JP2000009607A - Clean sample collecting apparatus and method for measuring clean value of equipment surface using the same - Google Patents
Clean sample collecting apparatus and method for measuring clean value of equipment surface using the sameInfo
- Publication number
- JP2000009607A JP2000009607A JP17589098A JP17589098A JP2000009607A JP 2000009607 A JP2000009607 A JP 2000009607A JP 17589098 A JP17589098 A JP 17589098A JP 17589098 A JP17589098 A JP 17589098A JP 2000009607 A JP2000009607 A JP 2000009607A
- Authority
- JP
- Japan
- Prior art keywords
- wiping
- outer cylinder
- hollow outer
- pressure
- value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】この発明は、有機物からなる
汚れが問題となるような設備の洗浄後の壁面の、清浄度
を採取するための清浄試料採取装置及びこれを使用する
設備表面の清浄値測定方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean sampling apparatus for collecting cleanliness of a cleaned wall of a facility in which contamination from organic matter becomes a problem, and a clean value of a surface of the facility using the same. Related to the measurement method.
【0002】[0002]
【従来の技術】従来この種の清浄度の測定方法として、
JISに規定されている拭取り法がある。これは洗浄後
の壁面を白布、又はそれの代わりの濾紙で強い力で拭
き、つぎにほぼ同じ面積の別の部分を黒布で同様に拭
き、白布及び黒布の付着物を肉眼で目視して清浄度を測
定するものである。2. Description of the Related Art Conventionally, as a method for measuring this type of cleanliness,
There is a wiping method specified in JIS. This is done by wiping the washed wall with a white cloth or a filter paper instead, and then another part of the same area with a black cloth in the same way, and visually checking the adherence of the white cloth and the black cloth with the naked eye. To measure cleanliness.
【0003】[0003]
【発明が解決しようとする課題】しかしながらこのよう
な測定方法では、清浄試料の採取が作業員の手作業によ
るため、各異なる対象物についてそれぞれに最適な拭取
圧力ですべての付着物をばらつきなく拭取ることができ
ず、また清浄試料に基づく清浄度の測定が、作業員の目
視によって行われることから、肉眼で判別できない微量
の付着物は測定することができなくて、正確に測定する
ことができない等の問題がある。However, in such a measuring method, since a clean sample is manually collected by an operator, all the adhered substances are uniformly dispersed at an optimum wiping pressure for each of different objects. Since the cleanliness cannot be wiped off and the cleanliness based on the clean sample is measured by the operator's eyes, it is impossible to measure a small amount of deposits that cannot be discerned by the naked eye, and it must be accurately measured. There are problems such as not being able to do.
【0004】そこでこの発明の目的は、前記のような従
来の測定方法のもつ問題を解消し、清浄試料を各異なる
対象物について、それぞれに最適な拭取圧力でばらつき
なく、すべて拭取ることができる清浄試料採取装置と、
清浄試料に基づく清浄度の測定が、作業員の目視によっ
て行われることがなくて、肉眼で判別できない微量の付
着物を、正確に測定することができる洗浄度の測定方法
とを提供するにある。Accordingly, an object of the present invention is to solve the above-mentioned problems of the conventional measuring method, and to wipe all the clean samples with respect to different objects at optimum wiping pressures without any variation. A clean sampling device that can
It is an object of the present invention to provide a method of measuring the degree of cleanliness, in which a measurement of cleanliness based on a clean sample is not performed visually by an operator, and a very small amount of deposits that cannot be discriminated by the naked eye can be accurately measured. .
【0005】[0005]
【課題を解決するための手段】この発明は前記のような
目的を達成するために、請求項1に記載の発明は、設備
壁面の清浄度を測定するための清浄試料採取装置におい
て、中空外筒と、この中空外筒内に上下動可能に配置さ
れた内筒とを有し、中空外筒内には内筒を常時下方に付
勢する付勢部材が設けられ、中空外筒の上部には付勢部
材の付勢力を所定圧力に設定する圧力設定手段が設けら
れ、内筒の底面には拭取基材が着脱可能に装着されるこ
とを特徴とするものである。SUMMARY OF THE INVENTION In order to achieve the above object, the present invention is directed to a clean sampling apparatus for measuring the cleanliness of an equipment wall. A cylinder, and an inner cylinder disposed vertically movably in the hollow outer cylinder. An urging member for constantly urging the inner cylinder downward is provided in the hollow outer cylinder. Is provided with pressure setting means for setting the urging force of the urging member to a predetermined pressure, and a wiping base is detachably mounted on the bottom surface of the inner cylinder.
