JP2000051809A - Dust adhesion plate and dust removing tool - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a dust adhesion plate preventing fallen dust from bein whirled up. SOLUTION: A dust adhesion plate 5 is provided with an adhesion plate (a receiving base) 4 with an adhesion layer 3 on its top face, a plurality of support rods (pilles) 2 extending upward from the adhesion plate 4 and a lid-like top plate 1 supported with the support rods 2 and with a number of through- holes 1A. It is possible thereby to stick the dust falling from the through-holes or a network of the top plate and there exists no possibility of that the dust fallen down is whirled up.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dust adhesive plate and, more particularly, to a dust adhesive plate for preventing falling dust from rising.

[0002]

2. Description of the Related Art In the process of manufacturing a semiconductor device, if the amount of floating dust is large, the performance and yield of products are reduced.
For this reason, in a semiconductor device manufacturing plant, a fiber mat, a sponge-like mat, or the like is generally installed at a location where a large amount of dust falls, and the dust that has fallen thereon is cleaned and removed.

[0003]

However, in a manufacturing process using a non-laminar flow method in which dust circulates due to turbulence in airflow, the fallen dust soars up, so that there is a problem that a large amount of dust adheres to the product. Was. In view of the circumstances as described above, an object of the present invention is to provide a dust adhesive plate that prevents falling dust from rising.

[0004]

In order to achieve the above object, a dust adhesive plate according to the present invention comprises an adhesive plate having an adhesive layer on an upper surface, a plurality of support columns extending upward from the adhesive plate, and a support column. And an upper plate having a large number of through holes or a mesh-shaped upper plate supported by the upper plate, and dust falling from the through holes or the mesh of the upper plate is adhered by an adhesive layer.

[0005] In the present specification, the term "adhesion" includes the meaning of adhesion. According to the present invention, the falling dust is prevented from flying up, and the amount of dust adhering to the product being manufactured is greatly reduced. Further, when the adhesive strength of the adhesive layer is reduced, the work may be easily performed by replacing the adhesive plate with an unused adhesive layer.

[0006] Preferably, the support column is connected to the upper plate at the upper end,
The upper plate and the support pillar are detachably attached to the adhesive plate as an integral body. An example of the adhesive layer is an adhesive sheet having an adhesive surface on the upper surface. In this case, the pressure-sensitive adhesive sheet is preferably constituted by a laminated sheet formed by laminating a large number of single-sided pressure-sensitive adhesive sheets. Thus, when the adhesive strength is reduced, only the uppermost single-sided adhesive sheet is peeled off, and an unused adhesive surface can be easily exposed. In addition, the lower end of a support pillar is normally located on an adhesive sheet. Another example of the adhesive layer is a non-volatile mucus layer.

[0007] A dust removing device according to the present invention is a dust removing device for sucking dust-containing air from a suction port to remove dust, and for allowing purified air to flow out of an outflow port. And a dust chamber having the dust adhesive plate according to the present invention mounted parallel to the flow direction of the dust.

[0008]

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. Embodiment 1 This embodiment is an embodiment of the dust adhesive plate according to the present invention. FIG. 1 is a schematic development view of the dust adhesive plate according to the present embodiment, and FIG. 2 is a partial side sectional view taken along the line II of FIG. The dust adhesive plate 5 according to the present embodiment includes an adhesive plate (receiving stand) 4 having an adhesive layer 3 on an upper surface, and an adhesive plate 4.
And a plurality of support pillars (pile) 2 extending upward from the base plate, and a lid-shaped upper plate 1 supported by the support pillar 2 and having a large number of through holes 1A. The support column 2 is coupled to the upper plate 1 at the upper end, and the upper plate 1 and the support column 2 are detachably attached to the adhesive plate 4 as an integral body. The pressure-sensitive adhesive layer 3 is constituted by a laminated sheet formed by laminating a large number of single-sided pressure-sensitive adhesive sheets each having a pressure-sensitive adhesive surface on the upper surface. This laminated sheet is also referred to as a dust capturing adhesive mat. The lower end of the support column 2 is located on the uppermost adhesive sheet.

When the dust adhesive plate 5 is arranged at a predetermined position where there is a lot of dust, the dust that has dropped onto the upper plate 1 and passed through the through hole 1A is adhered to the adhesive layer 3. When a large amount of dust adheres to the adhesive surface, the upper plate 1 and the support pillar 2 are removed (FIG. 1).
Remove the top single-sided adhesive film to expose the unused adhesive surface.

