving surface has an elliptical shape. Further, as compared with the case where the signal light 34 is vertically emitted from the side of the optical fiber 31, the optical path length becomes longer, resulting in a loss. In addition, since the light is obliquely incident on the light receiving surface, the reflection loss becomes larger. As a result, the optical coupling efficiency decreases.
【００３４】実施の形態２は、実施の形態１のように構
成された受光モジュールにおいて、光ファイバ１１の光
軸を基板平面に対して１５°傾け、光ファイバ１１の先
端の傾斜研磨面１３で反射して出射した光が、受光素子
１５の受光面に垂直に入射するようにしたものである
（図１）。ただし、受光素子１５の受光面に垂直入射し
た信号光１４は、受光面において反射することにより、
入射経路を逆進して光ファイバ１１まで戻るおそれがあ
る。したがって、受光面表面には反射防止膜を施す必要
がある。In the second embodiment, in the light receiving module constructed as in the first embodiment, the optical axis of the optical fiber 11 is inclined by 15 ° with respect to the plane of the substrate, and the inclined polishing surface 13 at the tip of the optical fiber 11 is used. The reflected and emitted light is perpendicularly incident on the light receiving surface of the light receiving element 15 (FIG. 1). However, the signal light 14 vertically incident on the light receiving surface of the light receiving element 15 is reflected by the light receiving surface,
There is a possibility that the light may return to the optical fiber 11 by reversing the incident path. Therefore, it is necessary to apply an antireflection film to the light receiving surface.
【００３５】以上のように実施の形態２によれば、光フ
ァイバ３１の光軸を基板平面に対して所定角度に傾け、
光ファイバ１１先端の傾斜研磨面３３で反射して出射し
た光を受光素子１５の受光面に垂直に入射させることに
より、受光面上における出射ビームの形状は円形になる
とともに、光ファイバ３１より出射された伝搬光の光路
長は最短となる。また、受光素子１５の受光面に入射す
る光の反射損失が軽減するため、光結合効率を向上させ
ることができる。As described above, according to the second embodiment, the optical axis of the optical fiber 31 is inclined at a predetermined angle with respect to the substrate plane.
By making the light reflected by the inclined polishing surface 33 at the tip of the optical fiber 11 and emitted perpendicularly to the light receiving surface of the light receiving element 15, the shape of the emitted beam on the light receiving surface becomes circular and the light emitted from the optical fiber 31 is emitted. The optical path length of the transmitted propagation light is the shortest. Further, since the reflection loss of the light incident on the light receiving surface of the light receiving element 15 is reduced, the optical coupling efficiency can be improved.
【００３６】（実施の形態３）図４は本発明の実施の形
態３における光ファイバと受光素子の光結合構造の要部
拡大図であり、光ファイバ４１先端部の傾斜研磨面４３
の表面には光ファイバ４１のクラッドと等しい屈折率を
有する屈折率整合接着剤４７によって、薄膜４８が形成
されている。なお、光ファイバ４１のコアとクラッドの
屈折率の差はほとんどないので、光ファイバ４１のコア
４２内を伝搬してきた信号光４４は、コア４２と傾斜研
磨面４３に薄膜４８を形成している屈折率整合接着剤４
７との境界面で反射することなく、薄膜４８内を透過す
る。薄膜４８内を透過した信号光４４は、屈折率整合接
着剤４７の薄膜４８と空気層との境界面で全反射し、光
ファイバ４１の側方より出射する。(Embodiment 3) FIG. 4 is an enlarged view of a main part of an optical coupling structure between an optical fiber and a light receiving element according to Embodiment 3 of the present invention.
Is formed with a refractive index matching adhesive 47 having a refractive index equal to that of the cladding of the optical fiber 41. Since there is almost no difference between the refractive index of the core of the optical fiber 41 and the refractive index of the clad, the signal light 44 propagating in the core 42 of the optical fiber 41 forms a thin film 48 on the core 42 and the inclined polished surface 43. Refractive index matching adhesive 4
The light is transmitted through the thin film 48 without being reflected at the boundary surface between the thin film 48. The signal light 44 transmitted through the thin film 48 is totally reflected at the interface between the thin film 48 of the refractive index matching adhesive 47 and the air layer, and is emitted from the side of the optical fiber 41.