【0006】請求項2に記載の発明は、請求項1に記載
の発明において、圧力設定手段は、中空外筒の頂板に設
けられためねじ部に螺合するねじ棒と、このねじ棒を所
定位置に固定する固定部材と、前記所定位置を表示する
表示手段とを有することを特徴とするものである。According to a second aspect of the present invention, in the first aspect of the present invention, the pressure setting means is provided on the top plate of the hollow outer cylinder, and is provided with a screw rod which is screwed into a threaded portion, It has a fixing member for fixing to a position, and display means for displaying the predetermined position.
【0007】請求項3に記載の発明は、請求項1又は2
に記載の発明において、ねじ棒の頭部には操作部材が、
また下端には押圧部材が取り付けられ、押圧部材は、そ
の裏面に付勢部材の頂部が当接し、一側には中空外筒に
設けた縦孔を貫通して外部に突出している指示杆が設け
られ、縦孔の側壁には設定拭取圧力の表示部が設けられ
ていることを特徴とするものである。[0007] The invention described in claim 3 is the first or second invention.
In the invention described in the above, the operating member on the head of the screw rod,
A pressing member is attached to the lower end, and the pressing member has an abutting member abutting on a back surface thereof, and an indicator rod that protrudes to the outside through a vertical hole provided in the hollow outer cylinder on one side. And a display section of the set wiping pressure is provided on a side wall of the vertical hole.
【0008】請求項4に記載の発明は、設備表面の清浄
値測定方法において、設備の性質によって、予め設定拭
取圧力を算定し、清浄試料採取装置のねじ棒を回動して
付勢部材の付勢力を前記設定拭取圧力としてねじ棒を固
定し、予め乾燥して重量を計量してある拭取基材を清浄
試料採取装置の内筒の底面に装着し、この拭取基材を測
定対象物の測定面に密着させて、その表面が清浄試料採
取装置の中空外筒の下端面と一致するまで押圧し、この
ような状態のままで、前記設備の所定の検査面積(A)
を拭き取り、拭取基材を内筒の底面から取り外し、この
拭取基材をTOC計を用いてそのTOC値(T1)を測
定し、このTOC値(T1)から、この拭取基材とは別
の、新規の予め測定している拭取基材のTOC値(T
2)を減じ、この差値(T1−T2)を前記検査面積
(A)で除して、検査面積の単位面積あたりの残留TO
C値を算出して、清浄度の指標値とすることを特徴とす
るものである。According to a fourth aspect of the present invention, in the method for measuring the cleanness value of the equipment surface, the preset wiping pressure is calculated in advance according to the nature of the equipment, and the urging member is turned by rotating the screw rod of the clean sampler. With the urging force of the set wiping pressure, the screw rod is fixed, and a pre-dried and weighed wiping substrate is attached to the bottom surface of the inner cylinder of the clean sample collection device. It is brought into close contact with the measurement surface of the object to be measured and pressed until its surface coincides with the lower end surface of the hollow outer cylinder of the clean sampling apparatus. In this state, a predetermined inspection area (A) of the equipment
, The wiping substrate is removed from the bottom surface of the inner cylinder, and the wiping substrate is measured for its TOC value (T1) using a TOC meter. From the TOC value (T1), the wiping substrate and the wiping substrate are removed. Is the TOC value of another new pre-measured wipe substrate (T
2) is subtracted, and the difference (T1-T2) is divided by the inspection area (A) to obtain a residual TO per unit area of the inspection area.
The C value is calculated and used as an index value of cleanliness.
【0009】請求項5に記載の発明は、請求項4に記載
の発明において、清浄試料採取装置の押圧部材によって
中空外筒に設けた表示部を読みとって、拭取圧力が設定
拭取圧力と一致したことを知り、ねじ棒を固定すること
を特徴とするものである。According to a fifth aspect of the present invention, in accordance with the fourth aspect of the present invention, the display section provided on the hollow outer cylinder is read by the pressing member of the clean sample collection apparatus, and the wiping pressure is set to the set wiping pressure. It is characterized by knowing that they match, and fixing the screw rod.
