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JP2000062137A - Method for printing solder paste - Google Patents

Method for printing solder paste

Info

Publication number
JP2000062137A
JP2000062137A JP10230400A JP23040098A JP2000062137A JP 2000062137 A JP2000062137 A JP 2000062137A JP 10230400 A JP10230400 A JP 10230400A JP 23040098 A JP23040098 A JP 23040098A JP 2000062137 A JP2000062137 A JP 2000062137A
Authority
JP
Japan
Prior art keywords
paste
substrate
mask
solder paste
holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10230400A
Other languages
Japanese (ja)
Inventor
Kenichi Obinata
健一 小日向
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP10230400A priority Critical patent/JP2000062137A/en
Publication of JP2000062137A publication Critical patent/JP2000062137A/en
Pending legal-status Critical Current

Links

Landscapes

  • Screen Printers (AREA)
  • Printing Methods (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a method capable of properly printing a solder paste on a printed substrate in a more minute pattern compared to a conventional printing method, under a simple hardware constitution. SOLUTION: A substrate 1 is placed at a specified position on a metal base 5 with an imbedded electric heater 6 which is freely temperature-controllable and a mask 2 having plural through holes 2a formed in a specific minute pattern is positioned on the substrate 1. In addition, the through holes 2a are filled with a solder paste 4 on the mask 2 by moving a squeegee 3. Next the solder paste 4 is heated by the electric heater 6 through the substrate 1 and the substrate 1 is separated from the mask 2. Through this heating operation, the volatile component of the paste 4 in the through holes 2a is dissipated by the heating operation resulting in the diminution of the volume of the paste 4. At the same time, the fluidity of the paste 4 and the viscosity of the paste 4 to the internal peripheral face of the through holes 2a are deteriorated. Fort this reason, the external peripheral face of the paste 4 is separated from the internal peripheral face of the through holes 2a.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、はんだペーストの
印刷方法に関し、詳しくは、はんだペーストをプリント
基板上にマスクを介して微細パターンで印刷する方法に
関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solder paste printing method, and more particularly to a method of printing a solder paste in a fine pattern on a printed circuit board through a mask.

【0002】[0002]

【従来の技術】民生機器の小型化・高機能化が進むなか
で、より高密度で低コストの実装形体が求められてい
る。例えば電子回路基板の製造において、プリント基板
(以下、基板という)上にチップ部品などの電子回路部
品をはんだ付けする際には、はんだペースト(クリーム
はんだ、又はソルダペーストと呼ばれることがある)に
よるメタルスクリーン印刷が採用されている。このよう
なはんだペースト印刷では、より微細なパターンで印刷
することが求められている。
2. Description of the Related Art As consumer appliances are becoming smaller and more sophisticated, there is a demand for higher density and lower cost packaging. For example, in the manufacture of electronic circuit boards, when soldering electronic circuit parts such as chip parts onto a printed circuit board (hereinafter referred to as the board), a metal formed by solder paste (sometimes called cream solder or solder paste) is used. Screen printing is used. In such solder paste printing, it is required to print with a finer pattern.

【0003】ところで、従来のはんだペーストの印刷で
は、図3に示す方法が採用されてきた。この図において
1は基板、2は所定のパターンで貫通孔(パターン孔)
2aが相互に適宜間隔をあけて多数形成されたマスク、
3はマスク上を直線移動するスキージ、4ははんだペー
スト(以下、ペーストということがある)である。
By the way, in the conventional printing of the solder paste, the method shown in FIG. 3 has been adopted. In this figure, 1 is a substrate and 2 is a through hole (pattern hole) with a predetermined pattern.
A plurality of masks 2a formed at appropriate intervals from each other,
Reference numeral 3 is a squeegee that moves linearly on the mask, and 4 is a solder paste (hereinafter sometimes referred to as paste).

