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ITMI20072314A1 - Sistema a microspecchi - Google Patents

Sistema a microspecchi

Info

Publication number
ITMI20072314A1
ITMI20072314A1 IT002314A ITMI20072314A ITMI20072314A1 IT MI20072314 A1 ITMI20072314 A1 IT MI20072314A1 IT 002314 A IT002314 A IT 002314A IT MI20072314 A ITMI20072314 A IT MI20072314A IT MI20072314 A1 ITMI20072314 A1 IT MI20072314A1
Authority
IT
Italy
Prior art keywords
microspecchi
microspecchi system
Prior art date
Application number
IT002314A
Other languages
English (en)
Inventor
Stefan Pinter
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20072314A1 publication Critical patent/ITMI20072314A1/it

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)
IT002314A 2006-12-14 2007-12-11 Sistema a microspecchi ITMI20072314A1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102006059073A DE102006059073A1 (de) 2006-12-14 2006-12-14 Mikrospiegelanordnung

Publications (1)

Publication Number Publication Date
ITMI20072314A1 true ITMI20072314A1 (it) 2008-06-15

Family

ID=39399629

Family Applications (1)

Application Number Title Priority Date Filing Date
IT002314A ITMI20072314A1 (it) 2006-12-14 2007-12-11 Sistema a microspecchi

Country Status (5)

Country Link
US (1) US7843620B2 (it)
JP (1) JP2008152254A (it)
DE (1) DE102006059073A1 (it)
FR (1) FR2909987B1 (it)
IT (1) ITMI20072314A1 (it)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008054784B4 (de) 2008-12-17 2021-09-16 Robert Bosch Gmbh Mikrospiegel
SE533992C2 (sv) * 2008-12-23 2011-03-22 Silex Microsystems Ab Elektrisk anslutning i en struktur med isolerande och ledande lager
US7863752B2 (en) * 2009-02-25 2011-01-04 Capella Photonics, Inc. MEMS device with integrated via and spacer
TW201120402A (en) * 2009-12-03 2011-06-16 Ind Tech Res Inst System and method for contructing high dynamic range images
JP2011177851A (ja) * 2010-03-03 2011-09-15 Fuji Electric Co Ltd Ｍｅｍｓ部品の製造方法
DE102011080559B4 (de) 2011-08-05 2021-09-02 Bayerische Motoren Werke Aktiengesellschaft Beleuchtungsvorrichtung eines Fahrzeugs mit in einem Medium gelagerten Mikrospiegeln, wobei die Dämpfung des Mediums durch Druckänderung an einen Fahrzustand des Fahrzeugs angepasst wird
DE102011120660A1 (de) 2011-11-28 2013-05-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikrospiegelanordnung
US9448394B2 (en) 2013-03-14 2016-09-20 The Board Of Trustees Of The Leland Stanford Junior University Arrayed dual axis confocal microscopes
DE102014208498B4 (de) * 2014-05-07 2024-05-29 Robert Bosch Gmbh Montagekörper für Mikrospiegelchips, Spiegelvorrichtung und Herstellungsverfahren für eine Spiegelvorrichtung
DE102016200505A1 (de) 2016-01-16 2017-07-20 Robert Bosch Gmbh Mikrospiegelvorrichtung
DE102016207644A1 (de) * 2016-05-03 2017-11-09 Robert Bosch Gmbh Vorrichtung zum Aussenden eines Laserstrahls und entsprechendes Herstellungsverfahren
WO2022100828A1 (en) * 2020-11-12 2022-05-19 Huawei Technologies Co., Ltd. Micromechanical resonator wafer assembly and method of fabrication thereof
CN116661130B (zh) * 2023-07-26 2023-10-20 西安知象光电科技有限公司 一种单芯片集成的微镜反馈元件

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69116435T2 (de) * 1990-05-30 1996-08-14 Hitachi Automotive Eng Halbleiterbeschleunigungsmesser und Kraftfahrzeugsteuerungssystem mit einem solchen
US5907425A (en) * 1995-12-19 1999-05-25 The Board Of Trustees Of The Leland Stanford Junior University Miniature scanning confocal microscope

Also Published As

Publication number Publication date
FR2909987B1 (fr) 2013-12-20
JP2008152254A (ja) 2008-07-03
US7843620B2 (en) 2010-11-30
DE102006059073A1 (de) 2008-06-19
US20080144149A1 (en) 2008-06-19
FR2909987A1 (fr) 2008-06-20

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