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IT1397895B1 - Procedimento per la compensazione di quadratura - Google Patents

Procedimento per la compensazione di quadratura

Info

Publication number
IT1397895B1
IT1397895B1 ITMI2010A000070A ITMI20100070A IT1397895B1 IT 1397895 B1 IT1397895 B1 IT 1397895B1 IT MI2010A000070 A ITMI2010A000070 A IT MI2010A000070A IT MI20100070 A ITMI20100070 A IT MI20100070A IT 1397895 B1 IT1397895 B1 IT 1397895B1
Authority
IT
Italy
Prior art keywords
procedure
square compensation
compensation
square
Prior art date
Application number
ITMI2010A000070A
Other languages
English (en)
Inventor
Johannes Classen
Christoph Gauger
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20100070A1 publication Critical patent/ITMI20100070A1/it
Application granted granted Critical
Publication of IT1397895B1 publication Critical patent/IT1397895B1/it

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733Structural details or topology
    • G01C19/5755Structural details or topology the devices having a single sensing mass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5726Signal processing

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Gyroscopes (AREA)
ITMI2010A000070A 2009-01-29 2010-01-21 Procedimento per la compensazione di quadratura IT1397895B1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009000475.0A DE102009000475B4 (de) 2009-01-29 2009-01-29 Verfahren zur Quadraturkompensation

Publications (2)

Publication Number Publication Date
ITMI20100070A1 ITMI20100070A1 (it) 2010-07-30
IT1397895B1 true IT1397895B1 (it) 2013-02-04

Family

ID=42308724

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2010A000070A IT1397895B1 (it) 2009-01-29 2010-01-21 Procedimento per la compensazione di quadratura

Country Status (4)

Country Link
US (1) US8479555B2 (it)
JP (1) JP5665325B2 (it)
DE (1) DE102009000475B4 (it)
IT (1) IT1397895B1 (it)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009019318A1 (de) * 2009-04-30 2011-03-24 Continental Teves Ag & Co. Ohg Verfahren zum präzisen Messbetrieb eines mikromechanischen Drehratensensors
DE102012200132A1 (de) * 2012-01-05 2013-07-11 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
DE102012224081A1 (de) * 2012-12-20 2014-06-26 Continental Teves Ag & Co. Ohg Sensor zum Erfassen einer Drehrate eines Objektes
DE102017213815A1 (de) * 2017-08-08 2019-02-14 Robert Bosch Gmbh Drehratensensor mit einem Substrat, Herstellungsverfahren für einen Drehratensensor
DE102021202132A1 (de) * 2020-03-25 2021-09-30 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zur Bestimmung einer Detektionssensitivität eines Drehratensensors
US20230332890A1 (en) * 2022-04-18 2023-10-19 Analog Devices, Inc. Quadrature trim vertical electrodes for yaw axis coriolis vibratory gyroscope

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
US6230563B1 (en) 1998-06-09 2001-05-15 Integrated Micro Instruments, Inc. Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability
DE19939998A1 (de) * 1999-08-24 2001-03-01 Bosch Gmbh Robert Vorrichtung zur Vorspannungserzeugung für einen schwingenden Drehratensensor
JP3525862B2 (ja) * 2000-05-22 2004-05-10 トヨタ自動車株式会社 センサ素子及びセンサ装置
US7313958B2 (en) * 2002-01-12 2008-01-01 Robert Bosch Gmbh Rotational rate sensor
WO2003058167A1 (de) 2002-01-12 2003-07-17 Robert Bosch Gmbh Drehratensensor
DE10350037A1 (de) * 2003-10-27 2005-05-25 Robert Bosch Gmbh Drehratensensor
DE102004061804B4 (de) 2004-12-22 2015-05-21 Robert Bosch Gmbh Mikromechanischer Drehratensensor mit Fehlerunterdrückung
US7444869B2 (en) 2006-06-29 2008-11-04 Honeywell International Inc. Force rebalancing and parametric amplification of MEMS inertial sensors
DE102006049887A1 (de) * 2006-10-23 2008-04-24 Robert Bosch Gmbh Drehratensensor mit Quadraturkompensationsstruktur

Also Published As

Publication number Publication date
US20110153251A1 (en) 2011-06-23
ITMI20100070A1 (it) 2010-07-30
DE102009000475B4 (de) 2023-07-27
JP5665325B2 (ja) 2015-02-04
US8479555B2 (en) 2013-07-09
DE102009000475A1 (de) 2010-08-05
JP2010175543A (ja) 2010-08-12

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