【0004】ペーストの印刷では、スキージ3を適切な
圧力でマスク2に接触させた状態でマスク2上を直線移
動させることで、マスク2上のペースト4を貫通孔2a
に充填するとともに基板1上に塗布した後、基板1をマ
スク2から分離することにより、ペースト4をマスク2
を介して所定のパターンで基板1上に転写する。
In printing the paste, the squeegee 3 is moved linearly on the mask 2 with the squeegee 3 being in contact with the mask 2 with an appropriate pressure, so that the paste 4 on the mask 2 is passed through the through holes 2a.
And the paste is applied onto the substrate 1 and then the substrate 1 is separated from the mask 2 to remove the paste 4 from the mask 2.
Is transferred onto the substrate 1 in a predetermined pattern via.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、図3の
ペースト印刷方法では、貫通孔2a,2a間のピッチは
約200μmが限界(最小値)であって、これよりも微
細なパターンで印刷することは技術的に困難であった。
以下、これについて図面をもとに説明する。
However, in the paste printing method of FIG. 3, the pitch between the through holes 2a, 2a is about 200 μm as a limit (minimum value), and printing is performed with a finer pattern than this. Was technically difficult.
Hereinafter, this will be described with reference to the drawings.

【0006】すなわち、図4(a)に示すようにペース
ト4をマスク2の貫通孔2aに充填した後、基板1をマ
スク2から分離する際、図4(b)に示すように、ペー
スト4の一部または全部が貫通孔2a内に残ったままと
なり、適正なペースト転写を行うことが困難であった。
That is, when the paste 4 is filled in the through holes 2a of the mask 2 as shown in FIG. 4A, and when the substrate 1 is separated from the mask 2, as shown in FIG. However, it was difficult to perform proper paste transfer because some or all of them remained in the through holes 2a.

【0007】本発明は、従来技術の上記問題点に鑑みな
されたもので、その目的は、はんだペーストをファイン
パターンで印刷することができる方法を、簡単な構成で
提供することにある。
The present invention has been made in view of the above problems of the prior art, and an object thereof is to provide a method capable of printing a solder paste in a fine pattern with a simple structure.

【0008】[0008]

【課題を解決するための手段】上記目的達成のため、本
発明に係るはんだペーストの印刷方法は、貫通孔を所定
のパターンで多数形成したマスクを基板上に載せ、スキ
ージの移動でマスク上のはんだペーストを上記貫通孔に
充填した後、基板とマスクを分離することにより上記貫
通孔内のはんだペーストを基板上に転写する、はんだペ
ーストの印刷方法において、加熱自在の台座上に基板を
載せ、上記貫通孔に充填されたはんだペーストを台座の
加熱昇温により加熱してペースト内の揮発性成分(フラ
ックスの構成成分である溶剤など)を放散させた後、基
板とマスクを分離することを特徴とするものである。
To achieve the above object, the solder paste printing method according to the present invention places a mask having a large number of through holes formed in a predetermined pattern on a substrate, and moves the squeegee on the mask. After filling the through-hole with the solder paste, the solder paste in the through-hole is transferred onto the substrate by separating the substrate and the mask, in the solder paste printing method, the substrate is placed on a pedestal that can be heated, The solder paste filled in the above through holes is heated by heating the pedestal to raise the volatile components in the paste (such as a solvent that is a component of the flux), and then the substrate and the mask are separated. It is what

【0009】本発明では、台座の加熱昇温により基板を
適当な温度に加熱しながら、上記はんだペーストの充填
操作を行うこともできる。また台座として、これの加熱
温度を制御しうる加熱手段を設けた金属製台座を用いる
ことが望ましい。
In the present invention, the solder paste filling operation can be performed while heating the substrate to an appropriate temperature by heating the pedestal. Further, as the pedestal, it is desirable to use a metal pedestal provided with a heating means capable of controlling the heating temperature of the pedestal.

