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IT1134153B - Ugello per depositare in continuo su un substrato uno strato di una materia solida - Google Patents

Ugello per depositare in continuo su un substrato uno strato di una materia solida

Info

Publication number
IT1134153B
IT1134153B IT25742/80A IT2574280A IT1134153B IT 1134153 B IT1134153 B IT 1134153B IT 25742/80 A IT25742/80 A IT 25742/80A IT 2574280 A IT2574280 A IT 2574280A IT 1134153 B IT1134153 B IT 1134153B
Authority
IT
Italy
Prior art keywords
nozzle
substrate
layer
solid material
storing continuously
Prior art date
Application number
IT25742/80A
Other languages
English (en)
Other versions
IT8025742A0 (it
Inventor
Bastian Otto Baumberger
Rainhard Kalbskopf
Original Assignee
Siv Soc Italiana Vetro
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siv Soc Italiana Vetro filed Critical Siv Soc Italiana Vetro
Publication of IT8025742A0 publication Critical patent/IT8025742A0/it
Application granted granted Critical
Publication of IT1134153B publication Critical patent/IT1134153B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/453—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/211—SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/212—TiO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Chemical Vapour Deposition (AREA)
  • Nozzles (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
IT25742/80A 1979-11-21 1980-11-03 Ugello per depositare in continuo su un substrato uno strato di una materia solida IT1134153B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1037779 1979-11-21

Publications (2)

Publication Number Publication Date
IT8025742A0 IT8025742A0 (it) 1980-11-03
IT1134153B true IT1134153B (it) 1986-07-31

Family

ID=4362579

Family Applications (1)

Application Number Title Priority Date Filing Date
IT25742/80A IT1134153B (it) 1979-11-21 1980-11-03 Ugello per depositare in continuo su un substrato uno strato di una materia solida

Country Status (16)