【００３７】以上のように構成された受光モジュールに
ついて、光結合構造の製造方法を説明する。基板４６上
に直接実装された受光素子４５の受光面に、光ファイバ
４１のクラッドと屈折率の等しい屈折率整合接着剤４７
を充填した後、光ファイバ４１先端部を、受光面上を覆
う屈折率整合接着剤４７に挿入する。次に、光ファイバ
４１を受光面から上方に微小移動させると、光ファイバ
４１先端部の傾斜研磨面４３には、表面張力により屈折
率整合接着剤４７の薄膜４８が形成される。なお、屈折
率整合接着剤４７の薄膜４８と空気層との境界面は平面
と見なし、光ファイバ４１光軸と前記境界面がなす角度
は、光ファイバ４１の先端部の傾斜研磨面４３の角度と
等しくなる。A method of manufacturing the optical coupling structure of the light receiving module configured as described above will be described. A refractive index matching adhesive 47 having the same refractive index as the clad of the optical fiber 41 is provided on the light receiving surface of the light receiving element 45 directly mounted on the substrate 46.
After filling, the tip of the optical fiber 41 is inserted into the refractive index matching adhesive 47 covering the light receiving surface. Next, when the optical fiber 41 is slightly moved upward from the light receiving surface, a thin film 48 of the refractive index matching adhesive 47 is formed on the inclined polishing surface 43 at the tip of the optical fiber 41 by surface tension. The boundary surface between the thin film 48 of the refractive index matching adhesive 47 and the air layer is regarded as a plane, and the angle between the optical axis of the optical fiber 41 and the boundary surface is determined by the angle of the inclined polishing surface 43 at the tip of the optical fiber 41. Becomes equal to
【００３８】次に、境界面における反射光軸と受光素子
４５の受光面が位置するように、光ファイバ４１を基板
４６上平面方向に移動調整する。調整後、屈折率整合接
着剤４７を硬化させる。従来は、光ファイバ４１先端部
の傾斜研磨面４３における面粗さにより、信号光４４の
反射率にばらつきが生じていた。しかし、傾斜研磨面４
３に前記屈折率整合接着剤４７による薄膜部４８を形成
することにより、傾斜研磨面４３の凹凸を屈折率整合接
着剤４７により均一にし、また、薄膜部４８と空気層と
の境界面は平坦になるので、高い光反射率を得るととも
に、研磨加工による反射率のばらつきを抑制することが
できる。また、実施の形態１による受光モジュールの光
結合構造では、傾斜研磨面に屈折整合接着剤を付着させ
ず製作するのは困難である。Next, the optical fiber 41 is moved and adjusted in the plane direction on the substrate 46 so that the reflected optical axis at the boundary surface and the light receiving surface of the light receiving element 45 are located. After the adjustment, the refractive index matching adhesive 47 is cured. Conventionally, the reflectance of the signal light 44 varies due to the surface roughness of the inclined polishing surface 43 at the tip of the optical fiber 41. However, the inclined polishing surface 4
By forming the thin film portion 48 with the refractive index matching adhesive 47 on the surface 3, the unevenness of the inclined polishing surface 43 is made uniform by the refractive index matching adhesive 47, and the boundary surface between the thin film portion 48 and the air layer is flat. Therefore, a high light reflectance can be obtained, and variation in the reflectance due to polishing can be suppressed. Further, in the optical coupling structure of the light receiving module according to the first embodiment, it is difficult to manufacture the light receiving module without attaching the refractive matching adhesive to the inclined polished surface.
【００３９】以上のように本発明の実施の形態３によれ
ば、光ファイバ先端の傾斜研磨面４３表面に屈折率整合
接着剤４７による薄膜を形成することにより、屈折率整
合接着剤４７と空気層との境界面で反射した光を受光素
子４５に入射させる。その結果、傾斜研磨面４３の面精
度による伝搬光の反射損失、および傾斜研磨面４３にお
ける反射率のばらつきを防ぎ、安定した品質の受光モジ
ュールを提供することができる。As described above, according to the third embodiment of the present invention, by forming a thin film of the refractive index matching adhesive 47 on the surface of the inclined polishing surface 43 at the tip of the optical fiber, the refractive index matching adhesive 47 and the air The light reflected on the interface with the layer is incident on the light receiving element 45. As a result, it is possible to prevent the reflection loss of the propagation light due to the surface accuracy of the inclined polished surface 43 and the variation of the reflectance on the inclined polished surface 43, and to provide a light receiving module of stable quality.