【0010】[0010]

【発明の実施の形態】以下、本発明の実施の形態を、図
面を参照しながら説明する。図1ははんだペースト印刷
方法を示す模式的断面図である。図2は図1の印刷方法
の作用説明断面図であって、(a)は基板加熱後のはん
だペーストの形態を示し、(b)は基板をマスクから分
離した後のはんだペーストの状態を示すものである。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic sectional view showing a solder paste printing method. 2A and 2B are sectional views for explaining the operation of the printing method of FIG. 1, in which FIG. 2A shows the form of the solder paste after heating the substrate, and FIG. 2B shows the state of the solder paste after separating the substrate from the mask. It is a thing.

【0011】図1に示すように、加熱手段として電熱ヒ
ータ6を埋設した金属製の台座5(例えば、厚肉のアル
ミニウム板)を設け、電熱ヒータ6を図示されない温度
制御機構に連絡する。また、この台座5は図示されない
昇降機構により上下動自在とする。さらに、例えば、薄
肉のステンレススチールからなるマスク2を図示されな
い支持機構により緊張状態で保持する。
As shown in FIG. 1, a metal pedestal 5 (for example, a thick aluminum plate) in which an electric heater 6 is embedded is provided as a heating means, and the electric heater 6 is connected to a temperature control mechanism (not shown). The pedestal 5 can be moved up and down by an elevator mechanism (not shown). Further, for example, the mask 2 made of thin stainless steel is held in a tension state by a support mechanism (not shown).

【0012】はんだペーストの印刷に際しては、基板1
を台座5上の所定位置に載せ、上記昇降機構により台座
5を上昇させ、基板1をマスク2に対し位置決めすると
ともに、基板上面をマスク下面に所定圧で接触させる。
図示されないタンクから、所定温度に加熱されたはんだ
ペースト4をマスク2上に供給する。ついで、スキージ
3をマスク2上面に接触させた状態で移動させることに
より、ペースト4をマスク2の貫通孔2aに充填すると
ともに、ペースト4の下面を基板1上に圧着させる。
When printing the solder paste, the substrate 1
Is placed at a predetermined position on the pedestal 5, the pedestal 5 is raised by the elevating mechanism to position the substrate 1 with respect to the mask 2, and the upper surface of the substrate is brought into contact with the lower surface of the mask with a predetermined pressure.
The solder paste 4 heated to a predetermined temperature is supplied onto the mask 2 from a tank (not shown). Then, the squeegee 3 is moved in a state of being in contact with the upper surface of the mask 2 to fill the through holes 2a of the mask 2 with the paste 4 and press the lower surface of the paste 4 onto the substrate 1.

【0013】ついで、電熱ヒータ6により台座5を所定
温度に昇温させ、この温度に適当な時間維持する。これ
により図2(a)に示すように、貫通孔2a内のペース
ト4中の溶剤などの揮発性成分が蒸発または揮発するた
め、ペースト4の体積が縮小するのと並行して、ペース
ト4の流動性が低下し、本来のペースト状態から半固形
状に変化し(これにより、貫通孔2aの内周面に対する
ペーストの粘着性が低下する)、ペースト4の外周面が
貫通孔2aの内周面から離れる。したがって、この状態
で台座5を上記昇降機構で下降させれば、図2(b)に
示すように、ペースト4が適正が形態で基板1上に転写
される。
Then, the pedestal 5 is heated to a predetermined temperature by the electric heater 6 and maintained at this temperature for an appropriate time. As a result, as shown in FIG. 2A, since the volatile components such as the solvent in the paste 4 in the through holes 2a are evaporated or volatilized, the volume of the paste 4 is reduced and the paste 4 The fluidity is reduced, and the paste state changes from the original paste state to a semi-solid state (this reduces the adhesiveness of the paste to the inner peripheral surface of the through hole 2a), and the outer peripheral surface of the paste 4 is the inner peripheral surface of the through hole 2a. Leave the plane. Therefore, when the pedestal 5 is lowered by the elevating mechanism in this state, the paste 4 is properly transferred onto the substrate 1 as shown in FIG. 2B.

