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HK1109964A1 - Projection optical system, exposure apparatus and exposure method - Google Patents

Projection optical system, exposure apparatus and exposure method

Info

Publication number
HK1109964A1
HK1109964A1 HK08104150.0A HK08104150A HK1109964A1 HK 1109964 A1 HK1109964 A1 HK 1109964A1 HK 08104150 A HK08104150 A HK 08104150A HK 1109964 A1 HK1109964 A1 HK 1109964A1
Authority
HK
Hong Kong
Prior art keywords
exposure
optical system
projection optical
exposure apparatus
exposure method
Prior art date
Application number
HK08104150.0A
Other languages
Chinese (zh)
Inventor
Yasuhiro Omura
Takaya Okada
Hiroyuki Nagasaka
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/JP2006/309254 external-priority patent/WO2006121009A1/en
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of HK1109964A1 publication Critical patent/HK1109964A1/en

Links

HK08104150.0A 2005-05-12 2008-04-14 Projection optical system, exposure apparatus and exposure method HK1109964A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005139344 2005-05-12
PCT/JP2006/309254 WO2006121009A1 (en) 2005-05-12 2006-05-08 Projection optical system, exposure apparatus and exposure method

Publications (1)

Publication Number Publication Date
HK1109964A1 true HK1109964A1 (en) 2008-06-27

Family

ID=52570862

Family Applications (1)

Application Number Title Priority Date Filing Date
HK08104150.0A HK1109964A1 (en) 2005-05-12 2008-04-14 Projection optical system, exposure apparatus and exposure method

Country Status (1)

Country Link
HK (1) HK1109964A1 (en)

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Legal Events

Date Code Title Description
PC Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee)

Effective date: 20210508