【0010】この発明において使用されるTOC計と
は、有機炭素計のことで高純度酸素を通した燃焼炉の中
で試料を900℃で加熱して、有機物を二酸化炭素に分解
する。そしてこの二酸化炭素を赤外線ガスで測定し、二
酸化炭素量から有機体炭素量をを求める測定器のことで
あり、従来から使用されているものである。The TOC meter used in the present invention is an organic carbon meter, which heats a sample at 900 ° C. in a combustion furnace through which high-purity oxygen is passed to decompose organic substances into carbon dioxide. The carbon dioxide is measured with an infrared gas to determine the amount of organic carbon from the amount of carbon dioxide, which has been conventionally used.
【0011】この発明において使用される拭取基材とし
ては、メンブランフィルター、セラミック繊維、石英濾
紙等の有機炭素量が少なくほぼ一定ものであって、従来
から使用されているものである。The wiping substrate used in the present invention has a low organic carbon content, such as a membrane filter, a ceramic fiber, a quartz filter paper, etc., and is almost constant, and is conventionally used.
【0012】[0012]
【発明の実施の形態】図面に示すこの発明の実施形態
は、中空外筒1と、この中空外筒1内に上下動可能に配
置された内筒2とを有し、内筒の上部フランジ17が中空
外筒1の内面にビス15によって固定されたリング16に、
図2に示すように最低位置で支承される。中空外筒1内
には内筒2を常時下方に付勢するばねからなる付勢部材
3が設けられ、中空外筒1の上部には付勢部材3の付勢
力を所定圧力に設定する圧力設定手段が設けられ、内筒
2の底面には拭取基材4がOリング5によって着脱可能
に装着される。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention shown in the drawings has a hollow outer cylinder 1 and an inner cylinder 2 which is vertically movable within the hollow outer cylinder 1, and an upper flange of the inner cylinder. 17 is attached to a ring 16 fixed to the inner surface of the hollow outer cylinder 1 with screws 15,
It is supported at the lowest position as shown in FIG. A biasing member 3 made of a spring that constantly biases the inner cylinder 2 downward is provided in the hollow outer cylinder 1, and a pressure for setting the biasing force of the biasing member 3 to a predetermined pressure is provided above the hollow outer cylinder 1. A setting means is provided, and a wiping substrate 4 is detachably attached to the bottom surface of the inner cylinder 2 by an O-ring 5.
【0013】圧力設定手段は、中空外筒1の頂板6に設
けられためねじ部7に螺合するねじ棒8と、めねじ部7
にねじ込まれてねじ棒8を所定位置に固定する止めねじ
からなる固定部材9とを有し、ねじ棒8の頭部には操作
部材10が、また下端には押圧部材11が取り付けられてい
る。押圧部材11は、その裏面に付勢部材3の頂部が当接
し、一側には中空外筒1に設けた縦孔12を貫通して外部
に突出している指示杆13が設けられ、縦孔12の側壁には
設定拭取圧力の表示部14が設けられている。The pressure setting means includes a threaded rod 8 provided on the top plate 6 of the hollow outer cylinder 1 and screwed to the threaded portion 7, and a female threaded portion 7.
And a fixing member 9 consisting of a set screw for screwing the screw rod 8 into a predetermined position. The operating member 10 is attached to the head of the screw rod 8 and the pressing member 11 is attached to the lower end thereof. . The pressing member 11 has a top surface of the urging member 3 abutting on the back surface thereof, and has an indicator rod 13 protruding outside through a vertical hole 12 provided in the hollow outer cylinder 1 on one side. On the side wall of 12, a display section 14 for the set wiping pressure is provided.