【0014】本発明者の検討によれば、貫通孔2a内の
ペーストの全体が基板1上に転写されるかどうかは、貫
通孔2aの開口面積Sh(マスクの平面図における貫通
孔の面積)の、貫通孔2aの内周面面積Swに対する
比:Sh/Swが大きく影響することが確認されてい
る。すなわち、ペースを貫通孔に充填した後、そのまま
基板をマスクから分離する図3の従来方法では、Sh/
Swの値は約1/2が最小値であり、これよりも大きけ
れば大きいほど、基板へのペーストの転写性(印刷性)
が低下する。このため、貫通孔の径が微小になるほど、
適正な転写を行うことが困難であった。換言すると、マ
スクの肉厚が大きいほど、貫通孔が小さいほど、それぞ
れ転写性が低下する。
According to a study by the present inventor, it is determined whether the entire paste in the through hole 2a is transferred onto the substrate 1 by the opening area Sh of the through hole 2a (the area of the through hole in the plan view of the mask). It has been confirmed that the ratio: Sh / Sw of the through hole 2a to the inner peripheral surface area Sw has a great influence. That is, in the conventional method of FIG. 3 in which the substrate is separated from the mask as it is after the pace is filled in the through hole, Sh /
The minimum value of Sw is about 1/2, and the larger the value, the transferability (printability) of the paste to the substrate.
Is reduced. Therefore, the smaller the diameter of the through hole,
It was difficult to perform proper transfer. In other words, as the thickness of the mask is larger and the size of the through hole is smaller, the transferability is lower.

【0015】これに対し、図1に示す本発明方法によれ
ば、Sh/Swの値を1/2より小さくしても、適正な
ペースト印刷を容易に行うことができる。このことは、
従来よりも微細なパターンのはんだ印刷が可能であるこ
とを意味している。
On the other hand, according to the method of the present invention shown in FIG. 1, even if the value of Sh / Sw is smaller than 1/2, proper paste printing can be easily performed. This is
This means that solder printing with a finer pattern than before is possible.

【0016】[0016]

【発明の効果】以上の説明で明らかなように、本発明の
はんだペースト印刷方法では、加熱自在の台座上に基板
を載せ、スキージでマスクの貫通孔に充填されたはんだ
ペーストを台座の加熱昇温により、基板を介して間接的
に加熱してペースト内の揮発性成分を放散させた後、基
板とマスクを分離するようにしたので、簡単な構成によ
り、マスクからのはんだペーストの離れ性が向上する。
このため、マスク貫通孔内のペーストの全体を確実に基
板側に転写することができ、従来の印刷方法に比べて、
よりファインなパターンのはんだ印刷を容易に行うこと
ができる。
As is apparent from the above description, according to the solder paste printing method of the present invention, the substrate is placed on the pedestal that can be heated and the squeegee is used to heat the solder paste filled in the through holes of the mask. The temperature is indirectly heated via the substrate to dissipate the volatile components in the paste, and then the substrate and the mask are separated, so the solder paste can be separated from the mask with a simple configuration. improves.
Therefore, it is possible to reliably transfer the entire paste in the mask through hole to the substrate side, compared to the conventional printing method,
It is possible to easily perform solder printing of a finer pattern.

【0017】具体的には、マスク貫通孔の開口面積Sh
とマスク貫通孔の内周面面積Swとの比:Sh/Swを
1/2より小さくしても、適正なペースト印刷が可能で
あり、200μmピッチよりも微細なパターンのはんだ
印刷を容易に実現することができる効果がある。
Specifically, the opening area Sh of the mask through hole is
And the inner surface area Sw of the mask through-holes: Sh / Sw is smaller than 1/2, proper paste printing is possible, and solder printing of patterns finer than 200 μm pitch is easily realized. There is an effect that can be.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係るはんだペースト印刷方法を示す模
式的断面図である。
FIG. 1 is a schematic cross-sectional view showing a solder paste printing method according to the present invention.

【図2】図1の印刷方法の作用説明断面図であって、
(a)は基板加熱後のはんだペーストの形態を示し、
(b)は基板をマスクから分離した後のはんだペースト
の状態を示すものである。
FIG. 2 is a sectional view for explaining the operation of the printing method of FIG.
(A) shows the form of the solder paste after heating the substrate,
(B) shows the state of the solder paste after the substrate is separated from the mask.

