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IT1204420B - Super-purificatore per azoto e relativo procedimento di purificazione - Google Patents

Super-purificatore per azoto e relativo procedimento di purificazione

Info

Publication number
IT1204420B
IT1204420B IT20963/86A IT2096386A IT1204420B IT 1204420 B IT1204420 B IT 1204420B IT 20963/86 A IT20963/86 A IT 20963/86A IT 2096386 A IT2096386 A IT 2096386A IT 1204420 B IT1204420 B IT 1204420B
Authority
IT
Italy
Prior art keywords
purifier
super
nitrogen
purification process
related purification
Prior art date
Application number
IT20963/86A
Other languages
English (en)
Other versions
IT8620963A0 (it
Inventor
Nagai Kiyoshi
Claudio Boffito
Fabrizio Doni
Marco Succi
Original Assignee
Getters Spa
Taiyo Snaso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Getters Spa, Taiyo Snaso Co Ltd filed Critical Getters Spa
Publication of IT8620963A0 publication Critical patent/IT8620963A0/it
Application granted granted Critical
Publication of IT1204420B publication Critical patent/IT1204420B/it

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00Nitrogen; Compounds thereof
    • C01B21/04Purification or separation of nitrogen
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00Nitrogen; Compounds thereof
    • C01B21/04Purification or separation of nitrogen
    • C01B21/0405Purification or separation processes
    • C01B21/0494Combined chemical and physical processing
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00Nitrogen; Compounds thereof
    • C01B21/04Purification or separation of nitrogen
    • C01B21/0405Purification or separation processes
    • C01B21/0433Physical processing only
    • C01B21/045Physical processing only by adsorption in solids
    • C01B21/0483Physical processing only by adsorption in solids in getters
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00Purification or separation of specific gases
    • C01B2210/0001Separation or purification processing
    • C01B2210/0003Chemical processing
    • C01B2210/0004Chemical processing by oxidation
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00Purification or separation of specific gases
    • C01B2210/0001Separation or purification processing
    • C01B2210/0009Physical processing
    • C01B2210/0014Physical processing by adsorption in solids
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00Purification or separation of specific gases
    • C01B2210/0001Separation or purification processing
    • C01B2210/0009Physical processing
    • C01B2210/0014Physical processing by adsorption in solids
    • C01B2210/0023Physical processing by adsorption in solids in getters
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2210/00Purification or separation of specific gases
    • C01B2210/0042Making ultrapure specific gas

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Gas Separation By Absorption (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Treating Waste Gases (AREA)
IT20963/86A 1985-06-28 1986-06-27 Super-purificatore per azoto e relativo procedimento di purificazione IT1204420B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60140628A JPS623006A (ja) 1985-06-28 1985-06-28 窒素の超精製装置、並びに精製方法

Publications (2)

Publication Number Publication Date
IT8620963A0 IT8620963A0 (it) 1986-06-27
IT1204420B true IT1204420B (it) 1989-03-01

Family

ID=15273115

Family Applications (1)

Application Number Title Priority Date Filing Date
IT20963/86A IT1204420B (it) 1985-06-28 1986-06-27 Super-purificatore per azoto e relativo procedimento di purificazione

Country Status (10)