【0014】この実施形態を使用するに際しては、つぎ
の手順で予備試験を行って拭取圧力を設定する。 (1)検査対象となる設備又はそれと同じ材質の供試体
に、ビール、酵母等の汚れの原因物質を塗布し、塗布物
質は体積又は重量の測定してこれを明らかにしておく。 (2)この拭取装置を用いて汚れを拭取り、その時の拭
取圧力aを測定しておく。 (3)TOC分析によって汚れの量を測定し、汚れ物質
の拭取り回収率bを算出する。 (4)前記のa,bを数段階測定し、安定回収率bを実
現することができる拭取圧力aを最適拭取圧力とする。 (5)そしてこの最適拭取圧力を表示部14のどの表示に
該当するかを設定にする。When using this embodiment, a preliminary test is performed in the following procedure to set a wiping pressure. (1) A stain-causing substance such as beer or yeast is applied to equipment to be inspected or a specimen having the same material as the equipment to be inspected, and the applied substance is measured in volume or weight to clarify this. (2) Dirt is wiped using this wiping device, and the wiping pressure a at that time is measured. (3) The amount of dirt is measured by TOC analysis, and the wiping recovery rate b of the dirt substance is calculated. (4) The above a and b are measured at several stages, and the wiping pressure a that can realize the stable recovery rate b is set as the optimum wiping pressure. (5) Then, which display of the display unit 14 corresponds to the optimum wiping pressure is set.
【0015】そして固定部材9を操作してねじ棒8の固
定を解除し、操作部材10を操作してねじ棒8を回動して
押圧部材11を上下動し、その押圧部材11によって付勢部
材3を圧縮又は伸長してその付勢力すなわち拭取圧力を
加減し、この際押圧部材11とともに上下動する指示杆13
によって、縦孔12の側壁を表示部14を読みとって、拭取
圧力が設定拭取圧力と一致したら、ねじ棒8の回動を停
止して固定部材9によってねじ棒8を固定する。Then, the fixing member 9 is operated to release the fixing of the screw rod 8, and the operating member 10 is operated to rotate the screw rod 8 to move the pressing member 11 up and down, and to be urged by the pressing member 11. The member 3 is compressed or expanded to increase or decrease its urging force, that is, the wiping pressure.
By reading the side wall of the vertical hole 12 from the display unit 14, when the wiping pressure matches the set wiping pressure, the rotation of the screw rod 8 is stopped and the screw rod 8 is fixed by the fixing member 9.
【0016】つぎに拭取基材4を、作業員の皮脂が付着
しないように、ピンセット等を使用して、Oリング5に
よって内筒2の底面に装着する。Next, the wiping substrate 4 is mounted on the bottom surface of the inner cylinder 2 with an O-ring 5 using tweezers or the like so that sebum of an operator does not adhere.
【0017】このようにしたものを作業員が手にもっ
て、拭取基材4を測定面に密着させて、拭取基材4面
が、図3に示すように中空外筒1の下端面と一致するま
で押圧し、このようにすることによって付勢部材3によ
る拭取基材4面に対する押圧力が、前記の設定拭取圧力
と一致することとなり、作業員による拭取圧力のばらつ
きを防止することができる。The operator holds the above-mentioned material in hand, and brings the wiping substrate 4 into close contact with the measurement surface, so that the wiping substrate 4 has a lower end surface of the hollow outer cylinder 1 as shown in FIG. And the pressing force of the urging member 3 on the surface of the wiping substrate 4 coincides with the set wiping pressure. Can be prevented.
【0018】このような状態のままで、予備試験におい
て検査対象となる設備の所定の検査面積Aを最適拭取圧
力で拭き取る。この拭取面積Aは暫定的に100〜2500cm2
程度としておき、このサンプルのTOC分析結果から、
サンプル1個当たりの炭素量が0.03mg以上になるよう
に、拭取面積を設定する。この場合S/Nは2程度にな
るが、要求される分析精度に応じて拭取面積を更に大き
く設定すれば、S/Nを更に大きくすることができる。
拭取面積については、検査対象となる設備の汚れ状況
に、一般的な程度といえるものがなく、例えば同じ工場
内でもフローテーションタンク底バルブ表面と、酵母タ
ンク内壁表面では異なるし、同じ設備でも工場が違えば
装置や作業方法の些細な違いによって異なっているだろ
うと予測することができる。したがって前記暫定値100
〜2500cm2にこだわらずに、検体の種類毎に設定するこ
とが望ましい。In such a state, a predetermined inspection area A of the equipment to be inspected in the preliminary test is wiped with an optimum wiping pressure. This wiping area A is provisionally 100 ~ 2500cm 2
From the TOC analysis result of this sample,
The wiping area is set so that the amount of carbon per sample is 0.03 mg or more. In this case, the S / N is about 2, but the S / N can be further increased by setting the wiping area larger according to the required analysis accuracy.