【図3】従来のはんだペースト印刷方法を示す模式的断
面図である。
FIG. 3 is a schematic cross-sectional view showing a conventional solder paste printing method.

【図4】図3の印刷方法の問題点を説明する模式的断面
図であって、(a)ははんだペーストをマスクの貫通孔
に充填した後の状態を示し、(b)は基板をマスクから
分離した後のはんだペーストの状態を示すものである。
4A and 4B are schematic cross-sectional views for explaining the problems of the printing method of FIG. 3, in which FIG. 4A shows a state after the solder paste is filled in the through holes of the mask, and FIG. 2 shows the state of the solder paste after being separated from.

【符号の説明】[Explanation of symbols]

1…基板、2…マスク、2a…貫通孔、3…スキージ、
4…はんだペースト、5…台座、6…電熱ヒータ。
1 ... Substrate, 2 ... Mask, 2a ... Through hole, 3 ... Squeegee,
4 ... Solder paste, 5 ... Pedestal, 6 ... Electrothermal heater.

─────────────────────────────────────────────────────
─────────────────────────────────────────────────── ───

【手続補正書】[Procedure amendment]

【提出日】平成11年4月22日(1999.4.2
2)
[Submission date] April 22, 1999 (1999.4.2)
2)

【手続補正1】[Procedure Amendment 1]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0014[Correction target item name] 0014

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0014】一般的に貫通孔2a内のペーストの全体が
基板1上に転写されるかどうかは、開口部のアスペクト
比すなわち貫通孔2aの開口径D(マスクの平面図にお
ける貫通孔の径)と、貫通孔2aの高さ(マスク板厚)
Tの比T/Dが大きく影響することが確認されている。
すなわちペーストを貫通孔に充填した後、そのまま基板
をマスクから分離する図3の従来方法では、T/Dの値
は約1/2が最小値であり、これよりも大きければ大き
いほど、基板へのペーストの転写性(印刷性)が低下す
る。このため、貫通孔の径が微小になるほど、適正な転
写を行うことが困難であった。換言すると、マスクの肉
厚が大きいほど、貫通孔が小さいほど、それぞれ転写性
が低下する。
Generally, whether the entire paste in the through hole 2a is transferred onto the substrate 1 depends on the aspect ratio of the opening.
That is, the opening diameter D of the through hole 2a (in the plan view of the mask)
Through hole diameter) and height of through hole 2a (mask plate thickness)
It has been confirmed that the ratio T / D of T has a great influence.
That is, in the conventional method of FIG. 3 in which the paste is filled in the through holes and then the substrate is separated from the mask as it is, the value of T / D is about 1/2 at the minimum value, and if it is larger than this, it is large. As a result, the transferability (printability) of the paste onto the substrate decreases. Therefore, the smaller the diameter of the through hole, the more difficult it is to perform proper transfer. In other words, as the thickness of the mask is larger and the size of the through hole is smaller, the transferability is lower.

【手続補正2】[Procedure Amendment 2]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0015[Name of item to be corrected] 0015

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0015】これに対し、図1に示す本発明方法によれ
ば、T/Dの値を1/2より大きくしても、適正なペー
スト印刷を容易に行うことができる。このことは、従来
よりも微細なパターンのはんだ印刷が可能であることを
意味している。
On the other hand, according to the method of the present invention shown in FIG. 1 , proper paste printing can be easily performed even if the value of T / D is larger than 1/2 . This means that solder printing with a finer pattern than before is possible.

