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IL71403A - Cryopump with rapid cooldown and increased pressure stability - Google Patents

Cryopump with rapid cooldown and increased pressure stability

Info

Publication number
IL71403A
IL71403A IL71403A IL7140384A IL71403A IL 71403 A IL71403 A IL 71403A IL 71403 A IL71403 A IL 71403A IL 7140384 A IL7140384 A IL 7140384A IL 71403 A IL71403 A IL 71403A
Authority
IL
Israel
Prior art keywords
cryopump
increased pressure
pressure stability
rapid cooldown
cooldown
Prior art date
Application number
IL71403A
Other versions
IL71403A0 (en
Original Assignee
Helix Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23913381&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=IL71403(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Helix Tech Corp filed Critical Helix Tech Corp
Publication of IL71403A0 publication Critical patent/IL71403A0/en
Publication of IL71403A publication Critical patent/IL71403A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
IL71403A 1983-04-04 1984-03-29 Cryopump with rapid cooldown and increased pressure stability IL71403A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US48178383A 1983-04-04 1983-04-04

Publications (2)

Publication Number Publication Date
IL71403A0 IL71403A0 (en) 1984-06-29
IL71403A true IL71403A (en) 1991-01-31

Family

ID=23913381

Family Applications (1)

Application Number Title Priority Date Filing Date
IL71403A IL71403A (en) 1983-04-04 1984-03-29 Cryopump with rapid cooldown and increased pressure stability

Country Status (5)

Country Link
EP (1) EP0126909B1 (en)
JP (1) JPS59218372A (en)
CA (1) CA1220948A (en)
DE (1) DE3464948D1 (en)
IL (1) IL71403A (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4555907A (en) * 1984-05-18 1985-12-03 Helix Technology Corporation Cryopump with improved second stage array
US4718241A (en) * 1985-10-31 1988-01-12 Helix Technology Corporation Cryopump with quicker adsorption
GB2191247B (en) * 1985-10-31 1989-10-11 Helix Tech Corp Cryopump with quicker adsorption
ATE72301T1 (en) * 1988-04-22 1992-02-15 Leybold Ag METHOD OF ADAPTING A TWO-STAGE REFRIGERATOR CRYOPUMP TO A SPECIFIC GAS.
JP2009250148A (en) * 2008-04-08 2009-10-29 Sumitomo Heavy Ind Ltd Cryopump and refrigerator
BR112018011208A2 (en) 2015-12-04 2018-11-21 Koninklijke Philips Nv cryogenic cooling system
CN118462540A (en) * 2023-12-05 2024-08-09 上海优尊真空设备有限公司 Low-temperature pump convenient to control

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4150549A (en) * 1977-05-16 1979-04-24 Air Products And Chemicals, Inc. Cryopumping method and apparatus
US4295338A (en) * 1979-10-18 1981-10-20 Varian Associates, Inc. Cryogenic pumping apparatus with replaceable pumping surface elements
US4311018A (en) * 1979-12-17 1982-01-19 Varian Associates, Inc. Cryogenic pump
JPS57176372A (en) * 1981-04-21 1982-10-29 Osaka Oxgen Ind Ltd Low temperature heat transmitter
US4356701A (en) * 1981-05-22 1982-11-02 Helix Technology Corporation Cryopump

Also Published As

Publication number Publication date
CA1220948A (en) 1987-04-28
IL71403A0 (en) 1984-06-29
JPH0549826B2 (en) 1993-07-27
EP0126909A2 (en) 1984-12-05
DE3464948D1 (en) 1987-08-27
EP0126909A3 (en) 1985-01-23
JPS59218372A (en) 1984-12-08
EP0126909B1 (en) 1987-07-22

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