Regarding the wiping area, the degree of contamination of the equipment to be inspected has no general degree.For example, even in the same factory, the surface of the flotation tank bottom valve and the surface of the yeast tank inner wall are different and even in the same equipment. We can predict that different factories will differ due to minor differences in equipment and working methods. Therefore, the provisional value 100
It is desirable to set for each type of specimen without being limited to 2500 cm 2 .
【0019】(6)拭取基材4を、作業員の皮脂が付着
しないように、ピンセット等を使用して、内筒2の底面
から取り外す。(6) The wiping substrate 4 is removed from the bottom surface of the inner cylinder 2 using tweezers or the like so that the sebum of the worker does not adhere.
【0020】(7)この拭取基材4を周知のTOC計
(株式会社、島津製作所製のSSM−5000A,TOC−
5000)を用いて拭取基材4のTOC値(T1)を測定す
る。(7) The wiping base material 4 is converted into a well-known TOC meter (SSM-5000A, TOC-Shimadzu, manufactured by Shimadzu Corporation).
5000), the TOC value (T1) of the wiping substrate 4 is measured.
【0021】(8)このTOC値(T1)から、この拭
取基材4とは別の、新規の予め測定している拭取基材の
TOC値(T2)を減じ、この差値(T1−T2)を前
記検査面積Aで除して、検査面積Aの単位面積あたりの
残留TOC値を算出して、清浄度の中間的数値である指
標値を対象となる設備に応じて、発酵タンク、濾過溜タ
ンク等の場合にはビールの重量として、酵母タンク等の
場合には酵母の重量として換算して表すことができる。
このためにはビール、酵母等の予め換算したい物質を用
いて検量線を引いておくことが必要になる。なお必ずし
も前記物質に換算する必要はなく、TOC測定値(単位
は炭素のmg)のままで清浄度の指標とすることができ
る。(8) From this TOC value (T1), the TOC value (T2) of a new pre-measured wiping substrate different from the wiping substrate 4 is subtracted, and the difference value (T1) -T2) is divided by the inspection area A to calculate a residual TOC value per unit area of the inspection area A, and an index value, which is an intermediate value of cleanliness, is determined according to the target equipment. In the case of a filtration tank or the like, the weight can be expressed as the weight of beer, and in the case of a yeast tank or the like, the weight can be expressed as the weight of yeast.
For this purpose, it is necessary to draw a calibration curve using a substance to be converted in advance, such as beer or yeast. It is not always necessary to convert to the substance, and the TOC measured value (unit: mg of carbon) can be used as an index of cleanliness.
【0022】〔実験例1〕前記のようなものにおいて、
拭取基材として、孔径が0.45μm、直径が47φmmのミリ
ポア製白色メンブランフィルタを使用し、酵母による汚
れを塗布してTOC計に燃焼させ、その総二酸化炭素量
を測定する実験を行った結果を図4に示している。これ
から汚れ量(酵母量)の増加に伴って、TOC計で測定
される総二酸化炭素量は増加しており、これらの数値の
ばらつきは、メンブランフィルタのロットによる差がほ
とんどないことが確認されている。[Experimental example 1] In the above,
Using a Millipore white membrane filter with a pore diameter of 0.45 μm and a diameter of 47 φmm as a wiping substrate, applying soil from yeast, burning it on a TOC meter, and conducting an experiment to measure the total carbon dioxide amount Is shown in FIG. From this, it was confirmed that the total amount of carbon dioxide measured by the TOC meter increased with the increase in the amount of soil (the amount of yeast), and that there was almost no difference between these numerical values depending on the lot of the membrane filter. I have.