【００４０】（実施の形態４）図５は本発明の実施の形
態４における光ファイバと受光素子の光結合構造の要部
拡大図であり、光ファイバ５１の先端部の傾斜研磨面５
３の表面には発水性樹脂による薄膜５８が形成されてい
る。(Embodiment 4) FIG. 5 is an enlarged view of a main part of an optical coupling structure between an optical fiber and a light receiving element according to Embodiment 4 of the present invention.
On the surface of No. 3, a thin film 58 made of a water-repellent resin is formed.
【００４１】以上のように構成された受光モジュールに
ついて、図５を用いてその動作を説明する。先端が斜め
に研磨された光ファイバ５１により反射して出射した信
号光５４を、基板５６上に設けられた受光素子５５の受
光面に入射されるようにした実施の形態４における受光
モジュールでは、光ファイバ５１のコア５２内を伝搬す
る信号光５４が傾斜研磨面５３で全反射する条件を求め
るとき、傾斜研磨面５３と空気層との境界面で全反射が
起こると想定している。したがって、傾斜研磨面５３に
空気と屈折率の違う水分が結露等により付着すると、信
号光５４の全反射する条件が変わり、その結果、信号光
５４は傾斜研磨面５３において全反射を起さず、受光モ
ジュールの光結合効率が低下するという問題がある。し
たがって、傾斜研磨面５３に水分が付着しないように、
発水性樹脂による薄膜５８を形成した。The operation of the light receiving module configured as described above will be described with reference to FIG. In the light receiving module according to the fourth embodiment, the signal light 54 reflected and emitted by the optical fiber 51 whose tip is polished obliquely is incident on the light receiving surface of the light receiving element 55 provided on the substrate 56. When determining the condition that the signal light 54 propagating in the core 52 of the optical fiber 51 is totally reflected by the inclined polishing surface 53, it is assumed that total reflection occurs at the boundary surface between the inclined polishing surface 53 and the air layer. Therefore, when moisture having a different refractive index from air adheres to the inclined polishing surface 53 due to dew condensation or the like, the condition for totally reflecting the signal light 54 changes. As a result, the signal light 54 does not cause total reflection on the inclined polishing surface 53. In addition, there is a problem that the light coupling efficiency of the light receiving module is reduced. Therefore, to prevent moisture from adhering to the inclined polishing surface 53,
A thin film 58 of a water-repellent resin was formed.
【００４２】以上のように実施の形態４によれば、光フ
ァイバ５１先端の傾斜研磨面５３表面に発水性樹脂によ
る薄膜５８を形成することにより、結露による光軸位置
ずれを防ぐことができる。As described above, according to the fourth embodiment, by forming the thin film 58 of the water-soluble resin on the surface of the inclined polishing surface 53 at the tip of the optical fiber 51, it is possible to prevent displacement of the optical axis due to dew condensation.
【００４３】（実施の形態５）図６は本発明の実施の形
態５における光ファイバと受光素子の光結合構造の要部
拡大図であり、６１は光ファイバを示す。この光ファイ
バ６１は、光ファイバ端面を光ファイバ光軸に対して直
角、かつ平滑な切り口に切断した後、光ファイバ６１の
コア６２を含む箇所まで斜め研磨加工を施している。光
ファイバ６１先端部の傾斜研磨面６３と空気層との境界
面により信号光６４を全反射させるには、光ファイバ６
１のコア６２を含む面が傾斜研磨面６３となれば良い。(Embodiment 5) FIG. 6 is an enlarged view of a main part of an optical coupling structure between an optical fiber and a light receiving element according to Embodiment 5 of the present invention, and 61 indicates an optical fiber. The optical fiber 61 is obtained by cutting the end face of the optical fiber at a right angle to the optical fiber optical axis and into a smooth cut, and then performing an oblique polishing process up to a portion including the core 62 of the optical fiber 61. To totally reflect the signal light 64 at the boundary between the inclined polishing surface 63 at the tip of the optical fiber 61 and the air layer, the optical fiber 6
The surface including one core 62 may be the inclined polishing surface 63.