【手続補正3】[Procedure 3]

【補正対象書類名】明細書[Document name to be amended] Statement

【補正対象項目名】0017[Correction target item name] 0017

【補正方法】変更[Correction method] Change

【補正内容】[Correction content]

【0017】具体的には、マスク貫通孔の開口径Dとマ
スク貫通孔の高さ(マスク板厚)Tとの比:T/Dを1
/2より大きくしても、適正なペースト印刷が可能であ
り、200μmピッチよりも微細なパターンのはんだ印
刷を容易に実現することができる効果がある。
Specifically, the opening diameter D of the mask through hole and the mask diameter
Ratio of height of through-hole (mask thickness) T: T / D is 1
Even if it is larger than / 2 , there is an effect that proper paste printing is possible and solder printing of a pattern finer than 200 μm pitch can be easily realized.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) H05K 3/34 505 H05K 3/34 505C ─────────────────────────────────────────────────── ─── Continued Front Page (51) Int.Cl. 7 Identification Code FI Theme Coat (Reference) H05K 3/34 505 H05K 3/34 505C

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 貫通孔を所定のパターンで多数形成した
マスクを基板上に載せ、スキージの移動でマスク上のは
んだペーストを前記貫通孔に充填した後、基板とマスク
を分離することにより前記貫通孔内のはんだペーストを
基板上に転写する、はんだペーストの印刷方法におい
て、加熱自在の台座上に基板を載せ、前記貫通孔に充填
されたはんだペーストを台座の加熱昇温により加熱して
ペースト内の揮発性成分を放散させた後、基板とマスク
を分離することを特徴とする、はんだペーストの印刷方
法。
1. A mask having a large number of through holes formed in a predetermined pattern is placed on a substrate, the solder paste on the mask is filled in the through holes by moving a squeegee, and then the substrate and the mask are separated to separate the through holes. In the solder paste printing method of transferring the solder paste in the holes onto the substrate, the substrate is placed on a pedestal that can be freely heated, and the solder paste filled in the through holes is heated by heating the pedestal to heat the inside of the paste. A method for printing a solder paste, characterized in that the substrate and the mask are separated after the volatile components of (1) are diffused.
【請求項2】 請求項1において、台座の加熱昇温によ
り基板を所定温度に加熱しながら、前記はんだペースト
の充填操作を行うことを特徴とする、はんだペーストの
印刷方法。
2. The solder paste printing method according to claim 1, wherein the solder paste filling operation is performed while heating the substrate to a predetermined temperature by heating the pedestal.
【請求項3】 請求項1または2において台座として、
加熱温度を制御しうる加熱手段を設けた金属製台座を用
いることを特徴とする、はんだペーストの印刷方法。
3. The pedestal according to claim 1 or 2,
A method for printing a solder paste, characterized by using a metal pedestal provided with a heating means capable of controlling a heating temperature.
JP10230400A 1998-08-17 1998-08-17 Method for printing solder paste Pending JP2000062137A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10230400A JP2000062137A (en) 1998-08-17 1998-08-17 Method for printing solder paste

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10230400A JP2000062137A (en) 1998-08-17 1998-08-17 Method for printing solder paste

Publications (1)

Publication Number Publication Date
JP2000062137A true JP2000062137A (en) 2000-02-29

Family

ID=16907295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10230400A Pending JP2000062137A (en) 1998-08-17 1998-08-17 Method for printing solder paste

Country Status (1)

Country Link
JP (1) JP2000062137A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7789285B2 (en) * 2004-10-29 2010-09-07 Intel Corporation Solder printing process to reduce void formation in a microvia
JP2010228104A (en) * 2009-03-25 2010-10-14 Denso Corp Filling device of conductive material and filling method using the same
JP2013193407A (en) * 2012-03-22 2013-09-30 Nec Corp Screen printing apparatus and screen printing method
KR101575651B1 (en) 2014-04-25 2015-12-08 주식회사 루멘스 Bonding system of light emitting device and its bonding method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7789285B2 (en) * 2004-10-29 2010-09-07 Intel Corporation Solder printing process to reduce void formation in a microvia
JP2010228104A (en) * 2009-03-25 2010-10-14 Denso Corp Filling device of conductive material and filling method using the same
JP2013193407A (en) * 2012-03-22 2013-09-30 Nec Corp Screen printing apparatus and screen printing method
KR101575651B1 (en) 2014-04-25 2015-12-08 주식회사 루멘스 Bonding system of light emitting device and its bonding method

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