【0023】〔実験例2〕拭取基材として前記のミリポ
ア製白色メンブランフィルタを使用し、洗浄方法の相違
によって、TOC計で測定される総二酸化炭素量の相違
を測定する実験を行った結果を、図5に示している。そ
の際の洗浄方法は、アルカリ洗浄、湯殺菌、水洗であ
る。[Experimental Example 2] The results of an experiment in which the above-mentioned Millipore white membrane filter was used as a wiping substrate and the difference in the total amount of carbon dioxide measured by a TOC meter was measured depending on the difference in the washing method. Is shown in FIG. The washing method at that time is alkali washing, hot water sterilization, and water washing.
【0024】[0024]
【発明の効果】この発明は前記のようであって、請求項
1に記載の発明は、設備壁面の清浄度を測定するための
清浄試料採取装置において、中空外筒と、この中空外筒
内に上下動可能に配置された内筒とを有し、中空外筒内
には内筒を常時下方に付勢する付勢部材が設けられ、中
空外筒の上部には付勢部材の付勢力を所定圧力に設定す
る圧力設定手段が設けられ、内筒の底面には拭取基材が
着脱可能に装着され、請求項2に記載の発明は、圧力設
定手段は、中空外筒の頂板に設けられためねじ部に螺合
するねじ棒と、このねじ棒を所定位置に固定する固定部
材と、付勢部材を押圧する押圧部材と、前記所定位置を
表示する表示手段とを有し、請求項3に記載の発明は、
ねじ棒の頭部には操作部材が、また下端には押圧部材が
取り付けられ、押圧部材は、その裏面に付勢部材の頂部
が当接し、その一側には中空外筒に設けた縦孔を貫通し
て外部に突出している指示杆が設けられ、縦孔の側壁に
は設定拭取圧力の表示部が設けられているので、各異な
る対象設備に最適な拭取圧力で、対象設備のすべての付
着物を拭き取ることができ、また拭き取りにばらつきが
なく、さらに肉眼で判別できない微量の付着物を正確に
採取することができるという効果がある。The present invention is as described above. According to the first aspect of the present invention, there is provided a clean sampling apparatus for measuring the cleanliness of equipment wall surfaces, comprising: a hollow outer cylinder; And a biasing member for constantly biasing the inner cylinder downward is provided in the hollow outer cylinder, and a biasing force of the biasing member is provided at an upper portion of the hollow outer cylinder. Is set to a predetermined pressure, a wiping base is detachably mounted on the bottom surface of the inner cylinder, and the pressure setting means is provided on the top plate of the hollow outer cylinder. It is provided with a screw rod to be screwed into the screw portion to be provided, a fixing member for fixing the screw rod at a predetermined position, a pressing member for pressing an urging member, and display means for displaying the predetermined position, The invention described in Item 3 is:
An operating member is attached to the head of the threaded rod, and a pressing member is attached to the lower end. The pressing member is in contact with the top of an urging member on the back surface, and has a vertical hole provided in a hollow outer cylinder on one side. There is an indicator rod that protrudes to the outside and is provided on the side wall of the vertical hole, and a display section of the set wiping pressure is provided. All the deposits can be wiped off, and there is an effect that there is no variation in the wiping and a small amount of deposits that cannot be discriminated with the naked eye can be accurately collected.