According to this embodiment, the dust adhered to the dust adhesive plate does not adhere to the product being manufactured. In addition, by peeling off the uppermost single-sided adhesive sheet to which the dust has adhered and the adhesive strength has been reduced, an unused adhesive surface can be easily exposed. In addition, it is possible to eliminate the necessity of cleaning even in a place where the degree of cleanness is maintained. In place of the adhesive layer 3, a non-volatile oil or the like may be thinly applied. In this case, when a large amount of dust adheres, the upper plate 1
Then, the support pillar 2 is removed, the oil is wiped off, and if necessary, unused oil is applied.

Embodiment 2 This embodiment is an embodiment of a dust removing apparatus according to the present invention. FIG. 3 is a side view illustrating the configuration of the dust removing device according to the present embodiment. The dust removing device 6 of the present embodiment includes a dust removing chamber 9.
It has. The dust removal chamber 9 includes a fan 8 for sucking dust-containing air, and the dust adhesive plate 5 of the first embodiment laid at least on the bottom. In addition, the dust removing device 6 blows air to the processing object to which dust adheres to blow off the dust, a hose for supplying gas (air), a suction punching plate (perforated plate), and a suction air passage. And a filter for removing light dust. Further, the dust removal device 6 includes a fan switch 10 for switching the start and stop of the operation of the fan 8, a speed controller 11 for adjusting the rotation speed of the fan, and an indicator 12
And

In order to use the dust removing device 6, air is sucked into a dust removing chamber by a fan, and gas is blown to a workpiece by a blowing nozzle to blow off dust. The light dust is sucked by the fan airflow and is captured by a suction means (filter) in the apparatus. On the other hand, heavy dust is captured by the dust adhesive plate 5 (dust-adhesive mat) installed at least at the bottom of the processing chamber. Thus, dust adhering to the object is easily removed in a short time.

[0013]

According to the dust adhesive plate of the present invention, it has an adhesive plate having an adhesive layer on the upper surface, a plurality of support columns extending upward from the adhesive plate, and a large number of through holes supported by the support columns. An upper plate or a mesh-like upper plate. This allows
Dust that has fallen from the through-hole or mesh of the upper plate can be adhered by the adhesive layer, and the dust that has fallen does not soar as in the related art. In addition, it is possible to make an appropriate size as an adhesive plate and to spread it on a floor or the like, so that replacement and maintenance of the adhesive layer are easy. Further, according to the dust removing apparatus of the present invention, the dust removing chamber including the fan for sucking the dust-containing air and the dust adhesive plate of the present invention placed parallel to the flow direction of the air is provided. . This realizes a dust removing device that can easily remove dust adhering to an object to be processed in a short time.

[Brief description of the drawings]

FIG. 1 is a schematic development view of a dust adhesive plate according to a first embodiment.

FIG. 2 is a partial side sectional view taken along the line II in FIG. 1;

FIG. 3 is a side view illustrating a configuration of a dust removing device according to a second embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Upper plate 1A Through-hole 2 Support pillar (pile) 3 Adhesive layer 4 Adhesive plate (pedestal) 5 Dust adhesive plate 6 Dust remover 8 Fan 9 Dust chamber 10 Fan switch 11 Speed controller 12 Indicator

Claims (7)

[Claims] 1. An adhesive plate having an adhesive layer on an upper surface, a plurality of support columns extending upward from the adhesive plate, and an upper plate having a large number of through holes or a mesh-like upper plate supported by the support columns. A dust adhesive plate, comprising: an adhesive layer for adhering dust dropped from a through hole or a mesh of an upper plate. 2. The dust adhesive plate according to claim 1, wherein the support column is connected to the upper plate at the upper end, and the upper plate and the support column are detachably attached to the adhesive plate as an integral body. 3. The dust adhesive plate according to claim 1, wherein the adhesive layer is an adhesive sheet having an adhesive surface on an upper surface. 4. The dust-adhesive plate according to claim 3, wherein the pressure-sensitive adhesive sheet is a laminated sheet formed by laminating a large number of single-sided pressure-sensitive adhesive sheets. 5. The dust adhesive plate according to claim 3, wherein a lower end of the support pillar is located on the adhesive sheet. 6. The dust adhesive plate according to claim 1, wherein the adhesive layer comprises a nonvolatile mucus layer. 7. A dust remover for sucking dust-containing air from a suction port to remove dust and flowing out purified air from an outlet, comprising: a fan for sucking dust-containing air; A dust removal apparatus comprising: a dust removal chamber having the dust adhesive plate according to any one of claims 1 to 6 mounted in parallel.