GB9903110D0 - Method of fabricating etched structures - Google Patents
Method of fabricating etched structuresInfo
- Publication number
- GB9903110D0 GB9903110D0 GBGB9903110.6A GB9903110A GB9903110D0 GB 9903110 D0 GB9903110 D0 GB 9903110D0 GB 9903110 A GB9903110 A GB 9903110A GB 9903110 D0 GB9903110 D0 GB 9903110D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- etched structures
- fabricating
- fabricating etched
- structures
- etched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB9903110.6A GB9903110D0 (en) | 1999-02-11 | 1999-02-11 | Method of fabricating etched structures |
| CA002367064A CA2367064A1 (en) | 1999-02-11 | 2000-02-10 | Methods of fabricating etched structures |
| AU24503/00A AU765894B2 (en) | 1999-02-11 | 2000-02-10 | Methods of fabricating etched structures |
| EP00902762A EP1155440A1 (en) | 1999-02-11 | 2000-02-10 | Methods of fabricating etched structures |
| PCT/GB2000/000423 WO2000048236A1 (en) | 1999-02-11 | 2000-02-10 | Methods of fabricating etched structures |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB9903110.6A GB9903110D0 (en) | 1999-02-11 | 1999-02-11 | Method of fabricating etched structures |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB9903110D0 true GB9903110D0 (en) | 1999-04-07 |
Family
ID=10847566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GBGB9903110.6A Ceased GB9903110D0 (en) | 1999-02-11 | 1999-02-11 | Method of fabricating etched structures |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP1155440A1 (en) |
| AU (1) | AU765894B2 (en) |
| CA (1) | CA2367064A1 (en) |
| GB (1) | GB9903110D0 (en) |
| WO (1) | WO2000048236A1 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7276453B2 (en) | 2004-08-10 | 2007-10-02 | E.I. Du Pont De Nemours And Company | Methods for forming an undercut region and electronic devices incorporating the same |
| US7166860B2 (en) | 2004-12-30 | 2007-01-23 | E. I. Du Pont De Nemours And Company | Electronic device and process for forming same |
| JP7578627B2 (en) * | 2019-07-03 | 2024-11-06 | ラム リサーチ コーポレーション | Method for etching features using targeted deposition for selective passivation - Patents.com |
| CN117790300B (en) * | 2024-02-23 | 2024-04-30 | 深圳市常丰激光刀模有限公司 | Dynamic etching compensation method for fine circuit |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4201800A (en) * | 1978-04-28 | 1980-05-06 | International Business Machines Corp. | Hardened photoresist master image mask process |
| JPH03198327A (en) * | 1989-12-26 | 1991-08-29 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPH03263834A (en) * | 1990-03-14 | 1991-11-25 | Matsushita Electron Corp | Manufacture of semiconductor device |
| US5091290A (en) * | 1990-12-03 | 1992-02-25 | Micron Technology, Inc. | Process for promoting adhesion of a layer of photoresist on a substrate having a previous layer of photoresist |
| US5736457A (en) * | 1994-12-09 | 1998-04-07 | Sematech | Method of making a damascene metallization |
-
1999
- 1999-02-11 GB GBGB9903110.6A patent/GB9903110D0/en not_active Ceased
-
2000
- 2000-02-10 EP EP00902762A patent/EP1155440A1/en not_active Withdrawn
- 2000-02-10 WO PCT/GB2000/000423 patent/WO2000048236A1/en not_active Application Discontinuation
- 2000-02-10 AU AU24503/00A patent/AU765894B2/en not_active Ceased
- 2000-02-10 CA CA002367064A patent/CA2367064A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| AU765894B2 (en) | 2003-10-02 |
| EP1155440A1 (en) | 2001-11-21 |
| AU2450300A (en) | 2000-08-29 |
| CA2367064A1 (en) | 2000-08-17 |
| WO2000048236A1 (en) | 2000-08-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| AT | Applications terminated before publication under section 16(1) |