Country Link
JP (1) JPS623006A (it)
KR (1) KR930006690B1 (it)
BE (1) BE904998A (it)
CA (1) CA1300346C (it)
DE (1) DE3621013C2 (it)
FR (1) FR2584062B1 (it)
GB (1) GB2177080B (it)
IT (1) IT1204420B (it)
NL (1) NL192104C (it)
SE (1) SE463149B (it)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1227219B (it) * 1988-09-26 1991-03-27 Getters Spa Apparecchiatura e metodo relativo per asportare impurezze gassose da gas inerti ed assicurare livelli estremamente bassi di idrogeno
DE3835825C1 (it) * 1988-10-21 1990-03-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich, De
FR2642678A1 (fr) * 1989-02-07 1990-08-10 Air Liquide Procede d'elaboration d'une atmosphere gazeuse en contact avec un metal a haute temperature
DE3926015A1 (de) * 1989-08-05 1991-02-07 Messer Griesheim Gmbh Verfahren zur feinreinigung von gasen
IT1237944B (it) * 1990-01-05 1993-06-19 Getters Spa Metodo per determinare la fine della vita utile di un purificatore di gas inerte e relativa apparecchiatura
IT1246358B (it) * 1990-07-12 1994-11-17 Getters Spa Processo per eliminare impurita' da un gas idruro
IT1244006B (it) * 1990-11-02 1994-06-28 Getters Spa Procedimento di purificazione dell'ammoniaca.
IT1270875B (it) * 1993-04-29 1997-05-13 Getters Spa Procedimento di purificazione dell'idrogeno e purificatore relativo
US5238469A (en) * 1992-04-02 1993-08-24 Saes Pure Gas, Inc. Method and apparatus for removing residual hydrogen from a purified gas
US6436352B1 (en) 1993-04-29 2002-08-20 Saes Getter, S.P.A. Hydrogen purification
JPH1157371A (ja) * 1997-08-11 1999-03-02 Taiyo Toyo Sanso Co Ltd 超清浄空気の製造方法
US6068685A (en) * 1997-10-15 2000-05-30 Saes Pure Gas, Inc. Semiconductor manufacturing system with getter safety device
DE69803408T2 (de) 1997-10-15 2002-08-08 Saes Pure Gas, Inc. Gasreinigungssystem mit sicherheitsvorrichtung und verfahren zur gasreinigung
US6299670B1 (en) * 1999-06-10 2001-10-09 Saes Pure Gas, Inc. Integrated heated getter purifier system
KR100356611B1 (ko) * 2000-08-10 2002-10-18 주식회사 아토 질소 정제 방법 및 정제 장치
ITMI20010930A1 (it) 2001-05-07 2002-11-07 Getters Spa Metodo per la misura della concentrazione di idrogeno e metano in azoto mediante spetroscopia di mobilita' ionica
ITMI20011193A1 (it) 2001-06-06 2002-12-06 Getters Spa Metodo per la misura mediante spettroscopia di mobilita' ionica dellaconcentrazione di acqua in argon, idrogeno, azoto e elio
JP4918255B2 (ja) * 2005-12-22 2012-04-18 ウチヤ・サーモスタット株式会社 窒素ガス発生装置
CN110759323A (zh) * 2018-07-27 2020-02-07 隆基绿能科技股份有限公司 一种气体纯化反应器及气体纯化方法
CN112978692B (zh) * 2021-03-04 2022-08-05 北京高麦克仪器科技有限公司 780氦气纯化器
JP7210803B1 (ja) * 2022-10-04 2023-01-23 レール・リキード-ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード ガス精製装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3535074A (en) * 1965-10-29 1970-10-20 Hitachi Ltd Method and apparatus for purifying crude inert gases
BE792561A (en) * 1972-12-11 1973-03-30 Getters Spa Gas purifier - esp for rare gases and hydrogen with regeneration system for absorber cartridges
IT1115156B (it) * 1979-04-06 1986-02-03 Getters Spa Leghe zr-fe per l'assorbimento di idrogeno a basse temperature
DE3137569A1 (de) * 1981-09-22 1983-04-21 Leybold-Heraeus GmbH, 5000 Köln Verfahren und vorrichtung zur herstellung von hochreinem stickstoff
JPS6020323A (ja) * 1983-07-15 1985-02-01 Toshiba Corp デイスク装置

Also Published As

Publication number Publication date
GB8615619D0 (en) 1986-07-30
DE3621013A1 (de) 1987-01-08
JPH0456763B2 (it) 1992-09-09
IT8620963A0 (it) 1986-06-27
FR2584062B1 (fr) 1990-12-21
SE8602870D0 (sv) 1986-06-27
NL192104B (nl) 1996-10-01
CA1300346C (en) 1992-05-12
BE904998A (fr) 1986-10-16
SE463149B (sv) 1990-10-15
NL192104C (nl) 1997-02-04
SE8602870L (sv) 1986-12-29
GB2177080B (en) 1989-08-31
DE3621013C2 (de) 1996-02-15
KR870000237A (ko) 1987-02-17
GB2177080A (en) 1987-01-14
JPS623006A (ja) 1987-01-09
KR930006690B1 (ko) 1993-07-22
FR2584062A1 (fr) 1987-01-02
NL8601692A (nl) 1987-01-16

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Legal Events

Date Code Title Description
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19970528