【0025】請求項4に記載の発明は、設備表面の清浄
値測定方法であって、設備の性質によって、予め設定拭
取圧力を算定し、洗浄試料採取装置のねじ棒を回動して
付勢部材の付勢力を前記設定拭取圧力としてねじ棒を固
定し、拭取基材を清浄試料採取装置の内筒の底面に装着
し、この拭取基材を測定対象物の測定面に密着させて、
その表面が洗浄試料採取装置の中空外筒の下端面と一致
するまで押圧し、このような状態のままで、前記設備の
所定の検査面積(A)を拭き取り、拭取基材を内筒の底
面から取り外し、この拭取基材をTOC計を用いてその
TOC値(T1)を測定し、このTOC値(T1)か
ら、この拭取基材とは別の、新規の予め測定している拭
取基材のTOC値(T2)を減じ、この差値(T1−T
2)を前記検査面積(A)で除して、検査面積の単位面
積あたりの残留TOC値を算出して、清浄度の指標値と
し、請求項5に記載の発明は、清浄試料採取装置の押圧
部材に設けた指示杆によって中空外筒に設けた表示部を
読みとって、拭取圧力が設定拭取圧力と一致したことを
知り、ねじ棒を固定するので、各異なる対象設備に最適
な拭取圧力で、すべての付着物を拭き取ることができ、
また拭き取りにばらつきがなく、さらに肉眼で判別でき
ない微量の付着物を測定し、さらに拭取基材に含まれる
炭素料がほぼ一定であることから、純粋な汚れ含量を正
確に測定することができるという効果がある。According to a fourth aspect of the present invention, there is provided a method for measuring a cleanness value of a facility surface, wherein a preset wiping pressure is calculated in advance according to the property of the facility, and a screw rod of the cleaning sample collecting device is rotated to attach the wiping pressure. The urging force of the urging member is used as the set wiping pressure, the screw rod is fixed, the wiping substrate is mounted on the bottom surface of the inner cylinder of the clean sampler, and the wiping substrate is brought into close contact with the measurement surface of the object to be measured. Let me
The surface is pressed until it coincides with the lower end surface of the hollow outer cylinder of the cleaning sample collecting apparatus. In this state, a predetermined inspection area (A) of the equipment is wiped, and the wiping substrate is removed from the inner cylinder. The TOC value (T1) is measured using a TOC meter after removing the base material from the bottom surface, and a new pre-measurement is performed from the TOC value (T1). The TOC value (T2) of the wiped substrate is reduced, and the difference value (T1-T
The invention according to claim 5, wherein 2) is divided by the inspection area (A) to calculate a residual TOC value per unit area of the inspection area, which is used as an index value of cleanliness. By reading the display portion provided on the hollow outer cylinder with the indicator rod provided on the pressing member, it is found that the wiping pressure matches the set wiping pressure, and the screw rod is fixed. With the removal pressure, all the deposits can be wiped off,
In addition, there is no variation in the wiping, and furthermore, it is possible to measure a very small amount of deposits that cannot be discerned by the naked eye, and since the carbon material contained in the wiping base is almost constant, the pure dirt content can be accurately measured. This has the effect.
【図1】この発明の清浄試料採取装置の実施形態の正面
図である。FIG. 1 is a front view of an embodiment of a clean sampling apparatus according to the present invention.
【図2】同上の線2−2による断面図である。FIG. 2 is a sectional view taken along line 2-2 in FIG.
【図3】同上の拭取基材の対象設備の壁面への押圧時を
示す断面図である。FIG. 3 is a cross-sectional view showing a state in which the wiping base material is pressed against a wall surface of a target facility.
【図4】同上の試験時における汚れ度合いによるTOC
測定結果を示す図面である。[FIG. 4] TOC according to the degree of contamination during the same test.
It is a drawing showing a measurement result.
【図5】同上の各洗浄処理と洗浄度との関係を示す図面
である。FIG. 5 is a drawing showing the relationship between each cleaning process and the degree of cleaning.
1 中空外筒 2 内筒 3 付勢部材 4 拭取基材 5 Oリング 6 頂板 7 ねじ部 8 ねじ棒 9 固定部材 10 操作部材 11 押圧部材 12 縦孔 13 指示杆 14 表示部 15 ビス 16 リング 17 フランジ DESCRIPTION OF SYMBOLS 1 Hollow outer cylinder 2 Inner cylinder 3 Urging member 4 Wiping base material 5 O-ring 6 Top plate 7 Screw part 8 Screw rod 9 Fixing member 10 Operating member 11 Pressing member 12 Vertical hole 13 Indicator rod 14 Display part 15 Screw 16 Ring 17 Flange
Claims (5)
能に配置された内筒とを有し、中空外筒内には内筒を常
時下方に付勢する付勢部材が設けられ、中空外筒の上部
には付勢部材の付勢力を所定圧力に設定する圧力設定手
段が設けられ、内筒の底面には拭取基材が着脱可能に装
着されることを特徴とする清浄試料採取装置。1. A hollow outer cylinder and an inner cylinder movably arranged in the hollow outer cylinder so as to be vertically movable, and an urging member for constantly urging the inner cylinder downward is provided in the hollow outer cylinder. Pressure setting means for setting the urging force of the urging member to a predetermined pressure is provided at an upper portion of the hollow outer cylinder, and a wiping base is detachably mounted on a bottom surface of the inner cylinder. Clean sampling equipment.