【００４４】しかし、光ファイバ６１先端部において、
信号光６４の反射経路になるエッジ部分にだれ，欠けが
あると光損失になる。実施の形態５では、図６に示すよ
うに、基板６６上に直接実装された受光素子６５の受光
面に、光ファイバ６１のクラッドと等しい屈折率整合接
着剤６７を充填した後、コア６２を含む面まで斜め研磨
加工を施した光ファイバ６１の先端部を、受光素子６５
の受光面上を覆う屈折率整合接着剤６７中にコア６２が
浸らないように挿入する。その結果、信号光６４の反射
経路は、屈折率の等しい媒介中を進むので光損失がなく
なる。However, at the end of the optical fiber 61,
If there is any chipping at the edge portion which is a reflection path of the signal light 64, light loss occurs. In the fifth embodiment, as shown in FIG. 6, after filling a light receiving surface of a light receiving element 65 directly mounted on a substrate 66 with a refractive index matching adhesive 67 equal to the cladding of the optical fiber 61, the core 62 is removed. The tip of the optical fiber 61, which has been subjected to oblique polishing to the surface including the
The core 62 is inserted into the refractive index matching adhesive 67 that covers the light receiving surface of the core 62 so as not to be immersed. As a result, since the reflection path of the signal light 64 travels through a medium having the same refractive index, there is no light loss.
【００４５】以上のように実施の形態５によれば、実施
の形態１の受光モジュールに用いる光ファイバの斜め研
磨加工において、光ファイバ６１端面を光ファイバ光軸
に対して直角、かつ平滑な切り口に切断した後、コア６
２を含む箇所のみ斜め研磨加工を施すので、研磨除差部
６８が少なくなり、生産性が良い受光モジュールを得る
ことができる。As described above, according to the fifth embodiment, in the oblique polishing of the optical fiber used in the light receiving module of the first embodiment, the end face of the optical fiber 61 is perpendicular to the optical fiber optical axis and has a smooth cut surface. After cutting the core 6
Since the oblique polishing is performed only on the portion including No. 2, the number of polishing difference portions 68 is reduced, and a light receiving module with good productivity can be obtained.
【００４６】[0046]
【発明の効果】以上のように本発明は、受光モジュール
の光結合構造に関して、端面を光ファイバ光軸に対して
直角、かつ平坦な切り口に切断した後、光ファイバコア
を含む箇所まで斜め研磨加工を施した光ファイバを、基
板平面に対して所定角度に傾け、該光ファイバ先端の研
磨面で反射して射出した光が、光ファイバクラッドの屈
折率と等しい屈折率整合接着剤を介して、基板上に設け
られた受光素子の受光部に垂直に入射させることによ
り、高い光結合効率が得られるとともに、生産性が良
く、特性の経時的劣化が少ない受光モジュールを得られ
る。As described above, according to the present invention, the optical coupling structure of the light receiving module is obtained by cutting the end face into a flat cut perpendicular to the optical axis of the optical fiber and then obliquely polishing the optical fiber core to a location including the optical fiber core. The processed optical fiber is tilted at a predetermined angle with respect to the plane of the substrate, and the light emitted from the polished surface at the tip of the optical fiber is reflected through a refractive index matching adhesive equal to the refractive index of the optical fiber clad. By vertically entering the light receiving portion of the light receiving element provided on the substrate, a high light coupling efficiency can be obtained, and a light receiving module with good productivity and little deterioration of characteristics over time can be obtained.
【図１】本発明の実施の形態１，２における光ファイバ
と受光素子の光結合構造を示す側面断面図FIG. 1 is a side sectional view showing an optical coupling structure between an optical fiber and a light receiving element according to Embodiments 1 and 2 of the present invention.
【図２】本発明の実施の形態１との比較例を示す説明図FIG. 2 is an explanatory diagram showing a comparative example with the first embodiment of the present invention.
【図３】光ファイバ先端部分における信号光の反射経路
を示す図FIG. 3 is a diagram showing a reflection path of a signal light at an end portion of an optical fiber.
【図４】本発明の実施の形態３における光ファイバと受
光素子の光結合構造の要部拡大図FIG. 4 is an enlarged view of a main part of an optical coupling structure between an optical fiber and a light receiving element according to a third embodiment of the present invention.
【図５】本発明の実施の形態４における光ファイバと受
光素子の光結合構造の要部拡大図FIG. 5 is an enlarged view of a main part of an optical coupling structure between an optical fiber and a light receiving element according to a fourth embodiment of the present invention.
【図６】本発明の実施の形態５における光ファイバ端末
の要部拡大図FIG. 6 is an enlarged view of a main part of an optical fiber terminal according to a fifth embodiment of the present invention.
【図７】従来の光ファイバと受光素子の光結合構造を示
す側面断面拡大図FIG. 7 is an enlarged side sectional view showing a conventional optical coupling structure between an optical fiber and a light receiving element.
【図８】実施の形態による受光モジュールの特性と従来
の受光モジュールの特性とを示すグラフFIG. 8 is a graph showing characteristics of the light receiving module according to the embodiment and characteristics of a conventional light receiving module.