Country Link
US (1) US4361284A (it)
EP (1) EP0029809B1 (it)
JP (1) JPS5687451A (it)
KR (2) KR830004448A (it)
AU (1) AU544964B2 (it)
CA (1) CA1150749A (it)
CS (1) CS274255B2 (it)
DD (1) DD154584A5 (it)
DE (1) DE3066643D1 (it)
ES (1) ES497005A0 (it)
IT (1) IT1134153B (it)
MX (1) MX153336A (it)
PL (1) PL129254B1 (it)
SU (1) SU1187705A3 (it)
TR (1) TR21534A (it)
ZA (1) ZA807242B (it)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH643469A5 (fr) * 1981-12-22 1984-06-15 Siv Soc Italiana Vetro Installation pour deposer en continu, sur la surface d'un substrat porte a haute temperature, une couche d'une matiere solide.
US4524718A (en) * 1982-11-22 1985-06-25 Gordon Roy G Reactor for continuous coating of glass
WO1985002418A1 (en) * 1983-12-01 1985-06-06 Shatterproof Glass Corporation Gas distribution system for sputtering cathodes
US4928627A (en) * 1985-12-23 1990-05-29 Atochem North America, Inc. Apparatus for coating a substrate
DE3869793D1 (de) * 1987-01-27 1992-05-14 Asahi Glass Co Ltd Gaszufuehrungsrohr fuer die reaktive abscheidung aus der gasphase.
US4793282A (en) * 1987-05-18 1988-12-27 Libbey-Owens-Ford Co. Distributor beam for chemical vapor deposition on glass
US5136975A (en) * 1990-06-21 1992-08-11 Watkins-Johnson Company Injector and method for delivering gaseous chemicals to a surface
DE4103413C1 (it) * 1991-02-05 1992-11-12 Gunter M. 8918 Diessen De Voss
US6379466B1 (en) * 1992-01-17 2002-04-30 Applied Materials, Inc. Temperature controlled gas distribution plate
FR2724923B1 (fr) * 1994-09-27 1996-12-20 Saint Gobain Vitrage Technique de depot de revetements par pyrolyse de composition de gaz precurseur(s)
JP3836217B2 (ja) * 1997-05-21 2006-10-25 株式会社ベルデックス 封止液供給器具および方法
CN101090998B (zh) * 2004-08-02 2013-10-16 维高仪器股份有限公司 用于化学气相沉积反应器的多气体分配喷射器
DE102006043543B4 (de) * 2006-09-12 2012-05-10 Innovent E.V. Homogenisator für der Beschichtung von Oberflächen dienende Gasströme
DE102006043542B4 (de) * 2006-09-12 2012-05-16 Innovent E.V. Verfahren zum Beschichten von Oberflächen
JP4994446B2 (ja) * 2006-12-28 2012-08-08 コリア インスティチュート オブ インダストリアル テクノロジー フォームコーティングを用いた中・高温排ガス処理用濾過体の製造方法およびこれにより製造された濾過体
JP5116313B2 (ja) * 2007-02-07 2013-01-09 東洋刃物株式会社 塗布ヘッド
JP5727368B2 (ja) * 2008-05-19 2015-06-03 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニーＥ．Ｉ．Ｄｕ Ｐｏｎｔ Ｄｅ Ｎｅｍｏｕｒｓ Ａｎｄ Ｃｏｍｐａｎｙ 電子デバイスにおける気相コーティングの装置および方法
TR201903701T4 (tr) * 2011-03-23 2019-04-22 Pilkington Group Ltd İnce film kaplamaların çöktürülmesi için düzenek ve bu düzeneğin kullanılması için çöktürme usulü.
CN102921600B (zh) * 2012-11-30 2016-04-06 贵州贵航汽车零部件股份有限公司 涂油机涂油装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3511703A (en) * 1963-09-20 1970-05-12 Motorola Inc Method for depositing mixed oxide films containing aluminum oxide
GB1282866A (en) * 1968-08-16 1972-07-26 Pilkington Brothers Ltd Improvements in or relating to the production of glass having desired surface characteristics
CH544156A (de) * 1971-04-16 1973-11-15 Bbc Brown Boveri & Cie Verfahren zur Herstellung von oxydischen Halbleiterschichten und Vorrichtung zur Durchführung des Verfahrens
US3970037A (en) * 1972-12-15 1976-07-20 Ppg Industries, Inc. Coating composition vaporizer
GB1516032A (en) * 1976-04-13 1978-06-28 Bfg Glassgroup Coating of glass
US4270702A (en) * 1978-04-26 1981-06-02 Albany International Corp. Adjustable orifice air knife
CH628600A5 (fr) * 1979-02-14 1982-03-15 Siv Soc Italiana Vetro Procede pour deposer en continu, sur la surface d'un substrat porte a haute temperature, une couche d'une matiere solide et installation pour la mise en oeuvre de ce procede.

Also Published As

Publication number Publication date
AU544964B2 (en) 1985-06-27
EP0029809B1 (fr) 1984-02-15
ES8107052A1 (es) 1981-10-01
CS274255B2 (en) 1991-04-11
CA1150749A (fr) 1983-07-26
ES497005A0 (es) 1981-10-01
DD154584A5 (de) 1982-04-07
MX153336A (es) 1986-09-22
KR830004448A (ko) 1983-07-13
JPS6148988B2 (it) 1986-10-27
PL129254B1 (en) 1984-04-30
JPS5687451A (en) 1981-07-16
AU6440480A (en) 1981-05-28
PL227980A1 (it) 1981-09-04
ZA807242B (en) 1981-11-25
DE3066643D1 (en) 1984-03-22
KR860000024Y1 (ko) 1986-01-30
SU1187705A3 (ru) 1985-10-23
US4361284A (en) 1982-11-30
EP0029809A1 (fr) 1981-06-03
CS797580A2 (en) 1990-09-12
TR21534A (tr) 1984-08-22
IT8025742A0 (it) 1980-11-03

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Legal Events

Date Code Title Description
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19931125