られためねじ部に螺合するねじ棒と、このねじ棒を所定
位置に固定する固定部材と、前記所定位置を表示する表
示手段とを有することを特徴とする請求項1に記載の清
浄試料採取装置。2. A pressure setting means, comprising: a screw rod provided on a top plate of a hollow outer cylinder and screwed to a screw portion; a fixing member for fixing the screw rod at a predetermined position; and a display means for displaying the predetermined position. The clean sampling apparatus according to claim 1, comprising:
には押圧部材が取付けられ、押圧部材は、その裏面に付
勢部材の頂部が当接し、一側には中空外筒に設けた縦孔
を貫通して外部に突出している指示杆が設けられ、縦孔
の側壁には設定拭取圧力の表示部が設けられていること
を特徴とする請求項1又は2に記載の清浄試料採取装
置。3. An operating member is attached to the head of the threaded rod, and a pressing member is attached to the lower end. The pressing member abuts the top of an urging member on the back surface, and has a hollow outer cylinder on one side. 3. The indicator rod according to claim 1, wherein an indicator rod is provided which protrudes to the outside through the provided vertical hole, and a display section of a set wiping pressure is provided on a side wall of the vertical hole. Clean sampling equipment.
(A)を拭き取り、拭取基材を内筒の底面から取り外
し、この拭取基材をTOC計を用いてそのTOC値(T
1)を測定し、このTOC値(T1)から、この拭取基
材とは別の、新規の予め測定している拭取基材のTOC
値(T2)を減じ、この差値(T1−T2)を前記検査
面積(A)で除して、検査面積の単位面積あたりの残留
TOC値を算出して、清浄度の指標値とすることを特徴
とする設備表面の清浄値測定方法。4. A predetermined inspection area (A) of equipment for measuring cleanliness is wiped off, the wiping base material is removed from the bottom surface of the inner cylinder, and the wiping base material has a TOC value (T.sub.T) using a TOC meter.
1), and from this TOC value (T1), the TOC of a new pre-measured wiping substrate different from the wiping substrate is measured.
The value (T2) is subtracted, and the difference value (T1-T2) is divided by the inspection area (A) to calculate a residual TOC value per unit area of the inspection area, which is used as an index value of cleanliness. A method for measuring the cleanliness of equipment surfaces characterized by the following.
空外筒に設けた表示部を読みとって、拭取圧力が設定拭
取圧力と一致したことを知り、ねじ棒を固定することを
特徴とする請求項4に記載の設備表面の清浄値測定方
法。5. The method according to claim 5, wherein a reading portion provided on the hollow outer cylinder is read by an indicating member of the clean sample collection device to find that the wiping pressure matches the set wiping pressure, and the screw rod is fixed. The method for measuring a cleanliness value of a facility surface according to claim 4.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17589098A JP2000009607A (en) | 1998-06-23 | 1998-06-23 | Clean sample collecting apparatus and method for measuring clean value of equipment surface using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17589098A JP2000009607A (en) | 1998-06-23 | 1998-06-23 | Clean sample collecting apparatus and method for measuring clean value of equipment surface using the same |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2000009607A true JP2000009607A (en) | 2000-01-14 |
Family
ID=16004023
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17589098A Pending JP2000009607A (en) | 1998-06-23 | 1998-06-23 | Clean sample collecting apparatus and method for measuring clean value of equipment surface using the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2000009607A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009519461A (en) * | 2005-12-16 | 2009-05-14 | スミスズ ディテクション‐トロント リミテッド | Sampling device |
JP2016070861A (en) * | 2014-10-01 | 2016-05-09 | 三浦工業株式会社 | Sampling pen |
-
1998
- 1998-06-23 JP JP17589098A patent/JP2000009607A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009519461A (en) * | 2005-12-16 | 2009-05-14 | スミスズ ディテクション‐トロント リミテッド | Sampling device |
JP2016070861A (en) * | 2014-10-01 | 2016-05-09 | 三浦工業株式会社 | Sampling pen |
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