１１，２１，３１，４１，５１，６１ 光ファイバ １２，２２，３２，４２，５２，６２ コア １３，２３，３３，４３，５３，６３ 傾斜研磨面 １４，２４，３４，４４，５４，６４ 信号光 １５，２５，４５，５５，６５ 受光素子 １６，２６，４６，５６，６６ 基板 １７，４７，５７，６７ 屈折率整合接着剤 ２７ 出射ビーム ２８ 反射光 ３５ 光ファイバクラッド ４８ 屈折率整合接着剤による薄膜 ５８ 発水性樹脂による薄膜 ６８ 研磨除差部 11, 21, 31, 41, 51, 61 Optical fiber 12, 22, 32, 42, 52, 62 Core 13, 23, 33, 43, 53, 63 Inclined polished surface 14, 24, 34, 44, 54, 64 Signal light 15, 25, 45, 55, 65 Light receiving element 16, 26, 46, 56, 66 Substrate 17, 47, 57, 67 Refractive index matching adhesive 27 Outgoing beam 28 Reflected light 35 Optical fiber clad 48 Refractive index matching adhesive Thin film made of chemicals 58 Thin film made of water-soluble resin 68 Polishing difference
───────────────────────────────────────────────────── フロントページの続き (72)発明者 根岸 英彦 神奈川県横浜市港北区綱島東四丁目３番１ 号 松下通信工業株式会社内 Ｆターム(参考） 2H037 AA01 BA11 CA00 CA10 DA04 DA06 DA17 5F088 AA01 BA10 BA11 BA13 BB01 JA14 LA01 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Hidehiko Negishi 4-3-1 Tsunashimahigashi, Kohoku-ku, Yokohama-shi, Kanagawa F-term (reference) in Matsushita Communication Industrial Co., Ltd. 2H037 AA01 BA11 CA00 CA10 DA04 DA06 DA17 5F088 AA01 BA10 BA11 BA13 BB01 JA14 LA01
Claims (5)
なる傾斜研磨面を先端に有する光ファイバから出射した
光を、基板上に設けられた受光素子の受光面に、光ファ
イバクラッドの屈折率と等しい屈折率整合接着剤を介し
て入射させるように構成したことを特徴とする受光モジ
ュール。A light emitted from an optical fiber having an inclined polished surface formed by polishing at an end with respect to an optical axis of an optical fiber is applied to a light receiving surface of a light receiving element provided on a substrate by an optical fiber cladding. A light receiving module, wherein the light is incident through a refractive index matching adhesive having a refractive index equal to the refractive index.
て所定角度に傾け、前記傾斜研磨面で反射した光が、前
記受光素子の受光面に垂直に入射するように構成したこ
とを特徴とする請求項１記載の受光モジュール。2. The optical fiber according to claim 1, wherein the optical axis of the optical fiber is inclined at a predetermined angle with respect to the plane of the substrate, so that light reflected by the inclined polishing surface is perpendicularly incident on a light receiving surface of the light receiving element. The light receiving module according to claim 1, wherein
よる薄膜を形成することを特徴とする請求項１記載の受
光モジュール。3. The light receiving module according to claim 1, wherein a thin film made of the refractive index adhesive is formed on the inclined polishing surface.
膜を形成したことを特徴とする請求項１記載の受光モジ
ュール。4. The light receiving module according to claim 1, wherein a thin film made of a water-soluble resin is formed on the inclined polishing surface.
アを含む前記傾斜研磨面と、前記傾斜研磨面の先端部に
形成され、前記光ファイバ光軸に対して直角かつ平滑な
切り口からなる直角研磨面とから構成したことを特徴と
する請求項１記載の受光モジュール。5. The optical fiber according to claim 1, wherein an end face of the optical fiber is formed at the inclined polishing surface including an optical fiber core and at a right angle formed at a front end of the inclined polishing surface and formed at a right angle and a smooth cut end with respect to the optical fiber optical axis. 2. The light receiving module according to claim 1, wherein the light receiving module comprises a polished surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10172956A JP2000009968A (en) | 1998-06-19 | 1998-06-19 | Photodetecting module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10172956A JP2000009968A (en) | 1998-06-19 | 1998-06-19 | Photodetecting module |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000009968A true JP2000009968A (en) | 2000-01-14 |
Family
ID=15951489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10172956A Pending JP2000009968A (en) | 1998-06-19 | 1998-06-19 | Photodetecting module |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000009968A (en) |
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